Antireflective film and exposure method

ABSTRACT

An antireflective film is provided between a resist layer and a silicon oxide layer formed on a surface of a silicon substrate, for exposure of the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 0.93 to 1.2. Assuming that the complex refractive indexes of upper and lower layers constituting the antireflective film are N 1  (=n 1 −k 1 i) and N 2  (=n 2 −k 2 i), respectively, and the thicknesses of both layers are d 1  and d 2 , when a predetermined combination of values of [n 10 , k 10 , d 10 , n 20 , k 20 , d 20 ] is selected, n 1 , k 1 , d 1 , n 2 , k 2 , and d 2  satisfy the relational expression
 
{( n   1   −n   10 )/( n   1m   −n   10 )} 2 +{( k   1   −k   10 )/( k   1m   −k   10 )} 2 +{( d   1   −d   10 )/( d   1m   −d   10 )} 2 +{( n   2   −n   20 )/( n   2m   −n   20 )} 2 +{( k   2   −k   20 )/( k   2m   −k   20 )} 2 +{( d   2   −d   20 )/( d   2m   −d   20 )} 2 ≦1.

CROSS REFERENCES TO RELATED APPLICATIONS

The present invention contains subject matter related to Japanese Patent Application JP 2005-257626 filed in the Japanese Patent Office on Sep. 6, 2005 and Japanese Patent Application JP 2006-092240 filed in the Japanese Patent Office on Feb. 15, 2006, the entire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an antireflective film used for exposure of a resist layer in a process for manufacturing a semiconductor device, and an exposure method using the antireflective film.

2. Description of the Related Art

In the field of semiconductor devices, it has been urgent to establish a new process technique permitting processing of submicron patterns of, for example, 65 nm or less. A so-called photolithographic technique may be required for processing submicron patterns, and an argon-fluoride (ArF) excimer laser at a wavelength of 193 nm is currently used as an exposure light source in order to improve optical resolution and comply with submicron processing by shortening the wavelength of exposure light (illuminating light).

A silicon semiconductor substrate is patterned using a photosensitive resist layer which is formed by applying on a surface of the silicon semiconductor substrate coated with an oxide film. However, when exposure light (illuminating light) has high reflectance at an interface between the resist layer and the silicon oxide film used as an underlying layer, a stationary wave is significantly induced in the resist layer. As a result, the sides of the resist layer patterned by development have irregularity according to the shape of the stationary wave, thereby causing the problem of failing to form a satisfactory rectangular pattern in the resist layer. The pattern formed in the resist layer may be referred to as a “resist pattern”. For example, when a resist layer having a refractive index of 1.70 is provided on a silicon oxide film of 100 nm in thickness formed on a surface of a silicon semiconductor substrate, the reflectance of exposure light at a wavelength of 193 nm is as high as about 70% in vertical incidence of the exposure light.

In order to resolve the above-mentioned problem, in a photolithographic technique using usual exposure light at a wavelength of 193 nm, a single-layer antireflective film is formed between a silicon semiconductor substrate and a resist layer. For example, when a resist layer having a refractive index of 1.70 is formed on an antireflective film having a thickness of 100 nm and a complex refractive index N₀ (=n_(o)−k₀i wherein n_(o)=1.75 and k₀=0.30), which is formed on a silicon oxide film of 100 nm in thickness formed on a surface of a silicon semiconductor substrate, the reflectance at the interface between the resist layer and the antireflective film is greatly decreased to about 1% in vertical incidence of exposure light.

SUMMARY OF THE INVENTION

The limiting resolution of a photolithographic technique is about 0.3 times the wavelength of exposure light. Therefore, in a photolithographic technique using an ArF excimer laser at a wavelength of 193 nm as an exposure light source, the limiting resolution is about 60 nm.

As a technique for forming a finer pattern of less than about 60 nm on a silicon semiconductor substrate, there has been advanced the development of an immersion lithographic technique in which a space between an exposure system (illumination system) and a resist layer is filled with a medium (e.g., an aqueous immersion light) having a higher refractive index than that of air to realize higher resolution.

Exposure through an immersion liquid is capable of achieving higher resolving performance because the effective wavelength of exposure light is a value obtained by dividing the wavelength of exposure light in a vacuum by the refractive index of the immersion liquid. For example, in the use of an ArF excimer laser at a wavelength of 193 nm as a exposure light source and water (refractive index of 1.44 at 193 nm) as the immersion liquid, the effective wavelength is about 134 nm, and the limiting resolution is 0.3 times the effective wavelength, i.e., about 40 nm. In other words, the immersion lithographic technique using water is capable of forming a micro pattern of less than about 60 nm on a silicon semiconductor substrate.

A focus tolerance (DOF) in exposure is given by the following equation: DOF=n _(Liq) ·K ₂ ·λ/NA ² wherein n_(Liq) is the refractive index of the immersion liquid, K₂ is a constant depending on the process, λ is the wavelength of exposure light (illuminating light) in a vacuum, and NA is the numerical aperture of an exposure system (illumination system).

Therefore, when the numerical aperture NA is constant, the focus tolerance DOF in immersion lithography is n_(Liq) times as large as in usual lithography by exposure in the air. Namely, immersion lithography using water as the immersion liquid has a focus tolerance DOF of 1.44 times and thus permits the construction of a mass production process with a higher tolerance.

However, such an immersion lithographic technique has the problem that a general single-layer antireflective film does not effectively function.

Exposure light is transmitted through an incident medium, incident on a resist layer, and further incident on an antireflective film. The exposure light satisfies the equation below in which θ_(in) is the angle of incidence of the exposure light from the incident medium to the resist layer, n_(in) is the refractive index of the incident medium, θ_(IF) is the angle of incidence of the exposure light from the resist layer to the silicon semiconductor substrate or the antireflective film, and n_(Res) is the refractive index of a resist material constituting the resist layer. Since, in a usual photolithographic technique, the incident medium is air, n_(in)=1, while in an immersion lithographic technique using, for example, water as the immersion liquid, n_(in)=1.44 because the incident medium is water. NA=n _(in)·sin (θ_(in))=n _(Res)·sin (θ_(IF))

This equation indicates that at constant θ_(in), the numerical aperture NA in the immersion lithographic technique is n_(Liq) times as large as in a general photolithographic technique (θ_(in)=1.0). That is, when the refractive index n_(Res) of the resist material constituting the resist layer is constant, sin(θ_(IF)) is increased. This means that in the immersion lithographic technique, θ_(IF) is increased. In other words, in the immersion lithographic technique, the exposure light is incident more obliquely, as compared with a general photolithographic technique.

On the other hand, the use of a single-layer antireflective film may sufficiently decrease the reflectance of exposure light in vertical incidence but has the problem of failing to sufficiently decrease the reflectance in oblique incidence.

When an antireflective film having a thickness of 100 nm and a complex refractive index N₀ in which n₀ and k₀ values are 1.75 and 0.30, respectively is formed on a silicon oxide film of 100 nm in thickness formed on a surface of a silicon semiconductor substrate, and a resist layer having a refractive index of 1.70 is formed on the antireflective film, the reflectance at the interface between the resist layer and the antireflective film is greatly decreased to about 1% in vertical incidence of the exposure light (i.e., incidence angle θ_(IF)=0°). However, the reflectance of s waves is greatly increased to about 6% at an incidence angle θ_(IF) of about 65°.

On the other hand, the maximum permissible value of reflectance at the interface between a resist layer and a silicon oxide film formed on a surface of a silicon semiconductor substrate yearly decreases with development of micronization. In particular, the maximum permissible value of reflectance in the micron generation to which the immersion lithographic technique is applied is as very small as 0.4% in a line-and-space pattern (Boontarika, Ozawa, Someya, Extended Abstracts of the 65th meeting of the Japan Society of Applied Physics, 2p-R-9).

In the 45-nm generation to which immersion lithography may be applied, the size of contact holes to be formed is assumed to be about 90 nm (pitch 140 nm). FIG. 1 shows the results of computation, under this condition, of the reflectance dependency of variation in the diameter of contact holes relative to the shape of a stationary wave using optical profile computing software Prolith Ver. 8.1 manufactured by KLA-Tencor Corp. on the assumption that the numerical aperture NA was 1.05 corresponding to immersion lithography.

It is desirable to suppress the variation in diameter of 90 nm contact holes to 5 nm or less. FIG. 1 indicates that the reflectance is preferably controlled to about 0.4% or less for controlling the variation to 5 nm or less.

Namely, in both a line-and-space pattern and a contact hole pattern, the reflectance is preferably suppressed to 0.4% or less.

However, in the immersion lithographic technique, exposure light may be incident obliquely on a single-layer antireflective film used in a general photolithographic technique, thereby failing to sufficiently decrease reflectance. Since the reflectance is not sufficiently decreased, a stationary wave significantly appears in the resist layer, and thus it may be impossible to resolve the problem of failing to form a satisfactory rectangular pattern in the resist layer.

Accordingly, it is desirable to provide an antireflective film capable of sufficiently decreasing the reflectance at an interface between a resist layer and a silicon oxide film formed on a surface of a silicon semiconductor substrate even in more oblique incidence of exposure light (illuminating light) on the resist layer in a photolithographic technique for achieving a higher focus tolerance by increasing the numerical aperture of an exposure system, for example, in an immersion lithographic technique, and also provide an exposure method using the antireflective film.

In accordance with a first embodiment of the invention, an antireflective film has a two-layer structure and is used in a process for manufacturing a semiconductor device by being provided between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, for exposure of the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 0.93≦NA≦1.0. In accordance with the first embodiment of the invention, an exposure method is used in a process for manufacturing a semiconductor device and includes providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 0.93≦NA≦1.0.

The antireflective film or the antireflective film used in the exposure method according to the first embodiment of the invention includes an upper layer having a complex refractive index N₁ and a lower layer having a complex refractive index N₂, the complex refractive indexes N₁ and N₂ being represented by the following equations: N ₁ =n ₁ −k ₁ i N ₂ =n ₂ −k ₂ i Assuming that the thickness of the upper layer is d₁ (unit: nm) and the thickness of the lower layer is d₂ (unit: nm), when any one of the combinations of values of [n₁₀, k₁₀, d₁₀, n₂₀, k₂₀, d₂₀] described below is selected depending on the thickness T of the silicon oxide film, n₁, k₁, d₁, n₂, k₂, and d₂ satisfy the following relational expression: {(n ₁ −n ₁₀)/(n _(1m) −n ₁₀)}²+{(k ₁ −k ₁₀)/(k _(1m) −k ₁₀)}²+{(d ₁ −d ₁₀)/(d _(1m) −d ₁₀)}²+{(n ₂ −n ₂₀)/(n _(2m) −n ₂₀)}²+{(k ₂ −k ₂₀)/(k _(2m) −k ₂₀)}²+{(d ₂ −d ₂₀)/(d _(2m) −d ₂₀)}²≦1

However, a value of n_(1m) in a corresponding case is selected on the basis of a magnitude relation between n₁ and n₁₀; a value of k_(1m) in a corresponding case is selected on the basis of a magnitude relation between k₁ and k₁₀; a value of d_(1m) in a corresponding case is selected on the basis of a magnitude relation between d₁ and d₁₀; a value of n_(2m) in a corresponding case is selected on the basis of a magnitude relation between n₂ and n₂₀; a value of k_(2m) in a corresponding case is selected on the basis of a magnitude relation between k₂ and k₂₀; and a value of d_(2m) in a corresponding case is selected on the basis of a magnitude relation between d₂ and d₂₀. In the tables below, in the line of “When n₁≧n₁₀, n_(1m)=”, each value in the right columns is “n_(1m)−n₁₀”; in the line of “When n₁<n₁₀, n_(1m)=”, each value in the right columns is “n₁₀−n_(1m)”; in the line of “When k₁≧k₁₀, k_(1m)=”, each value in the right columns is “k_(1m)−k₁₀”; in the line of “When k₁<k₁₀, k_(1m)=”, each value in the right columns is “k₁₀−k_(1m)”; in the line of “When d₁≧d₁₀, d_(1m) (nm)=”, each value (unit: nm) in the right columns is “d_(1m)−d₁₀”; in the line of “When d₁<d₁₀, d_(1m) (nm)=”, each value (unit: nm) in the right columns is “d₁₀−d_(1m)”; in the line of “When n₂≧n₂₀, n_(2m)=”, each value in the right columns is “n_(2m)−n₂₀”; in the line of “When n₂<n₂₀, n_(2m)=”, each value in the right columns is “n₂₀−n_(2m)”; in the line of “When k₂≧k₂₀, k_(2m)=” each value in the right columns is “k_(2m)−k₂₀”; in the line of “When k₂<k₂₀, k_(2m)=”, each value in the right columns is “k₂₀−k_(2m)”; in the line of “When d₂≧d₂₀, d_(2m) (nm)=”, each value (unit: nm) in the right columns is “d_(2m)−d₂₀”; and in the line of “When d₂<d₂₀, d_(2m) (nm)=”, each value (unit: nm) in the right columns is “d₂₀−d_(2m)”.

0.93 ≦ NA ≦ 1.0 2 ≦ T ≦ 15 1/35 Case 1-01 1-02 1-03 1-04 1-05 n₁₀ 2.0730 1.8547 1.8612 1.8596 1.7706 k₁₀ 0.1156 0.1676 0.1279 0.0953 0.0916 d₁₀ (nm) 23.93 29.84 20.21 19.98 91.02 n₂₀ 2.6749 2.1886 1.8193 1.8569 1.9614 k₂₀ 1.5696 0.6118 0.4029 0.3274 0.4555 d₂₀ (nm) 9.886 59.76 139.99 190.30 69.22 When n₁ ≧ n₁₀, n_(1m) = 0.0910 0.0882 0.0964 0.0950 0.0763 When n₁ < n₁₀, n_(1m) = 0.0872 0.0704 0.0762 0.0765 0.0467 When k₁ ≧ k₁₀, k_(1m) = 0.0819 0.0750 0.0869 0.0875 0.0772 When k₁ < k₁₀, k_(1m) = 0.0960 0.0840 0.0907 0.0915 0.0546 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.108 7.919 8.786 9.587 17.28 When d₁ < d₁₀, d_(1m) (nm) = 3.280 5.652 6.074 6.698 8.396 When n₂ ≧ n₂₀, n_(2m) = 0.2209 0.1796 0.1515 0.1552 0.1445 When n₂ < n₂₀, n_(2m) = 0.2126 0.1920 0.1780 0.1777 0.1565 When k₂ ≧ k₂₀, k_(2m) = 0.2324 0.2171 0.1921 0.1983 0.1809 When k₂ < k₂₀, k_(2m) = 0.1960 0.1512 0.1220 0.1107 0.1235 When d₂ ≧ d₂₀, d_(2m) (nm) = 1.715 13.99 ∞ ∞ 9.907 When d₂ < d₂₀, d_(2m) (nm) = 1.606 9.166 63.12 76.29 9.171 0.93 < NA ≦ 1.0 2 ≦ T ≦ 15 Case 1-06 1-07 1-08 1-09 1-10 n₁₀ 1.7660 1.7540 1.7206 1.7312 1.7318 k₁₀ 0.0861 0.0810 0.0766 0.0743 0.0746 d₁₀ (nm) 89.67 89.26 163.7 158.4 156.0 n₂₀ 1.8683 1.7976 2.0073 1.9328 1.8226 k₂₀ 0.3142 0.2441 0.9100 0.4029 0.2736 d₂₀ (nm) 129.4 193.6 15.11 69.39 132.3 When n₁ ≧ n₁₀, n_(1m) = 0.0725061 0.0712122 0.0876196 0.0743347 0.0699963 When n₁ < n₁₀, n_(1m) = 0.0454077 0.0429834 0.0318030 0.0375427 0.0339148 When k₁ ≧ k₁₀, k_(1m) = 0.0772620 0.0743579 0.0711646 0.0773767 0.0733899 When k₁ < k₁₀, k_(1m) = 0.0551843 0.0575049 0.0410327 0.0412244 0.0408972 When d₁ ≧ d₁₀, d_(1m) (nm) = 18.782 23.348 40.469 35.317 38.161 When d₁ < d₁₀, d_(1m) (nm) = 8.456 8.860 9.958 10.432 9.052 When n₂ ≧ n₂₀, n_(2m) = 0.1498401 0.1584961 0.1682336 0.1348816 0.1376196 When n₂ < n₂₀, n_(2m) = 0.1510144 0.1511060 0.2304688 0.1582874 0.1516028 When k₂ ≧ k₂₀, k_(2m) = 0.2049341 0.2252979 0.1710974 0.1537598 0.1868274 When k₂ < k₂₀, k_(2m) = 0.0962390 0.0820935 0.1771240 0.1169067 0.0881860 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 3.180 8.501 ∞ When d₂ < d₂₀, d_(2m) (nm) = 17.963 68.303 3.157 8.798 14.016

0.93 ≦ NA ≦ 1.0 2 ≦ T ≦ 15 2/35 Case 1-11 1-12 1-13 1-14 1-15 n₁₀ 1.7235310 1.7093992 1.7192548 1.7183512 1.7097773 k₁₀ 0.0712769 0.0595462 0.0668813 0.0690717 0.0638868 d₁₀ (nm) 155.759 237.275 223.222 220.755 221.916 n₂₀ 1.7500411 5.0249130 1.9244861 1.7884626 1.7175992 k₂₀ 0.2147794 2.4786958 0.3767470 0.2530536 0.2031308 d₂₀ (nm) 197.972 1.776 68.925 134.430 199.649 When n₁ ≧ n₁₀, n_(1m) = 0.0687000 0.1022864 0.0758325 0.0727087 0.0697119 When n₁ < n₁₀, n_(1m) = 0.0322229 0.0397070 0.0389722 0.0346118 0.0564209 When k₁ ≧ k₁₀, k_(1m) = 0.0698975 0.0795508 0.0762329 0.0700171 0.0722595 When k₁ < k₁₀, k_(1m) = 0.0415723 0.0393457 0.0338635 0.0308765 0.0321350 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 9.616 78.998 12.815 10.464 72.402 When n₂ ≧ n₂₀, n_(2m) = 0.1855957 0.5207629 0.1343335 0.1358569 0.2333704 When n₂ < n₂₀, n_(2m) = 0.1501331 0.6523560 0.1703552 0.1672083 0.1693542 When k₂ ≧ k₂₀, k_(2m) = 0.2047339 0.5424048 0.1363831 0.1710950 0.1947412 When k₂ < k₂₀, k_(2m) = 0.0758948 0.5487781 0.1192529 0.0892212 0.0778406 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 0.325 8.509 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 29.087 0.351 7.511 11.451 31.610 0.93 ≦ NA ≦ 1.0 15 < T ≦ 25 Case 2-01 2-02 2-03 2-04 2-05 n₁₀ 1.8890717 1.8040788 1.8569330 1.8246631 1.8713633 k₁₀ 0.2231211 0.2224671 0.1887211 0.1852786 0.1359350 d₁₀ (nm) 31.297 38.783 31.358 29.866 20.765 n₂₀ 2.2536461 3.4285504 2.3482559 2.0267942 1.8449284 k₂₀ 1.9138327 0.7115044 0.7139401 0.6589875 0.4410677 d₂₀ (nm) 8.426 30.090 49.395 61.419 129.533 When n₁ ≧ n₁₀, n_(1m) = 0.0874390 0.0895227 0.0867871 0.0862964 0.0944556 When n₁ < n₁₀, n_(1m) = 0.0734485 0.0679480 0.0711365 0.0665735 0.0748743 When k₁ ≧ k₁₀, k_(1m) = 0.0762256 0.0781921 0.0754639 0.0735010 0.0845789 When k₁ < k₁₀, k_(1m) = 0.0847852 0.0785486 0.0835657 0.0812061 0.0905493 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.734 7.070 7.156 8.156 8.180 When d₁ < d₁₀, d_(1m) (nm) = 4.509 5.331 5.325 5.713 5.655 When n₂ ≧ n₂₀, n_(2m) = 0.3151672 0.1904419 0.1878015 0.1893945 0.1561475 When n₂ < n₂₀, n_(2m) = 0.3095313 0.2189575 0.2044202 0.1933459 0.1801416 When k₂ ≧ k₂₀, k_(2m) = 0.3390149 0.2463513 0.2322900 0.2311047 0.2037732 When k₂ < k₂₀, k_(2m) = 0.3041187 0.1774133 0.1676416 0.1568945 0.1265381 When d₂ ≧ d₂₀, d_(2m) (nm) = 1.987 2.182 8.431 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 1.727 2.068 6.571 10.427 56.577

0.93 ≦ NA ≦ 1.0 15 < T ≦ 25 3/35 Case 2-06 2-07 2-08 2-09 2-10 n₁₀ 1.8537764 1.8773918 1.7913209 1.7961812 1.7719309 k₁₀ 0.1095380 0.0811836 0.1069315 0.0967122 0.0907051 d₁₀ (nm) 19.190 15.072 93.104 91.592 89.644 n₂₀ 1.8083352 1.7885130 2.1120296 2.2985234 1.8982310 k₂₀ 0.3385915 0.2812935 1.5705728 0.5621108 0.3437292 d₂₀ (nm) 190.096 250.952 8.709 49.876 119.550 When n₁ ≧ n₁₀, n_(1m) = 0.0970691 0.1116003 0.0785193 0.0746387 0.0710254 When n₁ < n₁₀, n_(1m) = 0.0765894 0.0899463 0.0387744 0.0446472 0.0434424 When k₁ ≧ k₁₀, k_(1m) = 0.0900769 0.1037891 0.0704041 0.0743225 0.0753088 When k₁ < k₁₀, k_(1m) = 0.0922754 0.0811836 0.0518481 0.0540869 0.0544885 When d₁ ≧ d₁₀, d_(1m) (nm) = 9.442 8.843 12.610 13.182 16.111 When d₁ < d₁₀, d_(1m) (nm) = 6.479 6.242 5.884 6.895 7.619 When n₂ ≧ n₂₀, n_(2m) = 0.1545007 0.1511414 0.2353479 0.1499768 0.1563330 When n₂ < n₂₀, n_(2m) = 0.1780847 0.1773486 0.2901843 0.1659082 0.1527185 When k₂ ≧ k₂₀, k_(2m) = 0.1867920 0.1671802 0.2909924 0.1840894 0.2027185 When k₂ < k₂₀, k_(2m) = 0.1126624 0.1034778 0.2557275 0.1387183 0.1013330 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 1.972 5.095 ∞ When d₂ < d₂₀, d_(2m) (nm) = 76.056 121.855 1.716 4.880 15.622 0.93 ≦ NA ≦ 1.0 15 < T ≦ 25 Case 2-11 2-12 2-13 2-14 2-15 n₁₀ 1.7573553 1.7321027 1.7251448 1.7347815 1.7337052 k₁₀ 0.0844391 0.0771807 0.0782108 0.0789970 0.0782079 d₁₀ (nm) 89.273 89.432 166.474 158.854 156.164 n₂₀ 1.8090385 1.7181480 2.6560327 2.0166404 1.8413069 k₂₀ 0.2599016 0.2108133 2.0752579 0.4697089 0.2975845 d₂₀ (nm) 184.203 254.601 4.495 58.957 122.955 When n₁ ≧ n₁₀, n_(1m) = 0.0699780 0.0690137 0.0832959 0.0721558 0.0683105 When n₁ < n₁₀, n_(1m) = 0.0410315 0.0429553 0.0305981 0.0341260 0.0308228 When k₁ ≧ k₁₀, k_(1m) = 0.0723608 0.0738831 0.0729456 0.0742798 0.0703467 When k₁ < k₁₀, k_(1m) = 0.0569189 0.0588879 0.0382764 0.0397253 0.0396069 When d₁ ≧ d₁₀, d_(1m) (nm) = 21.648 30.736 32.939 31.041 34.229 When d₁ < d₁₀, d_(1m) (nm) = 8.068 11.084 9.096 8.972 7.917 When n₂ ≧ n₂₀, n_(2m) = 0.1631897 0.1805151 0.3419739 0.1438672 0.1358447 When n₂ < n₂₀, n_(2m) = 0.1518018 0.1480249 0.4228455 0.1667273 0.1539514 When k₂ ≧ k₂₀, k_(2m) = 0.2316443 0.1895435 0.3584204 0.1604712 0.1864905 When k₂ < k₂₀, k_(2m) = 0.0850049 0.0772852 0.3668774 0.1323413 0.0930493 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 0.935 6.683 16.067 When d₂ < d₂₀, d_(2m) (nm) = 28.321 80.547 0.940 6.845 12.170

0.93 ≦ NA ≦ 1.0 15 < T ≦ 25 4/35 Case 2-16 2-17 2-18 2-19 2-20 n₁₀ 1.7245076 1.7100620 1.7130788 1.7208745 1.7192161 k₁₀ 0.0739010 0.0639207 0.0658962 0.0708686 0.0720786 d₁₀ (nm) 155.712 155.553 233.281 223.560 220.745 n₂₀ 1.7533528 1.6863114 3.3653368 1.9877972 1.7983405 k₂₀ 0.2275719 0.1891021 2.7431658 0.4366658 0.2740582 d₂₀ (nm) 189.273 256.528 2.501 59.393 125.643 When n₁ ≧ n₁₀, n_(1m) = 0.0671997 0.0648059 0.0864783 0.0735278 0.0707983 When n₁ < n₁₀, n_(1m) = 0.0293323 0.0484583 0.0327734 0.0316724 0.0279663 When k₁ ≧ k₁₀, k_(1m) = 0.0671045 0.0758130 0.0759729 0.0721252 0.0662109 When k₁ < k₁₀, k_(1m) = 0.0403235 0.0462146 0.0340283 0.0320007 0.0290771 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 8.393 77.190 14.014 10.040 8.344 When n₂ ≧ n₂₀, n_(2m) = 0.1922314 0.2150586 0.5377722 0.1455798 0.1365283 When n₂ < n₂₀, n_(2m) = 0.1495129 0.1388159 0.5848816 0.1787549 0.1689587 When k₂ ≧ k₂₀, k_(2m) = 0.2035803 0.1600281 0.4555420 0.1361926 0.1635962 When k₂ < k₂₀, k_(2m) = 0.0785095 0.0698242 0.5466174 0.1332434 0.0942200 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 0.540 6.979 ∞ When d₂ < d₂₀, d_(2m) (nm) = 26.645 77.267 0.568 6.255 9.480 0.93 ≦ NA ≦ 1.0 15 < T ≦ 25 Case 2-21 2-22 n₁₀ 1.7100814 1.7028062 k₁₀ 0.0661341 0.0572529 d₁₀ (nm) 221.783 219.613 n₂₀ 1.7179584 1.6741304 k₂₀ 0.2146738 0.1784680 d₂₀ (nm) 191.114 256.090 When n₁ ≧ n₁₀, n_(1m) = 0.0687488 0.0693079 When n₁ < n₁₀, n_(1m) = 0.0502954 0.0688196 When k₁ ≧ k₁₀, k_(1m) = 0.0691418 0.0820508 When k₁ < k₁₀, k_(1m) = 0.0305945 0.0409924 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 70.999 88.114 When n₂ ≧ n₂₀, n_(2m) = 0.2426611 0.2482605 When n₂ < n₂₀, n_(2m) = 0.1649829 0.1563098 When k₂ ≧ k₂₀, k_(2m) = 0.1903906 0.1488330 When k₂ < k₂₀, k_(2m) = 0.0805981 0.0682654 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 28.403 77.092

0.93 ≦ NA ≦ 1.0 25 < T ≦ 35 5/35 Case 3-01 3-02 3-03 3-04 3-05 n₁₀ 1.7462297 1.7852920 1.8064124 1.8761841 1.8732427 k₁₀ 0.2650661 0.2379686 0.2063789 0.1465026 0.1107685 d₁₀ (nm) 38.584 38.995 31.400 22.050 18.888 n₂₀ 1.8811342 3.2453891 2.0415396 1.8871554 1.8328297 k₂₀ 2.5474890 0.8215227 0.7493942 0.4863835 0.3644393 d₂₀ (nm) 6.719 29.990 55.163 118.487 179.928 When n₁ ≧ n₁₀, n_(1m) = 0.0769434 0.0851318 0.0833228 0.0906799 0.0968079 When n₁ < n₁₀, n_(1m) = 0.0572766 0.0631555 0.0636389 0.0722144 0.0767554 When k₁ ≧ k₁₀, k_(1m) = 0.0723669 0.0784412 0.0735730 0.0819336 0.0896667 When k₁ < k₁₀, k_(1m) = 0.0683887 0.0725391 0.0776208 0.0882788 0.0940442 When d₁ ≧ d₁₀, d_(1m) (nm) = 6.007 6.642 7.652 7.684 8.502 When d₁ < d₁₀, d_(1m) (nm) = 4.614 4.982 5.411 5.323 5.843 When n₂ ≧ n₂₀, n_(2m) = 0.4302271 0.2240894 0.2116187 0.1663196 0.1573621 When n₂ < n₂₀, n_(2m) = 0.3679468 0.2518726 0.2012903 0.1828064 0.1779138 When k₂ ≧ k₂₀, k_(2m) = 0.4458606 0.2938757 0.2488452 0.2239661 0.1924353 When k₂ < k₂₀, k_(2m) = 0.4071558 0.2090601 0.1700916 0.1317957 0.1155774 When d₂ ≧ d₂₀, d_(2m) (nm) = 1.849 2.793 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 1.467 2.486 8.980 27.259 71.144 0.93 ≦ NA ≦ 1.0 25 < T ≦ 35 Case 3-06 3-07 3-08 3-09 3-10 n₁₀ 1.8809997 1.8353407 1.8107063 1.7800259 1.7589519 k₁₀ 0.0844859 0.1336488 0.1074834 0.0966903 0.0885227 d₁₀ (nm) 15.636 86.851 91.200 89.638 89.033 n₂₀ 1.8003278 1.6000470 2.5616901 1.9474319 1.8081258 k₂₀ 0.2965881 1.7695220 0.6655713 0.3779800 0.2753975 d₂₀ (nm) 241.202 10.059 40.111 109.424 177.335 When n₁ ≧ n₁₀, n_(1m) = 0.1079370 0.0607556 0.0690979 0.0686230 0.0682776 When n₁ < n₁₀, n_(1m) = 0.0864404 0.0389355 0.0418872 0.0404956 0.0386047 When k₁ ≧ k₁₀, k_(1m) = 0.0999365 0.0690637 0.0736157 0.0727942 0.0702844 When k₁ < k₁₀, k_(1m) = 0.0844859 0.0492517 0.0507898 0.0531238 0.0559766 When d₁ ≧ d₁₀, d_(1m) (nm) = 8.565 8.192 11.124 13.835 18.997 When d₁ < d₁₀, d_(1m) (nm) = 5.996 4.465 5.820 6.603 7.278 When n₂ ≧ n₂₀, n_(2m) = 0.1541260 0.2930249 0.1702905 0.1595251 0.1700037 When n₂ < n₂₀, n_(2m) = 0.1764270 0.2694421 0.1785315 0.1557800 0.1515491 When k₂ ≧ k₂₀, k_(2m) = 0.1720203 0.3061462 0.2081555 0.2039343 0.2313416 When k₂ < k₂₀, k_(2m) = 0.1058716 0.3107410 0.1597290 0.1070007 0.0874585 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 2.242 3.729 17.032 ∞ When d₂ < d₂₀, d_(2m) (nm) = 115.662 2.067 3.416 13.482 26.550

0.93 ≦ NA ≦ 1.0 25 < T ≦ 35 6/35 Case 3-11 3-12 3-13 3-14 3-15 n₁₀ 1.7385561 1.7392392 1.7355979 1.7252169 1.7185486 k₁₀ 0.0961686 0.0859424 0.0828161 0.0770491 0.0788457 d₁₀ (nm) 161.111 158.474 155.982 155.656 229.847 n₂₀ 1.8448216 2.1008270 1.8545146 1.7550901 3.2610273 k₂₀ 2.2148249 0.5469970 0.3232472 0.2413910 4.4183916 d₂₀ (nm) 5.861 50.862 115.179 181.353 1.558 When n₁ ≧ n₁₀, n_(1m) = 0.0629041 0.0674426 0.0657153 0.0649670 0.0703149 When n₁ < n₁₀, n_(1m) = 0.0253882 0.0295728 0.0268335 0.0256165 0.0220850 When k₁ ≧ k₁₀, k_(1m) = 0.0668323 0.0703247 0.0663293 0.0632434 0.0659778 When k₁ < k₁₀, k_(1m) = 0.0332373 0.0369910 0.0375085 0.0384131 0.0277441 When d₁ ≧ d₁₀, d_(1m) (nm) = 20.469 26.314 30.753 47.147 42.683 When d₁ < d₁₀, d_(1m) (nm) = 5.969 7.197 6.584 7.042 7.213 When n₂ ≧ n₂₀, n_(2m) = 0.3836914 0.1608313 0.1425024 0.2021899 0.7624707 When n₂ < n₂₀, n_(2m) = 0.3601526 0.1749219 0.1554919 0.1482849 0.7156897 When k₂ ≧ k₂₀, k_(2m) = 0.3156946 0.1638635 0.1816882 0.2013940 0.5159863 When k₂ < k₂₀, k_(2m) = 0.4014783 0.1464551 0.0974072 0.0811682 0.8313574 When d₂ ≧ d₂₀, d_(2m) (nm) = 1.291 5.616 13.990 ∞ 0.296 When d₂ < d₂₀, d_(2m) (nm) = 1.319 5.535 10.236 24.868 0.387 0.93 ≦ NA ≦ 1.0 25 < T ≦ 35 Case 3-16 3-17 3-18 n₁₀ 1.7228369 1.7199449 1.7101979 k₁₀ 0.0769315 0.0760859 0.0687675 d₁₀ (nm) 222.858 220.491 221.639 n₂₀ 2.0210736 1.8037789 1.7165312 k₂₀ 0.5011654 0.2965908 0.2274377 d₂₀ (nm) 52.892 118.134 183.246 When n₁ ≧ n₁₀, n_(1m) = 0.0694470 0.0680798 0.0669543 When n₁ < n₁₀, n_(1m) = 0.0241309 0.0211279 0.0442908 When k₁ ≧ k₁₀, k_(1m) = 0.0659106 0.0606384 0.0650562 When k₁ < k₁₀, k_(1m) = 0.0287354 0.0259912 0.0284460 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 7.193 6.146 69.475 When n₂ ≧ n₂₀, n_(2m) = 0.1641553 0.1445947 0.2568982 When n₂ < n₂₀, n_(2m) = 0.1866541 0.1696143 0.1583826 When k₂ ≧ k₂₀, k_(2m) = 0.1286877 0.1503394 0.1843665 When k₂ < k₂₀, k_(2m) = 0.1457922 0.0990405 0.0813123 When d₂ ≧ d₂₀, d_(2m) (nm) = 6.290 17.763 ∞ When d₂ < d₂₀, d_(2m) (nm) = 5.002 7.323 26.072

0.93 ≦ NA ≦ 1.0 35 < T ≦ 45 7/35 Case 4-01 4-02 4-03 4-04 4-05 n₁₀ 1.8047095 1.8098021 1.8915289 1.8869810 1.8679863 k₁₀ 0.2694194 0.2379756 0.1677232 0.1583242 0.1633407 d₁₀ (nm) 36.421 31.711 26.420 22.598 22.571 n₂₀ 2.9911125 2.1295160 2.1348336 1.9270572 1.8682373 k₂₀ 1.0218786 0.9059492 0.5678980 0.5352831 0.5190358 d₂₀ (nm) 30.087 46.199 93.459 108.068 112.596 When n₁ ≧ n₁₀, n_(1m) = 0.0783740 0.0796436 0.0844666 0.0882751 0.0886218 When n₁ < n₁₀, n_(1m) = 0.0596716 0.0601453 0.0678638 0.0698572 0.0685303 When k₁ ≧ k₁₀, k_(1m) = 0.0745129 0.0734180 0.0774060 0.0809473 0.0815564 When k₁ < k₁₀, k_(1m) = 0.0737073 0.0756104 0.0846094 0.0871533 0.0855286 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.498 6.440 6.660 7.044 7.454 When d₁ < d₁₀, d_(1m) (nm) = 4.112 4.536 4.657 4.822 5.013 When n₂ ≧ n₂₀, n_(2m) = 0.2827258 0.2488782 0.2107483 0.1777197 0.1733423 When n₂ < n₂₀, n_(2m) = 0.2979187 0.2268945 0.2048547 0.1904834 0.1888538 When k₂ ≧ k₂₀, k_(2m) = 0.3686462 0.2854443 0.2568164 0.2416882 0.2270508 When k₂ < k₂₀, k_(2m) = 0.2566187 0.1919458 0.1493335 0.1371973 0.1348743 When d₂ ≧ d₂₀, d_(2m) (nm) = 4.536 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 3.441 7.549 17.368 24.447 26.666 0.93 ≦ NA ≦ 1.0 35 < T ≦ 45 Case 4-06 4-07 4-08 4-09 4-10 n₁₀ 1.8894047 1.9013640 1.7974174 1.7778270 1.7589001 k₁₀ 0.1134244 0.0821095 0.1211843 0.1038067 0.0931193 d₁₀ (nm) 18.623 14.880 88.331 88.747 88.775 n₂₀ 1.8513003 1.8106171 2.0615819 1.9023003 1.8006679 k₂₀ 0.3877744 0.3102506 0.7049601 0.4013081 0.2880356 d₂₀ (nm) 170.528 232.433 48.141 106.512 170.885 When n₁ ≧ n₁₀, n_(1m) = 0.0963379 0.1102368 0.0634644 0.0662390 0.0666211 When n₁ < n₁₀, n_(1m) = 0.0760864 0.0881848 0.0372961 0.0368457 0.0352515 When k₁ ≧ k₁₀, k_(1m) = 0.0891541 0.1015222 0.0717737 0.0709473 0.0673779 When k₁ < k₁₀, k_(1m) = 0.0954272 0.0821095 0.0478455 0.0509119 0.0546045 When d₁ ≧ d₁₀, d_(1m) (nm) = 7.796 7.721 10.517 12.746 16.898 When d₁ < d₁₀, d_(1m) (nm) = 5.302 5.383 5.078 5.794 6.421 When n₂ ≧ n₂₀, n_(2m) = 0.1607617 0.1549121 0.2063647 0.1805920 0.1791541 When n₂ < n₂₀, n_(2m) = 0.1802881 0.1767310 0.1869873 0.1622900 0.1552356 When k₂ ≧ k₂₀, k_(2m) = 0.1971570 0.1718066 0.1998254 0.2205994 0.2284485 When k₂ < k₂₀, k_(2m) = 0.1177856 0.1071863 0.1537903 0.1082654 0.0890710 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 7.208 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 68.041 110.260 5.967 13.288 26.909

0.93 ≦ NA ≦ 1.0 35 < T ≦ 45 8/35 Case 4-11 4-12 4-13 4-14 4-15 n₁₀ 1.7310401 1.7404520 1.7353985 1.7244370 1.7094852 k₁₀ 0.0827558 0.0960720 0.0882239 0.0802890 0.0677575 d₁₀ (nm) 89.146 155.339 154.960 155.397 155.056 n₂₀ 1.7041670 1.9461112 1.8293633 1.7457172 1.6751093 k₂₀ 0.2282102 0.5942640 0.3421815 0.2519901 0.2044537 d₂₀ (nm) 240.157 50.887 110.529 174.646 241.084 When n₁ ≧ n₁₀, n_(1m) = 0.0658081 0.0609131 0.0631018 0.0626184 0.0606677 When n₁ < n₁₀, n_(1m) = 0.0392627 0.0232361 0.0219373 0.0213806 0.0433704 When k₁ ≧ k₁₀, k_(1m) = 0.0703406 0.0642554 0.0612463 0.0585852 0.0715100 When k₁ < k₁₀, k_(1m) = 0.0569983 0.0328662 0.0342212 0.0355737 0.0444800 When d₁ ≧ d₁₀, d_(1m) (nm) = 25.085 16.735 27.723 38.964 ∞ When d₁ < d₁₀, d_(1m) (nm) = 9.551 5.135 5.136 5.707 18.661 When n₂ ≧ n₂₀, n_(2m) = 0.1952173 0.1934106 0.1684375 0.2170105 0.2364917 When n₂ < n₂₀, n_(2m) = 0.1461670 0.1873682 0.1611987 0.1494055 0.1341663 When k₂ ≧ k₂₀, k_(2m) = 0.1811243 0.1365161 0.1602917 0.1917432 0.1477625 When k₂ < k₂₀, k_(2m) = 0.0805774 0.1412585 0.0980115 0.0826819 0.0722742 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 6.877 15.552 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 77.061 5.982 8.340 24.666 73.559 0.93 ≦ NA ≦ 1.0 35 < T ≦ 45 Case 4-16 4-17 4-18 4-19 4-20 n₁₀ 1.7305468 1.7234847 1.7196555 1.7094719 1.7026367 k₁₀ 0.1083688 0.0859582 0.0809985 0.0713058 0.0605694 d₁₀ (nm) 224.105 219.529 219.492 221.454 219.016 n₂₀ 3.7612310 1.8940064 1.7865237 1.7085534 1.6670562 k₂₀ 9.7520181 0.5381566 0.3130643 0.2375210 0.1929642 d₂₀ (nm) 0.557 52.122 112.555 175.858 239.742 When n₁ ≧ n₁₀, n_(1m) = 0.0498926 0.0642505 0.0656738 0.0636218 0.0649512 When n₁ < n₁₀, n_(1m) = 0.0031824 0.0153259 0.0138647 0.0294287 0.0615662 When k₁ ≧ k₁₀, k_(1m) = 0.0271924 0.0553479 0.0526111 0.0605078 0.0781384 When k₁ < k₁₀, k_(1m) = 0.0108813 0.0230212 0.0207922 0.0257751 0.0395862 When d₁ ≧ d₁₀, d_(1m) (nm) = 12.324 42.526 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 0.823 4.181 3.891 14.979 80.387 When n₂ ≧ n₂₀, n_(2m) = 0.4580664 0.1955493 0.1665735 0.2757410 0.2666089 When n₂ < n₂₀, n_(2m) = 1.0705701 0.1254541 0.1755249 0.1566431 0.1466138 When k₂ ≧ k₂₀, k_(2m) = 0.1823242 0.0953308 0.1233594 0.1752612 0.1390967 When k₂ < k₂₀, k_(2m) = 1.8675439 0.1410535 0.1010315 0.0760974 0.0711597 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.019 7.428 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 0.155 3.724 4.890 25.232 73.082

0.93 ≦ NA ≦ 1.0 45 < T ≦ 55 9/35 Case 5-01 5-02 5-03 5-04 5-05 n₁₀ 1.7952075 1.8907711 1.9054716 1.9347861 1.9562331 k₁₀ 0.2631488 0.1709411 0.1139096 0.0660701 0.1018371 d₁₀ (nm) 28.407 22.060 18.051 14.149 10.504 n₂₀ 1.7975159 1.9054700 1.8637077 1.8512928 1.7371318 k₂₀ 0.9080589 0.5625340 0.4032117 0.3248351 0.3049135 d₂₀ (nm) 49.215 101.512 161.182 218.499 238.789 When n₁ ≧ n₁₀, n_(1m) = 0.0796008 0.0882104 0.0968323 0.1120276 0.1430420 When n₁ < n₁₀, n_(1m) = 0.0558337 0.0676855 0.0756775 0.0900916 0.1115369 When k₁ ≧ k₁₀, k_(1m) = 0.0737183 0.0824512 0.0899622 0.1015723 0.1322839 When k₁ < k₁₀, k_(1m) = 0.0714771 0.0859058 0.0970459 0.0660701 0.1018371 When d₁ ≧ d₁₀, d_(1m) (nm) = 6.136 6.696 7.231 6.738 5.941 When d₁ < d₁₀, d_(1m) (nm) = 3.959 4.421 4.830 4.663 4.082 When n₂ ≧ n₂₀, n_(2m) = 0.2206628 0.1836475 0.1640088 0.1560229 0.1493176 When n₂ < n₂₀, n_(2m) = 0.2514893 0.2026611 0.1850330 0.1781982 0.1793958 When k₂ ≧ k₂₀, k_(2m) = 0.2648120 0.2363086 0.1980701 0.1765576 0.1456726 When k₂ < k₂₀, k_(2m) = 0.1661694 0.1390979 0.1188672 0.1083618 0.1075342 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 11.142 25.966 67.131 101.947 116.324 0.93 ≦ NA ≦ 1.0 45 < T ≦ 55 Case 5-06 5-07 5-08 5-09 5-10 n₁₀ 1.7844085 1.7702622 1.7541370 1.7279592 1.7375980 k₁₀ 0.1367381 0.1105738 0.0973387 0.0846136 0.1054836 d₁₀ (nm) 84.299 87.211 88.132 88.943 150.710 n₂₀ 1.7096132 1.8115599 1.7670571 1.6883751 1.7055974 k₂₀ 0.6495191 0.4022198 0.2903421 0.2308596 0.5608974 d₂₀ (nm) 54.242 106.122 167.020 233.281 53.799 When n₁ ≧ n₁₀, n_(1m) = 0.0647021 0.0659351 0.0664050 0.0646069 0.0607947 When n₁ < n₁₀, n_(1m) = 0.0336169 0.0333887 0.0319458 0.0381165 0.0178674 When k₁ ≧ k₁₀, k_(1m) = 0.0728796 0.0707520 0.0653967 0.0692603 0.0616235 When k₁ < k₁₀, k_(1m) = 0.0421851 0.0477087 0.0524451 0.0553516 0.0270422 When d₁ ≧ d₁₀, d_(1m) (nm) = 9.564 12.156 16.406 23.344 13.595 When d₁ < d₁₀, d_(1m) (nm) = 4.227 5.119 5.747 9.303 3.589 When n₂ ≧ n₂₀, n_(2m) = 0.2254211 0.1928967 0.1889099 0.2061182 0.2563867 When n₂ < n₂₀, n_(2m) = 0.1907227 0.1764453 0.1616943 0.1463477 0.1201587 When k₂ ≧ k₂₀, k_(2m) = 0.1398059 0.1815479 0.2086975 0.1714539 0.0974426 When k₂ < k₂₀, k_(2m) = 0.1320325 0.1038733 0.0888391 0.0812170 0.1216650 When d₂ ≧ d₂₀, d_(2m) (nm) = 14.246 ∞ ∞ ∞ 10.184 When d₂ < d₂₀, d_(2m) (nm) = 7.856 11.965 30.548 77.806 4.856

0.93 ≦ NA ≦ 1.0 45 < T ≦ 55 10/35 Case 5-11 5-12 5-13 5-14 5-15 n₁₀ 1.7329681 1.7221048 1.7083331 1.7220084 1.7182277 k₁₀ 0.0932680 0.0829100 0.0687145 0.0940320 0.0857940 d₁₀ (nm) 153.145 154.966 154.712 214.741 217.589 n₂₀ 1.7707311 1.7249696 1.6656993 1.7051250 1.7452872 k₂₀ 0.3436851 0.2554267 0.2071468 0.5097600 0.3145186 d₂₀ (nm) 107.979 168.643 233.037 53.504 108.615 When n₁ ≧ n₁₀, n_(1m) = 0.0625659 0.0612402 0.0592444 0.0643567 0.0658276 When n₁ < n₁₀, n_(1m) = 0.0170984 0.0172632 0.0416833 0.0078064 0.0068054 When k₁ ≧ k₁₀, k_(1m) = 0.0565161 0.0540405 0.0705188 0.0454688 0.0426636 When k₁ < k₁₀, k_(1m) = 0.0297095 0.0318542 0.0432507 0.0149841 0.0129956 When d₁ ≧ d₁₀, d_(1m) (nm) = 26.425 34.880 ∞ 35.694 ∞ When d₁ < d₁₀, d_(1m) (nm) = 3.834 4.536 17.051 1.969 1.835 When n₂ ≧ n₂₀, n_(2m) = 0.2299866 0.2362512 0.2473572 0.2585364 0.2705701 When n₂ < n₂₀, n_(2m) = 0.1752441 0.1521826 0.1336328 0.0467419 0.0530518 When k₂ ≧ k₂₀, k_(2m) = 0.1260229 0.1759094 0.1395569 0.0560938 0.0808508 When k₂ < k₂₀, k_(2m) = 0.0941040 0.0829492 0.0726111 0.1239917 0.0993604 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 10.256 ∞ When d₂ < d₂₀, d_(2m) (nm) = 6.312 26.413 73.432 2.024 2.346 0.93 ≦ NA ≦ 1.0 45 < T ≦ 55 Case 5-16 5-17 n₁₀ 1.7079026 1.7021324 k₁₀ 0.0731017 0.0613637 d₁₀ (nm) 221.285 218.642 n₂₀ 1.6934483 1.6620357 k₂₀ 0.2412999 0.1957858 d₂₀ (nm) 168.585 230.920 When n₁ ≧ n₁₀, n_(1m) = 0.0611572 0.0632739 When n₁ < n₁₀, n_(1m) = 0.0235156 0.0581824 When k₁ ≧ k₁₀, k_(1m) = 0.0566406 0.0776050 When k₁ < k₁₀, k_(1m) = 0.0230566 0.0386719 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 8.641 78.699 When n₂ ≧ n₂₀, n_(2m) = 0.2946387 0.2760742 When n₂ < n₂₀, n_(2m) = 0.1554272 0.1463647 When k₂ ≧ k₂₀, k_(2m) = 0.1654895 0.1344739 When k₂ < k₂₀, k_(2m) = 0.0676013 0.0719324 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 26.199 53.085

0.93 ≦ NA ≦ 1.0 55 < T ≦ 65 11/35 Case 6-01 6-02 6-03 6-04 6-05 n₁₀ 1.7605068 1.8816347 1.9020430 1.9458467 1.9584022 k₁₀ 0.2771672 0.1829378 0.1268282 0.0703715 0.1032605 d₁₀ (nm) 28.706 20.725 16.538 13.048 10.534 n₂₀ 1.6786286 1.8151288 1.7976518 1.8275971 1.7382432 k₂₀ 0.9008770 0.5496963 0.3935708 0.3251874 0.3086817 d₂₀ (nm) 43.735 99.755 160.685 213.311 229.129 When n₁ ≧ n₁₀, n_(1m) = 0.0840430 0.0931677 0.1035986 0.1192371 0.1431311 When n₁ < n₁₀, n_(1m) = 0.0576428 0.0681458 0.0779578 0.0939172 0.1097058 When k₁ ≧ k₁₀, k_(1m) = 0.0662097 0.0857654 0.0958630 0.1068726 0.1305750 When k₁ < k₁₀, k_(1m) = 0.0706262 0.0861902 0.1004041 0.0703715 0.1032605 When d₁ ≧ d₁₀, d_(1m) (nm) = 6.461 6.864 7.218 6.428 5.908 When d₁ < d₁₀, d_(1m) (nm) = 4.241 4.337 4.665 4.365 3.988 When n₂ ≧ n₂₀, n_(2m) = 0.2053870 0.1760388 0.1592407 0.1556714 0.1505713 When n₂ < n₂₀, n_(2m) = 0.2197400 0.2099182 0.1887061 0.1809558 0.1813904 When k₂ ≧ k₂₀, k_(2m) = 0.2532373 0.2078381 0.1779785 0.1687073 0.1458105 When k₂ < k₂₀, k_(2m) = 0.1729968 0.1382983 0.1186841 0.1101477 0.1094250 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 9.750 24.367 71.258 104.445 116.852 0.93 ≦ NA ≦ 1.0 55 < T ≦ 65 Case 6-06 6-07 6-08 6-09 6-10 n₁₀ 1.7915017 1.7682864 1.7517777 1.7257399 1.7391311 k₁₀ 0.1460711 0.1152280 0.1000283 0.0854213 0.1111219 d₁₀ (nm) 82.108 86.246 87.803 88.823 148.271 n₂₀ 1.6599684 1.7730752 1.7495420 1.6774661 1.6415570 k₂₀ 0.6598461 0.3999868 0.2902721 0.2313191 0.5493559 d₂₀ (nm) 47.036 100.473 159.986 224.881 47.977 When n₁ ≧ n₁₀, n_(1m) = 0.0707507 0.0678174 0.0671436 0.0642444 0.0613611 When n₁ < n₁₀, n_(1m) = 0.0347034 0.0316797 0.0297241 0.0379114 0.0170081 When k₁ ≧ k₁₀, k_(1m) = 0.0716638 0.0707349 0.0637610 0.0688733 0.0614063 When k₁ < k₁₀, k_(1m) = 0.0419373 0.0459045 0.0509448 0.0544250 0.0258569 When d₁ ≧ d₁₀, d_(1m) (nm) = 8.814 11.596 15.946 22.736 12.264 When d₁ < d₁₀, d_(1m) (nm) = 3.999 4.706 5.289 9.347 3.219 When n₂ ≧ n₂₀, n_(2m) = 0.2110352 0.2040027 0.1980566 0.2150256 0.2303101 When n₂ < n₂₀, n_(2m) = 0.1684949 0.1890479 0.1666223 0.1461719 0.0970691 When k₂ ≧ k₂₀, k_(2m) = 0.1438293 0.1667627 0.2003491 0.1648621 0.0994629 When k₂ < k₂₀, k_(2m) = 0.1447302 0.1052173 0.0896777 0.0819421 0.1292871 When d₂ ≧ d₂₀, d_(2m) (nm) = 15.339 ∞ ∞ ∞ 12.574 When d₂ < d₂₀, d_(2m) (nm) = 6.489 10.552 32.474 78.570 4.088

0.93 ≦ NA ≦ 1.0 55 < T ≦ 65 12/35 Case 6-11 6-12 6-13 6-14 6-15 n₁₀ 1.7320844 1.7076855 1.7203924 1.7223192 1.7173463 k₁₀ 0.0968192 0.0689521 0.0842770 0.0985051 0.0890019 d₁₀ (nm) 152.055 154.586 154.911 212.081 216.420 n₂₀ 1.7411899 1.6612710 1.7118542 1.6387426 1.7205682 k₂₀ 0.3409343 0.2081961 0.2561923 0.4904233 0.3116849 d₂₀ (nm) 101.751 223.547 160.544 48.284 102.035 When n₁ ≧ n₁₀, n_(1m) = 0.0640808 0.0590295 0.0609424 0.0598975 0.0677930 When n₁ < n₁₀, n_(1m) = 0.0141614 0.0412158 0.0147046 0.0053711 0.0022900 When k₁ ≧ k₁₀, k_(1m) = 0.0532275 0.0702893 0.0510400 0.0410706 0.0340332 When k₁ < k₁₀, k_(1m) = 0.0265625 0.0427490 0.0291602 0.0117297 0.0056226 When d₁ ≧ d₁₀, d_(1m) (nm) = 25.992 ∞ 33.192 33.998 50.996 When d₁ < d₁₀, d_(1m) (nm) = 3.082 16.525 3.853 1.301 0.604 When n₂ ≧ n₂₀, n_(2m) = 0.2268713 0.2531177 0.2476831 0.2556775 0.2704236 When n₂ < n₂₀, n_(2m) = 0.1878772 0.1338721 0.1536694 0.0287537 0.0146338 When k₂ ≧ k₂₀, k_(2m) = 0.1099695 0.1355603 0.1692993 0.0485706 0.0433569 When k₂ < k₂₀, k_(2m) = 0.0948242 0.0734631 0.0770691 0.1286780 0.0774121 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 12.209 ∞ When d₂ < d₂₀, d_(2m) (nm) = 4.972 56.744 27.273 1.327 0.772 0.93 ≦ NA ≦ 1.0 55 < T ≦ 65 Case 6-16 6-17 n₁₀ 1.7068337 1.7019545 k₁₀ 0.0738736 0.0615388 d₁₀ (nm) 221.446 218.498 n₂₀ 1.6845656 1.6606500 k₂₀ 0.2425094 0.1970435 d₂₀ (nm) 159.621 220.941 When n₁ ≧ n₁₀, n_(1m) = 0.0603540 0.0631677 When n₁ < n₁₀, n_(1m) = 0.0209692 0.0568018 When k₁ ≧ k₁₀, k_(1m) = 0.0545837 0.0777637 When k₁ < k₁₀, k_(1m) = 0.0216589 0.0384106 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 7.750 78.234 When n₂ ≧ n₂₀, n_(2m) = 0.3057288 0.2826660 When n₂ < n₂₀, n_(2m) = 0.1553943 0.1472412 When k₂ ≧ k₂₀, k_(2m) = 0.1625220 0.1326501 When k₂ < k₂₀, k_(2m) = 0.0624280 0.0731104 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 26.805 48.201

0.93 ≦ NA ≦ 1.0 65 < T ≦ 75 13/35 Case 7-01 7-02 7-03 7-04 7-05 n₁₀ 1.7659038 1.8645399 1.8986420 1.9431410 1.8260230 k₁₀ 0.3040912 0.1945245 0.1330684 0.1068639 0.1610409 d₁₀ (nm) 29.683 22.504 17.099 11.420 82.141 n₂₀ 1.6951746 1.8232494 1.7981378 1.7406778 1.8123655 k₂₀ 1.0159152 0.5745287 0.4053118 0.3159076 0.8416018 d₂₀ (nm) 32.660 88.735 150.314 217.432 29.750 When n₁ ≧ n₁₀, n_(1m) = 0.0851306 0.0913562 0.1021387 0.1343896 0.0697156 When n₁ < n₁₀, n_(1m) = 0.0579541 0.0649255 0.0759912 0.1029980 0.0329614 When k₁ ≧ k₁₀, k_(1m) = 0.0588293 0.0796277 0.0923560 0.1221460 0.0674365 When k₁ < k₁₀, k_(1m) = 0.0718896 0.0854541 0.0996875 0.1068639 0.0435559 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.966 7.118 7.275 6.222 7.298 When d₁ < d₁₀, d_(1m) (nm) = 4.222 4.395 4.641 4.200 3.443 When n₂ ≧ n₂₀, n_(2m) = 0.2227673 0.1853540 0.1622253 0.1538269 0.2762463 When n₂ < n₂₀, n_(2m) = 0.2074731 0.2178162 0.1908838 0.1813525 0.2757544 When k₂ ≧ k₂₀, k_(2m) = 0.3106860 0.2340100 0.1838708 0.1497839 0.2030774 When k₂ < k₂₀, k_(2m) = 0.2037939 0.1485229 0.1235767 0.1116138 0.1923645 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 12.449 When d₂ < d₂₀, d_(2m) (nm) = 7.750 24.931 70.207 113.565 5.408 0.93 ≦ NA ≦ 1.0 65 < T ≦ 75 Case 7-06 7-07 7-08 7-09 7-10 n₁₀ 1.7771488 1.7544343 1.7270080 1.7474077 1.7344421 k₁₀ 0.1183021 0.1010010 0.0859818 0.1187907 0.0986199 d₁₀ (nm) 86.874 88.257 88.900 148.872 153.031 n₂₀ 1.8193233 1.7618403 1.6808707 1.6925268 1.7617910 k₂₀ 0.4301648 0.3008540 0.2360835 0.6251022 0.3597954 d₂₀ (nm) 86.325 147.888 214.142 34.244 89.143 When n₁ ≧ n₁₀, n_(1m) = 0.0673694 0.0664294 0.0644080 0.0590649 0.0632410 When n₁ < n₁₀, n_(1m) = 0.0307617 0.0294727 0.0379211 0.0149548 0.0133545 When k₁ ≧ k₁₀, k_(1m) = 0.0672144 0.0623938 0.0685620 0.0548840 0.0510083 When k₁ < k₁₀, k_(1m) = 0.0467444 0.0514600 0.0549805 0.0255261 0.0262878 When d₁ ≧ d₁₀, d_(1m) (nm) = 10.761 15.121 22.543 10.466 24.985 When d₁ < d₁₀, d_(1m) (nm) = 4.433 5.189 9.219 2.761 2.901 When n₂ ≧ n₂₀, n_(2m) = 0.2196216 0.2049475 0.2147473 0.2786914 0.2464575 When n₂ < n₂₀, n_(2m) = 0.1907739 0.1643323 0.1459814 0.1244519 0.1858276 When k₂ ≧ k₂₀, k_(2m) = 0.1969482 0.2144763 0.1668457 0.1106995 0.1237866 When k₂ < k₂₀, k_(2m) = 0.1161511 0.0943396 0.0836194 0.1556311 0.1032104 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 9.505 ∞ When d₂ < d₂₀, d_(2m) (nm) = 10.265 27.730 76.727 3.667 4.914

0.93 ≦ NA ≦ 1.0 65 < T ≦ 75 14/35 Case 7-11 7-12 7-13 7-14 7-15 7-16 n₁₀ 1.7082851 1.7212227 1.7256274 1.7180408 1.7074443 1.7023147 k₁₀ 0.0693971 0.0845898 0.1038247 0.0895343 0.0742263 0.0619030 d₁₀ (nm) 154.668 155.411 212.824 218.202 221.707 218.598 n₂₀ 1.6632564 1.7183974 1.6530934 1.7315716 1.6896767 1.6620389 k₂₀ 0.2120421 0.2642962 0.5317369 0.3280557 0.2496384 0.2005572 d₂₀ (nm) 213.175 149.129 36.133 89.506 148.627 210.752 When n₁ ≧ n₁₀, n_(1m) = 0.0593945 0.0606384 0.0541980 0.0647742 0.0609387 0.0637036 When n₁ < n₁₀, n_(1m) = 0.0413879 0.0149182 0.0029968 0.0021960 0.0208508 0.0577161 When k₁ ≧ k₁₀, k_(1m) = 0.0699487 0.0507495 0.0335364 0.0342871 0.0542102 0.0772327 When k₁ < k₁₀, k_(1m) = 0.0433142 0.0298535 0.0082080 0.0055542 0.0221802 0.0389124 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ 32.689 15.980 48.365 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 16.649 3.913 0.723 0.594 7.641 78.427 When n₂ ≧ n₂₀, n_(2m) = 0.2553577 0.2564221 0.2715186 0.1988367 0.3137769 0.2845728 When n₂ < n₂₀, n_(2m) = 0.1341199 0.1522119 0.0214917 0.0208643 0.1570667 0.1478259 When k₂ ≧ k₂₀, k_(2m) = 0.1361841 0.1775061 0.0327844 0.0526038 0.1632751 0.1321912 When k₂ < k₂₀, k_(2m) = 0.0749841 0.0809204 0.1462024 0.0801404 0.0667383 0.0745581 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 9.604 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 57.367 24.447 0.813 0.826 24.310 48.632

0.93 ≦ NA ≦ 1.0 75 < T ≦ 85 15/35 Case 8-01 8-02 8-03 8-04 8-05 n₁₀ 1.7563588 1.8511230 1.8843188 1.9287462 1.8353218 k₁₀ 0.3324096 0.2092311 0.1443736 0.1105115 0.1759033 d₁₀ (nm) 35.374 25.991 18.736 12.655 87.389 n₂₀ 1.9274523 1.9063465 1.8018968 1.7494498 2.1171648 k₂₀ 1.4642575 0.6506745 0.4300566 0.3311673 1.3140425 d₂₀ (nm) 17.251 73.686 139.851 205.772 13.979 When n₁ ≧ n₁₀, n_(1m) = 0.0785156 0.0867322 0.0972815 0.1243994 0.0679163 When n₁ < n₁₀, n_(1m) = 0.0545728 0.0619702 0.0719873 0.0956885 0.0326843 When k₁ ≧ k₁₀, k_(1m) = 0.0474365 0.0710938 0.0861206 0.1128003 0.0573657 When k₁ < k₁₀, k_(1m) = 0.0515906 0.0859790 0.0958850 0.1105115 0.0462488 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.195 7.048 7.475 6.554 6.786 When d₁ < d₁₀, d_(1m) (nm) = 4.054 4.401 4.771 4.433 3.439 When n₂ ≧ n₂₀, n_(2m) = 0.3717346 0.2089124 0.1658667 0.1550732 0.3935315 When n₂ < n₂₀, n_(2m) = 0.2566504 0.2226855 0.1899609 0.1803442 0.3930750 When k₂ ≧ k₂₀, k_(2m) = 0.3327271 0.2900549 0.1962512 0.1555261 0.4058423 When k₂ < k₂₀, k_(2m) = 0.2814465 0.1644043 0.1285254 0.1140686 0.2980408 When d₂ ≧ d₂₀, d_(2m) (nm) = 7.242 ∞ ∞ ∞ 4.246 When d₂ < d₂₀, d_(2m) (nm) = 5.453 18.064 63.635 86.244 4.110 0.93 ≦ NA ≦ 1.0 75 < T ≦ 85 Case 8-06 8-07 8-08 8-09 8-10 n₁₀ 1.7950810 1.7627960 1.7313791 1.7608801 1.7394221 k₁₀ 0.1221034 0.1022278 0.0877850 0.1266208 0.0996664 d₁₀ (nm) 88.670 88.862 88.999 153.509 155.305 n₂₀ 1.9787137 1.8048095 1.6945552 1.9275665 1.8479873 k₂₀ 0.5126318 0.3274205 0.2478313 0.9887124 0.4176577 d₂₀ (nm) 67.257 133.479 202.902 15.987 72.839 When n₁ ≧ n₁₀, n_(1m) = 0.0661450 0.0654504 0.0644836 0.0595581 0.0618579 When n₁ < n₁₀, n_(1m) = 0.0313049 0.0305920 0.0369946 0.0131787 0.0145801 When k₁ ≧ k₁₀, k_(1m) = 0.0629285 0.0615845 0.0676172 0.0466980 0.0504663 When k₁ < k₁₀, k_(1m) = 0.0495715 0.0531104 0.0563220 0.0260303 0.0287866 When d₁ ≧ d₁₀, d_(1m) (nm) = 9.764 13.747 21.746 9.118 15.633 When d₁ < d₁₀, d_(1m) (nm) = 4.261 5.184 8.521 2.425 3.180 When n₂ ≧ n₂₀, n_(2m) = 0.1949426 0.2017102 0.2072998 0.3193018 0.1671875 When n₂ < n₂₀, n_(2m) = 0.1905188 0.1606116 0.1458716 0.3499829 0.1826196 When k₂ ≧ k₂₀, k_(2m) = 0.2324365 0.2397180 0.1749133 0.1658679 0.1587329 When k₂ < k₂₀, k_(2m) = 0.1375964 0.1005615 0.0861584 0.2502869 0.1212964 When d₂ ≧ d₂₀, d_(2m) (nm) = 11.495 ∞ ∞ 4.383 10.247 When d₂ < d₂₀, d_(2m) (nm) = 10.836 22.009 72.908 4.573 5.928

0.93 ≦ NA ≦ 1.0 75 < T ≦ 85 16/35 Case 8-11 8-12 8-13 8-14 8-15 8-16 n₁₀ 1.7245671 1.7098549 1.7314445 1.7204815 1.7093097 1.7029357 k₁₀ 0.0857616 0.0711157 0.1087664 0.0894136 0.0755678 0.0634027 d₁₀ (nm) 155.774 154.844 218.242 220.453 221.580 218.717 n₂₀ 1.7414131 1.6689951 1.7862714 1.7885409 1.7021793 1.6626290 k₂₀ 0.2835597 0.2212317 0.7962122 0.3769446 0.2655853 0.2083407 d₂₀ (nm) 136.971 203.148 18.394 74.763 137.968 201.624 When n₁ ≧ n₁₀, n_(1m) = 0.0606116 0.0594177 0.0511572 0.0630383 0.0616895 0.0636414 When n₁ < n₁₀, n_(1m) = 0.0160718 0.0405298 0.0015906 0.0046008 0.0190027 0.0583008 When k₁ ≧ k₁₀, k_(1m) = 0.0512000 0.0681555 0.0265222 0.0380334 0.0531970 0.0748706 When k₁ < k₁₀, k_(1m) = 0.0318042 0.0441748 0.0055811 0.0106726 0.0222839 0.0393835 When d₁ ≧ d₁₀, d_(1m) (nm) = 31.466 ∞ 12.528 43.958 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 4.121 15.106 0.395 1.266 6.425 77.927 When n₂ ≧ n₂₀, n_(2m) = 0.2472620 0.2537585 0.2927209 0.1651587 0.3131763 0.2855005 When n₂ < n₂₀, n_(2m) = 0.1515137 0.1338916 0.0324463 0.1927209 0.1573535 0.1457190 When k₂ ≧ k₂₀, k_(2m) = 0.1857507 0.1391650 0.0225110 0.0800281 0.1575110 0.1308728 When k₂ < k₂₀, k_(2m) = 0.0929626 0.0771277 0.2211072 0.1242517 0.0780078 0.0761951 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 5.339 11.602 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 20.462 30.027 0.679 1.920 20.783 30.691

0.93 ≦ NA ≦ 1.0 85 < T ≦ 95 17/35 Case 9-01 9-02 9-03 9-04 9-05 n₁₀ 1.7289685 1.8452520 1.8988873 1.8877112 1.9267904 k₁₀ 0.3314086 0.2255929 0.1475831 0.1535471 0.0947520 d₁₀ (nm) 44.247 26.855 20.944 19.669 15.612 n₂₀ 5.1412592 1.9037614 1.8997324 1.8220692 1.8437835 k₂₀ 5.4454539 0.7221490 0.4893775 0.4687151 0.3693724 d₂₀ (nm) 1.484 66.898 122.094 129.650 183.529 When n₁ ≧ n₁₀, n_(1m) = 0.0720642 0.0846375 0.0908557 0.0941199 0.1057788 When n₁ < n₁₀, n_(1m) = 0.0586633 0.0599194 0.0695422 0.0700256 0.0833301 When k₁ ≧ k₁₀, k_(1m) = 0.0476758 0.0671912 0.0784241 0.0821533 0.0936853 When k₁ < k₁₀, k_(1m) = 0.0453955 0.0846301 0.0932227 0.0950391 0.0947520 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.793 6.632 6.977 7.158 6.784 When d₁ < d₁₀, d_(1m) (nm) = 4.550 4.181 4.538 4.591 4.595 When n₂ ≧ n₂₀, n_(2m) = 1.1337476 0.2089880 0.1771472 0.1681067 0.1597327 When n₂ < n₂₀, n_(2m) = 1.1352368 0.2210583 0.1914734 0.1898022 0.1792920 When k₂ ≧ k₂₀, k_(2m) = 0.8630298 0.2922070 0.2387195 0.2089600 0.1845532 When k₂ < k₂₀, k_(2m) = 1.0641260 0.1706519 0.1365454 0.1328516 0.1184924 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.527 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 0.379 14.827 35.595 55.475 73.593 0.93 ≦ NA ≦ 1.0 85 < T ≦ 95 Case 9-06 9-07 9-08 9-09 9-10 n₁₀ 1.9311024 1.9377300 1.8321358 1.8340055 1.7711711 k₁₀ 0.1132645 0.0882760 0.1783607 0.1409526 0.1059247 d₁₀ (nm) 13.318 11.094 92.959 90.549 89.053 n₂₀ 1.7624681 1.7478213 3.8484718 2.7003837 1.8505388 k₂₀ 0.3523973 0.2927773 3.7040697 0.6754163 0.3612112 d₂₀ (nm) 195.472 252.908 2.442 40.010 121.432 When n₁ ≧ n₁₀, n_(1m) = 0.1192212 0.1370740 0.0646143 0.0640906 0.0642236 When n₁ < n₁₀, n_(1m) = 0.0917322 0.1105750 0.0342749 0.0314893 0.0302832 When k₁ ≧ k₁₀, k_(1m) = 0.1074902 0.1261145 0.0537451 0.0578040 0.0599036 When k₁ < k₁₀, k_(1m) = 0.1132645 0.0882760 0.0424707 0.0518921 0.0535962 When d₁ ≧ d₁₀, d_(1m) (nm) = 6.457 6.373 6.914 7.622 12.267 When d₁ < d₁₀, d_(1m) (nm) = 4.357 4.610 3.684 3.553 4.848 When n₂ ≧ n₂₀, n_(2m) = 0.1546643 0.1575439 0.8768713 0.1918994 0.1964832 When n₂ < n₂₀, n_(2m) = 0.1796094 0.1753381 0.8006409 0.2240674 0.1600745 When k₂ ≧ k₂₀, k_(2m) = 0.1600171 0.1481116 0.9241052 0.2582642 0.2396375 When k₂ < k₂₀, k_(2m) = 0.1162842 0.1079150 0.8229163 0.1769763 0.1063232 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 0.854 4.088 ∞ When d₂ < d₂₀, d_(2m) (nm) = 79.416 123.401 0.636 4.130 18.235

0.93 ≦ NA ≦ 1.0 85 < T ≦ 95 18/35 Case 9-11 9-12 9-13 9-14 9-15 n₁₀ 1.7360863 1.7197908 1.7660895 1.7439719 1.7279356 k₁₀ 0.0911204 0.0799131 0.1278221 0.1032091 0.0888807 d₁₀ (nm) 88.900 88.028 159.319 156.425 155.640 n₂₀ 1.7067614 1.6618119 4.3535883 1.9650733 1.7635448 k₂₀ 0.2637604 0.2120965 4.0919379 0.4980866 0.3088945 d₂₀ (nm) 192.941 257.777 1.526 59.654 126.749 When n₁ ≧ n₁₀, n_(1m) = 0.0638330 0.0656592 0.0584094 0.0605725 0.0597937 When n₁ < n₁₀, n_(1m) = 0.0350525 0.0511377 0.0141675 0.0144019 0.0151697 When k₁ ≧ k₁₀, k_(1m) = 0.0655725 0.0796582 0.0444238 0.0479309 0.0488806 When k₁ < k₁₀, k_(1m) = 0.0571082 0.0562439 0.0291333 0.0298792 0.0316455 When d₁ ≧ d₁₀, d_(1m) (nm) = 20.203 29.484 8.864 13.240 29.427 When d₁ < d₁₀, d_(1m) (nm) = 7.546 13.995 2.626 3.070 3.728 When n₂ ≧ n₂₀, n_(2m) = 0.2021118 0.1991125 0.8787561 0.1681836 0.2119507 When n₂ < n₂₀, n_(2m) = 0.1462866 0.1442920 0.9231299 0.1869897 0.1520459 When k₂ ≧ k₂₀, k_(2m) = 0.1808130 0.1431189 0.6934375 0.1601843 0.1789355 When k₂ < k₂₀, k_(2m) = 0.0887085 0.0763562 1.0372803 0.1399158 0.0974194 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 0.372 7.404 ∞ When d₂ < d₂₀, d_(2m) (nm) = 33.573 81.452 0.412 5.841 17.631 0.93 ≦ NA ≦ 1.0 85 < T ≦ 95 Case 9-16 9-17 9-18 9-19 9-20 n₁₀ 1.7114085 1.7070625 1.7347333 1.7230132 1.7111302 k₁₀ 0.0740744 0.0641745 0.1100034 0.0920219 0.0786417 d₁₀ (nm) 154.740 153.245 225.621 220.898 221.002 n₂₀ 1.6716288 1.6634512 4.2666617 1.8597675 1.7127614 k₂₀ 0.2338686 0.1921909 4.0109081 0.4430799 0.2870105 d₂₀ (nm) 194.347 254.410 1.346 63.229 128.848 When n₁ ≧ n₁₀, n_(1m) = 0.0584460 0.0617004 0.0476050 0.0625842 0.0612109 When n₁ < n₁₀, n_(1m) = 0.0344641 0.0580713 0.0023816 0.0042908 0.0142651 When k₁ ≧ k₁₀, k_(1m) = 0.0648608 0.0822974 0.0260010 0.0346094 0.0487000 When k₁ < k₁₀, k_(1m) = 0.0443103 0.0454309 0.0085535 0.0110950 0.0198962 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ 11.896 40.249 ∞ When d₁ < d₁₀, d_(1m) (nm) = 12.619 28.388 0.607 1.162 4.464 When n₂ ≧ n₂₀, n_(2m) = 0.2496582 0.2459351 0.6243091 0.1726245 0.1878369 When n₂ < n₂₀, n_(2m) = 0.1333875 0.1351294 0.9687061 0.0992944 0.1569519 When k₂ ≧ k₂₀, k_(2m) = 0.1378833 0.1234607 0.1299146 0.0597583 0.1385217 When k₂ < k₂₀, k_(2m) = 0.0791492 0.0682422 1.1651697 0.1405090 0.0853906 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 0.085 8.765 ∞ When d₂ < d₂₀, d_(2m) (nm) = 27.415 76.157 0.398 1.778 18.221

0.93 ≦ NA ≦ 1.0 85 < T ≦ 95 19/35 Case 9-21 9-22 9-23 n₁₀ 1.7035342 1.7027484 1.7001226 k₁₀ 0.0659797 0.0572097 0.0542621 d₁₀ (nm) 218.617 216.627 277.695 n₂₀ 1.6615801 1.6695991 1.6762439 k₂₀ 0.2195726 0.1821496 0.1770375 d₂₀ (nm) 193.289 251.116 248.521 When n₁ ≧ n₁₀, n_(1m) = 0.0623376 0.0678125 0.0799658 When n₁ < n₁₀, n_(1m) = 0.0535010 0.0686682 0.1014282 When k₁ ≧ k₁₀, k_(1m) = 0.0710327 0.0861914 0.0881311 When k₁ < k₁₀, k_(1m) = 0.0393738 0.0410693 0.0390344 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 76.543 86.880 145.024 When n₂ ≧ n₂₀, n_(2m) = 0.2919910 0.2682678 0.2949561 When n₂ < n₂₀, n_(2m) = 0.1427539 0.1485803 0.2037488 When k₂ ≧ k₂₀, k_(2m) = 0.1267480 0.1253760 0.1874854 When k₂ < k₂₀, k_(2m) = 0.0781458 0.0670801 0.0719922 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 27.736 75.187 78.004 0.93 ≦ NA ≦ 1.0 95 < T ≦ 105 Case 10-01 10-02 10-03 10-04 10-05 n₁₀ 1.8593145 1.9010800 1.9204218 1.9438629 1.8201241 k₁₀ 0.2496127 0.1636004 0.1149718 0.1088618 0.1437532 d₁₀ (nm) 26.535 19.815 15.218 10.610 89.353 n₂₀ 1.9155767 1.8411706 1.7975616 1.7190727 2.3681639 k₂₀ 0.8329906 0.5121692 0.3794158 0.2999844 0.7410526 d₂₀ (nm) 59.684 120.535 182.059 250.015 43.212 When n₁ ≧ n₁₀, n_(1m) = 0.0816284 0.0922021 0.1074707 0.1413159 0.0582056 When n₁ < n₁₀, n_(1m) = 0.0571204 0.0681042 0.0820581 0.1125684 0.0261719 When k₁ ≧ k₁₀, k_(1m) = 0.0635767 0.0796045 0.0956897 0.1313098 0.0522705 When k₁ < k₁₀, k_(1m) = 0.0810986 0.0930249 0.1101465 0.1088618 0.0503638 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.728 6.581 6.674 6.005 7.527 When d₁ < d₁₀, d_(1m) (nm) = 3.587 4.159 4.431 4.306 3.047 When n₂ ≧ n₂₀, n_(2m) = 0.2110999 0.1699976 0.1589343 0.1579346 0.2155920 When n₂ < n₂₀, n_(2m) = 0.2273865 0.1928259 0.1800378 0.1714307 0.2110571 When k₂ ≧ k₂₀, k_(2m) = 0.3068860 0.2171289 0.1741077 0.1426062 0.2751843 When k₂ < k₂₀, k_(2m) = 0.1756396 0.1352295 0.1186548 0.1082129 0.1794531 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 5.764 When d₂ < d₂₀, d_(2m) (nm) = 12.732 34.057 73.872 121.675 5.150

0.93 ≦ NA ≦ 1.0 95 < T ≦ 105 20/35 Case 10-06 10-07 10-08 10-09 10-10 n₁₀ 1.7719135 1.7372876 1.7204595 1.7445424 1.7286821 k₁₀ 0.1119845 0.0953951 0.0830085 0.1106490 0.0936244 d₁₀ (nm) 88.526 88.555 87.798 155.347 154.936 n₂₀ 1.8420973 1.7021944 1.6574450 1.9643384 1.7602486 k₂₀ 0.3885265 0.2779787 0.2209480 0.5665503 0.3317476 d₂₀ (nm) 115.256 185.353 249.744 53.939 119.649 When n₁ ≧ n₁₀, n_(1m) = 0.0621143 0.0621887 0.0641711 0.0553430 0.0576575 When n₁ < n₁₀, n_(1m) = 0.0270313 0.0323645 0.0489441 0.0092163 0.0110840 When k₁ ≧ k₁₀, k_(1m) = 0.0562158 0.0627490 0.0779517 0.0376074 0.0417603 When k₁ < k₁₀, k_(1m) = 0.0520581 0.0564075 0.0555945 0.0251758 0.0276855 When d₁ ≧ d₁₀, d_(1m) (nm) = 11.132 18.518 24.475 10.852 25.311 When d₁ < d₁₀, d_(1m) (nm) = 4.165 6.637 12.657 1.885 2.611 When n₂ ≧ n₂₀, n_(2m) = 0.1959729 0.2028772 0.1967151 0.1949902 0.2380078 When n₂ < n₂₀, n_(2m) = 0.1629126 0.1469397 0.1441541 0.1889697 0.1549414 When k₂ ≧ k₂₀, k_(2m) = 0.2347974 0.1750098 0.1399744 0.1001758 0.1456445 When k₂ < k₂₀, k_(2m) = 0.1074329 0.0897974 0.0774023 0.1436816 0.0981848 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 7.077 ∞ When d₂ < d₂₀, d_(2m) (nm) = 17.579 32.188 79.555 4.014 9.652 0.93 ≦ NA ≦ 1.0 95 < T ≦ 105 Case 10-11 10-12 10-13 10-14 10-15 n₁₀ 1.7117780 1.7072616 1.7114074 1.7035514 1.7027912 k₁₀ 0.0773392 0.0664543 0.0830146 0.0688006 0.0591414 d₁₀ (nm) 154.355 152.987 220.011 218.183 216.340 n₂₀ 1.6664488 1.6597858 1.7075466 1.6565327 1.6669294 k₂₀ 0.2460450 0.2000883 0.3068810 0.2307053 0.1896158 d₂₀ (nm) 186.501 246.239 121.613 185.316 242.803 When n₁ ≧ n₁₀, n_(1m) = 0.0563684 0.0596582 0.0593091 0.0598755 0.0652673 When n₁ < n₁₀, n_(1m) = 0.0298474 0.0556995 0.0074023 0.0481897 0.0654077 When k₁ ≧ k₁₀, k_(1m) = 0.0607349 0.0799170 0.0390686 0.0670154 0.0838220 When k₁ < k₁₀, k_(1m) = 0.0430676 0.0448303 0.0134863 0.0384473 0.0405530 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 9.756 23.688 2.192 28.661 83.384 When n₂ ≧ n₂₀, n_(2m) = 0.2552490 0.2502368 0.2301306 0.3057727 0.2764221 When n₂ < n₂₀, n_(2m) = 0.1325989 0.1345728 0.1592334 0.1419543 0.1480603 When k₂ ≧ k₂₀, k_(2m) = 0.1285986 0.1190894 0.0974548 0.1182935 0.1218213 When k₂ < k₂₀, k_(2m) = 0.0799036 0.0691528 0.0735474 0.0793201 0.0682898 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 26.413 74.134 17.074 26.587 73.152

0.93 ≦ NA ≦ 1.0 105 < T ≦ 115 21/35 Case 11-01 11-02 11-03 11-04 11-05 n₁₀ 1.8881577 1.9218914 1.9458883 1.9409291 1.7882093 k₁₀ 0.2795127 0.1797398 0.1322078 0.1179060 0.1515662 d₁₀ (nm) 22.871 17.442 13.080 10.849 85.800 n₂₀ 1.7550786 1.7746647 1.7478516 1.7108849 1.7933752 k₂₀ 0.8705815 0.5227186 0.3833699 0.3088835 0.6703287 d₂₀ (nm) 60.032 119.813 181.809 241.776 55.966 When n₁ ≧ n₁₀, n_(1m) = 0.0826208 0.0977563 0.1186780 0.1376917 0.0543359 When n₁ < n₁₀, n_(1m) = 0.0520789 0.0682861 0.0872974 0.1088391 0.0162500 When k₁ ≧ k₁₀, k_(1m) = 0.0630823 0.0841675 0.1052368 0.1278345 0.0453015 When k₁ < k₁₀, k_(1m) = 0.0771240 0.0966394 0.1209399 0.1179060 0.0399414 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.844 5.864 5.837 5.925 7.044 When d₁ < d₁₀, d_(1m) (nm) = 2.746 3.528 3.770 4.232 1.998 When n₂ ≧ n₂₀, n_(2m) = 0.1779102 0.1610864 0.1553113 0.1599890 0.1976709 When n₂ < n₂₀, n_(2m) = 0.2409973 0.1978687 0.1825439 0.1715320 0.2140332 When k₂ ≧ k₂₀, k_(2m) = 0.2513745 0.1848108 0.1557214 0.1414282 0.1190186 When k₂ < k₂₀, k_(2m) = 0.1529724 0.1289783 0.1162878 0.1089014 0.1251477 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 22.520 When d₂ < d₂₀, d_(2m) (nm) = 14.459 47.581 76.951 118.169 7.215 0.93 ≦ NA ≦ 1.0 105 < T ≦ 115 Case 11-06 11-07 11-08 11-09 11-10 n₁₀ 1.7649059 1.7337710 1.7199633 1.7259527 1.7103936 k₁₀ 0.1193411 0.0996522 0.0855558 0.0989978 0.0800216 d₁₀ (nm) 87.339 88.039 87.477 153.714 153.726 n₂₀ 1.7745734 1.6760618 1.6497564 1.7204930 1.6497935 k₂₀ 0.3964773 0.2847568 0.2267213 0.3415865 0.2528816 d₂₀ (nm) 113.800 179.842 241.489 115.571 179.482 When n₁ ≧ n₁₀, n_(1m) = 0.0601648 0.0599890 0.0628394 0.0551172 0.0538281 When n₁ < n₁₀, n_(1m) = 0.0211145 0.0296448 0.0487646 0.0042871 0.0282654 When k₁ ≧ k₁₀, k_(1m) = 0.0504663 0.0599475 0.0772742 0.0278052 0.0572974 When k₁ < k₁₀, k_(1m) = 0.0475183 0.0544922 0.0541711 0.0166541 0.0416528 When d₁ ≧ d₁₀, d_(1m) (nm) = 10.266 16.506 22.112 22.094 29.214 When d₁ < d₁₀, d_(1m) (nm) = 3.195 5.968 12.188 0.978 9.029 When n₂ ≧ n₂₀, n_(2m) = 0.1995813 0.2097351 0.1798193 0.2563574 0.2736133 When n₂ < n₂₀, n_(2m) = 0.1736548 0.1494116 0.1464758 0.1632507 0.1337610 When k₂ ≧ k₂₀, k_(2m) = 0.1791345 0.1568970 0.1341675 0.0805750 0.1130872 When k₂ < k₂₀, k_(2m) = 0.1012146 0.0889111 0.0780908 0.0849402 0.0789160 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 14.312 35.616 79.447 3.314 27.322

0.93 ≦ NA ≦ 1.0 105 < T ≦ 115 22/35 Case 11-11 11-12 11-13 n₁₀ 1.7070930 1.7028018 1.7027432 k₁₀ 0.0681638 0.0710148 0.0605235 d₁₀ (nm) 152.585 217.506 215.929 n₂₀ 1.6551703 1.6456663 1.6646615 k₂₀ 0.2055639 0.2376270 0.1950188 d₂₀ (nm) 237.501 177.429 233.713 When n₁ ≧ n₁₀, n_(1m) = 0.0578955 0.0572009 0.0625354 When n₁ < n₁₀, n_(1m) = 0.0537671 0.0422668 0.0608704 When k₁ ≧ k₁₀, k_(1m) = 0.0790588 0.0645129 0.0827734 When k₁ < k₁₀, k_(1m) = 0.0435974 0.0363208 0.0394031 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 20.858 18.787 80.567 When n₂ ≧ n₂₀, n_(2m) = 0.1279260 0.3212610 0.2872583 When n₂ < n₂₀, n_(2m) = 0.1371912 0.1436340 0.1515588 When k₂ ≧ k₂₀, k_(2m) = 0.1138037 0.1091870 0.1188855 When k₂ < k₂₀, k_(2m) = 0.0699854 0.0793604 0.0696228 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 73.529 27.402 72.558 0.93 ≦ NA ≦ 1.0 115 < T ≦ 125 Case 12-01 12-02 12-03 12-04 12-05 n₁₀ 1.8909431 1.9524263 1.9741784 1.9011191 1.7812655 k₁₀ 0.3085424 0.1909748 0.1389140 0.1449022 0.1647646 d₁₀ (nm) 20.418 15.444 11.832 11.795 82.868 n₂₀ 1.5964478 1.7414925 1.7353816 1.6673230 1.6154117 k₂₀ 0.8353138 0.5288169 0.3892797 0.3043383 0.6141968 d₂₀ (nm) 60.909 116.361 176.360 237.538 58.066 When n₁ ≧ n₁₀, n_(1m) = 0.0896326 0.1058130 0.1273743 0.1294861 0.0526233 When n₁ < n₁₀, n_(1m) = 0.0482068 0.0693359 0.0898755 0.1018958 0.0089111 When k₁ ≧ k₁₀, k_(1m) = 0.0687769 0.0897180 0.1101831 0.1230750 0.0397290 When k₁ < k₁₀, k_(1m) = 0.0788684 0.1029199 0.1292102 0.1244238 0.0264612 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.348 5.029 5.176 6.485 6.077 When d₁ < d₁₀, d_(1m) (nm) = 2.275 2.981 3.260 4.641 1.033 When n₂ ≧ n₂₀, n_(2m) = 0.1653235 0.1570801 0.1545581 0.1637158 0.2122083 When n₂ < n₂₀, n_(2m) = 0.1924231 0.2075879 0.1868823 0.1636792 0.1151331 When k₂ ≧ k₂₀, k_(2m) = 0.1706042 0.1628406 0.1476868 0.1368591 0.0534973 When k₂ < k₂₀, k_(2m) = 0.1411853 0.1262378 0.1172034 0.1087061 0.1078625 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 22.263 When d₂ < d₂₀, d_(2m) (nm) = 15.932 41.005 77.327 119.056 3.631

0.93 ≦ NA ≦ 1.0 115 < T ≦ 125 23/35 Case 12-06 12-07 12-08 12-09 12-10 n₁₀ 1.7599364 1.7294022 1.7193592 1.7088052 1.7070991 k₁₀ 0.1268761 0.1028924 0.0869972 0.0815889 0.0689994 d₁₀ (nm) 86.158 87.627 87.259 153.347 152.325 n₂₀ 1.7200975 1.6470339 1.6442041 1.6346844 1.6535493 k₂₀ 0.3928633 0.2862372 0.2301394 0.2563356 0.2091466 d₂₀ (nm) 111.244 173.600 231.990 171.193 227.454 When n₁ ≧ n₁₀, n_(1m) = 0.0606738 0.0583850 0.0624988 0.0517444 0.0574902 When n₁ < n₁₀, n_(1m) = 0.0144922 0.0280688 0.0507288 0.0284387 0.0507019 When k₁ ≧ k₁₀, k_(1m) = 0.0425989 0.0573376 0.0776721 0.0554700 0.0798230 When k₁ < k₁₀, k_(1m) = 0.0406250 0.0512256 0.0527991 0.0388428 0.0424304 When d₁ ≧ d₁₀, d_(1m) (nm) = 9.315 15.226 20.570 23.760 ∞ When d₁ < d₁₀, d_(1m) (nm) = 2.129 5.657 12.499 8.630 19.101 When n₂ ≧ n₂₀, n_(2m) = 0.2113904 0.2168030 0.1303113 0.0779236 0.1123853 When n₂ < n₂₀, n_(2m) = 0.1965198 0.1502832 0.1490173 0.1347925 0.1407104 When k₂ ≧ k₂₀, k_(2m) = 0.1312354 0.1404419 0.1299280 0.1034583 0.1115356 When k₂ < k₂₀, k_(2m) = 0.0975891 0.0892358 0.0798267 0.0797656 0.0721289 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 8.212 56.813 80.756 28.524 74.263 0.93 ≦ NA ≦ 1.0 115 < T ≦ 125 Case 12-11 12-12 n₁₀ 1.7021164 1.7030336 k₁₀ 0.0722203 0.0611451 d₁₀ (nm) 217.158 215.722 n₂₀ 1.6379690 1.6657846 k₂₀ 0.2419462 0.1987136 d₂₀ (nm) 168.107 223.276 When n₁ ≧ n₁₀, n_(1m) = 0.0559460 0.0616492 When n₁ < n₁₀, n_(1m) = 0.0369629 0.0571216 When k₁ ≧ k₁₀, k_(1m) = 0.0643591 0.0831226 When k₁ < k₁₀, k_(1m) = 0.0338867 0.0383716 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 15.623 78.766 When n₂ ≧ n₂₀, n_(2m) = 0.1071765 0.1574146 When n₂ < n₂₀, n_(2m) = 0.1467676 0.1563452 When k₂ ≧ k₂₀, k_(2m) = 0.1072412 0.1188721 When k₂ < k₂₀, k_(2m) = 0.0815015 0.0722400 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 28.758 73.194

0.93 ≦ NA ≦ 1.0 125 < T ≦ 135 24/35 Case 13-01 13-02 13-03 13-04 13-05 n₁₀ 1.8737564 1.9697383 1.9916260 1.9141720 1.7868889 k₁₀ 0.3367363 0.2020294 0.1477036 0.1461879 0.1795709 d₁₀ (nm) 20.276 14.764 11.315 11.459 80.605 n₂₀ 1.5133470 1.7299638 1.7257470 1.6683491 1.5409994 k₂₀ 0.8454522 0.5429087 0.3987910 0.3122132 0.6011754 d₂₀ (nm) 55.480 109.268 168.578 226.037 53.925 When n₁ ≧ n₁₀, n_(1m) = 0.0919055 0.1108435 0.1324426 0.1321936 0.0477332 When n₁ < n₁₀, n_(1m) = 0.0465112 0.0677783 0.0890894 0.1050525 0.0054248 When k₁ ≧ k₁₀, k_(1m) = 0.0634827 0.0913306 0.1103125 0.1242993 0.0376343 When k₁ < k₁₀, k_(1m) = 0.0777942 0.1046863 0.1330994 0.1263855 0.0172180 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.127 4.585 4.757 6.157 5.240 When d₁ < d₁₀, d_(1m) (nm) = 2.100 2.651 2.937 4.469 0.576 When n₂ ≧ n₂₀, n_(2m) = 0.1485144 0.1609766 0.1572363 0.1614685 0.1647119 When n₂ < n₂₀, n_(2m) = 0.1669641 0.2206506 0.1915698 0.1618420 0.0427734 When k₂ ≧ k₂₀, k_(2m) = 0.1498572 0.1556653 0.1444165 0.1361792 0.0323462 When k₂ < k₂₀, k_(2m) = 0.1523499 0.1322424 0.1219958 0.1118262 0.1188306 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 20.169 When d₂ < d₂₀, d_(2m) (nm) = 11.040 31.054 70.606 112.796 1.698 0.93 ≦ NA ≦ 1.0 125 < T ≦ 135 Case 13-06 13-07 13-08 13-09 13-10 n₁₀ 1.7600620 1.7276490 1.7199953 1.7084320 1.7077870 k₁₀ 0.1342170 0.1044918 0.0874837 0.0820944 0.0691595 d₁₀ (nm) 85.615 87.663 87.278 153.448 152.438 n₂₀ 1.6974715 1.6338870 1.6452183 1.6304269 1.6574806 k₂₀ 0.3980869 0.2915200 0.2346970 0.2625567 0.2137196 d₂₀ (nm) 104.529 164.129 221.092 160.685 216.250 When n₁ ≧ n₁₀, n_(1m) = 0.0556421 0.0573047 0.0630432 0.0509070 0.0582422 When n₁ < n₁₀, n_(1m) = 0.0086938 0.0280566 0.0524658 0.0272729 0.0496997 When k₁ ≧ k₁₀, k_(1m) = 0.0327625 0.0552051 0.0782056 0.0552515 0.0808813 When k₁ < k₁₀, k_(1m) = 0.0328357 0.0492957 0.0525903 0.0375085 0.0423645 When d₁ ≧ d₁₀, d_(1m) (nm) = 8.316 14.598 20.258 22.646 ∞ When d₁ < d₁₀, d_(1m) (nm) = 1.229 5.725 12.785 8.439 18.783 When n₂ ≧ n₂₀, n_(2m) = 0.2312317 0.1156555 0.1151941 0.0670740 0.1089307 When n₂ < n₂₀, n_(2m) = 0.2128992 0.1481116 0.1498755 0.1344946 0.1425024 When k₂ ≧ k₂₀, k_(2m) = 0.1020886 0.1348413 0.1299255 0.1027795 0.1131628 When k₂ < k₂₀, k_(2m) = 0.1027185 0.0927148 0.0827966 0.0840479 0.0754407 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 4.085 34.120 79.786 26.736 37.465

0.93 ≦ NA ≦ 1.0 125 < T ≦ 135 25/35 Case 13-11 13-12 n₁₀ 1.7022055 1.7036940 k₁₀ 0.0725208 0.0612465 d₁₀ (nm) 217.368 215.927 n₂₀ 1.6389178 1.6705104 k₂₀ 0.2487144 0.2029113 d₂₀ (nm) 157.041 212.129 When n₁ ≧ n₁₀, n_(1m) = 0.0559827 0.0624561 When n₁ < n₁₀, n_(1m) = 0.0346814 0.0563831 When k₁ ≧ k₁₀, k_(1m) = 0.0655139 0.0838672 When k₁ < k₁₀, k_(1m) = 0.0329700 0.0384436 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 14.691 78.542 When n₂ ≧ n₂₀, n_(2m) = 0.0987000 0.1459375 When n₂ < n₂₀, n_(2m) = 0.1477222 0.1585510 When k₂ ≧ k₂₀, k_(2m) = 0.1107947 0.1206909 When k₂ < k₂₀, k_(2m) = 0.0868396 0.0754724 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 26.886 30.205 0.93 ≦ NA ≦ 1.0 135 < T ≦ 145 Case 14-01 14-02 14-03 14-04 14-05 n₁₀ 1.8402862 1.9646387 1.9624104 1.9059084 1.8166660 k₁₀ 0.3700261 0.2123233 0.1584699 0.1473615 0.1977639 d₁₀ (nm) 23.403 16.447 12.893 12.089 79.798 n₂₀ 1.4966418 1.7618069 1.7211612 1.6694213 1.5572201 k₂₀ 1.0039549 0.5971846 0.4176484 0.3203376 0.7204992 d₂₀ (nm) 41.463 94.995 156.173 216.011 40.224 When n₁ ≧ n₁₀, n_(1m) = 0.0906067 0.1022083 0.1191650 0.1272498 0.0481567 When n₁ < n₁₀, n_(1m) = 0.0460486 0.0622925 0.0801978 0.1004968 0.0053052 When k₁ ≧ k₁₀, k_(1m) = 0.0548682 0.0821582 0.0987952 0.1188953 0.0360181 When k₁ < k₁₀, k_(1m) = 0.0585999 0.0953162 0.1207214 0.1220581 0.0169287 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.196 4.611 5.209 6.343 4.539 When d₁ < d₁₀, d_(1m) (nm) = 2.216 2.591 3.134 4.582 0.509 When n₂ ≧ n₂₀, n_(2m) = 0.1766626 0.1806128 0.1668896 0.1603455 0.2142871 When n₂ < n₂₀, n_(2m) = 0.1712292 0.2330798 0.1905432 0.1645447 0.0564514 When k₂ ≧ k₂₀, k_(2m) = 0.2110498 0.1844238 0.1540930 0.1380908 0.0433691 When k₂ < k₂₀, k_(2m) = 0.1916614 0.1446765 0.1279346 0.1140405 0.1534607 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 18.289 When d₂ < d₂₀, d_(2m) (nm) = 8.143 21.467 66.145 96.079 1.264

0.93 ≦ NA ≦ 1.0 135 < T ≦ 145 26/35 Case 14-06 14-07 14-08 14-09 14-10 n₁₀ 1.7655719 1.7293285 1.7214396 1.7092770 1.7085071 k₁₀ 0.1384976 0.1055583 0.0882507 0.0826318 0.0697446 d₁₀ (nm) 86.596 87.952 87.451 153.805 152.663 n₂₀ 1.7129955 1.6364176 1.6482275 1.6322979 1.6592624 k₂₀ 0.4320226 0.3040668 0.2416232 0.2733763 0.2197085 d₂₀ (nm) 91.539 153.339 210.993 150.296 206.543 When n₁ ≧ n₁₀, n_(1m) = 0.0570667 0.0566760 0.0630505 0.0509021 0.0584448 When n₁ < n₁₀, n_(1m) = 0.0070447 0.0278870 0.0524426 0.0272241 0.0508081 When k₁ ≧ k₁₀, k_(1m) = 0.0284875 0.0544165 0.0773682 0.0546399 0.0801599 When k₁ < k₁₀, k_(1m) = 0.0304980 0.0499133 0.0532507 0.0383374 0.0431470 When d₁ ≧ d₁₀, d_(1m) (nm) = 7.855 14.249 20.142 22.873 ∞ When d₁ < d₁₀, d_(1m) (nm) = 0.972 5.625 12.498 8.268 18.904 When n₂ ≧ n₂₀, n_(2m) = 0.2760107 0.1009705 0.1137622 0.0657813 0.1088953 When n₂ < n₂₀, n_(2m) = 0.1995349 0.1448511 0.1471863 0.1316589 0.1395239 When k₂ ≧ k₂₀, k_(2m) = 0.1305078 0.1378174 0.1321667 0.1037769 0.1143506 When k₂ < k₂₀, k_(2m) = 0.1154834 0.0970654 0.0846460 0.0880420 0.0769495 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 3.137 27.699 76.164 22.775 33.816 0.93 ≦ NA ≦ 1.0 135 < T ≦ 145 Case 14-11 14-12 n₁₀ 1.7027802 1.7041709 k₁₀ 0.0728517 0.0617202 d₁₀ (nm) 217.779 216.194 n₂₀ 1.6405373 1.6719897 k₂₀ 0.2588103 0.2085423 d₂₀ (nm) 146.936 202.593 When n₁ ≧ n₁₀, n_(1m) = 0.0566504 0.0631152 When n₁ < n₁₀, n_(1m) = 0.0353162 0.0583606 When k₁ ≧ k₁₀, k_(1m) = 0.0649280 0.0832544 When k₁ < k₁₀, k_(1m) = 0.0337988 0.0392310 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 15.495 79.231 When n₂ ≧ n₂₀, n_(2m) = 0.0962402 0.1448450 When n₂ < n₂₀, n_(2m) = 0.1459131 0.1542615 When k₂ ≧ k₂₀, k_(2m) = 0.1100769 0.1205054 When k₂ < k₂₀, k_(2m) = 0.0901184 0.0767920 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 22.790 28.928

0.93 ≦ NA ≦ 1.0 145 < T ≦ 155 27/35 Case 15-01 15-02 15-03 15-04 15-05 n₁₀ 1.8199816 1.9318464 1.9476580 1.9400781 1.9152409 k₁₀ 0.4068444 0.2280177 0.1546474 0.1580344 0.1421080 d₁₀ (nm) 29.022 20.237 15.042 15.180 12.506 n₂₀ 1.5974175 1.8212470 1.7660961 1.7558824 1.6892699 k₂₀ 1.4701111 0.6871951 0.4559575 0.4525330 0.3391765 d₂₀ (nm) 24.558 79.181 140.877 141.749 204.998 When n₁ ≧ n₁₀, n_(1m) = 0.0783313 0.0902905 0.1062402 0.1057410 0.1233240 When n₁ < n₁₀, n_(1m) = 0.0485986 0.0576099 0.0737439 0.0730676 0.0958533 When k₁ ≧ k₁₀, k_(1m) = 0.0424463 0.0706348 0.0877539 0.0877856 0.1136047 When k₁ < k₁₀, k_(1m) = 0.0340247 0.0852002 0.1066162 0.1062646 0.1201245 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.673 5.078 5.535 5.630 6.208 When d₁ < d₁₀, d_(1m) (nm) = 2.651 2.819 3.357 3.413 4.390 When n₂ ≧ n₂₀, n_(2m) = 0.2911646 0.2069556 0.1703650 0.1705981 0.1609875 When n₂ < n₂₀, n_(2m) = 0.1897607 0.2328674 0.1899780 0.1895239 0.1746619 When k₂ ≧ k₂₀, k_(2m) = 0.2661255 0.2545776 0.1755676 0.1739502 0.1429504 When k₂ < k₂₀, k_(2m) = 0.2599438 0.1612646 0.1333740 0.1331494 0.1167700 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 5.427 21.100 63.576 64.042 84.536 0.93 ≦ NA ≦ 1.0 145 < T ≦ 155 Case 15-06 15-07 15-08 15-09 15-10 n₁₀ 1.8773964 1.7792899 1.7347668 1.7234258 1.7112569 k₁₀ 0.2151408 0.1408151 0.1082989 0.0907869 0.0850611 d₁₀ (nm) 81.211 87.880 88.119 87.442 153.930 n₂₀ 1.7568637 1.7944868 1.6522930 1.6482492 1.6361524 k₂₀ 1.2210655 0.5090378 0.3260600 0.2516544 0.2898839 d₂₀ (nm) 20.666 75.457 142.664 202.556 141.116 When n₁ ≧ n₁₀, n_(1m) = 0.0535974 0.0567944 0.0566736 0.0621204 0.0507385 When n₁ < n₁₀, n_(1m) = 0.0100415 0.0103674 0.0259888 0.0480981 0.0259363 When k₁ ≧ k₁₀, k_(1m) = 0.0386597 0.0332520 0.0534692 0.0749170 0.0514124 When k₁ < k₁₀, k_(1m) = 0.0268323 0.0369287 0.0521716 0.0541968 0.0401160 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.095 7.577 13.934 19.192 22.547 When d₁ < d₁₀, d_(1m) (nm) = 0.855 1.369 4.946 11.117 7.637 When n₂ ≧ n₂₀, n_(2m) = 0.4215723 0.2684375 0.1205920 0.1204028 0.0675806 When n₂ < n₂₀, n_(2m) = 0.3791321 0.1854980 0.1442749 0.1439111 0.1298389 When k₂ ≧ k₂₀, k_(2m) = 0.1639099 0.2106580 0.1452100 0.1328479 0.0998340 When k₂ < k₂₀, k_(2m) = 0.2423328 0.1335254 0.1007751 0.0850952 0.0900806 When d₂ ≧ d₂₀, d_(2m) (nm) = 5.052 14.783 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 1.977 4.929 23.591 72.330 19.479

0.93 ≦ NA ≦ 1.0 145 < T ≦ 155 28/35 Case 15-11 15-12 15-13 n₁₀ 1.7092054 1.7036310 1.7042855 k₁₀ 0.0717413 0.0749476 0.0635030 d₁₀ (nm) 152.725 217.788 216.233 n₂₀ 1.6572540 1.6384900 1.6687346 k₂₀ 0.2283199 0.2727185 0.2164860 d₂₀ (nm) 198.410 138.609 194.709 When n₁ ≧ n₁₀, n_(1m) = 0.0574158 0.0563904 0.0624048 When n₁ < n₁₀, n_(1m) = 0.0505359 0.0361853 0.0601721 When k₁ ≧ k₁₀, k_(1m) = 0.0766162 0.0604248 0.0800598 When k₁ < k₁₀, k_(1m) = 0.0439771 0.0350879 0.0400427 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 17.754 14.415 78.936 When n₂ ≧ n₂₀, n_(2m) = 0.1103052 0.0951196 0.1487622 When n₂ < n₂₀, n_(2m) = 0.1349475 0.1401550 0.1481909 When k₂ ≧ k₂₀, k_(2m) = 0.1121790 0.1001306 0.1166199 When k₂ < k₂₀, k_(2m) = 0.0769556 0.0916321 0.0768066 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 28.953 19.518 28.644 0.93 ≦ NA ≦ 1.0 155 < T ≦ 165 Case 16-01 16-02 16-03 16-04 16-05 n₁₀ 1.8175791 1.9193642 1.9516445 1.9419697 1.9282358 k₁₀ 0.4385823 0.2501320 0.1607715 0.1648951 0.1504554 d₁₀ (nm) 37.187 21.908 15.944 16.094 12.282 n₂₀ 2.9488620 1.8321620 1.7911399 1.7764317 1.6857745 k₂₀ 3.6605721 0.7789298 0.4964603 0.4910919 0.3551730 d₂₀ (nm) 5.671 69.456 129.934 131.139 198.143 When n₁ ≧ n₁₀, n_(1m) = 0.0604736 0.0852295 0.1013757 0.1010083 0.1240356 When n₁ < n₁₀, n_(1m) = 0.0333899 0.0547046 0.0713342 0.0704993 0.0944006 When k₁ ≧ k₁₀, k_(1m) = 0.0318896 0.0632361 0.0833032 0.0834521 0.1140308 When k₁ < k₁₀, k_(1m) = 0.0127527 0.0803174 0.1011133 0.1007434 0.1227710 When d₁ ≧ d₁₀, d_(1m) (nm) = 2.684 4.937 5.403 5.524 5.825 When d₁ < d₁₀, d_(1m) (nm) = 1.056 2.746 3.284 3.349 4.015 When n₂ ≧ n₂₀, n_(2m) = 0.8885571 0.1992395 0.1663013 0.1663708 0.1592810 When n₂ < n₂₀, n_(2m) = 0.4338977 0.2305408 0.1904468 0.1899951 0.1750964 When k₂ ≧ k₂₀, k_(2m) = 0.2239417 0.2871423 0.1858569 0.1831470 0.1419360 When k₂ < k₂₀, k_(2m) = 0.5593811 0.1675525 0.1346912 0.1341003 0.1171777 When d₂ ≧ d₂₀, d_(2m) (nm) = 2.121 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 1.497 16.789 53.787 54.606 81.510

0.93 ≦ NA ≦ 1.0 155 < T ≦ 165 29/35 Case 16-06 16-07 16-08 16-09 16-10 n₁₀ 1.8704725 1.7960814 1.7418606 1.7257176 1.7136245 k₁₀ 0.2299368 0.1479091 0.1134159 0.0948039 0.0896483 d₁₀ (nm) 88.746 88.347 87.888 87.264 153.565 n₂₀ 2.8158519 1.9330235 1.6717189 1.6472351 1.6392609 k₂₀ 3.0739838 0.6225271 0.3550776 0.2650084 0.3111392 d₂₀ (nm) 4.992 60.492 132.384 194.269 132.434 When n₁ ≧ n₁₀, n_(1m) = 0.0496790 0.0539771 0.0559290 0.0605103 0.0493213 When n₁ < n₁₀, n_(1m) = 0.0158618 0.0116589 0.0229565 0.0427002 0.0176343 When k₁ ≧ k₁₀, k_(1m) = 0.0339600 0.0324597 0.0502661 0.0714246 0.0448999 When k₁ < k₁₀, k_(1m) = 0.0196045 0.0413477 0.0524426 0.0547058 0.0377209 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.203 6.741 12.890 17.512 20.755 When d₁ < d₁₀, d_(1m) (nm) = 1.412 1.425 4.045 9.285 4.775 When n₂ ≧ n₂₀, n_(2m) = 0.7568213 0.2080432 0.1385022 0.1276587 0.0653149 When n₂ < n₂₀, n_(2m) = 0.6339124 0.1864246 0.1456726 0.1431897 0.1296729 When k₂ ≧ k₂₀, k_(2m) = 0.5784314 0.2482080 0.1472144 0.1310840 0.0863611 When k₂ < k₂₀, k_(2m) = 0.6241199 0.1496924 0.1027478 0.0854395 0.0904016 When d₂ ≧ d₂₀, d_(2m) (nm) = 1.695 9.818 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 1.276 6.130 21.225 35.287 17.454 0.93 ≦ NA ≦ 1.0 155 < T ≦ 165 Case 16-11 16-12 16-13 16-14 n₁₀ 1.7097149 1.7044725 1.7041849 1.7061658 k₁₀ 0.0750113 0.0790614 0.0664191 0.0592006 d₁₀ (nm) 152.537 217.265 215.910 215.675 n₂₀ 1.6527377 1.6350180 1.6625759 1.6951633 k₂₀ 0.2392317 0.2903973 0.2261823 0.1893046 d₂₀ (nm) 190.639 130.687 187.261 240.772 When n₁ ≧ n₁₀, n_(1m) = 0.0553772 0.0545740 0.0600366 0.0676270 When n₁ < n₁₀, n_(1m) = 0.0477368 0.0344788 0.0568494 0.0690149 When k₁ ≧ k₁₀, k_(1m) = 0.0715491 0.0525977 0.0752148 0.0835681 When k₁ < k₁₀, k_(1m) = 0.0443665 0.0337817 0.0404053 0.0425281 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 16.235 12.121 77.039 86.324 When n₂ ≧ n₂₀, n_(2m) = 0.1116882 0.0916113 0.1582788 0.1718628 When n₂ < n₂₀, n_(2m) = 0.1331189 0.1411133 0.1443433 0.1614490 When k₂ ≧ k₂₀, k_(2m) = 0.1061816 0.0827698 0.1097974 0.1248706 When k₂ < k₂₀, k_(2m) = 0.0766345 0.0918372 0.0766272 0.0699548 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 27.428 17.505 27.098 73.085

0.93 ≦ NA ≦ 1.0 165 < T ≦ 175 30/35 Case 17-01 17-02 17-03 17-04 17-05 n₁₀ 1.9650460 1.9384951 1.9139584 1.7857662 1.7433983 k₁₀ 0.1748342 0.1550287 0.1299465 0.1574086 0.1202381 d₁₀ (nm) 15.368 12.323 11.343 86.539 87.036 n₂₀ 1.7719438 1.6895811 1.6883766 1.7907030 1.6559011 k₂₀ 0.5219218 0.3734128 0.3007198 0.6497694 0.3733381 d₂₀ (nm) 124.100 189.293 246.427 59.718 125.629 When n₁ ≧ n₁₀, n_(1m) = 0.1023816 0.1220520 0.1341687 0.0495288 0.0535669 When n₁ < n₁₀, n_(1m) = 0.0697961 0.0912976 0.1083984 0.0051111 0.0188965 When k₁ ≧ k₁₀, k_(1m) = 0.0830420 0.1112122 0.1288184 0.0186707 0.0452673 When k₁ < k₁₀, k_(1m) = 0.1016052 0.1222986 0.1299465 0.0330212 0.0491577 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.001 5.526 6.413 5.954 11.233 When d₁ < d₁₀, d_(1m) (nm) = 2.956 3.739 4.697 0.624 3.144 When n₂ ≧ n₂₀, n_(2m) = 0.1581653 0.1572925 0.1540161 0.0858301 0.1199121 When n₂ < n₂₀, n_(2m) = 0.1927075 0.1754407 0.1685632 0.1889197 0.1519067 When k₂ ≧ k₂₀, k_(2m) = 0.1753381 0.1419458 0.1368945 0.0730774 0.1241467 When k₂ < k₂₀, k_(2m) = 0.1306897 0.1171997 0.1067334 0.1258240 0.0983862 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 51.895 79.651 119.351 3.741 21.467 0.93 ≦ NA ≦ 1.0 165 < T ≦ 175 Case 17-06 17-07 17-08 17-09 17-10 n₁₀ 1.7262549 1.7236673 1.7140199 1.7096017 1.7107217 k₁₀ 0.0993784 0.0842645 0.0949670 0.0783956 0.0680252 d₁₀ (nm) 86.812 87.109 152.601 152.026 152.100 n₂₀ 1.6373093 1.6685549 1.6238426 1.6437329 1.6799600 k₂₀ 0.2753256 0.2274459 0.3258368 0.2483227 0.2063397 d₂₀ (nm) 186.729 241.120 125.450 182.921 236.403 When n₁ ≧ n₁₀, n_(1m) = 0.0583655 0.0638147 0.0459595 0.0526709 0.0601990 When n₁ < n₁₀, n_(1m) = 0.0389001 0.0503784 0.0111768 0.0448047 0.0600891 When k₁ ≧ k₁₀, k_(1m) = 0.0685583 0.0805896 0.0359302 0.0672742 0.0800940 When k₁ < k₁₀, k_(1m) = 0.0538513 0.0560901 0.0310425 0.0434424 0.0457349 When d₁ ≧ d₁₀, d_(1m) (nm) = 15.725 22.939 17.229 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 8.012 11.976 2.824 14.351 24.120 When n₂ ≧ n₂₀, n_(2m) = 0.1242969 0.1275708 0.0486890 0.1084961 0.1263135 When n₂ < n₂₀, n_(2m) = 0.1456055 0.1521838 0.1337903 0.1356079 0.1464233 When k₂ ≧ k₂₀, k_(2m) = 0.1234131 0.1338855 0.0591821 0.0969312 0.1151416 When k₂ < k₂₀, k_(2m) = 0.0846008 0.0776428 0.0858325 0.0756372 0.0703125 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 66.105 78.842 17.102 28.470 72.561

0.93 ≦ NA ≦ 1.0 165 < T ≦ 175 31/35 Case 17-11 17-12 17-13 n₁₀ 1.7042582 1.7037677 1.7056779 k₁₀ 0.0836625 0.0692974 0.0609868 d₁₀ (nm) 216.186 215.313 215.198 n₂₀ 1.6202806 1.6544674 1.6903958 k₂₀ 0.3033538 0.2346728 0.1952987 d₂₀ (nm) 123.599 179.446 232.683 When n₁ ≧ n₁₀, n_(1m) = 0.0501758 0.0567249 0.0651611 When n₁ < n₁₀, n_(1m) = 0.0271130 0.0522852 0.0658081 When k₁ ≧ k₁₀, k_(1m) = 0.0439600 0.0710352 0.0811584 When k₁ < k₁₀, k_(1m) = 0.0300366 0.0394434 0.0413635 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 9.341 23.552 82.870 When n₂ ≧ n₂₀, n_(2m) = 0.0785254 0.1613647 0.1758447 When n₂ < n₂₀, n_(2m) = 0.1457166 0.1478357 0.1648547 When k₂ ≧ k₂₀, k_(2m) = 0.0611975 0.1025415 0.1200317 When k₂ < k₂₀, k_(2m) = 0.0887231 0.0762732 0.0707166 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 17.421 28.206 71.908 0.93 ≦ NA ≦ 1.0 175 < T ≦ 185 Case 18-01 18-02 18-03 18-04 18-05 n₁₀ 1.9750220 1.9943589 1.9365478 1.8874503 1.7406539 k₁₀ 0.3055970 0.1905841 0.1715491 0.1503402 0.1271964 d₁₀ (nm) 17.312 13.627 12.200 12.006 86.109 n₂₀ 1.6357631 1.7309349 1.6649916 1.6561886 1.6157675 k₂₀ 0.8207912 0.5263943 0.3790440 0.2991899 0.3771605 d₂₀ (nm) 66.973 122.033 183.216 242.151 120.682 When n₁ ≧ n₁₀, n_(1m) = 0.0935791 0.1114148 0.1215747 0.1285913 0.0513330 When n₁ < n₁₀, n_(1m) = 0.0459473 0.0702148 0.0894250 0.1026367 0.0144434 When k₁ ≧ k₁₀, k_(1m) = 0.0590857 0.0871582 0.1112146 0.1261365 0.0386914 When k₁ < k₁₀, k_(1m) = 0.0823853 0.1098083 0.1208740 0.1243677 0.0453528 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.436 4.283 5.306 6.728 10.132 When d₁ < d₁₀, d_(1m) (nm) = 1.707 2.491 3.559 4.870 2.323 When n₂ ≧ n₂₀, n_(2m) = 0.1368286 0.1494128 0.1559277 0.1523608 0.0829712 When n₂ < n₂₀, n_(2m) = 0.2106677 0.1994727 0.1768091 0.1649011 0.1612537 When k₂ ≧ k₂₀, k_(2m) = 0.1566431 0.1521973 0.1368372 0.1332068 0.0933081 When k₂ < k₂₀, k_(2m) = 0.1361353 0.1253687 0.1152344 0.1052795 0.0942554 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 18.814 47.829 81.274 118.000 24.527

0.93 ≦ NA ≦ 1.0 175 < T ≦ 185 32/35 Case 18-06 18-07 18-08 18-09 18-10 n₁₀ 1.7253418 1.7237735 1.7126639 1.7091592 1.7108527 k₁₀ 0.1032843 0.0864157 0.0996282 0.0809109 0.0696108 d₁₀ (nm) 86.339 86.885 151.701 151.551 151.827 n₂₀ 1.6224018 1.6650124 1.5953952 1.6344497 1.6784072 k₂₀ 0.2809650 0.2327133 0.3310599 0.2545275 0.2111338 d₂₀ (nm) 178.956 231.784 118.977 174.271 226.839 When n₁ ≧ n₁₀, n_(1m) = 0.0565039 0.0626416 0.0424548 0.0505127 0.0583557 When n₁ < n₁₀, n_(1m) = 0.0377893 0.0495728 0.0068591 0.0425964 0.0570093 When k₁ ≧ k₁₀, k_(1m) = 0.0671277 0.0801477 0.0264331 0.0654321 0.0790332 When k₁ < k₁₀, k_(1m) = 0.0514600 0.0546265 0.0262610 0.0409290 0.0440662 When d₁ ≧ d₁₀, d_(1m) (nm) = 14.314 20.851 14.034 22.266 ∞ When d₁ < d₁₀, d_(1m) (nm) = 7.519 11.390 1.678 12.457 21.354 When n₂ ≧ n₂₀, n_(2m) = 0.1133289 0.1230408 0.0286230 0.1046033 0.1258447 When n₂ < n₂₀, n_(2m) = 0.1506311 0.1572058 0.1416589 0.1413440 0.1529517 When k₂ ≧ k₂₀, k_(2m) = 0.1148096 0.1304126 0.0346130 0.0907129 0.1118689 When k₂ < k₂₀, k_(2m) = 0.0848999 0.0792493 0.0817810 0.0764514 0.0721448 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 64.642 80.544 18.599 31.028 73.232 0.93 ≦ NA ≦ 1.0 175 < T ≦ 185 Case 18-11 18-12 18-13 n₁₀ 1.7032995 1.7035257 1.7058486 k₁₀ 0.0874338 0.0712651 0.0623526 d₁₀ (nm) 215.388 214.888 214.924 n₂₀ 1.6000078 1.6490638 1.6902455 k₂₀ 0.3100603 0.2413259 0.1999123 d₂₀ (nm) 116.088 170.219 222.958 When n₁ ≧ n₁₀, n_(1m) = 0.0459119 0.0540906 0.0637158 When n₁ < n₁₀, n_(1m) = 0.0201135 0.0472498 0.0624988 When k₁ ≧ k₁₀, k_(1m) = 0.0380823 0.0692078 0.0795654 When k₁ < k₁₀, k_(1m) = 0.0261584 0.0371997 0.0400098 When d₁ ≧ d₁₀, d_(1m) (nm) = 25.691 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 6.401 18.086 80.109 When n₂ ≧ n₂₀, n_(2m) = 0.0666833 0.1564661 0.1701733 When n₂ < n₂₀, n_(2m) = 0.1555847 0.1549194 0.1734229 When k₂ ≧ k₂₀, k_(2m) = 0.0497668 0.0999182 0.1182764 When k₂ < k₂₀, k_(2m) = 0.0866650 0.0781360 0.0731396 When d₂ ≧ d₂₀, d_(2m) (nm) = 13.606 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 18.924 29.474 72.740

0.93 ≦ NA ≦ 1.0 185 < T ≦ 195 33/35 Case 19-01 19-02 19-03 19-04 19-05 n₁₀ 2.0157422 1.9298641 1.9158213 1.9035507 1.7387191 k₁₀ 0.3310994 0.1874025 0.1413868 0.0919796 0.1333266 d₁₀ (nm) 15.233 12.335 11.496 11.593 85.772 n₂₀ 1.5732193 1.6401635 1.6782430 1.7330388 1.5838112 k₂₀ 0.8191417 0.3856200 0.3150440 0.2716233 0.3839989 d₂₀ (nm) 66.313 174.874 226.685 274.138 113.170 When n₁ ≧ n₁₀, n_(1m) = 0.0908862 0.1198010 0.1318933 0.1353418 0.0494861 When n₁ < n₁₀, n_(1m) = 0.0435144 0.0881482 0.1071143 0.1119397 0.0110315 When k₁ ≧ k₁₀, k_(1m) = 0.0607654 0.1097412 0.1276587 0.1301843 0.0306482 When k₁ < k₁₀, k_(1m) = 0.0886279 0.1159265 0.1266907 0.0919796 0.0445325 When d₁ ≧ d₁₀, d_(1m) (nm) = 2.825 5.183 6.173 7.339 9.205 When d₁ < d₁₀, d_(1m) (nm) = 1.353 3.517 4.556 5.508 1.748 When n₂ ≧ n₂₀, n_(2m) = 0.1250940 0.1513354 0.1454334 0.1421106 0.0499280 When n₂ < n₂₀, n_(2m) = 0.1772742 0.1779919 0.1691821 0.1744556 0.1654175 When k₂ ≧ k₂₀, k_(2m) = 0.1164954 0.1335864 0.1351135 0.1421582 0.0743848 When k₂ < k₂₀, k_(2m) = 0.1392041 0.1184119 0.1117639 0.1051697 0.0978845 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 17.571 78.501 112.763 138.595 25.987 0.93 ≦ NA ≦ 1.0 185 < T ≦ 195 Case 19-06 19-07 19-08 19-09 19-10 n₁₀ 1.7256246 1.7253546 1.7287042 1.7096582 1.7121643 k₁₀ 0.1055723 0.0874820 0.0760165 0.0821714 0.0705329 d₁₀ (nm) 86.279 86.928 87.515 151.624 152.001 n₂₀ 1.6177137 1.6696157 1.7081188 1.6358848 1.6853812 k₂₀ 0.2895611 0.2389730 0.2041866 0.2635969 0.2167566 d₂₀ (nm) 168.375 220.361 272.150 162.984 215.233 When n₁ ≧ n₁₀, n_(1m) = 0.0562903 0.0628687 0.0679712 0.0505103 0.0586621 When n₁ < n₁₀, n_(1m) = 0.0396094 0.0498669 0.0509912 0.0389160 0.0543164 When k₁ ≧ k₁₀, k_(1m) = 0.0670349 0.0806128 0.0832776 0.0662488 0.0789514 When k₁ < k₁₀, k_(1m) = 0.0491772 0.0538904 0.0576746 0.0390271 0.0434973 When d₁ ≧ d₁₀, d_(1m) (nm) = 13.425 20.169 39.294 20.568 ∞ When d₁ < d₁₀, d_(1m) (nm) = 7.774 11.144 12.836 11.141 20.056 When n₂ ≧ n₂₀, n_(2m) = 0.1053076 0.1213562 0.1287134 0.1062195 0.1257849 When n₂ < n₂₀, n_(2m) = 0.1536951 0.1604126 0.1670996 0.1450281 0.1574817 When k₂ ≧ k₂₀, k_(2m) = 0.1136377 0.1320007 0.1531152 0.0931067 0.1145862 When k₂ < k₂₀, k_(2m) = 0.0898669 0.0840454 0.0776611 0.0825256 0.0770361 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 45.429 80.918 110.597 30.017 74.310

0.93 ≦ NA ≦ 1.0 185 < T ≦ 195 34/35 Case 19-11 19-12 19-13 19-14 19-15 n₁₀ 1.7151566 1.7029318 1.7041956 1.7070069 1.7080920 k₁₀ 0.0645755 0.0900998 0.0721897 0.0633145 0.0595697 d₁₀ (nm) 152.412 215.656 215.114 215.207 215.250 n₂₀ 1.7135234 1.5920483 1.6533659 1.6971996 1.7125257 k₂₀ 0.1842756 0.3226491 0.2502000 0.2048445 0.1741269 d₂₀ (nm) 268.692 105.543 158.704 211.558 267.229 When n₁ ≧ n₁₀, n_(1m) = 0.0656799 0.0437866 0.0537561 0.0639758 0.0752185 When n₁ < n₁₀, n_(1m) = 0.0585193 0.0130481 0.0437659 0.0602637 0.0712415 When k₁ ≧ k₁₀, k_(1m) = 0.0803796 0.0379236 0.0696973 0.0785339 0.0793298 When k₁ < k₁₀, k_(1m) = 0.0475867 0.0209644 0.0354407 0.0397900 0.0383728 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ 20.412 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 76.169 3.912 15.725 78.897 136.900 When n₂ ≧ n₂₀, n_(2m) = 0.1359851 0.0436487 0.1238757 0.1440674 0.1618445 When n₂ < n₂₀, n_(2m) = 0.1709363 0.1590417 0.1491174 0.1814563 0.2117529 When k₂ ≧ k₂₀, k_(2m) = 0.1377368 0.0580493 0.1037561 0.1202234 0.1371057 When k₂ < k₂₀, k_(2m) = 0.0711096 0.0823193 0.0849219 0.0779297 0.0717078 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 9.984 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 82.771 19.617 23.813 73.684 77.607 0.93 ≦ NA ≦ 1.0 195 < T ≦ 205 Case 20-01 20-02 20-03 20-04 20-05 n₁₀ 1.9115074 1.9153788 1.8712999 1.7275221 1.7279210 k₁₀ 0.1960527 0.1490337 0.0897979 0.1065695 0.0881248 d₁₀ (nm) 13.258 11.515 14.536 86.590 87.122 n₂₀ 1.6255021 1.6682692 1.7614462 1.6227655 1.6778177 k₂₀ 0.3984556 0.3197853 0.2821612 0.3041284 0.2471127 d₂₀ (nm) 164.068 218.507 257.799 156.467 209.069 When n₁ ≧ n₁₀, n_(1m) = 0.1142444 0.1325989 0.1158582 0.0562817 0.0637024 When n₁ < n₁₀, n_(1m) = 0.0852515 0.1080505 0.0942114 0.0426550 0.0501379 When k₁ ≧ k₁₀, k_(1m) = 0.1044482 0.1295020 0.1096521 0.0681348 0.0804810 When k₁ < k₁₀, k_(1m) = 0.1084790 0.1269031 0.0897979 0.0488770 0.0543994 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.346 6.134 8.659 13.270 20.006 When d₁ < d₁₀, d_(1m) (nm) = 3.730 4.524 6.443 8.305 10.905 When n₂ ≧ n₂₀, n_(2m) = 0.1424097 0.1416443 0.1412390 0.1051294 0.1236353 When n₂ < n₂₀, n_(2m) = 0.1779224 0.1667200 0.1823743 0.1526196 0.1593042 When k₂ ≧ k₂₀, k_(2m) = 0.1351575 0.1341370 0.1542419 0.1188623 0.1364233 When k₂ < k₂₀, k_(2m) = 0.1244714 0.1144324 0.1102271 0.0976929 0.0887854 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 70.107 105.511 128.903 31.502 77.053

0.93 ≦ NA ≦ 1.0 195 < T ≦ 205 35/35 Case 20-06 20-07 20-08 20-09 20-10 n₁₀ 1.7316602 1.7109076 1.7140510 1.7169074 1.7034522 k₁₀ 0.0769958 0.0825870 0.0712311 0.0659464 0.0912009 d₁₀ (nm) 87.563 152.078 152.368 152.739 216.873 n₂₀ 1.7153560 1.6429824 1.6947912 1.7201685 1.5969711 k₂₀ 0.2092703 0.2767726 0.2239389 0.1888883 0.3506487 d₂₀ (nm) 261.518 151.325 204.003 258.117 92.838 When n₁ ≧ n₁₀, n_(1m) = 0.0685693 0.0512622 0.0601404 0.0671716 0.0436548 When n₁ < n₁₀, n_(1m) = 0.0495715 0.0375720 0.0532251 0.0484131 0.0089709 When k₁ ≧ k₁₀, k_(1m) = 0.0827515 0.0683850 0.0790723 0.0783716 0.0369128 When k₁ < k₁₀, k_(1m) = 0.0588892 0.0391077 0.0446033 0.0456335 0.0165588 When d₁ ≧ d₁₀, d_(1m) (nm) = 35.460 20.848 ∞ ∞ 19.781 When d₁ < d₁₀, d_(1m) (nm) = 11.967 10.711 16.311 17.445 2.680 When n₂ ≧ n₂₀, n_(2m) = 0.1321082 0.1010400 0.1225134 0.1362366 0.0345703 When n₂ < n₂₀, n_(2m) = 0.1646814 0.1448950 0.1569727 0.1688831 0.1562476 When k₂ ≧ k₂₀, k_(2m) = 0.1585754 0.0998694 0.1194824 0.1443347 0.0797021 When k₂ < k₂₀, k_(2m) = 0.0798230 0.0905042 0.0814771 0.0735376 0.0638440 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 10.032 When d₂ < d₂₀, d_(2m) (nm) = 87.011 25.146 1.899 78.182 16.775 0.93 ≦ NA ≦ 1.0 195 < T ≦ 205 Case 20-11 20-12 20-13 n₁₀ 1.7053294 1.7084550 1.7088490 k₁₀ 0.0723641 0.0642090 0.0611230 d₁₀ (nm) 215.802 215.782 215.750 n₂₀ 1.6624125 1.7063284 1.7155496 k₂₀ 0.2625944 0.2112603 0.1784523 d₂₀ (nm) 147.133 200.541 257.296 When n₁ ≧ n₁₀, n_(1m) = 0.0548254 0.0651489 0.0765845 When n₁ < n₁₀, n_(1m) = 0.0418201 0.0593726 0.0732715 When k₁ ≧ k₁₀, k_(1m) = 0.0710583 0.0775024 0.0765796 When k₁ < k₁₀, k_(1m) = 0.0355750 0.0411511 0.0355579 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 15.640 79.525 76.637 When n₂ ≧ n₂₀, n_(2m) = 0.1192065 0.1417981 0.1626379 When n₂ < n₂₀, n_(2m) = 0.1432642 0.1798657 0.2073511 When k₂ ≧ k₂₀, k_(2m) = 0.1091699 0.1229614 0.1404065 When k₂ < k₂₀, k_(2m) = 0.0923608 0.0791760 0.0746033 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 19.545 71.258 73.210

In accordance with a third embodiment of the invention, an antireflective film has a two-layer structure and is used in a process for manufacturing a semiconductor device by being provided between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, for exposure of the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.0<NA≦1.1 In accordance with the third embodiment of the invention, an exposure method is used in a process for manufacturing a semiconductor device and includes providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.0<NA≦1.1

The antireflective film or the antireflective film used in the exposure method according to the third embodiment of the invention includes an upper layer having a complex refractive index N₁ , and a lower layer having a complex refractive index N₂, the complex refractive indexes N₁ and N₂ being represented by the following equations: N ₁ =n ₁ −k ₁ i N ₂ =n ₂ −k ₂i Assuming that the thickness of the upper layer is d₁ (unit: nm) and the thickness of the lower layer is d₂ (unit: nm), when any one of the combinations of values of [n₁₀, k₁₀, d₁₀, n₂₀, k₂₀, d₂₀] described below is selected depending on the thickness T of the silicon oxide film, n₁, k₁, d₁, n₂, k₂, and d₂ satisfy the following relational expression: {(n ₁ −n ₁₀)/(n _(1m) −n ₁₀)}²+{(k ₁ −k ₁₀)/(k _(1m) −k ₁₀)}²+{(d ₁ −d ₁₀)/(d _(1m) −d ₁₀)}²+{(n ₂ −n ₂₀)/(n _(2m) −n ₂₀)}²+{(k ₂ −k ₂₀)/(k _(2m) −k ₂₀)}²+{(d ₂ −d ₂₀)/(d _(2m) −d ₂₀)}²≦1

However, a value of n_(1m) in a corresponding case is selected on the basis of a magnitude relation between n₁ and n₁₀; a value of k_(1m) in a corresponding case is selected on the basis of a magnitude relation between k₁ and k₁₀; a value of d_(1m) in a corresponding case is selected on the basis of a magnitude relation between d₁ and d₁₀; a value of n_(2m) in a corresponding case is selected on the basis of a magnitude relation between n₂ and n₂₀; a value of k_(2m) in a corresponding case is selected on the basis of a magnitude relation between k₂ and k₂₀; and a value of d_(2m) in a corresponding case is selected on the basis of a magnitude relation between d₂ and d₂₀. In the tables below, in the line of “When n₁≧n₁₀, n_(1m)=”, each value in the right columns is “n_(1m)−n₁₀”; in the line of “When n₁<n₁₀, n_(1m)=”, each value in the right columns is “n₁₀−n_(1m)”; in the line of “When k₁≧k₁₀, k_(1m)=”, each value in the right columns is “k_(1m)−k₁₀”; in the line of “When k₁<k₁₀, k_(1m)=”, each value in the right columns is “k₁₀−k_(1m)”; in the line of “When d₁≧d₁₀, d_(1m) (nm)=”, each value (unit: nm) in the right columns is “d_(1m)−d₁₀”; in the line of “When d₁<d₁₀, d_(1m) (nm)=”, each value (unit: nm) in the right columns is “d₁₀−d_(1m)”; in the line of “When n₂≧n₂₀, n_(2m)=”, each value in the right columns is “n_(2m)−n₂₀”; in the line of “When n₂<n₂₀, n_(2m)=”, each value in the right columns is “n₂₀−n_(2m)”; in the line of “When k₂≧k₂₀, k_(2m)=”, each value in the right columns is “k_(2m)−k₂₀”; in the line of “When k₂<k₂₀, k_(2m)=”, each value in the right columns is “k₂₀−k_(2m)”; in the line of “When d₂≧d₂₀, d_(2m) (nm)=”, each value (unit: nm) in the right columns is “d_(2m)−d₂₀”; and in the line of “When d₂<d₂₀, d_(2m) (nm)=”, each value (unit: nm) in the right columns is “d₂₀−d_(2m)”.

1.0 < NA ≦ 1.1 2 ≦ T ≦ 15 1/34 Case 1-01 1-02 1-03 1-04 1-05 n₁₀ 2.1002530 1.9014716 1.8817545 1.8713707 1.8894555 k₁₀ 0.0458360 0.1897321 0.1528631 0.1131033 0.1025295 d₁₀ (nm) 25.245 35.107 29.787 20.680 13.808 n₂₀ 3.6613926 3.6832791 2.2496615 1.8471360 1.7319643 k₂₀ 2.0917723 0.6232721 0.5909670 0.3799287 0.2879285 d₂₀ (nm) 4.980 30.030 58.673 139.609 214.126 When n₁ ≧ n₁₀, n_(1m) = 0.0805884 0.0768188 0.0754700 0.0824719 0.1060120 When n₁ < n₁₀, n_(1m) = 0.0800293 0.0653833 0.0584985 0.0566113 0.0706006 When k₁ ≧ k₁₀, k_(1m) = 0.0719092 0.0582312 0.0563574 0.0660449 0.0898218 When k₁ < k₁₀, k_(1m) = 0.0458360 0.0865906 0.0835730 0.0866101 0.1025295 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.502 5.628 6.909 7.972 7.080 When d₁ < d₁₀, d_(1m) (nm) = 2.843 4.121 4.441 4.574 4.198 When n₂ ≧ n₂₀, n_(2m) = 0.2511194 0.1375208 0.1500757 0.1234998 0.1256079 When n₂ < n₂₀, n_(2m) = 0.2478674 0.1642285 0.1673572 0.1560254 0.1556494 When k₂ ≧ k₂₀, k_(2m) = 0.2675171 0.1813342 0.1899841 0.1681030 0.1175488 When k₂ < k₂₀, k_(2m) = 0.2241895 0.1363525 0.1337048 0.1033130 0.0926782 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.668 1.453 8.618 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 0.632 1.466 7.778 59.745 82.499 1.0 < NA ≦ 1.1 2 ≦ T ≦ 15 Case 1-06 1-07 1-08 1-09 1-10 n₁₀ 1.8919474 1.8730447 1.7734811 1.7581396 1.7209511 k₁₀ 0.0886250 0.0995044 0.0942049 0.0894114 0.0778149 d₁₀ (nm) 14.825 12.107 96.210 94.485 94.005 n₂₀ 1.7713589 1.6971361 2.0242448 1.8216770 1.6746822 k₂₀ 0.2959415 0.2384266 0.4293783 0.2841737 0.2144041 d₂₀ (nm) 207.437 276.341 66.416 135.446 211.729 When n₁ ≧ n₁₀, n_(1m) = 0.1001855 0.1196069 0.0579333 0.0504431 0.0487988 When n₁ < n₁₀, n_(1m) = 0.0678418 0.0862451 0.0202832 0.0122217 0.0195996 When k₁ ≧ k₁₀, k_(1m) = 0.0828455 0.1086084 0.0429993 0.0327991 0.0449207 When k₁ < k₁₀, k_(1m) = 0.0886250 0.0995044 0.0440173 0.0383289 0.0441089 When d₁ ≧ d₁₀, d_(1m) (nm) = 7.253 7.622 12.574 14.854 20.756 When d₁ < d₁₀, d_(1m) (nm) = 4.294 5.017 3.736 2.430 5.594 When n₂ ≧ n₂₀, n_(2m) = 0.1250818 0.1274023 0.1038489 0.1178979 0.0654700 When n₂ < n₂₀, n_(2m) = 0.1542432 0.1390320 0.1236121 0.1075012 0.0984851 When k₂ ≧ k₂₀, k_(2m) = 0.1281506 0.1059973 0.1023560 0.1052271 0.0726978 When k₂ < k₂₀, k_(2m) = 0.0937659 0.0853320 0.1026587 0.0735156 0.0618335 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 5.946 13.526 ∞ When d₂ < d₂₀, d_(2m) (nm) = 79.532 130.356 6.729 7.895 26.663

1.0 < NA ≦ 1.1 2 ≦ T ≦ 15 2/34 Case 1-11 1-12 1-13 1-14 1-15 n₁₀ 1.7166765 1.7166130 1.7322234 1.7049421 1.7064564 k₁₀ 0.0677623 0.0755230 0.0835200 0.0655754 0.0573750 d₁₀ (nm) 92.667 182.689 166.765 163.194 160.636 n₂₀ 1.6766991 6.5634515 1.9262925 1.6664527 1.6879767 k₂₀ 0.1797231 3.2079655 0.3700807 0.1954874 0.1655431 d₂₀ (nm) 270.198 1.017 69.546 208.736 264.028 When n₁ ≧ n₁₀, n_(1m) = 0.0538269 0.0791455 0.0502930 0.0463574 0.0530786 When n₁ < n₁₀, n_(1m) = 0.0365198 0.0150903 0.0019495 0.0298389 0.0507080 When k₁ ≧ k₁₀, k_(1m) = 0.0633020 0.0382202 0.0176428 0.0426367 0.0606909 When k₁ < k₁₀, k_(1m) = 0.0490027 0.0352063 0.0101367 0.0363086 0.0412036 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ 44.970 29.513 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 11.921 5.503 0.534 14.465 82.763 When n₂ ≧ n₂₀, n_(2m) = 0.0746594 0.3760779 0.0943127 0.0451807 0.0846008 When n₂ < n₂₀, n_(2m) = 0.1088159 0.6761377 0.0252344 0.0894604 0.1080103 When k₂ ≧ k₂₀, k_(2m) = 0.0728833 0.4281982 0.0109839 0.0413684 0.0543652 When k₂ < k₂₀, k_(2m) = 0.0561267 0.6156824 0.0921399 0.0546765 0.0510388 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 0.095 5.760 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 76.266 0.159 0.905 22.049 32.675 1.0 < NA ≦ 1.1 2 ≦ T ≦ 15 Case 1-16 1-17 1-18 1-19 1-20 n₁₀ 1.6929499 1.6905856 1.6919500 1.6995270 1.6946661 k₁₀ 0.0758677 0.0724871 0.0673580 0.0541447 0.0598692 d₁₀ (nm) 218.538 210.998 207.119 221.890 292.769 n₂₀ 1.7888879 1.7113381 1.6973679 1.6914313 5.7902895 k₂₀ 0.3373861 0.2424201 0.1951159 0.1602785 2.6464640 d₂₀ (nm) 83.914 155.877 222.394 261.841 1.370 When n₁ ≧ n₁₀, n_(1m) = 0.0154590 0.0284326 0.0459937 0.0695007 0.0688428 When n₁ < n₁₀, n_(1m) = 0.0644519 0.0618115 0.0647253 0.0614612 0.0576074 When k₁ ≧ k₁₀, k_(1m) = 0.0296802 0.0451062 0.0571143 0.0607031 0.0650110 When k₁ < k₁₀, k_(1m) = 0.0222290 0.0323779 0.0391223 0.0380823 0.0345483 When d₁ ≧ d₁₀, d_(1m) (nm) = 8.212 ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 25.706 29.733 39.073 91.262 43.839 When n₂ ≧ n₂₀, n_(2m) = 0.1222742 0.1267554 0.1643848 0.2245898 0.7013342 When n₂ < n₂₀, n_(2m) = 0.0248633 0.0660693 0.1720679 0.1025806 0.7193848 When k₂ ≧ k₂₀, k_(2m) = 0.0580225 0.0965234 0.1267737 0.1053369 0.5239075 When k₂ < k₂₀, k_(2m) = 0.0934216 0.0846191 0.0756384 0.0566919 0.6531299 When d₂ ≧ d₂₀, d_(2m) (nm) = 16.998 ∞ ∞ ∞ 0.304 When d₂ < d₂₀, d_(2m) (nm) = 2.716 12.405 72.248 75.278 0.354

1.0 < NA ≦ 1.1 2 ≦ T ≦ 15 3/34 Case 1-21 1-22 1-23 1-24 n₁₀ 1.6927273 1.6938682 1.6959215 1.6965163 k₁₀ 0.0641185 0.0632641 0.0601626 0.0560943 d₁₀ (nm) 275.960 269.814 266.236 263.874 n₂₀ 1.7993913 1.7248410 1.7076727 1.6984359 k₂₀ 0.3510467 0.2487428 0.2009217 0.1709410 d₂₀ (nm) 81.101 150.052 214.823 277.894 When n₁ ≧ n₁₀, n_(1m) = 0.0462292 0.0536658 0.0656104 0.0800903 When n₁ < n₁₀, n_(1m) = 0.0484851 0.0418225 0.0432129 0.0552332 When k₁ ≧ k₁₀, k_(1m) = 0.0620630 0.0619458 0.0615613 0.0629382 When k₁ < k₁₀, k_(1m) = 0.0362708 0.0377515 0.0406262 0.0422571 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 29.467 27.448 97.485 175.134 When n₂ ≧ n₂₀, n_(2m) = 0.1596558 0.1810303 0.3970593 0.3365332 When n₂ < n₂₀, n_(2m) = 0.1100391 0.2908167 0.2424414 0.2178503 When k₂ ≧ k₂₀, k_(2m) = 0.1557141 0.1886804 0.2145630 0.2194727 When k₂ < k₂₀, k_(2m) = 0.1210901 0.1012720 0.0897449 0.0805957 When d₂ ≧ d₂₀, d_(2m) (nm) = 25.591 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 9.432 27.332 78.495 131.894 1.0 < NA ≦ 1.1 15 ≦ T ≦ 25 Case 2-01 2-02 2-03 2-04 2-05 n₁₀ 1.8588603 1.8671897 1.8793061 1.8953035 1.8743725 k₁₀ 0.2152026 0.2000001 0.1213485 0.0980077 0.1084578 d₁₀ (nm) 37.726 35.681 21.414 14.908 12.201 n₂₀ 5.0977045 3.0932325 1.8727645 1.7635602 1.6884757 k₂₀ 0.6974562 0.7063642 0.4149520 0.3109442 0.2470663 d₂₀ (nm) 19.647 34.687 129.308 200.446 269.437 When n₁ ≧ n₁₀, n_(1m) = 0.0758728 0.0747766 0.0798340 0.0988049 0.1178149 When n₁ < n₁₀, n_(1m) = 0.0592542 0.0589661 0.0549634 0.0658325 0.0841418 When k₁ ≧ k₁₀, k_(1m) = 0.0598401 0.0578650 0.0632202 0.0814417 0.1076917 When k₁ < k₁₀, k_(1m) = 0.0788342 0.0811694 0.0865027 0.0980077 0.1084578 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.593 5.891 7.449 6.933 7.359 When d₁ < d₁₀, d_(1m) (nm) = 4.233 4.238 4.249 4.053 4.794 When n₂ ≧ n₂₀, n_(2m) = 0.1534875 0.1581152 0.1275403 0.1254932 0.1262524 When n₂ < n₂₀, n_(2m) = 0.1697559 0.1894849 0.1565967 0.1540796 0.1389709 When k₂ ≧ k₂₀, k_(2m) = 0.1955396 0.2168408 0.1812842 0.1267053 0.1044556 When k₂ < k₂₀, k_(2m) = 0.1505579 0.1602844 0.1066724 0.0950110 0.0860864 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.659 2.512 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 0.674 2.526 26.047 76.118 126.536

1.0 < NA ≦ 1.1 15 < T ≦ 25 4/34 Case 2-06 2-07 2-08 2-09 2-10 n₁₀ 1.7693190 1.8089249 1.7628339 1.7223442 1.7176215 k₁₀ 0.1013402 0.1064114 0.0939832 0.0810686 0.0701007 d₁₀ (nm) 103.520 98.052 94.416 93.840 92.613 n₂₀ 3.2583829 3.5132584 1.8414170 1.6728089 1.6759231 k₂₀ 2.5781374 0.5501157 0.3092618 0.2260423 0.1876577 d₂₀ (nm) 3.121 29.615 125.923 203.086 261.422 When n₁ ≧ n₁₀, n_(1m) = 0.0673926 0.0573926 0.0482458 0.0469287 0.0525317 When n₁ < n₁₀, n_(1m) = 0.0182031 0.0185083 0.0097595 0.0170142 0.0338733 When k₁ ≧ k₁₀, k_(1m) = 0.0401636 0.0390552 0.0281750 0.0413513 0.0608655 When k₁ < k₁₀, k_(1m) = 0.0427917 0.0434326 0.0360242 0.0422778 0.0485864 When d₁ ≧ d₁₀, d_(1m) (nm) = 13.610 8.991 12.525 18.295 32.066 When d₁ < d₁₀, d_(1m) (nm) = 3.396 2.738 1.840 4.621 10.547 When n₂ ≧ n₂₀, n_(2m) = 0.2210974 0.0961951 0.1120178 0.0558118 0.0724255 When n₂ < n₂₀, n_(2m) = 0.3992041 0.1262915 0.1064856 0.0968689 0.1070728 When k₂ ≧ k₂₀, k_(2m) = 0.3438342 0.0862598 0.0939502 0.0666077 0.0700989 When k₂ < k₂₀, k_(2m) = 0.3502100 0.1067542 0.0758923 0.0625208 0.0568274 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.375 0.986 11.083 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 0.497 1.167 5.972 24.056 73.630 1.0 < NA ≦ 1.1 15 < T ≦ 25 Case 2-11 2-12 2-13 2-14 2-15 n₁₀ 1.7053748 1.7067869 1.7234396 1.7309823 1.6924662 k₁₀ 0.0681661 0.0592936 0.0819972 0.0887627 0.0804140 d₁₀ (nm) 163.030 160.569 177.819 175.110 219.254 n₂₀ 1.6640911 1.6873274 5.0800961 9.5526510 1.8031504 k₂₀ 0.2056957 0.1726858 4.2173316 0.4602806 0.3794202 d₂₀ (nm) 200.113 255.377 1.054 10.232 74.951 When n₁ ≧ n₁₀, n_(1m) = 0.0438354 0.0515637 0.0646301 0.0589197 0.0054749 When n₁ < n₁₀, n_(1m) = 0.0254907 0.0493457 0.0095056 0.0049573 0.0624841 When k₁ ≧ k₁₀, k_(1m) = 0.0375134 0.0575159 0.0321326 0.0226172 0.0163196 When k₁ < k₁₀, k_(1m) = 0.0331799 0.0410168 0.0264954 0.0199707 0.0128040 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ 31.849 25.868 2.747 When d₁ < d₁₀, d_(1m) (nm) = 12.067 30.487 3.026 1.416 23.308 When n₂ ≧ n₂₀, n_(2m) = 0.0383606 0.0825500 0.3294275 0.0929846 0.1306152 When n₂ < n₂₀, n_(2m) = 0.0871460 0.1052795 0.6618042 0.0695691 0.0087109 When k₂ ≧ k₂₀, k_(2m) = 0.0339417 0.0505530 0.2910742 0.0198328 0.0299487 When k₂ < k₂₀, k_(2m) = 0.0549512 0.0515552 0.6908167 0.0870068 0.0872510 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 0.079 0.102 14.451 When d₂ < d₂₀, d_(2m) (nm) = 19.637 29.589 0.186 0.076 0.824

1.0 < NA ≦ 1.1 15 < T ≦ 25 5/34 Case 2-16 2-17 2-18 2-19 2-20 n₁₀ 1.6899914 1.6915311 1.6993450 1.6920076 1.6934597 k₁₀ 0.0755734 0.0696615 0.0558443 0.0677866 0.0658489 d₁₀ (nm) 211.286 207.258 221.722 276.645 270.093 n₂₀ 1.7113670 1.6964473 1.6905618 1.8143335 1.7261499 k₂₀ 0.2592681 0.2049428 0.1670525 0.3967808 0.2668883 d₂₀ (nm) 147.090 213.635 253.347 72.378 141.360 When n₁ ≧ n₁₀, n_(1m) = 0.0235022 0.0424463 0.0685596 0.0429663 0.0523279 When n₁ < n₁₀, n_(1m) = 0.0594971 0.0645703 0.0572424 0.0479932 0.0410938 When k₁ ≧ k₁₀, k_(1m) = 0.0403162 0.0547461 0.0583691 0.0593103 0.0600049 When k₁ < k₁₀, k_(1m) = 0.0289734 0.0380127 0.0376013 0.0355176 0.0379749 When d₁ ≧ d₁₀, d_(1m) (nm) = 18.036 ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 26.582 37.673 84.779 28.006 25.642 When n₂ ≧ n₂₀, n_(2m) = 0.1259094 0.1555469 0.2302234 0.1717712 0.1831995 When n₂ < n₂₀, n_(2m) = 0.0501526 0.1747144 0.0944592 0.1059167 0.2850769 When k₂ ≧ k₂₀, k_(2m) = 0.0866736 0.1221960 0.1032471 0.1537634 0.1870032 When k₂ < k₂₀, k_(2m) = 0.0848877 0.0779785 0.0578296 0.1330688 0.1069617 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 19.935 ∞ When d₂ < d₂₀, d_(2m) (nm) = 9.771 69.780 73.090 7.607 20.837 1.0 < NA ≦ 1.1 15 < T ≦ 25 Case 2-21 2-22 n₁₀ 1.6956703 1.6963391 k₁₀ 0.0621151 0.0576411 d₁₀ (nm) 266.327 263.935 n₂₀ 1.7069279 1.6975975 k₂₀ 0.2113995 0.1780179 d₂₀ (nm) 206.262 269.259 When n₁ ≧ n₁₀, n_(1m) = 0.0646936 0.0790869 When n₁ < n₁₀, n_(1m) = 0.0423181 0.0536755 When k₁ ≧ k₁₀, k_(1m) = 0.0600012 0.0616785 When k₁ < k₁₀, k_(1m) = 0.0403015 0.0417126 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 96.199 173.391 When n₂ ≧ n₂₀, n_(2m) = 0.4184778 0.3488293 When n₂ < n₂₀, n_(2m) = 0.2491736 0.2216455 When k₂ ≧ k₂₀, k_(2m) = 0.2142920 0.2197681 When k₂ < k₂₀, k_(2m) = 0.0934741 0.0831250 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 76.168 129.228

1.0 < NA ≦ 1.1 25 < T ≦ 35 6/34 Case 3-01 3-02 3-03 3-04 3-05 n₁₀ 1.8231304 1.8934062 1.9014262 1.8787814 1.8198973 k₁₀ 0.2426967 0.1289044 0.1029443 0.1135143 0.1197953 d₁₀ (nm) 38.982 22.067 15.306 12.334 96.975 n₂₀ 4.7825941 1.9169501 1.7714781 1.6867670 4.7572984 k₂₀ 0.7852430 0.4577317 0.3309508 0.2583639 0.6218490 d₂₀ (nm) 19.992 118.684 191.572 261.269 20.274 When n₁ ≧ n₁₀, n_(1m) = 0.0699695 0.0767236 0.0951282 0.1154443 0.0479663 When n₁ < n₁₀, n_(1m) = 0.0498486 0.0532642 0.0626563 0.0817676 0.0146021 When k₁ ≧ k₁₀, k_(1m) = 0.0588489 0.0605774 0.0772998 0.1052600 0.0370215 When k₁ < k₁₀, k_(1m) = 0.0707385 0.0857886 0.1011462 0.1135143 0.0364331 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.137 6.730 6.574 7.047 7.725 When d₁ < d₁₀, d_(1m) (nm) = 3.775 3.826 3.782 4.562 2.005 When n₂ ≧ n₂₀, n_(2m) = 0.1872302 0.1343799 0.1259058 0.1236719 0.1156909 When n₂ < n₂₀, n_(2m) = 0.2029309 0.1567590 0.1523523 0.1408569 0.1282800 When k₂ ≧ k₂₀, k_(2m) = 0.2449841 0.2003137 0.1294177 0.1036865 0.0748242 When k₂ < k₂₀, k_(2m) = 0.1832959 0.1099609 0.0962476 0.0870068 0.1199268 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.864 ∞ ∞ ∞ 0.532 When d₂ < d₂₀, d_(2m) (nm) = 0.839 21.916 71.881 121.487 0.552 1.0 < NA ≦ 1.1 25 < T ≦ 35 Case 3-06 3-07 3-08 3-09 3-10 n₁₀ 1.7669399 1.7235821 1.7188964 1.7058208 1.7073313 k₁₀ 0.0997580 0.0847397 0.0726255 0.0710513 0.0613671 d₁₀ (nm) 94.208 93.618 92.505 162.764 160.462 n₂₀ 1.8558060 1.6692590 1.6760484 1.6616172 1.6880654 k₂₀ 0.3364471 0.2394056 0.1967286 0.2176394 0.1807904 d₂₀ (nm) 117.969 195.006 252.779 191.801 246.769 When n₁ ≧ n₁₀, n_(1m) = 0.0449036 0.0442456 0.0506409 0.0405530 0.0497949 When n₁ < n₁₀, n_(1m) = 0.0058435 0.0142969 0.0314514 0.0176917 0.0472620 When k₁ ≧ k₁₀, k_(1m) = 0.0200403 0.0369336 0.0583228 0.0316150 0.0541370 When k₁ < k₁₀, k_(1m) = 0.0309863 0.0404504 0.0477759 0.0303076 0.0405200 When d₁ ≧ d₁₀, d_(1m) (nm) = 10.713 16.167 24.298 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 1.043 3.709 9.337 7.078 23.845 When n₂ ≧ n₂₀, n_(2m) = 0.1063135 0.0450122 0.0699963 0.0309314 0.0781641 When n₂ < n₂₀, n_(2m) = 0.1037158 0.0932996 0.1043005 0.0818408 0.1014221 When k₂ ≧ k₂₀, k_(2m) = 0.0686243 0.0581018 0.0668628 0.0258777 0.0465137 When k₂ < k₂₀, k_(2m) = 0.0768091 0.0625977 0.0574854 0.0546838 0.0521045 When d₂ ≧ d₂₀, d_(2m) (nm) = 9.637 ∞ ∞ 13.452 ∞ When d₂ < d₂₀, d_(2m) (nm) = 3.465 21.705 32.653 17.168 25.940

1.0 < NA ≦ 1.1 25 < T ≦ 35 7/34 Case 3-11 3-12 3-13 3-14 3-15 3-16 n₁₀ 1.6893950 1.6912149 1.6993872 1.6931110 1.6955537 1.6962507 k₁₀ 0.0792587 0.0722082 0.0576769 0.0689939 0.0643335 0.0593120 d₁₀ (nm) 211.356 207.241 221.603 270.168 266.333 263.960 n₂₀ 1.7121469 1.6964479 1.6911809 1.7281714 1.7074500 1.6977843 k₂₀ 0.2795726 0.2163033 0.1749036 0.2885226 0.2235939 0.1860709 d₂₀ (nm) 139.203 205.754 244.825 133.446 198.195 261.024 When n₁ ≧ n₁₀, n_(1m) = 0.0187524 0.0389221 0.0673108 0.0502356 0.0624109 0.0782690 When n₁ < n₁₀, n_(1m) = 0.0561719 0.0620898 0.0525073 0.0397852 0.0411060 0.0522693 When k₁ ≧ k₁₀, k_(1m) = 0.0323267 0.0510889 0.0557678 0.0576538 0.0581616 0.0602515 When k₁ < k₁₀, k_(1m) = 0.0242261 0.0363989 0.0368542 0.0366370 0.0397400 0.0408899 When d₁ ≧ d₁₀, d_(1m) (nm) = 9.539 ∞ ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 23.792 36.062 80.743 23.618 94.755 119.700 When n₂ ≧ n₂₀, n_(2m) = 0.1258521 0.1531580 0.2394678 0.1860962 0.4430444 0.3636609 When n₂ < n₂₀, n_(2m) = 0.0334863 0.1783936 0.0871167 0.1489648 0.2583777 0.2256018 When k₂ ≧ k₂₀, k_(2m) = 0.0734656 0.1167761 0.1010718 0.1855286 0.2138647 0.2198901 When k₂ < k₂₀, k_(2m) = 0.0783704 0.0804089 0.0594067 0.1140149 0.0979895 0.0864600 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 6.823 66.025 33.786 17.363 72.201 97.445

1.0 < NA ≦ 1.1 35 < T ≦ 45 8/34 Case 4-01 4-02 4-03 4-04 4-05 n₁₀ 1.8741027 1.9162345 1.9099224 1.8839284 1.7973698 k₁₀ 0.2292405 0.1358555 0.1141224 0.1193744 0.1226911 d₁₀ (nm) 31.502 21.455 14.789 12.268 93.176 n₂₀ 2.4589695 1.9418040 1.7536831 1.6821215 2.1323779 k₂₀ 0.9273915 0.4998799 0.3442834 0.2672652 0.6525391 d₂₀ (nm) 39.688 110.373 186.067 253.238 46.828 When n₁ ≧ n₁₀, n_(1m) = 0.0646472 0.0749023 0.0953894 0.1145032 0.0393335 When n₁ < n₁₀, n_(1m) = 0.0466125 0.0512402 0.0611060 0.0810242 0.0058411 When k₁ ≧ k₁₀, k_(1m) = 0.0535095 0.0588599 0.0769971 0.1049219 0.0222083 When k₁ < k₁₀, k_(1m) = 0.0782300 0.0839917 0.1022253 0.1138464 0.0267273 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.763 5.873 6.052 6.690 7.237 When d₁ < d₁₀, d_(1m) (nm) = 3.092 3.244 3.414 4.349 0.847 When n₂ ≧ n₂₀, n_(2m) = 0.2061353 0.1383777 0.1254065 0.1201538 0.0908765 When n₂ < n₂₀, n_(2m) = 0.1985669 0.1593604 0.1521448 0.1405737 0.1202173 When k₂ ≧ k₂₀, k_(2m) = 0.2506677 0.2047961 0.1231897 0.1019714 0.0402307 When k₂ < k₂₀, k_(2m) = 0.1792896 0.1103943 0.0960205 0.0872583 0.1042542 When d₂ ≧ d₂₀, d_(2m) (nm) = 6.142 ∞ ∞ ∞ 4.028 When d₂ < d₂₀, d_(2m) (nm) = 4.657 20.982 70.019 92.164 2.915 1.0 < NA ≦ 1.1 35 < T ≦ 45 Case 4-06 4-07 4-08 4-09 4-10 n₁₀ 1.7231751 1.7198225 1.7057007 1.7079030 1.6886446 k₁₀ 0.0881939 0.0748307 0.0735111 0.0631371 0.0826816 d₁₀ (nm) 93.194 92.273 162.218 160.241 210.810 n₂₀ 1.6583398 1.6753837 1.6560667 1.6895692 1.7077667 k₂₀ 0.2493789 0.2040438 0.2270715 0.1875698 0.2975930 d₂₀ (nm) 187.627 244.025 183.673 237.741 132.542 When n₁ ≧ n₁₀, n_(1m) = 0.0413782 0.0488660 0.0374475 0.0482141 0.0106323 When n₁ < n₁₀, n_(1m) = 0.0123999 0.0300476 0.0153528 0.0446057 0.0519153 When k₁ ≧ k₁₀, k_(1m) = 0.0333630 0.0568799 0.0277051 0.0515784 0.0235608 When k₁ < k₁₀, k_(1m) = 0.0393298 0.0467004 0.0300195 0.0397412 0.0190234 When d₁ ≧ d₁₀, d_(1m) (nm) = 13.894 20.818 24.657 ∞ 6.948 When d₁ < d₁₀, d_(1m) (nm) = 3.123 8.547 5.758 21.149 21.403 When n₂ ≧ n₂₀, n_(2m) = 0.0360730 0.0689490 0.0276392 0.0753564 0.1220337 When n₂ < n₂₀, n_(2m) = 0.0901636 0.1032593 0.0781885 0.0941541 0.0190320 When k₂ ≧ k₂₀, k_(2m) = 0.0474146 0.0634253 0.0205627 0.0433423 0.0612073 When k₂ < k₂₀, k_(2m) = 0.0610718 0.0577832 0.0533984 0.0526196 0.0606079 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 8.473 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 20.321 31.703 15.881 21.519 3.543

1.0 < NA ≦ 1.1 35 < T ≦ 45 9/34 Case 4-11 4-12 4-13 4-14 n₁₀ 1.6995870 1.6927517 1.6954892 1.6961809 k₁₀ 0.0592337 0.0720967 0.0662812 0.0606151 d₁₀ (nm) 221.497 269.568 265.955 263.663 n₂₀ 1.6927290 1.7225076 1.7055518 1.6966094 k₂₀ 0.1818275 0.3075740 0.2340649 0.1927366 d₂₀ (nm) 235.781 126.653 190.864 253.572 When n₁ ≧ n₁₀, n_(1m) = 0.0661182 0.0430298 0.0571948 0.0777271 When n₁ < n₁₀, n_(1m) = 0.0480371 0.0376990 0.0396948 0.0514954 When k₁ ≧ k₁₀, k_(1m) = 0.0532056 0.0552930 0.0563965 0.0590613 When k₁ < k₁₀, k_(1m) = 0.0358557 0.0353455 0.0387683 0.0400696 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 78.174 21.398 89.629 112.221 When n₂ ≧ n₂₀, n_(2m) = 0.2507446 0.1898645 0.4617859 0.3498169 When n₂ < n₂₀, n_(2m) = 0.0793469 0.1193628 0.2673291 0.2271130 When k₂ ≧ k₂₀, k_(2m) = 0.0998633 0.1866309 0.2129163 0.2195020 When k₂ < k₂₀, k_(2m) = 0.0613184 0.1217163 0.1026648 0.0902368 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 33.021 15.026 69.134 84.327 1.0 < NA ≦ 1.1 45 < T ≦ 55 Case 5-01 5-02 5-03 5-04 5-05 n₁₀ 1.8808544 1.9316654 1.9082705 1.8785232 1.7211644 k₁₀ 0.2454152 0.1473610 0.1322705 0.1271526 0.0906139 d₁₀ (nm) 24.855 18.765 14.189 12.435 92.694 n₂₀ 1.8495394 1.8569906 1.7144055 1.6714546 1.6423304 k₂₀ 0.8565648 0.5034890 0.3458924 0.2699971 0.2528050 d₂₀ (nm) 51.788 110.667 182.182 245.412 180.257 When n₁ ≧ n₁₀, n_(1m) = 0.0633093 0.0784436 0.0967798 0.1127563 0.0394434 When n₁ < n₁₀, n_(1m) = 0.0379272 0.0483252 0.0593640 0.0800098 0.0123450 When k₁ ≧ k₁₀, k_(1m) = 0.0520349 0.0606396 0.0782654 0.1046387 0.0323718 When k₁ < k₁₀, k_(1m) = 0.0704724 0.0844775 0.1016626 0.1111450 0.0404236 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.463 5.359 5.721 6.653 12.460 When d₁ < d₁₀, d_(1m) (nm) = 2.319 2.677 3.157 4.357 3.091 When n₂ ≧ n₂₀, n_(2m) = 0.1530676 0.1305420 0.1246069 0.1153186 0.0322009 When n₂ < n₂₀, n_(2m) = 0.1897241 0.1692273 0.1526025 0.1380359 0.0893225 When k₂ ≧ k₂₀, k_(2m) = 0.1919946 0.1591870 0.1122729 0.0997217 0.0401709 When k₂ < k₂₀, k_(2m) = 0.1170728 0.1032434 0.0948108 0.0869653 0.0592017 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 9.182 23.164 70.833 93.569 20.376

1.0 < NA ≦ 1.1 45 < T ≦ 55 10/34 Case 5-06 5-07 5-08 5-09 5-10 n₁₀ 1.7204079 1.7050622 1.7085349 .6878153 1.6980473 k₁₀ 0.0761160 0.0748972 0.0642166 0.0847734 0.0703784 d₁₀ (nm) 92.018 161.630 160.005 209.683 224.445 n₂₀ 1.6751968 1.6489715 1.6919631 1.6959203 1.6616204 k₂₀ 0.2080809 0.2315625 0.1914882 0.3070669 0.2238826 d₂₀ (nm) 234.537 175.108 227.913 127.092 171.370 When n₁ ≧ n₁₀, n_(1m) = 0.0481116 0.0356750 0.0469714 0.0053320 0.0535730 When n₁ < n₁₀, n_(1m) = 0.0302478 0.0193359 0.0419556 0.0458972 0.0248047 When k₁ ≧ k₁₀, k_(1m) = 0.0572302 0.0287097 0.0507117 0.0169995 0.0427319 When k₁ < k₁₀, k_(1m) = 0.0456555 0.0334753 0.0389539 0.0159290 0.0235608 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.317 21.414 ∞ 2.347 ∞ When d₁ < d₁₀, d_(1m) (nm) = 8.336 7.128 19.272 19.688 12.738 When n₂ ≧ n₂₀, n_(2m) = 0.0703723 0.0326379 0.0750854 0.1108911 0.0566052 When n₂ < n₂₀, n_(2m) = 0.1049292 0.0778333 0.0787329 0.0108118 0.0780139 When k₂ ≧ k₂₀, k_(2m) = 0.0616284 0.0216638 0.0424329 0.0606311 0.0720593 When k₂ < k₂₀, k_(2m) = 0.0584753 0.0525964 0.0537231 0.0383350 0.0623987 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 8.070 ∞ 32.807 ∞ When d₂ < d₂₀, d_(2m) (nm) = 32.758 15.758 17.351 1.915 21.521 1.0 < NA ≦ 1.1 45 < T ≦ 55 Case 5-11 5-12 5-13 5-14 n₁₀ 1.6999707 1.6924126 1.6955002 1.6961000 k₁₀ 0.0601951 0.0742318 0.0674212 0.0611797 d₁₀ (nm) 221.512 268.357 265.225 263.146 n₂₀ 1.6952970 1.7068352 1.7004174 1.6940899 k₂₀ 0.1862586 0.3173492 0.2397614 0.1962440 d₂₀ (nm) 225.852 120.697 183.997 246.462 When n₁ ≧ n₁₀, n_(1m) = 0.0654663 0.0386316 0.0536462 0.0776611 When n₁ < n₁₀, n_(1m) = 0.0445935 0.0350720 0.0381848 0.0515515 When k₁ ≧ k₁₀, k_(1m) = 0.0509546 0.0537524 0.0551721 0.0583948 When k₁ < k₁₀, k_(1m) = 0.0349414 0.0344934 0.0383105 0.0394385 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 76.496 19.128 37.283 109.648 When n₂ ≧ n₂₀, n_(2m) = 0.1168579 0.1905981 0.3934021 0.3400916 When n₂ < n₂₀, n_(2m) = 0.0700696 0.1027393 0.2743970 0.2283606 When k₂ ≧ k₂₀, k_(2m) = 0.1002319 0.1933838 0.2120459 0.2188281 When k₂ < k₂₀, k_(2m) = 0.0624707 0.1168652 0.1050110 0.0926550 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 28.597 13.909 67.541 81.764

1.0 < NA ≦ 1.1 55 < T ≦ 65 11/34 Case 6-01 6-02 6-03 6-04 6-05 n₁₀ 1.8609133 1.9462238 1.9002376 1.8750233 1.8816918 k₁₀ 0.2699154 0.1588548 0.1498745 0.1302055 0.0811209 d₁₀ (nm) 23.275 16.938 13.880 12.592 12.084 n₂₀ 1.6780954 1.8061043 1.6764313 1.6672162 1.7277101 k₂₀ 0.8091000 0.4989592 0.3420875 0.2718902 0.2394028 d₂₀ (nm) 51.309 107.791 176.900 235.718 282.393 When n₁ ≧ n₁₀, n_(1m) = 0.0700366 0.0847327 0.0979871 0.1121912 0.1205115 When n₁ < n₁₀, n_(1m) = 0.0352271 0.0459912 0.0579346 0.0799817 0.0890784 When k₁ ≧ k₁₀, k_(1m) = 0.0520923 0.0625745 0.0794043 0.1043726 0.1106958 When k₁ < k₁₀, k_(1m) = 0.0664282 0.0874719 0.0997217 0.1093811 0.0811209 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.496 4.952 5.583 6.704 7.616 When d₁ < d₁₀, d_(1m) (nm) = 2.084 2.260 3.039 4.426 5.147 When n₂ ≧ n₂₀, n_(2m) = 0.1454468 0.1290356 0.1219507 0.1104688 0.1083423 When n₂ < n₂₀, n_(2m) = 0.1338672 0.1849402 0.1524817 0.1364417 0.1532007 When k₂ ≧ k₂₀, k_(2m) = 0.1326758 0.1316541 0.1033948 0.0988464 0.1079004 When k₂ < k₂₀, k_(2m) = 0.1106470 0.1010791 0.0949341 0.0882678 0.0854614 When d₂ ≧ d₂₀, d_(2m) (nm) = 18.182 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 8.638 17.532 68.073 94.482 130.723 1.0 < NA ≦ 1.1 55 < T ≦ 65 Case 6-06 6-07 6-08 6-09 6-10 n₁₀ 1.7196449 1.7211216 1.7282121 1.7047574 1.7094298 k₁₀ 0.0916508 0.0765241 0.0683348 0.0753118 0.0647325 d₁₀ (nm) 92.440 91.942 92.298 161.355 159.970 n₂₀ 1.6323282 1.6777604 1.7222619 1.6462273 1.6962571 k₂₀ 0.2539653 0.2105462 0.1825246 0.2341241 0.1938378 d₂₀ (nm) 171.320 223.941 274.062 165.232 217.150 When n₁ ≧ n₁₀, n_(1m) = 0.0390417 0.0485681 0.0546460 0.0358069 0.0474683 When n₁ < n₁₀, n_(1m) = 0.0139282 0.0313391 0.0292078 0.0174304 0.0407373 When k₁ ≧ k₁₀, k_(1m) = 0.0333240 0.0585132 0.0578357 0.0324670 0.0508789 When k₁ < k₁₀, k_(1m) = 0.0406140 0.0454041 0.0481470 0.0321411 0.0389600 When d₁ ≧ d₁₀, d_(1m) (nm) = 12.043 19.132 42.010 19.174 ∞ When d₁ < d₁₀, d_(1m) (nm) = 3.525 8.472 8.190 6.358 18.590 When n₂ ≧ n₂₀, n_(2m) = 0.0324304 0.0734375 0.0906226 0.0327905 0.0764417 When n₂ < n₂₀, n_(2m) = 0.0896448 0.1073743 0.1223853 0.0797839 0.0702637 When k₂ ≧ k₂₀, k_(2m) = 0.0391357 0.0623755 0.0817871 0.0268372 0.0433899 When k₂ < k₂₀, k_(2m) = 0.0597375 0.0603992 0.0593811 0.0545007 0.0559253 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 9.153 ∞ When d₂ < d₂₀, d_(2m) (nm) = 20.788 29.764 77.892 16.109 14.325

1.0 < NA ≦ 1.1 55 < T ≦ 65 12/34 Case 6-11 6-12 6-13 6-14 6-15 6-16 n₁₀ 1.6870964 1.6986314 1.7003667 1.6951156 1.6955653 1.6958377 k₁₀ 0.0858972 0.0705958 0.0607285 0.0571177 0.0680298 0.0528303 d₁₀ (nm) 208.556 224.893 221.557 215.781 264.644 274.984 n₂₀ 1.6830399 1.6622291 1.6983916 1.6957463 1.6953987 1.6882898 k₂₀ 0.3090553 0.2274423 0.1887213 0.1617780 0.2417239 0.1657751 d₂₀ (nm) 121.249 160.831 215.383 277.216 176.078 275.044 When n₁ ≧ n₁₀, n_(1m) = 0.0051123 0.0520032 0.0662122 0.0842517 0.0515662 0.0590991 When n₁ < n₁₀, n_(1m) = 0.0418372 0.0227649 0.0435059 0.0645801 0.0369092 0.0581189 When k₁ ≧ k₁₀, k_(1m) = 0.0150793 0.0436267 0.0489954 0.0563855 0.0542810 0.0684131 When k₁ < k₁₀, k_(1m) = 0.0179541 0.0228833 0.0348535 0.0371240 0.0381006 0.0375098 When d₁ ≧ d₁₀, d_(1m) (nm) = 2.247 ∞ ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 18.385 11.933 75.920 58.822 33.649 113.219 When n₂ ≧ n₂₀, n_(2m) = 0.1010083 0.0477234 0.1065527 0.2254480 0.3829150 0.2789856 When n₂ < n₂₀, n_(2m) = 0.0100110 0.0759302 0.0611096 0.1540564 0.2775842 0.2219617 When k₂ ≧ k₂₀, k_(2m) = 0.0726611 0.0766821 0.1015344 0.1236780 0.2119995 0.1981201 When k₂ < k₂₀, k_(2m) = 0.0309253 0.0590527 0.0616418 0.0602039 0.1044287 0.0735400 When d₂ ≧ d₂₀, d_(2m) (nm) = 25.845 22.079 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 1.717 20.127 24.695 81.257 67.124 97.500

1.0 < NA ≦ 1.1 65 < T ≦ 75 13/34 Case 7-01 7-02 7-03 7-04 7-05 n₁₀ 1.8339628 1.9445237 1.8939902 1.8811858 1.7203230 k₁₀ 0.2973905 0.1726202 0.1563846 0.0833966 0.0922740 d₁₀ (nm) 24.925 17.287 14.253 12.228 92.527 n₂₀ 1.6419965 1.7953047 1.6659458 1.7269957 1.6328842 k₂₀ 0.8698975 0.5162004 0.3485215 0.2426363 0.2599948 d₂₀ (nm) 41.723 98.907 167.112 272.914 160.703 When n₁ ≧ n₁₀, n_(1m) = 0.0734924 0.0853552 0.0964307 0.1197986 0.0394055 When n₁ < n₁₀, n_(1m) = 0.0377722 0.0427490 0.0559692 0.0877673 0.0144592 When k₁ ≧ k₁₀, k_(1m) = 0.0448938 0.0589941 0.0770850 0.1096667 0.0331616 When k₁ < k₁₀, k_(1m) = 0.0453357 0.0848169 0.0975195 0.0833966 0.0410388 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.571 4.784 5.590 7.648 12.091 When d₁ < d₁₀, d_(1m) (nm) = 2.315 2.092 3.027 5.109 3.655 When n₂ ≧ n₂₀, n_(2m) = 0.1366638 0.1348682 0.1167786 0.1080664 0.0326196 When n₂ < n₂₀, n_(2m) = 0.1076978 0.1944104 0.1524536 0.1545313 0.0900854 When k₂ ≧ k₂₀, k_(2m) = 0.1648022 0.1338904 0.1021130 0.1080652 0.0396484 When k₂ < k₂₀, k_(2m) = 0.1324670 0.1078918 0.0977759 0.0865271 0.0625085 When d₂ ≧ d₂₀, d_(2m) (nm) = 12.499 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 5.747 14.376 64.164 128.680 19.557 1.0 < NA ≦ 1.1 65 < T ≦ 75 Case 7-06 7-07 7-08 7-09 7-10 n₁₀ 1.7224265 1.7294779 1.7053201 1.7102741 1.7133466 k₁₀ 0.0770592 0.0692299 0.0757255 0.0654045 0.0629386 d₁₀ (nm) 92.053 92.385 161.452 160.136 160.381 n₂₀ 1.6819841 1.7252879 1.6485370 1.7000507 1.7220503 k₂₀ 0.2150120 0.1858377 0.2399747 0.1977447 0.1698335 d₂₀ (nm) 213.162 263.723 154.588 206.614 260.757 When n₁ ≧ n₁₀, n_(1m) = 0.0490625 0.0548535 0.0366443 0.0483020 0.0569666 When n₁ < n₁₀, n_(1m) = 0.0311902 0.0280200 0.0173645 0.0416309 0.0190027 When k₁ ≧ k₁₀, k_(1m) = 0.0581604 0.0565332 0.0330920 0.0498926 0.0402344 When k₁ < k₁₀, k_(1m) = 0.0461389 0.0475879 0.0324707 0.0390747 0.0240051 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.214 40.761 19.902 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 8.328 7.705 6.285 18.989 5.694 When n₂ ≧ n₂₀, n_(2m) = 0.0747375 0.0917908 0.0322156 0.0769946 0.1011584 When n₂ < n₂₀, n_(2m) = 0.1078540 0.1217822 0.0813562 0.0689685 0.1343567 When k₂ ≧ k₂₀, k_(2m) = 0.0634705 0.0827625 0.0283752 0.0430542 0.0435730 When k₂ < k₂₀, k_(2m) = 0.0623401 0.0604163 0.0573535 0.0576453 0.0570081 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 9.136 38.239 ∞ When d₂ < d₂₀, d_(2m) (nm) = 27.810 75.918 15.379 13.085 10.847

1.0 < NA ≦ 1.1 65 < T ≦ 75 14/34 Case 7-11 7-12 7-13 7-14 7-15 7-16 n₁₀ 1.6861768 1.6990769 1.7003759 1.6946436 1.6954303 1.6957423 k₁₀ 0.0881028 0.0709373 0.0613969 0.0577579 0.0690806 0.0532811 d₁₀ (nm) 208.148 225.005 221.468 215.315 264.876 274.848 n₂₀ 1.6733849 1.6647354 1.6998938 1.6946016 1.6937197 1.6878755 k₂₀ 0.3136681 0.2329033 0.1918751 0.1634050 0.2458138 0.1674492 d₂₀ (nm) 112.385 150.349 205.497 268.128 165.269 265.685 When n₁ ≧ n₁₀, n_(1m) = 0.0025806 0.0529590 0.0676086 0.0859229 0.0516138 0.0588110 When n₁ < n₁₀, n_(1m) = 0.0409998 0.0231177 0.0444312 0.0666504 0.0367175 0.0575696 When k₁ ≧ k₁₀, k_(1m) = 0.0094263 0.0435510 0.0474890 0.0560022 0.0529260 0.0681641 When k₁ < k₁₀, k_(1m) = 0.0156848 0.0234912 0.0355322 0.0372656 0.0371912 0.0379443 When d₁ ≧ d₁₀, d_(1m) (nm) = 1.037 ∞ ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 17.094 12.289 76.126 56.280 33.058 112.076 When n₂ ≧ n₂₀, n_(2m) = 0.1039172 0.0468506 0.1077234 0.2240735 0.4022729 0.2806909 When n₂ < n₂₀, n_(2m) = 0.0058093 0.0753308 0.0576575 0.1556287 0.2760486 0.2229114 When k₂ ≧ k₂₀, k_(2m) = 0.0664124 0.0758972 0.1012000 0.1249744 0.2123950 0.1986609 When k₂ < k₂₀, k_(2m) = 0.0178174 0.0630115 0.0645288 0.0620288 0.1063135 0.0745801 When d₂ ≧ d₂₀, d_(2m) (nm) = 26.367 19.187 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 1.017 18.602 23.769 80.847 66.469 89.270

1.0 < NA ≦ 1.1 75 < T ≦ 85 15/34 Case 8-01 8-02 8-03 8-04 8-05 n₁₀ 1.9187259 1.8967518 1.8757876 1.8806788 1.7234296 k₁₀ 0.1881900 0.1527475 0.1318014 0.0899399 0.0945092 d₁₀ (nm) 20.509 15.221 13.247 12.412 92.722 n₂₀ 1.8283337 1.6893708 1.6726776 1.7211162 1.6393014 k₂₀ 0.5739613 0.3734166 0.2883472 0.2492460 0.2743485 d₂₀ (nm) 84.746 154.221 215.129 265.394 150.270 When n₁ ≧ n₁₀, n_(1m) = 0.0766943 0.0922229 0.1080322 0.1177502 0.0391516 When n₁ < n₁₀, n_(1m) = 0.0399988 0.0530884 0.0750195 0.0852625 0.0112524 When k₁ ≧ k₁₀, k_(1m) = 0.0507166 0.0712622 0.0980225 0.1073047 0.0289392 When k₁ < k₁₀, k_(1m) = 0.0771802 0.0964258 0.1069458 0.0899399 0.0412610 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.195 5.640 6.681 7.548 11.825 When d₁ < d₁₀, d_(1m) (nm) = 2.249 2.987 4.301 4.972 2.719 When n₂ ≧ n₂₀, n_(2m) = 0.1444995 0.1155615 0.1091333 0.1093396 0.0288635 When n₂ < n₂₀, n_(2m) = 0.1897876 0.1532776 0.1435217 0.1541382 0.0890479 When k₂ ≧ k₂₀, k_(2m) = 0.1811243 0.1099194 0.1006726 0.1075403 0.0356238 When k₂ < k₂₀, k_(2m) = 0.1194946 0.1025110 0.0922131 0.0871228 0.0649683 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 15.313 64.664 82.555 124.472 16.892 1.0 < NA ≦ 1.1 75 < T ≦ 85 Case 8-06 8-07 8-08 8-09 8-10 n₁₀ 1.7235983 1.7294254 1.7064538 1.7103862 1.7133072 k₁₀ 0.0790587 0.0706491 0.0777504 0.0670250 0.0637197 d₁₀ (nm) 92.129 92.482 161.668 160.278 160.467 n₂₀ 1.6815454 1.7233644 1.6498826 1.6983722 1.7219131 k₂₀ 0.2228770 0.1918670 0.2514894 0.2047961 0.1752501 d₂₀ (nm) 204.187 255.172 145.038 197.922 251.781 When n₁ ≧ n₁₀, n_(1m) = 0.0481958 0.0539050 0.0362122 0.0474792 0.0556775 When n₁ < n₁₀, n_(1m) = 0.0281580 0.0270288 0.0158582 0.0428101 0.0187244 When k₁ ≧ k₁₀, k_(1m) = 0.0546558 0.0547986 0.0255066 0.0459753 0.0391089 When k₁ < k₁₀, k_(1m) = 0.0470496 0.0476624 0.0330371 0.0375122 0.0244470 When d₁ ≧ d₁₀, d_(1m) (nm) = 18.433 40.484 19.881 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 7.376 7.380 6.011 13.737 5.649 When n₂ ≧ n₂₀, n_(2m) = 0.0719336 0.0903259 0.0311267 0.0755847 0.1032422 When n₂ < n₂₀, n_(2m) = 0.1049182 0.1183936 0.0789893 0.0715295 0.1268079 When k₂ ≧ k₂₀, k_(2m) = 0.0610889 0.0802148 0.0194653 0.0384314 0.0401990 When k₂ < k₂₀, k_(2m) = 0.0626282 0.0606787 0.0584229 0.0575549 0.0569128 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 6.414 35.522 ∞ When d₂ < d₂₀, d_(2m) (nm) = 26.455 72.823 13.152 13.515 11.677

1.0 < NA ≦ 1.1 75 < T ≦ 85 16/34 Case 8-11 8-12 8-13 8-14 8-15 n₁₀ 1.6987335 1.6895310 1.6997408 1.6947661 1.6915645 k₁₀ 0.0728489 0.0798395 0.0628030 0.0583146 0.0796327 d₁₀ (nm) 224.384 207.056 221.189 215.749 269.434 n₂₀ 1.6635130 1.6873868 1.6972371 1.6943199 1.7013553 k₂₀ 0.2423517 0.2464201 0.1976117 0.1671130 0.3520060 d₂₀ (nm) 141.699 160.447 197.186 258.789 90.540 When n₁ ≧ n₁₀, n_(1m) = 0.0550525 0.0211743 0.0680066 0.0840710 0.0339661 When n₁ < n₁₀, n_(1m) = 0.0214722 0.0563281 0.0446484 0.0653711 0.0319580 When k₁ ≧ k₁₀, k_(1m) = 0.0399634 0.0394690 0.0462439 0.0552136 0.0498462 When k₁ < k₁₀, k_(1m) = 0.0230286 0.0247534 0.0358582 0.0373328 0.0319092 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ 18.382 ∞ ∞ 29.764 When d₁ < d₁₀, d_(1m) (nm) = 12.181 26.345 75.416 56.560 16.533 When n₂ ≧ n₂₀, n_(2m) = 0.0460742 0.1451038 0.1164050 0.2251794 0.2068530 When n₂ < n₂₀, n_(2m) = 0.0736353 0.0531665 0.0615222 0.1544678 0.0982214 When k₂ ≧ k₂₀, k_(2m) = 0.0651685 0.0979858 0.0980493 0.1211584 0.1840808 When k₂ < k₂₀, k_(2m) = 0.0709375 0.0696692 0.0675049 0.0632251 0.1287793 When d₂ ≧ d₂₀, d_(2m) (nm) = 17.326 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 17.676 13.280 25.586 81.223 11.833 1.0 < NA ≦ 1.1 75 < T ≦ 85 Case 8-16 8-17 n₁₀ 1.6950499 1.6956172 k₁₀ 0.0706693 0.0541668 d₁₀ (nm) 266.123 274.905 n₂₀ 1.6983222 1.6860233 k₂₀ 0.2573177 0.1712439 d₂₀ (nm) 152.851 257.337 When n₁ ≧ n₁₀, n_(1m) = 0.0524487 0.0590308 When n₁ < n₁₀, n_(1m) = 0.0375452 0.0580872 When k₁ ≧ k₁₀, k_(1m) = 0.0517285 0.0672278 When k₁ < k₁₀, k_(1m) = 0.0352881 0.0380591 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 33.771 112.404 When n₂ ≧ n₂₀, n_(2m) = 0.2704944 0.2806836 When n₂ < n₂₀, n_(2m) = 0.2755872 0.2222266 When k₂ ≧ k₂₀, k_(2m) = 0.2121143 0.1985229 When k₂ < k₂₀, k_(2m) = 0.1128918 0.0743774 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 65.292 85.089

1.0 < NA ≦ 1.1 85 < T ≦ 95 17/34 Case 9-01 9-02 9-03 9-04 9-05 n₁₀ 1.8980776 1.9078109 1.8887573 1.8863613 1.7283563 k₁₀ 0.2063094 0.1489982 0.1336370 0.0963846 0.0991844 d₁₀ (nm) 23.234 16.351 13.295 12.395 92.796 n₂₀ 1.8542997 1.7325536 1.6803356 1.7165602 1.6494143 k₂₀ 0.6486453 0.4126982 0.3065809 0.2596921 0.2975623 d₂₀ (nm) 73.732 141.036 205.639 258.147 140.358 When n₁ ≧ n₁₀, n_(1m) = 0.0711987 0.0870154 0.1059106 0.1162891 0.0375220 When n₁ < n₁₀, n_(1m) = 0.0384509 0.0501709 0.0716760 0.0832544 0.0056213 When k₁ ≧ k₁₀, k_(1m) = 0.0445569 0.0643555 0.0939661 0.1053198 0.0189441 When k₁ < k₁₀, k_(1m) = 0.0730103 0.0941223 0.1072681 0.0963846 0.0324854 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.225 5.526 6.240 7.169 10.895 When d₁ < d₁₀, d_(1m) (nm) = 2.347 2.839 3.908 4.670 1.261 When n₂ ≧ n₂₀, n_(2m) = 0.1402551 0.1159338 0.1109766 0.1105359 0.0179150 When n₂ < n₂₀, n_(2m) = 0.1828406 0.1543176 0.1513220 0.1539343 0.0865198 When k₂ ≧ k₂₀, k_(2m) = 0.2259802 0.1235034 0.1018750 0.1065100 0.0230737 When k₂ < k₂₀, k_(2m) = 0.1284644 0.1059631 0.0936096 0.0878577 0.0660486 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 14.635 When d₂ < d₂₀, d_(2m) (nm) = 14.747 31.656 77.584 118.336 14.252 1.0 < NA ≦ 1.1 85 < T ≦ 95 Case 9-06 9-07 9-08 9-09 9-10 n₁₀ 1.7247011 1.7288637 1.7100270 1.7129082 1.6894084 k₁₀ 0.0825295 0.0727638 0.0697395 0.0648353 0.0825836 d₁₀ (nm) 92.134 92.409 160.277 160.281 208.412 n₂₀ 1.6784446 1.7181265 1.6932584 1.7202855 1.6911413 k₂₀ 0.2345042 0.1997137 0.2147807 0.1822190 0.2636300 d₂₀ (nm) 196.220 247.866 190.362 243.795 148.443 When n₁ ≧ n₁₀, n_(1m) = 0.0458069 0.0520715 0.0445874 0.0530676 0.0168896 When n₁ < n₁₀, n_(1m) = 0.0231628 0.0254517 0.0291443 0.0189783 0.0564331 When k₁ ≧ k₁₀, k_(1m) = 0.0487341 0.0524194 0.0390308 0.0374463 0.0317554 When k₁ < k₁₀, k_(1m) = 0.0471680 0.0474573 0.0341357 0.0249304 0.0174866 When d₁ ≧ d₁₀, d_(1m) (nm) = 16.768 28.342 ∞ ∞ 8.653 When d₁ < d₁₀, d_(1m) (nm) = 5.875 6.859 8.481 5.666 22.933 When n₂ ≧ n₂₀, n_(2m) = 0.0654785 0.0851550 0.0721350 0.0992358 0.1489941 When n₂ < n₂₀, n_(2m) = 0.0999084 0.1129846 0.0702051 0.1184961 0.0323828 When k₂ ≧ k₂₀, k_(2m) = 0.0550916 0.0742688 0.0299036 0.0348145 0.0701428 When k₂ < k₂₀, k_(2m) = 0.0621350 0.0605774 0.0564990 0.0562878 0.0653857 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 30.126 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 23.369 34.214 13.997 12.255 9.630

1.0 < NA ≦ 1.1 85 < T ≦ 95 18/34 Case 9-11 9-12 9-13 9-14 9-15 n₁₀ 1.6987536 1.6951804 1.6947043 1.6953534 1.6955317 k₁₀ 0.0651428 0.0592977 0.0728049 0.0654850 0.0555447 d₁₀ (nm) 220.679 216.421 267.049 264.587 274.968 n₂₀ 1.6918669 1.6944812 1.7045529 1.6939885 1.6840742 k₂₀ 0.2062686 0.1733276 0.2758626 0.2171518 0.1777252 d₂₀ (nm) 189.869 249.686 142.407 204.731 249.243 When n₁ ≧ n₁₀, n_(1m) = 0.0676538 0.0804553 0.0514111 0.0772083 0.0594299 When n₁ < n₁₀, n_(1m) = 0.0423462 0.0620581 0.0375159 0.0498364 0.0587244 When k₁ ≧ k₁₀, k_(1m) = 0.0442505 0.0538220 0.0506982 0.0550830 0.0658191 When k₁ < k₁₀, k_(1m) = 0.0341040 0.0375916 0.0340894 0.0384644 0.0372644 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 72.990 57.440 26.805 108.871 112.765 When n₂ ≧ n₂₀, n_(2m) = 0.1307581 0.2319055 0.2365918 0.3979211 0.2850439 When n₂ < n₂₀, n_(2m) = 0.0673376 0.1520984 0.2827087 0.2359326 0.2177148 When k₂ ≧ k₂₀, k_(2m) = 0.0940100 0.1156787 0.2079443 0.2187415 0.1980774 When k₂ < k₂₀, k_(2m) = 0.0673755 0.0629675 0.1183691 0.0982336 0.0755945 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 25.557 76.954 64.091 75.273 81.971 1.0 < NA ≦ 1.1 95 < T ≦ 105 Case 10-01 10-02 10-03 10-04 10-05 n₁₀ 1.9059589 1.9224042 1.8961620 1.8922593 1.7254583 k₁₀ 0.2274286 0.1550778 0.1385328 0.1041345 0.0865833 d₁₀ (nm) 23.462 16.599 13.501 12.282 91.876 n₂₀ 1.8553331 1.7510181 1.6829419 1.7097147 1.6727903 k₂₀ 0.7355051 0.4490690 0.3248659 0.2697702 0.2465542 d₂₀ (nm) 66.090 131.424 196.767 251.116 188.519 When n₁ ≧ n₁₀, n_(1m) = 0.0671912 0.0841919 0.1023767 0.1153796 0.0426331 When n₁ < n₁₀, n_(1m) = 0.0345654 0.0474304 0.0675305 0.0814563 0.0184045 When k₁ ≧ k₁₀, k_(1m) = 0.0380615 0.0598425 0.0894568 0.1045068 0.0426917 When k₁ < k₁₀, k_(1m) = 0.0683374 0.0902014 0.1054456 0.1041345 0.0441687 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.558 5.118 5.874 6.783 14.297 When d₁ < d₁₀, d_(1m) (nm) = 1.985 2.531 3.589 4.355 4.476 When n₂ ≧ n₂₀, n_(2m) = 0.1216980 0.1117603 0.1100940 0.1104114 0.0579919 When n₂ < n₂₀, n_(2m) = 0.1802991 0.1554016 0.1498889 0.1534180 0.0956348 When k₂ ≧ k₂₀, k_(2m) = 0.2165979 0.1264526 0.1015808 0.1042908 0.0462366 When k₂ < k₂₀, k_(2m) = 0.1276270 0.1054065 0.0937561 0.0879675 0.0605090 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 11.858 29.189 73.755 91.689 21.669

1.0 < NA ≦ 1.1 95 < T ≦ 105 19/34 Case 10-06 10-07 10-08 10-09 10-10 n₁₀ 1.7286512 1.7096319 1.7125109 1.6891198 1.6979687 k₁₀ 0.0752622 0.0728333 0.0665034 0.0853163 0.0677690 d₁₀ (nm) 92.185 159.923 159.852 208.173 220.140 n₂₀ 1.7137581 1.6877059 1.7181911 1.6918411 1.6871092 k₂₀ 0.2076205 0.2252670 0.1890952 0.2826173 0.2165239 d₂₀ (nm) 240.302 182.766 235.934 141.112 182.186 When n₁ ≧ n₁₀, n_(1m) = 0.0500330 0.0406897 0.0503772 0.0132690 0.0644641 When n₁ < n₁₀, n_(1m) = 0.0231873 0.0169287 0.0155139 0.0507471 0.0375525 When k₁ ≧ k₁₀, k_(1m) = 0.0495398 0.0307520 0.0335327 0.0250305 0.0414893 When k₁ < k₁₀, k_(1m) = 0.0465039 0.0291895 0.0230286 0.0142859 0.0317957 When d₁ ≧ d₁₀, d_(1m) (nm) = 22.149 ∞ ∞ 5.803 ∞ When d₁ < d₁₀, d_(1m) (nm) = 6.093 5.010 4.544 20.171 66.095 When n₂ ≧ n₂₀, n_(2m) = 0.0807422 0.0673730 0.0968713 0.1414526 0.1231934 When n₂ < n₂₀, n_(2m) = 0.1109875 0.0569836 0.1140344 0.0176575 0.0690576 When k₂ ≧ k₂₀, k_(2m) = 0.0671313 0.0201965 0.0272949 0.0516113 0.0909106 When k₂ < k₂₀, k_(2m) = 0.0601733 0.0546924 0.0555640 0.0644128 0.0681702 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 22.678 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 33.234 12.401 9.751 3.545 24.752 1.0 < NA ≦ 1.1 95 < T ≦ 105 Case 10-11 10-12 10-13 n₁₀ 1.6953920 1.6945041 1.6957904 k₁₀ 0.0607310 0.0754015 0.0613078 d₁₀ (nm) 216.694 266.879 263.111 n₂₀ 1.6943518 1.7053190 1.6921380 k₂₀ 0.1805507 0.2962459 0.1886276 d₂₀ (nm) 240.824 134.581 257.166 When n₁ ≧ n₁₀, n_(1m) = 0.0773376 0.0489661 0.0744116 When n₁ < n₁₀, n_(1m) = 0.0532397 0.0362244 0.0544775 When k₁ ≧ k₁₀, k_(1m) = 0.0520667 0.0490686 0.0595886 When k₁ < k₁₀, k_(1m) = 0.0373279 0.0329797 0.0399255 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 56.748 22.698 144.280 When n₂ ≧ n₂₀, n_(2m) = 0.2401196 0.2258960 0.3617542 When n₂ < n₂₀, n_(2m) = 0.1505750 0.2863916 0.2146826 When k₂ ≧ k₂₀, k_(2m) = 0.1118237 0.2042285 0.2258594 When k₂ < k₂₀, k_(2m) = 0.0641272 0.1247363 0.0874829 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 74.466 22.579 121.018

1.0 < NA ≦ 1.1 105 < T ≦ 115 20/34 Case 11-01 11-02 11-03 11-04 11-05 n₁₀ 1.9374125 1.9018997 1.8965439 1.7253637 1.7289764 k₁₀ 0.1704110 0.1487976 0.1142225 0.0900184 0.0775142 d₁₀ (nm) 15.669 13.285 11.973 91.432 91.877 n₂₀ 1.7248980 1.6713435 1.6970963 1.6651786 1.7120256 k₂₀ 0.4663738 0.3352808 0.2748315 0.2549499 0.2134557 d₂₀ (nm) 126.299 189.496 244.759 180.505 231.728 When n₁ ≧ n₁₀, n_(1m) = 0.0844495 0.1011877 0.1161206 0.0397363 0.0483887 When n₁ < n₁₀, n_(1m) = 0.0440234 0.0656897 0.0810999 0.0155029 0.0208545 When k₁ ≧ k₁₀, k_(1m) = 0.0577478 0.0888123 0.1065247 0.0388269 0.0469031 When k₁ < k₁₀, k_(1m) = 0.0914417 0.1045447 0.1142225 0.0417639 0.0449243 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.564 5.473 6.423 12.314 18.889 When d₁ < d₁₀, d_(1m) (nm) = 2.111 3.313 4.088 3.639 5.309 When n₂ ≧ n₂₀, n_(2m) = 0.1026855 0.1066711 0.1092859 0.0538538 0.0798657 When n₂ < n₂₀, n_(2m) = 0.1573315 0.1496814 0.1507874 0.0957056 0.1124231 When k₂ ≧ k₂₀, k_(2m) = 0.1109265 0.0973877 0.1006897 0.0382251 0.0609106 When k₂ < k₂₀, k_(2m) = 0.0995313 0.0917126 0.0869214 0.0582397 0.0599487 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 32.204 71.551 94.669 21.979 35.901 1.0 < NA ≦ 1.1 105 < T ≦ 115 Case 11-06 11-07 11-08 11-09 11-10 n₁₀ 1.7092919 1.7124011 1.6891266 1.6977739 1.6952347 k₁₀ 0.0753499 0.0683625 0.0867081 0.0698574 0.0623107 d₁₀ (nm) 159.318 159.365 206.818 219.869 216.627 n₂₀ 1.6830351 1.7169838 1.6858604 1.6842611 1.6937881 k₂₀ 0.2331189 0.1941891 0.2953498 0.2258219 0.1869159 d₂₀ (nm) 174.468 227.412 138.155 173.345 231.738 When n₁ ≧ n₁₀, n_(1m) = 0.0373157 0.0484546 0.0121899 0.0603870 0.0758545 When n₁ < n₁₀, n_(1m) = 0.0105005 0.0089343 0.0409204 0.0315625 0.0474512 When k₁ ≧ k₁₀, k_(1m) = 0.0240833 0.0270752 0.0251843 0.0382471 0.0501941 When k₁ < k₁₀, k_(1m) = 0.0246826 0.0176978 0.0193188 0.0296948 0.0358765 When d₁ ≧ d₁₀, d_(1m) (nm) = 22.059 ∞ 5.261 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 3.023 2.568 16.255 17.363 54.608 When n₂ ≧ n₂₀, n_(2m) = 0.0659399 0.0944360 0.1154346 0.0831506 0.2493335 When n₂ < n₂₀, n_(2m) = 0.0371252 0.1164661 0.0185925 0.0632410 0.1310596 When k₂ ≧ k₂₀, k_(2m) = 0.0133044 0.0180847 0.0609753 0.0891687 0.1103210 When k₂ < k₂₀, k_(2m) = 0.0529578 0.0555518 0.0785950 0.0680151 0.0652307 When d₂ ≧ d₂₀, d_(2m) (nm) = 18.030 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 8.732 5.378 3.627 23.361 52.894

1.0 < NA ≦ 1.1 105 < T ≦ 115 21/34 Case 11-11 11-12 n₁₀ 1.6944699 1.6958800 k₁₀ 0.0775933 0.0528961 d₁₀ (nm) 265.762 273.317 n₂₀ 1.6967397 1.6915993 k₂₀ 0.3115846 0.1649138 d₂₀ (nm) 129.093 288.010 When n₁ ≧ n₁₀, n_(1m) = 0.0466345 0.0703040 When n₁ < n₁₀, n_(1m) = 0.0341467 0.0549121 When k₁ ≧ k₁₀, k_(1m) = 0.0473621 0.0679175 When k₁ < k₁₀, k_(1m) = 0.0320862 0.0389246 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 20.031 180.011 When n₂ ≧ n₂₀, n_(2m) = 0.2202100 0.2749866 When n₂ < n₂₀, n_(2m) = 0.1339246 0.2056653 When k₂ ≧ k₂₀, k_(2m) = 0.2018127 0.2031665 When k₂ < k₂₀, k_(2m) = 0.1244751 0.0729272 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 18.618 105.982 1.0 < NA ≦ 1.1 115 < T ≦ 125 Case 12-01 12-02 12-03 12-04 12-05 n₁₀ 1.9729972 1.9456051 1.9005953 1.8972956 1.7255330 k₁₀ 0.2768129 0.1915481 0.1591490 0.1121564 0.0922673 d₁₀ (nm) 17.524 14.612 13.217 12.290 91.102 n₂₀ 1.6663342 1.6781309 1.6561276 1.7051607 1.6614760 k₂₀ 0.7544777 0.4665054 0.3399716 0.2822449 0.2607016 d₂₀ (nm) 64.842 122.845 181.593 233.141 171.070 When n₁ ≧ n₁₀, n_(1m) = 0.0730835 0.0862573 0.1002148 0.1132361 0.0385791 When n₁ < n₁₀, n_(1m) = 0.0179053 0.0397437 0.0650696 0.0790137 0.0152405 When k₁ ≧ k₁₀, k_(1m) = 0.0247314 0.0556897 0.0891748 0.1035071 0.0386047 When k₁ < k₁₀, k_(1m) = 0.0592480 0.0960681 0.1016016 0.1121564 0.0414185 When d₁ ≧ d₁₀, d_(1m) (nm) = 2.961 4.145 5.266 6.373 11.328 When d₁ < d₁₀, d_(1m) (nm) = 0.729 1.739 3.220 4.072 3.483 When n₂ ≧ n₂₀, n_(2m) = 0.0585083 0.0918945 0.1020654 0.1070825 0.0573608 When n₂ < n₂₀, n_(2m) = 0.1382239 0.1611719 0.1504858 0.1560303 0.0993860 When k₂ ≧ k₂₀, k_(2m) = 0.0616943 0.0914514 0.0935474 0.1016602 0.0359058 When k₂ < k₂₀, k_(2m) = 0.0899731 0.0957678 0.0910632 0.0886353 0.0590588 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 11.368 38.474 71.143 98.322 22.477

1.0 < NA ≦ 1.1 115 < T ≦ 125 22/34 Case 12-06 12-07 12-08 12-09 12-10 n₁₀ 1.7304964 1.7097843 1.7129025 1.7059734 1.6983193 k₁₀ 0.0792452 0.0770210 0.0702809 0.0642321 0.0712405 d₁₀ (nm) 91.709 159.025 159.249 159.600 220.143 n₂₀ 1.7154952 1.6841289 1.7178163 1.6898319 1.6860819 k₂₀ 0.2175998 0.2392980 0.1978132 0.1677546 0.2336364 d₂₀ (nm) 221.560 164.463 217.770 279.371 162.903 When n₁ ≧ n₁₀, n_(1m) = 0.0478430 0.0358972 0.0479553 0.0552173 0.0579871 When n₁ < n₁₀, n_(1m) = 0.0188013 0.0078589 0.0015247 0.0299426 0.0264917 When k₁ ≧ k₁₀, k_(1m) = 0.0447290 0.0214099 0.0152087 0.0363110 0.0340515 When k₁ < k₁₀, k_(1m) = 0.0430518 0.0224402 0.0060950 0.0278772 0.0279150 When d₁ ≧ d₁₀, d_(1m) (nm) = 17.323 17.500 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 4.626 2.208 0.436 70.406 11.462 When n₂ ≧ n₂₀, n_(2m) = 0.0842468 0.0631323 0.0959070 0.1382263 0.0682983 When n₂ < n₂₀, n_(2m) = 0.1172522 0.0247583 0.0076807 0.1296057 0.0493762 When k₂ ≧ k₂₀, k_(2m) = 0.0583887 0.0111536 0.0046545 0.0357849 0.0882227 When k₂ < k₂₀, k_(2m) = 0.0618323 0.0547961 0.0579968 0.0540967 0.0613330 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 18.428 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 65.102 5.436 0.894 57.180 18.177 1.0 < NA ≦ 1.1 115 < T ≦ 125 Case 12-11 12-12 12-13 n₁₀ 1.6946755 1.6955425 1.6956989 k₁₀ 0.0639503 0.0535782 0.0539885 d₁₀ (nm) 216.344 213.248 272.929 n₂₀ 1.6931001 1.6937343 1.6917939 k₂₀ 0.1919118 0.1415462 0.1683287 d₂₀ (nm) 222.331 338.947 278.327 When n₁ ≧ n₁₀, n_(1m) = 0.0359900 0.0869177 0.0714185 When n₁ < n₁₀, n_(1m) = 0.0437024 0.0750378 0.0538635 When k₁ ≧ k₁₀, k_(1m) = 0.0485352 0.0653857 0.0669263 When k₁ < k₁₀, k_(1m) = 0.0346851 0.0370959 0.0388916 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 51.791 132.178 120.018 When n₂ ≧ n₂₀, n_(2m) = 0.1409949 0.2291467 0.2819873 When n₂ < n₂₀, n_(2m) = 0.1060889 0.1273120 0.2087952 When k₂ ≧ k₂₀, k_(2m) = 0.1109827 0.1363989 0.2069556 When k₂ < k₂₀, k_(2m) = 0.0639978 0.0571204 0.0743250 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 35.182 107.512 95.030

1.0 < NA ≦ 1.1 125 < T ≦ 135 23/34 Case 13-01 13-02 13-03 13-04 13-05 n₁₀ 1.8993435 1.9080238 1.7276770 1.7338076 1.7236449 k₁₀ 0.1093669 0.0778133 0.0934541 0.0808022 0.0736298 d₁₀ (nm) 12.638 11.189 91.210 91.869 92.640 n₂₀ 1.7156529 1.7380285 1.6689251 1.7256843 1.7007078 k₂₀ 0.2903108 0.2474831 0.2700133 0.2232282 0.1887087 d₂₀ (nm) 220.942 275.866 159.348 209.944 271.148 When n₁ ≧ n₁₀, n_(1m) = 0.1116663 0.1266492 0.0395422 0.0484558 0.0522583 When n₁ < n₁₀, n_(1m) = 0.0773999 0.0872168 0.0167297 0.0166711 0.0180103 When k₁ ≧ k₁₀, k_(1m) = 0.1011877 0.1103088 0.0409973 0.0422058 0.0417761 When k₁ < k₁₀, k_(1m) = 0.1093669 0.0778133 0.0410583 0.0409119 0.0443518 When d₁ ≧ d₁₀, d_(1m) (nm) = 6.392 6.737 11.272 16.895 38.105 When d₁ < d₁₀, d_(1m) (nm) = 4.063 4.214 3.733 3.952 5.177 When n₂ ≧ n₂₀, n_(2m) = 0.1069678 0.1140796 0.0675769 0.0924780 0.1134937 When n₂ < n₂₀, n_(2m) = 0.1606714 0.1563965 0.1033667 0.1197949 0.1230200 When k₂ ≧ k₂₀, k_(2m) = 0.1040991 0.1083496 0.0397278 0.0600330 0.0739392 When k₂ < k₂₀, k_(2m) = 0.0926990 0.0882825 0.0652539 0.0659766 0.0617065 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 29.488 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 90.398 130.978 17.688 16.714 72.265 1.0 < NA ≦ 1.1 125 < T ≦ 135 Case 13-06 13-07 13-08 13-09 13-10 n₁₀ 1.7117973 1.7052523 1.6990979 1.6936455 1.6937228 k₁₀ 0.0782334 0.0648564 0.0723627 0.0657466 0.0602088 d₁₀ (nm) 159.412 160.141 220.761 215.539 212.854 n₂₀ 1.6949465 1.6847092 1.6931390 1.6916565 1.6917935 k₂₀ 0.2480962 0.1699839 0.2421156 0.1962143 0.1651159 d₂₀ (nm) 152.577 269.827 151.650 213.597 273.449 When n₁ ≧ n₁₀, n_(1m) = 0.0367346 0.0551233 0.0594092 0.0311401 0.0698511 When n₁ < n₁₀, n_(1m) = 0.0058984 0.0239478 0.0244397 0.0431714 0.0693030 When k₁ ≧ k₁₀, k_(1m) = 0.0206287 0.0370862 0.0278687 0.0476123 0.0598901 When k₁ < k₁₀, k_(1m) = 0.0197803 0.0307031 0.0272107 0.0341650 0.0364880 When d₁ ≧ d₁₀, d_(1m) (nm) = 17.175 ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 1.642 10.322 10.135 48.593 59.568 When n₂ ≧ n₂₀, n_(2m) = 0.0634509 0.0441370 0.0646301 0.1417163 0.2349500 When n₂ < n₂₀, n_(2m) = 0.0185107 0.1268359 0.0304773 0.0878235 0.1413928 When k₂ ≧ k₂₀, k_(2m) = 0.0106982 0.0374109 0.0871985 0.1142444 0.1311609 When k₂ < k₂₀, k_(2m) = 0.0614368 0.0554883 0.0573535 0.0648792 0.0616370 When d₂ ≧ d₂₀, d_(2m) (nm) = 20.867 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 3.236 51.950 7.977 23.183 75.250

1.0 < NA ≦ 1.1 125 < T ≦ 135 24/34 Case 13-11 n₁₀ 1.6954835 k₁₀ 0.0549286 d₁₀ (nm) 272.481 n₂₀ 1.6920522 k₂₀ 0.1709440 d₂₀ (nm) 269.018 When n₁ ≧ n₁₀, n_(1m) = 0.0732507 When n₁ < n₁₀, n_(1m) = 0.0527002 When k₁ ≧ k₁₀, k_(1m) = 0.0659570 When k₁ < k₁₀, k_(1m) = 0.0396948 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ When d₁ < d₁₀, d_(1m) (nm) = 115.848 When n₂ ≧ n₂₀, n_(2m) = 0.2876270 When n₂ < n₂₀, n_(2m) = 0.2123071 When k₂ ≧ k₂₀, k_(2m) = 0.2114355 When k₂ < k₂₀, k_(2m) = 0.0767078 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ When d₂ < d₂₀, d_(2m) (nm) = 91.957 1.0 < NA ≦ 1.1 135 < T ≦ 145 Case 14-01 14-02 14-03 14-04 14-05 n₁₀ 1.9117383 1.8981283 1.9112943 1.7312914 1.7377087 k₁₀ 0.2302052 0.1070787 0.0649623 0.0945058 0.0827928 d₁₀ (nm) 15.980 13.384 12.163 91.544 92.151 n₂₀ 1.5953517 1.7296497 1.7710787 1.6819509 1.7372931 k₂₀ 0.4940730 0.3022759 0.2605013 0.2846338 0.2321492 d₂₀ (nm) 105.368 209.053 259.824 147.702 198.983 When n₁ ≧ n₁₀, n_(1m) = 0.0781360 0.1075745 0.1181738 0.0408386 0.0487402 When n₁ < n₁₀, n_(1m) = 0.0319177 0.0739868 0.0809961 0.0177930 0.0144653 When k₁ ≧ k₁₀, k_(1m) = 0.0436902 0.0964282 0.0995044 0.0430859 0.0389966 When k₁ < k₁₀, k_(1m) = 0.0819202 0.1070787 0.0649623 0.0421533 0.0388171 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.898 6.524 6.747 11.475 16.758 When d₁ < d₁₀, d_(1m) (nm) = 1.590 4.095 4.185 3.862 3.299 When n₂ ≧ n₂₀, n_(2m) = 0.0627563 0.1085400 0.1152271 0.0712305 0.0983997 When n₂ < n₂₀, n_(2m) = 0.1565955 0.1599133 0.1627686 0.1038867 0.1174939 When k₂ ≧ k₂₀, k_(2m) = 0.0810010 0.1085132 0.1160754 0.0447900 0.0617737 When k₂ < k₂₀, k_(2m) = 0.1061572 0.0966113 0.0915161 0.0720264 0.0692358 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 26.800 ∞ When d₂ < d₂₀, d_(2m) (nm) = 27.538 81.885 123.147 14.572 12.208

1.0 < NA ≦ 1.1 135 < T ≦ 145 25/34 Case 14-06 14-07 14-08 14-09 14-10 n₁₀ 1.7228203 1.7144911 1.7050797 1.6925663 1.6991742 k₁₀ 0.0749158 0.0796518 0.0657099 0.0675694 0.0739382 d₁₀ (nm) 92.874 160.015 160.534 214.049 220.936 n₂₀ 1.6951594 1.7090445 1.6817729 1.6900690 1.6992675 k₂₀ 0.1935801 0.2610315 0.1743389 0.2005073 0.2525134 d₂₀ (nm) 262.590 141.223 260.739 206.287 141.832 When n₁ ≧ n₁₀, n_(1m) = 0.0517419 0.0380176 0.0550000 0.0300269 0.0099573 When n₁ < n₁₀, n_(1m) = 0.0171826 0.0033435 0.0205762 0.0461255 0.0255640 When k₁ ≧ k₁₀, k_(1m) = 0.0402747 0.0176941 0.0369080 0.0452966 0.0196790 When k₁ < k₁₀, k_(1m) = 0.0440662 0.0145313 0.0289917 0.0339844 0.0188269 When d₁ ≧ d₁₀, d_(1m) (nm) = 34.339 18.702 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 4.946 0.924 8.433 45.536 10.412 When n₂ ≧ n₂₀, n_(2m) = 0.1089246 0.0638684 0.0364478 0.1628357 0.0605127 When n₂ < n₂₀, n_(2m) = 0.1178552 0.0117664 0.1214197 0.0809363 0.0143933 When k₂ ≧ k₂₀, k_(2m) = 0.0721460 0.0078210 0.0372485 0.1200403 0.0864673 When k₂ < k₂₀, k_(2m) = 0.0629919 0.0624194 0.0562036 0.0635217 0.0436145 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 21.562 ∞ ∞ 25.612 When d₂ < d₂₀, d_(2m) (nm) = 67.089 1.645 48.128 21.535 3.107 1.0 < NA ≦ 1.1 135 < T ≦ 145 Case 14-11 14-12 n₁₀ 1.6955775 1.6953573 k₁₀ 0.0548747 0.0556511 d₁₀ (nm) 213.500 272.231 n₂₀ 1.6934763 1.6917841 k₂₀ 0.1457299 0.1736649 d₂₀ (nm) 319.743 260.476 When n₁ ≧ n₁₀, n_(1m) = 0.0884082 0.0714819 When n₁ < n₁₀, n_(1m) = 0.0760022 0.0518335 When k₁ ≧ k₁₀, k_(1m) = 0.0634009 0.0652063 When k₁ < k₁₀, k_(1m) = 0.0349133 0.0395740 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 128.996 113.518 When n₂ ≧ n₂₀, n_(2m) = 0.2359680 0.2895325 When n₂ < n₂₀, n_(2m) = 0.1212769 0.2158911 When k₂ ≧ k₂₀, k_(2m) = 0.1345789 0.2124060 When k₂ < k₂₀, k_(2m) = 0.0582837 0.0793396 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 94.216 91.728

1.0 < NA ≦ 1.1 145 < T ≦ 155 26/34 Case 15-01 15-02 15-03 15-04 15-05 n₁₀ 1.8842999 1.9020060 1.9176161 1.7347347 1.7402087 k₁₀ 0.1660082 0.1078045 0.0733974 0.0970436 0.0854812 d₁₀ (nm) 15.542 13.884 11.927 91.613 92.221 n₂₀ 1.6642092 1.7406676 1.7608162 1.6897518 1.7427648 k₂₀ 0.3881866 0.3180988 0.2687301 0.3028107 0.2437105 d₂₀ (nm) 148.595 199.025 254.127 138.166 190.058 When n₁ ≧ n₁₀, n_(1m) = 0.0902356 0.1039673 0.1191321 0.0403284 0.0477295 When n₁ < n₁₀, n_(1m) = 0.0608057 0.0712415 0.0806982 0.0168616 0.0123145 When k₁ ≧ k₁₀, k_(1m) = 0.0796985 0.0922314 0.1003394 0.0414099 0.0352649 When k₁ < k₁₀, k_(1m) = 0.0913672 0.1040308 0.0733974 0.0415906 0.0369519 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.569 6.401 6.478 11.141 16.036 When d₁ < d₁₀, d_(1m) (nm) = 3.524 3.984 3.954 3.546 2.715 When n₂ ≧ n₂₀, n_(2m) = 0.0975891 0.1093347 0.1166919 0.0721533 0.0993201 When n₂ < n₂₀, n_(2m) = 0.1510022 0.1570532 0.1613013 0.0996582 0.1116626 When k₂ ≧ k₂₀, k_(2m) = 0.1021082 0.1115308 0.1139111 0.0446167 0.0576575 When k₂ < k₂₀, k_(2m) = 0.1042151 0.0981909 0.0922217 0.0735095 0.0699536 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 23.089 ∞ When d₂ < d₂₀, d_(2m) (nm) = 36.178 75.817 118.717 13.060 9.872 1.0 < NA ≦ 1.1 145 < T ≦ 155 Case 15-06 15-07 15-08 15-09 15-10 n₁₀ 1.7232674 1.7163169 1.7052425 1.6979604 1.6919325 k₁₀ 0.0768076 0.0822242 0.0670983 0.0765182 0.0693101 d₁₀ (nm) 92.842 160.121 160.367 219.964 212.895 n₂₀ 1.6931409 1.7162208 1.6808978 1.6978817 1.6886216 k₂₀ 0.2010537 0.2770503 0.1806066 0.2641846 0.2063377 d₂₀ (nm) 254.319 132.120 252.327 134.431 199.162 When n₁ ≧ n₁₀, n_(1m) = 0.0505859 0.0375513 0.0535669 0.0055981 0.0297021 When n₁ < n₁₀, n_(1m) = 0.0155139 0.0002051 0.0181250 0.0232141 0.0494775 When k₁ ≧ k₁₀, k_(1m) = 0.0378564 0.0051208 0.0335376 0.0146118 0.0441443 When k₁ < k₁₀, k_(1m) = 0.0427637 0.0032507 0.0275378 0.0178613 0.0327478 When d₁ ≧ d₁₀, d_(1m) (nm) = 33.581 19.229 ∞ 4.817 ∞ When d₁ < d₁₀, d_(1m) (nm) = 4.347 0.056 6.999 10.286 43.553 When n₂ ≧ n₂₀, n_(2m) = 0.0760803 0.0599353 0.0299109 0.0539575 0.2378027 When n₂ < n₂₀, n_(2m) = 0.1135510 0.0008435 0.1135376 0.0106042 0.0839368 When k₂ ≧ k₂₀, k_(2m) = 0.0671289 0.0005420 0.0313745 0.0886438 0.1159473 When k₂ < k₂₀, k_(2m) = 0.0634387 0.0680176 0.0561853 0.0306653 0.0671289 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 12.405 ∞ 21.650 ∞ When d₂ < d₂₀, d_(2m) (nm) = 64.219 0.105 32.640 2.145 24.441

1.0 < NA ≦ 1.1 145 < T ≦ 155 27/34 Case 15-11 15-12 n₁₀ 1.6933082 1.6953110 k₁₀ 0.0619759 0.0563706 d₁₀ (nm) 212.839 272.392 n₂₀ 1.6904544 1.6905212 k₂₀ 0.1723582 0.1778331 d₂₀ (nm) 255.647 252.170 When n₁ ≧ n₁₀, n_(1m) = 0.0645605 0.0686462 When n₁ < n₁₀, n_(1m) = 0.0718213 0.0516125 When k₁ ≧ k₁₀, k_(1m) = 0.0578125 0.0646021 When k₁ < k₁₀, k_(1m) = 0.0349402 0.0400220 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 54.857 112.777 When n₂ ≧ n₂₀, n_(2m) = 0.2345605 0.2885852 When n₂ < n₂₀, n_(2m) = 0.1388916 0.2180322 When k₂ ≧ k₂₀, k_(2m) = 0.1280078 0.2117786 When k₂ < k₂₀, k_(2m) = 0.0658081 0.0782971 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 73.297 86.154 1.0 < NA ≦ 1.1 155 < T ≦ 165 Case 16-01 16-02 16-03 16-04 16-05 n₁₀ 1.9162825 1.8960663 1.9085468 1.9232010 1.7368663 k₁₀ 0.2485644 0.1719364 0.1144956 0.0848488 0.1019026 d₁₀ (nm) 18.297 15.704 13.923 11.624 91.322 n₂₀ 1.6104232 1.6708316 1.7385514 1.7455678 1.6869885 k₂₀ 0.6165991 0.4169686 0.3337318 0.2771185 0.3224919 d₂₀ (nm) 83.442 139.520 191.444 248.983 130.342 When n₁ ≧ n₁₀, n_(1m) = 0.0684412 0.0871606 0.1018298 0.1200745 0.0372510 When n₁ < n₁₀, n_(1m) = 0.0186816 0.0568530 0.0690649 0.0803638 0.0125696 When k₁ ≧ k₁₀, k_(1m) = 0.0233801 0.0734265 0.0893420 0.1020142 0.0332275 When k₁ < k₁₀, k_(1m) = 0.0710925 0.0921472 0.1049048 0.0848488 0.0396851 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.544 5.170 6.051 6.159 10.019 When d₁ < d₁₀, d_(1m) (nm) = 0.960 3.162 3.726 3.719 2.554 When n₂ ≧ n₂₀, n_(2m) = 0.0392468 0.0938416 0.1080847 0.1165613 0.0639832 When n₂ < n₂₀, n_(2m) = 0.1557959 0.1481714 0.1540210 0.1601440 0.0923059 When k₂ ≧ k₂₀, k_(2m) = 0.0796021 0.1023108 0.1103064 0.1095667 0.0344885 When k₂ < k₂₀, k_(2m) = 0.1143958 0.1026965 0.0973987 0.0917590 0.0690210 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 16.255 When d₂ < d₂₀, d_(2m) (nm) = 16.079 31.215 71.737 92.392 12.361

1.0 < NA ≦ 1.1 155 < T ≦ 165 28/34 Case 16-06 16-07 16-08 16-09 16-10 n₁₀ 1.7401611 1.7243481 1.7054586 1.6959475 1.6918299 k₁₀ 0.0886217 0.0791015 0.0688139 0.0801582 0.0707672 d₁₀ (nm) 92.017 92.538 159.721 218.084 213.401 n₂₀ 1.7381402 1.6930588 1.6812702 1.6891859 1.6865968 k₂₀ 0.2555882 0.2092609 0.1871719 0.2763746 0.2143676 d₂₀ (nm) 182.755 245.988 244.029 128.431 190.286 When n₁ ≧ n₁₀, n_(1m) = 0.0455261 0.0488196 0.0509851 0.0098682 0.0278625 When n₁ < n₁₀, n_(1m) = 0.0098901 0.0131677 0.0163489 0.0140930 0.0421411 When k₁ ≧ k₁₀, k_(1m) = 0.0306140 0.0345203 0.0271167 0.0171570 0.0425635 When k₁ < k₁₀, k_(1m) = 0.0347180 0.0404199 0.0257288 0.0171082 0.0318542 When d₁ ≧ d₁₀, d_(1m) (nm) = 14.632 33.648 ∞ 8.318 ∞ When d₁ < d₁₀, d_(1m) (nm) = 2.133 3.535 5.969 6.525 43.306 When n₂ ≧ n₂₀, n_(2m) = 0.0895227 0.0573254 0.0211304 0.0441309 0.2430603 When n₂ < n₂₀, n_(2m) = 0.1067090 0.1098926 0.1107275 0.0233423 0.0869226 When k₂ ≧ k₂₀, k_(2m) = 0.0460217 0.0587354 0.0210486 0.0642297 0.1089050 When k₂ < k₂₀, k_(2m) = 0.0680432 0.0628845 0.0551514 0.0464880 0.0738831 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 19.572 ∞ When d₂ < d₂₀, d_(2m) (nm) = 8.553 37.425 30.745 5.059 27.273 1.0 < NA ≦ 1.1 155 < T ≦ 165 Case 16-11 16-12 n₁₀ 1.6935501 1.6953216 k₁₀ 0.0625258 0.0573372 d₁₀ (nm) 213.666 272.694 n₂₀ 1.6897170 1.6885432 k₂₀ 0.1780108 0.1839003 d₂₀ (nm) 246.097 243.579 When n₁ ≧ n₁₀, n_(1m) = 0.0658508 0.0696008 When n₁ < n₁₀, n_(1m) = 0.0609790 0.0519751 When k₁ ≧ k₁₀, k_(1m) = 0.0564087 0.0639087 When k₁ < k₁₀, k_(1m) = 0.0340259 0.0390979 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 55.431 113.126 When n₂ ≧ n₂₀, n_(2m) = 0.2425122 0.2917029 When n₂ < n₂₀, n_(2m) = 0.1355713 0.2189172 When k₂ ≧ k₂₀, k_(2m) = 0.1230981 0.2089771 When k₂ < k₂₀, k_(2m) = 0.0647131 0.0785583 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 74.519 83.205

1.0 < NA ≦ 1.1 165 < T ≦ 175 29/34 Case 17-01 17-02 17-03 17-04 17-05 n₁₀ 1.9620125 1.9138120 1.9194872 1.9263431 1.7366416 k₁₀ 0.2671830 0.1838008 0.1265886 0.0918160 0.1083929 d₁₀ (nm) 17.281 15.160 13.286 11.575 90.600 n₂₀ 1.6251877 1.6631095 1.7204546 1.7389610 1.6676220 k₂₀ 0.6875073 0.4399257 0.3440475 0.2853240 0.3363185 d₂₀ (nm) 75.420 132.541 186.036 241.421 124.136 When n₁ ≧ n₁₀, n_(1m) = 0.0681287 0.0852625 0.1025696 0.1184741 0.0323010 When n₁ < n₁₀, n_(1m) = 0.0103625 0.0516760 0.0678894 0.0788623 0.0048279 When k₁ ≧ k₁₀, k_(1m) = 0.0130603 0.0684912 0.0894849 0.1012756 0.0174634 When k₁ < k₁₀, k_(1m) = 0.0671069 0.0945691 0.1086621 0.0918160 0.0305151 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.029 4.576 5.503 5.915 7.890 When d₁ < d₁₀, d_(1m) (nm) = 0.441 2.597 3.327 3.560 0.944 When n₂ ≧ n₂₀, n_(2m) = 0.0235046 0.0887256 0.1055566 0.1147229 0.0355994 When n₂ < n₂₀, n_(2m) = 0.1565857 0.1459790 0.1532703 0.1591589 0.0840686 When k₂ ≧ k₂₀, k_(2m) = 0.0495569 0.0950366 0.1036096 0.1065601 0.0135376 When k₂ < k₂₀, k_(2m) = 0.1038318 0.0972864 0.0941003 0.0904578 0.0586487 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 9.834 When d₂ < d₂₀, d_(2m) (nm) = 13.490 32.564 69.289 94.292 9.844 1.0 < NA ≦ 1.1 165 < T ≦ 175 Case 17-06 17-07 17-08 17-09 17-10 n₁₀ 1.7377165 1.7250070 1.7054487 1.6921136 1.6937452 k₁₀ 0.0918810 0.0812670 0.0704565 0.0719896 0.0634118 d₁₀ (nm) 91.516 92.096 158.889 214.506 214.086 n₂₀ 1.7225143 1.6922454 1.6815182 1.6833735 1.6893106 k₂₀ 0.2640565 0.2155950 0.1921887 0.2231205 0.1840166 d₂₀ (nm) 176.484 237.445 235.428 180.418 236.602 When n₁ ≧ n₁₀, n_(1m) = 0.0420569 0.0467627 0.0482849 0.0256970 0.0615491 When n₁ < n₁₀, n_(1m) = 0.0067480 0.0110010 0.0145544 0.0346619 0.0533179 When k₁ ≧ k₁₀, k_(1m) = 0.0242395 0.0311426 0.0191064 0.0402332 0.0548975 When k₁ < k₁₀, k_(1m) = 0.0306030 0.0379785 0.0179834 0.0315259 0.0339990 When d₁ ≧ d₁₀, d_(1m) (nm) = 13.053 20.074 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 1.437 2.846 5.076 44.014 52.355 When n₂ ≧ n₂₀, n_(2m) = 0.0699756 0.0474695 0.0119531 0.2616345 0.2513293 When n₂ < n₂₀, n_(2m) = 0.1027979 0.1100684 0.1104504 0.0766565 0.1353430 When k₂ ≧ k₂₀, k_(2m) = 0.0294397 0.0490112 0.0106458 0.1033704 0.1166565 When k₂ < k₂₀, k_(2m) = 0.0637073 0.0613086 0.0537012 0.0738440 0.0656140 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 5.139 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 7.091 63.320 32.177 24.892 75.277

1.0 < NA ≦ 1.1 165 < T ≦ 175 30/34 Case 17-11 17-12 n₁₀ 1.6937402 1.6958036 k₁₀ 0.0634247 0.0530688 d₁₀ (nm) 214.067 271.703 n₂₀ 1.6892020 1.6918593 k₂₀ 0.1839903 0.1637010 d₂₀ (nm) 236.644 291.452 When n₁ ≧ n₁₀, n_(1m) = 0.0614392 0.0799048 When n₁ < n₁₀, n_(1m) = 0.0533545 0.0613391 When k₁ ≧ k₁₀, k_(1m) = 0.0548865 0.0657874 When k₁ < k₁₀, k_(1m) = 0.0340295 0.0406555 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 52.349 186.337 When n₂ ≧ n₂₀, n_(2m) = 0.2512048 0.2852795 When n₂ < n₂₀, n_(2m) = 0.1353552 0.2060364 When k₂ ≧ k₂₀, k_(2m) = 0.1167688 0.2088965 When k₂ < k₂₀, k_(2m) = 0.0656104 0.0720715 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 75.294 119.308 1.0 < NA ≦ 1.1 175 < T ≦ 185 Case 18-01 18-02 18-03 18-04 18-05 n₁₀ 2.0247974 1.9282935 1.9213955 1.9262173 1.7355101 k₁₀ 0.2830183 0.1992550 0.1387890 0.1063571 0.0947091 d₁₀ (nm) 15.097 14.428 13.062 11.253 91.033 n₂₀ 1.6266898 1.6428403 1.7027750 1.7173021 1.7079959 k₂₀ 0.7191283 0.4517072 0.3507816 0.2869739 0.2693832 d₂₀ (nm) 71.681 126.823 179.475 236.027 169.192 When n₁ ≧ n₁₀, n_(1m) = 0.0749963 0.0847278 0.1010168 0.1197595 0.0387598 When n₁ < n₁₀, n_(1m) = 0.0029248 0.0471021 0.0652051 0.0785376 0.0037976 When k₁ ≧ k₁₀, k_(1m) = 0.0038599 0.0655127 0.0884351 0.1039075 0.0170227 When k₁ < k₁₀, k_(1m) = 0.0706714 0.0951611 0.1067810 0.1063571 0.0250378 When d₁ ≧ d₁₀, d_(1m) (nm) = 2.365 4.047 5.170 5.710 10.979 When d₁ < d₁₀, d_(1m) (nm) = 0.098 2.142 3.074 3.403 0.799 When n₂ ≧ n₂₀, n_(2m) = 0.0068848 0.0841113 0.1036328 0.1139966 0.0477551 When n₂ < n₂₀, n_(2m) = 0.1606787 0.1462891 0.1534180 0.1596240 0.1042908 When k₂ ≧ k₂₀, k_(2m) = 0.0111658 0.0845300 0.0979260 0.1010864 0.0158423 When k₂ < k₂₀, k_(2m) = 0.0939917 0.0914209 0.0916113 0.0894141 0.0611707 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 3.000 39.175 67.597 105.537 4.807

1.0 < NA ≦ 1.1 175 < T ≦ 185 31/34 Case 18-06 18-07 18-08 18-09 18-10 n₁₀ 1.7251933 1.7054174 1.6937830 1.6952847 1.6957027 k₁₀ 0.0829804 0.0718367 0.0647049 0.0582261 0.0542195 d₁₀ (nm) 91.728 158.389 214.330 213.359 271.586 n₂₀ 1.6903561 1.6812041 1.6889835 1.6934588 1.6918383 k₂₀ 0.2192539 0.1954390 0.1894046 0.1611341 0.1679902 d₂₀ (nm) 228.367 226.084 226.812 284.005 281.728 When n₁ ≧ n₁₀, n_(1m) = 0.0450793 0.0463184 0.0575061 0.0820801 0.0778577 When n₁ < n₁₀, n_(1m) = 0.0094861 0.0044336 0.0478479 0.0612256 0.0602185 When k₁ ≧ k₁₀, k_(1m) = 0.0283801 0.0117395 0.0529968 0.0602039 0.0649841 When k₁ < k₁₀, k_(1m) = 0.0362878 0.0115625 0.0337854 0.0347266 0.0400525 When d₁ ≧ d₁₀, d_(1m) (nm) = 16.774 ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 2.397 1.386 50.875 126.709 185.173 When n₂ ≧ n₂₀, n_(2m) = 0.0407971 0.0052539 0.2620386 0.2460583 0.2888794 When n₂ < n₂₀, n_(2m) = 0.1134692 0.1157361 0.1359692 0.1267810 0.2086084 When k₂ ≧ k₂₀, k_(2m) = 0.0417627 0.0042761 0.1123547 0.1276489 0.2100842 When k₂ < k₂₀, k_(2m) = 0.0604272 0.0538147 0.0667053 0.0613220 0.0762817 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 1.973 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 63.259 35.408 73.536 81.916 101.090 1.0 < NA ≦ 1.1 185 < T ≦ 195 Case 19-01 19-02 19-03 19-04 19-05 n₁₀ 1.9316549 1.9193011 1.9209840 1.9114684 1.7364379 k₁₀ 0.2158025 0.1476126 0.1061325 0.1024475 0.0969838 d₁₀ (nm) 14.297 13.272 11.842 10.224 91.033 n₂₀ 1.6202378 1.6935029 1.7241227 1.6976483 1.7085420 k₂₀ 0.4645248 0.3598725 0.2946413 0.2438294 0.2774318 d₂₀ (nm) 119.165 170.049 224.030 285.021 158.680 When n₁ ≧ n₁₀, n_(1m) = 0.0819873 0.0986853 0.1146375 0.1344971 0.0375342 When n₁ < n₁₀, n_(1m) = 0.0431250 0.0625305 0.0746716 0.0933276 0.0023010 When k₁ ≧ k₁₀, k_(1m) = 0.0616553 0.0860156 0.0981763 0.1190894 0.0118958 When k₁ < k₁₀, k_(1m) = 0.0896899 0.1016528 0.1061325 0.1024475 0.0218677 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.700 5.023 5.787 6.264 9.942 When d₁ < d₁₀, d_(1m) (nm) = 1.892 2.963 3.440 3.984 0.476 When n₂ ≧ n₂₀, n_(2m) = 0.0797485 0.1030664 0.1135645 0.1221387 0.0340320 When n₂ < n₂₀, n_(2m) = 0.1493750 0.1566296 0.1631348 0.1387097 0.1094446 When k₂ ≧ k₂₀, k_(2m) = 0.0775891 0.0962708 0.1030847 0.0998328 0.0100928 When k₂ < k₂₀, k_(2m) = 0.0909656 0.0941418 0.0920776 0.0860498 0.0649939 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 42.778 When d₂ < d₂₀, d_(2m) (nm) = 39.461 66.761 95.735 134.721 2.964

1.0 < NA ≦ 1.1 185 < T ≦ 195 32/34 Case 19-06 19-07 19-08 19-09 19-10 n₁₀ 1.7258494 1.7176246 1.7057732 1.7053832 1.6928552 k₁₀ 0.0843222 0.0727056 0.0731106 0.0633918 0.0748243 d₁₀ (nm) 91.766 91.617 158.709 158.181 216.444 n₂₀ 1.6907525 1.6784161 1.6805392 1.6859880 1.6825267 k₂₀ 0.2229229 0.1842107 0.1989479 0.1669818 0.2415835 d₂₀ (nm) 218.067 277.206 215.842 272.384 158.548 When n₁ ≧ n₁₀, n_(1m) = 0.0445569 0.0497937 0.0455957 0.0532361 0.0209436 When n₁ < n₁₀, n_(1m) = 0.0086951 0.0298450 0.0022034 0.0367859 0.0248157 When k₁ ≧ k₁₀, k_(1m) = 0.0263611 0.0534119 0.0080444 0.0507507 0.0311414 When k₁ < k₁₀, k_(1m) = 0.0359253 0.0504663 0.0097656 0.0393250 0.0256995 When d₁ ≧ d₁₀, d_(1m) (nm) = 15.734 41.766 ∞ ∞ 12.676 When d₁ < d₁₀, d_(1m) (nm) = 2.168 9.272 0.695 75.025 12.180 When n₂ ≧ n₂₀, n_(2m) = 0.0361047 0.0638184 0.0029834 0.0794446 0.0872498 When n₂ < n₂₀, n_(2m) = 0.1156152 0.1202979 0.1187366 0.1037524 0.0413367 When k₂ ≧ k₂₀, k_(2m) = 0.0400842 0.0626270 0.0025122 0.0450354 0.0876147 When k₂ < k₂₀, k_(2m) = 0.0626514 0.0561853 0.0563074 0.0506238 0.0672510 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 1.098 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 62.415 80.313 33.556 35.245 14.500 1.0 < NA ≦ 1.1 185 < T ≦ 195 Case 19-11 19-12 19-13 n₁₀ 1.6935473 1.6950516 1.6954923 k₁₀ 0.0663823 0.0596605 0.0554795 d₁₀ (nm) 214.407 213.429 271.226 n₂₀ 1.6888366 1.6925794 1.6917166 k₂₀ 0.1945007 0.1643538 0.1716832 d₂₀ (nm) 217.060 274.430 272.356 When n₁ ≧ n₁₀, n_(1m) = 0.0539099 0.0837012 0.0771448 When n₁ < n₁₀, n_(1m) = 0.0450378 0.0604199 0.0593555 When k₁ ≧ k₁₀, k_(1m) = 0.0507373 0.0587012 0.0639185 When k₁ < k₁₀, k_(1m) = 0.0306738 0.0334839 0.0392737 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 49.334 125.965 183.474 When n₂ ≧ n₂₀, n_(2m) = 0.1392200 0.1753748 0.2943286 When n₂ < n₂₀, n_(2m) = 0.1378223 0.1262683 0.2110303 When k₂ ≧ k₂₀, k_(2m) = 0.1089429 0.1267468 0.2119958 When k₂ < k₂₀, k_(2m) = 0.0654358 0.0611353 0.0788904 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 37.875 75.613 93.291

1.0 < NA ≦ 1.1 195 < T ≦ 205 33/34 Case 20-01 20-02 20-03 20-04 20-05 n₁₀ 1.9124203 1.9240615 1.9069086 1.7409810 1.7270720 k₁₀ 0.1489422 0.1092971 0.1015424 0.0988730 0.0857435 d₁₀ (nm) 14.330 12.001 10.748 91.533 92.142 n₂₀ 1.7039618 1.7245262 1.7018591 1.7256420 1.6923707 k₂₀ 0.3787231 0.3026113 0.2499950 0.2922591 0.2292874 d₂₀ (nm) 157.291 214.201 273.963 146.253 207.814 When n₁ ≧ n₁₀, n_(1m) = 0.0947424 0.1140125 0.1293140 0.0383984 0.0447009 When n₁ < n₁₀, n_(1m) = 0.0592273 0.0732715 0.0895557 0.0020898 0.0081226 When k₁ ≧ k₁₀, k_(1m) = 0.0804358 0.0961365 0.1132190 0.0106335 0.0246362 When k₁ < k₁₀, k_(1m) = 0.0954272 0.1092971 0.1015424 0.0220923 0.0359277 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.168 5.724 6.406 9.801 15.595 When d₁ < d₁₀, d_(1m) (nm) = 3.029 3.355 4.072 0.420 2.001 When n₂ ≧ n₂₀, n_(2m) = 0.1047864 0.1153137 0.1226477 0.0347485 0.0318494 When n₂ < n₂₀, n_(2m) = 0.1598962 0.1638757 0.1417261 0.1115564 0.1129541 When k₂ ≧ k₂₀, k_(2m) = 0.1020288 0.1044775 0.1018286 0.0106042 0.0415295 When k₂ < k₂₀, k_(2m) = 0.1029260 0.0959216 0.0891724 0.0737659 0.0663513 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 37.674 ∞ When d₂ < d₂₀, d_(2m) (nm) = 61.016 86.078 130.875 2.293 32.252 1.0 < NA ≦ 1.1 195 < T ≦ 205 Case 20-06 20-07 20-08 20-09 20-10 n₁₀ 1.7180387 1.7063746 1.7058520 1.6924739 1.6928977 k₁₀ 0.0734703 0.0744769 0.0640895 0.0767908 0.0684401 d₁₀ (nm) 91.877 159.624 158.885 216.680 213.761 n₂₀ 1.6777924 1.6791348 1.6855365 1.6850078 1.6885850 k₂₀ 0.1881130 0.2047799 0.1710983 0.2520629 0.1999527 d₂₀ (nm) 267.481 205.830 262.479 148.712 208.689 When n₁ ≧ n₁₀, n_(1m) = 0.0499475 0.0454993 0.0542188 0.0126501 0.0501160 When n₁ < n₁₀, n_(1m) = 0.0300122 0.0018469 0.0331775 0.0226819 0.0449377 When k₁ ≧ k₁₀, k_(1m) = 0.0534277 0.0070447 0.0503931 0.0235315 0.0487341 When k₁ < k₁₀, k_(1m) = 0.0493896 0.0111902 0.0386401 0.0180737 0.0270740 When d₁ ≧ d₁₀, d_(1m) (nm) = 33.063 ∞ ∞ 10.064 ∞ When d₁ < d₁₀, d_(1m) (nm) = 9.229 0.603 19.062 10.036 46.531 When n₂ ≧ n₂₀, n_(2m) = 0.0633008 0.0027478 0.0774658 0.0675293 0.1390137 When n₂ < n₂₀, n_(2m) = 0.1171533 0.1127539 0.1100610 0.0218616 0.1442749 When k₂ ≧ k₂₀, k_(2m) = 0.0639148 0.0025830 0.0457581 0.0823975 0.1098364 When k₂ < k₂₀, k_(2m) = 0.0580542 0.0529590 0.0524817 0.0502942 0.0628650 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 1.007 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 77.001 28.132 32.836 6.408 22.345

1.0 < NA ≦ 1.1 195 < T ≦ 205 34/34 Case 20-11 20-12 n₁₀ 1.6947635 1.6952371 k₁₀ 0.0610999 0.0566636 d₁₀ (nm) 213.366 270.653 n₂₀ 1.6918971 1.6914186 k₂₀ 0.1679521 0.1751623 d₂₀ (nm) 265.366 263.994 When n₁ ≧ n₁₀, n_(1m) = 0.0863086 0.0772644 When n₁ < n₁₀, n_(1m) = 0.0626501 0.0586890 When k₁ ≧ k₁₀, k_(1m) = 0.0572302 0.0627917 When k₁ < k₁₀, k_(1m) = 0.0322180 0.0382104 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 124.819 121.330 When n₂ ≧ n₂₀, n_(2m) = 0.1702917 0.3021582 When n₂ < n₂₀, n_(2m) = 0.1249365 0.2142798 When k₂ ≧ k₂₀, k_(2m) = 0.1249064 0.2136462 When k₂ < k₂₀, k_(2m) = 0.0643469 0.0826477 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 66.113 91.025

In accordance with a third embodiment of the invention, an antireflective film has a two-layer structure and is used in a process for manufacturing a semiconductor device by being provided between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, for exposure of the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.1<NA≦1.2. In accordance with the third embodiment of the invention, an exposure method is used in a process for manufacturing a semiconductor device and includes providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.1<NA≦1.2.

The antireflective film or the antireflective film used in the exposure method according to the third embodiment of the invention includes an upper layer having a complex refractive index N₁ , and a lower layer having a complex refractive index N₂, the complex refractive indexes N₁ and N₂ being represented by the following equations: N ₁ =n ₁ −k ₁ i N ₂ =n ₂ −k ₂ i Assuming that the thickness of the upper layer is d₁ (unit: nm) and the thickness of the lower layer is d₂ (unit: nm), when any one of the combinations of values of [n₁₀, k₁₀, d₁₀, n₂₀, k₂₀, d₂₀] described below is selected depending on the thickness T of the silicon oxide film, n₁, k₁, d₁, n₂, k₂, and d₂ satisfy the following relational expression: {(n ₁ −n ₁₀)/(n _(1m) −n ₁₀)}²+{(k ₁ −k ₁₀)/(k _(1m) −k ₁₀)}²+{(d ₁ −d ₁₀)/(d _(1m) −d ₁₀)}²+{(n ₂ −n ₂₀)/(n _(2m) −n ₂₀)}²+{(k ₂ −k ₂₀)/(k _(2m) −k ₂₀)}²+{(d ₂ −d ₂₀)/(d _(2m) −d ₂₀)}²≦1

However, a value of n_(1m) in a corresponding case is selected on the basis of a magnitude relation between n₁ and n₁₀; a value of k_(1m) in a corresponding case is selected on the basis of a magnitude relation between k₁ and k₁₀; a value of d_(1m) in a corresponding case is selected on the basis of a magnitude relation between d₁ and d₁₀; a value of n_(2m) in a corresponding case is selected on the basis of a magnitude relation between n₂ and n₂₀; a value of k_(2m) in a corresponding case is selected on the basis of a magnitude relation between k₂ and k₂₀; and a value of d_(2m) in a corresponding case is selected on the basis of a magnitude relation between d₂ and d₂₀. In the tables below, in the line of “When n₁≧n₁₀, n_(1m)=”, each value in the right columns is “n_(1m)−n₁₀”; in the line of “When n₁<n₁₀, n_(1m)=”, each value in the right columns is “n₁₀−n_(1m)”; in the line of “When k₁≧k₁₀, k_(1m)=”, each value in the right columns is “k_(1m)−k₁₀”; in the line of “When k₁<k₁₀, k_(1m)=”, each value in the right columns is “k₁₀−k_(1m)”; in the line of “When d₁≧d₁₀, d_(1m) (nm)=”, each value (unit: nm) in the right columns is “d_(1m)−d₁₀”; in the line of “When d₁<d₁₀, d_(1m) (nm)=”, each value (unit: nm) in the right columns is “d₁₀−d_(1m)”; in the line of “When n₂≧n₂₀, n_(2m)=”, each value in the right columns is “n_(2m)−n₂₀”; in the line of “When n₂<n₂₀, n_(2m)=”, each value in the right columns is “n₂₀−n_(2m)”; in the line of “When k₂≧k₂₀, k_(2m)=”, each value in the right columns is “k_(2m)−k₂₀”; in the line of “When k₂<k₂₀, k_(2m)=”, each value in the right columns is “k₂₀−k_(2m)”; in the line of “When d₂≧d₂₀, d_(2m) (nm)=”, each value (unit: nm) in the right columns is “d_(2m)−d₂₀”; and in the line of “When d₂<d₂₀, d_(2m) (nm)=”, each value (unit: nm) in the right columns is “d₂₀−d_(2m)”.

1.1 < NA ≦ 1.2 2 ≦ T ≦ 15 1/27 Case 1-01 1-02 1-03 1-04 1-05 n₁₀ 2.0940641 1.9168406 1.8970115 1.8805879 1.8778358 k₁₀ 0.0325844 0.1807255 0.1529573 0.1098415 0.1082679 d₁₀ (nm) 26.090 35.662 31.182 13.577 19.930 n₂₀ 4.2290158 5.4932306 2.4318401 1.7032895 1.8340760 k₂₀ 2.3935124 0.6123354 0.5958382 0.2751108 0.3677230 d₂₀ (nm) 3.632 19.087 52.406 218.193 142.226 When n₁ ≧ n₁₀, n_(1m) = 0.0779846 0.0720874 0.0701013 0.1012354 0.0784314 When n₁ < n₁₀, n_(1m) = 0.0750281 0.0636047 0.0555591 0.0635571 0.0497058 When k₁ ≧ k₁₀, k_(1m) = 0.0672229 0.0527649 0.0494641 0.0853247 0.0590771 When k₁ < k₁₀, k_(1m) = 0.0325844 0.0849731 0.0840393 0.1029980 0.0867822 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.416 5.199 6.198 6.716 7.382 When d₁ < d₁₀, d_(1m) (nm) = 2.721 3.845 3.923 3.853 3.873 When n₂ ≧ n₂₀, n_(2m) = 0.2775293 0.1187439 0.1333862 0.1147803 0.1115393 When n₂ < n₂₀, n_(2m) = 0.2711597 0.1202087 0.1603455 0.1449023 0.1457849 When k₂ ≧ k₂₀, k_(2m) = 0.2845105 0.1470557 0.1794812 0.0967163 0.1467151 When k₂ < k₂₀, k_(2m) = 0.2499512 0.1180896 0.1302063 0.0855334 0.0954285 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.458 0.467 5.440 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 0.433 0.450 5.242 81.747 30.656 1.1 < NA ≦ 1.2 2 ≦ T ≦ 15 Case 1-06 1-07 1-08 1-09 1-10 n₁₀ 1.8663312 1.7888608 1.7735009 1.7175310 1.7199475 k₁₀ 0.0978132 0.1060865 0.0957437 0.0751352 0.0655065 d₁₀ (nm) 12.232 103.503 98.181 95.409 94.621 n₂₀ 1.6938400 4.4234099 2.0208865 1.6658936 1.6963762 k₂₀ 0.2288643 0.4526804 0.4158741 0.2054797 0.1762614 d₂₀ (nm) 277.705 24.164 66.693 212.937 266.043 When n₁ ≧ n₁₀, n_(1m) = 0.1143909 0.0588428 0.0489270 0.0419214 0.0484180 When n₁ < n₁₀, n_(1m) = 0.0786536 0.0104822 0.0094507 0.0157727 0.0265735 When k₁ ≧ k₁₀, k_(1m) = 0.1033447 0.0215918 0.0249109 0.0382361 0.0520056 When k₁ < k₁₀, k_(1m) = 0.0978132 0.0439624 0.0358655 0.0399121 0.0459387 When d₁ ≧ d₁₀, d_(1m) (nm) = 7.609 9.370 10.912 18.272 51.841 When d₁ < d₁₀, d_(1m) (nm) = 4.794 1.739 1.766 4.805 8.596 When n₂ ≧ n₂₀, n_(2m) = 0.1069236 0.0468066 0.0740674 0.0384924 0.0631091 When n₂ < n₂₀, n_(2m) = 0.1302808 0.1036670 0.1052673 0.0829468 0.0987561 When k₂ ≧ k₂₀, k_(2m) = 0.0918579 0.0409717 0.0495154 0.0385596 0.0522119 When k₂ < k₂₀, k_(2m) = 0.0786169 0.0807788 0.0903577 0.0528296 0.0515430 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 0.296 4.999 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 128.233 0.621 5.371 23.038 34.154

1.1 < NA ≦ 1.2 2 ≦ T ≦ 15 2/27 Case 1-11 1-12 1-13 1-14 1-15 n₁₀ 1.7156729 1.7043499 1.7082412 1.6926126 1.6890888 k₁₀ 0.0770168 0.0644952 0.0577629 0.0683906 0.0745003 d₁₀ (nm) 188.315 165.315 163.169 237.184 217.718 n₂₀ 6.9620048 1.6731418 1.7075031 6.7859369 1.7770504 k₂₀ 3.4231449 0.1899705 0.1626792 2.9992529 0.3401503 d₂₀ (nm) 0.879 207.250 259.766 0.993 84.925 When n₁ ≧ n₁₀, n_(1m) = 0.0649841 0.0417419 0.0509473 0.0348376 0.0194055 When n₁ < n₁₀, n_(1m) = 0.0083154 0.0317078 0.0477380 0.0764368 0.0607605 When k₁ ≧ k₁₀, k_(1m) = 0.0257251 0.0333704 0.0433435 0.0403589 0.0329480 When k₁ < k₁₀, k_(1m) = 0.0275232 0.0338538 0.0333484 0.0319214 0.0242554 When d₁ ≧ d₁₀, d_(1m) (nm) = 38.959 ∞ ∞ 19.483 9.981 When d₁ < d₁₀, d_(1m) (nm) = 3.134 16.146 77.216 43.463 24.681 When n₂ ≧ n₂₀, n_(2m) = 0.2971887 0.0474377 0.0745630 0.5633252 0.1177502 When n₂ < n₂₀, n_(2m) = 0.6091602 0.0721411 0.0651379 0.4300269 0.0317639 When k₂ ≧ k₂₀, k_(2m) = 0.2827808 0.0222888 0.0325830 0.2436438 0.0560791 When k₂ < k₂₀, k_(2m) = 0.6937878 0.0478259 0.0479700 0.5647217 0.0980969 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.055 16.772 ∞ 0.120 16.691 When d₂ < d₂₀, d_(2m) (nm) = 0.135 19.208 16.504 0.176 3.670 1.1 < NA ≦ 1.2 2 ≦ T ≦ 15 Case 1-16 1-17 1-18 1-19 n₁₀ 1.6903292 1.6921355 1.6951475 1.7004017 k₁₀ 0.0721915 0.0670288 0.0546351 0.0599028 d₁₀ (nm) 210.963 207.063 219.259 265.986 n₂₀ 1.7111030 1.6978167 1.6889102 1.7029410 k₂₀ 0.2426612 0.1954345 0.1606659 0.1992607 d₂₀ (nm) 155.846 222.387 263.728 214.965 When n₁ ≧ n₁₀, n_(1m) = 0.0284180 0.0456091 0.0773694 0.0612244 When n₁ < n₁₀, n_(1m) = 0.0510327 0.0467078 0.0619885 0.0410486 When k₁ ≧ k₁₀, k_(1m) = 0.0455554 0.0511133 0.0524768 0.0499927 When k₁ < k₁₀, k_(1m) = 0.0320984 0.0388074 0.0353687 0.0377380 When d₁ ≧ d₁₀, d_(1m) (nm) = 23.770 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 28.472 31.416 128.164 94.534 When n₂ ≧ n₂₀, n_(2m) = 0.1260327 0.1631665 0.2120154 0.2674829 When n₂ < n₂₀, n_(2m) = 0.0663647 0.1722144 0.1079456 0.2316101 When k₂ ≧ k₂₀, k_(2m) = 0.0960291 0.1259009 0.1121619 0.2074023 When k₂ < k₂₀, k_(2m) = 0.0846741 0.0757690 0.0591858 0.0894751 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 12.288 72.281 78.597 77.855

1.1 < NA ≦ 1.2 15 < T ≦ 25 3/27 Case 2-01 2-02 2-03 2-04 2-05 n₁₀ 1.8738578 1.8839217 1.8842367 1.8705650 1.7997475 k₁₀ 0.2051029 0.1169859 0.1130268 0.1010320 0.1076402 d₁₀ (nm) 37.506 20.540 14.059 12.433 101.817 n₂₀ 6.9151921 1.8488520 1.7087850 1.6946915 5.7702673 k₂₀ 0.6847654 0.3990514 0.2917115 0.2394813 0.5312541 d₂₀ (nm) 14.288 132.865 208.377 268.610 17.283 When n₁ ≧ n₁₀, n_(1m) = 0.0713965 0.0757019 0.0971472 0.1115784 0.0520068 When n₁ < n₁₀, n_(1m) = 0.0555054 0.0476453 0.0599609 0.0759399 0.0098120 When k₁ ≧ k₁₀, k_(1m) = 0.0541125 0.0561304 0.0804553 0.1002258 0.0237036 When k₁ < k₁₀, k_(1m) = 0.0773486 0.0843945 0.1004919 0.1010320 0.0377808 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.211 6.923 6.482 7.316 8.566 When d₁ < d₁₀, d_(1m) (nm) = 3.920 3.580 3.648 4.569 1.552 When n₂ ≧ n₂₀, n_(2m) = 0.1375024 0.1133521 0.1126624 0.1051160 0.0578821 When n₂ < n₂₀, n_(2m) = 0.1468335 0.1457764 0.1432654 0.1327966 0.1020337 When k₂ ≧ k₂₀, k_(2m) = 0.1698267 0.1546228 0.0978870 0.0916199 0.0398865 When k₂ < k₂₀, k_(2m) = 0.1355151 0.0979541 0.0869165 0.0797766 0.0850256 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.302 ∞ ∞ ∞ 0.186 When d₂ < d₂₀, d_(2m) (nm) = 0.308 25.359 77.278 123.573 0.315 1.1 < NA ≦ 1.2 15 < T ≦ 25 Case 2-06 2-07 2-08 2-09 2-10 n₁₀ 1.7189014 1.7208712 1.7236639 1.7047019 1.7084293 k₁₀ 0.0782837 0.0678223 0.0843652 0.0670962 0.0597123 d₁₀ (nm) 95.289 94.558 181.922 165.192 163.108 n₂₀ 1.6643388 1.6960341 5.6387216 1.6715149 1.7074208 k₂₀ 0.2165956 0.1841027 4.7363270 0.1999125 0.1697699 d₂₀ (nm) 204.139 257.386 0.821 198.564 251.199 When n₁ ≧ n₁₀, n_(1m) = 0.0400110 0.0468091 0.0526855 0.0398865 0.0490320 When n₁ < n₁₀, n_(1m) = 0.0126721 0.0238684 0.0001306 0.0279565 0.0460034 When k₁ ≧ k₁₀, k_(1m) = 0.0335376 0.0489734 0.0020081 0.0268384 0.0389331 When k₁ < k₁₀, k_(1m) = 0.0373218 0.0446973 0.0057251 0.0295178 0.0306982 When d₁ ≧ d₁₀, d_(1m) (nm) = 16.137 28.984 27.528 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 3.682 7.422 0.042 13.795 27.544 When n₂ ≧ n₂₀, n_(2m) = 0.0331177 0.0610901 0.0075977 0.0397839 0.0734460 When n₂ < n₂₀, n_(2m) = 0.0802783 0.0961804 0.6135461 0.0646704 0.0518091 When k₂ ≧ k₂₀, k_(2m) = 0.0326062 0.0485974 0.0047754 0.0159570 0.0275537 When k₂ < k₂₀, k_(2m) = 0.0528589 0.0519092 0.7998767 0.0474854 0.0482410 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 0.001 11.667 ∞ When d₂ < d₂₀, d_(2m) (nm) = 20.507 30.742 0.141 16.953 13.761

1.1 < NA ≦ 1.2 15 < T ≦ 25 4/27 Case 2-11 2-12 2-13 2-14 2-15 n₁₀ 1.6912240 1.6881032 1.6896993 1.6917374 1.6948846 k₁₀ 0.0750717 0.0788193 0.0752193 0.0692921 0.0562662 d₁₀ (nm) 235.933 218.423 211.247 207.206 219.172 n₂₀ 5.6089359 1.7881557 1.7110684 1.6970724 1.6877325 k₂₀ 4.1789938 0.3823123 0.2595743 0.2053429 0.1673191 d₂₀ (nm) 0.921 76.059 147.061 213.576 255.276 When n₁ ≧ n₁₀, n_(1m) = 0.0197583 0.0081677 0.0235974 0.0421069 0.0510120 When n₁ < n₁₀, n_(1m) = 0.0774451 0.0583032 0.0505896 0.0462817 0.0590515 When k₁ ≧ k₁₀, k_(1m) = 0.0246448 0.0223682 0.0406641 0.0495398 0.0510083 When k₁ < k₁₀, k_(1m) = 0.0218396 0.0175671 0.0286658 0.0376331 0.0343799 When d₁ ≧ d₁₀, d_(1m) (nm) = 6.504 3.634 18.131 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 42.587 22.206 26.432 29.901 81.491 When n₂ ≧ n₂₀, n_(2m) = 0.6544434 0.1247424 0.1252808 0.1545593 0.2162573 When n₂ < n₂₀, n_(2m) = 0.2325012 0.0171619 0.0503735 0.1749207 0.1048962 When k₂ ≧ k₂₀, k_(2m) = 0.1484387 0.0366235 0.0860120 0.1212268 0.1092822 When k₂ < k₂₀, k_(2m) = 0.6595715 0.1036670 0.0844458 0.0781323 0.0604700 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.071 14.060 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 0.195 1.711 9.636 69.774 76.197 1.1 < NA ≦ 1.2 15 < T ≦ 25 Case 2-16 2-17 n₁₀ 1.7002883 1.6987256 k₁₀ 0.0618224 0.0572006 d₁₀ (nm) 266.113 264.952 n₂₀ 1.7025341 1.6934905 k₂₀ 0.2096252 0.1744162 d₂₀ (nm) 206.193 266.771 When n₁ ≧ n₁₀, n_(1m) = 0.0602454 0.0764587 When n₁ < n₁₀, n_(1m) = 0.0381921 0.0594568 When k₁ ≧ k₁₀, k_(1m) = 0.0482422 0.0536096 When k₁ < k₁₀, k_(1m) = 0.0371497 0.0384741 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 92.805 173.726 When n₂ ≧ n₂₀, n_(2m) = 0.2779004 0.2751611 When n₂ < n₂₀, n_(2m) = 0.2377234 0.2053577 When k₂ ≧ k₂₀, k_(2m) = 0.2066309 0.2211816 When k₂ < k₂₀, k_(2m) = 0.0931018 0.0797998 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 73.805 125.295

1.1 < NA ≦ 1.2 25 < T ≦ 35 5/27 Case 3-01 3-02 3-03 3-04 3-05 n₁₀ 1.8384852 1.8997218 1.8867733 1.8774399 1.8168537 k₁₀ 0.2367471 0.1227276 0.1201944 0.1030917 0.1206742 d₁₀ (nm) 38.632 21.226 14.426 12.555 98.976 n₂₀ 4.7928214 1.8945709 1.7066853 1.6978346 5.6725781 k₂₀ 0.7766058 0.4412749 0.3085187 0.2515853 0.5943855 d₂₀ (nm) 20.034 121.762 200.277 259.495 16.950 When n₁ ≧ n₁₀, n_(1m) = 0.0640527 0.0719128 0.0931812 0.1089819 0.0387244 When n₁ < n₁₀, n_(1m) = 0.0455762 0.0458093 0.0565320 0.0737622 0.0048828 When k₁ ≧ k₁₀, k_(1m) = 0.0510876 0.0524744 0.0764050 0.0973877 0.0168860 When k₁ < k₁₀, k_(1m) = 0.0717981 0.0817957 0.0981750 0.1030917 0.0269836 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.733 6.228 6.172 6.944 6.776 When d₁ < d₁₀, d_(1m) (nm) = 3.444 3.186 3.418 4.320 0.695 When n₂ ≧ n₂₀, n_(2m) = 0.1712317 0.1175342 0.1094324 0.1025208 0.0610400 When n₂ < n₂₀, n_(2m) = 0.1852917 0.1447205 0.1408899 0.1358679 0.1030127 When k₂ ≧ k₂₀, k_(2m) = 0.2079944 0.1727771 0.0971545 0.0913745 0.0239368 When k₂ < k₂₀, k_(2m) = 0.1709546 0.1005322 0.0873328 0.0807227 0.0995679 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.789 ∞ ∞ ∞ 0.191 When d₂ < d₂₀, d_(2m) (nm) = 0.773 21.526 73.345 89.127 0.308 1.1 < NA ≦ 1.2 25 < T ≦ 35 Case 3-06 3-07 3-08 3-09 3-10 n₁₀ 1.7203847 1.7222308 1.7051744 1.7089344 1.6891179 k₁₀ 0.0818178 0.0703272 0.0699535 0.0618729 0.0788518 d₁₀ (nm) 95.097 94.450 164.924 162.999 211.328 n₂₀ 1.6625491 1.6972414 1.6707295 1.7091982 1.7121044 k₂₀ 0.2295920 0.1929579 0.2115581 0.1777196 0.2799946 d₂₀ (nm) 195.706 248.789 190.095 242.642 139.125 When n₁ ≧ n₁₀, n_(1m) = 0.0370166 0.0449036 0.0362634 0.0468103 0.0189148 When n₁ < n₁₀, n_(1m) = 0.0096326 0.0211206 0.0148706 0.0438916 0.0495532 When k₁ ≧ k₁₀, k_(1m) = 0.0279895 0.0455884 0.0190686 0.0333899 0.0327563 When k₁ < k₁₀, k_(1m) = 0.0346558 0.0433374 0.0247266 0.0269507 0.0238696 When d₁ ≧ d₁₀, d_(1m) (nm) = 14.187 22.312 ∞ ∞ 9.561 When d₁ < d₁₀, d_(1m) (nm) = 2.673 6.291 5.065 24.312 23.646 When n₂ ≧ n₂₀, n_(2m) = 0.0267200 0.0590454 0.0307410 0.0721521 0.1253455 When n₂ < n₂₀, n_(2m) = 0.0766724 0.0932019 0.0523315 0.0386328 0.0336450 When k₂ ≧ k₂₀, k_(2m) = 0.0255017 0.0445288 0.0095300 0.0215259 0.0725635 When k₂ < k₂₀, k_(2m) = 0.0521814 0.0521948 0.0465356 0.0485632 0.0779358 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 7.007 43.167 ∞ When d₂ < d₂₀, d_(2m) (nm) = 18.077 28.239 14.543 10.181 6.908

1.1 < NA ≦ 1.2 25 < T ≦ 35 6/27 Case 3-11 3-12 3-13 3-14 n₁₀ 1.6914863 1.6947006 1.7002933 1.6987290 k₁₀ 0.0717884 0.0580661 0.0640004 0.0588877 d₁₀ (nm) 207.154 219.137 266.055 264.992 n₂₀ 1.6970451 1.6875442 1.7022941 1.6933668 k₂₀ 0.2167627 0.1751428 0.2216801 0.1822428 d₂₀ (nm) 205.768 246.865 198.139 258.415 When n₁ ≧ n₁₀, n_(1m) = 0.0385889 0.0449475 0.0561011 0.0760583 When n₁ < n₁₀, n_(1m) = 0.0454712 0.0531458 0.0356934 0.0583093 When k₁ ≧ k₁₀, k_(1m) = 0.0478943 0.0493811 0.0460974 0.0520996 When k₁ < k₁₀, k_(1m) = 0.0361658 0.0330811 0.0363293 0.0375061 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 28.219 77.448 91.180 121.680 When n₂ ≧ n₂₀, n_(2m) = 0.1522107 0.2230298 0.2904858 0.2858545 When n₂ < n₂₀, n_(2m) = 0.1781921 0.1009351 0.2457825 0.2068896 When k₂ ≧ k₂₀, k_(2m) = 0.1157642 0.1063892 0.2056812 0.2216101 When k₂ < k₂₀, k_(2m) = 0.0805957 0.0617065 0.0977039 0.0829004 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 66.127 48.464 70.211 121.644 1.1 < NA ≦ 1.2 35 < T ≦ 45 Case 4-01 4-02 4-03 4-04 4-05 n₁₀ 1.8909619 1.9211597 1.8908364 1.8788634 1.7209142 k₁₀ 0.2198688 0.1299283 0.1293290 0.1089981 0.0850231 d₁₀ (nm) 30.886 20.325 14.409 12.666 94.685 n₂₀ 2.4457650 1.8999891 1.6971949 1.6934061 1.6569532 k₂₀ 0.9042920 0.4762728 0.3219355 0.2597468 0.2398462 d₂₀ (nm) 40.480 114.977 192.850 251.595 187.582 When n₁ ≧ n₁₀, n_(1m) = 0.0581348 0.0702795 0.0908240 0.1067529 0.0340771 When n₁ < n₁₀, n_(1m) = 0.0408777 0.0430811 0.0541882 0.0719214 0.0077319 When k₁ ≧ k₁₀, k_(1m) = 0.0449243 0.0499243 0.0741248 0.0961597 0.0239465 When k₁ < k₁₀, k_(1m) = 0.0797229 0.0798120 0.0963696 0.1066907 0.0329150 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.322 5.448 5.786 6.719 11.856 When d₁ < d₁₀, d_(1m) (nm) = 2.642 2.634 3.166 4.161 2.071 When n₂ ≧ n₂₀, n_(2m) = 0.1853430 0.1162805 0.1041772 0.0995618 0.0224622 When n₂ < n₂₀, n_(2m) = 0.1757385 0.1461218 0.1390881 0.1365247 0.0731372 When k₂ ≧ k₂₀, k_(2m) = 0.2033411 0.1671118 0.0936316 0.0897620 0.0193579 When k₂ < k₂₀, k_(2m) = 0.1615027 0.0988000 0.0865493 0.0806287 0.0502966 When d₂ ≧ d₂₀, d_(2m) (nm) = 5.473 ∞ ∞ ∞ 13.590 When d₂ < d₂₀, d_(2m) (nm) = 4.339 20.871 70.442 87.096 16.661

1.1 < NA ≦ 1.2 35 < T ≦ 45 7/27 Case 4-06 4-07 4-08 4-09 4-10 n₁₀ 1.7236493 1.7053690 1.7096103 1.6884398 1.6913141 k₁₀ 0.0725136 0.0723352 0.0638708 0.0822671 0.0737244 d₁₀ (nm) 94.253 164.385 162.799 210.788 206.649 n₂₀ 1.6994520 1.6690598 1.7121782 1.7077650 1.6954335 k₂₀ 0.2004026 0.2212238 0.1844639 0.2979850 0.2262249 d₂₀ (nm) 239.752 181.544 233.616 132.459 199.430 When n₁ ≧ n₁₀, n_(1m) = 0.0432617 0.0328076 0.0449390 0.0103259 0.0357813 When n₁ < n₁₀, n_(1m) = 0.0189111 0.0081836 0.0418201 0.0476318 0.0441882 When k₁ ≧ k₁₀, k_(1m) = 0.0428613 0.0134167 0.0270105 0.0240100 0.0467419 When k₁ < k₁₀, k_(1m) = 0.0419373 0.0221985 0.0217126 0.0186353 0.0353625 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.395 21.834 ∞ 7.013 ∞ When d₁ < d₁₀, d_(1m) (nm) = 5.406 2.666 6.246 21.283 26.527 When n₂ ≧ n₂₀, n_(2m) = 0.0587073 0.0279724 0.0684412 0.1217639 0.1437500 When n₂ < n₂₀, n_(2m) = 0.0913135 0.0359949 0.0242969 0.0190967 0.1057874 When k₂ ≧ k₂₀, k_(2m) = 0.0407703 0.0058350 0.0150317 0.0602039 0.1122632 When k₂ < k₂₀, k_(2m) = 0.0523291 0.0449670 0.0490210 0.0601965 0.0826379 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 4.683 36.767 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 25.916 13.275 6.151 3.566 25.291 1.1 < NA ≦ 1.2 35 < T ≦ 45 Case 4-11 4-12 4-13 n₁₀ 1.6945163 1.7002615 1.6987767 k₁₀ 0.0596605 0.0658973 0.0602453 d₁₀ (nm) 219.093 265.562 264.538 n₂₀ 1.6879518 1.6991117 1.6924357 k₂₀ 0.1823501 0.2320843 0.1888152 d₂₀ (nm) 237.943 190.875 250.808 When n₁ ≧ n₁₀, n_(1m) = 0.0400159 0.0514929 0.0760449 When n₁ < n₁₀, n_(1m) = 0.0454590 0.0339758 0.0578162 When k₁ ≧ k₁₀, k_(1m) = 0.0478894 0.0439832 0.0508728 When k₁ < k₁₀, k_(1m) = 0.0318921 0.0347144 0.0365662 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 53.950 89.870 117.603 When n₂ ≧ n₂₀, n_(2m) = 0.2316992 0.3028357 0.2948633 When n₂ < n₂₀, n_(2m) = 0.0956519 0.2532336 0.2085193 When k₂ ≧ k₂₀, k_(2m) = 0.1045911 0.2056006 0.2209802 When k₂ < k₂₀, k_(2m) = 0.0612427 0.1002246 0.0860327 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 40.957 67.613 80.377

1.1 < NA ≦ 1.2 45 < T ≦ 55 8/27 Case 5-01 5-02 5-03 5-04 5-05 n₁₀ 1.9413239 1.8877645 1.8798429 1.7202563 1.7249517 k₁₀ 0.1405566 0.1445306 0.1135692 0.0870823 0.0739360 d₁₀ (nm) 18.043 14.095 12.637 94.214 94.041 n₂₀ 1.8442891 1.6688638 1.6888514 1.6489031 1.7027050 k₂₀ 0.4845639 0.3235014 0.2638544 0.2445724 0.2047377 d₂₀ (nm) 113.109 187.292 243.053 179.182 229.905 When n₁ ≧ n₁₀, n_(1m) = 0.0724768 0.0904346 0.1062329 0.0324084 0.0425623 When n₁ < n₁₀, n_(1m) = 0.0387427 0.0534119 0.0716968 0.0082080 0.0177209 When k₁ ≧ k₁₀, k_(1m) = 0.0483630 0.0753357 0.0968298 0.0243140 0.0418030 When k₁ < k₁₀, k_(1m) = 0.0803040 0.0945715 0.1060376 0.0343469 0.0406653 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.823 5.486 6.573 10.670 17.560 When d₁ < d₁₀, d_(1m) (nm) = 2.042 3.025 4.077 2.161 4.892 When n₂ ≧ n₂₀, n_(2m) = 0.1074292 0.0972339 0.0967822 0.0242322 0.0621313 When n₂ < n₂₀, n_(2m) = 0.1555688 0.1383643 0.1358411 0.0727905 0.0930249 When k₂ ≧ k₂₀, k_(2m) = 0.1308459 0.0862097 0.0881348 0.0180859 0.0388489 When k₂ < k₂₀, k_(2m) = 0.0911877 0.0843787 0.0806641 0.0488940 0.0530957 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 10.287 ∞ When d₂ < d₂₀, d_(2m) (nm) = 20.712 69.838 88.098 16.560 20.064 1.1 < NA ≦ 1.2 45 < T ≦ 55 Case 5-06 5-07 5-08 5-09 5-10 n₁₀ 1.7053831 1.7104785 1.6877471 1.6915115 1.6941672 k₁₀ 0.0736370 0.0654156 0.0844092 0.0739491 0.0608347 d₁₀ (nm) 163.843 162.671 209.661 205.513 218.889 n₂₀ 1.6671854 1.7160090 1.6959640 1.6904122 1.6879018 k₂₀ 0.2267475 0.1885946 0.3073448 0.2298496 0.1872431 d₂₀ (nm) 172.382 223.774 127.018 196.556 228.501 When n₁ ≧ n₁₀, n_(1m) = 0.0309619 0.0440515 0.0051978 0.0335425 0.0357227 When n₁ < n₁₀, n_(1m) = 0.0112268 0.0078247 0.0453333 0.0430493 0.0410388 When k₁ ≧ k₁₀, k_(1m) = 0.0149072 0.0196375 0.0173291 0.0473206 0.0467871 When k₁ < k₁₀, k_(1m) = 0.0262830 0.0141846 0.0154602 0.0372058 0.0305029 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.247 ∞ 2.276 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 3.447 2.046 19.587 24.997 50.391 When n₂ ≧ n₂₀, n_(2m) = 0.0348413 0.0672729 0.1107800 0.1391333 0.2394653 When n₂ < n₂₀, n_(2m) = 0.0292676 0.0106921 0.0107263 0.0732312 0.0890649 When k₂ ≧ k₂₀, k_(2m) = 0.0073389 0.0081616 0.0597644 0.1152246 0.1047815 When k₂ < k₂₀, k_(2m) = 0.0445459 0.0504346 0.0379138 0.0797473 0.0602527 When d₂ ≧ d₂₀, d_(2m) (nm) = 6.326 35.781 32.689 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 11.802 2.505 1.901 20.558 36.515

1.1 < NA ≦ 1.2 45 < T ≦ 55 9/27 Case 5-11 5-12 5-13 n₁₀ 1.6941096 1.7000691 1.6987341 k₁₀ 0.0560046 0.0669711 0.0608862 d₁₀ (nm) 215.482 264.757 263.855 n₂₀ 1.6938988 1.6924460 1.6911373 k₂₀ 0.1599964 0.2378630 0.1924284 d₂₀ (nm) 287.470 184.028 243.250 When n₁ ≧ n₁₀, n_(1m) = 0.0468335 0.0484424 0.0766663 When n₁ < n₁₀, n_(1m) = 0.0625427 0.0333350 0.0582520 When k₁ ≧ k₁₀, k_(1m) = 0.0574133 0.0424146 0.0503235 When k₁ < k₁₀, k_(1m) = 0.0373425 0.0336023 0.0357239 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 47.031 45.336 115.043 When n₂ ≧ n₂₀, n_(2m) = 0.2184277 0.3156848 0.3032751 When n₂ < n₂₀, n_(2m) = 0.1528296 0.2586377 0.2107019 When k₂ ≧ k₂₀, k_(2m) = 0.1238171 0.2073083 0.2191870 When k₂ < k₂₀, k_(2m) = 0.0588196 0.0981323 0.0862329 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 85.352 66.135 78.131 1.1 < NA ≦ 1.2 55 < T ≦ 65 Case 6-01 6-02 6-03 6-04 6-05 n₁₀ 1.8998120 1.9599431 1.8792360 1.8920036 1.7198405 k₁₀ 0.2622743 0.1538418 0.1119058 0.0671877 0.0878543 d₁₀ (nm) 21.573 15.993 12.895 11.926 93.971 n₂₀ 1.6944131 1.7907917 1.6940206 1.7462722 1.6452515 k₂₀ 0.7809017 0.4780154 0.2681658 0.2347435 0.2473168 d₂₀ (nm) 53.320 111.028 231.714 280.522 169.419 When n₁ ≧ n₁₀, n_(1m) = 0.0603137 0.0799158 0.1051331 0.1164221 0.0325574 When n₁ < n₁₀, n_(1m) = 0.0246228 0.0339001 0.0713818 0.0790796 0.0109656 When k₁ ≧ k₁₀, k_(1m) = 0.0436731 0.0463733 0.0957117 0.1011499 0.0282458 When k₁ < k₁₀, k_(1m) = 0.0527222 0.0842969 0.1045093 0.0671877 0.0383301 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.630 4.315 6.630 7.111 10.486 When d₁ < d₁₀, d_(1m) (nm) = 1.338 1.548 4.149 4.416 2.879 When n₂ ≧ n₂₀, n_(2m) = 0.1220337 0.0996899 0.0944202 0.0992114 0.0312585 When n₂ < n₂₀, n_(2m) = 0.0963342 0.1728088 0.1384424 0.1517053 0.0751245 When k₂ ≧ k₂₀, k_(2m) = 0.0896167 0.0986731 0.0889478 0.0981226 0.0215662 When k₂ < k₂₀, k_(2m) = 0.0868945 0.0892566 0.0826782 0.0802551 0.0503503 When d₂ ≧ d₂₀, d_(2m) (nm) = 14.581 ∞ ∞ ∞ 10.833 When d₂ < d₂₀, d_(2m) (nm) = 7.202 14.530 88.193 126.095 17.275

1.1 < NA ≦ 1.2 55 < T ≦ 65 10/27 Case 6-06 6-07 6-08 6-09 6-10 n₁₀ 1.7267515 1.7286377 1.7058235 1.6871196 1.6936372 k₁₀ 0.0746914 0.0697592 0.0740364 0.0856014 0.0616799 d₁₀ (nm) 93.982 94.711 163.674 208.540 218.466 n₂₀ 1.7088385 1.7257237 1.6690540 1.6832134 1.6877720 k₂₀ 0.2076415 0.1796886 0.2306007 0.3092532 0.1900717 d₂₀ (nm) 218.911 273.487 161.946 121.170 218.772 When n₁ ≧ n₁₀, n_(1m) = 0.0431396 0.0483069 0.0312061 0.0049573 0.0327710 When n₁ < n₁₀, n_(1m) = 0.0172424 0.0116125 0.0175793 0.0417786 0.0401648 When k₁ ≧ k₁₀, k_(1m) = 0.0418896 0.0318958 0.0202844 0.0152393 0.0462805 When k₁ < k₁₀, k_(1m) = 0.0396252 0.0362695 0.0328467 0.0174036 0.0298352 When d₁ ≧ d₁₀, d_(1m) (nm) = 17.247 40.127 17.394 2.172 ∞ When d₁ < d₁₀, d_(1m) (nm) = 4.621 3.300 5.870 18.309 47.643 When n₂ ≧ n₂₀, n_(2m) = 0.0684570 0.0868091 0.0312744 0.1009155 0.2431030 When n₂ < n₂₀, n_(2m) = 0.0962207 0.1095422 0.0318677 0.0098169 0.0838513 When k₂ ≧ k₂₀, k_(2m) = 0.0394080 0.0515259 0.0123767 0.0719922 0.1060815 When k₂ < k₂₀, k_(2m) = 0.0553357 0.0549243 0.0471436 0.0304236 0.0607056 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 9.995 25.676 ∞ When d₂ < d₂₀, d_(2m) (nm) = 15.791 73.815 10.017 1.682 28.435 1.1 < NA ≦ 1.2 55 < T ≦ 65 Case 6-11 6-12 n₁₀ 1.6996002 1.6985143 k₁₀ 0.0674630 0.0611760 d₁₀ (nm) 264.231 263.586 n₂₀ 1.6851097 1.6903246 k₂₀ 0.2396601 0.1936289 d₂₀ (nm) 175.944 234.054 When n₁ ≧ n₁₀, n_(1m) = 0.0469604 0.0772302 When n₁ < n₁₀, n_(1m) = 0.0345850 0.0600415 When k₁ ≧ k₁₀, k_(1m) = 0.0413989 0.0503625 When k₁ < k₁₀, k_(1m) = 0.0326746 0.0352795 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 35.789 113.370 When n₂ ≧ n₂₀, n_(2m) = 0.3361853 0.3175012 When n₂ < n₂₀, n_(2m) = 0.2595898 0.2115027 When k₂ ≧ k₂₀, k_(2m) = 0.2087170 0.2189661 When k₂ < k₂₀, k_(2m) = 0.0954248 0.0859949 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 64.780 74.733

1.1 < NA ≦ 1.2 65 < T ≦ 75 11/27 Case 7-01 7-02 7-03 7-04 7-05 n₁₀ 1.8814830 1.9657443 1.8787154 1.8913468 1.7209187 k₁₀ 0.2936564 0.1688741 0.1109169 0.0695388 0.0883668 d₁₀ (nm) 22.098 15.852 13.263 12.162 94.055 n₂₀ 1.6321609 1.7726563 1.6996278 1.7469121 1.6482914 k₂₀ 0.8097385 0.4923001 0.2745566 0.2387131 0.2540527 d₂₀ (nm) 46.190 103.170 220.404 270.807 158.511 When n₁ ≧ n₁₀, n_(1m) = 0.0656360 0.0817346 0.1037085 0.1149512 0.0333252 When n₁ < n₁₀, n_(1m) = 0.0241089 0.0282544 0.0702112 0.0769897 0.0127490 When k₁ ≧ k₁₀, k_(1m) = 0.0378577 0.0400220 0.0934888 0.0991272 0.0301257 When k₁ < k₁₀, k_(1m) = 0.0323035 0.0824512 0.1025916 0.0695388 0.0388867 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.610 3.980 6.711 7.159 10.691 When d₁ < d₁₀, d_(1m) (nm) = 1.297 1.237 4.191 4.366 3.330 When n₂ ≧ n₂₀, n_(2m) = 0.1024585 0.0947095 0.0935791 0.1004138 0.0355066 When n₂ < n₂₀, n_(2m) = 0.0645630 0.1828857 0.1422339 0.1540833 0.0767798 When k₂ ≧ k₂₀, k_(2m) = 0.0898303 0.0894482 0.0904114 0.0989551 0.0244946 When k₂ < k₂₀, k_(2m) = 0.1003796 0.0949036 0.0851941 0.0816284 0.0535193 When d₂ ≧ d₂₀, d_(2m) (nm) = 11.613 ∞ ∞ ∞ 11.010 When d₂ < d₂₀, d_(2m) (nm) = 4.416 10.112 84.053 124.915 16.505 1.1 < NA ≦ 1.2 65 < T ≦ 75 Case 7-06 7-07 7-08 7-09 7-10 n₁₀ 1.7288665 1.7286370 1.7068032 1.6862856 1.6931399 k₁₀ 0.0756184 0.0709992 0.0744994 0.0878163 0.0624918 d₁₀ (nm) 94.090 94.923 163.814 208.124 217.968 n₂₀ 1.7153723 1.7241262 1.6739446 1.6736237 1.6872372 k₂₀ 0.2125971 0.1831189 0.2371534 0.3138657 0.1926334 d₂₀ (nm) 207.924 263.961 151.052 112.320 209.546 When n₁ ≧ n₁₀, n_(1m) = 0.0437573 0.0483350 0.0322754 0.0025049 0.0316833 When n₁ < n₁₀, n_(1m) = 0.0164966 0.0099878 0.0175537 0.0409570 0.0419177 When k₁ ≧ k₁₀, k_(1m) = 0.0410425 0.0291785 0.0221094 0.0095605 0.0459827 When k₁ < k₁₀, k_(1m) = 0.0388428 0.0344531 0.0333215 0.0151172 0.0300720 When d₁ ≧ d₁₀, d_(1m) (nm) = 17.329 38.775 18.851 1.009 ∞ When d₁ < d₁₀, d_(1m) (nm) = 4.318 2.813 6.154 17.032 45.887 When n₂ ≧ n₂₀, n_(2m) = 0.0710437 0.0893457 0.0302136 0.1037878 0.2406421 When n₂ < n₂₀, n_(2m) = 0.0969080 0.1083484 0.0331750 0.0056763 0.0830054 When k₂ ≧ k₂₀, k_(2m) = 0.0400586 0.0500842 0.0147241 0.0658289 0.1059290 When k₂ < k₂₀, k_(2m) = 0.0574512 0.0562378 0.0506323 0.0175342 0.0630762 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 10.293 26.205 ∞ When d₂ < d₂₀, d_(2m) (nm) = 13.701 72.849 8.984 0.992 28.220

1.1 < NA ≦ 1.2 65 < T ≦ 75 12/27 Case 7-11 7-12 7-13 n₁₀ 1.6935780 1.6987845 1.6982075 k₁₀ 0.0575917 0.0682876 0.0620058 d₁₀ (nm) 214.501 264.829 264.409 n₂₀ 1.6927449 1.6826884 1.6907687 k₂₀ 0.1631490 0.2430960 0.1959423 d₂₀ (nm) 269.036 164.540 222.065 When n₁ ≧ n₁₀, n_(1m) = 0.0479456 0.0478223 0.0756042 When n₁ < n₁₀, n_(1m) = 0.0597888 0.0375256 0.0523840 When k₁ ≧ k₁₀, k_(1m) = 0.0567029 0.0406042 0.0502747 When k₁ < k₁₀, k_(1m) = 0.0379382 0.0306238 0.0354358 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 42.775 36.115 105.289 When n₂ ≧ n₂₀, n_(2m) = 0.2180396 0.3702002 0.3412915 When n₂ < n₂₀, n_(2m) = 0.1575122 0.2565369 0.2093115 When k₂ ≧ k₂₀, k_(2m) = 0.1278589 0.2070850 0.2215063 When k₂ < k₂₀, k_(2m) = 0.0614197 0.0951270 0.0864294 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 81.766 63.144 76.945 1.1 < NA ≦ 1.2 75 < T ≦ 85 Case 8-01 8-02 8-03 8-04 8-05 n₁₀ 1.8508920 1.9432602 1.8788012 1.8809660 1.8914032 k₁₀ 0.3299462 0.1828608 0.1571474 0.1122948 0.0691945 d₁₀ (nm) 26.713 18.534 15.200 13.670 12.762 n₂₀ 1.6561984 1.7922587 1.6553949 1.7045069 1.7559855 k₂₀ 1.0215947 0.5435792 0.3498651 0.2862016 0.2487147 d₂₀ (nm) 31.481 89.452 157.519 210.391 259.753 When n₁ ≧ n₁₀, n_(1m) = 0.0584900 0.0721143 0.0859290 0.1006885 0.1098987 When n₁ < n₁₀, n_(1m) = 0.0118384 0.0258594 0.0490076 0.0672168 0.0736646 When k₁ ≧ k₁₀, k_(1m) = 0.0281628 0.0341772 0.0681653 0.0888281 0.0935315 When k₁ < k₁₀, k_(1m) = 0.0027112 0.0735254 0.0892920 0.1016174 0.0691945 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.227 4.317 5.436 6.605 7.111 When d₁ < d₁₀, d_(1m) (nm) = 0.304 1.291 2.967 4.063 4.341 When n₂ ≧ n₂₀, n_(2m) = 0.1267358 0.0961279 0.0835156 0.0933350 0.1000793 When n₂ < n₂₀, n_(2m) = 0.0093018 0.1747852 0.1389221 0.1466003 0.1520386 When k₂ ≧ k₂₀, k_(2m) = 0.0170300 0.1198535 0.0846472 0.0918018 0.1012305 When k₂ < k₂₀, k_(2m) = 0.1219019 0.1040369 0.0912122 0.0867468 0.0829492 When d₂ ≧ d₂₀, d_(2m) (nm) = 8.195 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 0.369 9.559 36.990 78.480 119.640

1.1 < NA ≦ 1.2 75 < T ≦ 85 13/27 Case 8-06 8-07 8-08 8-09 8-10 n₁₀ 1.7233184 1.7297992 1.7292921 1.7076375 1.6902915 k₁₀ 0.0905387 0.0774990 0.0722395 0.0765186 0.0790058 d₁₀ (nm) 94.254 94.232 94.957 163.992 206.654 n₂₀ 1.6520214 1.7157415 1.7247476 1.6752795 1.6879680 k₂₀ 0.2670378 0.2209454 0.1892941 0.2482558 0.2475793 d₂₀ (nm) 148.504 198.899 254.857 141.650 161.284 When n₁ ≧ n₁₀, n_(1m) = 0.0327246 0.0427734 0.0473462 0.0318115 0.0212964 When n₁ < n₁₀, n_(1m) = 0.0093958 0.0147302 0.0094299 0.0087695 0.0407813 When k₁ ≧ k₁₀, k_(1m) = 0.0245129 0.0376636 0.0278931 0.0137170 0.0408545 When k₁ < k₁₀, k_(1m) = 0.0384680 0.0381934 0.0341284 0.0285461 0.0259851 When d₁ ≧ d₁₀, d_(1m) (nm) = 10.366 16.607 38.446 19.131 18.064 When d₁ < d₁₀, d_(1m) (nm) = 2.389 3.804 2.614 2.661 24.299 When n₂ ≧ n₂₀, n_(2m) = 0.0285376 0.0673352 0.0815320 0.0313904 0.1426208 When n₂ < n₂₀, n_(2m) = 0.0743250 0.0929968 0.1051160 0.0237683 0.0535938 When k₂ ≧ k₂₀, k_(2m) = 0.0198962 0.0371387 0.0465576 0.0076379 0.0976270 When k₂ < k₂₀, k_(2m) = 0.0547290 0.0576892 0.0565930 0.0508740 0.0749768 When d₂ ≧ d₂₀, d_(2m) (nm) = 8.585 ∞ ∞ 6.981 ∞ When d₂ < d₂₀, d_(2m) (nm) = 13.959 13.822 33.284 7.469 13.904 1.1 < NA ≦ 1.2 75 < T ≦ 85 Case 8-11 8-12 8-13 8-14 8-15 n₁₀ 1.6929156 1.6935338 1.6984313 1.6980068 1.6970347 k₁₀ 0.0637318 0.0581307 0.0697413 0.0633264 0.0530849 d₁₀ (nm) 217.693 214.870 266.256 265.782 275.682 n₂₀ 1.6856131 1.6920922 1.6871666 1.6912942 1.6884244 k₂₀ 0.1973081 0.1667488 0.2538157 0.2022310 0.1714348 d₂₀ (nm) 201.188 259.776 152.235 210.360 256.304 When n₁ ≧ n₁₀, n_(1m) = 0.0321716 0.0471802 0.0486719 0.0738318 0.0569543 When n₁ < n₁₀, n_(1m) = 0.0414331 0.0603931 0.0363989 0.0470300 0.0427893 When k₁ ≧ k₁₀, k_(1m) = 0.0451428 0.0559961 0.0398804 0.0494763 0.0598206 When k₁ < k₁₀, k_(1m) = 0.0289417 0.0378210 0.0291638 0.0345105 0.0376172 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 45.410 42.667 37.515 100.900 104.445 When n₂ ≧ n₂₀, n_(2m) = 0.2377576 0.2179382 0.2594739 0.3590393 0.2768311 When n₂ < n₂₀, n_(2m) = 0.0859351 0.1565027 0.2556433 0.2089795 0.2197266 When k₂ ≧ k₂₀, k_(2m) = 0.1024292 0.1246008 0.1994592 0.2211169 0.1929004 When k₂ < k₂₀, k_(2m) = 0.0656946 0.0632471 0.1014087 0.0895886 0.0738538 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 33.167 82.155 62.366 73.160 83.598

1.1 < NA ≦ 1.2 85 < T ≦ 95 14/27 Case 9-01 9-02 9-03 9-04 9-05 n₁₀ 1.9192397 1.8910111 1.8874292 1.8928956 1.7266669 k₁₀ 0.1987767 0.1570861 0.1170062 0.0800147 0.0953661 d₁₀ (nm) 21.654 15.844 13.907 12.695 94.323 n₂₀ 1.8264016 1.6782576 1.7063011 1.7424852 1.6542284 k₂₀ 0.6189774 0.3828036 0.3024107 0.2571531 0.2869718 d₂₀ (nm) 76.882 146.288 201.867 254.323 139.595 When n₁ ≧ n₁₀, n_(1m) = 0.0649170 0.0821021 0.0973254 0.1089844 0.0299609 When n₁ < n₁₀, n_(1m) = 0.0262927 0.0442981 0.0631677 0.0721631 0.0018164 When k₁ ≧ k₁₀, k_(1m) = 0.0313647 0.0611023 0.0836865 0.0928955 0.0075598 When k₁ < k₁₀, k_(1m) = 0.0678699 0.0898816 0.1010254 0.0800147 0.0251917 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.482 5.181 6.239 6.859 9.178 When d₁ < d₁₀, d_(1m) (nm) = 1.480 2.625 3.732 4.138 0.436 When n₂ ≧ n₂₀, n_(2m) = 0.0987671 0.0845752 0.0932324 0.0997229 0.0068860 When n₂ < n₂₀, n_(2m) = 0.1650610 0.1381567 0.1431714 0.1501294 0.0677319 When k₂ ≧ k₂₀, k_(2m) = 0.1657446 0.0892700 0.0918542 0.0980688 0.0046692 When k₂ < k₂₀, k_(2m) = 0.1121045 0.0937854 0.0873950 0.0830798 0.0530042 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 2.101 When d₂ < d₂₀, d_(2m) (nm) = 12.789 29.518 73.873 87.951 11.267 1.1 < NA ≦ 1.2 85 < T ≦ 95 Case 9-06 9-07 9-08 9-09 9-10 n₁₀ 1.7296393 1.7299249 1.6899362 1.6928826 1.6935628 k₁₀ 0.0805906 0.0737621 0.0817785 0.0657282 0.0590519 d₁₀ (nm) 94.242 94.784 208.164 217.665 215.464 n₂₀ 1.7097783 1.7252153 1.6924320 1.6832004 1.6914497 k₂₀ 0.2319224 0.1970612 0.2651701 0.2055611 0.1728158 d₂₀ (nm) 191.543 246.491 148.618 193.166 250.826 When n₁ ≧ n₁₀, n_(1m) = 0.0403186 0.0454016 0.0167883 0.0332178 0.0456592 When n₁ < n₁₀, n_(1m) = 0.0112720 0.0089185 0.0424597 0.0374463 0.0611377 When k₁ ≧ k₁₀, k_(1m) = 0.0312561 0.0265295 0.0332300 0.0436560 0.0547620 When k₁ < k₁₀, k_(1m) = 0.0359937 0.0340186 0.0176221 0.0271997 0.0369495 When d₁ ≧ d₁₀, d_(1m) (nm) = 14.915 25.988 8.734 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 2.867 2.423 22.681 45.245 43.081 When n₂ ≧ n₂₀, n_(2m) = 0.0542737 0.0673303 0.1469031 0.2426758 0.2225391 When n₂ < n₂₀, n_(2m) = 0.0873267 0.0993994 0.0330542 0.0887622 0.1544177 When k₂ ≧ k₂₀, k_(2m) = 0.0292090 0.0400476 0.0700159 0.0962317 0.1187769 When k₂ < k₂₀, k_(2m) = 0.0563428 0.0561450 0.0687061 0.0675110 0.0629883 When d₂ ≧ d₂₀, d_(2m) (nm) = 39.648 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 14.552 29.955 9.727 29.747 77.934

1.1 < NA ≦ 1.2 85 < T ≦ 95 15/27 Case 9-11 9-12 9-13 n₁₀ 1.6988269 1.6981501 1.6968464 k₁₀ 0.0719884 0.0650380 0.0544760 d₁₀ (nm) 266.949 266.102 275.663 n₂₀ 1.6930572 1.6910453 1.6860880 k₂₀ 0.2717519 0.2123559 0.1778694 d₂₀ (nm) 142.233 201.439 248.323 When n₁ ≧ n₁₀, n_(1m) = 0.0467688 0.0728052 0.0574890 When n₁ < n₁₀, n_(1m) = 0.0315735 0.0440601 0.0431165 When k₁ ≧ k₁₀, k_(1m) = 0.0383911 0.0476294 0.0587781 When k₁ < k₁₀, k_(1m) = 0.0284839 0.0337549 0.0370691 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 35.571 98.568 104.018 When n₂ ≧ n₂₀, n_(2m) = 0.2475818 0.3536121 0.2819006 When n₂ < n₂₀, n_(2m) = 0.2616077 0.2147424 0.2120007 When k₂ ≧ k₂₀, k_(2m) = 0.1929529 0.2177991 0.1925061 When k₂ < k₂₀, k_(2m) = 0.1103821 0.0937061 0.0749585 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 61.377 69.390 80.535 1.1 < NA ≦ 1.2 95 < T ≦ 105 Case 10-01 10-02 10-03 10-04 10-05 n₁₀ 1.9207610 1.9093240 1.8948938 1.8966282 1.7293323 k₁₀ 0.2195112 0.1610220 0.1257399 0.0900141 0.0843251 d₁₀ (nm) 22.312 16.027 13.855 12.530 93.974 n₂₀ 1.8258536 1.6981498 1.7003095 1.7305926 1.7018671 k₂₀ 0.6986358 0.4189775 0.3177305 0.2658040 0.2432029 d₂₀ (nm) 66.737 136.163 194.613 248.346 184.391 When n₁ ≧ n₁₀, n_(1m) = 0.0601465 0.0788086 0.0949231 0.1082007 0.0364734 When n₁ < n₁₀, n_(1m) = 0.0227283 0.0400269 0.0595679 0.0706311 0.0069092 When k₁ ≧ k₁₀, k_(1m) = 0.0253723 0.0545032 0.0804407 0.0926099 0.0227478 When k₁ < k₁₀, k_(1m) = 0.0628345 0.0889185 0.1005603 0.0900141 0.0311768 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.994 4.715 5.765 6.514 12.891 When d₁ < d₁₀, d_(1m) (nm) = 1.248 2.209 3.348 3.879 1.711 When n₂ ≧ n₂₀, n_(2m) = 0.0792419 0.0821826 0.0922205 0.0989185 0.0380920 When n₂ < n₂₀, n_(2m) = 0.1602795 0.1375000 0.1411267 0.1492065 0.0806519 When k₂ ≧ k₂₀, k_(2m) = 0.1589185 0.0905359 0.0891418 0.0944934 0.0182117 When k₂ < k₂₀, k_(2m) = 0.1093127 0.0931641 0.0864453 0.0826196 0.0535706 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 26.631 When d₂ < d₂₀, d_(2m) (nm) = 11.170 27.297 70.361 86.529 13.056

1.1 < NA ≦ 1.2 95 < T ≦ 105 16/27 Case 10-06 10-07 10-08 10-09 10-10 n₁₀ 1.7301568 1.6896128 1.6928686 1.6935394 1.6995193 k₁₀ 0.0757850 0.0845530 0.0680057 0.0604311 0.0747728 d₁₀ (nm) 94.458 207.994 217.789 215.751 266.467 n₂₀ 1.7237225 1.6930315 1.6806392 1.6908086 1.6953349 k₂₀ 0.2045935 0.2839311 0.2160083 0.1799717 0.2921202 d₂₀ (nm) 238.500 141.193 184.741 242.024 134.479 When n₁ ≧ n₁₀, n_(1m) = 0.0430542 0.0132361 0.0331689 0.0442139 0.0436938 When n₁ < n₁₀, n_(1m) = 0.0073706 0.0419458 0.0316418 0.0535156 0.0268311 When k₁ ≧ k₁₀, k_(1m) = 0.0232617 0.0264368 0.0418604 0.0531323 0.0358801 When k₁ < k₁₀, k_(1m) = 0.0323706 0.0142944 0.0250220 0.0355676 0.0274768 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.826 5.860 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 1.955 19.840 44.604 42.829 18.631 When n₂ ≧ n₂₀, n_(2m) = 0.0534583 0.1398230 0.2538293 0.2308789 0.2386206 When n₂ < n₂₀, n_(2m) = 0.0961475 0.0183801 0.0879700 0.1305579 0.2731067 When k₂ ≧ k₂₀, k_(2m) = 0.0309888 0.0515918 0.0900964 0.1145776 0.1883105 When k₂ < k₂₀, k_(2m) = 0.0550842 0.0676599 0.0668372 0.0642163 0.1153723 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 28.701 3.697 28.484 75.626 22.552 1.1 < NA ≦ 1.2 95 < T ≦ 105 Case 10-11 10-12 n₁₀ 1.6986281 1.6967467 k₁₀ 0.0669339 0.0559821 d₁₀ (nm) 265.290 275.562 n₂₀ 1.6902923 1.6844237 k₂₀ 0.2238725 0.1853984 d₂₀ (nm) 194.429 239.846 When n₁ ≧ n₁₀, n_(1m) = 0.0728162 0.0573596 When n₁ < n₁₀, n_(1m) = 0.0413391 0.0430261 When k₁ ≧ k₁₀, k_(1m) = 0.0452283 0.0576135 When k₁ < k₁₀, k_(1m) = 0.0327722 0.0361206 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 90.187 103.212 When n₂ ≧ n₂₀, n_(2m) = 0.3400000 0.2868152 When n₂ < n₂₀, n_(2m) = 0.2235767 0.2105566 When k₂ ≧ k₂₀, k_(2m) = 0.2178235 0.1919788 When k₂ < k₂₀, k_(2m) = 0.0973718 0.0774072 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 66.928 79.000

1.1 < NA ≦ 1.2 105 < T ≦ 115 17/27 Case 11-01 11-02 11-03 11-04 11-05 n₁₀ 1.9214172 1.9009993 1.8999222 1.7289797 1.7301397 k₁₀ 0.1753360 0.1351301 0.0954510 0.0876375 0.0779683 d₁₀ (nm) 15.452 13.611 12.469 93.472 94.062 n₂₀ 1.6804411 1.6899586 1.7262130 1.6943958 1.7208177 k₂₀ 0.4367098 0.3280314 0.2728992 0.2513033 0.2098777 d₂₀ (nm) 129.893 187.370 240.318 176.630 230.281 When n₁ ≧ n₁₀, n_(1m) = 0.0769006 0.0933704 0.1067993 0.0330078 0.0410352 When n₁ < n₁₀, n_(1m) = 0.0358716 0.0572852 0.0688867 0.0032751 0.0048413 When k₁ ≧ k₁₀, k_(1m) = 0.0508276 0.0793042 0.0916321 0.0140979 0.0177686 When k₁ < k₁₀, k_(1m) = 0.0888501 0.0996167 0.0954510 0.0244348 0.0282959 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.190 5.335 6.248 10.623 16.723 When d₁ < d₁₀, d_(1m) (nm) = 1.818 3.051 3.681 0.787 1.251 When n₂ ≧ n₂₀, n_(2m) = 0.0746777 0.0897961 0.0977148 0.0241113 0.0398962 When n₂ < n₂₀, n_(2m) = 0.1378662 0.1400989 0.1490454 0.0784241 0.0968872 When k₂ ≧ k₂₀, k_(2m) = 0.0793188 0.0846436 0.0920837 0.0085193 0.0207715 When k₂ < k₂₀, k_(2m) = 0.0870862 0.0841199 0.0819739 0.0504102 0.0538818 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 17.196 ∞ When d₂ < d₂₀, d_(2m) (nm) = 28.725 67.570 87.835 8.245 10.621 1.1 < NA ≦ 1.2 105 < T ≦ 115 Case 11-06 11-07 11-08 11-09 n₁₀ 1.6897075 1.6928599 1.6933895 1.6967442 k₁₀ 0.0859154 0.0698704 0.0619572 0.0572224 d₁₀ (nm) 206.600 218.100 215.832 275.439 n₂₀ 1.6860653 1.6784557 1.6904996 1.6838077 k₂₀ 0.2958058 0.2260347 0.1864736 0.1920294 d₂₀ (nm) 138.770 175.355 232.785 230.401 When n₁ ≧ n₁₀, n_(1m) = 0.0125659 0.0312329 0.0432227 0.0564172 When n₁ < n₁₀, n_(1m) = 0.0403125 0.0252893 0.0462402 0.0423401 When k₁ ≧ k₁₀, k_(1m) = 0.0275024 0.0399890 0.0513623 0.0566272 When k₁ < k₁₀, k_(1m) = 0.0207617 0.0230298 0.0339783 0.0347253 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.565 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 15.751 15.335 41.797 102.062 When n₂ ≧ n₂₀, n_(2m) = 0.1134778 0.0778406 0.2416541 0.2945471 When n₂ < n₂₀, n_(2m) = 0.0212585 0.0821313 0.1144373 0.2197937 When k₂ ≧ k₂₀, k_(2m) = 0.0640356 0.0874658 0.1126599 0.1918506 When k₂ < k₂₀, k_(2m) = 0.0823962 0.0630994 0.0642725 0.0810107 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 4.190 25.396 50.058 79.342

1.1 < NA ≦ 1.2 115 < T ≦ 125 18/27 Case 12-01 12-02 12-03 12-04 12-05 n₁₀ 1.9907624 1.9229056 1.9003143 1.9049048 1.7296380 k₁₀ 0.2658843 0.1943367 0.1434936 0.0972823 0.0899801 d₁₀ (nm) 16.877 14.896 13.590 12.362 93.128 n₂₀ 1.6777634 1.6435696 1.6791032 1.7269066 1.6935089 k₂₀ 0.7245088 0.4392836 0.3336019 0.2779612 0.2572784 d₂₀ (nm) 66.041 124.711 179.139 230.763 167.093 When n₁ ≧ n₁₀, n_(1m) = 0.0641870 0.0750415 0.0917773 0.1066382 0.0315833 When n₁ < n₁₀, n_(1m) = 0.0020520 0.0319995 0.0559583 0.0680188 0.0015344 When k₁ ≧ k₁₀, k_(1m) = 0.0028235 0.0481201 0.0790771 0.0912170 0.0085083 When k₁ < k₁₀, k_(1m) = 0.0445386 0.0882983 0.0964502 0.0972823 0.0192114 When d₁ ≧ d₁₀, d_(1m) (nm) = 2.498 3.792 5.133 6.031 9.518 When d₁ < d₁₀, d_(1m) (nm) = 0.080 1.544 2.939 3.522 0.359 When n₂ ≧ n₂₀, n_(2m) = 0.0064478 0.0655054 0.0877441 0.0975110 0.0182434 When n₂ < n₂₀, n_(2m) = 0.1131567 0.1382288 0.1415613 0.1512451 0.0817859 When k₂ ≧ k₂₀, k_(2m) = 0.0073132 0.0658899 0.0812854 0.0911096 0.0040100 When k₂ < k₂₀, k_(2m) = 0.0730591 0.0825134 0.0835315 0.0828308 0.0509155 When d₂ ≧ d₂₀, d_(2m) (nm) = 10.610 ∞ ∞ ∞ 14.228 When d₂ < d₂₀, d_(2m) (nm) = 2.901 33.267 66.014 90.382 3.593 1.1 < NA ≦ 1.2 115 < T ≦ 125 Case 12-06 12-07 12-08 12-09 12-10 n₁₀ 1.7305285 1.6927568 1.6930586 1.6939267 1.6970265 k₁₀ 0.0799609 0.0712762 0.0635805 0.0583165 0.0526106 d₁₀ (nm) 93.907 218.499 215.646 213.162 273.430 n₂₀ 1.7196209 1.6781695 1.6903056 1.6934648 1.6908020 k₂₀ 0.2133806 0.2348207 0.1916344 0.1626221 0.1682270 d₂₀ (nm) 220.978 164.929 223.237 282.414 277.869 When n₁ ≧ n₁₀, n_(1m) = 0.0401038 0.0280627 0.0367090 0.0617249 0.0695837 When n₁ < n₁₀, n_(1m) = 0.0020569 0.0197937 0.0422595 0.0578455 0.0506836 When k₁ ≧ k₁₀, k_(1m) = 0.0099243 0.0365027 0.0497717 0.0551318 0.0584485 When k₁ < k₁₀, k_(1m) = 0.0219006 0.0215491 0.0327808 0.0369946 0.0381665 When d₁ ≧ d₁₀, d_(1m) (nm) = 15.192 ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 0.519 8.747 40.119 117.750 120.098 When n₂ ≧ n₂₀, n_(2m) = 0.0185596 0.0673242 0.2516089 0.2302490 0.2819116 When n₂ < n₂₀, n_(2m) = 0.1000403 0.0715613 0.0981323 0.1425830 0.2021863 When k₂ ≧ k₂₀, k_(2m) = 0.0105981 0.0901270 0.1132849 0.1293579 0.1967712 When k₂ < k₂₀, k_(2m) = 0.0546692 0.0589612 0.0634204 0.0595032 0.0741577 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 3.602 19.014 34.397 79.670 93.763

1.1 < NA ≦ 1.2 125 < T ≦ 135 19/27 Case 13-01 13-02 13-03 13-04 13-05 n₁₀ 1.8968086 1.9070303 1.9016797 1.7329805 1.7161015 k₁₀ 0.1457981 0.0954881 0.0905797 0.0916823 0.0708259 d₁₀ (nm) 14.128 12.717 10.946 93.296 94.224 n₂₀ 1.6815336 1.7369802 1.7110902 1.7056329 1.6780965 k₂₀ 0.3444919 0.2856144 0.2381911 0.2670261 0.1788543 d₂₀ (nm) 167.613 218.968 280.601 155.076 274.399 When n₁ ≧ n₁₀, n_(1m) = 0.0900439 0.1048657 0.1226746 0.0324280 0.0442737 When n₁ < n₁₀, n_(1m) = 0.0549670 0.0656934 0.0785547 0.0012561 0.0190796 When k₁ ≧ k₁₀, k_(1m) = 0.0772925 0.0877979 0.1031616 0.0075342 0.0396033 When k₁ < k₁₀, k_(1m) = 0.0920227 0.0954881 0.0905797 0.0177710 0.0448962 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.183 6.019 6.438 9.368 34.945 When d₁ < d₁₀, d_(1m) (nm) = 2.993 3.453 3.787 0.285 6.328 When n₂ ≧ n₂₀, n_(2m) = 0.0877783 0.0991382 0.1111206 0.0250049 0.0400305 When n₂ < n₂₀, n_(2m) = 0.1446509 0.1532288 0.1362280 0.0542139 0.1016638 When k₂ ≧ k₂₀, k_(2m) = 0.0828516 0.0936658 0.0912720 0.0036011 0.0409863 When k₂ < k₂₀, k_(2m) = 0.0884485 0.0865161 0.0819922 0.0570435 0.0508105 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 16.698 ∞ When d₂ < d₂₀, d_(2m) (nm) = 63.831 86.162 129.598 1.884 53.218 1.1 < NA ≦ 1.2 125 < T ≦ 135 Case 13-06 13-07 13-08 13-09 n₁₀ 1.6922053 1.6924923 1.6935584 1.6967916 k₁₀ 0.0726320 0.0653867 0.0598502 0.0533770 d₁₀ (nm) 218.650 214.871 212.072 273.133 n₂₀ 1.6800076 1.6897434 1.6927128 1.6904661 k₂₀ 0.2436881 0.1959626 0.1654173 0.1709158 d₂₀ (nm) 154.426 214.392 274.211 268.389 When n₁ ≧ n₁₀, n_(1m) = 0.0253528 0.0324316 0.0605591 0.0715686 When n₁ < n₁₀, n_(1m) = 0.0165808 0.0420508 0.0560315 0.0516870 When k₁ ≧ k₁₀, k_(1m) = 0.0318250 0.0487207 0.0537805 0.0575159 When k₁ < k₁₀, k_(1m) = 0.0192969 0.0323987 0.0370093 0.0369739 When d₁ ≧ d₁₀, d_(1m) (nm) = 16.057 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 7.067 37.738 59.298 116.516 When n₂ ≧ n₂₀, n_(2m) = 0.0399280 0.1505237 0.2298792 0.2878638 When n₂ < n₂₀, n_(2m) = 0.0570007 0.0843848 0.1463525 0.2044592 When k₂ ≧ k₂₀, k_(2m) = 0.0949915 0.1174060 0.1308350 0.1989417 When k₂ < k₂₀, k_(2m) = 0.0566089 0.0642029 0.0608850 0.0765625 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 13.778 24.202 76.110 90.681

1.1 < NA ≦ 1.2 135 < T ≦ 145 20/27 Case 14-01 14-02 14-03 14-04 14-05 n₁₀ 1.8931613 1.9086798 1.8957546 1.7383088 1.7163304 k₁₀ 0.1437464 0.0925277 0.1021679 0.0935643 0.0717315 d₁₀ (nm) 15.228 13.463 11.154 93.735 94.330 n₂₀ 1.6981871 1.7547782 1.6965397 1.7255584 1.6763108 k₂₀ 0.3648670 0.2987738 0.2414267 0.2828024 0.1832109 d₂₀ (nm) 154.635 206.696 273.752 142.972 265.207 When n₁ ≧ n₁₀, n_(1m) = 0.0870447 0.1008179 0.1206177 0.0337476 0.0440930 When n₁ < n₁₀, n_(1m) = 0.0533362 0.0620862 0.0768750 0.0007715 0.0201111 When k₁ ≧ k₁₀, k_(1m) = 0.0736633 0.0819543 0.1022961 0.0054871 0.0403162 When k₁ < k₁₀, k_(1m) = 0.0884546 0.0925277 0.1021679 0.0149585 0.0433484 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.366 6.051 6.474 9.539 32.676 When d₁ < d₁₀, d_(1m) (nm) = 3.110 3.392 3.792 0.168 6.615 When n₂ ≧ n₂₀, n_(2m) = 0.0905371 0.1017932 0.1131152 0.0305115 0.0401709 When n₂ < n₂₀, n_(2m) = 0.1457471 0.1521191 0.1323865 0.0291541 0.0974780 When k₂ ≧ k₂₀, k_(2m) = 0.0891467 0.0990112 0.0895691 0.0025757 0.0411877 When k₂ < k₂₀, k_(2m) = 0.0964551 0.0905688 0.0826367 0.0641370 0.0518066 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 18.295 ∞ When d₂ < d₂₀, d_(2m) (nm) = 52.833 78.923 127.644 0.825 36.894 1.1 < NA ≦ 1.2 135 < T ≦ 145 Case 14-06 14-07 14-08 14-09 14-10 n₁₀ 1.7036586 1.6919166 1.6911838 1.6942185 1.6965335 k₁₀ 0.0640636 0.0672926 0.0743991 0.0545821 0.0539924 d₁₀ (nm) 161.836 213.353 218.060 211.644 273.036 n₂₀ 1.6842842 1.6889376 1.6805827 1.6930391 1.6894839 k₂₀ 0.1670348 0.2002175 0.2524809 0.1466022 0.1738185 d₂₀ (nm) 260.021 207.074 145.761 321.654 259.712 When n₁ ≧ n₁₀, n_(1m) = 0.0516992 0.0312610 0.0190637 0.0570044 0.0731799 When n₁ < n₁₀, n_(1m) = 0.0203174 0.0465454 0.0159326 0.0625537 0.0527673 When k₁ ≧ k₁₀, k_(1m) = 0.0380640 0.0462256 0.0279297 0.0552405 0.0568201 When k₁ < k₁₀, k_(1m) = 0.0285486 0.0325867 0.0168274 0.0356702 0.0362610 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ 14.138 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 9.049 34.771 6.640 127.140 114.401 When n₂ ≧ n₂₀, n_(2m) = 0.0375000 0.2427722 0.0321863 0.2263916 0.2897119 When n₂ < n₂₀, n_(2m) = 0.0655225 0.0802039 0.0495178 0.1240515 0.2069202 When k₂ ≧ k₂₀, k_(2m) = 0.0303979 0.1193311 0.0877856 0.1337305 0.1994678 When k₂ < k₂₀, k_(2m) = 0.0483228 0.0645337 0.0566711 0.0596594 0.0781824 When d₂ ≧ d₂₀, d_(2m) (nm) = 29.338 ∞ 15.130 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 27.139 22.617 11.351 93.024 88.496

1.1 < NA ≦ 1.2 145 < T ≦ 155 21/27 Case 15-01 15-02 15-03 15-04 15-05 n₁₀ 1.8962402 1.9162756 1.8972293 1.7171631 1.7039366 k₁₀ 0.1446868 0.0920008 0.1039493 0.0735355 0.0654419 d₁₀ (nm) 16.058 13.917 11.503 94.241 161.496 n₂₀ 1.7149739 1.7705409 1.6986687 1.6756859 1.6849902 k₂₀ 0.3909951 0.3160160 0.2516185 0.1901883 0.1728826 d₂₀ (nm) 143.691 196.340 264.437 256.660 251.490 When n₁ ≧ n₁₀, n_(1m) = 0.0837915 0.0974329 0.1166235 0.0430017 0.0505029 When n₁ < n₁₀, n_(1m) = 0.0514441 0.0592371 0.0737268 0.0188135 0.0178369 When k₁ ≧ k₁₀, k_(1m) = 0.0700403 0.0772290 0.0977893 0.0384546 0.0357764 When k₁ < k₁₀, k_(1m) = 0.0875134 0.0920008 0.1039493 0.0432324 0.0268848 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.323 5.852 6.362 32.246 ∞ When d₁ < d₁₀, d_(1m) (nm) = 3.062 3.205 3.699 5.981 7.380 When n₂ ≧ n₂₀, n_(2m) = 0.0928162 0.1031079 0.1115686 0.0381177 0.0304712 When n₂ < n₂₀, n_(2m) = 0.1435938 0.1490808 0.1351062 0.0929431 0.0597266 When k₂ ≧ k₂₀, k_(2m) = 0.0944385 0.1027820 0.0897864 0.0382104 0.0277966 When k₂ < k₂₀, k_(2m) = 0.0995911 0.0924023 0.0838245 0.0518921 0.0482678 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 23.493 When d₂ < d₂₀, d_(2m) (nm) = 30.912 72.930 96.188 31.536 23.876 1.1 < NA ≦ 1.2 145 < T ≦ 155 Case 15-06 15-07 15-08 15-09 n₁₀ 1.6903081 1.6915399 1.6931731 1.6963857 k₁₀ 0.0771344 0.0690906 0.0615887 0.0546855 d₁₀ (nm) 216.305 212.338 211.917 273.170 n₂₀ 1.6786590 1.6881028 1.6918937 1.6879125 k₂₀ 0.2613948 0.2062149 0.1729009 0.1780863 d₂₀ (nm) 139.207 199.770 256.415 251.444 When n₁ ≧ n₁₀, n_(1m) = 0.0195569 0.0307166 0.0591064 0.0699243 When n₁ < n₁₀, n_(1m) = 0.0132800 0.0523120 0.0554614 0.0530347 When k₁ ≧ k₁₀, k_(1m) = 0.0269897 0.0450159 0.0517236 0.0562524 When k₁ < k₁₀, k_(1m) = 0.0101050 0.0313696 0.0355261 0.0367395 When d₁ ≧ d₁₀, d_(1m) (nm) = 14.222 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 6.108 32.462 54.157 113.606 When n₂ ≧ n₂₀, n_(2m) = 0.0246814 0.2330432 0.2286047 0.2890198 When n₂ < n₂₀, n_(2m) = 0.0598340 0.0841870 0.1451465 0.2088098 When k₂ ≧ k₂₀, k_(2m) = 0.0678235 0.1160620 0.1277832 0.1979041 When k₂ < k₂₀, k_(2m) = 0.0514465 0.0682922 0.0664624 0.0771411 When d₂ ≧ d₂₀, d_(2m) (nm) = 11.437 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 12.498 26.275 74.226 84.013

1.1 < NA ≦ 1.2 155 < T ≦ 165 22/27 Case 16-01 16-02 16-03 16-04 16-05 n₁₀ 1.9078860 1.9270939 1.9009914 1.7182026 1.7037276 k₁₀ 0.1508452 0.0963716 0.1079582 0.0759211 0.0670447 d₁₀ (nm) 16.208 13.863 11.657 93.910 160.452 n₂₀ 1.7232027 1.7738090 1.6981472 1.6754262 1.6860603 k₂₀ 0.4201511 0.3331580 0.2622250 0.1979303 0.1785858 d₂₀ (nm) 134.826 188.374 256.036 248.261 243.357 When n₁ ≧ n₁₀, n_(1m) = 0.0807556 0.0955676 0.1136938 0.0410315 0.0482739 When n₁ < n₁₀, n_(1m) = 0.0492212 0.0570374 0.0706995 0.0157471 0.0155554 When k₁ ≧ k₁₀, k_(1m) = 0.0660083 0.0745215 0.0946643 0.0342603 0.0302344 When k₁ < k₁₀, k_(1m) = 0.0885791 0.0963716 0.1079582 0.0433301 0.0248120 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.938 5.477 6.133 23.554 ∞ When d₁ < d₁₀, d_(1m) (nm) = 2.790 2.920 3.507 4.784 6.051 When n₂ ≧ n₂₀, n_(2m) = 0.0912793 0.1022461 0.1087073 0.0334387 0.0216223 When n₂ < n₂₀, n_(2m) = 0.1401233 0.1468384 0.1373413 0.0900842 0.0519312 When k₂ ≧ k₂₀, k_(2m) = 0.0948535 0.1014905 0.0883215 0.0321790 0.0239026 When k₂ < k₂₀, k_(2m) = 0.0976477 0.0917578 0.0837280 0.0507922 0.0474658 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 19.461 When d₂ < d₂₀, d_(2m) (nm) = 27.641 68.596 90.537 29.710 21.259 1.1 < NA ≦ 1.2 155 < T ≦ 165 Case 16-06 16-07 16-08 16-09 n₁₀ 1.6914048 1.6932944 1.6971949 1.6963748 k₁₀ 0.0705280 0.0619823 0.0758678 0.0557064 d₁₀ (nm) 212.904 213.027 268.193 273.316 n₂₀ 1.6862460 1.6912789 1.6840809 1.6860970 k₂₀ 0.2142065 0.1784688 0.2789945 0.1841499 d₂₀ (nm) 190.804 246.475 135.240 242.973 When n₁ ≧ n₁₀, n_(1m) = 0.0288806 0.0598267 0.0616260 0.0706445 When n₁ < n₁₀, n_(1m) = 0.0419739 0.0573401 0.0320642 0.0521814 When k₁ ≧ k₁₀, k_(1m) = 0.0434460 0.0510059 0.0409424 0.0555554 When k₁ < k₁₀, k_(1m) = 0.0304883 0.0343054 0.0217456 0.0379871 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 31.951 51.898 19.489 113.780 When n₂ ≧ n₂₀, n_(2m) = 0.2364844 0.2370337 0.2474512 0.2927136 When n₂ < n₂₀, n_(2m) = 0.0869409 0.1403040 0.2270129 0.2100537 When k₂ ≧ k₂₀, k_(2m) = 0.1087354 0.1223047 0.1872974 0.1959326 When k₂ < k₂₀, k_(2m) = 0.0726953 0.0652295 0.1039441 0.0773071 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 34.355 75.037 36.050 81.214

1.1 < NA ≦ 1.2 165 < T ≦ 175 23/27 Case 17-01 17-02 17-03 17-04 17-05 n₁₀ 1.9345747 1.9100928 1.9218874 1.7188695 1.7031385 k₁₀ 0.1082213 0.1149883 0.1634556 0.0782891 0.0685384 d₁₀ (nm) 13.373 11.317 15.608 93.463 159.293 n₂₀ 1.7554016 1.6916658 1.7091703 1.6745648 1.6866422 k₂₀ 0.3434593 0.2694423 0.4402763 0.2040549 0.1829170 d₂₀ (nm) 183.042 248.707 128.647 239.614 234.977 When n₁ ≧ n₁₀, n_(1m) = 0.0953882 0.1140894 0.0784595 0.0386694 0.0460681 When n₁ < n₁₀, n_(1m) = 0.0550098 0.0698865 0.0459766 0.0121814 0.0133398 When k₁ ≧ k₁₀, k_(1m) = 0.0742224 0.0954895 0.0620923 0.0290149 0.0227319 When k₁ < k₁₀, k_(1m) = 0.1051392 0.1149883 0.0878528 0.0413110 0.0203333 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.105 5.733 4.388 16.599 ∞ When d₁ < d₁₀, d_(1m) (nm) = 2.628 3.226 2.376 3.551 4.956 When n₂ ≧ n₂₀, n_(2m) = 0.0995532 0.1061743 0.0849316 0.0275488 0.0132971 When n₂ < n₂₀, n_(2m) = 0.1453674 0.1364294 0.1372107 0.0877344 0.0449780 When k₂ ≧ k₂₀, k_(2m) = 0.0936926 0.0848206 0.0864539 0.0249731 0.0152673 When k₂ < k₂₀, k_(2m) = 0.0884937 0.0821777 0.0909717 0.0487439 0.0459656 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 6.034 When d₂ < d₂₀, d_(2m) (nm) = 65.841 91.823 28.009 30.737 19.612 1.1 < NA ≦ 1.2 165 < T ≦ 175 Case 17-06 17-07 17-08 17-09 n₁₀ 1.6934237 1.6934242 1.6985617 1.6963947 k₁₀ 0.0627890 0.0627998 0.0777714 0.0569261 d₁₀ (nm) 213.592 213.572 264.836 273.344 n₂₀ 1.6908665 1.6907829 1.6854326 1.6845211 k₂₀ 0.1844160 0.1843934 0.2962369 0.1907955 d₂₀ (nm) 236.853 236.891 131.733 233.824 When n₁ ≧ n₁₀, n_(1m) = 0.0574976 0.0574353 0.0522168 0.0698511 When n₁ < n₁₀, n_(1m) = 0.0521313 0.0521704 0.0296216 0.0506372 When k₁ ≧ k₁₀, k_(1m) = 0.0502954 0.0502856 0.0369763 0.0547412 When k₁ < k₁₀, k_(1m) = 0.0341577 0.0341846 0.0234509 0.0368408 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 50.284 50.272 18.034 113.943 When n₂ ≧ n₂₀, n_(2m) = 0.2442261 0.2441003 0.2108032 0.3045251 When n₂ < n₂₀, n_(2m) = 0.1394958 0.1395251 0.2567761 0.2115186 When k₂ ≧ k₂₀, k_(2m) = 0.1187415 0.1187610 0.1954675 0.1950378 When k₂ < k₂₀, k_(2m) = 0.0660913 0.0660889 0.1128296 0.0795361 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 75.634 75.652 33.470 80.767

1.1 < NA ≦ 1.2 175 < T ≦ 185 24/27 Case 18-01 18-02 18-03 18-04 18-05 n₁₀ 1.9329388 1.9368237 1.9141366 1.7191879 1.7029035 k₁₀ 0.1795701 0.1224596 0.1196035 0.0801581 0.0699625 d₁₀ (nm) 14.789 12.921 11.206 93.133 158.805 n₂₀ 1.6812994 1.7305084 1.6882344 1.6734445 1.6865116 k₂₀ 0.4483886 0.3477304 0.2744889 0.2077092 0.1862225 d₂₀ (nm) 123.825 177.704 240.000 230.286 225.674 When n₁ ≧ n₁₀, n_(1m) = 0.0768433 0.0949634 0.1131592 0.0367419 0.0441357 When n₁ < n₁₀, n_(1m) = 0.0412451 0.0529919 0.0684998 0.0095679 0.0109912 When k₁ ≧ k₁₀, k_(1m) = 0.0578772 0.0744714 0.0949390 0.0247339 0.0167639 When k₁ < k₁₀, k_(1m) = 0.0896887 0.1065430 0.1185388 0.0386743 0.0152380 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.840 4.794 5.495 14.453 ∞ When d₁ < d₁₀, d_(1m) (nm) = 1.946 2.409 3.066 2.710 3.941 When n₂ ≧ n₂₀, n_(2m) = 0.0764294 0.0962097 0.1038733 0.0230908 0.0081592 When n₂ < n₂₀, n_(2m) = 0.1359412 0.1466211 0.1367029 0.0895520 0.0398572 When k₂ ≧ k₂₀, k_(2m) = 0.0734753 0.0852112 0.0825085 0.0197388 0.0086536 When k₂ < k₂₀, k_(2m) = 0.0828125 0.0854419 0.0815332 0.0475061 0.0463342 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 20.793 3.280 When d₂ < d₂₀, d_(2m) (nm) = 32.854 63.574 95.894 33.693 18.574 1.1 < NA ≦ 1.2 175 < T ≦ 185 Case 18-06 18-07 18-08 n₁₀ 1.6933701 1.6939475 1.6969386 k₁₀ 0.0640425 0.0576888 0.0533290 d₁₀ (nm) 213.864 212.435 271.986 n₂₀ 1.6904005 1.6925921 1.6924288 k₂₀ 0.1898312 0.1618810 0.1673219 d₂₀ (nm) 227.117 285.048 281.091 When n₁ ≧ n₁₀, n_(1m) = 0.0547229 0.0510974 0.0676453 When n₁ < n₁₀, n_(1m) = 0.0462109 0.0603149 0.0497070 When k₁ ≧ k₁₀, k_(1m) = 0.0493457 0.0532312 0.0592920 When k₁ < k₁₀, k_(1m) = 0.0339734 0.0351465 0.0390295 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 49.384 120.643 177.975 When n₂ ≧ n₂₀, n_(2m) = 0.2555811 0.2373071 0.2892273 When n₂ < n₂₀, n_(2m) = 0.1402515 0.1279663 0.2010315 When k₂ ≧ k₂₀, k_(2m) = 0.1146326 0.1254919 0.2051270 When k₂ < k₂₀, k_(2m) = 0.0655762 0.0607678 0.0750598 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 70.972 82.029 98.942

1.1 < NA ≦ 1.2 185 < T ≦ 195 25/27 Case 19-01 19-02 19-03 19-04 19-05 n₁₀ 1.9315873 1.9153217 1.8972445 1.7198506 1.7209927 k₁₀ 0.1333486 0.1206110 0.1001874 0.0813984 0.0705203 d₁₀ (nm) 13.169 11.351 10.604 93.215 93.408 n₂₀ 1.7169625 1.6899751 1.6952918 1.6740113 1.6975541 k₂₀ 0.3552140 0.2797802 0.2334251 0.2110946 0.1793898 d₂₀ (nm) 168.729 229.265 285.679 219.867 273.456 When n₁ ≧ n₁₀, n_(1m) = 0.0918945 0.1114490 0.1257397 0.0361377 0.0445178 When n₁ < n₁₀, n_(1m) = 0.0499878 0.0671436 0.0846338 0.0086279 0.0205615 When k₁ ≧ k₁₀, k_(1m) = 0.0714844 0.0926733 0.1116675 0.0228809 0.0433899 When k₁ < k₁₀, k_(1m) = 0.1000085 0.1179578 0.1001874 0.0379150 0.0444836 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.647 5.413 6.402 13.674 40.701 When d₁ < d₁₀, d_(1m) (nm) = 2.318 3.021 3.978 2.409 6.133 When n₂ ≧ n₂₀, n_(2m) = 0.0938611 0.1021985 0.1009766 0.0217163 0.0601978 When n₂ < n₂₀, n_(2m) = 0.1488745 0.1392834 0.1303809 0.0916943 0.1077124 When k₂ ≧ k₂₀, k_(2m) = 0.0821570 0.0826257 0.0865845 0.0185046 0.0416394 When k₂ < k₂₀, k_(2m) = 0.0869946 0.0832629 0.0782239 0.0491125 0.0501843 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 19.431 ∞ When d₂ < d₂₀, d_(2m) (nm) = 61.773 92.529 127.146 32.148 73.073 1.1 < NA ≦ 1.2 185 < T ≦ 195 Case 19-06 19-07 19-08 19-09 19-10 n₁₀ 1.7035608 1.6916743 1.6930483 1.6936984 1.6968810 k₁₀ 0.0713918 0.0742011 0.0657083 0.0591625 0.0544417 d₁₀ (nm) 159.462 216.137 213.861 212.273 271.786 n₂₀ 1.6857491 1.6815589 1.6902271 1.6918699 1.6922876 k₂₀ 0.1901066 0.2413942 0.1951191 0.1652801 0.1708476 d₂₀ (nm) 215.251 158.897 217.477 275.792 271.501 When n₁ ≧ n₁₀, n_(1m) = 0.0427405 0.0223779 0.0519324 0.0514441 0.0684033 When n₁ < n₁₀, n_(1m) = 0.0090222 0.0227649 0.0431079 0.0594763 0.0491284 When k₁ ≧ k₁₀, k_(1m) = 0.0150232 0.0325586 0.0481873 0.0521765 0.0581763 When k₁ < k₁₀, k_(1m) = 0.0160400 0.0253345 0.0315527 0.0340894 0.0370996 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ 13.469 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 3.174 10.839 47.894 119.682 177.263 When n₂ ≧ n₂₀, n_(2m) = 0.0074805 0.0854517 0.1377869 0.2440918 0.2955884 When n₂ < n₂₀, n_(2m) = 0.0361890 0.0461035 0.1429895 0.1282532 0.2018481 When k₂ ≧ k₂₀, k_(2m) = 0.0083386 0.0888440 0.1120801 0.1247546 0.2080872 When k₂ < k₂₀, k_(2m) = 0.0485754 0.0635596 0.0642932 0.0606433 0.0779761 When d₂ ≧ d₂₀, d_(2m) (nm) = 3.092 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 17.439 14.439 35.904 75.946 92.429

1.1 < NA ≦ 1.2 195 < T ≦ 205 26/27 Case 20-01 20-02 20-03 20-04 20-05 n₁₀ 1.9249373 1.9134695 1.8970797 1.7208445 1.7215107 k₁₀ 0.1361664 0.1202777 0.0999072 0.0825059 0.0711590 d₁₀ (nm) 14.155 11.822 10.899 93.633 93.747 n₂₀ 1.7251855 1.6947701 1.6978665 1.6746972 1.6977852 k₂₀ 0.3723543 0.2878755 0.2388400 0.2167421 0.1834377 d₂₀ (nm) 156.237 218.180 275.054 209.700 263.540 When n₁ ≧ n₁₀, n_(1m) = 0.0879163 0.1083789 0.1230811 0.0362378 0.0448303 When n₁ < n₁₀, n_(1m) = 0.0472876 0.0648938 0.0826709 0.0083032 0.0200745 When k₁ ≧ k₁₀, k_(1m) = 0.0660645 0.0884607 0.1084424 0.0221863 0.0429114 When k₁ < k₁₀, k_(1m) = 0.0933167 0.1148511 0.0999072 0.0377161 0.0440771 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.725 5.477 6.424 13.579 31.897 When d₁ < d₁₀, d_(1m) (nm) = 2.353 3.040 3.984 2.294 5.957 When n₂ ≧ n₂₀, n_(2m) = 0.0937048 0.1017651 0.1009302 0.0215295 0.0601208 When n₂ < n₂₀, n_(2m) = 0.1501685 0.1443250 0.1325146 0.0892346 0.1044958 When k₂ ≧ k₂₀, k_(2m) = 0.0870276 0.0848474 0.0878162 0.0191504 0.0424573 When k₂ < k₂₀, k_(2m) = 0.0940491 0.0866907 0.0808813 0.0520386 0.0521252 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 59.976 84.859 127.060 27.072 71.102 1.1 < NA ≦ 1.2 195 < T ≦ 205 Case 20-06 20-07 20-08 20-09 20-10 n₁₀ 1.7046380 1.7071945 1.6911424 1.6924731 1.6944113 k₁₀ 0.0728087 0.0643745 0.0761042 0.0678273 0.0547711 d₁₀ (nm) 160.840 160.796 216.237 212.933 211.610 n₂₀ 1.6842748 1.7036838 1.6835271 1.6899027 1.6931553 k₂₀ 0.1961079 0.1674255 0.2518702 0.2006809 0.1468072 d₂₀ (nm) 204.946 259.158 149.208 209.434 323.528 When n₁ ≧ n₁₀, n_(1m) = 0.0417468 0.0534717 0.0144385 0.0489441 0.0528149 When n₁ < n₁₀, n_(1m) = 0.0080798 0.0311902 0.0202490 0.0431433 0.0592456 When k₁ ≧ k₁₀, k_(1m) = 0.0160498 0.0272644 0.0259192 0.0470654 0.0582300 When k₁ < k₁₀, k_(1m) = 0.0189954 0.0257520 0.0204919 0.0289844 0.0354419 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ 11.042 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 2.830 21.473 8.826 44.978 116.569 When n₂ ≧ n₂₀, n_(2m) = 0.0092676 0.0660242 0.0583154 0.1383105 0.2397107 When n₂ < n₂₀, n_(2m) = 0.0345349 0.0284167 0.0279346 0.1133557 0.1358362 When k₂ ≧ k₂₀, k_(2m) = 0.0098743 0.0192883 0.0839758 0.1160754 0.1327747 When k₂ < k₂₀, k_(2m) = 0.0439319 0.0493506 0.0539001 0.0650562 0.0582056 When d₂ ≧ d₂₀, d_(2m) (nm) = 4.069 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 16.537 9.202 10.084 22.297 94.005

1.1 < NA ≦ 1.2 195 < T ≦ 205 27/27 Case 20-11 n₁₀ 1.6967389 k₁₀ 0.0554960 d₁₀ (nm) 271.524 n₂₀ 1.6919127 k₂₀ 0.1743507 d₂₀ (nm) 262.739 When n₁ ≧ n₁₀, n_(1m) = 0.0690857 When n₁ < n₁₀, n_(1m) = 0.0487012 When k₁ ≧ k₁₀, k_(1m) = 0.0571155 When k₁ < k₁₀, k_(1m) = 0.0354016 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ When d₁ < d₁₀, d_(1m) (nm) = 122.531 When n₂ ≧ n₂₀, n_(2m) = 0.3042639 When n₂ < n₂₀, n_(2m) = 0.2009363 When k₂ ≧ k₂₀, k_(2m) = 0.2111316 When k₂ < k₂₀, k_(2m) = 0.0800171 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ When d₂ < d₂₀, d_(2m) (nm) = 82.974

In accordance with a fourth embodiment of the invention, an antireflective film has a two-layer structure and is used in a process for manufacturing a semiconductor device by being provided between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, for exposure of the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.2<NA≦1.3. In accordance with the fourth embodiment of the invention, an exposure method is used in a process for manufacturing a semiconductor device and includes providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate having a thickness T (unit: nm) described below, and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.2<NA≦1.3.

The antireflective film or the antireflective film used in the exposure method according to the fourth embodiment of the invention includes an upper layer having a complex refractive index N₁ and a lower layer having a complex refractive index N₂, the complex refractive indexes N₁ and N₂ being represented by the following equations: N ₁ =n ₁ −k ₁ i N ₂ =n ₂ −k ₂ i Assuming that the thickness of the upper layer is d₁ (unit: nm) and the thickness of the lower layer is d₂ (unit: nm), when any one of the combinations of values of [n₁₀, k₁₀, d₁₀, n₂₀, k₂₀, d₂₀] described below is selected depending on the thickness T of the silicon oxide film, n₁, k₁, d₁, n₂, k₂, and d₂ satisfy the following relational expression: {(n ₁ −n ₁₀)/(n _(1m) −n ₁₀)}²+{(k ₁ −k ₁₀)/(k _(1m) −k ₁₀)}²+{(d ₁ −d ₁₀)/(d _(1m) −d ₁₀)}²+{(n ₂ −n ₂₀)/(n _(2m) −n ₂₀)}²+{(k ₂ −k ₂₀)/(k _(2m) −k ₂₀)}²+{(d ₂ −d ₂₀)/(d _(2m) −d ₂₀)}²≦1

However, a value of n_(1m) in a corresponding case is selected on the basis of a magnitude relation between n₁ and n₁₀; a value of k_(1m) in a corresponding case is selected on the basis of a magnitude relation between k₁ and k₁₀; a value of d_(1m) in a corresponding case is selected on the basis of a magnitude relation between d₁ and d₁₀; a value of n_(2m) in a corresponding case is selected on the basis of a magnitude relation between n₂ and n₂₀; a value of k_(2m) in a corresponding case is selected on the basis of a magnitude relation between k₂ and k₂₀; and a value of d_(2m) in a corresponding case is selected on the basis of a magnitude relation between d₂ and d₂₀. In the tables below, in the line of “When n₁≧n₁₀, n_(1m)=”, each value in the right columns is “n_(1m)−n₁₀”; in the line of “When n₁<n₁₀, n_(1m)=”, each value in the right columns is “n₁₀−n_(1m)”; in the line of “When k₁≧k₁₀, k_(1m)=”, each value in the right columns is “k_(1m)−k₁₀”; in the line of “When k₁<k₁₀, k_(1m)=”, each value in the right columns is “k₁₀−k_(1m)”; in the line of “When d₁≧d₁₀, d_(1m) (nm)=”, each value (unit: nm) in the right columns is “d_(1m)−d₁₀”; in the line of “When d₁<d₁₀, d_(1m) (nm)=”, each value (unit: nm) in the right columns is “d₁₀−d_(1m)”; in the line of “When n₂≧n₂₀, n_(2m)=”, each value in the right columns is “n_(2m)−n₂₀”; in the line of “When n₂<n₂₀, n_(2m)=”, each value in the right columns is “n₂₀−n_(2m)”; in the line of “When k₂≧k₂₀, k_(2m)=”, each value in the right columns is “k_(2m)−k₂₀”; in the line of “When k₂<k₂₀, k_(2m)=”, each value in the right columns is “k₂₀−k_(2m)”; in the line of “When d₂≧d₂₀, d_(2m) (nm)=”, each value (unit: nm) in the right columns is “d_(2m)−d₂₀”; and in the line of “When d₂<d₂₀, d_(2m) (nm)=”, each value (unit: nm) in the right columns is “d₂₀−d_(2m)”.

1.2 < NA ≦ 1.3 2 ≦ T ≦ 15 1/21 Case 1-01 1-02 1-03 1-04 1-05 n₁₀ 2.070 1.955 1.895 1.875 1.870 k₁₀ 0.020 0.138 0.133 0.110 0.101 d₁₀ (nm) 27.974 34.826 29.218 17.990 13.959 n₂₀ 5.553 9.284 2.177 1.753 1.700 k₂₀ 3.053 0.606 0.543 0.330 0.255 d₂₀ (nm) 2.024 10.907 63.407 152.930 218.765 When n₁ ≧ n₁₀, n_(1m) = 2.141 2.017 1.952 1.943 1.957 When n₁ < n₁₀, n_(1m) = 2.006 1.896 1.854 1.843 1.821 When k₁ ≧ k₁₀, k_(1m) = 0.075 0.180 0.166 0.155 0.171 When k₁ < k₁₀, k_(1m) = 0.000 0.061 0.055 0.028 0.009 When d₁ ≧ d₁₀, d_(1m) 31.254 39.247 35.017 23.926 20.211 (nm) = When d₁ < d₁₀, d_(1m) 25.519 31.618 26.178 15.560 10.679 (nm) = When n₂ ≧ n₂₀, n_(2m) = 5.876 9.377 2.281 1.832 1.773 When n₂ < n₂₀, n_(2m) = 5.233 9.207 2.051 1.635 1.577 When k₂ ≧ k₂₀, k_(2m) = 3.362 0.715 0.699 0.412 0.320 When k₂ < k₂₀, k_(2m) = 2.751 0.513 0.439 0.253 0.185 When d₂ ≧ d₂₀, d_(2m) 2.251 11.023 70.023 ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 1.807 10.812 58.076 125.396 142.606 (nm) = 1.2 < NA ≦ 1.3 2 ≦ T ≦ 15 Case 1-06 1-07 1-08 1-09 1-10 n₁₀ 1.867 1.699 1.693 1.692 1.694 k₁₀ 0.070 0.063 0.058 0.069 0.074 d₁₀ (nm) 13.235 165.016 157.920 236.756 217.672 n₂₀ 1.732 1.698 1.698 6.942 1.788 k₂₀ 0.221 0.180 0.154 3.076 0.339 d₂₀ (nm) 270.745 204.222 265.886 0.950 84.006 When n₁ ≧ n₁₀, n_(1m) = 1.964 1.701 1.708 1.727 1.710 When n₁ < n₁₀, n_(1m) = 1.810 1.683 1.664 1.662 1.674 When k₁ ≧ k₁₀, k_(1m) = 0.149 0.068 0.084 0.108 0.106 When k₁ < k₁₀, k_(1m) = 0.000 0.043 0.031 0.039 0.053 When d₁ ≧ d₁₀, d_(1m) 20.519 166.410 170.845 255.389 226.062 (nm) = When d₁ < d₁₀, d_(1m) 9.259 155.941 111.504 217.630 206.257 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.809 1.721 1.754 7.503 1.909 When n₂ < n₂₀, n_(2m) = 1.603 1.694 1.667 6.491 1.763 When k₂ ≧ k₂₀, k_(2m) = 0.293 0.188 0.194 3.321 0.395 When k₂ < k₂₀, k_(2m) = 0.152 0.139 0.113 2.487 0.243 When d₂ ≧ d₂₀, d_(2m) ∞ 217.552 ∞ 1.062 100.609 (nm) = When d₂ < d₂₀, d_(2m) 182.495 202.082 249.694 0.781 81.237 (nm) =

1.2 < NA ≦ 1.3 2 ≦ T ≦ 15 2/21 Case 1-11 1-12 1-13 n₁₀ 1.699 1.698 1.695 k₁₀ 0.071 0.065 0.054 d₁₀ (nm) 210.274 207.280 219.181 n₂₀ 1.718 1.695 1.688 k₂₀ 0.242 0.194 0.161 d₂₀ (nm) 154.667 219.490 263.755 When n₁ ≧ n₁₀, n_(1m) = 1.720 1.737 1.738 When n₁ < n₁₀, n_(1m) = 1.683 1.675 1.660 When k₁ ≧ k₁₀, k_(1m) = 0.099 0.097 0.100 When k₁ < k₁₀, k_(1m) = 0.045 0.035 0.019 When d₁ ≧ d₁₀, d_(1m) (nm) = 229.005 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 200.369 189.200 189.609 When n₂ ≧ n₂₀, n_(2m) = 1.849 1.855 1.900 When n₂ < n₂₀, n_(2m) = 1.670 1.540 1.583 When k₂ ≧ k₂₀, k_(2m) = 0.332 0.307 0.271 When k₂ < k₂₀, k_(2m) = 0.164 0.122 0.102 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 143.819 154.002 185.363

1.2 < NA ≦ 1.3 15 < T ≦ 25 3/21 Case 2-01 2-02 2-03 2-04 2-05 n₁₀ 1.894 1.881 1.874 1.872 1.693 k₁₀ 0.182 0.116 0.105 0.074 0.060 d₁₀ (nm) 37.493 18.625 14.298 13.408 158.097 n₂₀ 9.246 1.766 1.701 1.733 1.697 k₂₀ 0.662 0.358 0.269 0.231 0.160 d₂₀ (nm) 10.628 142.939 209.610 261.989 257.142 When n₁ ≧ n₁₀, n_(1m) = 1.954 1.946 1.957 1.966 1.703 When n₁ < n₁₀, n_(1m) = 1.847 1.852 1.828 1.817 1.667 When k₁ ≧ k₁₀, k_(1m) = 0.222 0.156 0.171 0.149 0.081 When k₁ < k₁₀, k_(1m) = 0.111 0.037 0.015 0.000 0.035 When d₁ ≧ d₁₀, d_(1m) 41.975 24.164 20.222 20.345 165.590 (nm) = When d₁ < d₁₀, d_(1m) 34.168 16.466 11.264 9.664 137.726 (nm) = When n₂ ≧ n₂₀, n_(2m) = 9.356 1.841 1.772 1.809 1.744 When n₂ < n₂₀, n_(2m) = 9.153 1.650 1.579 1.602 1.674 When k₂ ≧ k₂₀, k_(2m) = 0.784 0.442 0.334 0.302 0.195 When k₂ < k₂₀, k_(2m) = 0.549 0.280 0.198 0.162 0.120 When d₂ ≧ d₂₀, d_(2m) 10.759 ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 10.519 119.178 137.341 178.243 243.996 (nm) = 1.2 < NA ≦ 1.3 15 < T ≦ 25 Case 2-06 2-07 2-08 2-09 2-10 n₁₀ 1.690 1.693 1.699 1.698 1.695 k₁₀ 0.074 0.078 0.074 0.067 0.055 d₁₀ (nm) 235.203 218.334 210.503 207.468 219.130 n₂₀ 5.632 1.803 1.719 1.694 1.687 k₂₀ 4.204 0.382 0.259 0.203 0.167 d₂₀ (nm) 0.919 74.994 145.797 210.546 255.274 When n₁ ≧ n₁₀, n_(1m) = 1.708 1.699 1.715 1.733 1.737 When n₁ < n₁₀, n_(1m) = 1.661 1.675 1.684 1.676 1.661 When k₁ ≧ k₁₀, k_(1m) = 0.102 0.098 0.100 0.097 0.100 When k₁ < k₁₀, k_(1m) = 0.051 0.067 0.052 0.039 0.022 When d₁ ≧ d₁₀, d_(1m) 241.533 220.890 225.049 ∞ ∞ (nm) = When d₁ < d₁₀, d_(1m) 217.317 207.766 201.595 191.244 190.979 (nm) = When n₂ ≧ n₂₀, n_(2m) = 6.262 1.931 1.852 1.853 1.902 When n₂ < n₂₀, n_(2m) = 5.366 1.793 1.684 1.538 1.584 When k₂ ≧ k₂₀, k_(2m) = 4.338 0.416 0.339 0.310 0.275 When k₂ < k₂₀, k_(2m) = 3.555 0.288 0.182 0.132 0.107 When d₂ ≧ d₂₀, d_(2m) 0.986 89.025 ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 0.720 74.083 139.178 147.776 179.334 (nm) =

1.2 < NA ≦ 1.3 25 < T ≦ 35 4/21 Case 3-01 3-02 3-03 3-04 3-05 n₁₀ 1.855 1.894 1.879 1.879 1.692 k₁₀ 0.222 0.121 0.110 0.076 0.062 d₁₀ (nm) 38.795 19.092 14.598 13.458 158.198 n₂₀ 9.554 1.787 1.702 1.736 1.697 k₂₀ 0.714 0.392 0.285 0.242 0.168 d₂₀ (nm) 10.003 133.195 201.011 253.439 248.709 When n₁ ≧ n₁₀, n_(1m) = 1.905 1.955 1.958 1.971 1.699 When n₁ < n₁₀, n_(1m) = 1.821 1.868 1.836 1.826 1.670 When k₁ ≧ k₁₀, k_(1m) = 0.258 0.156 0.172 0.149 0.078 When k₁ < k₁₀, k_(1m) = 0.159 0.047 0.022 0.000 0.041 When d₁ ≧ d₁₀, d_(1m) 42.560 24.067 20.129 19.949 161.711 (nm) = When d₁ < d₁₀, d_(1m) 36.125 17.295 11.822 9.987 144.941 (nm) = When n₂ ≧ n₂₀, n_(2m) = 9.681 1.856 1.769 1.811 1.737 When n₂ < n₂₀, n_(2m) = 9.446 1.674 1.584 1.608 1.683 When k₂ ≧ k₂₀, k_(2m) = 0.829 0.479 0.348 0.313 0.196 When k₂ < k₂₀, k_(2m) = 0.587 0.314 0.215 0.173 0.129 When d₂ ≧ d₂₀, d_(2m) 10.138 ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 9.892 112.716 132.762 173.492 239.168 (nm) = 1.2 < NA ≦ 1.3 25 < T ≦ 35 Case 3-06 3-07 3-08 n₁₀ 1.699 1.698 1.695 k₁₀ 0.078 0.070 0.057 d₁₀ (nm) 210.437 207.381 219.158 n₂₀ 1.720 1.693 1.687 k₂₀ 0.280 0.215 0.175 d₂₀ (nm) 137.855 202.487 246.765 When n₁ ≧ n₁₀, n_(1m) = 1.710 1.730 1.737 When n₁ < n₁₀, n_(1m) = 1.686 1.678 1.661 When k₁ ≧ k₁₀, k_(1m) = 0.100 0.097 0.101 When k₁ < k₁₀, k_(1m) = 0.063 0.046 0.025 When d₁ ≧ d₁₀, d_(1m) (nm) = 216.379 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 202.875 193.042 192.539 When n₂ ≧ n₂₀, n_(2m) = 1.855 1.841 1.910 When n₂ < n₂₀, n_(2m) = 1.702 1.535 1.588 When k₂ ≧ k₂₀, k_(2m) = 0.336 0.312 0.280 When k₂ < k₂₀, k_(2m) = 0.208 0.146 0.114 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 134.716 142.289 200.270

1.2 < NA ≦ 1.3 35 < T ≦ 45 5/21 Case 4-01 4-02 4-03 4-04 4-05 n₁₀ 1.921 1.907 1.883 1.885 1.692 k₁₀ 0.198 0.132 0.117 0.078 0.064 d₁₀ (nm) 29.852 18.597 14.666 13.425 158.019 n₂₀ 2.410 1.779 1.698 1.738 1.697 k₂₀ 0.850 0.418 0.298 0.251 0.174 d₂₀ (nm) 42.336 126.566 192.788 244.904 240.368 When n₁ ≧ n₁₀, n_(1m) = 1.964 1.964 1.959 1.975 1.694 When n₁ < n₁₀, n_(1m) = 1.894 1.886 1.843 1.834 1.673 When k₁ ≧ k₁₀, k_(1m) = 0.224 0.160 0.175 0.149 0.073 When k₁ < k₁₀, k_(1m) = 0.152 0.061 0.031 0.000 0.048 When d₁ ≧ d₁₀, d_(1m) 33.127 22.917 19.812 19.537 159.270 (nm) = When d₁ < d₁₀, d_(1m) 28.245 17.267 12.114 10.202 147.983 (nm) = When n₂ ≧ n₂₀, n_(2m) = 2.530 1.833 1.762 1.812 1.732 When n₂ < n₂₀, n_(2m) = 2.288 1.667 1.583 1.611 1.691 When k₂ ≧ k₂₀, k_(2m) = 0.928 0.492 0.359 0.320 0.195 When k₂ < k₂₀, k_(2m) = 0.730 0.344 0.229 0.182 0.145 When d₂ ≧ d₂₀, d_(2m) 46.411 ∞ ∞ ∞ 274.107 (nm) = When d₂ < d₂₀, d_(2m) 39.931 107.536 154.271 167.375 234.670 (nm) = 1.2 < NA ≦ 1.3 35 < T ≦ 45 Case 4-06 4-07 4-08 4-09 n₁₀ 1.700 1.698 1.695 1.705 k₁₀ 0.081 0.072 0.059 0.053 d₁₀ (nm) 209.560 206.609 219.174 283.412 n₂₀ 1.716 1.692 1.688 1.691 k₂₀ 0.298 0.225 0.183 0.185 d₂₀ (nm) 131.419 195.862 237.750 233.362 When n₁ ≧ n₁₀, n_(1m) = 1.701 1.721 1.734 1.751 When n₁ < n₁₀, n_(1m) = 1.689 1.680 1.662 1.675 When k₁ ≧ k₁₀, k_(1m) = 0.099 0.097 0.101 0.092 When k₁ < k₁₀, k_(1m) = 0.076 0.050 0.027 0.024 When d₁ ≧ d₁₀, d_(1m) (nm) = 210.753 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 203.620 194.085 194.045 189.814 When n₂ ≧ n₂₀, n_(2m) = 1.846 1.812 1.920 1.889 When n₂ < n₂₀, n_(2m) = 1.712 1.528 1.594 1.515 When k₂ ≧ k₂₀, k_(2m) = 0.319 0.315 0.285 0.358 When k₂ < k₂₀, k_(2m) = 0.257 0.159 0.121 0.115 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 130.894 179.580 197.417 162.566

1.2 < NA ≦ 1.3 45 < T ≦ 55 6/21 Case 5-01 5-02 5-03 5-04 5-05 n₁₀ 1.943 1.907 1.884 1.891 1.691 k₁₀ 0.213 0.153 0.123 0.078 0.066 d₁₀ (nm) 22.907 17.372 14.585 13.392 157.377 n₂₀ 1.902 1.716 1.691 1.743 1.696 k₂₀ 0.785 0.418 0.305 0.257 0.178 d₂₀ (nm) 53.731 124.143 184.536 235.129 232.195 When n₁ ≧ n₁₀, n_(1m) = 1.979 1.963 1.959 1.980 1.692 When n₁ < n₁₀, n_(1m) = 1.934 1.892 1.845 1.841 1.676 When k₁ ≧ k₁₀, k_(1m) = 0.223 0.175 0.181 0.148 0.067 When k₁ < k₁₀, k_(1m) = 0.198 0.080 0.039 0.000 0.057 When d₁ ≧ d₁₀, d_(1m) 25.447 21.108 19.487 19.257 157.441 (nm) = When d₁ < d₁₀, d_(1m) 22.431 16.482 12.133 10.346 149.670 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.937 1.752 1.753 1.817 1.727 When n₂ < n₂₀, n_(2m) = 1.871 1.605 1.576 1.616 1.695 When k₂ ≧ k₂₀, k_(2m) = 0.813 0.464 0.362 0.326 0.187 When k₂ < k₂₀, k_(2m) = 0.724 0.351 0.237 0.188 0.173 When d₂ ≧ d₂₀, d_(2m) 58.954 ∞ ∞ ∞ 254.885 (nm) = When d₂ < d₂₀, d_(2m) 51.905 103.951 122.545 158.102 231.812 (nm) = 1.2 < NA ≦ 1.3 45 < T ≦ 55 Case 5-06 5-07 5-08 n₁₀ 1.699 1.695 1.704 k₁₀ 0.072 0.060 0.054 d₁₀ (nm) 204.994 219.095 283.255 n₂₀ 1.688 1.689 1.689 k₂₀ 0.231 0.188 0.189 d₂₀ (nm) 192.230 228.102 224.255 When n₁ ≧ n₁₀, n_(1m) = 1.718 1.729 1.749 When n₁ < n₁₀, n_(1m) = 1.682 1.663 1.676 When k₁ ≧ k₁₀, k_(1m) = 0.096 0.102 0.091 When k₁ < k₁₀, k_(1m) = 0.048 0.030 0.025 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 194.149 195.371 190.682 When n₂ ≧ n₂₀, n_(2m) = 1.788 1.929 1.898 When n₂ < n₂₀, n_(2m) = 1.641 1.601 1.530 When k₂ ≧ k₂₀, k_(2m) = 0.326 0.290 0.362 When k₂ < k₂₀, k_(2m) = 0.165 0.127 0.117 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 176.978 195.845 153.544

1.2 < NA ≦ 1.3 55 < T ≦ 65 7/21 Case 6-01 6-02 6-03 6-04 6-05 n₁₀ 1.895 1.882 1.690 1.701 1.693 k₁₀ 0.076 0.126 0.068 0.084 0.070 d₁₀ (nm) 13.537 14.752 155.845 206.275 221.382 n₂₀ 1.753 1.688 1.693 1.686 1.667 k₂₀ 0.262 0.309 0.181 0.310 0.231 d₂₀ (nm) 223.848 174.672 224.616 122.505 161.928 When n₁ ≧ n₁₀, n_(1m) = 1.983 1.956 1.691 1.703 1.726 When n₁ < n₁₀, n_(1m) = 1.846 1.842 1.680 1.695 1.686 When k₁ ≧ k₁₀, k_(1m) = 0.143 0.185 0.071 0.096 0.105 When k₁ < k₁₀, k_(1m) = 0.000 0.045 0.054 0.076 0.063 When d₁ ≧ d₁₀, d_(1m) 19.333 19.661 156.188 207.561 253.974 (nm) = When d₁ < d₁₀, d_(1m) 10.604 12.234 149.873 203.306 217.847 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.828 1.751 1.713 1.791 1.691 When n₂ < n₂₀, n_(2m) = 1.623 1.571 1.692 1.682 1.585 When k₂ ≧ k₂₀, k_(2m) = 0.332 0.365 0.184 0.352 0.284 When k₂ < k₂₀, k_(2m) = 0.191 0.239 0.171 0.280 0.201 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ 244.114 149.549 170.132 (nm) = When d₂ < d₂₀, d_(2m) 146.194 124.203 224.269 121.948 139.231 (nm) = 1.2 < NA ≦ 1.3 55 < T ≦ 65 Case 6-06 6-07 6-08 n₁₀ 1.695 1.695 1.703 k₁₀ 0.060 0.055 0.049 d₁₀ (nm) 218.851 215.764 278.302 n₂₀ 1.689 1.693 1.691 k₂₀ 0.190 0.162 0.159 d₂₀ (nm) 218.129 277.062 273.241 When n₁ ≧ n₁₀, n_(1m) = 1.726 1.740 1.751 When n₁ < n₁₀, n_(1m) = 1.665 1.662 1.653 When k₁ ≧ k₁₀, k_(1m) = 0.102 0.097 0.092 When k₁ < k₁₀, k_(1m) = 0.031 0.021 0.015 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 196.531 170.235 166.884 When n₂ ≧ n₂₀, n_(2m) = 1.935 1.919 1.925 When n₂ < n₂₀, n_(2m) = 1.606 1.543 1.498 When k₂ ≧ k₂₀, k_(2m) = 0.294 0.280 0.278 When k₂ < k₂₀, k_(2m) = 0.130 0.102 0.095 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 191.652 197.142 190.724

1.2 < NA ≦ 1.3 65 < T ≦ 75 8/21 Case 7-01 7-02 7-03 7-04 7-05 n₁₀ 1.881 1.879 1.898 1.873 1.715 k₁₀ 0.189 0.125 0.073 0.092 0.067 d₁₀ (nm) 17.242 15.444 14.029 12.003 99.925 n₂₀ 1.617 1.697 1.767 1.696 1.686 k₂₀ 0.409 0.320 0.271 0.218 0.167 d₂₀ (nm) 111.921 162.536 211.582 280.785 269.056 When n₁ ≧ n₁₀, n_(1m) = 1.933 1.953 1.985 1.975 1.746 When n₁ < n₁₀, n_(1m) = 1.873 1.839 1.852 1.816 1.710 When k₁ ≧ k₁₀, k_(1m) = 0.202 0.184 0.136 0.174 0.081 When k₁ < k₁₀, k_(1m) = 0.122 0.046 0.000 0.000 0.037 When d₁ ≧ d₁₀, d_(1m) 20.550 20.523 19.818 18.551 136.285 (nm) = When d₁ < d₁₀, d_(1m) 16.700 12.791 11.204 8.554 98.008 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.633 1.761 1.845 1.780 1.699 When n₂ < n₂₀, n_(2m) = 1.511 1.579 1.638 1.585 1.620 When k₂ ≧ k₂₀, k_(2m) = 0.430 0.380 0.344 0.283 0.175 When k₂ < k₂₀, k_(2m) = 0.344 0.246 0.196 0.150 0.131 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ 278.211 (nm) = When d₂ < d₂₀, d_(2m) 91.266 127.980 136.666 158.294 243.285 (nm) = 1.2 < NA ≦ 1.3 65 < T ≦ 75 Case 7-06 7-07 7-08 n₁₀ 1.693 1.695 1.695 k₁₀ 0.070 0.061 0.055 d₁₀ (nm) 221.230 218.569 215.552 n₂₀ 1.668 1.689 1.692 k₂₀ 0.236 0.193 0.164 d₂₀ (nm) 151.884 208.598 267.637 When n₁ ≧ n₁₀, n_(1m) = 1.724 1.724 1.741 When n₁ < n₁₀, n_(1m) = 1.686 1.666 1.661 When k₁ ≧ k₁₀, k_(1m) = 0.105 0.101 0.097 When k₁ < k₁₀, k_(1m) = 0.064 0.031 0.021 When d₁ ≧ d₁₀, d_(1m) (nm) = 247.645 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 218.101 197.493 171.385 When n₂ ≧ n₂₀, n_(2m) = 1.689 1.934 1.918 When n₂ < n₂₀, n_(2m) = 1.586 1.609 1.542 When k₂ ≧ k₂₀, k_(2m) = 0.286 0.296 0.281 When k₂ < k₂₀, k_(2m) = 0.205 0.130 0.101 When d₂ ≧ d₂₀, d_(2m) (nm) = 159.193 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 130.698 183.027 188.504

1.2 < NA ≦ 1.3 75 < T ≦ 85 9/21 Case 8-01 8-02 8-03 8-04 8-05 n₁₀ 1.880 1.901 1.874 1.716 1.692 k₁₀ 0.126 0.074 0.095 0.068 0.072 d₁₀ (nm) 16.279 14.624 12.218 99.848 220.366 n₂₀ 1.709 1.778 1.694 1.687 1.668 k₂₀ 0.340 0.284 0.225 0.173 0.244 d₂₀ (nm) 151.148 201.087 271.916 259.863 143.647 When n₁ ≧ n₁₀, n_(1m) = 1.951 1.984 1.974 1.746 1.725 When n₁ < n₁₀, n_(1m) = 1.842 1.857 1.818 1.712 1.688 When k₁ ≧ k₁₀, k_(1m) = 0.181 0.134 0.175 0.079 0.106 When k₁ < k₁₀, k_(1m) = 0.048 0.000 0.000 0.042 0.068 When d₁ ≧ d₁₀, d_(1m) 21.358 20.311 18.650 135.917 245.491 (nm) = When d₁ < d₁₀, d_(1m) 13.627 11.922 8.869 98.660 218.637 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.774 1.856 1.776 1.696 1.688 When n₂ < n₂₀, n_(2m) = 1.592 1.651 1.582 1.624 1.581 When k₂ ≧ k₂₀, k_(2m) = 0.403 0.360 0.289 0.178 0.280 When k₂ < k₂₀, k_(2m) = 0.263 0.208 0.157 0.137 0.214 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ 265.927 149.336 (nm) = When d₂ < d₂₀, d_(2m) 123.537 130.884 183.486 237.438 121.404 (nm) = 1.2 < NA ≦ 1.3 75 < T ≦ 85 Case 8-06 8-07 n₁₀ 1.695 1.695 k₁₀ 0.062 0.056 d₁₀ (nm) 218.447 215.754 n₂₀ 1.688 1.691 k₂₀ 0.198 0.167 d₂₀ (nm) 200.044 258.621 When n₁ ≧ n₁₀, n_(1m) = 1.724 1.740 When n₁ < n₁₀, n_(1m) = 1.667 1.661 When k₁ ≧ k₁₀, k_(1m) = 0.102 0.097 When k₁ < k₁₀, k_(1m) = 0.033 0.022 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 198.178 171.868 When n₂ ≧ n₂₀, n_(2m) = 1.931 1.916 When n₂ < n₂₀, n_(2m) = 1.605 1.542 When k₂ ≧ k₂₀, k_(2m) = 0.296 0.282 When k₂ < k₂₀, k_(2m) = 0.132 0.105 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 172.147 178.623

1.2 < NA ≦ 1.3 85 < T ≦ 95 10/21 Case 9-01 9-02 9-03 9-04 9-05 n₁₀ 1.888 1.903 1.880 1.693 1.695 k₁₀ 0.130 0.081 0.095 0.063 0.064 d₁₀ (nm) 16.763 14.911 12.432 156.037 218.418 n₂₀ 1.718 1.775 1.700 1.696 1.685 k₂₀ 0.366 0.299 0.236 0.165 0.207 d₂₀ (nm) 141.793 193.492 262.434 252.531 192.031 When n₁ ≧ n₁₀, n_(1m) = 1.955 1.983 1.976 1.693 1.725 When n₁ < n₁₀, n_(1m) = 1.853 1.862 1.827 1.659 1.667 When k₁ ≧ k₁₀, k_(1m) = 0.178 0.137 0.171 0.071 0.102 When k₁ < k₁₀, k_(1m) = 0.053 0.000 0.000 0.062 0.036 When d₁ ≧ d₁₀, d_(1m) 21.482 20.338 18.582 156.116 252.664 (nm) = When d₁ < d₁₀, d_(1m) 14.427 12.369 9.315 108.678 198.579 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.777 1.851 1.779 1.766 1.934 When n₂ < n₂₀, n_(2m) = 1.605 1.653 1.583 1.688 1.600 When k₂ ≧ k₂₀, k_(2m) = 0.429 0.373 0.299 0.166 0.298 When k₂ < k₂₀, k_(2m) = 0.289 0.223 0.167 0.129 0.138 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ 252.906 ∞ (nm) = When d₂ < d₂₀, d_(2m) 118.585 127.262 178.673 249.872 164.058 (nm) = 1.2 < NA ≦ 1.3 85 < T ≦ 95 Case 9-06 9-07 n₁₀ 1.695 1.704 k₁₀ 0.057 0.051 d₁₀ (nm) 216.093 278.289 n₂₀ 1.691 1.691 k₂₀ 0.173 0.173 d₂₀ (nm) 249.945 246.105 When n₁ ≧ n₁₀, n_(1m) = 1.738 1.752 When n₁ < n₁₀, n_(1m) = 1.662 1.653 When k₁ ≧ k₁₀, k_(1m) = 0.098 0.092 When k₁ < k₁₀, k_(1m) = 0.022 0.016 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 175.267 172.533 When n₂ ≧ n₂₀, n_(2m) = 1.919 1.830 When n₂ < n₂₀, n_(2m) = 1.543 1.507 When k₂ ≧ k₂₀, k_(2m) = 0.284 0.291 When k₂ < k₂₀, k_(2m) = 0.111 0.108 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 173.633 172.262

1.2 < NA ≦ 1.3 95 < T ≦ 105 11/21 Case 10-01 10-02 10-03 10-04 10-05 10-06 n₁₀ 1.902 1.906 1.888 1.694 1.695 1.704 k₁₀ 0.140 0.093 0.096 0.066 0.059 0.052 d₁₀ (nm) 16.621 14.821 12.503 218.392 216.276 278.098 n₂₀ 1.717 1.761 1.706 1.682 1.691 1.689 k₂₀ 0.393 0.312 0.247 0.217 0.180 0.180 d₂₀ (nm) 134.110 187.587 253.021 183.765 241.184 237.690 When n₁ ≧ n₁₀, n_(1m) = 1.964 1.983 1.982 1.725 1.737 1.752 When n₁ < n₁₀, n_(1m) = 1.874 1.867 1.838 1.666 1.663 1.658 When k₁ ≧ k₁₀, k_(1m) = 0.179 0.146 0.168 0.103 0.098 0.091 When k₁ < k₁₀, k_(1m) = 0.062 0.004 0.000 0.041 0.024 0.019 When d₁ ≧ d₁₀, d_(1m) (nm) = 20.729 19.885 18.297 250.100 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 14.862 12.520 9.652 198.830 185.832 180.136 When n₂ ≧ n₂₀, n_(2m) = 1.767 1.831 1.783 1.944 1.927 1.847 When n₂ < n₂₀, n_(2m) = 1.609 1.641 1.584 1.598 1.559 1.512 When k₂ ≧ k₂₀, k_(2m) = 0.449 0.380 0.309 0.303 0.288 0.296 When k₂ < k₂₀, k_(2m) = 0.320 0.238 0.178 0.149 0.117 0.113 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 113.506 124.690 172.558 157.077 167.184 165.978

1.2 < NA ≦ 1.3 105 < T ≦ 115 12/21 Case 11-01 11-02 11-03 11-04 11-05 n₁₀ 1.915 1.908 1.895 1.692 1.694 k₁₀ 0.153 0.105 0.097 0.060 0.068 d₁₀ (nm) 15.972 14.452 12.386 153.833 218.491 n₂₀ 1.700 1.741 1.708 1.696 1.679 k₂₀ 0.410 0.319 0.254 0.152 0.227 d₂₀ (nm) 128.035 181.864 244.026 294.292 174.638 When n₁ ≧ n₁₀, n_(1m) = 1.973 1.983 1.987 1.719 1.723 When n₁ < n₁₀, n_(1m) = 1.893 1.872 1.847 1.655 1.669 When k₁ ≧ k₁₀, k_(1m) = 0.185 0.156 0.167 0.093 0.104 When k₁ < k₁₀, k_(1m) = 0.078 0.017 0.000 0.039 0.045 When d₁ ≧ d₁₀, d_(1m) 19.455 19.144 17.845 ∞ 247.764 (nm) = When d₁ < d₁₀, d_(1m) 14.744 12.421 9.756 107.765 205.861 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.741 1.806 1.782 1.782 1.753 When n₂ < n₂₀, n_(2m) = 1.596 1.623 1.583 1.640 1.603 When k₂ ≧ k₂₀, k_(2m) = 0.453 0.379 0.315 0.185 0.311 When k₂ < k₂₀, k_(2m) = 0.345 0.249 0.187 0.106 0.163 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 107.965 122.284 164.682 240.729 150.727 (nm) = 1.2 < NA ≦ 1.3 105 < T ≦ 115 Case 11-06 11-07 n₁₀ 1.695 1.705 k₁₀ 0.060 0.054 d₁₀ (nm) 216.291 277.828 n₂₀ 1.691 1.688 k₂₀ 0.187 0.185 d₂₀ (nm) 231.949 228.622 When n₁ ≧ n₁₀, n_(1m) = 1.736 1.751 When n₁ < n₁₀, n_(1m) = 1.664 1.660 When k₁ ≧ k₁₀, k_(1m) = 0.099 0.091 When k₁ < k₁₀, k_(1m) = 0.026 0.021 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 188.964 182.620 When n₂ ≧ n₂₀, n_(2m) = 1.938 1.860 When n₂ < n₂₀, n_(2m) = 1.577 1.505 When k₂ ≧ k₂₀, k_(2m) = 0.293 0.298 When k₂ < k₂₀, k_(2m) = 0.122 0.117 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 190.206 157.223

1.2 < NA ≦ 1.3 115 < T ≦ 125 13/21 Case 12-01 12-02 12-03 12-04 12-05 n₁₀ 1.919 1.909 1.897 1.692 1.694 k₁₀ 0.168 0.114 0.102 0.061 0.069 d₁₀ (nm) 15.470 14.219 12.252 153.490 218.807 n₂₀ 1.675 1.728 1.703 1.695 1.679 k₂₀ 0.416 0.323 0.257 0.154 0.236 d₂₀ (nm) 121.998 174.431 235.332 285.775 164.294 When n₁ ≧ n₁₀, n_(1m) = 1.974 1.983 1.989 1.719 1.720 When n₁ < n₁₀, n_(1m) = 1.903 1.876 1.851 1.657 1.674 When k₁ ≧ k₁₀, k_(1m) = 0.194 0.163 0.171 0.093 0.104 When k₁ < k₁₀, k_(1m) = 0.095 0.028 0.000 0.043 0.048 When d₁ ≧ d₁₀, d_(1m) 18.537 18.641 17.506 176.125 245.819 (nm) = When d₁ < d₁₀, d_(1m) 14.577 12.379 9.747 108.056 210.037 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.708 1.790 1.776 1.773 1.745 When n₂ < n₂₀, n_(2m) = 1.572 1.608 1.579 1.640 1.616 When k₂ ≧ k₂₀, k_(2m) = 0.448 0.378 0.316 0.184 0.323 When k₂ < k₂₀, k_(2m) = 0.357 0.255 0.190 0.115 0.176 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 99.374 118.240 154.295 239.447 146.164 (nm) = 1.2 < NA ≦ 1.3 115 < T ≦ 125 Case 12-06 12-07 12-08 n₁₀ 1.695 1.696 1.706 k₁₀ 0.061 0.056 0.051 d₁₀ (nm) 216.166 214.076 276.333 n₂₀ 1.690 1.694 1.706 k₂₀ 0.192 0.163 0.162 d₂₀ (nm) 222.296 280.805 273.925 When n₁ ≧ n₁₀, n_(1m) = 1.728 1.750 1.770 When n₁ < n₁₀, n_(1m) = 1.664 1.664 1.647 When k₁ ≧ k₁₀, k_(1m) = 0.099 0.099 0.090 When k₁ < k₁₀, k_(1m) = 0.029 0.023 0.020 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 190.492 185.642 181.694 When n₂ ≧ n₂₀, n_(2m) = 1.826 1.931 1.851 When n₂ < n₂₀, n_(2m) = 1.594 1.560 1.519 When k₂ ≧ k₂₀, k_(2m) = 0.297 0.283 0.279 When k₂ < k₂₀, k_(2m) = 0.128 0.103 0.095 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 188.671 203.385 188.718

1.2 < NA ≦ 1.3 125 < T ≦ 135 14/21 Case 13-01 13-02 13-03 13-04 13-05 n₁₀ 1.909 1.895 1.879 1.694 1.695 k₁₀ 0.116 0.106 0.083 0.071 0.063 d₁₀ (nm) 14.671 12.483 11.828 219.020 215.746 n₂₀ 1.733 1.700 1.710 1.682 1.690 k₂₀ 0.334 0.261 0.220 0.245 0.197 d₂₀ (nm) 163.102 225.249 280.433 153.670 212.983 When n₁ ≧ n₁₀, n_(1m) = 1.981 1.985 1.982 1.717 1.723 When n₁ < n₁₀, n_(1m) = 1.878 1.850 1.819 1.677 1.665 When k₁ ≧ k₁₀, k_(1m) = 0.162 0.173 0.169 0.103 0.099 When k₁ < k₁₀, k_(1m) = 0.035 0.004 0.000 0.051 0.034 When d₁ ≧ d₁₀, d_(1m) 19.040 17.738 18.242 233.783 ∞ (nm) = When d₁ < d₁₀, d_(1m) 12.910 9.987 8.329 211.731 191.269 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.795 1.771 1.785 1.724 1.797 When n₂ < n₂₀, n_(2m) = 1.610 1.575 1.592 1.634 1.609 When k₂ ≧ k₂₀, k_(2m) = 0.389 0.319 0.285 0.337 0.302 When k₂ < k₂₀, k_(2m) = 0.261 0.192 0.153 0.187 0.133 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 109.327 144.773 164.318 140.585 192.523 (nm) = 1.2 < NA ≦ 1.3 125 < T ≦ 135 Case 13-06 13-07 n₁₀ 1.696 1.706 k₁₀ 0.057 0.052 d₁₀ (nm) 213.723 276.363 n₂₀ 1.693 1.706 k₂₀ 0.165 0.164 d₂₀ (nm) 271.596 264.087 When n₁ ≧ n₁₀, n_(1m) = 1.749 1.772 When n₁ < n₁₀, n_(1m) = 1.664 1.645 When k₁ ≧ k₁₀, k_(1m) = 0.099 0.090 When k₁ < k₁₀, k_(1m) = 0.026 0.022 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 186.782 182.830 When n₂ ≧ n₂₀, n_(2m) = 1.934 1.851 When n₂ < n₂₀, n_(2m) = 1.561 1.521 When k₂ ≧ k₂₀, k_(2m) = 0.285 0.282 When k₂ < k₂₀, k_(2m) = 0.104 0.097 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 198.444 183.298

1.2 < NA ≦ 1.3 135 < T ≦ 145 15/21 Case 14-01 14-02 14-03 14-04 14-05 n₁₀ 1.910 1.892 1.879 1.694 1.694 k₁₀ 0.115 0.109 0.084 0.072 0.064 d₁₀ (nm) 15.725 12.960 12.187 218.706 215.091 n₂₀ 1.755 1.698 1.712 1.684 1.689 k₂₀ 0.355 0.268 0.226 0.254 0.201 d₂₀ (nm) 150.207 215.505 270.397 144.577 204.614 When n₁ ≧ n₁₀, n_(1m) = 1.980 1.980 1.979 1.708 1.720 When n₁ < n₁₀, n_(1m) = 1.881 1.848 1.820 1.676 1.666 When k₁ ≧ k₁₀, k_(1m) = 0.157 0.174 0.167 0.100 0.099 When k₁ < k₁₀, k_(1m) = 0.036 0.011 0.000 0.054 0.038 When d₁ ≧ d₁₀, d_(1m) 20.158 18.254 18.627 231.071 ∞ (nm) = When d₁ < d₁₀, d_(1m) 14.003 10.450 8.694 211.497 191.698 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.818 1.767 1.787 1.721 1.802 When n₂ < n₂₀, n_(2m) = 1.632 1.571 1.592 1.649 1.619 When k₂ ≧ k₂₀, k_(2m) = 0.415 0.327 0.291 0.345 0.308 When k₂ < k₂₀, k_(2m) = 0.275 0.197 0.157 0.200 0.145 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ 160.527 ∞ (nm) = When d₂ < d₂₀, d_(2m) 119.641 139.482 181.534 134.106 186.758 (nm) = 1.2 < NA ≦ 1.3 135 < T ≦ 145 Case 14-06 14-07 n₁₀ 1.696 1.706 k₁₀ 0.058 0.052 d₁₀ (nm) 213.482 276.472 n₂₀ 1.692 1.707 k₂₀ 0.169 0.168 d₂₀ (nm) 262.678 254.823 When n₁ ≧ n₁₀, n_(1m) = 1.748 1.771 When n₁ < n₁₀, n_(1m) = 1.665 1.644 When k₁ ≧ k₁₀, k_(1m) = 0.100 0.090 When k₁ < k₁₀, k_(1m) = 0.028 0.024 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 188.144 184.314 When n₂ ≧ n₂₀, n_(2m) = 1.933 1.854 When n₂ < n₂₀, n_(2m) = 1.561 1.522 When k₂ ≧ k₂₀, k_(2m) = 0.288 0.286 When k₂ < k₂₀, k_(2m) = 0.109 0.100 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 191.540 174.816

1.2 < NA ≦ 1.3 145 < T ≦ 155 16/21 Case 15-01 15-02 15-03 15-04 15-05 n₁₀ 1.919 1.893 1.882 1.694 1.694 k₁₀ 0.115 0.113 0.085 0.074 0.065 d₁₀ (nm) 16.638 13.413 12.438 217.741 214.737 n₂₀ 1.785 1.697 1.715 1.683 1.687 k₂₀ 0.385 0.281 0.235 0.264 0.207 d₂₀ (nm) 138.580 206.656 261.237 137.032 196.488 When n₁ ≧ n₁₀, n_(1m) = 1.986 1.976 1.980 1.705 1.718 When n₁ < n₁₀, n_(1m) = 1.892 1.851 1.826 1.676 1.666 When k₁ ≧ k₁₀, k_(1m) = 0.151 0.174 0.165 0.099 0.100 When k₁ < k₁₀, k_(1m) = 0.037 0.018 0.000 0.060 0.040 When d₁ ≧ d₁₀, d_(1m) 20.946 18.588 18.692 227.547 ∞ (nm) = When d₁ < d₁₀, d_(1m) 15.073 10.996 9.087 210.480 192.120 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.846 1.763 1.789 1.722 1.834 When n₂ < n₂₀, n_(2m) = 1.665 1.571 1.591 1.652 1.629 When k₂ ≧ k₂₀, k_(2m) = 0.451 0.339 0.301 0.337 0.312 When k₂ < k₂₀, k_(2m) = 0.301 0.209 0.166 0.217 0.151 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ 149.574 ∞ (nm) = When d₂ < d₂₀, d_(2m) 113.921 135.398 177.745 128.876 178.069 (nm) = 1.2 < NA ≦ 1.3 145 < T ≦ 155 Case 15-06 15-07 n₁₀ 1.695 1.707 k₁₀ 0.059 0.053 d₁₀ (nm) 213.710 276.548 n₂₀ 1.692 1.707 k₂₀ 0.173 0.174 d₂₀ (nm) 253.675 246.168 When n₁ ≧ n₁₀, n_(1m) = 1.747 1.770 When n₁ < n₁₀, n_(1m) = 1.665 1.645 When k₁ ≧ k₁₀, k_(1m) = 0.100 0.089 When k₁ < k₁₀, k_(1m) = 0.029 0.025 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 189.864 185.926 When n₂ ≧ n₂₀, n_(2m) = 1.910 1.858 When n₂ < n₂₀, n_(2m) = 1.562 1.520 When k₂ ≧ k₂₀, k_(2m) = 0.289 0.291 When k₂ < k₂₀, k_(2m) = 0.109 0.103 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 189.584 169.414

1.2 < NA ≦ 1.3 155 < T ≦ 165 17/21 Case 16-01 16-02 16-03 16-04 16-05 n₁₀ 1.937 1.898 1.890 1.694 1.694 k₁₀ 0.118 0.119 0.087 0.077 0.067 d₁₀ (nm) 16.771 13.576 12.460 216.630 214.866 n₂₀ 1.806 1.695 1.718 1.679 1.684 k₂₀ 0.418 0.295 0.246 0.277 0.215 d₂₀ (nm) 129.251 198.434 252.589 129.875 188.027 When n₁ ≧ n₁₀, n_(1m) = 2.001 1.978 1.985 1.707 1.716 When n₁ < n₁₀, n_(1m) = 1.914 1.859 1.836 1.685 1.666 When k₁ ≧ k₁₀, k_(1m) = 0.148 0.176 0.164 0.101 0.100 When k₁ < k₁₀, k_(1m) = 0.045 0.025 0.000 0.067 0.040 When d₁ ≧ d₁₀, d_(1m) 20.691 18.424 18.356 225.238 231.093 (nm) = When d₁ < d₁₀, d_(1m) 15.556 11.376 9.363 212.673 192.697 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.861 1.756 1.791 1.715 1.840 When n₂ < n₂₀, n_(2m) = 1.690 1.574 1.591 1.643 1.628 When k₂ ≧ k₂₀, k_(2m) = 0.481 0.351 0.310 0.328 0.314 When k₂ < k₂₀, k_(2m) = 0.336 0.225 0.176 0.223 0.151 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ 139.199 ∞ (nm) = When d₂ < d₂₀, d_(2m) 109.768 131.712 172.718 120.241 167.595 (nm) = 1.2 < NA ≦ 1.3 155 < T ≦ 165 Case 16-06 16-07 n₁₀ 1.695 1.707 k₁₀ 0.060 0.054 d₁₀ (nm) 214.034 276.376 n₂₀ 1.692 1.707 k₂₀ 0.179 0.181 d₂₀ (nm) 244.657 237.806 When n₁ ≧ n₁₀, n_(1m) = 1.745 1.770 When n₁ < n₁₀, n_(1m) = 1.666 1.653 When k₁ ≧ k₁₀, k_(1m) = 0.101 0.089 When k₁ < k₁₀, k_(1m) = 0.030 0.027 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 191.630 187.468 When n₂ ≧ n₂₀, n_(2m) = 1.889 1.864 When n₂ < n₂₀, n_(2m) = 1.562 1.515 When k₂ ≧ k₂₀, k_(2m) = 0.290 0.295 When k₂ < k₂₀, k_(2m) = 0.115 0.110 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 179.119 164.223

1.2 < NA ≦ 1.3 165 < T ≦ 175 18/21 Case 17-01 17-02 17-03 17-04 17-05 n₁₀ 1.958 1.903 1.898 1.694 1.694 k₁₀ 0.128 0.127 0.090 0.080 0.068 d₁₀ (nm) 15.815 13.420 12.296 215.821 215.165 n₂₀ 1.794 1.688 1.719 1.668 1.681 k₂₀ 0.439 0.307 0.254 0.290 0.224 d₂₀ (nm) 123.830 190.984 244.231 122.663 179.093 When n₁ ≧ n₁₀, n_(1m) = 2.020 1.981 1.991 1.707 1.716 When n₁ < n₁₀, n_(1m) = 1.942 1.867 1.846 1.692 1.665 When k₁ ≧ k₁₀, k_(1m) = 0.150 0.182 0.165 0.103 0.101 When k₁ < k₁₀, k_(1m) = 0.058 0.033 0.000 0.077 0.041 When d₁ ≧ d₁₀, d_(1m) 19.257 17.848 17.802 223.701 230.268 (nm) = When d₁ < d₁₀, d_(1m) 15.087 11.461 9.465 215.120 195.890 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.832 1.743 1.790 1.677 1.826 When n₂ < n₂₀, n_(2m) = 1.680 1.570 1.590 1.625 1.625 When k₂ ≧ k₂₀, k_(2m) = 0.483 0.357 0.316 0.321 0.315 When k₂ < k₂₀, k_(2m) = 0.365 0.239 0.186 0.252 0.151 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ 127.631 ∞ (nm) = When d₂ < d₂₀, d_(2m) 111.992 128.672 166.465 109.461 158.121 (nm) = 1.2 < NA ≦ 1.3 165 < T ≦ 175 Case 17-06 17-07 n₁₀ 1.696 1.707 k₁₀ 0.061 0.056 d₁₀ (nm) 214.210 275.996 n₂₀ 1.692 1.705 k₂₀ 0.185 0.187 d₂₀ (nm) 235.479 229.352 When n₁ ≧ n₁₀, n_(1m) = 1.744 1.770 When n₁ < n₁₀, n_(1m) = 1.667 1.657 When k₁ ≧ k₁₀, k_(1m) = 0.101 0.088 When k₁ < k₁₀, k_(1m) = 0.031 0.030 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 193.216 188.863 When n₂ ≧ n₂₀, n_(2m) = 1.887 1.872 When n₂ < n₂₀, n_(2m) = 1.561 1.509 When k₂ ≧ k₂₀, k_(2m) = 0.292 0.295 When k₂ < k₂₀, k_(2m) = 0.120 0.115 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 161.210 156.975

1.2 < NA ≦ 1.3 175 < T ≦ 185 19/21 Case 18-01 18-02 18-03 18-04 18-05 n₁₀ 1.907 1.904 1.694 1.696 21.704 k₁₀ 0.135 0.092 0.070 0.062 0.051 d₁₀ (nm) 13.188 12.121 215.718 214.371 274.345 n₂₀ 1.679 1.720 1.679 1.692 1.687 k₂₀ 0.313 0.260 0.233 0.190 0.159 d₂₀ (nm) 183.151 235.214 169.072 225.802 280.556 When n₁ ≧ n₁₀, n_(1m) = 1.982 1.997 1.715 1.743 1.760 When n₁ < n₁₀, n_(1m) = 1.873 1.854 1.666 1.668 1.658 When k₁ ≧ k₁₀, k_(1m) = 0.188 0.166 0.102 0.102 0.090 When k₁ < k₁₀, k_(1m) = 0.044 0.000 0.044 0.032 0.018 When d₁ ≧ d₁₀, d_(1m) 17.244 17.308 229.740 ∞ ∞ (nm) = When d₁ < d₁₀, d_(1m) 11.395 9.486 201.461 194.630 174.558 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.730 1.790 1.771 1.836 1.900 When n₂ < n₂₀, n_(2m) = 1.562 1.589 1.630 1.559 1.518 When k₂ ≧ k₂₀, k_(2m) = 0.359 0.319 0.318 0.293 0.259 When k₂ < k₂₀, k_(2m) = 0.249 0.193 0.159 0.124 0.097 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 128.127 156.903 151.088 157.464 192.992 (nm) =

1.2 < NA ≦ 1.3 185 < T ≦ 195 20/21 Case 19-01 19-02 19-03 19-04 19-05 n₁₀ 1.908 1.906 1.889 1.693 1.696 k₁₀ 0.140 0.092 0.087 0.071 0.064 d₁₀ (nm) 13.288 12.370 11.418 216.427 214.510 n₂₀ 1.676 1.726 1.707 1.681 1.692 k₂₀ 0.321 0.266 0.223 0.243 0.195 d₂₀ (nm) 172.696 223.910 283.898 158.126 215.938 When n₁ ≧ n₁₀, n_(1m) = 1.981 1.996 1.994 1.713 1.742 When n₁ < n₁₀, n_(1m) = 1.875 1.857 1.834 1.670 1.669 When k₁ ≧ k₁₀, k_(1m) = 0.190 0.163 0.168 0.103 0.102 When k₁ < k₁₀, k_(1m) = 0.055 0.000 0.000 0.051 0.037 When d₁ ≧ d₁₀, d_(1m) 17.148 17.446 17.407 228.093 ∞ (nm) = When d₁ < d₁₀, d_(1m) 11.532 9.791 8.458 205.012 195.805 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.725 1.797 1.791 1.767 1.825 When n₂ < n₂₀, n_(2m) = 1.558 1.592 1.590 1.647 1.558 When k₂ ≧ k₂₀, k_(2m) = 0.365 0.327 0.286 0.323 0.294 When k₂ < k₂₀, k_(2m) = 0.256 0.198 0.157 0.178 0.130 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 125.060 143.864 171.207 144.997 180.034 (nm) = 1.2 < NA ≦ 1.3 185 < T ≦ 195 Case 19-06 19-07 n₁₀ 1.696 1.704 k₁₀ 0.057 0.052 d₁₀ (nm) 213.492 274.677 n₂₀ 1.691 1.687 k₂₀ 0.166 0.162 d₂₀ (nm) 273.809 270.432 When n₁ ≧ n₁₀, n_(1m) = 1.742 1.760 When n₁ < n₁₀, n_(1m) = 1.666 1.659 When k₁ ≧ k₁₀, k_(1m) = 0.097 0.090 When k₁ < k₁₀, k_(1m) = 0.026 0.022 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 178.602 175.003 When n₂ ≧ n₂₀, n_(2m) = 1.857 1.904 When n₂ < n₂₀, n_(2m) = 1.570 1.518 When k₂ ≧ k₂₀, k_(2m) = 0.281 0.262 When k₂ < k₂₀, k_(2m) = 0.104 0.096 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 199.693 186.949

1.2 < NA ≦ 1.3 195 < T ≦ 205 21/21 Case 20-01 20-02 20-03 20-04 20-05 n₁₀ 1.907 1.904 1.887 1.693 1.696 k₁₀ 0.139 0.091 0.088 0.073 0.065 d₁₀ (nm) 13.915 13.010 11.752 216.656 214.259 n₂₀ 1.684 1.734 1.707 1.683 1.692 k₂₀ 0.334 0.275 0.227 0.253 0.201 d₂₀ (nm) 160.500 212.141 273.737 148.279 206.980 When n₁ ≧ n₁₀, n_(1m) = 1.978 1.992 1.990 1.700 1.743 When n₁ < n₁₀, n_(1m) = 1.874 1.857 1.833 1.671 1.670 When k₁ ≧ k₁₀, k_(1m) = 0.186 0.158 0.167 0.098 0.102 When k₁ < k₁₀, k_(1m) = 0.059 0.000 0.000 0.062 0.044 When d₁ ≧ d₁₀, d_(1m) 17.817 18.151 17.811 226.068 265.367 (nm) = When d₁ < d₁₀, d_(1m) 12.124 10.391 8.783 207.088 196.420 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.731 1.806 1.791 1.746 1.815 When n₂ < n₂₀, n_(2m) = 1.564 1.602 1.588 1.669 1.556 When k₂ ≧ k₂₀, k_(2m) = 0.381 0.338 0.291 0.321 0.294 When k₂ < k₂₀, k_(2m) = 0.265 0.202 0.159 0.212 0.142 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 125.465 136.447 180.411 144.423 187.001 (nm) = 1.2 < NA ≦ 1.3 195 < T ≦ 205 Case 20-06 20-07 n₁₀ 1.696 1.704 k₁₀ 0.058 0.053 d₁₀ (nm) 213.637 275.120 n₂₀ 1.690 1.687 k₂₀ 0.169 0.165 d₂₀ (nm) 264.528 260.887 When n₁ ≧ n₁₀, n_(1m) = 1.742 1.760 When n₁ < n₁₀, n_(1m) = 1.666 1.661 When k₁ ≧ k₁₀, k_(1m) = 0.097 0.090 When k₁ < k₁₀, k_(1m) = 0.030 0.025 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 183.526 175.348 When n₂ ≧ n₂₀, n_(2m) = 1.856 1.912 When n₂ < n₂₀, n_(2m) = 1.571 1.519 When k₂ ≧ k₂₀, k_(2m) = 0.282 0.268 When k₂ < k₂₀, k_(2m) = 0.108 0.102 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 202.896 181.779

In accordance with a fifth embodiment of the invention, an antireflective film has a two-layer structure and is used in a process for manufacturing a semiconductor device by being provided between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, for exposure of the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.3<NA≦1.4. In accordance with the fifth embodiment of the invention, an exposure method used in a process for manufacturing a semiconductor device and includes providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.3<NA≦1.4.

The antireflective film or the antireflective film used in the exposure method according to the fifth embodiment of the invention includes an upper layer having a complex refractive index N, and a lower layer having a complex refractive index N₂, the complex refractive indexes N₁ and N₂ being represented by the following equations: N ₁ =n ₁ −k ₁ i N ₂ =n ₂ −k ₂ i Assuming that the thickness of the upper layer is d₁ (unit: nm) and the thickness of the lower layer is d₂ (unit: nm), when any one of the combinations of values of [n₁₀, k₁₀, d₁₀, n₂₀, k₂₀, d₂₀] described below is selected depending on the thickness T of the silicon oxide film, n₁, k₁, d₁, n₂, k₂, and d₂ satisfy the following relational expression: {(n ₁ −n ₁₀)/(n _(1m) −n ₁₀)}²+{(k ₁ −k ₁₀)/(k _(1m) −k ₁₀)}²+{(d ₁ −d ₁₀)/(d _(1m) −d ₁₀)}²+{(n ₂ −n ₂₀)/(n _(2m) −n ₂₀)}²+{(k ₂ −k ₂₀)/(k _(2m) −k ₂₀)}²+{(d ₂ −d ₂₀)/(d _(2m) −d ₂₀)}²≦1

However, a value of n_(1m) in a corresponding case is selected on the basis of a magnitude relation between n₁ and n₁₀; a value of k_(1m) in a corresponding case is selected on the basis of a magnitude relation between k₁ and k₁₀; a value of d_(1m) in a corresponding case is selected on the basis of a magnitude relation between d₁ and d₁₀; a value of n_(2m) in a corresponding case is selected on the basis of a magnitude relation between n₂ and n₂₀; a value of k_(2m) in a corresponding case is selected on the basis of a magnitude relation between k₂ and k₂₀; and a value of d_(2m) in a corresponding case is selected on the basis of a magnitude relation between d₂ and d₂₀. In the tables below, in the line of “When n₁≧n₁₀, n_(1m)=”, each value in the right columns is “n_(1m)−n₁₀”; in the line of “When n₁<n₁₀, n_(1m)=”, each value in the right columns is “n₁₀−n_(1m)”; in the line of “When k₁≧k₁₀, k_(1m)=”, each value in the right columns is “k_(1m)−k₁₀”; in the line of “When k₁<k₁₀, k_(1m)=”, each value in the right columns is “k₁₀−k_(1m)”; in the line of “When d₁≧d₁₀, d_(1m) (nm)=”, each value (unit: nm) in the right columns is “d_(1m)−d₁₀”; in the line of “When d₁<d₁₀, d_(1m) (nm)=”, each value (unit: nm) in the right columns is “d₁₀−d_(1m)”; in the line of “When n₂≧n₂₀, n_(2m)=”, each value in the right columns is “n_(2m)−n₂₀”; in the line of “When n₂<n₂₀, n_(2m)=”, each value in the right columns is “n₂₀−n_(2m)”; in the line of “When k₂≧k₂₀, k_(2m)=”, each value in the right columns is “k_(2m)−k₂₀”; in the line of “When k₂<k₂₀, k_(2m)=”, each value in the right columns is “k₂₀−k_(2m)”; in the line of “When d₂≧d₂₀, d_(2m) (nm)=”, each value (unit: nm) in the right columns is “d_(2m)−d₂₀”; and in the line of “When d₂<d₂₀, d_(2m) (nm)=”, each value (unit: nm) in the right columns is “d₂₀−d_(2m)”.

1.3 < NA ≦ 1.4 2 ≦ T ≦ 15 1/20 Case 1-01 1-02 1-03 1-04 1-05 n₁₀ 2.047 1.887 1.871 1.868 1.862 k₁₀ 0.012 0.120 0.106 0.075 0.065 d₁₀ (nm) 29.751 26.980 17.106 15.339 13.830 n₂₀ 6.274 1.973 1.713 1.738 1.730 k₂₀ 3.305 0.477 0.298 0.245 0.208 d₂₀ (nm) 1.566 76.285 158.161 212.612 271.884 When n₁ ≧ n₁₀, n_(1m) = 2.109 1.929 1.924 1.935 1.940 When n₁ < n₁₀, n_(1m) = 1.990 1.877 1.852 1.835 1.823 When k₁ ≧ k₁₀, k_(1m) = 0.055 0.138 0.136 0.123 0.124 When k₁ < k₁₀, k_(1m) = 0.000 0.089 0.036 0.000 0.000 When d₁ ≧ d₁₀, d_(1m) 32.767 31.708 21.551 20.868 20.183 (nm) = When d₁ < d₁₀, d_(1m) 27.509 26.309 15.640 12.771 10.913 (nm) = When n₂ ≧ n₂₀, n_(2m) = 6.594 2.028 1.750 1.789 1.793 When n₂ < n₂₀, n_(2m) = 5.978 1.933 1.627 1.639 1.618 When k₂ ≧ k₂₀, k_(2m) = 3.556 0.507 0.335 0.292 0.258 When k₂ < k₂₀, k_(2m) = 3.013 0.403 0.242 0.188 0.152 When d₂ ≧ d₂₀, d_(2m) 1.715 83.056 ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 1.418 75.266 136.202 175.723 191.206 (nm) = 1.3 < NA ≦ 1.4 2 ≦ T ≦ 15 Case 1-06 1-07 1-08 1-09 1-10 n₁₀ 1.691 1.692 1.711 1.704 1.705 k₁₀ 0.062 0.057 0.070 0.057 0.050 d₁₀ (nm) 161.852 157.460 239.891 226.155 221.451 n₂₀ 1.688 1.697 7.420 1.689 1.695 k₂₀ 0.179 0.154 3.291 0.187 0.158 d₂₀ (nm) 207.262 266.043 0.810 202.908 261.182 When n₁ ≧ n₁₀, n_(1m) = 1.703 1.707 1.725 1.738 1.736 When n₁ < n₁₀, n_(1m) = 1.685 1.664 1.704 1.690 1.688 When k₁ ≧ k₁₀, k_(1m) = 0.080 0.084 0.082 0.082 0.079 When k₁ < k₁₀, k_(1m) = 0.051 0.029 0.049 0.029 0.022 When d₁ ≧ d₁₀, d_(1m) 169.125 171.143 250.745 ∞ ∞ (nm) = When d₁ < d₁₀, d_(1m) 157.974 129.944 235.697 215.124 204.319 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.696 1.748 7.849 1.818 1.809 When n₂ < n₂₀, n_(2m) = 1.666 1.665 7.185 1.613 1.611 When k₂ ≧ k₂₀, k_(2m) = 0.202 0.195 3.465 0.264 0.246 When k₂ < k₂₀, k_(2m) = 0.150 0.115 2.625 0.129 0.105 When d₂ ≧ d₂₀, d_(2m) 213.501 ∞ 0.893 ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 194.001 249.665 0.721 179.167 225.188 (nm) =

1.3 < NA ≦ 1.4 2 ≦ T ≦ 15 2/20 Case 1-11 n₁₀ 1.695 k₁₀ 0.054 d₁₀ (nm) 267.286 n₂₀ 1.705 k₂₀ 0.184 d₂₀ (nm) 212.751 When n₁ ≧ n₁₀, n_(1m) = 1.731 When n₁ < n₁₀, n_(1m) = 1.655 When k₁ ≧ k₁₀, k_(1m) = 0.080 When k₁ < k₁₀, k_(1m) = 0.025 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ When d₁ < d₁₀, d_(1m) (nm) = 220.771 When n₂ ≧ n₂₀, n_(2m) = 1.808 When n₂ < n₂₀, n_(2m) = 1.623 When k₂ ≧ k₂₀, k_(2m) = 0.237 When k₂ < k₂₀, k_(2m) = 0.115 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ When d₂ < d₂₀, d_(2m) (nm) = 175.645

1.3 < NA ≦ 1.4 15 < T ≦ 25 3/20 Case 2-01 2-02 2-03 2-04 2-05 n₁₀ 1.943 1.876 1.873 1.866 1.691 k₁₀ 0.121 0.112 0.080 0.068 0.064 d₁₀ (nm) 34.905 17.699 15.588 14.042 161.844 n₂₀ 6.149 1.719 1.739 1.732 1.687 k₂₀ 4.965 0.321 0.258 0.217 0.188 d₂₀ (nm) 1.046 148.502 203.950 262.757 198.716 When n₁ ≧ n₁₀, n_(1m) = 1.997 1.925 1.936 1.942 1.700 When n₁ < n₁₀, n_(1m) = 1.902 1.861 1.842 1.830 1.690 When k₁ ≧ k₁₀, k_(1m) = 0.155 0.135 0.124 0.122 0.079 When k₁ < k₁₀, k_(1m) = 0.064 0.044 0.004 0.000 0.061 When d₁ ≧ d₁₀, d_(1m) 38.478 21.745 20.735 20.064 166.973 (nm) = When d₁ < d₁₀, d_(1m) 32.365 16.569 13.305 11.354 161.165 (nm) = When n₂ ≧ n₂₀, n_(2m) = 6.640 1.749 1.787 1.793 1.688 When n₂ < n₂₀, n_(2m) = 5.695 1.636 1.643 1.623 1.668 When k₂ ≧ k₂₀, k_(2m) = 5.267 0.354 0.304 0.266 0.197 When k₂ < k₂₀, k_(2m) = 4.500 0.266 0.202 0.162 0.165 When d₂ ≧ d₂₀, d_(2m) 1.189 ∞ ∞ ∞ 199.493 (nm) = When d₂ < d₂₀, d_(2m) 0.912 129.925 173.046 186.094 188.055 (nm) = 1.3 < NA ≦ 1.4 15 < T ≦ 25 Case 2-06 2-07 2-08 2-09 2-10 n₁₀ 1.692 1.706 1.711 1.704 1.695 k₁₀ 0.059 0.052 0.075 0.059 0.056 d₁₀ (nm) 157.652 221.303 235.815 225.762 267.452 n₂₀ 1.696 1.695 6.235 1.687 1.705 k₂₀ 0.161 0.165 4.691 0.197 0.194 d₂₀ (nm) 257.279 252.591 0.724 194.502 204.028 When n₁ ≧ n₁₀, n_(1m) = 1.703 1.736 1.711 1.737 1.730 When n₁ < n₁₀, n_(1m) = 1.667 1.690 1.709 1.692 1.658 When k₁ ≧ k₁₀, k_(1m) = 0.082 0.079 0.079 0.082 0.080 When k₁ < k₁₀, k_(1m) = 0.033 0.024 0.074 0.033 0.029 When d₁ ≧ d₁₀, d_(1m) 165.499 ∞ 235.852 ∞ ∞ (nm) = When d₁ < d₁₀, d_(1m) 138.474 207.206 234.721 216.211 222.458 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.740 1.797 6.407 1.814 1.798 When n₂ < n₂₀, n_(2m) = 1.670 1.616 6.233 1.613 1.629 When k₂ ≧ k₂₀, k_(2m) = 0.196 0.249 4.693 0.270 0.240 When k₂ < k₂₀, k_(2m) = 0.121 0.111 3.940 0.138 0.122 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ 0.732 ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 244.077 220.690 0.720 173.495 171.776 (nm) =

1.3 < NA ≦ 1.4 25 < T ≦ 35 4/20 Case 3-01 3-02 3-03 3-04 3-05 3-06 n₁₀ 1.883 1.879 1.872 1.692 1.705 1.706 k₁₀ 0.119 0.084 0.069 0.061 0.061 0.054 d₁₀ (nm) 18.157 15.746 14.214 157.790 225.478 221.123 n₂₀ 1.723 1.741 1.737 1.697 1.687 1.695 k₂₀ 0.349 0.274 0.228 0.168 0.209 0.173 d₂₀ (nm) 139.788 195.542 253.893 248.784 186.105 244.149 When n₁ ≧ n₁₀, n_(1m) = 1.927 1.939 1.945 1.699 1.735 1.735 When n₁ < n₁₀, n_(1m) = 1.873 1.852 1.839 1.671 1.694 1.692 When k₁ ≧ k₁₀, k_(1m) = 0.135 0.123 0.119 0.079 0.082 0.078 When k₁ < k₁₀, k_(1m) = 0.055 0.011 0.000 0.039 0.038 0.026 When d₁ ≧ d₁₀, d_(1m) (nm) = 21.683 20.446 19.836 161.921 270.295 ∞ When d₁ < d₁₀, d_(1m) (nm) = 17.423 13.775 11.786 145.560 217.505 209.346 When n₂ ≧ n₂₀, n_(2m) = 1.744 1.786 1.794 1.735 1.754 1.781 When n₂ < n₂₀, n_(2m) = 1.647 1.650 1.632 1.679 1.615 1.622 When k₂ ≧ k₂₀, k_(2m) = 0.374 0.316 0.276 0.196 0.276 0.252 When k₂ < k₂₀, k_(2m) = 0.295 0.218 0.173 0.130 0.149 0.118 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 124.317 167.810 181.193 239.270 167.329 214.946

1.3 < NA ≦ 1.4 35 < T ≦ 45 5/20 Case 4-01 4-02 4-03 4-04 4-05 n₁₀ 1.890 1.886 1.877 1.692 1.705 k₁₀ 0.130 0.088 0.073 0.062 0.063 d₁₀ (nm) 18.083 15.723 14.196 157.690 225.284 n₂₀ 1.714 1.743 1.736 1.697 1.687 k₂₀ 0.371 0.287 0.236 0.175 0.220 d₂₀ (nm) 132.495 187.112 245.779 240.328 177.345 When n₁ ≧ n₁₀, n_(1m) = 1.928 1.943 1.947 1.695 1.732 When n₁ < n₁₀, n_(1m) = 1.886 1.862 1.846 1.674 1.696 When k₁ ≧ k₁₀, k_(1m) = 0.137 0.123 0.120 0.075 0.081 When k₁ < k₁₀, k_(1m) = 0.069 0.018 0.000 0.046 0.042 When d₁ ≧ d₁₀, d_(1m) 21.026 19.960 19.411 159.493 266.580 (nm) = When d₁ < d₁₀, d_(1m) 17.768 14.046 12.019 148.447 218.746 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.723 1.784 1.789 1.731 1.745 When n₂ < n₂₀, n_(2m) = 1.643 1.655 1.634 1.687 1.620 When k₂ ≧ k₂₀, k_(2m) = 0.382 0.326 0.281 0.195 0.283 When k₂ < k₂₀, k_(2m) = 0.323 0.234 0.182 0.141 0.159 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ 273.632 ∞ (nm) = When d₂ < d₂₀, d_(2m) 119.322 160.895 176.028 234.699 160.070 (nm) = 1.3 < NA ≦ 1.4 35 < T ≦ 45 Case 4-06 4-07 n₁₀ 1.706 1.695 k₁₀ 0.055 0.055 d₁₀ (nm) 220.863 262.917 n₂₀ 1.695 1.705 k₂₀ 0.180 0.178 d₂₀ (nm) 235.453 255.408 When n₁ ≧ n₁₀, n_(1m) = 1.734 1.723 When n₁ < n₁₀, n_(1m) = 1.693 1.660 When k₁ ≧ k₁₀, k_(1m) = 0.078 0.082 When k₁ < k₁₀, k_(1m) = 0.027 0.031 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 210.617 221.552 When n₂ ≧ n₂₀, n_(2m) = 1.767 1.832 When n₂ < n₂₀, n_(2m) = 1.630 1.613 When k₂ ≧ k₂₀, k_(2m) = 0.252 0.241 When k₂ < k₂₀, k_(2m) = 0.123 0.108 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 206.982 177.439

1.3 < NA ≦ 1.4 45 < T ≦ 55 6/20 Case 5-01 5-02 5-03 5-04 5-05 n₁₀ 1.891 1.892 1.878 1.691 1.705 k₁₀ 0.144 0.091 0.079 0.064 0.064 d₁₀ (nm) 17.530 15.545 14.050 157.168 225.395 n₂₀ 1.686 1.744 1.728 1.696 1.686 k₂₀ 0.376 0.296 0.240 0.179 0.227 d₂₀ (nm) 126.586 178.253 238.151 231.953 167.881 When n₁ ≧ n₁₀, n_(1m) = 1.925 1.947 1.947 1.692 1.729 When n₁ < n₁₀, n_(1m) = 1.891 1.870 1.849 1.677 1.698 When k₁ ≧ k₁₀, k_(1m) = 0.144 0.124 0.124 0.069 0.080 When k₁ < k₁₀, k_(1m) = 0.087 0.024 0.000 0.054 0.044 When d₁ ≧ d₁₀, d_(1m) 19.955 19.462 18.998 157.553 251.532 (nm) = When d₁ < d₁₀, d_(1m) 17.523 14.081 12.045 150.032 219.912 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.686 1.783 1.778 1.727 1.728 When n₂ < n₂₀, n_(2m) = 1.619 1.656 1.625 1.693 1.628 When k₂ ≧ k₂₀, k_(2m) = 0.377 0.330 0.281 0.190 0.292 When k₂ < k₂₀, k_(2m) = 0.336 0.244 0.186 0.164 0.167 When d₂ ≧ d₂₀, d_(2m) 127.104 ∞ ∞ 253.769 ∞ (nm) = When d₂ < d₂₀, d_(2m) 114.397 150.903 169.614 229.862 150.571 (nm) = 1.3 < NA ≦ 1.4 45 < T ≦ 55 Case 5-06 5-07 n₁₀ 1.706 1.697 k₁₀ 0.056 0.047 d₁₀ (nm) 220.607 278.691 n₂₀ 1.694 1.700 k₂₀ 0.184 0.152 d₂₀ (nm) 226.210 281.986 When n₁ ≧ n₁₀, n_(1m) = 1.728 1.753 When n₁ < n₁₀, n_(1m) = 1.694 1.654 When k₁ ≧ k₁₀, k_(1m) = 0.077 0.078 When k₁ < k₁₀, k_(1m) = 0.029 0.021 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 210.961 211.857 When n₂ ≧ n₂₀, n_(2m) = 1.757 1.912 When n₂ < n₂₀, n_(2m) = 1.639 1.611 When k₂ ≧ k₂₀, k_(2m) = 0.250 0.220 When k₂ < k₂₀, k_(2m) = 0.125 0.096 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 199.775 202.106

1.3 < NA ≦ 1.4 55 < T ≦ 65 7/20 Case 6-01 6-02 6-03 6-04 6-05 6-06 n₁₀ 1.896 1.875 1.705 1.705 1.708 1.697 k₁₀ 0.091 0.087 0.064 0.057 0.053 0.047 d₁₀ (nm) 15.652 14.019 225.606 220.354 218.289 278.413 n₂₀ 1.752 1.715 1.687 1.694 1.707 1.701 k₂₀ 0.303 0.239 0.232 0.186 0.158 0.154 d₂₀ (nm) 167.408 230.256 157.678 216.433 272.538 271.867 When n₁ ≧ n₁₀, n_(1m) = 1.950 1.943 1.724 1.723 1.740 1.750 When n₁ < n₁₀, n_(1m) = 1.875 1.846 1.699 1.693 1.693 1.656 When k₁ ≧ k₁₀, k_(1m) = 0.122 0.132 0.079 0.077 0.077 0.078 When k₁ < k₁₀, k_(1m) = 0.025 0.004 0.045 0.033 0.030 0.022 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.494 18.898 247.964 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 14.295 12.042 221.101 210.599 206.669 213.947 When n₂ ≧ n₂₀, n_(2m) = 1.792 1.763 1.721 1.752 1.799 1.923 When n₂ < n₂₀, n_(2m) = 1.662 1.612 1.638 1.648 1.579 1.614 When k₂ ≧ k₂₀, k_(2m) = 0.337 0.279 0.301 0.247 0.230 0.223 When k₂ < k₂₀, k_(2m) = 0.249 0.186 0.176 0.128 0.106 0.097 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 172.085 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 138.575 161.008 143.974 199.200 203.487 191.019

1.3 < NA ≦ 1.4 65 < T ≦ 75 8/20 Case 7-01 7-02 7-03 7-04 7-05 n₁₀ 1.901 1.871 1.866 1.706 1.705 k₁₀ 0.088 0.093 0.067 0.065 0.057 d₁₀ (nm) 16.388 14.267 13.172 225.317 220.112 n₂₀ 1.774 1.706 1.724 1.687 1.694 k₂₀ 0.318 0.241 0.206 0.238 0.188 d₂₀ (nm) 154.194 221.319 275.098 147.740 206.685 When n₁ ≧ n₁₀, n_(1m) = 1.955 1.937 1.947 1.721 1.721 When n₁ < n₁₀, n_(1m) = 1.881 1.842 1.823 1.701 1.693 When k₁ ≧ k₁₀, k_(1m) = 0.116 0.138 0.131 0.077 0.077 When k₁ < k₁₀, k_(1m) = 0.024 0.011 0.000 0.045 0.035 When d₁ ≧ d₁₀, d_(1m) 20.279 19.161 19.228 239.263 245.793 (nm) = When d₁ < d₁₀, d_(1m) 15.118 12.240 10.142 222.197 210.312 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.816 1.751 1.783 1.720 1.752 When n₂ < n₂₀, n_(2m) = 1.683 1.603 1.616 1.644 1.651 When k₂ ≧ k₂₀, k_(2m) = 0.355 0.280 0.254 0.305 0.246 When k₂ < k₂₀, k_(2m) = 0.259 0.188 0.151 0.177 0.133 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ 161.062 ∞ (nm) = When d₂ < d₂₀, d_(2m) 132.898 152.054 192.936 136.808 191.952 (nm) = 1.3 < NA ≦ 1.4 65 < T ≦ 75 Case 7-06 7-07 n₁₀ 1.708 1.697 k₁₀ 0.053 0.047 d₁₀ (nm) 218.342 278.070 n₂₀ 1.707 1.702 k₂₀ 0.161 0.156 d₂₀ (nm) 262.805 262.294 When n₁ ≧ n₁₀, n_(1m) = 1.740 1.735 When n₁ < n₁₀, n_(1m) = 1.695 1.657 When k₁ ≧ k₁₀, k_(1m) = 0.077 0.077 When k₁ < k₁₀, k_(1m) = 0.032 0.024 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 208.328 215.902 When n₂ ≧ n₂₀, n_(2m) = 1.805 1.806 When n₂ < n₂₀, n_(2m) = 1.580 1.618 When k₂ ≧ k₂₀, k_(2m) = 0.232 0.224 When k₂ < k₂₀, k_(2m) = 0.108 0.097 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 195.570 182.960

1.3 < NA ≦ 1.4 75 < T ≦ 85 9/20 Case 8-01 8-02 8-03 8-04 8-05 n₁₀ 1.908 1.871 1.869 1.706 1.705 k₁₀ 0.087 0.097 0.067 0.067 0.058 d₁₀ (nm) 17.362 14.654 13.479 224.641 220.026 n₂₀ 1.802 1.704 1.729 1.684 1.694 k₂₀ 0.342 0.250 0.214 0.248 0.194 d₂₀ (nm) 141.959 212.121 265.153 139.263 197.616 When n₁ ≧ n₁₀, n_(1m) = 1.960 1.935 1.947 1.720 1.721 When n₁ < n₁₀, n_(1m) = 1.891 1.843 1.828 1.704 1.694 When k₁ ≧ k₁₀, k_(1m) = 0.111 0.140 0.128 0.074 0.078 When k₁ < k₁₀, k_(1m) = 0.023 0.016 0.000 0.049 0.035 When d₁ ≧ d₁₀, d_(1m) 21.165 19.437 19.380 236.042 243.446 (nm) = When d₁ < d₁₀, d_(1m) 16.261 12.685 10.599 223.100 210.844 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.843 1.746 1.787 1.711 1.754 When n₂ < n₂₀, n_(2m) = 1.713 1.604 1.618 1.641 1.649 When k₂ ≧ k₂₀, k_(2m) = 0.382 0.288 0.262 0.299 0.249 When k₂ < k₂₀, k_(2m) = 0.279 0.196 0.159 0.184 0.134 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ 151.104 ∞ (nm) = When d₂ < d₂₀, d_(2m) 126.652 177.678 187.664 128.169 181.064 (nm) = 1.3 < NA ≦ 1.4 75 < T ≦ 85 Case 8-06 8-07 n₁₀ 1.708 1.697 k₁₀ 0.054 0.048 d₁₀ (nm) 218.429 277.999 n₂₀ 1.707 1.702 k₂₀ 0.165 0.160 d₂₀ (nm) 253.768 253.663 When n₁ ≧ n₁₀, n_(1m) = 1.739 1.730 When n₁ < n₁₀, n_(1m) = 1.697 1.656 When k₁ ≧ k₁₀, k_(1m) = 0.076 0.076 When k₁ < k₁₀, k_(1m) = 0.032 0.027 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 209.931 217.650 When n₂ ≧ n₂₀, n_(2m) = 1.810 1.804 When n₂ < n₂₀, n_(2m) = 1.580 1.625 When k₂ ≧ k₂₀, k_(2m) = 0.235 0.225 When k₂ < k₂₀, k_(2m) = 0.109 0.100 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 216.664 177.272

1.3 < NA ≦ 1.4 85 < T ≦ 95 10/20 Case 9-01 9-02 9-03 9-04 9-05 9-06 n₁₀ 1.918 1.876 1.874 1.706 1.709 1.697 k₁₀ 0.092 0.100 0.069 0.060 0.055 0.050 d₁₀ (nm) 17.977 14.944 13.674 219.996 218.382 278.074 n₂₀ 1.822 1.706 1.733 1.694 1.707 1.701 k₂₀ 0.371 0.265 0.224 0.203 0.172 0.166 d₂₀ (nm) 132.466 203.140 256.300 189.146 245.309 245.468 When n₁ ≧ n₁₀, n_(1m) = 1.966 1.936 1.950 1.723 1.738 1.728 When n₁ < n₁₀, n_(1m) = 1.905 1.851 1.836 1.696 1.699 1.655 When k₁ ≧ k₁₀, k_(1m) = 0.109 0.138 0.126 0.078 0.075 0.075 When k₁ < k₁₀, k_(1m) = 0.028 0.021 0.000 0.035 0.032 0.029 When d₁ ≧ d₁₀, d_(1m) (nm) = 21.461 19.418 19.237 242.566 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 17.167 13.206 11.040 212.120 211.373 219.101 When n₂ ≧ n₂₀, n_(2m) = 1.855 1.745 1.789 1.754 1.811 1.805 When n₂ < n₂₀, n_(2m) = 1.737 1.611 1.626 1.644 1.579 1.636 When k₂ ≧ k₂₀, k_(2m) = 0.407 0.300 0.271 0.255 0.237 0.226 When k₂ < k₂₀, k_(2m) = 0.308 0.211 0.169 0.143 0.115 0.106 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 121.537 173.052 183.002 168.954 213.072 172.052

1.3 < NA ≦ 1.4 95 < T ≦ 105 11/20 Case 10-01 10-02 10-03 10-04 10-05 10-06 n₁₀ 1.929 1.883 1.880 1.707 1.709 1.697 k₁₀ 0.101 0.103 0.071 0.062 0.057 0.047 d₁₀ (nm) 17.864 14.973 13.709 219.774 218.071 275.083 n₂₀ 1.821 1.709 1.736 1.693 1.706 1.700 k₂₀ 0.398 0.279 0.234 0.214 0.179 0.148 d₂₀ (nm) 125.532 194.479 247.823 180.753 237.020 295.680 When n₁ ≧ n₁₀, n_(1m) = 1.973 1.940 1.953 1.724 1.737 1.768 When n₁ < n₁₀, n_(1m) = 1.922 1.863 1.845 1.698 1.701 1.650 When k₁ ≧ k₁₀, k_(1m) = 0.111 0.136 0.124 0.077 0.074 0.079 When k₁ < k₁₀, k_(1m) = 0.042 0.027 0.000 0.035 0.034 0.023 When d₁ ≧ d₁₀, d_(1m) (nm) = 20.839 19.023 18.857 241.722 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 17.465 13.566 11.352 213.515 212.546 200.276 When n₂ ≧ n₂₀, n_(2m) = 1.840 1.742 1.789 1.751 1.807 1.849 When n₂ < n₂₀, n_(2m) = 1.743 1.619 1.632 1.642 1.577 1.604 When k₂ ≧ k₂₀, k_(2m) = 0.418 0.310 0.278 0.260 0.236 0.227 When k₂ < k₂₀, k_(2m) = 0.340 0.227 0.180 0.155 0.122 0.093 When d₂ ≧ d₂₀, d_(2m) (nm) = 161.544 ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 119.422 166.497 178.361 161.067 205.891 212.971

1.3 < NA ≦ 1.4 105 < T ≦ 115 12/20 Case 11-01 11-02 11-03 11-04 11-05 n₁₀ 1.891 1.885 1.707 1.709 1.697 k₁₀ 0.108 0.074 0.064 0.058 0.048 d₁₀ (nm) 14.702 13.594 219.485 217.678 275.043 n₂₀ 1.707 1.735 1.692 1.705 1.701 k₂₀ 0.289 0.241 0.223 0.184 0.152 d₂₀ (nm) 186.368 239.426 171.867 228.411 286.426 When n₁ ≧ n₁₀, n_(1m) = 1.944 1.955 1.723 1.736 1.767 When n₁ < n₁₀, n_(1m) = 1.874 1.853 1.700 1.703 1.650 When k₁ ≧ k₁₀, k_(1m) = 0.135 0.124 0.077 0.073 0.078 When k₁ < k₁₀, k_(1m) = 0.035 0.000 0.037 0.036 0.023 When d₁ ≧ d₁₀, d_(1m) 18.320 18.363 240.271 ∞ ∞ (nm) = When d₁ < d₁₀, d_(1m) 13.618 11.476 214.658 213.396 201.239 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.733 1.786 1.744 1.797 1.850 When n₂ < n₂₀, n_(2m) = 1.620 1.632 1.646 1.574 1.606 When k₂ ≧ k₂₀, k_(2m) = 0.314 0.282 0.261 0.232 0.229 When k₂ < k₂₀, k_(2m) = 0.241 0.188 0.163 0.126 0.094 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 157.397 173.024 156.390 195.169 202.551 (nm) =

1.3 < NA ≦ 1.4 115 < T ≦ 125 13/20 Case 12-01 12-02 12-03 12-04 12-05 n₁₀ 1.896 1.887 1.692 1.707 1.709 k₁₀ 0.113 0.078 0.059 0.065 0.059 d₁₀ (nm) 14.435 13.577 153.772 219.581 217.561 n₂₀ 1.703 1.733 1.694 1.692 1.702 k₂₀ 0.295 0.244 0.154 0.231 0.188 d₂₀ (nm) 177.615 230.253 284.837 161.904 219.131 When n₁ ≧ n₁₀, n_(1m) = 1.947 1.955 1.718 1.720 1.728 When n₁ < n₁₀, n_(1m) = 1.882 1.856 1.664 1.701 1.703 When k₁ ≧ k₁₀, k_(1m) = 0.136 0.126 0.090 0.076 0.072 When k₁ < k₁₀, k_(1m) = 0.044 0.000 0.044 0.041 0.040 When d₁ ≧ d₁₀, d_(1m) 17.718 18.125 175.199 231.299 ∞ (nm) = When d₁ < d₁₀, d_(1m) 13.578 11.595 128.388 215.799 214.049 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.725 1.783 1.772 1.738 1.784 When n₂ < n₂₀, n_(2m) = 1.617 1.629 1.642 1.658 1.629 When k₂ ≧ k₂₀, k_(2m) = 0.315 0.284 0.182 0.262 0.229 When k₂ < k₂₀, k_(2m) = 0.249 0.192 0.119 0.174 0.128 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 145.196 165.335 240.440 152.266 193.496 (nm) = 1.3 < NA ≦ 1.4 115 < T ≦ 125 Case 12-06 12-07 n₁₀ 1.707 1.697 k₁₀ 0.053 0.048 d₁₀ (nm) 216.484 274.812 n₂₀ 1.695 1.701 k₂₀ 0.157 0.154 d₂₀ (nm) 278.062 276.656 When n₁ ≧ n₁₀, n_(1m) = 1.748 1.768 When n₁ < n₁₀, n_(1m) = 1.689 1.651 When k₁ ≧ k₁₀, k_(1m) = 0.077 0.078 When k₁ < k₁₀, k_(1m) = 0.030 0.024 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 199.849 201.932 When n₂ ≧ n₂₀, n_(2m) = 1.761 1.850 When n₂ < n₂₀, n_(2m) = 1.583 1.607 When k₂ ≧ k₂₀, k_(2m) = 0.215 0.229 When k₂ < k₂₀, k_(2m) = 0.104 0.098 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 212.463 192.106

1.3 < NA ≦ 1.4 125 < T ≦ 135 14/20 Case 13-01 13-02 13-03 13-04 13-05 n₁₀ 1.898 1.885 1.868 1.707 1.708 k₁₀ 0.115 0.081 0.075 0.067 0.060 d₁₀ (nm) 14.632 13.917 12.752 219.938 217.756 n₂₀ 1.705 1.732 1.713 1.695 1.701 k₂₀ 0.303 0.248 0.206 0.239 0.192 d₂₀ (nm) 166.646 219.851 279.921 151.390 209.457 When n₁ ≧ n₁₀, n_(1m) = 1.949 1.951 1.949 1.716 1.721 When n₁ < n₁₀, n_(1m) = 1.886 1.855 1.830 1.703 1.704 When k₁ ≧ k₁₀, k_(1m) = 0.135 0.127 0.135 0.075 0.072 When k₁ < k₁₀, k_(1m) = 0.050 0.002 0.000 0.050 0.045 When d₁ ≧ d₁₀, d_(1m) 17.809 18.468 18.469 226.140 ∞ (nm) = When d₁ < d₁₀, d_(1m) 13.869 11.960 10.161 217.246 214.692 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.725 1.781 1.771 1.731 1.769 When n₂ < n₂₀, n_(2m) = 1.618 1.628 1.611 1.678 1.659 When k₂ ≧ k₂₀, k_(2m) = 0.322 0.288 0.250 0.263 0.228 When k₂ < k₂₀, k_(2m) = 0.256 0.194 0.153 0.185 0.138 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ 179.041 ∞ (nm) = When d₂ < d₂₀, d_(2m) 136.370 153.796 194.427 147.510 199.403 (nm) = 1.3 < NA ≦ 1.4 125 < T ≦ 135 Case 13-06 13-07 n₁₀ 1.706 1.696 k₁₀ 0.054 0.049 d₁₀ (nm) 217.065 274.075 n₂₀ 1.694 1.702 k₂₀ 0.160 0.157 d₂₀ (nm) 268.021 267.366 When n₁ ≧ n₁₀, n_(1m) = 1.746 1.770 When n₁ < n₁₀, n_(1m) = 1.690 1.651 When k₁ ≧ k₁₀, k_(1m) = 0.077 0.078 When k₁ < k₁₀, k_(1m) = 0.033 0.026 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 202.380 202.716 When n₂ ≧ n₂₀, n_(2m) = 1.761 1.853 When n₂ < n₂₀, n_(2m) = 1.586 1.608 When k₂ ≧ k₂₀, k_(2m) = 0.219 0.227 When k₂ < k₂₀, k_(2m) = 0.106 0.099 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 208.129 186.947

1.3 < NA ≦ 1.4 135 < T ≦ 145 15/20 Case 14-01 14-02 14-03 14-04 14-05 14-06 n₁₀ 1.899 1.882 1.870 1.708 1.707 1.696 k₁₀ 0.115 0.083 0.074 0.062 0.055 0.050 d₁₀ (nm) 15.367 14.477 13.063 217.887 217.378 273.384 n₂₀ 1.714 1.732 1.717 1.700 1.693 1.702 k₂₀ 0.318 0.256 0.212 0.197 0.164 0.160 d₂₀ (nm) 155.141 209.893 269.637 200.272 258.646 258.714 When n₁ ≧ n₁₀, n_(1m) = 1.949 1.947 1.949 1.716 1.744 1.741 When n₁ < n₁₀, n_(1m) = 1.888 1.854 1.833 1.704 1.691 1.652 When k₁ ≧ k₁₀, k_(1m) = 0.132 0.127 0.132 0.071 0.077 0.078 When k₁ < k₁₀, k_(1m) = 0.051 0.006 0.000 0.050 0.036 0.028 When d₁ ≧ d₁₀, d_(1m) (nm) = 18.581 19.085 18.767 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 14.660 12.539 10.533 215.374 204.778 209.881 When n₂ ≧ n₂₀, n_(2m) = 1.733 1.780 1.774 1.754 1.760 1.859 When n₂ < n₂₀, n_(2m) = 1.627 1.630 1.611 1.677 1.592 1.608 When k₂ ≧ k₂₀, k_(2m) = 0.337 0.296 0.256 0.228 0.223 0.226 When k₂ < k₂₀, k_(2m) = 0.266 0.200 0.157 0.152 0.109 0.098 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 131.038 171.650 189.575 195.166 202.001 178.700

1.3 < NA ≦ 1.4 145 < T ≦ 155 16/20 Case 15-01 15-02 15-03 15-04 15-05 15-06 n₁₀ 1.903 1.884 1.874 1.708 1.707 1.696 k₁₀ 0.118 0.087 0.075 0.063 0.056 0.051 d₁₀ (nm) 16.130 14.896 13.357 217.693 217.044 273.493 n₂₀ 1.723 1.733 1.722 1.700 1.694 1.702 k₂₀ 0.340 0.268 0.221 0.205 0.169 0.165 d₂₀ (nm) 145.164 201.113 260.240 191.744 250.083 250.180 When n₁ ≧ n₁₀, n_(1m) = 1.950 1.946 1.951 1.714 1.742 1.738 When n₁ < n₁₀, n_(1m) = 1.895 1.858 1.839 1.706 1.694 1.652 When k₁ ≧ k₁₀, k_(1m) = 0.130 0.127 0.128 0.070 0.076 0.078 When k₁ < k₁₀, k_(1m) = 0.053 0.010 0.000 0.053 0.038 0.031 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.240 19.361 18.857 222.035 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 15.619 13.105 10.992 216.109 206.771 213.326 When n₂ ≧ n₂₀, n_(2m) = 1.737 1.779 1.777 1.735 1.755 1.839 When n₂ < n₂₀, n_(2m) = 1.641 1.636 1.612 1.682 1.595 1.609 When k₂ ≧ k₂₀, k_(2m) = 0.356 0.307 0.265 0.225 0.223 0.227 When k₂ < k₂₀, k_(2m) = 0.286 0.211 0.166 0.161 0.114 0.102 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 126.286 170.199 185.156 187.971 215.684 171.738

1.3 < NA ≦ 1.4 155 < T ≦ 165 17/20 Case 16-01 16-02 16-03 16-04 16-05 16-06 n₁₀ 1.913 1.891 1.879 1.709 1.708 1.696 k₁₀ 0.125 0.091 0.077 0.064 0.057 0.052 d₁₀ (nm) 16.406 14.954 13.440 217.197 216.333 274.035 n₂₀ 1.727 1.734 1.724 1.700 1.694 1.700 k₂₀ 0.366 0.282 0.231 0.214 0.175 0.171 d₂₀ (nm) 136.777 193.024 251.802 183.446 241.739 241.498 When n₁ ≧ n₁₀, n_(1m) = 1.955 1.950 1.953 1.714 1.742 1.735 When n₁ < n₁₀, n_(1m) = 1.910 1.868 1.847 1.708 1.697 1.651 When k₁ ≧ k₁₀, k_(1m) = 0.129 0.127 0.127 0.066 0.075 0.077 When k₁ < k₁₀, k_(1m) = 0.064 0.016 0.000 0.055 0.039 0.034 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.185 19.061 18.574 220.596 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 16.268 13.452 11.329 216.874 208.223 215.451 When n₂ ≧ n₂₀, n_(2m) = 1.731 1.774 1.776 1.707 1.748 1.840 When n₂ < n₂₀, n_(2m) = 1.651 1.642 1.618 1.678 1.595 1.612 When k₂ ≧ k₂₀, k_(2m) = 0.371 0.317 0.273 0.218 0.220 0.229 When k₂ < k₂₀, k_(2m) = 0.314 0.227 0.177 0.165 0.120 0.108 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 121.662 164.818 180.821 179.468 209.260 166.208

1.3 < NA ≦ 1.4 165 < T ≦ 175 18/20 Case 17-01 17-02 17-03 17-04 n₁₀ 1.900 1.885 1.708 1.697 k₁₀ 0.097 0.082 0.058 0.048 d₁₀ (nm) 14.674 13.311 215.615 273.453 n₂₀ 1.732 1.722 1.694 1.699 k₂₀ 0.294 0.239 0.180 0.151 d₂₀ (nm) 185.336 243.911 233.152 289.720 When n₁ ≧ n₁₀, n_(1m) = 1.955 1.956 1.741 1.736 When n₁ < n₁₀, n_(1m) = 1.881 1.856 1.699 1.650 When k₁ ≧ k₁₀, k_(1m) = 0.126 0.128 0.074 0.080 When k₁ < k₁₀, k_(1m) = 0.023 0.000 0.039 0.020 When d₁ ≧ d₁₀, d_(1m) (nm) = 18.346 18.029 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 13.519 11.467 209.091 211.222 When n₂ ≧ n₂₀, n_(2m) = 1.767 1.769 1.740 1.868 When n₂ < n₂₀, n_(2m) = 1.645 1.618 1.591 1.614 When k₂ ≧ k₂₀, k_(2m) = 0.322 0.277 0.217 0.224 When k₂ < k₂₀, k_(2m) = 0.243 0.187 0.126 0.094 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 156.774 176.585 198.961 204.980 1.3 < NA ≦ 1.4 175 < T ≦ 185 Case 18-01 18-02 18-03 18-04 18-05 n₁₀ 1.908 1.888 1.708 1.709 1.697 k₁₀ 0.102 0.088 0.059 0.054 0.049 d₁₀ (nm) 14.316 13.163 215.377 215.137 273.522 n₂₀ 1.730 1.716 1.693 1.702 1.700 k₂₀ 0.303 0.243 0.185 0.158 0.154 d₂₀ (nm) 177.238 235.819 223.802 279.418 279.960 When n₁ ≧ n₁₀, n_(1m) = 1.960 1.956 1.740 1.745 1.734 When n₁ < n₁₀, n_(1m) = 1.893 1.861 1.700 1.696 1.657 When k₁ ≧ k₁₀, k_(1m) = 0.126 0.131 0.073 0.075 0.079 When k₁ < k₁₀, k_(1m) = 0.031 0.002 0.041 0.028 0.020 When d₁ ≧ d₁₀, d_(1m) 17.569 17.540 ∞ ∞ ∞ (nm) = When d₁ < d₁₀, d_(1m) 13.467 11.504 209.546 205.939 213.387 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.759 1.759 1.736 1.790 1.874 When n₂ < n₂₀, n_(2m) = 1.644 1.611 1.587 1.604 1.617 When k₂ ≧ k₂₀, k_(2m) = 0.325 0.278 0.217 0.211 0.226 When k₂ < k₂₀, k_(2m) = 0.256 0.193 0.129 0.105 0.095 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 143.259 171.381 185.714 201.921 193.505 (nm) =

1.3 < NA ≦ 1.4 185 < T ≦ 195 19/20 Case 19-01 19-02 19-03 19-04 19-05 n₁₀ 1.914 1.886 1.873 1.692 1.708 k₁₀ 0.104 0.093 0.070 0.060 0.060 d₁₀ (nm) 14.390 13.299 12.581 152.854 215.913 n₂₀ 1.735 1.710 1.721 1.693 1.692 k₂₀ 0.314 0.247 0.208 0.157 0.189 d₂₀ (nm) 166.400 226.131 280.628 278.359 213.567 When n₁ ≧ n₁₀, n_(1m) = 1.964 1.952 1.955 1.709 1.739 When n₁ < n₁₀, n_(1m) = 1.903 1.860 1.833 1.664 1.699 When k₁ ≧ k₁₀, k_(1m) = 0.123 0.135 0.133 0.092 0.074 When k₁ < k₁₀, k_(1m) = 0.040 0.012 0.000 0.042 0.044 When d₁ ≧ d₁₀, d_(1m) 17.353 17.539 18.087 163.046 ∞ (nm) = When d₁ < d₁₀, d_(1m) 13.759 11.668 9.947 129.659 210.046 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.759 1.750 1.778 1.784 1.739 When n₂ < n₂₀, n_(2m) = 1.648 1.604 1.614 1.659 1.586 When k₂ ≧ k₂₀, k_(2m) = 0.331 0.280 0.252 0.196 0.222 When k₂ < k₂₀, k_(2m) = 0.267 0.196 0.156 0.120 0.129 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 144.756 162.922 193.262 243.485 177.669 (nm) = 1.3 < NA ≦ 1.4 185 < T ≦ 195 Case 19-06 19-07 n₁₀ 1.708 1.697 k₁₀ 0.054 0.050 d₁₀ (nm) 215.905 273.350 n₂₀ 1.701 1.701 k₂₀ 0.161 0.157 d₂₀ (nm) 269.362 270.178 When n₁ ≧ n₁₀, n_(1m) = 1.744 1.732 When n₁ < n₁₀, n_(1m) = 1.697 1.658 When k₁ ≧ k₁₀, k_(1m) = 0.075 0.078 When k₁ < k₁₀, k_(1m) = 0.029 0.021 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 207.633 215.326 When n₂ ≧ n₂₀, n_(2m) = 1.795 1.877 When n₂ < n₂₀, n_(2m) = 1.605 1.619 When k₂ ≧ k₂₀, k_(2m) = 0.216 0.228 When k₂ < k₂₀, k_(2m) = 0.105 0.098 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 205.481 189.945

1.3 < NA ≦ 1.4 195 < T ≦ 205 20/20 Case 20-01 20-02 20-03 20-04 20-05 20-06 n₁₀ 1.918 1.883 1.874 1.707 1.708 1.697 k₁₀ 0.103 0.095 0.068 0.061 0.055 0.050 d₁₀ (nm) 15.177 13.742 12.955 216.749 216.874 272.522 n₂₀ 1.753 1.708 1.728 1.693 1.699 1.701 k₂₀ 0.331 0.252 0.214 0.194 0.165 0.160 d₂₀ (nm) 153.467 215.835 269.400 203.628 259.716 261.468 When n₁ ≧ n₁₀, n_(1m) = 1.966 1.948 1.955 1.739 1.743 1.731 When n₁ < n₁₀, n_(1m) = 1.909 1.857 1.835 1.699 1.698 1.652 When k₁ ≧ k₁₀, k_(1m) = 0.117 0.137 0.128 0.075 0.075 0.078 When k₁ < k₁₀, k_(1m) = 0.043 0.016 0.000 0.048 0.030 0.022 When d₁ ≧ d₁₀, d_(1m) (nm) = 18.089 18.051 18.523 256.743 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 14.663 12.041 10.348 210.937 209.294 217.122 When n₂ ≧ n₂₀, n_(2m) = 1.773 1.748 1.785 1.744 1.800 1.874 When n₂ < n₂₀, n_(2m) = 1.665 1.604 1.616 1.589 1.608 1.620 When k₂ ≧ k₂₀, k_(2m) = 0.348 0.285 0.259 0.230 0.223 0.227 When k₂ < k₂₀, k_(2m) = 0.278 0.199 0.159 0.145 0.109 0.100 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 140.260 150.984 188.160 180.549 200.943 184.530

The exposure method according to any one of the first to fifth embodiments of the invention is applied to, for example, submicron patterning in a semiconductor device. Specifically, the exposure method includes the steps of forming the antireflective film according to any one of the embodiments of the invention on a silicon oxide film formed on a surface of the silicon semiconductor substrate, applying a resist layer having a sensitive function on the antireflective film, selectively exposing the resist layer to exposure light (ultraviolet light), and developing the resist layer to form a predetermined resist pattern.

In the antireflective film or the exposure method according to any one of the first to fifth embodiments of the invention (may be simply generically named “the invention” hereinafter), the exposure light (ultraviolet light) has a wavelength of 190 nm to 195 nm and preferably 192 nm to 194 nm. More specifically, an ArF excimer laser at a wavelength of 193 nm is more preferably used as an exposure light source.

Furthermore, the relations d₁≦250 and d₂≦250 are satisfied. In other words, the thicknesses of the upper and lower layers of the antireflective film preferably are smaller than 250 nm. When the thickness of the upper layer or the lower layer exceeds 250 nm, in the step of etching the silicon semiconductor substrate using the resist layer as an etching mask after the exposure of the resist layer to the exposure light and the development thereof, a so-called processing conversion difference (referred to as a “dimensional conversion amount” or “dimensional shift”) which represents a difference between the resist pattern dimensions of the resist layer and the actual etching dimensions of the silicon semiconductor substrate is excessively increased, thereby failing to obtain a pattern having a desired shape or size on the silicon semiconductor substrate.

In addition, the refractive index of the resist layer is preferably 1.60 to 1.80. In the use of the resist layer composed of a resist material having a refractive index outside this range, even when the antireflective film satisfies any one of the above-described conditions of the combination (n₁, k₁, d₁, n₂, k₂, d₂), it is difficult to control the reflectance at the interface between the resist layer and the silicon oxide film formed on a surface of the silicon semiconductor substrate to 0.4% or less over the entire region from the incidence angle (maximum incidence angle θ_(in-max)) of exposure light corresponding to a corresponding numerical aperture to vertical incidence (minimum incidence angle θ_(in-min), specifically 0°), thereby failing to obtain an excellent resist pattern.

Furthermore, the space between the resist layer and the exposure system is preferably filled with a medium having a refractive index of 1.44±0.02. Namely, the medium having a refractive index of 1.44±0.02 is preferably used as an immersion liquid, and water is more preferably used as the medium. When the refractive index greatly deviates from this value, even if the antireflective index satisfies any one of the conditions of the combination (n₁, k₁, d₁, n₂, k₂, d₂), it is difficult to control the reflectance at the interface between the resist layer and the silicon oxide film formed on a surface of the silicon semiconductor substrate to 0.4% or less over the entire region from the incidence angle (maximum incidence angle θ_(in-max)) of exposure light corresponding to the corresponding numerical aperture to vertical incidence (minimum incidence angle θ_(in-min), specifically 0°), thereby failing to obtain an excellent resist pattern.

Furthermore, in the exposure method according to any one of the first to fifth embodiments of the invention, a topcoat layer is preferably formed on the resist layer (specifically, on the upper layer). Without the topcoat layer, it may be impossible to suppress the occurrence of an interaction between the resist layer and the immersion liquid (for example, the phenomenon of producing defects in the resist layer due to contact between the resist layer and the immersion liquid), thereby failing to obtain a desirable resist pattern. The topcoat layer may be composed of a material, such as an organic or inorganic material, e.g., polyvinyl alcohol, amorphous fluoropolymer, or NaCl.

In the present invention, the entire region from the incidence angle (maximum incidence angle θ_(in-max)) of exposure light corresponding to a corresponding numerical aperture to vertical incidence (minimum incidence angle θ_(in-min), specifically 0°) may be referred to as the “entire incidence angle region corresponding to the numerical aperture NA of the corresponding exposure system” or simply referred to as the “entire incidence angle region”.

The thickness of the resist layer is preferably 2 times to 5 times as large as the minimum size of the resist pattern to be formed. When the thickness of the resist layer is less than 2 times as large as the minimum size of the resist pattern, it may be possible to pattern the resist layer to a predetermined pattern, but the silicon semiconductor substrate is not satisfactorily etched after patterning of the resist layer. In addition, the number of defects in the resist layer may be increased. On the other hand, when the thickness of the resist layer exceeds 5 times as large as the minimum size of the resist pattern, the patterned resist layer may be broken, thereby failing to satisfactorily pattern the silicon semiconductor substrate.

As the material constituting the upper and lower layers of the antireflective film, any material satisfying any one of the conditions of the combination (n₁, k₁, d₁, n₂, k₂, d₂) may be used. Examples of the material constituting the upper and lower layers of the antireflective film include polymer materials, inorganic oxide materials, metal materials, and hybrid materials thereof. Specific examples of the material include polyimide, SiCH films, SiCHN films, SiCOH films, epoxy thermosetting resins, acrylic thermosetting resins, epoxy ultraviolet curable resins, and acrylic ultraviolet curable resins.

In order to improve the adhesion between the antireflective film and the resist layer formed on the antireflective film, the surface of the upper layer constituting the antireflective film may be subjected to surface medication treatment such as silane coupling treatment or the like.

In the use of a single-layer antireflective film, even when the thickness and complex refractive index are changed to any values, it may be generally impossible to control the reflectance to 0.4% or less over the entire incidence angle region corresponding to the numerical aperture NA of the corresponding exposure system. When the antireflective film has an excessively large thickness, the problem of a processing conversion difference occurs in the step of etching the silicon semiconductor substrate after exposure of the resist layer to the exposure light and the development thereof.

On the other hand, in the present invention, the two-layer structure antireflective film having a thickness and complex refractive index in the respective predetermined ranges is formed between the resist and the silicon oxide film formed on a surface of the silicon semiconductor substrate. Therefore, it may be possible to control the reflectance to 0.4% or less over the entire incidence angle region corresponding to the numerical aperture NA of the corresponding exposure system and obtain a resist pattern having a more excellent shape, thereby permitting more submicron processing. In other words, when the numerical aperture NA of the exposure system is each of 0.93≦NA≦1.0, 1.0<NA≦1.1, 1.1<NA≦1.2, 1.2<NA≦1.3, and 1.3<NA≦1.4, by using the two-layer structure antireflective film satisfying the above-described conditions of the thickness and the complex refractive index, it may be possible to control the reflectance to 0.4% or less over the entire region from the incidence angle of exposure light corresponding to the corresponding numerical aperture NA to vertical incidence, thereby obtaining an excellent resist pattern and minimizing the processing conversion difference.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGURE is a graph showing the result of computation of the reflectance dependence of variation in the diameter of contact holes.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Although embodiments of the present invention will be described with reference to the drawings, description will be first made of the reasons why the reflectance is 0.4% or less over the entire incidence angle region corresponding to the numerical aperture NA of a corresponding exposure system (the entire region from the incidence angle of exposure light corresponding to the numerical aperture of a corresponding exposure system to vertical incidence) according to the embodiments of the invention.

First, a simulation of optimizing the complex refractive indexes N₁ and N₂ of upper and lower layer of an antireflective film was carried out for minimizing the reflectance over the region from the incidence angle (maximum incidence angle θ_(in-max)) of most oblique incidence corresponding to a numerical aperture NA to vertical incidence (minimum incidence angle θ_(in-min)), i.e., the entire incidence angle region. In this simulation, the thicknesses d₁ and d₂ of the upper and lower layer of the antireflective film were changed from 10 nm to 200 nm in 10 nm increments, and the simulation was carried out in each combination of the thicknesses d₁ and d₂ using a silicon oxide film having a thickness of 2 nm to 205 nm. Furthermore, the numerical aperture NA of an exposure system was set to each of 0.93≦NA≦1.0 (specifically, 1.0), 1.0<NA≦1.1 (specifically, 1.1), 1.1<NA≦1.2 (specifically, 1.2), 1.2<NA≦1.3 (specifically, 1.3), and 1.3<NA≦1.4 (specifically, 1.4).

In this computation, the reflectance of the two-layer antireflective film was calculated by a calculation method for the Fresnel coefficient of each layer (refer to “Basic Theory of Optical Thin Film” written by Mitsunobu Kobiyama, 2003, issued by Optronics Inc.). The complex refractive indexes of the upper and lower layers were optimized by the Fletcher-Reeves optimization method (refer to “Nonlinear Optimization Problems” written by J. Kowalik, M. R. Osborn, translated by Yoshiyuki Yamamoto and Takeo Koyama, 1970, issued by Baifukan).

In the optimization, when the numerical aperture NA was 1.0, the entire incident angle region was divided into 20 equal parts; when the numerical aperture NA was 1.1, the entire incidence angle region was divided into 22 equal parts; when the numerical aperture NA was 1.2, the entire incidence angle region was divided into 24 equal parts; when the numerical aperture NA was 1.3, the entire incidence angle region was divided into 26 equal parts; and when the numerical aperture NA was 1.4, the entire incidence angle region was divided into 28 equal parts. The reflectance at each incidence angle was calculated, and the square sum of the reflectances at the incidence angles was minimized.

In this way, the numerical aperture NA of the exposure system was set to each of 1.0, 1.1, 1.2, 1.3, and 1.4, and the thicknesses d₁ and d₂ of the upper and lower layers were changed from 10 nm to 250 nm in 10 nm increments. In each of the cases, the complex refractive indexes of the upper and lower layers were optimized by the above-described method to obtain the optimum complex refractive indexes N₁ and N₂ of the upper and lower layers.

The reason why computation was not carried out for a thickness above 250 nm was that with a thickness over this value, a processing conversion difference in the etching step is increased, thereby failing to satisfactorily process the silicon semiconductor substrate.

Then, in each of the cases in which the numerical aperture NA of the exposure system was set to each of 1.0, 1.1, 1.2, 1.3, and 1.4, and the thicknesses d₁ and d₂ of the upper and lower layers were changed from 10 nm to 250 nm in 10 nm increments, the thickness conditions for minimizing the square sum of the reflectances, which was an evaluation function for optimization after the optimization of the complex refractive indexes of the upper and lower layers, were determined on the basis of the results of the above-described computation.

Each of the thicknesses d₁ and d₂ of the upper and lower layers was further finely divided on the basis of the thickness conditions, and the most preferable complex refractive indexes of the upper and lower layers corresponding to the thickness conditions were determined in detail.

As a result, the most preferable combinations of complex refractive indexes and thicknesses were obtained. Namely, assuming that the complex refractive index N₁ of the upper layer (disposed far from the surface of the silicon semiconductor substrate having the silicon oxide film formed on the surface thereof) in the two-layer antireflective film, and the complex refractive index N₂ of the lower layer (disposed nearer to the surface of the silicon semiconductor substrate having the silicon oxide film formed on the surface thereof) are defined as follows: N ₁ =n ₁₀ −k ₁₀ i N ₂ =n ₂₀ −k ₂₀ i and assuming that d₁₀ is the thickness (unit: nm) of the upper layer, and d₂₀ is the thickness (unit: nm) of the lower layer, the more preferred combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀] are shown in Tables 1-A to 1-T (numerical aperture NA: 0.93≦NA≦1.0), Tables 2-A to 2-T (numerical aperture NA: 1.0<NA≦1.1), Tables 3-A to 3-T (numerical aperture NA: 1.1<NA≦1.2), Tables 4-A to 4-T (numerical aperture NA: 1.2<NA≦1.3), and Tables 5-A to 5-T (numerical aperture NA: 1.3<NA≦1.4). In other words, with these combinations, the minimum reflectance is achieved.

In Case A-01 to Case A-15 of Table 1-A or Table 11-A which will be described below, each value was obtained with the silicon oxide film having a thickness of 2 nm to 15 nm. In Case B-01 to Case B-22 of Table 1-B or Table 11-B which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 15 nm to 25 nm. In Case C-01 to Case C-18 of Table 1-C or Table 11-C which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 25 nm to 35 nm. In Case D-01 to Case D-20 of Table 1-D or Table 11-D which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 35 nm to 45 nm. In Case E-01 to Case E-17 of Table 1-E or Table 11-E which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 45 nm to 55 nm. In Case F-01 to Case F-17 of Table 1-F or Table 11-F which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 55 nm to 65 nm. In Case G-01 to Case G-16 of Table 1-G or Table 11-G which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 65 nm to 75 nm. In Case H-01 to Case H-16 of Table 1-H or Table 11-H which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 75 nm to 85 nm. In Case I-01 to Case I-23 of Table 1-I or Table 11-I which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 85 nm to 95 nm. In Case J-01 to Case J-15 of Table 1-J or Table 11-J which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 95 nm to 105 nm. In Case K-01 to Case K-13 of Table 1-K or Table 11-K which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 105 nm to 115 nm. In Case L-01 to Case L-12 of Table 1-L or Table 11-L which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 115 nm to 125 nm. In Case M-01 to Case M-12 of Table 1-M or Table 11-M which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 125 nm to 135 nm. In Case N-01 to Case N-12 of Table 1-N or Table 11-N which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 135 nm to 145 nm. In Case O-01 to Case O-13 of Table 1-O or Table 11-O which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 145 nm to 155 nm. In Case P-01 to Case P-14 of Table 1-P or Table 11-P which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 155 nm to 165 nm. In Case Q-01 to Case Q-13 of Table 1-Q or Table 11-Q which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 165 nm to 175 nm. In Case R-01 to Case R-13 of Table 1-R or Table 11-R which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 175 nm to 185 nm. In Case S-01 to Case S-15 of Table 1-S or Table 11-S which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 185 nm to 195 nm. In Case T-01 to Case T-13 of Table 1-T or Table 11-T which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 195 nm to 205 nm.

In Case A-01 to Case A-24 of Table 2-A or Table 12-A which will be described below, each value was obtained with the silicon oxide film having a thickness of 2 nm to 15 nm. In Case B-01 to Case B-22 of Table 2-B or Table 12-B which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 15 nm to 25 nm. In Case C-01 to Case C-16 of Table 2-C or Table 12-C which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 25 nm to 35 nm. In Case D-01 to Case D-14 of Table 2-D or Table 12-D which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 35 nm to 45 nm. In Case E-01 to Case E-14 of Table 2-E or Table 12-E which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 45 nm to 55 nm. In Case F-01 to Case F-16 of Table 2-F or Table 12-F which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 55 nm to 65 nm. In Case G-01 to Case G-16 of Table 2-G or Table 12-G which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 65 nm to 75 nm. In Case H-01 to Case H-17 of Table 2-H or Table 12-H which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 75 nm to 85 nm. In Case I-01 to Case I-15 of Table 2-I or Table 12-I which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 85 nm to 95 nm. In Case J-01 to Case J-13 of Table 2-J or Table 12-J which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 95 nm to 105 nm. In Case K-01 to Case K-12 of Table 2-K or Table 12-K which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 105 nm to 115 nm. In Case L-01 to Case L-13 of Table 2-L or Table 12-L which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 115 nm to 125 nm. In Case M-01 to Case M-11 of Table 2-M or Table 12-M which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 125 nm to 135 nm. In Case N-01 to Case N-12 of Table 2-N or Table 12-N which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 135 nm to 145 nm. In Case O-01 to Case O-12 of Table 2-O or Table 12-O which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 145 nm to 155 nm. In Case P-01 to Case P-12 of Table 2-P or Table 12-P which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 155 nm to 165 nm. In Case Q-01 to Case Q-12 of Table 2-Q or Table 12-Q which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 165 nm to 175 nm. In Case R-01 to Case R-10 of Table 2-R or Table 12-R which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 175 nm to 185 nm. In Case S-01 to Case S-13 of Table 2-S or Table 12-S which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 185 nm to 195 nm. In Case T-01 to Case T-12 of Table 2-T or Table 12-T which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 195 nm to 205 nm.

In Case A-01 to Case A-19 of Table 3-A or Table 13-A which will be described below, each value was obtained with the silicon oxide film having a thickness of 2 nm to 15 nm. In Case B-01 to Case B-17 of Table 3-B or Table 13-B which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 15 nm to 25 nm. In Case C-01 to Case C-14 of Table 3-C or Table 13-C which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 25 nm to 35 nm. In Case D-01 to Case D-13 of Table 3-D or Table 13-D which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 35 nm to 45 nm. In Case E-01 to Case E-13 of Table 3-E or Table 13-E which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 45 nm to 55 nm. In Case F-01 to Case F-12 of Table 3-F or Table 13-F which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 55 nm to 65 nm. In Case G-01 to Case G-13 of Table 3-G or Table 13-G which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 65 nm to 75 nm. In Case H-01 to Case H-15 of Table 3-H or Table 13-H which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 75 nm to 85 nm. In Case I-01 to Case I-13 of Table 3-I or Table 13-I which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 85 nm to 95 nm. In Case J-01 to Case J-12 of Table 3-J or Table 13-J which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 95 nm to 105 nm. In Case K-01 to Case K-09 of Table 3-K or Table 13-K which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 105 nm to 115 nm. In Case L-01 to Case L-10 of Table 3-L or Table 13-L which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 115 nm to 125 nm. In Case M-01 to Case M-09 of Table 3-M or Table 13-M which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 125 nm to 135 nm. In Case N-01 to Case N-10 of Table 3-N or Table 13-N which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 135 nm to 145 nm. In Case O-01 to Case O-09 of Table 3-O or Table 13-O which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 145 nm to 155 nm. In Case P-01 to Case P-09 of Table 3-P or Table 13-P which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 155 nm to 165 nm. In Case Q-01 to Case Q-09 of Table 3-Q or Table 13-Q which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 165 nm to 175 nm. In Case R-01 to Case R-08 of Table 3-R or Table 13-R which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 175 nm to 185 nm. In Case S-01 to Case S-10 of Table 3-S or Table 13-S which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 185 nm to 195 nm. In Case T-01 to Case T-11 of Table 3-T or Table 13-T which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 195 nm to 205 nm.

In Case A-01 to Case A-13 of Table 4-A or Table 14-A which will be described below, each value was obtained with the silicon oxide film having a thickness of 2 nm to 15 nm. In Case B-01 to Case B-10 of Table 4-B or Table 14-B which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 15 nm to 25 nm. In Case C-01 to Case C-08 of Table 4-C or Table 14-C which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 25 nm to 35 nm. In Case D-01 to Case D-09 of Table 4-D or Table 14-D which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 35 nm to 45 nm. In Case E-01 to Case E-08 of Table 4-E or Table 14-E which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 45 nm to 55 nm. In Case F-01 to Case F-08 of Table 4-F or Table 14-F which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 55 nm to 65 nm. In Case G-01 to Case G-08 of Table 4-G or Table 14-G which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 65 nm to 75 nm. In Case H-01 to Case H-07 of Table 4-H or Table 14-H which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 75 nm to 85 nm. In Case I-01 to Case I-07 of Table 4-I or Table 14-I which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 85 nm to 95 nm. In Case J-01 to Case J-06 of Table 4-J or Table 14-J which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 95 nm to 105 nm. In Case K-01 to Case K-07 of Table 4-K or Table 14-K which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 105 nm to 115 nm. In Case L-01 to Case L-08 of Table 4-L or Table 14-L which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 115 nm to 125 nm. In Case M-01 to Case M-07 of Table 4-M or Table 14-M which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 125 nm to 135 nm. In Case N-01 to Case N-07 of Table 4-N or Table 14-N which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 135 nm to 145 nm. In Case O-01 to Case O-07 of Table 4-O or Table 14-O which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 145 nm to 155 nm. In Case P-01 to Case P-07 of Table 4-P or Table 14-P which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 155 nm to 165 nm. In Case Q-01 to Case Q-07 of Table 4-Q or Table 14-Q which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 165 nm to 175 nm. In Case R-01 to Case R-05 of Table 4-R or Table 14-R which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 175 nm to 185 nm. In Case S-01 to Case S-07 of Table 4-S or Table 14-S which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 185 nm to 195 nm. In Case T-01 to Case T-07 of Table 4-T or Table 14-T which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 195 nm to 205 nm.

In Case A-01 to Case A-11 of Table 5-A or Table 15-A which will be described below, each value was obtained with the silicon oxide film having a thickness of 2 nm to 15 nm. In Case B-01 to Case B-10 of Table 5-B or Table 15-B which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 15 nm to 25 nm. In Case C-01 to Case C-06 of Table 5-C or Table 15-C which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 25 nm to 35 nm. In Case D-01 to Case D-07 of Table 5-D or Table 15-D which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 35 nm to 45 nm. In Case E-01 to Case E-07 of Table 5-E or Table 15-E which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 45 nm to 55 nm. In Case F-01 to Case F-06 of Table 5-F or Table 15-F which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 55 nm to 65 nm. In Case G-01 to Case G-07 of Table 5-G or Table 15-G which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 65 nm to 75 nm. In Case H-01 to Case H-07 of Table 5-H or Table 15-H which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 75 nm to 85 nm. In Case I-01 to Case I-06 of Table 5-I or Table 15-I which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 85 nm to 95 nm. In Case J-01 to Case J-06 of Table 5-J or Table 15-J which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 95 nm to 105 nm. In Case K-01 to Case K-05 of Table 5-K or Table 15-K which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 105 nm to 115 nm. In Case L-01 to Case L-07 of Table 5-L or Table 15-L which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 115 nm to 125 nm. In Case M-01 to Case M-07 of Table 5-M or Table 15-M which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 125 nm to 135 nm. In Case N-01 to Case N-06 of Table 5-N or Table 15-N which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 135 nm to 145 nm. In Case O-01 to Case O-06 of Table 5-O or Table 15-O which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 145 nm to 155 nm. In Case P-01 to Case P-06 of Table 5-P or Table 15-P which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 155 nm to 165 nm. In Case Q-01 to Case Q-04 of Table 5-Q or Table 15-Q which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 165 nm to 175 nm. In Case R-01 to Case R-05 of Table 5-R or Table 15-R which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 175 nm to 185 nm. In Case S-01 to Case S-07 of Table 5-S or Table 15-S which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 185 nm to 195 nm. In Case T-01 to Case T-06 of Table 5-T or Table 15-T which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 195 nm to 205 nm.

In other words, under the above-mentioned conditions, when the numerical aperture NA is 0.93≦NA≦1.0, the minimum reflectance can be obtained at 15 points (15 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of 2 nm to 15 nm; the minimum reflectance can be obtained at 22 points (22 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 15 nm to 25 nm; the minimum reflectance can be obtained at 18 points (18 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 25 nm to 35 nm; the minimum reflectance can be obtained at 20 points (20 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 35 nm to 45 nm; the minimum reflectance can be obtained at 17 points (17 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 45 nm to 55 nm; the minimum reflectance can be obtained at 17 points (17 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 55 nm to 65 nm; the minimum reflectance can be obtained at 16 points (16 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 65 nm to 75 nm; the minimum reflectance can be obtained at 16 points (15 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 75 nm to 85 nm; the minimum reflectance can be obtained at 23 points (23 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 85 nm to 95 nm; the minimum reflectance can be obtained at 15 points (15 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 95 nm to 105 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 105 nm to 115 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 115 nm to 125 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 125 nm to 135 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 135 nm to 145 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 145 nm to 155 nm; the minimum reflectance can be obtained at 14 points (14 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 155 nm to 165 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 165 nm to 175 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 175 nm to 185 nm; the minimum reflectance can be obtained at 15 points (15 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 185 nm to 195 nm; and the minimum reflectance can be obtained at 13 points (13 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 195 nm to 205 nm.

Furthermore, under the above-mentioned conditions, when the numerical aperture NA is 1.0<NA≦1.1, the minimum reflectance can be obtained at 24 points (24 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of 2 nm to 15 nm; the minimum reflectance can be obtained at 22 points (22 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 15 nm to 25 nm; the minimum reflectance can be obtained at 16 points (16 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 25 nm to 35 nm; the minimum reflectance can be obtained at 14 points (14 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 35 nm to 45 nm; the minimum reflectance can be obtained at 14 points (14 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 45 nm to 55 nm; the minimum reflectance can be obtained at 16 points (16 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 55 nm to 65 nm; the minimum reflectance can be obtained at 16 points (16 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 65 nm to 75 nm; the minimum reflectance can be obtained at 17 points (17 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 75 nm to 85 nm; the minimum reflectance can be obtained at 15 points (15 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 85 nm to 95 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 95 nm to 105 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 105 nm to 115 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 115 nm to 125 nm; the minimum reflectance can be obtained at 11 points (11 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 125 nm to 135 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 135 nm to 145 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 145 nm to 155 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 155 nm to 165 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 165 nm to 175 nm; the minimum reflectance can be obtained at 10 points (10 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 175 nm to 185 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 185 nm to 195 nm; and the minimum reflectance can be obtained at 12 points (12 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 195 nm to 205 nm.

Furthermore, under the above-mentioned conditions, when the numerical aperture NA is 1.1<NA≦1.2, the minimum reflectance can be obtained at 19 points (19 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of 2 nm to 15 nm; the minimum reflectance can be obtained at 17 points (17 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 15 nm to 25 nm; the minimum reflectance can be obtained at 14 points (14 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 25 nm to 35 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 35 nm to 45 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 45 nm to 55 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 55 nm to 65 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 65 nm to 75 nm; the minimum reflectance can be obtained at 15 points (15 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 75 nm to 85 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 85 nm to 95 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 95 nm to 105 nm; the minimum reflectance can be obtained at 9 points (9 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 105 nm to 115 nm; the minimum reflectance can be obtained at 10 points (10 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 115 nm to 125 nm; the minimum reflectance can be obtained at 9 points (9 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 125 nm to 135 nm; the minimum reflectance can be obtained at 10 points (10 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 135 nm to 145 nm; the minimum reflectance can be obtained at 9 points (9 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 145 nm to 155 nm; the minimum reflectance can be obtained at 9 points (9 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 155 nm to 165 nm; the minimum reflectance can be obtained at 9 points (9 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 165 nm to 175 nm; the minimum reflectance can be obtained at 8 points (8 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 175 nm to 185 nm; the minimum reflectance can be obtained at 10 points (10 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 185 nm to 195 nm; and the minimum reflectance can be obtained at 11 points (11 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 195 nm to 205 nm.

In addition, under the above-mentioned conditions, when the numerical aperture NA is 1.2<NA≦1.3, the minimum reflectance can be obtained at 13 points (13 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of 2 nm to 15 nm; the minimum reflectance can be obtained at 10 points (10 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 15 nm to 25 nm; the minimum reflectance can be obtained at 8 points (8 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 25 nm to 35 nm; the minimum reflectance can be obtained at 9 points (9 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 35 nm to 45 nm; the minimum reflectance can be obtained at 8 points (8 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 45 nm to 55 nm; the minimum reflectance can be obtained at 8 points (8 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 55 nm to 65 nm; the minimum reflectance can be obtained at 8 points (8 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 65 nm to 75 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 75 nm to 85 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 85 nm to 95 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 95 nm to 105 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 105 nm to 115 nm; the minimum reflectance can be obtained at 8 points (8 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 115 nm to 125 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 125 nm to 135 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 135 nm to 145 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 145 nm to 155 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 155 nm to 165 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 165 nm to 175 nm; the minimum reflectance can be obtained at 5 points (5 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 175 nm to 185 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 185 nm to 195 nm; and the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 195 nm to 205 nm.

Furthermore, under the above-mentioned conditions, when the numerical aperture NA is 1.3<NA≦1.4, the minimum reflectance can be obtained at 11 points (11 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of 2 nm to 15 nm; the minimum reflectance can be obtained at 10 points (10 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 15 nm to 25 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 25 nm to 35 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 35 nm to 45 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 45 nm to 55 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 55 nm to 65 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 65 nm to 75 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 75 nm to 85 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 85 nm to 95 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 95 nm to 105 nm; the minimum reflectance can be obtained at 5 points (5 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 105 nm to 115 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 115 nm to 125 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 125 nm to 135 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 135 nm to 145 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 145 nm to 155 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 155 nm to 165 nm; the minimum reflectance can be obtained at 4 points (4 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 165 nm to 175 nm; the minimum reflectance can be obtained at 5 points (5 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 175 nm to 185 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 185 nm to 195 nm; and the minimum reflectance can be obtained at 6 points (6 combinations of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]) with the silicon oxide film having a thickness of more than 195 nm to 205 nm.

TABLE 1-A Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ A-01 2.0730313 0.1156327 23.933 2.6749484 1.5695754 9.886 A-02 1.8546637 0.1676093 29.838 2.1886012 0.6118019 59.764 A-03 1.8612247 0.1278895 20.208 1.8193379 0.4029416 139.994 A-04 1.8595613 0.0953387 19.978 1.8569207 0.3273808 190.296 A-05 1.7706199 0.0916054 91.022 1.9614270 0.4555299 69.218 A-06 1.7659509 0.0861113 89.673 1.8683083 0.3142437 129.384 A-07 1.7540284 0.0810034 89.258 1.7976000 0.2440877 193.603 A-08 1.7206295 0.0765846 163.688 2.0072987 0.9099501 15.109 A-09 1.7312076 0.0743303 158.443 1.9328063 0.4029485 69.389 A-10 1.7317652 0.0746087 156.047 1.8225538 0.2736014 132.296 A-11 1.7235310 0.0712769 155.759 1.7500411 0.2147794 197.972 A-12 1.7093992 0.0595462 237.275 5.0249130 2.4786958 1.776 A-13 1.7192548 0.0668813 223.222 1.9244861 0.3767470 68.925 A-14 1.7183512 0.0690717 220.755 1.7884626 0.2530536 134.430 A-15 1.7097773 0.0638868 221.916 1.7175992 0.2031308 199.649

TABLE 1-B Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ B-01 1.8890717 0.2231211 31.297 2.2536461 1.9138327 8.426 B-02 1.8040788 0.2224671 38.783 3.4285504 0.7115044 30.090 B-03 1.8569330 0.1887211 31.358 2.3482559 0.7139401 49.395 B-04 1.8246631 0.1852786 29.866 2.0267942 0.6589875 61.419 B-05 1.8713633 0.1359350 20.765 1.8449284 0.4410677 129.533 B-06 1.8537764 0.1095380 19.190 1.8083352 0.3385915 190.096 B-07 1.8773918 0.0811836 15.072 1.7885130 0.2812935 250.952 B-08 1.7913209 0.1069315 93.104 2.1120296 1.5705728 8.709 B-09 1.7961812 0.0967122 91.592 2.2985234 0.5621108 49.876 B-10 1.7719309 0.0907051 89.644 1.8982310 0.3437292 119.550 B-11 1.7573553 0.0844391 89.273 1.8090385 0.2599016 184.203 B-12 1.7321027 0.0771807 89.432 1.7181480 0.2108133 254.601 B-13 1.7251448 0.0782108 166.474 2.6560327 2.0752579 4.495 B-14 1.7347815 0.0789970 158.854 2.0166404 0.4697089 58.957 B-15 1.7337052 0.0782079 156.164 1.8413069 0.2975845 122.955 B-16 1.7245076 0.0739010 155.712 1.7533528 0.2275719 189.273 B-17 1.7100620 0.0639207 155.553 1.6863114 0.1891021 256.528 B-18 1.7130788 0.0658962 233.281 3.3653368 2.7431658 2.501 B-19 1.7208745 0.0708686 223.560 1.9877972 0.4366658 59.393 B-20 1.7192161 0.0720786 220.745 1.7983405 0.2740582 125.643 B-21 1.7100814 0.0661341 221.783 1.7179584 0.2146738 191.114 B-22 1.7028062 0.0572529 219.613 1.6741304 0.1784680 256.090

TABLE 1-C Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ C-01 1.7462297 0.2650661 38.584 1.8811342 2.5474890 6.719 C-02 1.7852920 0.2379686 38.995 3.2453891 0.8215227 29.990 C-03 1.8064124 0.2063789 31.400 2.0415396 0.7493942 55.163 C-04 1.8761841 0.1465026 22.050 1.8871554 0.4863835 118.487 C-05 1.8732427 0.1107685 18.888 1.8328297 0.3644393 179.928 C-06 1.8809997 0.0844859 15.636 1.8003278 0.2965881 241.202 C-07 1.8353407 0.1336488 86.851 1.6000470 1.7695220 10.059 C-08 1.8107063 0.1074834 91.200 2.5616901 0.6655713 40.111 C-09 1.7800259 0.0966903 89.638 1.9474319 0.3779800 109.424 C-10 1.7589519 0.0885227 89.033 1.8081258 0.2753975 177.335 C-11 1.7385561 0.0961686 161.111 1.8448216 2.2148249 5.861 C-12 1.7392392 0.0859424 158.474 2.1008270 0.5469970 50.862 C-13 1.7355979 0.0828161 155.982 1.8545146 0.3232472 115.179 C-14 1.7252169 0.0770491 155.656 1.7550901 0.2413910 181.353 C-15 1.7185486 0.0788457 229.847 3.2610273 4.4183916 1.558 C-16 1.7228369 0.0769315 222.858 2.0210736 0.5011654 62.892 C-17 1.7199449 0.0760859 220.491 1.8037789 0.2965908 118.134 C-18 1.7101979 0.0687675 221.639 1.7165312 0.2274377 183.246

TABLE 1-D Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ D-01 1.8047095 0.2694194 36.421 2.9911125 1.0218786 30.087 D-02 1.8098021 0.2379756 31.711 2.1295160 0.9059492 46.199 D-03 1.8915289 0.1677232 26.420 2.1348336 0.5678980 93.459 D-04 1.8869810 0.1583242 22.598 1.9270572 0.5352831 108.068 D-05 1.8679863 0.1633407 22.571 1.8682373 0.5190358 112.596 D-06 1.8894047 0.1134244 18.623 1.8513003 0.3877744 170.528 D-07 1.9013640 0.0821095 14.880 1.8106171 0.3102506 232.433 D-08 1.7974174 0.1211843 88.331 2.0615819 0.7049601 48.141 D-09 1.7778270 0.1038067 88.747 1.9023003 0.4013081 106.512 D-10 1.7589001 0.0931193 88.775 1.8006679 0.2880356 170.885 D-11 1.7310401 0.0827558 89.146 1.7041670 0.2282102 240.157 D-12 1.7404520 0.0960720 155.339 1.9461112 0.5942640 50.887 D-13 1.7353985 0.0882239 154.960 1.8293633 0.3421815 110.529 D-14 1.7244370 0.0802890 155.397 1.7457172 0.2519901 174.646 D-15 1.7094852 0.0677575 155.056 1.6751093 0.2044537 241.084 D-16 1.7305468 0.1083688 224.105 3.7612310 9.7520181 0.557 D-17 1.7234847 0.0859582 219.529 1.8940064 0.5381566 52.122 D-18 1.7196555 0.0809985 219.492 1.7865237 0.3130643 112.555 D-19 1.7094719 0.0713058 221.454 1.7085534 0.2375210 175.858 D-20 1.7026367 0.0605694 219.016 1.6670562 0.1929642 239.742

TABLE 1-E Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ E-01 1.7952075 0.2631488 28.407 1.7975159 0.9080589 49.215 E-02 1.8907711 0.1709411 22.060 1.9054700 0.5625340 101.512 E-03 1.9054716 0.1139096 18.051 1.8637077 0.4032117 161.182 E-04 1.9347861 0.0660701 14.149 1.8512928 0.3248351 218.499 E-05 1.9562331 0.1018371 10.504 1.7371318 0.3049135 238.789 E-06 1.7844085 0.1367381 84.299 1.7096132 0.6495191 54.242 E-07 1.7702622 0.1105738 87.211 1.8115599 0.4022198 106.122 E-08 1.7541370 0.0973387 88.132 1.7670571 0.2903421 167.020 E-09 1.7279592 0.0846136 88.943 1.6883751 0.2308596 233.281 E-10 1.7375980 0.1054836 150.710 1.7055974 0.5608974 53.799 E-11 1.7329681 0.0932680 153.145 1.7707311 0.3436851 107.979 E-12 1.7221048 0.0829100 154.966 1.7249696 0.2554267 168.643 E-13 1.7083331 0.0687145 154.712 1.6656993 0.2071468 233.037 E-14 1.7220084 0.0940320 214.741 1.7051250 0.5097600 53.504 E-15 1.7182277 0.0857940 217.589 1.7452872 0.3145186 108.615 E-16 1.7079026 0.0731017 221.285 1.6934483 0.2412999 168.585 E-17 1.7021324 0.0613637 218.642 1.6620357 0.1957858 230.920

TABLE 1-F Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ F-01 1.7605068 0.2771672 28.706 1.6786286 0.9008770 43.735 F-02 1.8816347 0.1829378 20.725 1.8151288 0.5496963 99.755 F-03 1.9020430 0.1268282 16.538 1.7976518 0.3935708 160.685 F-04 1.9458467 0.0703715 13.048 1.8275971 0.3251874 213.311 F-05 1.9584022 0.1032605 10.534 1.7382432 0.3086817 229.129 F-06 1.7915017 0.1460711 82.108 1.6599684 0.6598461 47.036 F-07 1.7682864 0.1152280 86.246 1.7730752 0.3999868 100.473 F-08 1.7517777 0.1000283 87.803 1.7495420 0.2902721 159.986 F-09 1.7257399 0.0854213 88.823 1.6774661 0.2313191 224.881 F-10 1.7391311 0.1111219 148.271 1.6415570 0.5493559 47.977 F-11 1.7320844 0.0968192 152.055 1.7411899 0.3409343 101.751 F-12 1.7076855 0.0689521 154.586 1.6612710 0.2081961 223.547 F-13 1.7203924 0.0842770 154.911 1.7118542 0.2561923 160.544 F-14 1.7223192 0.0985051 212.081 1.6387426 0.4904233 48.284 F-15 1.7173463 0.0890019 216.420 1.7205682 0.3116849 102.035 F-16 1.7068337 0.0738736 221.446 1.6845656 0.2425094 159.621 F-17 1.7019545 0.0615388 218.498 1.6606500 0.1970435 220.941

TABLE 1-G Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ G-01 1.7659038 0.3040912 29.683 1.6951746 1.0159152 32.660 G-02 1.8645399 0.1945245 22.504 1.8232494 0.5745287 88.735 G-03 1.8986420 0.1330684 17.099 1.7981378 0.4053118 150.314 G-04 1.9431410 0.1068639 11.420 1.7406778 0.3159076 217.432 G-05 1.8260230 0.1610409 82.141 1.8123655 0.8416018 29.750 G-06 1.7771488 0.1183021 86.874 1.8193233 0.4301648 86.325 G-07 1.7544343 0.1010010 88.257 1.7618403 0.3008540 147.888 G-08 1.7270080 0.0859818 88.900 1.6808707 0.2360835 214.142 G-09 1.7474077 0.1187907 148.872 1.6925268 0.6251022 34.244 G-10 1.7344421 0.0986199 153.031 1.7617910 0.3597954 89.143 G-11 1.7082851 0.0693971 154.668 1.6632564 0.2120421 213.175 G-12 1.7212227 0.0845898 155.411 1.7183974 0.2642962 149.129 G-13 1.7256274 0.1038247 212.824 1.6530934 0.5317369 36.133 G-14 1.7180408 0.0895343 218.202 1.7315716 0.3280557 89.506 G-15 1.7074443 0.0742263 221.707 1.6896767 0.2496384 148.627 G-16 1.7023147 0.0619030 218.598 1.6620389 0.2005572 210.752

TABLE 1-H Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ H-01 1.7563588 0.3324096 35.374 1.9274523 1.4642575 17.251 H-02 1.8511230 0.2092311 25.991 1.9063465 0.6506745 73.686 H-03 1.8843188 0.1443736 18.736 1.8018968 0.4300566 139.851 H-04 1.9287462 0.1105115 12.655 1.7494498 0.3311673 205.772 H-05 1.8353218 0.1759033 87.389 2.1171648 1.3140425 13.979 H-06 1.7950810 0.1221034 88.670 1.9787137 0.5126318 67.257 H-07 1.7627960 0.1022278 88.862 1.8048095 0.3274205 133.479 H-08 1.7313791 0.0877850 88.999 1.6945552 0.2478313 202.902 H-09 1.7608801 0.1266208 153.509 1.9275665 0.9887124 15.987 H-10 1.7394221 0.0996664 155.305 1.8479873 0.4176577 72.839 H-11 1.7245671 0.0857616 155.774 1.7414131 0.2835597 136.971 H-12 1.7098549 0.0711157 154.844 1.6689951 0.2212317 203.148 H-13 1.7314445 0.1087664 218.242 1.7862714 0.7962122 18.394 H-14 1.7204815 0.0894136 220.453 1.7885409 0.3769446 74.763 H-15 1.7093097 0.0755678 221.580 1.7021793 0.2655853 137.968 H-16 1.7029357 0.0634027 218.717 1.6626290 0.2083407 201.624

TABLE 1-I Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ I-01 1.7289685 0.3314086 44.247 5.1412592 5.4454539 1.484 I-02 1.8452520 0.2255929 26.855 1.9037614 0.7221490 66.898 I-03 1.8988873 0.1475831 20.944 1.8997324 0.4893775 122.094 I-04 1.8877112 0.1535471 19.669 1.8220692 0.4687151 129.650 I-05 1.9267904 0.0947520 15.612 1.8437835 0.3693724 183.529 I-06 1.9311024 0.1132645 13.318 1.7624681 0.3523973 195.472 I-07 1.9377300 0.0882760 11.094 1.7478213 0.2927773 252.908 I-08 1.8321358 0.1783607 92.959 3.8484718 3.7040697 2.442 I-09 1.8340055 0.1409526 90.549 2.7003837 0.6754163 40.010 I-10 1.7711711 0.1059247 89.053 1.8505388 0.3612112 121.432 I-11 1.7360863 0.0911204 88.900 1.7067614 0.2637604 192.941 I-12 1.7197908 0.0799131 88.028 1.6618119 0.2120965 257.777 I-13 1.7660895 0.1278221 159.319 4.3535883 4.0919379 1.526 I-14 1.7439719 0.1032091 156.425 1.9650733 0.4980866 59.654 I-15 1.7279356 0.0888807 155.640 1.7635448 0.3088945 126.749 I-16 1.7114085 0.0740744 154.740 1.6716288 0.2338686 194.347 I-17 1.7070625 0.0641745 153.245 1.6634512 0.1921909 254.410 I-18 1.7347333 0.1100034 225.621 4.2666617 4.0109081 1.346 I-19 1.7230132 0.0920219 220.898 1.8597675 0.4430799 63.229 I-20 1.7111302 0.0786417 221.002 1.7127614 0.2870105 128.848 I-21 1.7035342 0.0659797 218.617 1.6615801 0.2195726 193.289 I-22 1.7027484 0.0572097 216.627 1.6695991 0.1821496 251.116 I-23 1.7001226 0.0542621 277.695 1.6762439 0.1770375 248.521

TABLE 1-J Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ J-01 1.8593145 0.2496127 26.535 1.9155767 0.8329906 59.684 J-02 1.9010800 0.1636004 19.815 1.8411706 0.5121692 120.535 J-03 1.9204218 0.1149718 15.218 1.7975616 0.3794158 182.059 J-04 1.9438629 0.1088618 10.610 1.7190727 0.2999844 250.015 J-05 1.8201241 0.1437532 89.353 2.3681639 0.7410526 43.212 J-06 1.7719135 0.1119845 88.526 1.8420973 0.3885265 115.256 J-07 1.7372876 0.0953951 88.555 1.7021944 0.2779787 185.353 J-08 1.7204595 0.0830085 87.798 1.6574450 0.2209480 249.744 J-09 1.7445424 0.1106490 155.347 1.9643384 0.5665503 53.939 J-10 1.7286821 0.0936244 154.936 1.7602486 0.3317476 119.649 J-11 1.7117780 0.0773392 154.355 1.6664488 0.2460450 186.501 J-12 1.7072616 0.0664543 152.987 1.6597858 0.2000883 246.239 J-13 1.7114074 0.0830146 220.011 1.7075466 0.3068810 121.613 J-14 1.7035514 0.0688006 218.183 1.6565327 0.2307053 185.316 J-15 1.7027912 0.0591414 216.340 1.6669294 0.1896158 242.803

TABLE 1-K Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ K-01 1.8881577 0.2795127 22.871 1.7550786 0.8705815 60.032 K-02 1.9218914 0.1797398 17.442 1.7746647 0.5227186 119.813 K-03 1.9458883 0.1322078 13.080 1.7478516 0.3833699 181.809 K-04 1.9409291 0.1179060 10.849 1.7108849 0.3088835 241.776 K-05 1.7882093 0.1515662 85.800 1.7933752 0.6703287 55.966 K-06 1.7649059 0.1193411 87.339 1.7745734 0.3964773 113.800 K-07 1.7337710 0.0996522 88.039 1.6760618 0.2847568 179.842 K-08 1.7199633 0.0855558 87.477 1.6497564 0.2267213 241.489 K-09 1.7259527 0.0989978 153.714 1.7204930 0.3415865 115.571 K-10 1.7103936 0.0800216 153.726 1.6497935 0.2528816 179.482 K-11 1.7070930 0.0681638 152.585 1.6551703 0.2055639 237.501 K-12 1.7028018 0.0710148 217.506 1.64S6663 0.2376270 177.429 K-13 1.7027432 0.0605235 215.929 1.6646615 0.1950188 233.713

TABLE 1-L Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ L-01 1.8909431 0.3085424 20.418 1.5964478 0.8353138 60.909 L-02 1.9524263 0.1909748 15.444 1.7414925 0.5288169 116.361 L-03 1.9741784 0.1389140 11.832 1.7353816 0.3892797 176.360 L-04 1.9011191 0.1449022 11.795 1.6673230 0.3043383 237.538 L-05 1.7812655 0.1647646 82.868 1.6154117 0.6141968 58.066 L-06 1.7599364 0.1268761 86.158 1.7200975 0.3928633 111.244 L-07 1.7294022 0.1028924 87.627 1.6470339 0.2862372 173.600 L-08 1.7193592 0.0869972 87.259 1.6442041 0.2301394 231.990 L-09 1.7088052 0.0815889 153.347 1.6346844 0.2563356 171.193 L-10 1.7070991 0.0689994 152.325 1.6535493 0.2091466 227.454 L-11 1.7021164 0.0722203 217.158 1.6379690 0.2419462 168.107 L-12 1.7030336 0.0611451 215.722 1.6657846 0.1987136 223.276

TABLE 1-M Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ M-01 1.8737564 0.3367363 20.276 1.5133470 0.8454522 55.480 M-02 1.9697383 0.2020294 14.764 1.7299638 0.5429087 109.268 M-03 1.9916260 0.1477036 11.315 1.7257470 0.3987910 168.578 M-04 1.9141720 0.1461879 11.459 1.6683491 0.3122132 226.037 M-05 1.7868889 0.1795709 80.605 1.5409994 0.6011754 53.925 M-06 1.7600620 0.1342170 85.615 1.6974715 0.3980869 104.529 M-07 1.7276490 0.1044918 87.663 1.6338870 0.2915200 164.129 M-08 1.7199953 0.0874837 87.278 1.6452183 0.2346970 221.092 M-09 1.7084320 0.0820944 153.448 1.6304269 0.2625567 160.685 M-10 1.7077870 0.0691595 152.438 1.6574806 0.2137196 216.250 M-11 1.7022055 0.0725208 217.368 1.6389178 0.2487144 157.041 M-12 1.7036940 0.0612465 215.927 1.6705104 0.2029113 212.129

TABLE 1-N Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ N-01 1.8402862 0.3700261 23.403 1.4966418 1.0039549 41.463 N-02 1.9646387 0.2123233 16.447 1.7618069 0.5971846 94.995 N-03 1.9624104 0.1584699 12.893 1.7211612 0.4176484 156.173 N-04 1.9059084 0.1473615 12.089 1.6694213 0.3203376 216.011 N-05 1.8166660 0.1977639 79.798 1.5572201 0.7204992 40.224 N-06 1.7655719 0.1384976 86.596 1.7129955 0.4320226 91.539 N-07 1.7293285 0.1055583 87.952 1.6364176 0.3040668 153.339 N-08 1.7214396 0.0882507 87.451 1.6482275 0.2416232 210.993 N-09 1.7092770 0.0826318 153.805 1.6322979 0.2733763 150.296 N-10 1.7085071 0.0697446 152.663 1.6592624 0.2197085 206.543 N-11 1.7027802 0.0728517 217.779 1.6405373 0.2588103 146.936 N-12 1.7041709 0.0617202 216.194 1.6719897 0.2085423 202.593

TABLE 1-O Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ O-01 1.8199816 0.4068444 29.022 1.5974175 1.4701111 24.558 O-02 1.9318464 0.2280177 20.237 1.8212470 0.6871951 79.181 O-03 1.9476580 0.1546474 15.042 1.7660961 0.4559575 140.877 O-04 1.9400781 0.1580344 15.180 1.7558824 0.4525330 141.749 O-05 1.9152409 0.1421080 12.506 1.6892699 0.3391765 204.998 O-06 1.8773964 0.2151408 81.211 1.7568637 1.2210655 20.666 O-07 1.7792899 0.1408151 87.880 1.7944868 0.5090378 75.457 O-08 1.7347668 0.1082989 88.119 1.6522930 0.3260600 142.664 O-09 1.7234258 0.0907869 87.442 1.6482492 0.2516544 202.556 O-10 1.7112569 0.0850611 153.930 1.6361524 0.2898839 141.116 O-11 1.7092054 0.0717413 152.725 1.6572540 0.2283199 198.410 O-12 1.7036310 0.0749476 217.788 1.6384900 0.2727185 138.609 O-13 1.7042855 0.0635030 216.233 1.6687346 0.2164860 194.709

TABLE 1-P Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ P-01 1.8175791 0.4385823 37.187 2.9488620 3.6605721 5.671 P-02 1.9193642 0.2501320 21.908 1.8321620 0.7789298 69.456 P-03 1.9516445 0.1607715 15.944 1.7911399 0.4964603 129.934 P-04 1.9419697 0.1648951 16.094 1.7764317 0.4910919 131.139 P-05 1.9282358 0.1504554 12.282 1.6857745 0.3551730 198.143 P-06 1.8704725 0.2299368 88.746 2.8158519 3.0739838 4.992 P-07 1.7960814 0.1479091 88.347 1.9330235 0.6225271 60.492 P-08 1.7418606 0.1134159 87.888 1.6717189 0.3550776 132.384 P-09 1.7257176 0.0948039 87.264 1.6472351 0.2650084 194.269 P-10 1.7136245 0.0896483 153.565 1.6392609 0.3111392 132.434 P-11 1.7097149 0.0750113 152.537 1.6527377 0.2392317 190.639 P-12 1.7044725 0.0790614 217.265 1.6350180 0.2903973 130.687 P-13 1.7041849 0.0664191 215.910 1.6625759 0.2261823 187.261 P-14 1.7061658 0.0592006 215.675 1.6951633 0.1893046 240.772

TABLE 1-Q Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ Q-01 1.9650460 0.1748342 15.368 1.7719438 0.5219218 124.100 Q-02 1.9384951 0.1550287 12.323 1.6895811 0.3734128 189.293 Q-03 1.9139584 0.1299465 11.343 1.6883766 0.3007198 246.427 Q-04 1.7857662 0.1574086 86.539 1.7907030 0.6497694 59.718 Q-05 1.7433983 0.1202381 87.036 1.6559011 0.3733381 125.629 Q-06 1.7262549 0.0993784 86.812 1.6373093 0.2753256 186.729 Q-07 1.7236673 0.0842645 87.109 1.6685549 0.2274459 241.120 Q-08 1.7140199 0.0949670 152.601 1.6238426 0.3258368 125.450 Q-09 1.7096017 0.0783956 152.026 1.6437329 0.2483227 182.921 Q-10 1.7107217 0.0680252 152.100 1.6799600 0.2063397 236.403 Q-11 1.7042582 0.0836625 216.186 1.6202806 0.3033538 123.599 Q-12 1.7037677 0.0692974 215.313 1.6544674 0.2346728 179.446 Q-13 1.7056779 0.0609868 215.198 1.6903958 0.1952987 232.683

TABLE 1-R Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ R-01 1.9750220 0.3055970 17.312 1.6357631 0.8207912 66.973 R-02 1.9943589 0.1905841 13.627 1.7309349 0.5263943 122.033 R-03 1.9365478 0.1715491 12.200 1.6649916 0.3790440 183.216 R-04 1.8874503 0.1503402 12.006 1.6561886 0.2991899 242.151 R-05 1.7406539 0.1271964 86.109 1.6157675 0.3771605 120.682 R-06 1.7253418 0.1032843 86.339 1.6224018 0.2809650 178.956 R-07 1.7237735 0.0864157 86.885 1.6650124 0.2327133 231.784 R-08 1.7126639 0.0996282 151.701 1.5953952 0.3310599 118.977 R-09 1.7091592 0.0809109 151.551 1.6344497 0.2545275 174.271 R-10 1.7108527 0.0696108 151.827 1.6784072 0.2111338 226.839 R-11 1.7032995 0.0874338 215.388 1.6000078 0.3100603 116.088 R-12 1.7035257 0.0712651 214.888 1.6490638 0.2413259 170.219 R-13 1.7058486 0.0623526 214.924 1.6902455 0.1999123 222.958

TABLE 1-S Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ S-01 2.0157422 0.3310994 15.233 1.5732193 0.8191417 66.313 S-02 1.9298641 0.1874025 12.335 1.6401635 0.3856200 174.874 S-03 1.9158213 0.1413868 11.496 1.6782430 0.3150440 226.685 S-04 1.9035507 0.0919796 11.593 1.7330388 0.2716233 274.138 S-05 1.7387191 0.1333266 85.772 1.5838112 0.3839989 113.170 S-06 1.7256246 0.1055723 86.279 1.6177137 0.2895611 168.375 S-07 1.7253546 0.0874820 86.928 1.6696157 0.2389730 220.361 S-08 1.7287042 0.0760165 87.515 1.7081188 0.2041866 272.150 S-09 1.7096582 0.0821714 151.624 1.6358848 0.2635969 162.984 S-10 1.7121643 0.0705329 152.001 1.6853812 0.2167566 215.233 S-11 1.7151566 0.0645755 152.412 1.7135234 0.1842756 268.692 S-12 1.7029318 0.0900998 215.656 1.5920483 0.3226491 105.543 S-13 1.7041956 0.0721897 215.114 1.6533659 0.2502000 158.704 S-14 1.7070069 0.0633145 215.207 1.6971996 0.2048445 211.558 S-15 1.7080920 0.0595697 215.250 1.7125257 0.1741269 267.229

TABLE 1-T Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ T-01 1.9115074 0.1960527 13.258 1.6255021 0.3984556 164.068 T-02 1.9153788 0.1490337 11.515 1.6682692 0.3197853 218.507 T-03 1.8712999 0.0897979 14.536 1.7614462 0.2821612 257.799 T-04 1.7275221 0.1065695 86.590 1.6227655 0.3041284 156.467 T-05 1.7279210 0.0881248 87.122 1.6778177 0.2471127 209.069 T-06 1.7316602 0.0769958 87.563 1.7153560 0.2092703 261.518 T-07 1.7109076 0.0825870 152.078 1.6429824 0.2767726 151.325 T-08 1.7140510 0.0712311 152.368 1.6947912 0.2239389 204.003 T-09 1.7169074 0.0659464 152.739 1.7201685 0.1888883 258.117 T-10 1.7034522 0.0912009 216.873 1.5969711 0.3506487 92.838 T-11 1.7053294 0.0723641 215.802 1.6624125 0.2625944 147.133 T-12 1.7084550 0.0642090 215.782 1.7063284 0.2112603 200.541 T-13 1.7088490 0.0611230 215.750 1.7155496 0.1784523 257.296

TABLE 2-A Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ A-01 2.1002530 0.0458360 25.245 3.6613926 2.0917723 4.980 A-02 1.9014716 0.1897321 35.107 3.6832791 0.6232721 30.030 A-03 1.8817545 0.1528631 29.787 2.2496615 0.5909670 58.673 A-04 1.8713707 0.1131033 20.680 1.8471360 0.3799287 139.609 A-05 1.8894555 0.1025295 13.808 1.7319643 0.2879285 214.126 A-06 1.8919474 0.0886250 14.825 1.7713589 0.2959415 207.437 A-07 1.8730447 0.0995044 12.107 1.6971361 0.2384266 276.341 A-08 1.7734811 0.0942049 96.210 2.0242448 0.4293783 66.416 A-09 1.7581396 0.0894114 94.485 1.8216770 0.2841737 135.446 A-10 1.7209511 0.0778149 94.005 1.6746822 0.2144041 211.729 A-11 1.7166765 0.0677623 92.667 1.6766991 0.1797231 270.198 A-12 1.7166130 0.0755230 182.689 6.5634515 3.2079655 1.017 A-13 1.7322234 0.0835200 166.765 1.9262925 0.3700807 69.546 A-14 1.7049421 0.0655754 163.194 1.6664527 0.1954874 208.736 A-15 1.7064564 0.0573750 160.636 1.6879767 0.1655431 264.028 A-16 1.6929499 0.0758677 218.538 1.7888879 0.3373861 83.914 A-17 1.6905856 0.0724871 210.998 1.7113381 0.2424201 155.877 A-18 1.6919500 0.0673580 207.119 1.6973679 0.1951159 222.394 A-19 1.6995270 0.0541447 221.890 1.6914313 0.1602785 261.841 A-20 1.6946661 0.0598692 292.769 5.7902895 2.6464640 1.370 A-21 1.6927273 0.0641185 275.960 1.7993913 0.3510467 81.101 A-22 1.6938682 0.0632641 269.814 1.7248410 0.2487428 150.052 A-23 1.6959215 0.0601626 266.236 1.7076727 0.2009217 214.823 A-24 1.6965163 0.0560943 263.874 1.6984359 0.1709410 277.894

TABLE 2-B Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ B-01 1.8588603 0.2152026 37.726 5.0977045 0.6974562 19.647 B-02 1.8671897 0.2000001 35.681 3.0932325 0.7063642 34.687 B-03 1.8793061 0.1213485 21.414 1.8727645 0.4149520 129.308 B-04 1.8953035 0.0980077 14.908 1.7635602 0.3109442 200.446 B-05 1.8743725 0.1084578 12.201 1.6884757 0.2470663 269.437 B-06 1.7693190 0.1013402 103.520 3.2583829 2.5781374 3.121 B-07 1.8089249 0.1064114 98.052 3.5132584 0.5501157 29.615 B-08 1.7628339 0.0939832 94.416 1.8414170 0.3092618 125.923 B-09 1.7223442 0.0810686 93.840 1.6728089 0.2260423 203.086 B-10 1.7176215 0.0701007 92.613 1.6759231 0.1876577 261.422 B-11 1.7053748 0.0681661 163.030 1.6640911 0.2056957 200.113 B-12 1.7067869 0.0592936 160.569 1.6873274 0.1726858 255.377 B-13 1.7234396 0.0819972 177.819 5.0800961 4.2173316 1.054 B-14 1.7309823 0.0887627 175.110 9.5526510 0.4602806 10.232 B-15 1.6924662 0.0804140 219.254 1.8031504 0.3794202 74.951 B-16 1.6899914 0.0755734 211.286 1.7113670 0.2592681 147.090 B-17 1.6915311 0.0696615 207.258 1.6964473 0.2049428 213.635 B-18 1.6993450 0.0558443 221.722 1.6905618 0.1670525 253.347 B-19 1.6920076 0.0677866 276.645 1.8143335 0.3967808 72.378 B-20 1.6934597 0.0658489 270.093 1.7261499 0.2668883 141.360 B-21 1.6956703 0.0621151 266.327 1.7069279 0.2113995 206.262 B-22 1.6963391 0.0576411 263.935 1.6975975 0.1780179 269.259

TABLE 2-C Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ C-01 1.8231304 0.2426967 38.982 4.7825941 0.7852430 19.992 C-02 1.8934062 0.1289044 22.067 1.9169501 0.4577317 118.684 C-03 1.9014262 0.1029443 15.306 1.7714781 0.3309508 191.572 C-04 1.8787814 0.1135143 12.334 1.6867670 0.2583639 261.269 C-05 1.8198973 0.1197953 96.975 4.7572984 0.6218490 20.274 C-06 1.7669399 0.0997580 94.208 1.8558060 0.3364471 117.969 C-07 1.7235821 0.0847397 93.618 1.6692590 0.2394056 195.006 C-08 1.7188964 0.0726255 92.505 1.6760484 0.1967286 252.779 C-09 1.7058208 0.0710513 162.764 1.6616172 0.2176394 191.801 C-10 1.7073313 0.0613671 160.462 1.6880654 0.1807904 246.769 C-11 1.6893950 0.0792587 211.356 1.7121469 0.2795726 139.203 C-12 1.6912149 0.0722082 207.241 1.6964479 0.2163033 205.754 C-13 1.6993872 0.0576769 221.603 1.6911809 0.1749036 244.825 C-14 1.6931110 0.0689939 270.168 1.7281714 0.2885226 133.446 C-15 1.6955537 0.0643335 266.333 1.7074500 0.2235939 198.195 C-16 1.6962507 0.0593120 263.960 1.6977843 0.1860709 261.024

TABLE 2-D Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ D-01 1.8741027 0.2292405 31.502 2.4589695 0.9273915 39.688 D-02 1.9162345 0.1358555 21.455 1.9418040 0.4998799 110.373 D-03 1.9099224 0.1141224 14.789 1.7536831 0.3442834 186.067 D-04 1.8839284 0.1193744 12.268 1.6821215 0.2672652 253.238 D-05 1.7973698 0.1226911 93.176 2.1323779 0.6525391 46.828 D-06 1.7231751 0.0881939 93.194 1.6583398 0.2493789 187.627 D-07 1.7198225 0.0748307 92.273 1.6753837 0.2040438 244.025 D-08 1.7057007 0.0735111 162.218 1.6560667 0.2270715 183.673 D-09 1.7079030 0.0631371 160.241 1.6895692 0.1875698 237.741 D-10 1.6886446 0.0826816 210.810 1.7077667 0.2975930 132.542 D-11 1.6995870 0.0592337 221.497 1.6927290 0.1818275 235.781 D-12 1.6927517 0.0720967 269.568 1.7225076 0.3075740 126.653 D-13 1.6954892 0.0662812 265.955 1.7055518 0.2340649 190.864 D-14 1.6961809 0.0606151 263.663 1.6966094 0.1927366 253.572

TABLE 2-E Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ E-01 1.8808544 0.2454152 24.855 1.8495394 0.8565648 51.788 E-02 1.9316654 0.1473610 18.765 1.8569906 0.5034890 110.667 E-03 1.9082705 0.1322705 14.189 1.7144055 0.3458924 182.182 E-04 1.8785232 0.1271526 12.435 1.6714546 0.2699971 245.412 E-05 1.7211644 0.0906139 92.694 1.6423304 0.2528050 180.257 E-06 1.7204079 0.0761160 92.018 1.6751968 0.2080809 234.537 E-07 1.7050622 0.0748972 161.630 1.6489715 0.2315625 175.108 E-08 1.7085349 0.0642166 160.005 1.6919631 0.1914882 227.913 E-09 1.6878153 0.0847734 209.683 1.6959203 0.3070669 127.092 E-10 1.6980473 0.0703784 224.445 1.6616204 0.2238826 171.370 E-11 1.6999707 0.0601951 221.512 1.6952970 0.1862586 225.852 E-12 1.6924126 0.0742318 268.357 1.7068352 0.3173492 120.697 E-13 1.6955002 0.0674212 265.225 1.7004174 0.2397614 183.997 E-14 1.6961000 0.0611797 263.146 1.6940899 0.1962440 246.462

TABLE 2-F Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ F-01 1.8609133 0.2699154 23.275 1.6780954 0.8091000 51.309 F-02 1.9462238 0.1588548 16.938 1.8061043 0.4989592 107.791 F-03 1.9002376 0.1498745 13.880 1.6764313 0.3420875 176.900 F-04 1.8750233 0.1302055 12.592 1.6672162 0.2718902 235.718 F-05 1.8816918 0.0811209 12.084 1.7277101 0.2394028 282.393 F-06 1.7196449 0.0916508 92.440 1.6323282 0.2539653 171.320 F-07 1.7211216 0.0765241 91.942 1.6777604 0.2105462 223.941 F-08 1.7282121 0.0683348 92.298 1.7222619 0.1825246 274.062 F-09 1.7047574 0.0753118 161.355 1.6462273 0.2341241 165.232 F-10 1.7094298 0.0647325 159.970 1.6962571 0.1938378 217.150 F-11 1.6870964 0.0858972 208.556 1.6830399 0.3090553 121.249 F-12 1.6986314 0.0705958 224.893 1.6622291 0.2274423 160.831 F-13 1.7003667 0.0607285 221.557 1.6983916 0.1887213 215.383 F-14 1.6951156 0.0571177 215.781 1.6957463 0.1617780 277.216 F-15 1.6955653 0.0680298 264.644 1.6953987 0.2417239 176.078 F-16 1.6958377 0.0528303 274.984 1.6882898 0.1657751 275.044

TABLE 2-G Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ .G-01 1.8339628 0.2973905 24.925 1.6419965 0.8698975 41.723 G-02 1.9445237 0.1726202 17.287 1.7953047 0.5162004 98.907 G-03 1.8939902 0.1563846 14.253 1.6659458 0.3485215 167.112 G-04 1.8811858 0.0833966 12.228 1.7269957 0.2426363 272.914 G-05 1.7203230 0.0922740 92.527 1.6328842 0.2599948 160.703 G-06 1.7224265 0.0770592 92.053 1.6819841 0.2150120 213.162 G-07 1.7294779 0.0692299 92.385 1.7252879 0.1858377 263.723 G-08 1.7053201 0.0757255 161.452 1.6485370 0.2399747 154.588 G-09 1.7102741 0.0654045 160.136 1.7000507 0.1977447 206.614 G-10 1.7133466 0.0629386 160.381 1.7220503 0.1698335 260.757 G-11 1.6861768 0.0881028 208.148 1.6733849 0.3136681 112.385 G-12 1.6990769 0.0709373 225.005 1.6647354 0.2329033 150.349 G-13 1.7003759 0.0613969 221.468 1.6998938 0.1918751 205.497 G-14 1.6946436 0.0577579 215.315 1.6946016 0.1634050 268.128 G-15 1.6954303 0.0690806 264.876 1.6937197 0.2458138 165.269 G-16 1.6957423 0.0532811 274.848 1.6878755 0.1674492 265.685

TABLE 2-H Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ H-01 1.9187259 0.1881900 20.509 1.8283337 0.5739613 84.746 H-02 1.8967518 0.1527475 15.221 1.6893708 0.3734166 154.221 H-03 1.8757876 0.1318014 13.247 1.6726776 0.2883472 215.129 H-04 1.8806788 0.0899399 12.412 1.7211162 0.2492460 265.394 H-05 1.7234296 0.0945092 92.722 1.6393014 0.2743485 150.270 H-06 1.7235983 0.0790587 92.129 1.6815454 0.2228770 204.187 H-07 1.7294254 0.0706491 92.482 1.7233644 0.1918670 255.172 H-08 1.7064538 0.0777504 161.668 1.6498826 0.2514894 145.038 H-09 1.7103862 0.0670250 160.278 1.6983722 0.2047961 197.922 H-10 1.7133072 0.0637197 160.467 1.7219131 0.1752501 251.781 H-11 1.6987335 0.0728489 224.384 1.6635130 0.2423517 141.699 H-12 1.6895310 0.0798395 207.056 1.6873868 0.2464201 160.447 H-13 1.6997408 0.0628030 221.189 1.6972371 0.1976117 197.186 H-14 1.6947661 0.0583146 215.749 1.6943199 0.1671130 258.789 H-15 1.6915645 0.0796327 269.434 1.7013553 0.3520060 90.540 H-16 1.6950499 0.0706693 266.123 1.6983222 0.2573177 152.851 H-17 1.6956172 0.0541668 274.905 1.6860233 0.1712439 257.337

TABLE 2-I Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ I-01 1.8980776 0.2063094 23.234 1.8542997 0.6486453 73.732 I-02 1.9078109 0.1489982 16.351 1.7325536 0.4126982 141.036 I-03 1.8887573 0.1336370 13.295 1.6803356 0.3065809 205.639 I-04 1.8863613 0.0963846 12.395 1.7165602 0.2596921 258.147 I-05 1.7283563 0.0991844 92.796 1.6494143 0.2975623 140.358 I-06 1.7247011 0.0825295 92.134 1.6784446 0.2345042 196.220 I-07 1.7288637 0.0727638 92.409 1.7181265 0.1997137 247.866 I-08 1.7100270 0.0697395 160.277 1.6932584 0.2147807 190.362 I-09 1.7129082 0.0648353 160.281 1.7202855 0.1822190 243.795 I-10 1.6894084 0.0825836 208.412 1.6911413 0.2636300 148.443 I-11 1.6987536 0.0651428 220.679 1.6918669 0.2062686 189.869 I-12 1.6951804 0.0592977 216.421 1.6944812 0.1733276 249.686 I-13 1.6947043 0.0728049 267.049 1.7045529 0.2758626 142.407 I-14 1.6953534 0.0654850 264.587 1.6939885 0.2171518 204.731 I-15 1.6955317 0.0555447 274.968 1.6840742 0.1777252 249.243

TABLE 2-J Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ J-01 1.9059589 0.2274286 23.462 1.8553331 0.7355051 66.090 J-02 1.9224042 0.1550778 16.599 1.7510181 0.4490690 131.424 J-03 1.8961620 0.1385328 13.501 1.6829419 0.3248659 196.767 J-04 1.8922593 0.1041345 12.282 1.7097147 0.2697702 251.116 J-05 1.7254583 0.0865833 91.876 1.6727903 0.2465542 188.519 J-06 1.7286512 0.0752622 92.185 1.7137581 0.2076205 240.302 J-07 1.7096319 0.0728333 159.923 1.6877059 0.2252670 182.766 J-08 1.7125109 0.0665034 159.852 1.7181911 0.1890952 235.934 J-09 1.6891198 0.0853163 208.173 1.6918411 0.2826173 141.112 J-10 1.6979687 0.0677690 220.140 1.6871092 0.2165239 182.186 J-11 1.6953920 0.0607310 216.694 1.6943518 0.1805507 240.824 J-12 1.6945041 0.0754015 266.879 1.7053190 0.2962459 134.581 J-13 1.6957904 0.0613078 263.111 1.6921380 0.1886276 257.166

TABLE 2-K Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ K-01 1.9374125 0.1704110 15.669 1.7248980 0.4663738 126.299 K-02 1.9018997 0.1487976 13.285 1.6713435 0.3352808 189.496 K-03 1.8965439 0.1142225 11.973 1.6970963 0.2748315 244.759 K-04 1.7253637 0.0900184 91.432 1.6651786 0.2549499 180.505 K-05 1.7289764 0.0775142 91.877 1.7120256 0.2134557 231.728 K-06 1.7092919 0.0753499 159.318 1.6830351 0.2331189 174.468 K-07 1.7124011 0.0683625 159.365 1.7169838 0.1941891 227.412 K-08 1.6891266 0.0867081 206.818 1.6858604 0.2953498 138.155 K-09 1.6977739 0.0698574 219.869 1.6842611 0.2258219 173.345 K-10 1.6952347 0.0623107 216.627 1.6937881 0.1869159 231.738 K-11 1.6944699 0.0775933 265.762 1.6967397 0.3115846 129.093 K-12 1.6958800 0.0528961 273.317 1.6915993 0.1649138 288.010

TABLE 2-L Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ L-01 1.9729972 0.2768129 17.524 1.6663342 0.7544777 64.842 L-02 1.9456051 0.1915481 14.612 1.6781309 0.4665054 122.845 L-03 1.9005953 0.1591490 13.217 1.6561276 0.3399716 181.593 L-04 1.8972956 0.1121564 12.290 1.7051607 0.2822449 233.141 L-05 1.7255330 0.0922673 91.102 1.6614760 0.2607016 171.070 L-06 1.7304964 0.0792452 91.709 1.7154952 0.2175998 221.560 L-07 1.7097843 0.0770210 159.025 1.6841289 0.2392980 164.463 L-08 1.7129025 0.0702809 159.249 1.7178163 0.1978132 217.770 L-09 1.7059734 0.0642321 159.600 1.6898319 0.1677546 279.371 L-10 1.6983193 0.0712405 220.143 1.6860819 0.2336364 162.903 L-11 1.6946755 0.0639503 216.344 1.6931001 0.1919118 222.331 L-12 1.6955425 0.0535782 213.248 1.6937343 0.1415462 338.947 L-13 1.6956989 0.0539885 272.929 1.6917939 0.1683287 278.327

TABLE 2-M Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ M-01 1.8993435 0.1093669 12.638 1.7156529 0.2903108 220.942 M-02 1.9080238 0.0778133 11.189 1.7380285 0.2474831 275.866 M-03 1.7276770 0.0934541 91.210 1.6689251 0.2700133 159.348 M-04 1.7338076 0.0808022 91.869 1.7256843 0.2232282 209.944 M-05 1.7236449 0.0736298 92.640 1.7007078 0.1887087 271.148 M-06 1.7117973 0.0782334 159.412 1.6949465 0.2480962 152.577 M-07 1.7052523 0.0648564 160.141 1.6847092 0.1699839 269.827 M-08 1.6990979 0.0723627 220.761 1.6931390 0.2421156 151.650 M-09 1.6936455 0.0657466 215.539 1.6916565 0.1962143 213.597 M-10 1.6937228 0.0602088 212.854 1.6917935 0.1651159 273.449 M-11 1.6954835 0.0549286 272.481 1.6920522 0.1709440 269.018

TABLE 2-N Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ N-01 1.9117383 0.2302052 15.980 1.5953517 0.4940730 105.368 N-02 1.8981283 0.1070787 13.384 1.7296497 0.3022759 209.053 N-03 1.9112943 0.0649623 12.163 1.7710787 0.2605013 259.824 N-04 1.7312914 0.0945058 91.544 1.6819509 0.2846338 147.702 N-05 1.7377087 0.0827928 92.151 1.7372931 0.2321492 198.983 N-06 1.7228203 0.0749158 92.874 1.6951594 0.1935801 262.590 N-07 1.7144911 0.0796518 160.015 1.7090445 0.2610315 141.223 N-08 1.7050797 0.0657099 160.534 1.6817729 0.1743389 260.739 N-09 1.6925663 0.0675694 214.049 1.6900690 0.2005073 206.287 N-10 1.6991742 0.0739382 220.936 1.6992675 0.2525134 141.832 N-11 1.6955775 0.0548747 213.500 1.6934763 0.1457299 319.743 N-12 1.6953573 0.0556511 272.231 1.6917841 0.1736649 260.476

TABLE 2-O Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ O-01 1.8842999 0.1660082 15.542 1.6642092 0.3881866 148.595 O-02 1.9020060 0.1078045 13.884 1.7406676 0.3180988 199.025 O-03 1.9176161 0.0733974 11.927 1.7608162 0.2687301 254.127 O-04 1.7347347 0.0970436 91.613 1.6897518 0.3028107 138.166 O-05 1.7402087 0.0854812 92.221 1.7427648 0.2437105 190.058 O-06 1.7232674 0.0768076 92.842 1.6931409 0.2010537 254.319 O-07 1.7163169 0.0822242 160.121 1.7162208 0.2770503 132.120 O-08 1.7052425 0.0670983 160.367 1.6808978 0.1806066 252.327 O-09 1.6979604 0.0765182 219.964 1.6978817 0.2641846 134.431 O-10 1.6919325 0.0693101 212.895 1.6886216 0.2063377 199.162 O-11 1.6933082 0.0619759 212.839 1.6904544 0.1723582 255.647 O-12 1.6953110 0.0563706 272.392 1.6905212 0.1778331 252.170

TABLE 2-P Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ P-01 1.9162825 0.2485644 18.297 1.6104232 0.6165991 83.442 P-02 1.8960663 0.1719364 15.704 1.6708316 0.4169686 139.520 P-03 1.9085468 0.1144956 13.923 1.7385514 0.3337318 191.444 P-04 1.9232010 0.0848488 11.624 1.7455678 0.2771185 248.983 P-05 1.7368663 0.1019026 91.322 1.6869885 0.3224919 130.342 P-06 1.7401611 0.0886217 92.017 1.7381402 0.2555882 182.755 P-07 1.7243481 0.0791015 92.538 1.6930588 0.2092609 245.988 P-08 1.7054586 0.0688139 159.721 1.6812702 0.1871719 244.029 P-09 1.6959475 0.0801582 218.084 1.6891859 0.2763746 128.431 P-10 1.6918299 0.0707672 213.401 1.6865968 0.2143676 190.286 P-11 1.6935501 0.0625258 213.666 1.6897170 0.1780108 246.097 P-12 1.6953216 0.0573372 272.694 1.6885432 0.1839003 243.579

TABLE 2-Q Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ Q-01 1.9620125 0.2671830 17.281 1.6251877 0.6875073 75.420 Q-02 1.9138120 0.1838008 15.160 1.6631095 0.4399257 132.541 Q-03 1.9194872 0.1265886 13.286 1.7204546 0.3440475 186.036 Q-04 1.9263431 0.0918160 11.575 1.7389610 0.2853240 241.421 Q-05 1.7366416 0.1083929 90.600 1.6676220 0.3363185 124.136 Q-06 1.7377165 0.0918810 91.516 1.7225143 0.2640565 176.484 Q-07 1.7250070 0.0812670 92.096 1.6922454 0.2155950 237.445 Q-08 1.7054487 0.0704565 158.889 1.6815182 0.1921887 235.428 Q-09 1.6921136 0.0719896 214.506 1.6833735 0.2231205 180.418 Q-10 1.6937452 0.0634118 214.086 1.6893106 0.1840166 236.602 Q-11 1.6937402 0.0634247 214.067 1.6892020 0.1839903 236.644 Q-12 1.6958036 0.0530688 271.703 1.6918593 0.1637010 291.452

TABLE 2-R Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ R-01 2.0247974 0.2830183 15.097 1.6266898 0.7191283 71.681 R-02 1.9282935 0.1992550 14.428 1.6428403 0.4517072 126.823 R-03 1.9213955 0.1387890 13.062 1.7027750 0.3507816 179.475 R-04 1.9262173 0.1063571 11.253 1.7173021 0.2869739 236.027 R-05 1.7355101 0.0947091 91.033 1.7079959 0.2693832 169.192 R-06 1.7251933 0.0829804 91.728 1.6903561 0.2192539 228.367 R-07 1.7054174 0.0718367 158.389 1.6812041 0.1954390 226.084 R-08 1.6937830 0.0647049 214.330 1.6889835 0.1894046 226.812 R-09 1.6952847 0.0582261 213.359 1.6934588 0.1611341 284.005 R-10 1.6957027 0.0542195 271.586 1.6918383 0.1679902 281.728

TABLE 2-S Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ S-01 1.9316549 0.2158025 14.297 1.6202378 0.4645248 119.165 S-02 1.9193011 0.1476126 13.272 1.6935029 0.3598725 170.049 S-03 1.9209840 0.1061325 11.842 1.7241227 0.2946413 224.030 S-04 1.9114684 0.1024475 10.224 1.6976483 0.2438294 285.021 S-05 1.7364379 0.0969838 91.033 1.7085420 0.2774318 158.680 S-06 1.7258494 0.0843222 91.766 1.6907525 0.2229229 218.067 S-07 1.7176246 0.0727056 91.617 1.6784161 0.1842107 277.206 S-08 1.7057732 0.0731106 158.709 1.6805392 0.1989479 215.842 S-09 1.7053832 0.0633918 158.181 1.6859880 0.1669818 272.384 S-10 1.6928552 0.0748243 216.444 1.6825267 0.2415835 158.548 S-11 1.6935473 0.0663823 214.407 1.6888366 0.1945007 217.060 S-12 1.6950516 0.0596605 213.429 1.6925794 0.1643538 274.430 S-13 1.6954923 0.0554795 271.226 1.6917166 0.1716832 272.356

TABLE 2-T Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ T-01 1.9124203 0.1489422 14.330 1.7039618 0.3787231 157.291 T-02 1.9240615 0.1092971 12.001 1.7245262 0.3026113 214.201 T-03 1.9069086 0.1015424 10.748 1.7018591 0.2499950 273.963 T-04 1.7409810 0.0988730 91.533 1.7256420 0.2922591 146.253 T-05 1.7270720 0.0857435 92.142 1.6923707 0.2292874 207.814 T-06 1.7180387 0.0734703 91.877 1.6777924 0.1881130 267.481 T-07 1.7063746 0.0744769 159.624 1.6791348 0.2047799 205.830 T-08 1.7058520 0.0640895 158.885 1.6855365 0.1710983 262.479 T-09 1.6924739 0.0767908 216.680 1.6850078 0.2520629 148.712 T-10 1.6928977 0.0684401 213.761 1.6885850 0.1999527 208.689 T-11 1.6947635 0.0610999 213.366 1.6918971 0.1679521 265.388 T-12 1.6952371 0.0566636 270.653 1.6914186 0.1751623 263.994

TABLE 3-A Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ A-01 2.0940641 0.0325844 26.090 4.2290158 2.3935124 3.632 A-02 1.9168406 0.1807255 35.662 5.4932306 0.6123354 19.087 A-03 1.8970115 0.1529573 31.182 2.4318401 0.5958382 52.406 A-04 1.8805879 0.1098415 13.577 1.7032895 0.2751108 218.193 A-05 1.8778358 0.1082679 19.930 1.8340760 0.3677230 142.226 A-06 1.8663312 0.0978132 12.232 1.6938400 0.2288643 277.705 A-07 1.7888608 0.1060865 103.503 4.4234099 0.4526804 24.164 A-08 1.7735009 0.0957437 98.181 2.0208865 0.4158741 66.693 A-09 1.7175310 0.0751352 95.409 1.6658936 0.2054797 212.937 A-10 1.7199475 0.0655065 94.621 1.6963762 0.1762614 266.043 A-11 1.7156729 0.0770168 188.315 6.9620048 3.4231449 0.879 A-12 1.7043499 0.0644952 165.315 1.6731418 0.1899705 207.250 A-13 1.7082412 0.0577629 163.169 1.7075031 0.1626792 259.766 A-14 1.6926126 0.0683906 237.184 6.7859369 2.9992529 0.993 A-15 1.6890888 0.0745003 217.718 1.7770504 0.3401503 84.925 A-16 1.6903292 0.0721915 210.963 1.7111030 0.2426612 155.846 A-17 1.6921355 0.0670288 207.063 1.6978167 0.1954345 222.387 A-18 1.6951475 0.0546351 219.259 1.6889102 0.1606659 263.728 A-19 1.7004017 0.0599028 265.986 1.7029410 0.1992607 214.965

TABLE 3-B Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ B-01 1.8738578 0.2051029 37.506 6.9151921 0.6847654 14.288 B-02 1.8839217 0.1169859 20.540 1.8488520 0.3990514 132.865 B-03 1.8842367 0.1130268 14.059 1.7087850 0.2917115 208.377 B-04 1.8705650 0.1010320 12.433 1.6946915 0.2394813 268.610 B-05 1.7997475 0.1076402 101.817 5.7702673 0.5312541 17.283 B-06 1.7189014 0.0782837 95.289 1.6643388 0.2165956 204.139 B-07 1.7208712 0.0678223 94.558 1.6960341 0.1841027 257.386 B-08 1.7236639 0.0843652 181.922 5.6387216 4.7363270 0.821 B-09 1.7047019 0.0670962 165.192 1.6715149 0.1999125 198.564 B-10 1.7084293 0.0597123 163.108 1.7074208 0.1697699 251.199 B-11 1.6912240 0.0750717 235.933 5.6089359 4.1789938 0.921 B-12 1.6881032 0.0788193 218.423 1.7881557 0.3823123 76.059 B-13 1.6896993 0.0752193 211.247 1.7110684 0.2595743 147.061 B-14 1.6917374 0.0692921 207.206 1.6970724 0.2053429 213.576 B-15 1.6948846 0.0562662 219.172 1.6877325 0.1673191 255.276 B-16 1.7002883 0.0618224 266.113 1.7025341 0.2096252 206.193 B-17 1.6987256 0.0572006 264.952 1.6934905 0.1744162 266.771

TABLE 3-C Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ C-01 1.8384852 0.2367471 38.632 4.7928214 0.7766058 20.034 C-02 1.8997218 0.1227276 21.226 1.8945709 0.4412749 121.762 C-03 1.8867733 0.1201944 14.426 1.7066853 0.3085187 200.277 C-04 1.8774399 0.1030917 12.555 1.6978346 0.2515853 259.495 C-05 1.8168537 0.1206742 98.976 5.6725781 0.5943855 16.950 C-06 1.7203847 0.0818178 95.097 1.6625491 0.2295920 195.706 C-07 1.7222308 0.0703272 94.450 1.6972414 0.1929579 248.789 C-08 1.7051744 0.0699535 164.924 1.6707295 0.2115581 190.095 C-09 1.7089344 0.0618729 162.999 1.7091982 0.1777196 242.642 C-10 1.6891179 0.0788518 211.328 1.7121044 0.2799946 139.125 C-11 1.6914863 0.0717884 207.154 1.6970451 0.2167627 205.768 C-12 1.6947006 0.0580661 219.137 1.6875442 0.1751428 246.865 C-13 1.7002933 0.0640004 266.055 1.7022941 0.2216801 198.139 C-14 1.6987290 0.0588877 264.992 1.6933668 0.1822428 258.415

TABLE 3-D Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ D-01 1.8909619 0.2198688 30.886 2.4457650 0.9042920 40.480 D-02 1.9211597 0.1299283 20.325 1.8999891 0.4762728 114.977 D-03 1.8908364 0.1293290 14.409 1.6971949 0.3219355 192.850 D-04 1.8788634 0.1089981 12.666 1.6934061 0.2597468 251.595 D-05 1.7209142 0.0850231 94.685 1.6569532 0.2398462 187.582 D-06 1.7236493 0.0725136 94.253 1.6994520 0.2004026 239.752 D-07 1.7053690 0.0723352 164.385 1.6690598 0.2212238 181.544 D-08 1.7096103 0.0638708 162.799 1.7121782 0.1844639 233.616 D-09 1.6884398 0.0822671 210.788 1.7077650 0.2979850 132.459 D-10 1.6913141 0.0737244 206.649 1.6954335 0.2262249 199.430 D-11 1.6945163 0.0596605 219.093 1.6879518 0.1823501 237.943 D-12 1.7002615 0.0658973 265.562 1.6991117 0.2320843 190.875 D-13 1.6987767 0.0602453 264.538 1.6924357 0.1888152 250.808

TABLE 3-E Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ E-01 1.9413239 0.1405566 18.043 1.8442891 0.4845639 113.109 E-02 1.8877645 0.1445306 14.095 1.6688638 0.3235014 187.292 E-03 1.8798429 0.1135692 12.637 1.6888514 0.2638544 243.053 E-04 1.7202563 0.0870823 94.214 1.6489031 0.2445724 179.182 E-05 1.7249517 0.0739360 94.041 1.7027050 0.2047377 229.905 E-06 1.7053831 0.0736370 163.843 1.6671854 0.2267475 172.382 E-07 1.7104785 0.0654156 162.671 1.7160090 0.1885946 223.774 E-08 1.6877471 0.0844092 209.661 1.6959640 0.3073448 127.018 E-09 1.6915115 0.0739491 205.513 1.6904122 0.2298496 196.556 E-10 1.6941672 0.0608347 218.889 1.6879018 0.1872431 228.501 E-11 1.6941096 0.0560046 215.482 1.6938988 0.1599964 287.470 E-12 1.7000691 0.0669711 264.757 1.6924460 0.2378630 184.028 E-13 1.6987341 0.0608862 263.855 1.6911373 0.1924284 243.250

TABLE 3-F Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ F-01 1.8998120 0.2622743 21.573 1.6944131 0.7809017 53.320 F-02 1.9599431 0.1538418 15.993 1.7907917 0.4780154 111.028 F-03 1.8792360 0.1119058 12.895 1.6940206 0.2681658 231.714 F-04 1.8920036 0.0671877 11.926 1.7462722 0.2347435 280.522 F-05 1.7198405 0.0878543 93.971 1.6452515 0.2473168 169.419 F-06 1.7267515 0.0746914 93.982 1.7088385 0.2076415 218.911 F-07 1.7286377 0.0697592 94.711 1.7257237 0.1796886 273.487 F-08 1.7058235 0.0740364 163.674 1.6690540 0.2306007 161.946 F-09 1.6871196 0.0856014 208.540 1.6832134 0.3092532 121.170 F-10 1.6936372 0.0616799 218.466 1.6877720 0.1900717 218.772 F-11 1.6996002 0.0674630 264.231 1.6851097 0.2396601 175.944 F-12 1.6985143 0.0611760 263.586 1.6903246 0.1936289 234.054

TABLE 3-G Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ G-01 1.8814830 0.2936564 22.098 1.6321609 0.8097385 46.190 G-02 1.9657443 0.1688741 15.852 1.7726563 0.4923001 103.170 G-03 1.8787154 0.1109169 13.263 1.6996278 0.2745566 220.404 G-04 1.8913468 0.0695388 12.162 1.7469121 0.2387131 270.807 G-05 1.7209187 0.0883668 94.055 1.6482914 0.2540527 158.511 G-06 1.7288665 0.0756184 94.090 1.7153723 0.2125971 207.924 G-07 1.7286370 0.0709992 94.923 1.7241262 0.1831189 263.961 G-08 1.7068032 0.0744994 163.814 1.6739446 0.2371534 151.052 G-09 1.6862856 0.0878163 208.124 1.6736237 0.3138657 112.320 G-10 1.6931399 0.0624918 217.968 1.6872372 0.1926334 209.546 G-11 1.6935780 0.0575917 214.501 1.6927449 0.1631490 269.036 G-12 1.6987845 0.0682876 264.829 1.6826884 0.2430960 164.540 G-13 1.6982075 0.0620058 264.409 1.6907687 0.1959423 222.065

TABLE 3-H Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ H-01 1.8508920 0.3299462 26.713 1.6561984 1.0215947 31.481 H-02 1.9432602 0.1828608 18.534 1.7922587 0.5435792 89.452 H-03 1.8788012 0.1571474 15.200 1.6553949 0.3498651 157.519 H-04 1.8809660 0.1122948 13.670 1.7045069 0.2862016 210.391 H-05 1.8914032 0.0691945 12.762 1.7559855 0.2487147 259.753 H-06 1.7233184 0.0905387 94.254 1.6520214 0.2670378 148.504 H-07 1.7297992 0.0774990 94.232 1.7157415 0.2209454 198.899 H-08 1.7292921 0.0722395 94.957 1.7247476 0.1892941 254.857 H-09 1.7076375 0.0765186 163.992 1.6752795 0.2482558 141.650 H-10 1.6902915 0.0790058 206.654 1.6879680 0.2475793 161.284 H-11 1.6929156 0.0637318 217.693 1.6856131 0.1973081 201.188 H-12 1.6935338 0.0581307 214.870 1.6920922 0.1667488 259.776 H-13 1.6984313 0.0697413 266.256 1.6871666 0.2538157 152.235 H-14 1.6980068 0.0633264 265.782 1.6912942 0.2022310 210.360 H-15 1.6970347 0.0530849 275.682 1.6884244 0.1714348 256.304

TABLE 3-I Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ I-01 1.9192397 0.1987767 21.654 1.8264016 0.6189774 76.882 I-02 1.8910111 0.1570861 15.844 1.6782576 0.3828036 146.288 I-03 1.8874292 0.1170062 13.907 1.7063011 0.3024107 201.867 I-04 1.8928956 0.0800147 12.695 1.7424852 0.2571531 254.323 I-05 1.7266669 0.0953661 94.323 1.6542284 0.2869718 139.595 I-06 1.7296393 0.0805906 94.242 1.7097783 0.2319224 191.543 I-07 1.7299249 0.0737621 94.784 1.7252153 0.1970612 246.491 I-08 1.6899362 0.0817785 208.164 1.6924320 0.2651701 148.618 I-09 1.6928826 0.0657282 217.665 1.6832004 0.2055611 193.166 I-10 1.6935628 0.0590519 215.464 1.6914497 0.1728158 250.826 I-11 1.6988269 0.0719884 266.949 1.6930572 0.2717519 142.233 I-12 1.6981501 0.0650380 266.102 1.6910453 0.2123559 201.439 I-13 1.6968464 0.0544760 275.663 1.6860880 0.1778694 248.323

TABLE 3-J Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ J-01 1.9207610 0.2195112 22.312 1.8258536 0.6986358 68.737 J-02 1.9093240 0.1610220 16.027 1.6981498 0.4189775 136.163 J-03 1.8948938 0.1257399 13.855 1.7003095 0.3177305 194.613 J-04 1.8966282 0.0900141 12.530 1.7305926 0.2658040 248.346 J-05 1.7293323 0.0843251 93.974 1.7018671 0.2432029 184.391 J-06 1.7301568 0.0757850 94.458 1.7237225 0.2045935 238.500 J-07 1.6896128 0.0845530 207.994 1.6930315 0.2839311 141.193 J-08 1.6928686 0.0680057 217.789 1.6806392 0.2160083 184.741 J-09 1.6935394 0.0604311 215.751 1.6908086 0.1799717 242.024 J-10 1.6995193 0.0747728 266.467 1.6953349 0.2921202 134.479 J-11 1.6986281 0.0669339 265.290 1.6902923 0.2238725 194.429 J-12 1.6967467 0.0559821 275.562 1.6844237 0.1853984 239.846

TABLE 3-K Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ K-01 1.9214172 0.1753360 15.452 1.6804411 0.4367098 129.893 K-02 1.9009993 0.1351301 13.611 1.6899586 0.3280314 187.370 K-03 1.8999222 0.0954510 12.469 1.7262130 0.2728992 240.318 K-04 1.7289797 0.0876375 93.472 1.6943958 0.2513033 176.630 K-05 1.7301397 0.0779683 94.062 1.7208177 0.2098777 230.281 K-06 1.6897075 0.0859154 206.600 1.6860653 0.2958058 138.770 K-07 1.6928599 0.0698704 218.100 1.6784557 0.2260347 175.355 K-08 1.6933895 0.0619572 215.832 1.6904996 0.1864736 232.785 K-09 1.6967442 0.0572224 275.439 1.6838077 0.1920294 230.401

TABLE 3-L Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ L-01 1.9907624 0.2658843 16.877 1.6777634 0.7245088 66.041 L-02 1.9229056 0.1943367 14.896 1.6435696 0.4392836 124.711 L-03 1.9003143 0.1434936 13.590 1.6791032 0.3336019 179.139 L-04 1.9049048 0.0972823 12.362 1.7269066 0.2779612 230.763 L-05 1.7296380 0.0899801 93.128 1.6935089 0.2572784 167.093 L-06 1.7305285 0.0799609 93.907 1.7196209 0.2133806 220.978 L-07 1.6927568 0.0712762 218.499 1.6781695 0.2348207 164.929 L-08 1.6930586 0.0635805 215.646 1.6903056 0.1916344 223.237 L-09 1.6939267 0.0583165 213.162 1.6934648 0.1626221 282.414 L-10 1.6970265 0.0526106 273.430 1.6908020 0.1682270 277.869

TABLE 3-M Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ M-01 1.8968086 0.1457981 14.128 1.6815336 0.3444919 167.613 M-02 1.9070303 0.0954881 12.717 1.7369802 0.2856144 218.968 M-03 1.9016797 0.0905797 10.946 1.7110902 0.2381911 280.601 M-04 1.7329805 0.0916823 93.296 1.7056329 0.2670261 155.076 M-05 1.7161015 0.0708259 94.224 1.6780965 0.1788543 274.399 M-06 1.6922053 0.0726320 218.650 1.6800076 0.2436881 154.426 M-07 1.6924923 0.0653867 214.871 1.6897434 0.1959626 214.392 M-08 1.6935584 0.0598502 212.072 1.6927128 0.1654173 274.211 M-09 1.6967916 0.0533770 273.133 1.6904661 0.1709158 268.389

TABLE 3-N Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ N-01 1.8931613 0.1437464 15.228 1.6981871 0.3648670 154.635 N-02 1.9086798 0.0925277 13.463 1.7547782 0.2987738 206.696 N-03 1.8957546 0.1021679 11.154 1.6965397 0.2414267 273.752 N-04 1.7383088 0.0935643 93.735 1.7255584 0.2828024 142.972 N-05 1.7163304 0.0717315 94.330 1.6763108 0.1832109 265.207 N-06 1.7036586 0.0640636 161.836 1.6842842 0.1670348 260.021 N-07 1.6919166 0.0672926 213.353 1.6889376 0.2002175 207.074 N-08 1.6911838 0.0743991 218.060 1.6805827 0.2524809 145.761 N-09 1.6942185 0.0545821 211.644 1.6930391 0.1466022 321.654 N-10 1.6965335 0.0539924 273.036 1.6894839 0.1738185 259.712

TABLE 3-O Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ O-01 1.8962402 0.1446868 16.058 1.7149739 0.3909951 143.691 O-02 1.9162756 0.0920008 13.917 1.7705409 0.3160160 196.340 O-03 1.8972293 0.1039493 11.503 1.6986687 0.2516185 264.437 O-04 1.7171631 0.0735355 94.241 1.6756859 0.1901883 256.660 O-05 1.7039366 0.0654419 161.496 1.6849902 0.1728826 251.490 O-06 1.6903081 0.0771344 216.305 1.6786590 0.2613948 139.207 O-07 1.6915399 0.0690906 212.338 1.6881028 0.2062149 199.770 O-08 1.6931731 0.0615887 211.917 1.6918937 0.1729009 256.415 O-09 1.6963857 0.0546855 273.170 1.6879125 0.1780863 251.444

TABLE 3-P Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ P-01 1.9078860 0.1508452 16.208 1.7232027 0.4201511 134.826 P-02 1.9270939 0.0963716 13.863 1.7738090 0.3331580 188.374 P-03 1.9009914 0.1079582 11.657 1.6981472 0.2622250 256.036 P-04 1.7182026 0.0759211 93.910 1.6754262 0.1979303 248.261 P-05 1.7037276 0.0670447 160.452 1.6860603 0.1785858 243.357 P-06 1.6914048 0.0705280 212.904 1.6862460 0.2142065 190.804 P-07 1.6932944 0.0619823 213.027 1.6912789 0.1784688 246.475 P-08 1.6971949 0.0758678 268.193 1.6840809 0.2789945 135.240 P-09 1.6963748 0.0557064 273.316 1.6860970 0.1841499 242.973

TABLE 3-Q Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ Q-01 1.9345747 0.1082213 13.373 1.7554016 0.3434593 183.042 Q-02 1.9100928 0.1149883 11.317 1.6916658 0.2694423 248.707 Q-03 1.9218874 0.1634556 15.608 1.7091703 0.4402763 128.647 Q-04 1.7188695 0.0782891 93.463 1.6745648 0.2040549 239.614 Q-05 1.7031385 0.0685384 159.293 1.6866422 0.1829170 234.977 Q-06 1.6934237 0.0627890 213.592 1.6908665 0.1844160 236.853 Q-07 1.6934242 0.0627998 213.572 1.6907829 0.1843934 236.891 Q-08 1.6985617 0.0777714 264.836 1.6854326 0.2962369 131.733 Q-09 1.6963947 0.0569261 273.344 1.6845211 0.1907955 233.824

TABLE 3-R Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ R-01 1.9329388 0.1795701 14.789 1.6812994 0.4483886 123.825 R-02 1.9368237 0.1224596 12.921 1.7305084 0.3477304 177.704 R-03 1.9141366 0.1196035 11.206 1.6882344 0.2744889 240.000 R-04 1.7191879 0.0801581 93.133 1.6734445 0.2077092 230.286 R-05 1.7029035 0.0699625 158.805 1.6865116 0.1862225 225.674 R-06 1.6933701 0.0640425 213.864 1.6904005 0.1898312 227.117 R-07 1.6939475 0.0576888 212.435 1.6925921 0.1618810 285.048 R-08 1.6969386 0.0533290 271.986 1.6924288 0.1673219 281.091

TABLE 3-S Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ S-01 1.9315873 0.1333486 13.169 1.7169625 0.3552140 168.729 S-02 1.9153217 0.1206110 11.351 1.6899751 0.2797802 229.265 S-03 1.8972445 0.1001874 10.604 1.6952918 0.2334251 285.679 S-04 1.7198506 0.0813984 93.215 1.6740113 0.2110946 219.867 S-05 1.7209927 0.0705203 93.408 1.6975541 0.1793898 273.456 S-06 1.7035608 0.0713918 159.462 1.6857491 0.1901066 215.251 S-07 1.6916743 0.0742011 216.137 1.6815589 0.2413942 158.897 S-08 1.6930483 0.0657083 213.861 1.6902271 0.1951191 217.477 S-09 1.6936984 0.0591625 212.273 1.6918699 0.1652801 275.792 S-10 1.6968810 0.0544417 271.786 1.6922876 0.1708476 271.501

TABLE 3-T Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ T-01 1.9249373 0.1361664 14.155 1.7251855 0.3723543 156.237 T-02 1.9134695 0.1202777 11.822 1.6947701 0.2878755 218.180 T-03 1.8970797 0.0999072 10.899 1.6978665 0.2388400 275.054 T-04 1.7208445 0.0825059 93.633 1.6746972 0.2167421 209.700 T-05 1.7215107 0.0711590 93.747 1.6977852 0.1834377 263.540 T-06 1.7046380 0.0728087 160.840 1.6842748 0.1961079 204.946 T-07 1.7071945 0.0643745 160.796 1.7036838 0.1674255 259.158 T-08 1.6911424 0.0761042 216.237 1.6835271 0.2518702 149.208 T-09 1.6924731 0.0678273 212.933 1.6899027 0.2006809 209.434 T-10 1.6944113 0.0547711 211.610 1.6931553 0.1468072 323.528 T-11 1.6967389 0.0554960 271.524 1.6919127 0.1743507 262.739

TABLE 4-A Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ A-01 2.070 0.020 27.974 5.553 3.053 2.024 A-02 1.955 0.138 34.826 9.284 0.606 10.907 A-03 1.895 0.133 29.218 2.177 0.543 63.407 A-04 1.875 0.110 17.990 1.753 0.330 152.930 A-05 1.870 0.101 13.959 1.700 0.255 218.765 A-06 1.867 0.070 13.235 1.732 0.221 270.745 A-07 1.699 0.063 165.016 1.698 0.180 204.222 A-08 1.693 0.058 157.920 1.698 0.154 265.886 A-09 1.692 0.069 236.756 6.942 3.076 0.950 A-10 1.694 0.074 217.672 1.788 0.339 84.006 A-11 1.699 0.071 210.274 1.718 0.242 154.667 A-12 1.698 0.065 207.280 1.695 0.194 219.490 A-13 1.695 0.054 219.181 1.688 0.161 263.755

TABLE 4-B Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ B-01 1.894 0.182 37.493 9.246 0.662 10.628 B-02 1.881 0.116 18.625 1.766 0.358 142.939 B-03 1.874 0.105 14.298 1.701 0.269 209.610 B-04 1.872 0.074 13.408 1.733 0.231 261.989 B-05 1.693 0.060 158.097 1.697 0.160 257.142 B-06 1.690 0.074 235.203 5.632 4.204 0.919 B-07 1.693 0.078 218.334 1.803 0.382 74.994 B-08 1.699 0.074 210.503 1.719 0.259 145.797 B-09 1.698 0.067 207.468 1.694 0.203 210.546 B-10 1.695 0.055 219.130 1.687 0.167 255.274

TABLE 4-C Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ C-01 1.855 0.222 38.795 9.554 0.714 10.003 C-02 1.894 0.121 19.092 1.787 0.392 133.195 C-03 1.879 0.110 14.598 1.702 0.285 201.011 C-04 1.879 0.076 13.458 1.736 0.242 253.439 C-05 1.692 0.062 158.198 1.697 0.168 248.709 C-06 1.699 0.078 210.437 1.720 0.280 137.855 C-07 1.698 0.070 207.381 1.693 0.215 202.487 C-08 1.695 0.057 219.158 1.687 0.175 246.765

TABLE 4-D Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ D-01 1.921 0.198 29.852 2.410 0.850 42.336 D-02 1.907 0.132 18.597 1.779 0.418 126.566 D-03 1.883 0.117 14.666 1.698 0.298 192.788 D-04 1.885 0.078 13.425 1.738 0.251 244.904 D-05 1.692 0.064 158.019 1.697 0.174 240.368 D-06 1.700 0.081 209.560 1.716 0.298 131.419 D-07 1.698 0.072 206.609 1.692 0.225 195.862 D-08 1.695 0.059 219.174 1.688 0.183 237.750 D-09 1.705 0.053 283.412 1.691 0.185 233.362

TABLE 4-E Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ E-01 1.943 0.213 22.907 1.902 0.785 53.731 E-02 1.907 0.153 17.372 1.716 0.418 124.143 E-03 1.884 0.123 14.585 1.691 0.305 184.536 E-04 1.891 0.078 13.392 1.743 0.257 235.129 E-05 1.691 0.066 157.377 1.696 0.178 232.195 E-06 1.699 0.072 204.994 1.688 0.231 192.230 E-07 1.695 0.060 219.095 1.689 0.188 228.102 E-08 1.704 0.054 283.255 1.689 0.189 224.255

TABLE 4-F Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ F-01 1.895 0.076 13.537 1.753 0.262 223.848 F-02 1.882 0.126 14.752 1.688 0.309 174.672 F-03 1.690 0.068 155.845 1.693 0.181 224.616 F-04 1.701 0.084 206.275 1.686 0.310 122.505 F-05 1.693 0.070 221.382 1.667 0.231 161.928 F-06 1.695 0.060 218.851 1.689 0.190 218.129 F-07 1.695 0.055 215.764 1.693 0.162 277.062 F-08 1.703 0.049 278.302 1.691 0.159 273.241

TABLE 4-G Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ G-01 1.881 0.189 17.242 1.617 0.409 111.921 G-02 1.879 0.125 15.444 1.697 0.320 162.536 G-03 1.898 0.073 14.029 1.767 0.271 211.582 G-04 1.873 0.092 12.003 1.696 0.218 280.785 G-05 1.715 0.067 99.925 1.686 0.167 269.056 G-06 1.693 0.070 221.230 1.668 0.236 151.884 G-07 1.695 0.061 218.569 1.689 0.193 208.598 G-08 1.695 0.055 215.552 1.692 0.164 267.637

TABLE 4-H Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ H-01 1.880 0.126 16.279 1.709 0.340 151.148 H-02 1.901 0.074 14.624 1.778 0.284 201.087 H-03 1.874 0.095 12.218 1.694 0.225 271.916 H-04 1.716 0.068 99.848 1.687 0.173 259.863 H-05 1.692 0.072 220.366 1.668 0.244 143.647 H-06 1.695 0.062 218.447 1.688 0.198 200.044 H-07 1.695 0.056 215.754 1.691 0.167 258.621

TABLE 4-I Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ I-01 1.888 0.130 16.763 1.718 0.366 141.793 I-02 1.903 0.081 14.911 1.775 0.299 193.492 I-03 1.880 0.095 12.432 1.700 0.236 262.434 I-04 1.693 0.063 156.037 1.696 0.165 252.531 I-05 1.695 0.064 218.418 1.685 0.207 192.031 I-06 1.695 0.057 216.093 1.691 0.173 249.945 I-07 1.704 0.051 278.289 1.691 0.173 246.105

TABLE 4-J Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ J-01 1.902 0.140 16.621 1.717 0.393 134.110 J-02 1.906 0.093 14.821 1.761 0.312 187.587 J-03 1.888 0.096 12.503 1.706 0.247 253.021 J-04 1.694 0.066 218.392 1.682 0.217 183.765 J-05 1.695 0.059 216.276 1.691 0.180 241.184 J-06 1.704 0.052 278.098 1.689 0.180 237.690

TABLE 4-K Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ K-01 1.915 0.153 15.972 1.700 0.410 128.035 K-02 1.908 0.105 14.452 1.741 0.319 181.864 K-03 1.895 0.097 12.386 1.708 0.254 244.026 K-04 1.692 0.060 153.833 1.696 0.152 294.292 K-05 1.694 0.068 218.491 1.679 0.227 174.638 K-06 1.695 0.060 216.291 1.691 0.187 231.949 K-07 1.705 0.054 277.828 1.688 0.185 228.622

TABLE 4-L Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ L-01 1.919 0.168 15.470 1.675 0.416 121.998 L-02 1.909 0.114 14.219 1.728 0.323 174.431 L-03 1.897 0.102 12.252 1.703 0.257 235.332 L-04 1.692 0.061 153.490 1.695 0.154 285.775 L-05 1.694 0.069 218.807 1.679 0.236 164.294 L-06 1.695 0.061 216.166 1.690 0.192 222.296 L-07 1.696 0.056 214.076 1.694 0.163 280.805 L-08 1.706 0.051 276.333 1.706 0.162 273.925

TABLE 4-M Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ M-01 1.909 0.116 14.671 1.733 0.334 163.102 M-02 1.895 0.106 12.483 1.700 0.261 225.249 M-03 1.879 0.083 11.828 1.710 0.220 280.433 M-04 1.694 0.071 219.020 1.682 0.245 153.670 M-05 1.695 0.063 215.746 1.690 0.197 212.983 M-06 1.696 0.057 213.723 1.693 0.165 271.596 M-07 1.706 0.052 276.363 1.706 0.164 264.087

TABLE 4-N Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ N-01 1.910 0.115 15.725 1.755 0.355 150.207 N-02 1.892 0.109 12.960 1.698 0.268 215.505 N-03 1.879 0.084 12.187 1.712 0.226 270.397 N-04 1.694 0.072 218.706 1.684 0.254 144.577 N-05 1.694 0.064 215.091 1.689 0.201 204.614 N-06 1.696 0.058 213.482 1.692 0.169 262.678 N-07 1.706 0.052 276.472 1.707 0.168 254.823

TABLE 4-O Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ O-01 1.919 0.115 16.638 1.785 0.385 138.580 O-02 1.893 0.113 13.413 1.697 0.281 206.656 O-03 1.882 0.085 12.438 1.715 0.235 261.237 O-04 1.694 0.074 217.741 1.683 0.264 137.032 O-05 1.694 0.065 214.737 1.687 0.207 196.488 O-06 1.695 0.059 213.710 1.692 0.173 253.675 O-07 1.707 0.053 276.548 1.707 0.174 246.168

TABLE 4-P Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ P-01 1.937 0.118 16.771 1.806 0.418 129.251 P-02 1.898 0.119 13.576 1.695 0.295 198.434 P-03 1.890 0.087 12.460 1.718 0.246 252.589 P-04 1.694 0.077 216.630 1.679 0.277 129.875 P-05 1.694 0.067 214.866 1.684 0.215 188.027 P-06 1.695 0.060 214.034 1.692 0.179 244.657 P-07 1.707 0.054 276.376 1.707 0.181 237.806

TABLE 4-Q Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ Q-01 1.958 0.128 15.815 1.794 0.439 123.830 Q-02 1.903 0.127 13.420 1.688 0.307 190.984 Q-03 1.898 0.090 12.296 1.719 0.254 244.231 Q-04 1.694 0.080 215.821 1.668 0.290 122.663 Q-05 1.694 0.068 215.165 1.681 0.224 179.093 Q-06 1.696 0.061 214.210 1.692 0.185 235.479 Q-07 1.707 0.056 275.996 1.705 0.187 229.352

TABLE 4-R Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ R-01 1.907 0.135 13.188 1.679 0.313 183.151 R-02 1.904 0.092 12.121 1.720 0.260 235.214 R-03 1.694 0.070 215.718 1.679 0.233 169.072 R-04 1.696 0.062 214.371 1.692 0.190 225.802 R-05 1.704 0.051 274.345 1.687 0.159 280.556

TABLE 4-S Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ S-01 1.908 0.140 13.288 1.676 0.321 172.696 S-02 1.906 0.092 12.370 1.726 0.266 223.910 S-03 1.889 0.087 11.418 1.707 0.223 283.898 S-04 1.693 0.071 216.427 1.681 0.243 158.126 S-05 1.696 0.064 214.510 1.692 0.195 215.938 S-06 1.696 0.057 213.492 1.691 0.166 273.809 S-07 1.704 0.052 274.677 1.687 0.162 270.432

TABLE 4-T Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ T-01 1.907 0.139 13.915 1.684 0.334 160.500 T-02 1.904 0.091 13.010 1.734 0.275 212.141 T-03 1.887 0.088 11.752 1.707 0.227 273.737 T-04 1.693 0.073 216.656 1.683 0.253 148.279 T-05 1.696 0.065 214.259 1.692 0.201 206.980 T-06 1.696 0.058 213.637 1.690 0.169 264.528 T-07 1.704 0.053 275.120 1.687 0.165 260.887

TABLE 5-A Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ A-01 2.047 0.012 29.751 6.274 3.305 1.566 A-02 1.887 0.120 26.980 1.973 0.477 76.285 A-03 1.871 0.106 17.106 1.713 0.298 158.161 A-04 1.868 0.075 15.339 1.738 0.245 212.612 A-05 1.862 0.065 13.830 1.730 0.208 271.884 A-06 1.691 0.062 161.852 1.688 0.179 207.262 A-07 1.692 0.057 157.460 1.697 0.154 266.043 A-08 1.711 0.070 239.891 7.420 3.291 0.810 A-09 1.704 0.057 226.155 1.689 0.187 202.908 A-10 1.705 0.050 221.451 1.695 0.158 261.182 A-11 1.695 0.054 267.286 1.705 0.184 212.751

TABLE 5-B Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ B-01 1.943 0.121 34.905 6.149 4.965 1.046 B-02 1.876 0.112 17.699 1.719 0.321 148.502 B-03 1.873 0.080 15.588 1.739 0.258 203.950 B-04 1.866 0.068 14.042 1.732 0.217 262.757 B-05 1.691 0.064 161.844 1.687 0.188 198.716 B-06 1.692 0.059 157.652 1.696 0.161 257.279 B-07 1.706 0.052 221.303 1.695 0.165 252.591 B-08 1.711 0.075 235.815 6.235 4.691 0.724 B-09 1.704 0.059 225.762 1.687 0.197 194.502 B-10 1.695 0.056 267.452 1.705 0.194 204.028

TABLE 5-C Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ C-01 1.883 0.119 18.157 1.723 0.349 139.788 C-02 1.879 0.084 15.746 1.741 0.274 195.542 C-03 1.872 0.069 14.214 1.737 0.228 253.893 C-04 1.692 0.061 157.790 1.697 0.168 248.784 C-05 1.705 0.061 225.478 1.687 0.209 186.105 C-06 1.706 0.054 221.123 1.695 0.173 244.149

TABLE 5-D Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ D-01 1.890 0.130 18.083 1.714 0.371 132.495 D-02 1.886 0.088 15.723 1.743 0.287 187.112 D-03 1.877 0.073 14.196 1.736 0.236 245.779 D-04 1.692 0.062 157.690 1.697 0.175 240.328 D-05 1.705 0.063 225.284 1.687 0.220 177.345 D-06 1.706 0.055 220.863 1.695 0.180 235.453 D-07 1.695 0.055 262.917 1.705 0.178 255.408

TABLE 5-E Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ E-01 1.891 0.144 17.530 1.686 0.376 126.586 E-02 1.892 0.091 15.545 1.744 0.296 178.253 E-03 1.878 0.079 14.050 1.728 0.240 238.151 E-04 1.691 0.064 157.168 1.696 0.179 231.953 E-05 1.705 0.064 225.395 1.686 0.227 167.881 E-06 1.706 0.056 220.607 1.694 0.184 226.210 E-07 1.697 0.047 278.691 1.700 0.152 281.986

TABLE 5-F Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ F-01 1.896 0.091 15.652 1.752 0.303 167.408 F-02 1.875 0.087 14.019 1.715 0.239 230.256 F-03 1.705 0.064 225.606 1.687 0.232 157.678 F-04 1.705 0.057 220.354 1.694 0.186 216.433 F-05 1.708 0.053 218.289 1.707 0.158 272.538 F-06 1.697 0.047 278.413 1.701 0.154 271.867

TABLE 5-G Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ G-01 1.901 0.088 16.388 1.774 0.318 154.194 G-02 1.871 0.093 14.267 1.706 0.241 221.319 G-03 1.866 0.067 13.172 1.724 0.206 275.098 G-04 1.706 0.065 225.317 1.687 0.238 147.740 G-05 1.705 0.057 220.112 1.694 0.188 206.685 G-06 1.708 0.053 218.342 1.707 0.161 262.805 G-07 1.697 0.047 278.070 1.702 0.156 262.294

TABLE 5-H Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ H-01 1.908 0.087 17.362 1.802 0.342 141.959 H-02 1.871 0.097 14.654 1.704 0.250 212.121 H-03 1.869 0.067 13.479 1.729 0.214 265.153 H-04 1.706 0.067 224.641 1.684 0.248 139.263 H-05 1.705 0.058 220.026 1.694 0.194 197.616 H-06 1.708 0.054 218.429 1.707 0.165 253.768 H-07 1.697 0.048 277.999 1.702 0.160 253.663

TABLE 5-I Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ I-01 1.918 0.092 17.977 1.822 0.371 132.466 I-02 1.876 0.100 14.944 1.706 0.265 203.140 I-03 1.874 0.069 13.674 1.733 0.224 256.300 I-04 1.706 0.060 219.996 1.694 0.203 189.146 I-05 1.709 0.055 218.382 1.707 0.172 245.309 I-06 1.697 0.050 278.074 1.701 0.166 245.468

TABLE 5-J Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ J-01 1.929 0.101 17.864 1.821 0.398 125.532 J-02 1.883 0.103 14.973 1.709 0.279 194.479 J-03 1.880 0.071 13.709 1.736 0.234 247.823 J-04 1.707 0.062 219.774 1.693 0.214 180.753 J-05 1.709 0.057 218.071 1.706 0.179 237.020 J-06 1.697 0.047 275.083 1.700 0.148 295.680

TABLE 5-K Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ K-01 1.891 0.108 14.702 1.707 0.289 186.368 K-02 1.885 0.074 13.594 1.735 0.241 239.426 K-03 1.707 0.064 219.485 1.692 0.223 171.867 K-04 1.709 0.058 217.678 1.705 0.184 228.411 K-05 1.697 0.048 275.043 1.701 0.152 286.426

TABLE 5-L Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ L-01 1.896 0.113 14.435 1.703 0.295 177.615 L-02 1.887 0.078 13.577 1.733 0.244 230.253 L-03 1.692 0.059 153.772 1.694 0.154 284.837 L-04 1.707 0.065 219.581 1.692 0.231 161.904 L-05 1.709 0.059 217.561 1.702 0.188 219.131 L-06 1.707 0.053 216.484 1.695 0.157 278.062 L-07 1.697 0.048 274.812 1.701 0.154 276.656

TABLE 5-M Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ M-01 1.898 0.115 14.632 1.705 0.303 166.646 M-02 1.885 0.081 13.917 1.732 0.248 219.851 M-03 1.868 0.075 12.752 1.713 0.206 279.921 M-04 1.707 0.067 219.938 1.695 0.239 151.390 M-05 1.708 0.060 217.756 1.701 0.192 209.457 M-06 1.706 0.054 217.065 1.694 0.160 268.021 M-07 1.696 0.049 274.075 1.702 0.157 267.366

TABLE 5-N Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ N-01 1.899 0.115 15.367 1.714 0.318 155.141 N-02 1.882 0.083 14.477 1.732 0.256 209.893 N-03 1.870 0.074 13.063 1.717 0.212 269.637 N-04 1.708 0.062 217.887 1.700 0.197 200.272 N-05 1.707 0.055 217.378 1.693 0.164 258.646 N-06 1.696 0.050 273.384 1.702 0.160 258.714

TABLE 5-O Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ O-01 1.903 0.118 16.130 1.723 0.340 145.164 O-02 1.884 0.087 14.896 1.733 0.268 201.113 O-03 1.874 0.075 13.357 1.722 0.221 260.240 O-04 1.708 0.063 217.693 1.700 0.205 191.744 O-05 1.707 0.056 217.044 1.694 0.169 250.083 O-06 1.696 0.051 273.493 1.702 0.165 250.180

TABLE 5-P Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ P-01 1.913 0.125 16.406 1.727 0.366 136.777 P-02 1.891 0.091 14.954 1.734 0.282 193.024 P-03 1.879 0.077 13.440 1.724 0.231 251.802 P-04 1.709 0.064 217.197 1.700 0.214 183.446 P-05 1.708 0.057 216.333 1.694 0.175 241.739 P-06 1.696 0.052 274.035 1.700 0.171 241.498

TABLE 5-Q Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ Q-01 1.900 0.097 14.674 1.732 0.294 185.336 Q-02 1.885 0.082 13.311 1.722 0.239 243.911 Q-03 1.708 0.058 215.615 1.694 0.180 233.152 Q-04 1.697 0.048 273.453 1.699 0.151 289.720

TABLE 5-R Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ R-01 1.908 0.102 14.316 1.730 0.303 177.238 R-02 1.888 0.088 13.163 1.716 0.243 235.819 R-03 1.708 0.059 215.377 1.693 0.185 223.802 R-04 1.709 0.054 215.137 1.702 0.158 279.418 R-05 1.697 0.049 273.522 1.700 0.154 279.960

TABLE 5-S Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ S-01 1.914 0.104 14.390 1.735 0.314 166.400 S-02 1.886 0.093 13.299 1.710 0.247 226.131 S-03 1.873 0.070 12.581 1.721 0.208 280.628 S-04 1.692 0.060 152.854 1.693 0.157 278.359 S-05 1.708 0.060 215.913 1.692 0.189 213.567 S-06 1.708 0.054 215.905 1.701 0.161 269.362 S-07 1.697 0.050 273.350 1.701 0.157 270.178

TABLE 5-T Case n₁₀ k₁₀ d₁₀ n₂₀ k₂₀ d₂₀ T-01 1.918 0.103 15.177 1.753 0.331 153.467 T-02 1.883 0.095 13.742 1.708 0.252 215.835 T-03 1.874 0.068 12.955 1.728 0.214 269.400 T-04 1.707 0.061 216.749 1.693 0.194 203.628 T-05 1.708 0.055 216.874 1.699 0.165 259.716 T-06 1.697 0.050 272.522 1.701 0.160 261.468

By using the combinations of values of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀ with which the minimum reflectance is obtained, it may be possible to control the reflectance to 0.4% or less over the entire incidence angle region corresponding to the numerical aperture NA of a corresponding exposure system with each of the above-described silicon thicknesses. In other words, each of the combinations is effective from the viewpoint that the reflectance is controlled to 0.4% or less even when the numerical aperture NA is smaller than the corresponding numerical aperture NA.

A simulation was also carried out for determining how far one of the six variables in each of the combinations of values of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀] varies to produce a reflectance over 0.4%, with the other variables being fixed. The obtained permissible variation ranges are shown in Tables 11-A to 11-T (numerical aperture NA: 0.93≦NA≦1.0), Table 12-A to 12-T (numerical aperture NA: 1.0<NA≦1.1), Tables 13-A to 13-T (numerical aperture NA: 1.1<NA≦1.2), Tables 14-A to 14-T (numerical aperture NA: 1.2<NA≦1.3), and Tables 15-A to 15-T (numerical aperture NA: 1.3<NA≦1.4).

In the tables below,

n_(1-min): minimum n₁₀ when the reflectance does not exceed 0.4%

n_(1-max): maximum n₁₀ when the reflectance does not exceed 0.4%

k_(1-min): minimum k₁₀ when the reflectance does not exceed 0.4%

k_(1-max): maximum k₁₀ when the reflectance does not exceed 0.4%

d_(1-min): minimum d₁₀ when the reflectance does not exceed 0.4%

d_(1-max): maximum d₁₀ when the reflectance does not exceed 0.4%

n_(2-min): minimum n₂₀ when the reflectance does not exceed 0.4%

n_(2-max): maximum n₂₀ when the reflectance does not exceed 0.4%

k_(2-min): minimum k₂₀ when the reflectance does not exceed 0.4%

k_(2-max): maximum k₂₀ when the reflectance does not exceed 0.4%

d_(2-min): minimum d₂₀ when the reflectance does not exceed 0.4%

d_(2-max): maximum d₂₀ when the reflectance does not exceed 0.4%

TABLE 11-A Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) A-01 2.1640640 1.9857913 0.1974881 0.0196744 28.041 20.653 2.8958371 2.4623117 1.8020253 1.3735951 11.601 8.280 A-02 1.9428363 1.7842939 0.2426142 0.0835896 37.757 24.186 2.3681593 1.9966090 0.8289455 0.4606508 73.757 50.598 A-03 1.9576297 1.7850259 0.2148133 0.0371729 28.994 14.134 1.9707991 1.6413265 0.5950778 0.2809702 ∞ 76.872 A-04 1.9545833 1.7830354 0.1828680 0.0038055 29.564 13.280 2.0120708 1.6792059 0.5256718 0.2166960 ∞ 114.006 A-05 1.8469211 1.7238950 0.1688100 0.0370107 108.304 82.625 2.1059290 1.8049561 0.6364527 0.3320741 79.125 60.047 A-06 1.8384570 1.7205432 0.1633733 0.0309270 108.455 81.217 2.0181484 1.7172939 0.5191778 0.2180047 ∞ 111.420 A-07 1.8252406 1.7110450 0.1553613 0.0234985 112.606 80.398 1.9560961 1.6464941 0.4693856 0.1619942 ∞ 125.300 A-08 1.8082491 1.6888265 0.1477492 0.0355519 204.157 153.730 2.1755323 1.7768299 1.0810475 0.7328260 18.289 11.953 A-09 1.8055423 1.6936649 0.1517070 0.0331059 193.760 148.011 2.0676879 1.7745190 0.5567082 0.2860417 77.890 60.591 A-10 1.8017615 1.6978504 0.1479986 0.0337115 194.207 146.995 1.9601734 1.6709510 0.4604288 0.1854154 ∞ 118.281 A-11 1.7922310 1.6913081 0.1411744 0.0297047 ∞ 146.144 1.9356368 1.5999081 0.4195133 0.1388846 ∞ 168.885 A-12 1.8116856 1.6696922 0.1390970 0.0202005 ∞ 158.277 5.5456759 4.3725570 3.0211006 1.9299177  2.102 1.426 A-13 1.7950873 1.6802826 0.1431143 0.0330178 ∞ 210.408 2.0588196 1.7541309 0.5131301 0.2574941 77.434 61.414 A-14 1.7910600 1.6837394 0.1390888 0.0381952 ∞ 210.291 1.9243195 1.6212543 0.4241486 0.1638324 ∞ 122.979 A-15 1.7794892 1.6533564 0.1361463 0.0317518 ∞ 149.513 1.9509696 1.5482450 0.3978720 0.1252902 ∞ 168.040

TABLE 11-B Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) B-01 1.9765106 1.8156232 0.2993467 0.1383360 37.031 26.788 2.5688133 1.9441148 2.2528476 1.6097141 10.412 6.699 B-02 1.8936015 1.7361308 0.3006593 0.1439186 45.853 33.452 3.6189923 3.2095929 0.9578557 0.5340910 32.272 28.022 B-03 1.9437201 1.7857966 0.2641850 0.1051554 38.514 26.033 2.5360575 2.1438358 0.9462301 0.5462985 57.826 42.823 B-04 1.9109595 1.7580896 0.2587795 0.1040725 38.022 24.153 2.2161888 1.8334483 0.8900922 0.5020930 ∞ 50.992 B-05 1.9658189 1.7964891 0.2205139 0.0453857 28.945 15.110 2.0010759 1.6647868 0.6448409 0.3145296 ∞ 72.956 B-06 1.9508455 1.7771870 0.1996149 0.0172626 28.632 12.711 1.9628359 1.6302505 0.5253835 0.2259292 ∞ 114.040 B-07 1.9889922 1.7874455 0.1849726 0.0000000 23.915 8.830 1.9396544 1.6111644 0.4484736 0.1778157 ∞ 129.097 B-08 1.8698402 1.7525465 0.1773355 0.0550833 105.714 87.220 2.3473775 1.8218453 1.8615652 1.3148452 10.681 6.993 B-09 1.8708198 1.7515339 0.1710347 0.0426253 104.773 84.697 2.4485002 2.1326152 0.7462001 0.4233925 54.972 44.997 B-10 1.8429563 1.7284885 0.1660140 0.0362166 105.755 82.025 2.0545640 1.7455125 0.5464477 0.2423962 ∞ 103.928 B-11 1.8273334 1.7163238 0.1568000 0.0275202 110.921 81.205 1.9722282 1.6572367 0.4915459 0.1748967 ∞ 155.882 B-12 1.8011164 1.6891474 0.1510638 0.0182928 120.168 78.348 1.8986632 1.5701231 0.4003568 0.1335282 ∞ 174.053 B-13 1.8084407 1.6945466 0.1511564 0.0399344 199.413 157.378 2.9980065 2.2331872 2.4336783 1.7083805 5.430 3.555 B-14 1.8069373 1.7006556 0.1532768 0.0392717 189.895 149.881 2.1605076 1.8499131 0.6301800 0.3373675 65.640 52.112 B-15 1.8020158 1.7028825 0.1485546 0.0386010 190.393 148.247 1.9771516 1.6873554 0.4840750 0.2045352 139.021 110.784 B-16 1.7917073 1.6951753 0.1410054 0.0335775 ∞ 147.319 1.9455843 1.6038399 0.4311522 0.1490624 ∞ 162.629 B-17 1.7748680 1.6616038 0.1397337 0.0177061 ∞ 78.362 1.9013700 1.5474955 0.3491302 0.1192779 ∞ 179.261 B-18 1.7995571 1.6803054 0.1418691 0.0318679 ∞ 219.267 3.9031090 2.7804552 3.1987078 2.1965484 3.041 1.933 B-19 1.7944023 1.6892021 0.1429939 0.0388679 ∞ 213.520 2.1333770 1.8090423 0.5728584 0.3034224 66.373 53.138 B-20 1.7900144 1.6912498 0.1382895 0.0430014 ∞ 212.401 1.9348689 1.6293818 0.4376544 0.1798382 ∞ 116.162 B-21 1.7788302 1.6597860 0.1352760 0.0355396 ∞ 150.783 1.9606195 1.5529755 0.4050644 0.1340756 ∞ 162.711 B-22 1.7721141 1.6339867 0.1393037 0.0162605 ∞ 131.499 1.9223909 1.5178206 0.3273010 0.1102026 ∞ 178.998

TABLE 11-C Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) C-01 1.8231731 1.6889531 0.3374331 0.1966774 44.591 33.970 2.3113613 1.5131875 2.9933496 2.1403332 8.568 5.252 C-02 1.8704238 1.7221365 0.3164098 0.1654295 45.636 34.013 3.4694784 2.9935165 1.1153984 0.6124627 32.783 27.503 C-03 1.8897351 1.7427735 0.2799519 0.1287580 39.053 25.989 2.2531582 1.8402493 0.9982394 0.5793026 ∞ 46.183 C-04 1.9668640 1.8039697 0.2284362 0.0582238 29.734 16.727 2.0534750 1.7043490 0.7103495 0.3545878 ∞ 91.228 C-05 1.9700505 1.7964873 0.2004352 0.0167243 27.390 13.045 1.9901918 1.6549159 0.5568746 0.2488619 ∞ 108.784 C-06 1.9889367 1.7945592 0.1844224 0.0000000 24.201 9.640 1.9544538 1.6239008 0.4686083 0.1907165 ∞ 125.539 C-07 1.8960963 1.7964051 0.2027126 0.0843971 95.043 82.386 1.8930719 1.3306048 2.0756683 1.4587811 12.301 7.991 C-08 1.8798042 1.7688191 0.1810991 0.0566936 102.324 85.380 2.7319807 2.3831586 0.8737269 0.5058423 43.841 36.695 C-09 1.8486490 1.7395303 0.1694845 0.0435666 103.473 83.035 2.1069571 1.7916519 0.5819143 0.2709792 126.455 95.942 C-10 1.8272295 1.7203471 0.1588071 0.0325461 108.030 81.756 1.9781294 1.6565767 0.5067391 0.1879390 ∞ 150.786 C-11 1.8014602 1.7131679 0.1630009 0.0629313 181.579 155.142 2.2285130 1.4846690 2.5305195 1.8133466 7.152 4.542 C-12 1.8066818 1.7096664 0.1562671 0.0489514 184.788 151.277 2.2616583 1.9259051 0.7108605 0.4005419 56.477 45.327 C-13 1.8013132 1.7087644 0.1491455 0.0453076 186.735 149.398 1.9970170 1.6990226 0.5049354 0.2258400 129.169 104.943 C-14 1.7901840 1.6996005 0.1402926 0.0386361 202.803 148.613 1.9572801 1.6068052 0.4427851 0.1602228 ∞ 156.485 C-15 1.7888636 1.6964637 0.1448234 0.0511015 272.529 222.634 4.0234980 2.5453376 4.9343779 3.5870341 1.854 1.171 C-16 1.7922839 1.6987061 0.1428421 0.0481961 ∞ 215.666 2.1852289 1.8344195 0.6298531 0.3553731 59.183 47.891 C-17 1.7880248 1.6988170 0.1367243 0.0500947 ∞ 214.345 1.9483736 1.6341647 0.4469301 0.1975503 135.897 110.811 C-18 1.7771523 1.6659072 0.1338236 0.0403214 ∞ 152.164 1.9734293 1.5581486 0.4118041 0.1461254 ∞ 157.174

TABLE 11-D Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) D-01 1.8830836 1.7450379 0.3439324 0.1957122 41.919 32.309 3.2738383 2.6931938 1.3905248 0.7652599 34.624 26.646 D-02 1.8894456 1.7496568 0.3113935 0.1623652 38.151 27.175 2.3783942 1.9026215 1.1913935 0.7140034 ∞ 38.650 D-03 1.9759954 1.8236651 0.2451292 0.0831138 33.080 21.762 2.3455819 1.9299789 0.8247144 0.4185645 ∞ 76.091 D-04 1.9752561 1.8171238 0.2392715 0.0711709 29.642 17.776 2.1047769 1.7365738 0.7769713 0.3980858 ∞ 83.621 D-05 1.9566081 1.7994560 0.2448971 0.0778121 30.025 17.558 2.0415795 1.6793835 0.7460866 0.3841615 ∞ 85.930 D-06 1.9857426 1.8133183 0.2025784 0.0179971 26.419 13.320 2.0120620 1.6710122 0.5849314 0.2699888 ∞ 102.487 D-07 2.0116008 1.8131792 0.1836318 0.0000000 22.601 9.497 1.9655292 1.6338862 0.4820573 0.2030644 ∞ 122.172 D-08 1.8608817 1.7601212 0.1929580 0.0733389 98.847 83.253 2.2679467 1.8745946 0.9047855 0.5511698 55.349 42.174 D-09 1.8440660 1.7409813 0.1747540 0.0528949 101.494 82.953 2.0828924 1.7400103 0.6219074 0.2930427 ∞ 93.224 D-10 1.8255212 1.7236487 0.1604973 0.0385149 105.673 82.354 1.9798220 1.6454324 0.5164841 0.1989646 ∞ 143.976 D-11 1.7968482 1.6917774 0.1530963 0.0257575 114.232 79.595 1.8993843 1.5580000 0.4093345 0.1476328 ∞ 163.096 D-12 1.8013651 1.7172159 0.1603274 0.0632058 172.074 150.204 2.1395219 1.7587431 0.7307801 0.4530054 57.764 44.905 D-13 1.7985003 1.7134612 0.1494702 0.0540027 182.684 149.824 1.9978008 1.6681646 0.5024732 0.2441700 126.081 102.188 D-14 1.7870554 1.7030564 0.1388742 0.0447152 194.361 149.689 1.9627277 1.5963116 0.4437332 0.1693082 ∞ 149.980 D-15 1.7701529 1.6661148 0.1392675 0.0232775 ∞ 136.395 1.9116010 1.5409431 0.3522162 0.1321796 ∞ 167.525 D-16 1.7804394 1.7273645 0.1355612 0.0974874 236.430 223.282 4.2192974 2.6906610 9.9343423 7.8844741 0.575 0.402 D-17 1.7877352 1.7081588 0.1413061 0.0629369 262.055 215.348 2.0895557 1.7685523 0.6334874 0.3971031 59.549 48.398 D-18 1.7853294 1.7057908 0.1336096 0.0602063 ∞ 215.600 1.9530972 1.6109988 0.4364237 0.2120328 ∞ 107.664 D-19 1.7730937 1.6800431 0.1318136 0.0455306 ∞ 206.475 1.9842943 1.5519103 0.4127823 0.1614236 ∞ 150.626 D-20 1.7675878 1.6410705 0.1387078 0.0209832 ∞ 138.629 1.9336651 1.5204424 0.3320609 0.1218046 ∞ 166.659

TABLE 11-E Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) dd_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) E-01 1.8748083 1.7393738 0.3368671 0.1916718 34.542 24.447 2.0181788 1.5460267 1.1728709 0.7418895 ∞ 38.073 E-02 1.9789816 1.8230856 0.2533923 0.0850353 28.756 17.639 2.0891174 1.7028088 0.7988426 0.4234361 ∞ 75.545 E-03 2.0023038 1.8297941 0.2038717 0.0168637 25.282 13.221 2.0277165 1.6786747 0.6012817 0.2843445 ∞ 94.052 E-04 2.0468137 1.8446945 0.1676424 0.0000000 20.887 9.486 2.0073158 1.6730946 0.5013927 0.2164733 ∞ 116.551 E-05 2.0992751 1.8446962 0.2341211 0.0000000 16.445 6.421 1.8864494 1.5577361 0.4505861 0.1973793 ∞ 122.465 E-06 1.8491106 1.7507915 0.2096178 0.0945531 93.863 80.071 1.9350344 1.5188906 0.7893250 0.5174866 68.488 46.386 E-07 1.8361972 1.7368735 0.1813258 0.0628651 99.367 82.092 2.0044566 1.6351146 0.5837677 0.2983466 ∞ 94.158 E-08 1.8205420 1.7221912 0.1627354 0.0448936 104.538 82.385 1.9559670 1.6053627 0.4990396 0.2015030 ∞ 136.472 E-09 1.7925661 1.6898427 0.1538738 0.0292620 112.287 79.640 1.8944932 1.5420274 0.4023134 0.1496426 ∞ 155.476 E-10 1.7983926 1.7197305 0.1671071 0.0784414 164.305 147.121 1.9619841 1.5854387 0.6583400 0.4392323 63.983 48.943 E-11 1.7955340 1.7158697 0.1497842 0.0635586 179.571 149.311 2.0007177 1.5954870 0.4697081 0.2495811 ∞ 101.667 E-12 1.7833451 1.7048416 0.1369505 0.0510557 189.846 150.429 1.9612209 1.5727870 0.4313362 0.1724775 ∞ 142.230 E-13 1.7675774 1.6666497 0.1392333 0.0254638 ∞ 137.661 1.9130565 1.5320665 0.3467037 0.1345357 ∞ 159.605 E-14 1.7863651 1.7142020 0.1395008 0.0790479 250.434 212.771 1.9636614 1.6583831 0.5658537 0.3857683 63.760 51.480 E-15 1.7840553 1.7114223 0.1284575 0.0727984 ∞ 215.754 2.0158573 1.6922355 0.3953694 0.2151582 ∞ 106.269 E-16 1.7690598 1.6843869 0.1297423 0.0500450 ∞ 212.645 1.9880870 1.5380211 0.4067894 0.1736986 ∞ 142.387 E-17 1.7654064 1.6439501 0.1389686 0.0226918 ∞ 139.944 1.9381099 1.5156709 0.3302597 0.1238534 ∞ 177.835

TABLE 11-F Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) F-01 1.8445498 1.7028640 0.3433769 0.2065410 35.166 24.465 1.8840155 1.4588886 1.1541143 0.7278801 ∞ 33.984 F-02 1.9748025 1.8134890 0.2687031 0.0967476 27.589 16.388 1.9911676 1.6052106 0.7575345 0.4113980 ∞ 75.388 F-03 2.0056416 1.8240852 0.2226912 0.0264241 23.756 11.873 1.9568925 1.6089457 0.5715493 0.2748867 ∞ 89.427 F-04 2.0650838 1.8519295 0.1772441 0.0000000 19.476 8.682 1.9832685 1.6466413 0.4938946 0.2150397 ∞ 108.866 F-05 2.1015333 1.8486964 0.2338354 0.0000000 16.441 6.545 1.8888145 1.5568528 0.4544922 0.1992566 ∞ 112.277 F-06 1.8622524 1.7567983 0.2177349 0.1041338 90.922 78.110 1.8710036 1.4914735 0.8036755 0.5151159 62.376 40.547 F-07 1.8361037 1.7366067 0.1859629 0.0693234 97.842 81.540 1.9770779 1.5840274 0.5667495 0.2947696 ∞ 89.920 F-08 1.8189212 1.7220536 0.1637893 0.0490835 103.750 82.514 1.9475986 1.5829197 0.4906212 0.2005944 ∞ 127.512 F-09 1.7899842 1.6878285 0.1542946 0.0309962 111.559 79.477 1.8924917 1.5312942 0.3961812 0.1493770 ∞ 146.311 F-10 1.8004922 1.7221231 0.1725282 0.0852650 160.535 145.052 1.8718671 1.5444879 0.6488188 0.4200688 60.551 43.890 F-11 1.7961652 1.7179231 0.1500467 0.0702567 178.047 148.974 1.9680612 1.5533127 0.4509038 0.2461101 ∞ 96.779 F-12 1.7667150 1.6664697 0.1392414 0.0262031 ∞ 138.061 1.9143886 1.5273989 0.3437564 0.1347329 ∞ 166.803 F-13 1.7813348 1.7056878 0.1353170 0.0551168 188.103 151.058 1.9595373 1.5581847 0.4254916 0.1791232 ∞ 133.271 F-14 1.7822166 1.7169481 0.1395756 0.0867753 246.078 210.779 1.8944201 1.6099890 0.5389938 0.3617453 60.493 46.957 F-15 1.7851393 1.7150563 0.1230351 0.0833794 267.416 215.816 1.9909918 1.7059344 0.3550419 0.2342728 ∞ 101.263 F-16 1.7671877 1.6858645 0.1284573 0.0522146 ∞ 213.696 1.9902944 1.5291713 0.4050314 0.1800814 ∞ 132.816 F-17 1.7651222 1.6451528 0.1393025 0.0231282 ∞ 140.264 1.9433160 1.5134088 0.3296937 0.1239332 ∞ 172.741

TABLE 11-G Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) G-01 1.8510344 1.7079497 0.3629205 0.2322015 35.649 25.461 1.9179419 1.4877015 1.3266012 0.8121213 ∞ 24.910 G-02 1.9558961 1.7996144 0.2741522 0.1090704 29.623 18.109 2.0086034 1.6054333 0.8085387 0.4260057 ∞ 63.805 G-03 2.0007807 1.8226508 0.2254244 0.0333809 24.374 12.458 1.9603631 1.6072540 0.5891826 0.2817351 ∞ 80.107 G-04 2.0775306 1.8401429 0.2290099 0.0000000 17.643 7.220 1.8945047 1.5593252 0.4656915 0.2042938 ∞ 103.866 G-05 1.8957386 1.7930616 0.2284775 0.1174850 89.439 78.698 2.0886119 1.5366111 1.0446792 0.6492373 42.199 24.342 G-06 1.8445182 1.7463871 0.1855165 0.0715577 97.635 82.441 2.0389449 1.6285494 0.6271130 0.3140137 ∞ 76.060 G-07 1.8208637 1.7249616 0.1633948 0.0495411 103.378 83.068 1.9667878 1.5975080 0.5153303 0.2065144 ∞ 120.158 G-08 1.7914160 1.6890869 0.1545438 0.0310014 111.442 79.681 1.8956181 1.5348893 0.4029292 0.1524641 ∞ 137.415 G-09 1.8064727 1.7324529 0.1736747 0.0932645 159.337 146.111 1.9712182 1.5680749 0.7358016 0.4694711 43.749 30.577 G-10 1.7976831 1.7210876 0.1496282 0.0723320 178.016 150.130 2.0082485 1.5759633 0.4835820 0.2565849 ∞ 84.229 G-11 1.7676796 1.6668971 0.1393459 0.0260829 ∞ 138.020 1.9186141 1.5291365 0.3482262 0.1370580 ∞ 155.808 G-12 1.7818611 1.7063045 0.1353393 0.0547363 188.100 151.498 1.9748195 1.5661855 0.4418024 0.1833758 ∞ 124.682 G-13 1.7798254 1.7226306 0.1373611 0.0956167 228.804 212.101 1.9246120 1.6316017 0.5645213 0.3855345 45.737 35.320 G-14 1.7828150 1.7158448 0.1238214 0.0839801 266.567 217.609 1.9304083 1.7107074 0.3806594 0.2479153 ∞ 88.680 G-15 1.7683830 1.6865935 0.1284365 0.0520461 ∞ 214.066 2.0034536 1.5326101 0.4129136 0.1829001 ∞ 124.317 G-16 1.7660183 1.6445986 0.1391357 0.0229907 ∞ 140.172 1.9466117 1.5142130 0.3327484 0.1259991 ∞ 162.119

TABLE 11-H Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) H-01 1.8348744 1.7017860 0.3798462 0.2808191 40.569 31.320 2.2991869 1.6708019 1.7969846 1.1828110 24.492 11.798 H-02 1.9378552 1.7891528 0.2803248 0.1232521 33.039 21.589 2.1152589 1.6836610 0.9407294 0.4862702 ∞ 55.622 H-03 1.9816003 1.8123315 0.2304942 0.0484886 26.210 13.965 1.9677635 1.6119358 0.6263078 0.3015312 ∞ 76.216 H-04 2.0531456 1.8330577 0.2233118 0.0000000 19.209 8.222 1.9045230 1.5691056 0.4866935 0.2170987 ∞ 119.528 H-05 1.9032381 1.8026375 0.2332691 0.1296546 94.176 83.950 2.5106963 1.7240899 1.7198847 1.0160017 18.225 9.869 H-06 1.8612260 1.7637761 0.1850318 0.0725318 98.433 84.409 2.1736563 1.7881949 0.7450683 0.3750354 78.752 56.421 H-07 1.8282464 1.7322039 0.1638123 0.0491174 102.610 83.678 2.0065197 1.6441979 0.5671385 0.2268590 ∞ 111.470 H-08 1.7958627 1.6943845 0.1554022 0.0314630 110.744 80.478 1.9018550 1.5486836 0.4227446 0.1616729 ∞ 129.994 H-09 1.8204382 1.7477014 0.1733188 0.1005906 162.626 151.084 2.2468682 1.5775835 1.1545804 0.7384256 20.369 11.413 H-10 1.8012800 1.7248420 0.1501327 0.0708798 170.938 152.125 2.0151748 1.6653676 0.5763906 0.2963613 83.086 66.911 H-11 1.7851787 1.7084953 0.1369615 0.0539574 187.241 151.653 1.9886751 1.5898995 0.4693105 0.1905971 ∞ 116.509 H-12 1.7692727 1.6693251 0.1392713 0.0269409 ∞ 139.738 1.9227537 1.5351035 0.3603968 0.1441040 ∞ 173.121 H-13 1.7826017 1.7298539 0.1352886 0.1031853 230.770 217.847 2.0789924 1.7538251 0.8187232 0.5751050 23.733 17.715 H-14 1.7835199 1.7158807 0.1274471 0.0787410 264.411 219.187 1.9536996 1.5958199 0.4569726 0.2526929 86.365 72.843 H-15 1.7709992 1.6903070 0.1287648 0.0532839 ∞ 215.155 2.0153556 1.5448258 0.4230963 0.1875775 ∞ 117.185 H-16 1.7665771 1.6446349 0.1382733 0.0240191 ∞ 140.790 1.9481295 1.5169100 0.3392135 0.1321456 ∞ 170.934

TABLE 11-I Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) I-01 1.8010327 1.6703051 0.3790844 0.2860131 49.040 39.697 6.2750068 4.0060224 6.3084837 4.3813279 2.011 1.105 I-02 1.9298895 1.7853326 0.2927841 0.1409628 33.486 22.674 2.1127495 1.6827031 1.0143560 0.5514972 ∞ 52.072 I-03 1.9897430 1.8293451 0.2260071 0.0543604 27.922 16.406 2.0768797 1.7082590 0.7280970 0.3528321 ∞ 86.499 I-04 1.9818310 1.8176855 0.2357004 0.0585080 26.827 15.078 1.9901759 1.6322669 0.6776751 0.3358636 ∞ 74.175 I-05 2.0325692 1.8434603 0.1884373 0.0000000 22.396 11.017 2.0035162 1.6644915 0.5539257 0.2508800 ∞ 109.936 I-06 2.0503236 1.8393702 0.2207547 0.0000000 19.774 8.961 1.9171324 1.5828588 0.5124144 0.2361131 ∞ 116.056 I-07 2.0748040 1.8271550 0.2143905 0.0000000 17.468 6.484 1.9053653 1.5724832 0.4408889 0.1848623 ∞ 129.507 I-08 1.8967501 1.7978609 0.2321058 0.1358900 99.873 89.276 4.7253432 3.0478309 4.6281749 2.8811534 3.296 1.805 I-09 1.8980961 1.8025163 0.1987565 0.0890605 98.171 86.996 2.8922831 2.4763163 0.9336804 0.4984400 44.099 35.880 I-10 1.8353948 1.7408879 0.1658283 0.0523285 101.320 84.205 2.0470219 1.6904643 0.6008487 0.2548880 ∞ 103.196 I-11 1.7999193 1.7010338 0.1566929 0.0340123 109.103 81.354 1.9088732 1.5604748 0.4445734 0.1750519 ∞ 159.368 I-12 1.7854499 1.6686531 0.1595713 0.0236692 117.512 74.034 1.8609244 1.5175199 0.3552154 0.1357403 ∞ 176.325 I-13 1.8244989 1.7519220 0.1722459 0.0986888 168.183 156.692 5.2323444 3.4304584 4.7853754 3.0546576 1.899 1.115 I-14 1.8045445 1.7295701 0.1511401 0.0733300 169.665 153.355 2.1332569 1.7780836 0.6582710 0.3581709 67.058 53.813 I-15 1.7877293 1.7127660 0.1377613 0.0572352 185.067 151.912 1.9754955 1.6114989 0.4878301 0.2114751 ∞ 109.119 I-16 1.7698545 1.6769443 0.1389352 0.0297641 ∞ 142.121 1.9212870 1.5382413 0.3717519 0.1547194 ∞ 166.932 I-17 1.7687629 1.6489912 0.1464718 0.0187435 ∞ 124.857 1.9093862 1.5283218 0.3156516 0.1239487 ∞ 178.253 I-18 1.7823383 1.7323517 0.1360043 0.1014499 237.517 225.014 4.8909707 3.2979556 4.1408226 2.8457384 1.432 0.948 I-19 1.7855975 1.7187225 0.1266313 0.0809270 261.147 219.736 2.0323920 1.7604730 0.5028382 0.3025708 71.994 61.451 I-20 1.7723412 1.6968651 0.1273417 0.0587455 ∞ 216.538 1.9005983 1.5558095 0.4255322 0.2016199 ∞ 110.627 I-21 1.7658718 1.6500332 0.1370124 0.0266059 ∞ 142.074 1.9535710 1.5188262 0.3463206 0.1414268 ∞ 165.553 I-22 1.7705609 1.6340802 0.1434011 0.0161403 ∞ 129.746 1.9378669 1.5210188 0.3075256 0.1150696 ∞ 175.929 I-23 1.7800884 1.5986944 0.1423932 0.0152277 ∞ 132.671 1.9711999 1.4724951 0.3645229 0.1050453 ∞ 170.517

TABLE 11-J Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) J-01 1.9409429 1.8021941 0.3131894 0.1685141 32.263 22.948 2.1266765 1.6861902 1.1398766 0.6573509 ∞ 46.952 J-02 1.9932822 1.8329758 0.2432049 0.0705755 26.396 15.656 2.0111682 1.6483447 0.7292981 0.3769397 ∞ 86.478 J-03 2.0278925 1.8383637 0.2106615 0.0048254 21.892 10.787 1.9564959 1.6175237 0.5535235 0.2607610 ∞ 108.187 J-04 2.0851788 1.8312945 0.2401716 0.0000000 16.615 6.305 1.8770072 1.5476420 0.4425906 0.1917715 ∞ 128.340 J-05 1.8783297 1.7939522 0.1960237 0.0933894 96.880 86.306 2.5837560 2.1571068 1.0162369 0.5615995 48.975 38.062 J-06 1.8340278 1.7448822 0.1682003 0.0599264 99.658 84.361 2.0380702 1.6791847 0.6233239 0.2810937 ∞ 97.676 J-07 1.7994764 1.7049231 0.1581441 0.0389876 107.073 81.918 1.9050716 1.5552547 0.4529885 0.1881814 ∞ 153.165 J-08 1.7846306 1.6715154 0.1609601 0.0274140 112.273 75.140 1.8541601 1.5132909 0.3609224 0.1435457 ∞ 170.190 J-09 1.7998854 1.7353261 0.1482564 0.0854732 166.198 153.461 2.1593286 1.7753687 0.6667261 0.4228687 61.016 49.925 J-10 1.7863396 1.7175981 0.1353847 0.0659389 180.247 152.325 1.9982564 1.6053072 0.4773921 0.2335628 ∞ 109.997 J-11 1.7681464 1.6819305 0.1380740 0.0342715 ∞ 144.598 1.9216978 1.5338499 0.3746436 0.1661414 ∞ 160.089 J-12 1.7669198 1.6515622 0.1463713 0.0216239 ∞ 129.299 1.9100226 1.5252131 0.3191776 0.1309355 ∞ 172.105 J-13 1.7707165 1.7040051 0.1220832 0.0695282 ∞ 217.819 1.9376772 1.5483132 0.4043358 0.2333336 ∞ 104.539 J-14 1.7634269 1.6553617 0.1358159 0.0303533 ∞ 189.521 1.9623054 1.5145784 0.3489988 0.1513852 ∞ 158.729 J-15 1.7680585 1.6373835 0.1429634 0.0185884 ∞ 132.956 1.9433515 1.5188691 0.3114371 0.1213260 ∞ 169.651

TABLE 11-K Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) K-01 1.9707785 1.8360788 0.3425950 0.2023887 27.715 20.125 1.9329888 1.5140813 1.1219560 0.7176091 ∞ 45.573 K-02 2.0196477 1.8536052 0.2639073 0.0831004 23.306 13.914 1.9357511 1.5767961 0.7075294 0.3937403 ∞ 72.232 K-03 2.0645663 1.8585909 0.2374446 0.0112678 18.917 9.310 1.9031629 1.5653077 0.5390913 0.2670820 ∞ 104.858 K-04 2.0786207 1.8320900 0.2457404 0.0000000 16.773 6.617 1.8708739 1.5393529 0.4503117 0.1999821 ∞ 123.607 K-05 1.8425452 1.7719593 0.1968678 0.1116248 92.844 83.802 1.9910461 1.5793420 0.7893473 0.5451810 78.485 48.751 K-06 1.8250707 1.7437914 0.1698075 0.0718228 97.605 84.143 1.9741547 1.6009187 0.5756118 0.2952627 ∞ 99.488 K-07 1.7937600 1.7041262 0.1595997 0.0451600 104.545 82.071 1.8857969 1.5266501 0.4416537 0.1958456 ∞ 144.226 K-08 1.7828027 1.6711987 0.1628300 0.0313846 109.589 75.289 1.8295758 1.5032806 0.3608888 0.1486305 ∞ 162.042 K-09 1.7810699 1.7216656 0.1268030 0.0823438 175.807 152.735 1.9768505 1.5572423 0.4221615 0.2566463 ∞ 112.257 K-10 1.7642217 1.6821282 0.1373190 0.0383688 182.940 144.697 1.9234068 1.5160325 0.3659687 0.1739655 ∞ 152.160 K-11 1.7649885 1.6533259 0.1472226 0.0245664 ∞ 131.728 1.7830963 1.5179791 0.3193676 0.1355785 ∞ 163.972 K-12 1.7600028 1.6605350 0.1355277 0.0346940 ∞ 198.719 1.9669273 1.5020323 0.3468141 0.1582667 ∞ 150.027 K-13 1.7652786 1.6418728 0.1432970 0.0211204 ∞ 135.362 1.9519198 1.5131027 0.3139043 0.1253960 ∞ 161.156

TABLE 11-L Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) L-01 1.9805757 1.8427363 0.3773193 0.2296740 24.766 18.143 1.7617713 1.4040247 1.0059180 0.6941285 ∞ 44.977 L-02 2.0582393 1.8830904 0.2806928 0.0880549 20.473 12.463 1.8985725 1.5339046 0.6916574 0.4025791 ∞ 75.356 L-03 2.1015526 1.8843029 0.2490971 0.0097038 17.008 8.572 1.8899397 1.5484993 0.5369665 0.2720763 ∞ 99.033 L-04 2.0306052 1.7992233 0.2679772 0.0204784 18.280 7.154 1.8310388 1.5036438 0.4411974 0.1956323 ∞ 118.483 L-05 1.8338888 1.7723544 0.2044936 0.1383034 88.945 81.835 1.8276199 1.5002786 0.6676941 0.5063342 80.329 54.435 L-06 1.8206102 1.7454442 0.1694749 0.0862511 95.473 84.029 1.9314879 1.5235777 0.5240986 0.2952742 ∞ 103.032 L-07 1.7877872 1.7013333 0.1602300 0.0516668 102.853 81.969 1.8638369 1.4967507 0.4266791 0.1970013 ∞ 116.786 L-08 1.7818580 1.6686304 0.1646693 0.0341982 107.829 74.760 1.7745154 1.4951867 0.3600673 0.1503127 ∞ 151.233 L-09 1.7605496 1.6803665 0.1370589 0.0427461 177.108 144.718 1.7126080 1.4998919 0.3597939 0.1765700 ∞ 142.669 L-10 1.7645893 1.6563972 0.1488224 0.0265689 ∞ 133.224 1.7659346 1.5128389 0.3206823 0.1370177 ∞ 153.192 L-11 1.7580624 1.6651535 0.1365795 0.0383336 ∞ 201.534 1.7451455 1.4912014 0.3491875 0.1604448 ∞ 139.349 L-12 1.7646827 1.6459120 0.1442677 0.0227735 ∞ 136.956 1.8231992 1.5094394 0.3175857 0.1264736 ∞ 150.082

TABLE 11-M Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) M-01 1.9656620 1.8272452 0.4002190 0.2589422 24.403 18.176 1.6618614 1.3463629 0.9953093 0.6931023 ∞ 44.440 M-02 2.0805818 1.9019600 0.2933600 0.0973432 19.349 12.113 1.8909403 1.5093131 0.6985739 0.4106662 ∞ 78.214 M-03 2.1240686 1.9025366 0.2580161 0.0146042 16.072 8.378 1.8829834 1.5341772 0.5432075 0.2767952 ∞ 97.972 M-04 2.0463656 1.8091195 0.2704872 0.0198024 17.616 6.990 1.8298176 1.5065070 0.4483924 0.2003870 ∞ 113.241 M-05 1.8346221 1.7814641 0.2172051 0.1623528 85.845 80.029 1.7057113 1.4982260 0.6335216 0.4823449 74.094 52.226 M-06 1.8157041 1.7513682 0.1669795 0.1013813 93.932 84.386 1.9287032 1.4845723 0.5001755 0.2953684 ∞ 100.444 M-07 1.7849537 1.6995924 0.1596969 0.0551962 102.261 81.938 1.7495426 1.4857755 0.4263613 0.1988052 ∞ 130.009 M-08 1.7830385 1.6675295 0.1656893 0.0348934 107.536 74.493 1.7604124 1.4953428 0.3646225 0.1519004 ∞ 141.305 M-09 1.7593389 1.6811590 0.1373458 0.0445858 176.094 145.009 1.6975009 1.4959323 0.3653363 0.1785089 ∞ 133.949 M-10 1.7660292 1.6580873 0.1500408 0.0267950 ∞ 133.655 1.7664113 1.5149782 0.3268824 0.1382789 ∞ 178.785 M-11 1.7581881 1.6675241 0.1380347 0.0395508 ∞ 202.677 1.7376177 1.4911956 0.3595090 0.1618748 ∞ 130.155 M-12 1.7661501 1.6473109 0.1451137 0.0228029 ∞ 137.385 1.8164479 1.5119594 0.3236023 0.1274389 ∞ 181.924

TABLE 11-N Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) N-01 1.9308929 1.7942376 0.4248943 0.3114263 27.599 21.187 1.6733044 1.3254125 1.2150047 0.8122935 ∞ 33.320 N-02 2.0668469 1.9023462 0.2944815 0.1170071 21.058 13.856 1.9424197 1.5287271 0.7816085 0.4525081 ∞ 73.527 N-03 2.0815755 1.8822127 0.2572651 0.0377485 18.101 9.759 1.8880509 1.5306180 0.5717414 0.2897138 ∞ 90.028 N-04 2.0331581 1.8054116 0.2662567 0.0253034 18.433 7.508 1.8297667 1.5048766 0.4584284 0.2062971 ∞ 119.932 N-05 1.8646227 1.8113608 0.2337820 0.1808352 84.337 79.289 1.7715072 1.5007687 0.7638684 0.5670385 58.513 38.960 N-06 1.8226386 1.7585272 0.1669851 0.1079995 94.451 85.625 1.9890062 1.5134605 0.5625304 0.3165392 ∞ 88.401 N-07 1.7860045 1.7014415 0.1599748 0.0556450 102.201 82.327 1.7373881 1.4915665 0.4418842 0.2070014 ∞ 125.640 N-08 1.7844901 1.6689970 0.1656189 0.0350000 107.593 74.953 1.7619897 1.5010412 0.3737899 0.1569772 ∞ 134.829 N-09 1.7601791 1.6820529 0.1372717 0.0442944 176.678 145.537 1.6980791 1.5006390 0.3771531 0.1853343 ∞ 127.521 N-10 1.7669520 1.6576990 0.1499045 0.0265976 ∞ 133.759 1.7681577 1.5197385 0.3340591 0.1427591 ∞ 172.727 N-11 1.7594305 1.6674640 0.1377797 0.0390528 ∞ 202.284 1.7367775 1.4946242 0.3688872 0.1686918 ∞ 124.146 N-12 1.7672862 1.6458103 0.1449746 0.0224892 ∞ 136.963 1.8168346 1.5177282 0.3290477 0.1317503 ∞ 173.664

TABLE 11-O Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) O-01 1.8983129 1.7713829 0.4492907 0.3728197 32.695 26.370 1.8885821 1.4076568 1.7362366 1.2101672 ∞ 19.131 O-02 2.0221369 1.8742366 0.2986525 0.1428175 25.315 17.418 2.0282026 1.5883796 0.9417727 0.5259305 ∞ 58.081 O-03 2.0538982 1.8739141 0.2424013 0.0480312 20.577 11.685 1.9364611 1.5761180 0.6315251 0.3225835 ∞ 77.301 O-04 2.0458191 1.8670105 0.2458201 0.0517698 20.811 11.767 1.9264805 1.5663584 0.6264832 0.3193835 ∞ 77.707 O-05 2.0385649 1.8193877 0.2557128 0.0219835 18.714 8.116 1.8502574 1.5146080 0.4821269 0.2224065 ∞ 120.462 O-06 1.9309938 1.8673549 0.2538005 0.1883086 85.306 80.356 2.1784360 1.3777316 1.3849754 0.9787327 25.718 18.689 O-07 1.8360843 1.7689224 0.1740671 0.1038864 95.456 86.511 2.0629243 1.6089888 0.7196957 0.3755124 90.240 70.528 O-08 1.7914404 1.7087781 0.1617681 0.0561273 102.053 83.173 1.7728850 1.5080181 0.4712700 0.2252849 ∞ 119.073 O-09 1.7855461 1.6753276 0.1657039 0.0365901 106.634 76.325 1.7686520 1.5043380 0.3845023 0.1665592 ∞ 130.226 O-10 1.7619954 1.6853206 0.1364735 0.0449452 176.477 146.293 1.7037330 1.5063136 0.3897179 0.1998033 ∞ 121.636 O-11 1.7666212 1.6586696 0.1483575 0.0277643 ∞ 134.971 1.7675592 1.5223065 0.3404988 0.1513643 ∞ 169.458 O-12 1.7600214 1.6674457 0.1353724 0.0398598 ∞ 203.372 1.7336096 1.4983350 0.3728491 0.1810864 ∞ 119.091 O-13 1.7666902 1.6441133 0.1435628 0.0234603 ∞ 137.297 1.8174968 1.5205437 0.3331058 0.1396793 ∞ 166.065

TABLE 11-P Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) P-01 1.8780527 1.7841892 0.4704720 0.4258296 39.871 36.131 3.8374192 2.5149643 3.8845138 3.1011910 7.792 4.175 P-02 2.0045937 1.8646596 0.3133681 0.1698146 26.845 19.161 2.0314015 1.6016212 1.0660721 0.6113773 ∞ 52.667 P-03 2.0530202 1.8803103 0.2440748 0.0596583 21.347 12.660 1.9574412 1.6006931 0.6823172 0.3617691 ∞ 76.147 P-04 2.0429780 1.8714704 0.2483473 0.0641517 21.618 12.745 1.9428026 1.5864366 0.6742389 0.3569916 ∞ 76.533 P-05 2.0522715 1.8338352 0.2644862 0.0276844 18.107 8.267 1.8450555 1.5106780 0.4971090 0.2379952 ∞ 116.633 P-06 1.9201515 1.8546107 0.2638968 0.2103323 92.949 87.333 3.5726732 2.1819396 3.6524152 2.4498639 6.687 3.716 P-07 1.8500584 1.7844224 0.1803688 0.1065614 95.088 86.922 2.1410667 1.7465989 0.8707351 0.4728347 70.310 54.362 P-08 1.7977896 1.7189041 0.1636820 0.0609733 100.778 83.843 1.8102211 1.5260463 0.5022919 0.2523298 ∞ 111.159 P-09 1.7862279 1.6830174 0.1662284 0.0400981 104.776 77.979 1.7748938 1.5040454 0.3960924 0.1795690 ∞ 158.982 P-10 1.7629458 1.6959903 0.1345482 0.0519274 174.320 148.790 1.7045759 1.5095881 0.3975003 0.2207376 ∞ 114.980 P-11 1.7650921 1.6619781 0.1465604 0.0306449 ∞ 136.303 1.7644259 1.5196188 0.3454133 0.1625972 ∞ 163.210 P-12 1.7590465 1.6699937 0.1316590 0.0452796 ∞ 205.144 1.7266293 1.4939047 0.3731671 0.1985602 ∞ 113.183 P-13 1.7642216 1.6473356 0.1416339 0.0260138 ∞ 138.871 1.8208547 1.5182326 0.3359797 0.1495551 ∞ 160.163 P-14 1.7737928 1.6371509 0.1427687 0.0166726 ∞ 129.351 1.8670261 1.5337143 0.3141753 0.1193498 ∞ 167.687

TABLE 11-Q Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) Q-01 2.0674276 1.8952498 0.2578761 0.0732289 20.370 12.412 1.9301091 1.5792363 0.6972600 0.3912321 ∞ 72.205 Q-02 2.0605471 1.8471975 0.2662409 0.0327302 17.849 8.584 1.8468736 1.5141404 0.5153586 0.2562131 ∞ 109.642 Q-03 2.0481271 1.8055599 0.2587648 0.0000000 17.756 6.646 1.8423927 1.5198133 0.4376143 0.1939864 ∞ 127.076 Q-04 1.8352950 1.7806551 0.1760792 0.1243874 92.494 85.916 1.8765331 1.6017833 0.7228468 0.5239454 ∞ 55.977 Q-05 1.7969652 1.7245018 0.1655054 0.0710804 98.269 83.892 1.7758132 1.5039943 0.4974848 0.2749519 ∞ 104.163 Q-06 1.7846203 1.6873547 0.1679367 0.0455271 102.537 78.800 1.7616062 1.4917039 0.3987387 0.1907248 ∞ 120.624 Q-07 1.7874820 1.6732889 0.1648541 0.0281745 110.048 75.133 1.7961257 1.5163711 0.3613314 0.1498031 ∞ 162.278 Q-08 1.7599794 1.7028432 0.1308972 0.0639246 169.831 149.777 1.6725316 1.4900523 0.3850189 0.2400043 ∞ 108.348 Q-09 1.7622726 1.6647970 0.1456698 0.0349532 ∞ 137.674 1.7522289 1.5081249 0.3452538 0.1726854 ∞ 154.451 Q-10 1.7709206 1.6506325 0.1481192 0.0222904 ∞ 127.980 1.8062734 1.5335366 0.3214813 0.1360272 ∞ 163.843 Q-11 1.7544340 1.6771452 0.1276225 0.0536259 ∞ 206.845 1.6988060 1.4745640 0.3645513 0.2146306 ∞ 106.178 Q-12 1.7604926 1.6514825 0.1403326 0.0298540 ∞ 191.762 1.8158322 1.5066317 0.3372143 0.1583996 ∞ 151.240 Q-13 1.7708390 1.6398698 0.1421452 0.0196232 ∞ 132.328 1.8662406 1.5255411 0.3153304 0.1245821 ∞ 160.775

TABLE 11-R Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) R-01 2.0686011 1.9290747 0.3646827 0.2232118 20.748 15.605 1.7725917 1.4250954 0.9774342 0.6846559 ∞ 48.159 R-02 2.1057737 1.9241441 0.2777423 0.0807757 17.910 11.136 1.8803477 1.5314622 0.6785916 0.4010256 ∞ 74.204 R-03 2.0581225 1.8471227 0.2827637 0.0506751 17.506 8.641 1.8209194 1.4881826 0.5158812 0.2638096 ∞ 101.942 R-04 2.0160417 1.7848136 0.2764766 0.0259725 18.735 7.136 1.8085495 1.4912875 0.4323967 0.1939104 ∞ 124.151 R-05 1.7919869 1.7262105 0.1658878 0.0818436 96.241 83.786 1.6987387 1.4545139 0.4704686 0.2829052 ∞ 96.155 R-06 1.7818457 1.6875524 0.1704119 0.0518243 100.653 78.821 1.7357307 1.4717707 0.3957746 0.1960651 ∞ 114.313 R-07 1.7864151 1.6742008 0.1665634 0.0317893 107.735 75.495 1.7880532 1.5078066 0.3631259 0.1534641 ∞ 151.241 R-08 1.7551187 1.7058048 0.1260613 0.0733672 165.735 150.023 1.6240183 1.4537363 0.3656730 0.2492789 ∞ 100.378 R-09 1.7596719 1.6665628 0.1463430 0.0399819 173.817 139.094 1.7390530 1.4931057 0.3452404 0.1780760 ∞ 143.243 R-10 1.7692084 1.6538434 0.1486440 0.0255447 ∞ 130.472 1.8042519 1.5254556 0.3230027 0.1389890 ∞ 153.607 R-11 1.7492113 1.6831859 0.1255161 0.0612754 241.079 208.986 1.6666911 1.4444231 0.3598271 0.2233952 129.694 97.164 R-12 1.7576163 1.6562759 0.1404728 0.0340654 ∞ 196.802 1.8055298 1.4941443 0.3412442 0.1631900 ∞ 140.744 R-13 1.7695645 1.6433499 0.1419181 0.0223429 ∞ 134.816 1.8604189 1.5168227 0.3181887 0.1267727 ∞ 150.217

TABLE 11-S Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) S-01 2.1066284 1.9722278 0.3918647 0.2424714 18.058 13.880 1.6983133 1.3959451 0.9356371 0.6799376 ∞ 48.742 S-02 2.0496651 1.8417159 0.2971437 0.0714760 17.518 8.817 1.7914989 1.4621715 0.5192064 0.2672081 ∞ 96.374 S-03 2.0477146 1.8087071 0.2690455 0.0146962 17.668 6.939 1.8236763 1.5090608 0.4501576 0.2032801 ∞ 113.921 S-04 2.0388925 1.7916110 0.2221639 0.0000000 18.932 6.085 1.8751494 1.5585832 0.4137815 0.1664536 ∞ 135.543 S-05 1.7882051 1.7276876 0.1639748 0.0887941 94.977 84.024 1.6337392 1.4183937 0.4583837 0.2861144 ∞ 87.183 S-06 1.7819149 1.6860152 0.1726072 0.0563951 99.704 78.505 1.7230213 1.4640186 0.4031988 0.1996941 ∞ 122.946 S-07 1.7882233 1.6754877 0.1680948 0.0335916 107.097 75.784 1.7909719 1.5092031 0.3709737 0.1549276 ∞ 139.443 S-08 1.7966754 1.6777130 0.1592941 0.0183420 126.810 74.679 1.8368322 1.5410192 0.3573019 0.1265255 ∞ 161.553 S-09 1.7601684 1.6707422 0.1484202 0.0431443 172.192 140.483 1.7421043 1.4908567 0.3567036 0.1810713 ∞ 132.966 S-10 1.7708264 1.6578479 0.1494843 0.0270356 ∞ 131.945 1.8111661 1.5278995 0.3313428 0.1397205 ∞ 140.924 S-11 1.7808365 1.6566373 0.1449551 0.0169888 ∞ 76.243 1.8495085 1.5425871 0.3220124 0.1131660 ∞ 185.922 S-12 1.7467185 1.6898837 0.1280234 0.0691355 236.068 211.744 1.6356970 1.4330066 0.3806984 0.2403298 115.527 85.926 S-13 1.7579517 1.6604298 0.1418869 0.0367490 ∞ 199.389 1.7772417 1.5042485 0.3539561 0.1652781 ∞ 134.892 S-14 1.7709827 1.6467432 0.1418484 0.0235245 ∞ 136.309 1.8412669 1.5157433 0.3250679 0.1269148 ∞ 137.874 S-15 1.7833105 1.6368506 0.1388995 0.0211969 ∞ 78.351 1.8743702 1.5007728 0.3112326 0.1024191 ∞ 189.621

TABLE 11-T Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) T-01 2.0257518 1.8262559 0.3005010 0.0875737 18.604 9.528 1.7679118 1.4475798 0.5336131 0.2739842 ∞ 93.961 T-02 2.0479777 1.8073282 0.2785357 0.0221307 17.649 6.991 1.8099135 1.5015492 0.4539223 0.2053530 ∞ 112.996 T-03 1.9871581 1.7770885 0.1994500 0.0000000 23.196 8.093 1.9026852 1.5790720 0.4364031 0.1719341 ∞ 128.896 T-04 1.7838038 1.6848670 0.1747043 0.0576925 99.860 78.285 1.7278949 1.4701458 0.4229907 0.2064355 ∞ 124.965 T-05 1.7916234 1.6777831 0.1686057 0.0337253 107.128 76.217 1.8014530 1.5185135 0.3835360 0.1583273 ∞ 132.016 T-06 1.8002296 1.6820887 0.1597473 0.0181067 123.024 75.596 1.8474642 1.5506746 0.3678457 0.1294473 ∞ 174.507 T-07 1.7621698 1.6733356 0.1509720 0.0434793 172.927 141.368 1.7440225 1.4980874 0.3766420 0.1862685 ∞ 126.179 T-08 1.7741914 1.6608259 0.1503034 0.0266278 ∞ 136.057 1.8173046 1.5378185 0.3434213 0.1424618 ∞ 132.104 T-09 1.7840790 1.6684943 0.1443180 0.0203129 ∞ 135.294 1.8564051 1.5512855 0.3332231 0.1153507 ∞ 179.935 T-10 1.7471069 1.6944812 0.1281138 0.0746421 236.653 214.192 1.6315414 1.4407236 0.4303508 0.2868047 102.870 76.063 T-11 1.7601548 1.6635093 0.1434224 0.0367891 ∞ 200.162 1.7816191 1.5191484 0.3717643 0.1702335 ∞ 127.588 T-12 1.7736039 1.6490824 0.1417115 0.0230579 ∞ 136.257 1.8481265 1.5264627 0.3342218 0.1320843 ∞ 129.282 T-13 1.7854335 1.6355775 0.1377026 0.0255652 ∞ 139.113 1.8781876 1.5081985 0.3188588 0.1038490 ∞ 184.086

TABLE 12-A Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) A-01 2.1808414 2.0202237 0.1177452 0.0000000 28.747 22.402 3.9125119 3.4135251 2.3592894 1.8675829 5.648 4.347 A-02 1.9782905 1.8360883 0.2479634 0.1031416 40.736 30.986 3.8207998 3.5190505 0.8046063 0.4869196 31.482 28.563 A-03 1.9572245 1.8232560 0.2092205 0.0692901 36.696 25.347 2.3997372 2.0823043 0.7809511 0.4572622 67.290 50.894 A-04 1.9538426 1.8147593 0.1791482 0.0264932 28.651 16.106 1.9706358 1.6911106 0.5480317 0.2766157 ∞ 79.863 A-05 1.9954675 1.8188549 0.1923512 0.0000000 20.889 9.610 1.8575722 1.5763149 0.4054773 0.1952503 ∞ 131.627 A-06 1.9921329 1.8241056 0.1714705 0.0000000 22.078 10.531 1.8964406 1.6171157 0.4240922 0.2021757 ∞ 127.905 A-07 1.9926516 1.7867996 0.2081128 0.0000000 19.729 7.090 1.8245385 1.5581041 0.3444239 0.1530946 ∞ 145.985 A-08 1.8314145 1.7531979 0.1372041 0.0501875 108.784 92.474 2.1280936 1.9006327 0.5317342 0.3267196 72.362 59.687 A-09 1.8085827 1.7459179 0.1222105 0.0510825 109.339 92.055 1.9395749 1.7141758 0.3894007 0.2106581 148.972 127.551 A-10 1.7697499 1.7013515 0.1227356 0.0337061 114.760 88.411 1.7401521 1.5761971 0.2871018 0.1525706 ∞ 185.066 A-11 1.7705034 1.6801567 0.1310643 0.0187597 ∞ 80.747 1.7513585 1.5678832 0.2526064 0.1235964 ∞ 193.932 A-12 1.7957585 1.7015227 0.1137432 0.0403167 227.660 177.186 6.9395294 5.8873138 3.6361637 2.5922831 1.111 0.858 A-13 1.7825164 1.7302739 0.1011628 0.0733832 196.277 166.231 2.0206052 1.9010581 0.3810646 0.2779408 75.306 68.640 A-14 1.7512995 1.6751032 0.1082121 0.0292668 ∞ 148.729 1.7116334 1.5769923 0.2368558 0.1408109 ∞ 186.687 A-15 1.7595350 1.6557484 0.1180659 0.0161714 ∞ 77.873 1.7725776 1.5799665 0.2199083 0.1145043 ∞ 231.353 A-16 1.7084088 1.6284980 0.1055479 0.0536387 226.749 192.832 1.9111620 1.7640246 0.3954086 0.2439645 100.912 81.198 A-17 1.7190182 1.6287740 0.1175933 0.0401091 ∞ 181.265 1.8380935 1.6452688 0.3389435 0.1578009 ∞ 143.472 A-18 1.7379437 1.6272247 0.1244722 0.0282357 ∞ 168.046 1.8617526 1.5253000 0.3218896 0.1194775 ∞ 150.146 A-19 1.7690277 1.6380658 0.1148478 0.0160624 ∞ 130.628 1.9160211 1.5888507 0.2656154 0.1035866 ∞ 186.563 A-20 1.7635089 1.6370587 0.1248802 0.0253209 ∞ 248.930 6.4916237 5.0709047 3.1703715 1.9933341 1.674 1.017 A-21 1.7389565 1.6442422 0.1261815 0.0278478 ∞ 246.493 1.9590470 1.6893522 0.5067608 0.2299566 106.692 71.669 A-22 1.7475340 1.6520457 0.1252099 0.0255127 ∞ 242.366 1.9058713 1.4340244 0.4374233 0.1474709 ∞ 122.720 A-23 1.7615318 1.6527086 0.1217239 0.0195364 ∞ 168.752 2.1047320 1.4652313 0.4154847 0.1111768 ∞ 136.328 A-24 1.7766067 1.6412832 0.1190326 0.0138373 ∞ 88.740 2.0349691 1.4805855 0.3904136 0.0903453 ∞ 146.000

TABLE 12-B Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) B-01 1.9347331 1.7996062 0.2750426 0.1363683 43.318 33.493 5.2511921 4.9279487 0.8929957 0.5468983 20.307 18.973 B-02 1.9419663 1.8082237 0.2578651 0.1188306 41.573 31.444 3.2513477 2.9037476 0.9232051 0.5460798 37.199 32.161 B-03 1.9591401 1.8243427 0.1845688 0.0348459 28.863 17.166 2.0003048 1.7161678 0.5962361 0.3082796 ∞ 103.261 B-04 1.9941085 1.8294710 0.1794493 0.0000000 21.841 10.855 1.8890534 1.6094807 0.4376496 0.2159333 ∞ 124.328 B-05 1.9921874 1.7902306 0.2161495 0.0000000 19.560 7.407 1.8147281 1.5495047 0.3515218 0.1609798 ∞ 142.900 B-06 1.8367116 1.7511159 0.1415038 0.0585485 117.130 100.124 3.4794803 2.8591788 2.9219716 2.2279274 3.496 2.624 B-07 1.8663175 1.7904166 0.1454666 0.0629788 107.043 95.314 3.6094535 3.3869669 0.6363755 0.4433616 30.601 28.448 B-08 1.8110797 1.7530743 0.1221582 0.0579590 106.940 92.576 1.9534348 1.7349314 0.4032119 0.2333694 137.006 119.951 B-09 1.7692729 1.7053300 0.1224199 0.0387908 112.135 89.219 1.7286207 1.5759400 0.2926499 0.1635215 ∞ 179.030 B-10 1.7701533 1.6837482 0.1309662 0.0215143 124.678 82.066 1.7483486 1.5688503 0.2577566 0.1308303 ∞ 187.792 B-11 1.7492102 1.6798841 0.1056795 0.0349862 ∞ 150.963 1.7024517 1.5769451 0.2396374 0.1507445 ∞ 180.475 B-12 1.7583506 1.6574412 0.1168094 0.0182767 ∞ 130.082 1.7698774 1.5820478 0.2232388 0.1211306 ∞ 225.787 B-13 1.7880698 1.7139340 0.1141298 0.0555018 209.668 174.793 5.4095236 4.4182919 4.5084058 3.5265150 1.134 0.868 B-14 1.7899020 1.7260251 0.1113799 0.0687920 200.978 173.694 9.6456356 9.4830819 0.4801134 0.3732738 10.334 10.156 B-15 1.6979410 1.6299820 0.0967336 0.0676101 222.002 195.947 1.9337656 1.7944394 0.4093689 0.2921692 89.401 74.126 B-16 1.7134936 1.6304943 0.1158895 0.0466000 229.322 184.704 1.8372765 1.6612144 0.3459416 0.1743804 ∞ 137.319 B-17 1.7339774 1.6269608 0.1244076 0.0316488 ∞ 169.585 1.8519942 1.5217329 0.3271389 0.1269643 ∞ 143.855 B-18 1.7679045 1.6421025 0.1142134 0.0182430 ∞ 136.942 1.9207852 1.5961025 0.2702996 0.1092229 ∞ 180.258 B-19 1.7349739 1.6440145 0.1270969 0.0322690 ∞ 248.639 1.9861047 1.7084167 0.5505443 0.2637120 92.313 64.771 B-20 1.7457875 1.6523659 0.1258538 0.0278741 ∞ 244.451 1.9093494 1.4410730 0.4538915 0.1599267 ∞ 120.523 B-21 1.7603639 1.6533522 0.1221163 0.0218136 ∞ 170.127 2.1254057 1.4577543 0.4256915 0.1179254 ∞ 130.094 B-22 1.7754260 1.6426635 0.1193196 0.0159285 ∞ 90.544 2.0464268 1.4759519 0.3977860 0.0948929 ∞ 140.032

TABLE 12-C Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) C-01 1.8930999 1.7732818 0.3015456 0.1719582 44.120 35.207 4.9698244 4.5796632 1.0302271 0.6019471 20.856 19.154 C-02 1.9701299 1.8401421 0.1894818 0.0431159 28.796 18.240 2.0513300 1.7601911 0.6580454 0.3477707 ∞ 96.767 C-03 1.9965543 1.8387699 0.1802441 0.0017981 21.880 11.525 1.8973838 1.6191258 0.4603685 0.2347033 ∞ 119.691 C-04 1.9942257 1.7970138 0.2187743 0.0000000 19.381 7.773 1.8104389 1.5459101 0.3620504 0.1713571 ∞ 139.782 C-05 1.8678636 1.8052953 0.1568168 0.0833622 104.700 94.970 4.8729893 4.6290184 0.6966732 0.5019222 20.806 19.723 C-06 1.8118435 1.7610964 0.1197983 0.0687717 104.921 93.165 1.9621194 1.7520901 0.4050714 0.2596380 127.606 114.505 C-07 1.7678278 1.7092853 0.1216732 0.0442892 109.785 89.909 1.7142712 1.5759594 0.2975075 0.1768080 ∞ 173.302 C-08 1.7695373 1.6874450 0.1309482 0.0248496 116.803 83.168 1.7460448 1.5717479 0.2635914 0.1392432 ∞ 220.126 C-09 1.7463738 1.6881292 0.1026663 0.0407437 ∞ 155.686 1.6925486 1.5797764 0.2435170 0.1629555 205.253 174.633 C-10 1.7571263 1.6600694 0.1155040 0.0208471 ∞ 136.617 1.7662295 1.5866433 0.2273041 0.1286859 ∞ 220.829 C-11 1.7081474 1.6332231 0.1115853 0.0550326 220.895 187.564 1.8379989 1.6786605 0.3530382 0.2012022 ∞ 132.380 C-12 1.7301370 1.6291250 0.1232971 0.0358093 ∞ 171.179 1.8496058 1.5180543 0.3330794 0.1358944 ∞ 139.728 C-13 1.7666980 1.6468799 0.1134447 0.0208227 ∞ 140.860 1.9306487 1.6040642 0.2759754 0.1154969 ∞ 211.039 C-14 1.7433466 1.6533259 0.1266477 0.0323570 ∞ 246.551 1.9142676 1.5792065 0.4740512 0.1745078 ∞ 116.083 C-15 1.7579646 1.6544478 0.1224951 0.0245935 ∞ 171.578 2.1504945 1.4490724 0.4374587 0.1256044 ∞ 125.994 C-16 1.7745198 1.6439814 0.1195634 0.0184221 ∞ 144.260 2.0614452 1.4721825 0.4059610 0.0996109 ∞ 163.579

TABLE 12-D Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) D-01 1.9387499 1.8274901 0.2827500 0.1510105 36.265 28.410 2.6651047 2.2604026 1.1780592 0.7481019 45.830 35.031 D-02 1.9911368 1.8649942 0.1947154 0.0518638 27.328 18.211 2.0801817 1.7824437 0.7046761 0.3894856 ∞ 89.391 D-03 2.0053118 1.8488164 0.1911195 0.0118971 20.841 11.375 1.8790896 1.6015383 0.4674731 0.2482629 ∞ 116.048 D-04 1.9984316 1.8029042 0.2242962 0.0055279 18.958 7.919 1.8022754 1.5415478 0.3692367 0.1800069 ∞ 161.074 D-05 1.8367033 1.7915287 0.1448993 0.0959638 100.413 92.330 2.2232544 2.0121606 0.6927698 0.5482850 50.856 43.913 D-06 1.7645533 1.7107752 0.1215570 0.0488641 107.088 90.071 1.6944128 1.5681762 0.2967935 0.1883071 ∞ 167.306 D-07 1.7686885 1.6897749 0.1317105 0.0281302 113.091 83.726 1.7443327 1.5721245 0.2674691 0.1462606 ∞ 212.321 D-08 1.7431482 1.6903479 0.1012162 0.0434916 186.875 156.460 1.6837059 1.5778783 0.2476342 0.1736730 192.146 167.792 D-09 1.7561171 1.6632973 0.1147154 0.0233959 ∞ 139.092 1.7649256 1.5954151 0.2309121 0.1349502 ∞ 216.222 D-10 1.6992769 1.6367293 0.1062424 0.0636582 217.758 189.407 1.8298004 1.6887347 0.3588003 0.2369851 ∞ 129.000 D-11 1.7657052 1.6515499 0.1124392 0.0233779 ∞ 143.323 1.9434736 1.6133820 0.2816908 0.1205092 ∞ 202.760 D-12 1.7357815 1.6550527 0.1273897 0.0367512 ∞ 248.170 1.9123721 1.6031448 0.4942049 0.1858577 ∞ 111.627 D-13 1.7526840 1.6557943 0.1226776 0.0275128 ∞ 176.326 2.1673377 1.4382227 0.4469812 0.1314001 ∞ 121.730 D-14 1.7739079 1.6446855 0.1196764 0.0205456 ∞ 151.443 2.0464263 1.4694964 0.4122386 0.1024998 ∞ 169.246

TABLE 12-E Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) E-01 1.9441637 1.8429272 0.2974501 0.1749428 29.318 22.537 2.0026070 1.6598153 1.0485594 0.7394921 ∞ 42.606 E-02 2.0101090 1.8833402 0.2080006 0.0628834 24.123 16.088 1.9875326 1.6877633 0.6626760 0.4002456 ∞ 87.502 E-03 2.0050503 1.8489065 0.2105359 0.0306079 19.910 11.032 1.8390125 1.5618030 0.4581653 0.2510816 ∞ 111.349 E-04 1.9912795 1.7985134 0.2317913 0.0160076 19.088 8.078 1.7867732 1.5334187 0.3697187 0.1830317 ∞ 151.843 E-05 1.7606078 1.7088194 0.1229858 0.0501904 105.154 89.603 1.6745313 1.5530078 0.2929759 0.1936033 ∞ 159.881 E-06 1.7685195 1.6901601 0.1333463 0.0304605 111.335 83.682 1.7455691 1.5702676 0.2697093 0.1496056 ∞ 201.778 E-07 1.7407373 1.6857263 0.1036069 0.0414218 183.044 154.502 1.6816095 1.5711383 0.2532263 0.1789661 183.178 159.350 E-08 1.7555063 1.6665793 0.1149283 0.0252627 ∞ 140.733 1.7670485 1.6132301 0.2339211 0.1377651 ∞ 210.561 E-09 1.6931474 1.6419181 0.1017729 0.0688444 212.031 189.996 1.8068114 1.6851085 0.3676980 0.2687320 159.899 125.176 E-10 1.7516203 1.6732426 0.1131103 0.0468176 ∞ 211.707 1.7182256 1.5836064 0.2959419 0.1614839 ∞ 149.849 E-11 1.7654370 1.6553771 0.1111497 0.0252537 ∞ 145.016 1.8121549 1.6252275 0.2864905 0.1237879 ∞ 197.255 E-12 1.7310442 1.6573405 0.1279842 0.0397384 ∞ 249.228 1.8974334 1.6040960 0.5107330 0.2004839 ∞ 106.788 E-13 1.7491464 1.6573153 0.1225933 0.0291107 ∞ 227.942 2.0938195 1.4260205 0.4518073 0.1347504 ∞ 116.457 E-14 1.7737611 1.6445485 0.1195745 0.0217412 ∞ 153.499 2.0341814 1.4657293 0.4150721 0.1035889 ∞ 164.698

TABLE 12-F Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) F-01 1.9309499 1.8256862 0.3220077 0.2034871 27.771 21.191 1.8235422 1.5442282 0.9417758 0.6984530 69.490 42.671 F-02 2.0309565 1.9002326 0.2214292 0.0713829 21.890 14.677 1.9351400 1.6211642 0.6306132 0.3978801 ∞ 90.258 F-03 1.9982247 1.8423031 0.2292788 0.0501528 19.464 10.841 1.7983820 1.5239496 0.4454823 0.2471535 ∞ 108.827 F-04 1.9872145 1.7950417 0.2345780 0.0208244 19.296 8.166 1.7776850 1.5307746 0.3707366 0.1836223 ∞ 141.236 F-05 2.0022033 1.7926135 0.1918167 0.0000000 19.700 6.937 1.8360524 1.5745095 0.3473032 0.1539414 ∞ 151.670 F-06 1.7586867 1.7057167 0.1249748 0.0510368 104.484 88.915 1.6647586 1.5426834 0.2931011 0.1942278 ∞ 150.532 F-07 1.7696897 1.6897824 0.1350373 0.0311201 111.074 83.470 1.7511979 1.5703862 0.2729217 0.1501470 ∞ 194.177 F-08 1.7828581 1.6990044 0.1261705 0.0201879 134.309 84.108 1.8128845 1.5998767 0.2643117 0.1231435 ∞ 196.169 F-09 1.7405643 1.6873270 0.1077789 0.0431707 180.529 154.997 1.6790179 1.5664434 0.2609613 0.1796234 174.384 149.123 F-10 1.7568981 1.6686925 0.1156114 0.0257725 ∞ 141.380 1.7726988 1.6259935 0.2372277 0.1379125 ∞ 202.825 F-11 1.6922087 1.6452593 0.1009766 0.0679431 210.803 190.171 1.7840482 1.6730289 0.3817165 0.2781301 147.094 119.532 F-12 1.7506346 1.6758665 0.1142225 0.0477125 ∞ 212.960 1.7099525 1.5862989 0.3041244 0.1683896 182.910 140.704 F-13 1.7665789 1.6568609 0.1097239 0.0258750 ∞ 145.637 1.8049443 1.6372819 0.2902557 0.1270794 ∞ 190.688 F-14 1.7793673 1.6305355 0.1135032 0.0199937 ∞ 156.959 1.9211943 1.5416899 0.2854559 0.1015741 ∞ 195.958 F-15 1.7471315 1.6586561 0.1223108 0.0299292 ∞ 230.996 2.0783137 1.4178145 0.4537234 0.1372952 ∞ 108.954 F-16 1.7549368 1.6377188 0.1212434 0.0153205 ∞ 161.765 1.9672754 1.4663281 0.3638952 0.0922351 ∞ 177.545

TABLE 12-G Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) G-01 1.9074552 1.7961906 0.3422843 0.2520548 29.495 22.610 1.7786603 1.5342987 1.0346998 0.7374305 54.222 35.976 G-02 2.0298789 1.9017747 0.2316143 0.0878033 22.071 15.195 1.9301729 1.6008943 0.6500908 0.4083086 ∞ 84.531 G-03 1.9904209 1.8380210 0.2334696 0.0588651 19.842 11.226 1.7827243 1.5134922 0.4506346 0.2507456 ∞ 102.949 G-04 2.0009844 1.7934185 0.1930633 0.0000000 19.876 7.119 1.8350621 1.5724645 0.3507015 0.1561092 ∞ 144.234 G-05 1.7597286 1.7058638 0.1254356 0.0512351 104.617 88.871 1.6655039 1.5427988 0.2996432 0.1974863 ∞ 141.145 G-06 1.7714890 1.6912364 0.1352196 0.0309203 111.267 83.725 1.7567216 1.5741301 0.2784825 0.1526719 ∞ 185.351 G-07 1.7843314 1.7014579 0.1257631 0.0216420 133.146 84.680 1.8170787 1.6035057 0.2686002 0.1254215 ∞ 187.805 G-08 1.7419644 1.6879556 0.1088176 0.0432548 181.354 155.167 1.6807525 1.5671808 0.2683500 0.1826212 163.724 139.209 G-09 1.7585761 1.6686432 0.1152971 0.0263298 ∞ 141.147 1.7770454 1.6310822 0.2407989 0.1400994 244.852 193.529 G-10 1.7703131 1.6943439 0.1031730 0.0389335 ∞ 154.687 1.8232087 1.5876936 0.2134065 0.1128255 ∞ 249.911 G-11 1.6887573 1.6451770 0.0975290 0.0724180 209.185 191.053 1.7773022 1.6675756 0.3800804 0.2958507 138.752 111.368 G-12 1.7520358 1.6759592 0.1144883 0.0474461 ∞ 212.716 1.7115860 1.5894046 0.3088005 0.1698918 169.537 131.748 G-13 1.7679846 1.6559448 0.1088859 0.0258647 ∞ 145.342 1.8076172 1.6422363 0.2930750 0.1273462 ∞ 181.729 G-14 1.7805664 1.6279932 0.1137601 0.0204922 ∞ 159.035 1.9186750 1.5389729 0.2883794 0.1013762 ∞ 187.281 G-15 1.7470441 1.6587128 0.1220067 0.0318895 ∞ 231.817 2.0959926 1.4176711 0.4582089 0.1395004 ∞ 98.800 G-16 1.7545533 1.6381727 0.1214452 0.0153368 ∞ 162.772 1.9685664 1.4649641 0.3661101 0.0928691 ∞ 176.415

TABLE 12-H Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) H-01 1.9954203 1.8787272 0.2389065 0.1110098 25.704 18.260 1.9728332 1.6385461 0.7550855 0.4544666 ∞ 69.433 H-02 1.9889747 1.8436634 0.2240097 0.0563217 20.861 12.234 1.8049323 1.5360932 0.4833361 0.2709057 ∞ 89.557 H-03 1.9838198 1.8007681 0.2298239 0.0248556 19.928 8.947 1.7818109 1.5291559 0.3890198 0.1961341 ∞ 132.574 H-04 1.9984290 1.7954163 0.1972446 0.0000000 19.960 7.439 1.8304558 1.5669780 0.3567863 0.1621232 ∞ 140.921 H-05 1.7625812 1.7121771 0.1234484 0.0532482 104.547 90.003 1.6681649 1.5502535 0.3099723 0.2093803 ∞ 133.379 H-06 1.7717941 1.6954404 0.1337145 0.0320092 110.562 84.753 1.7534790 1.5766272 0.2839659 0.1602488 ∞ 177.732 H-07 1.7833304 1.7023965 0.1254477 0.0229868 132.965 85.102 1.8136903 1.6049709 0.2720818 0.1311882 ∞ 182.349 H-08 1.7426659 1.6905956 0.1032570 0.0447133 181.549 155.657 1.6810093 1.5708933 0.2709547 0.1930666 151.452 131.886 H-09 1.7578654 1.6675761 0.1130004 0.0295128 ∞ 146.541 1.7739569 1.6268427 0.2432275 0.1472412 233.444 184.408 H-10 1.7689847 1.6945828 0.1028286 0.0392727 ∞ 154.818 1.8251553 1.5951052 0.2154490 0.1183372 ∞ 240.104 H-11 1.7537859 1.6772613 0.1128123 0.0498203 ∞ 212.202 1.7095872 1.5898778 0.3075202 0.1714142 159.026 124.023 H-12 1.7107053 1.6332028 0.1193085 0.0550861 225.437 180.711 1.8324906 1.6342203 0.3444059 0.1767509 ∞ 147.166 H-13 1.7677474 1.6550924 0.1090469 0.0269449 ∞ 145.773 1.8136422 1.6357149 0.2956611 0.1301069 ∞ 171.600 H-14 1.7788371 1.6293950 0.1135283 0.0209819 ∞ 159.189 1.9194994 1.5398521 0.2882715 0.1038879 ∞ 177.565 H-15 1.7255306 1.6596065 0.1294789 0.0477235 299.198 252.902 1.9082083 1.6031338 0.5360868 0.2232267 ∞ 78.707 H-16 1.7474986 1.6575047 0.1223978 0.0353812 ∞ 232.352 1.9688166 1.4227350 0.4694319 0.1444258 ∞ 87.559 H-17 1.7546479 1.6375300 0.1213946 0.0161077 ∞ 162.500 1.9667069 1.4637968 0.3697669 0.0968665 ∞ 172.248

TABLE 12-I Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) I-01 1.9692763 1.8596266 0.2508663 0.1332991 28.459 20.886 1.9945549 1.6714592 0.8746255 0.5201810 ∞ 58.984 I-02 1.9948263 1.8576400 0.2133537 0.0548759 21.878 13.513 1.8484874 1.5782359 0.5362016 0.3067351 ∞ 109.380 I-03 1.9946679 1.8170813 0.2276031 0.0263690 19.535 9.387 1.7913122 1.5290136 0.4084559 0.2129713 ∞ 128.054 I-04 2.0026503 1.8031069 0.2017044 0.0000000 19.564 7.726 1.8270961 1.5626259 0.3662021 0.1718345 ∞ 139.811 I-05 1.7658783 1.7227350 0.1181285 0.0666990 103.691 91.535 1.6673294 1.5628945 0.3206361 0.2315138 154.993 126.106 I-06 1.7705080 1.7015382 0.1312636 0.0353615 108.903 86.260 1.7439231 1.5785362 0.2895958 0.1723692 ∞ 172.850 I-07 1.7809352 1.7034120 0.1251832 0.0253065 120.751 85.550 1.8032815 1.6051419 0.2739825 0.1391363 ∞ 213.651 I-08 1.7546144 1.6808827 0.1087703 0.0356038 ∞ 151.796 1.7653934 1.6230533 0.2446842 0.1582816 220.487 176.365 I-09 1.7659758 1.6939299 0.1022816 0.0399049 ∞ 154.614 1.8195213 1.6017894 0.2170334 0.1259311 ∞ 231.541 I-10 1.7062981 1.6329753 0.1143390 0.0650970 217.064 185.478 1.8401354 1.6587585 0.3337728 0.1982443 ∞ 138.813 I-11 1.7664075 1.6564075 0.1093932 0.0310388 ∞ 147.689 1.8226250 1.6245293 0.3002786 0.1388931 ∞ 164.311 I-12 1.7756357 1.6331223 0.1131198 0.0217062 ∞ 158.981 1.9263867 1.5423828 0.2890063 0.1103601 ∞ 172.733 I-13 1.7461154 1.6571884 0.1235032 0.0387156 ∞ 240.244 1.9411447 1.4218442 0.4838070 0.1574935 ∞ 78.316 I-14 1.7725616 1.6455170 0.1205680 0.0270206 ∞ 155.716 2.0919097 1.4580559 0.4358933 0.1189182 ∞ 129.458 I-15 1.7549616 1.6368073 0.1213638 0.0182803 ∞ 162.204 1.9691181 1.4663593 0.3758026 0.1021307 ∞ 167.272

TABLE 12-J Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) J-01 1.9731500 1.8713934 0.2654901 0.1590912 28.020 21.477 1.9770311 1.6750340 0.9521030 0.6078782 ∞ 54.233 J-02 2.0065961 1.8749738 0.2149204 0.0648764 21.717 14.068 1.8627784 1.5956165 0.5755217 0.3436625 ∞ 102.235 J-03 1.9985387 1.8286315 0.2279896 0.0330873 19.375 9.912 1.7930359 1.5330530 0.4264467 0.2311098 ∞ 123.013 J-04 2.0076389 1.8108030 0.2086414 0.0000000 19.065 7.927 1.8201261 1.5562968 0.3740609 0.1818026 ∞ 159.427 J-05 1.7680914 1.7070538 0.1292749 0.0424146 106.173 87.400 1.7307823 1.5771556 0.2927908 0.1860452 ∞ 166.850 J-06 1.7786842 1.7054640 0.1248020 0.0287583 114.334 86.092 1.7945003 1.6027705 0.2747519 0.1474472 ∞ 207.069 J-07 1.7503216 1.6927032 0.1035853 0.0436439 ∞ 154.913 1.7550789 1.6307222 0.2454636 0.1705746 205.444 170.365 J-08 1.7628881 1.6969970 0.1000361 0.0434748 ∞ 155.309 1.8150625 1.6041567 0.2163902 0.1335313 ∞ 226.183 J-09 1.7023888 1.6383727 0.1103469 0.0710305 213.976 188.002 1.8332938 1.6741837 0.3342286 0.2182044 ∞ 137.568 J-10 1.7624328 1.6604162 0.1092583 0.0359734 ∞ 154.045 1.8103025 1.6180515 0.3074345 0.1483537 ∞ 157.434 J-11 1.7727296 1.6421522 0.1127977 0.0234031 ∞ 159.947 1.9344715 1.5437769 0.2923744 0.1164235 ∞ 166.359 J-12 1.7434701 1.6582797 0.1244701 0.0424218 ∞ 244.182 1.9312150 1.4189274 0.5004744 0.1715095 ∞ 112.002 J-13 1.7702020 1.6413129 0.1208964 0.0213823 ∞ 118.831 2.0538922 1.4774554 0.4144870 0.1011447 ∞ 136.148

TABLE 12-K Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) K-01 2.0218619 1.8933890 0.2281588 0.0789693 20.232 13.558 1.8275836 1.5675665 0.5773003 0.3668426 ∞ 94.095 K-02 2.0030875 1.8362100 0.2376098 0.0442529 18.757 9.972 1.7780147 1.5216621 0.4326685 0.2435681 ∞ 117.945 K-03 2.0126645 1.8154441 0.2207471 0.0000000 18.396 7.885 1.8063822 1.5463090 0.3755212 0.1879101 ∞ 150.090 K-04 1.7651000 1.7098608 0.1288453 0.0482545 103.746 87.793 1.7190324 1.5694731 0.2931750 0.1967102 ∞ 158.526 K-05 1.7773651 1.7081219 0.1244173 0.0325899 110.766 86.568 1.7918913 1.5996025 0.2743664 0.1535070 ∞ 195.827 K-06 1.7466075 1.6987914 0.0994331 0.0506673 181.377 156.295 1.7489751 1.6459099 0.2464233 0.1801611 192.498 165.736 K-07 1.7608557 1.7034668 0.0954377 0.0506647 ∞ 156.797 1.8114198 1.6005177 0.2122738 0.1386373 ∞ 222.034 K-08 1.7013165 1.6482062 0.1118924 0.0673893 212.079 190.563 1.8012950 1.6672679 0.3563252 0.2167549 ∞ 134.528 K-09 1.7581609 1.6662114 0.1081045 0.0401626 ∞ 202.507 1.7674118 1.6210202 0.3149906 0.1578068 ∞ 149.985 K-10 1.7710892 1.6477835 0.1125048 0.0264342 ∞ 162.019 1.9431216 1.5627285 0.2972370 0.1216852 ∞ 178.844 K-11 1.7411044 1.6603232 0.1249554 0.0455071 ∞ 245.731 1.9169497 1.5628151 0.5133974 0.1871095 ∞ 110.475 K-12 1.7661840 1.6409679 0.1208136 0.0139715 ∞ 93.306 1.9665859 1.4859340 0.3680603 0.0919865 ∞ 182.028

TABLE 12-L Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) L-01 2.0460807 1.9550919 0.3015443 0.2175648 20.485 16.796 1.7248425 1.5281103 0.8161721 0.6645046 ∞ 53.473 L-02 2.0318624 1.9058614 0.2472378 0.0954800 18.757 12.872 1.7700254 1.5169590 0.5579569 0.3707376 ∞ 84.372 L-03 2.0008101 1.8355257 0.2483238 0.0575474 18.482 9.997 1.7581930 1.5056417 0.4335189 0.2489083 ∞ 110.450 L-04 2.0105317 1.8182819 0.2156634 0.0000000 18.663 8.218 1.8122432 1.5491304 0.3839051 0.1936096 ∞ 134.819 L-05 1.7641121 1.7102925 0.1308720 0.0508488 102.429 87.618 1.7188369 1.5620900 0.2966073 0.2016427 ∞ 148.593 L-06 1.7783394 1.7116952 0.1239742 0.0361934 109.032 87.083 1.7997420 1.5982430 0.2759885 0.1557675 ∞ 156.457 L-07 1.7456815 1.7019254 0.0984309 0.0545808 176.526 156.817 1.7472612 1.6593706 0.2504515 0.1845018 182.891 159.027 L-08 1.7608578 1.7113778 0.0854896 0.0641859 ∞ 158.813 1.8137233 1.7101357 0.2024677 0.1398163 ∞ 216.875 L-09 1.7611906 1.6760307 0.1005431 0.0363549 ∞ 89.194 1.8280582 1.5602262 0.2035395 0.1136579 ∞ 222.191 L-10 1.7563064 1.6718276 0.1052920 0.0433254 ∞ 208.681 1.7543803 1.6367057 0.3218591 0.1723034 ∞ 144.725 L-11 1.7306655 1.6509731 0.1124854 0.0292652 ∞ 164.553 1.8340950 1.5870113 0.3028945 0.1279140 ∞ 187.149 L-12 1.7824602 1.6205047 0.1189640 0.0164823 ∞ 81.070 1.9228810 1.5664223 0.2779451 0.0844258 ∞ 231.434 L-13 1.7671173 1.6418353 0.1209148 0.0150969 ∞ 152.912 1.9737812 1.4829987 0.3752843 0.0940037 ∞ 183.297

TABLE 12-M Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) M-01 2.0110098 1.8219436 0.2105546 0.0000000 19.030 8.575 1.8226207 1.5549815 0.3944100 0.1976119 ∞ 130.545 M-02 2.0346730 1.8208070 0.1881221 0.0000000 17.927 6.976 1.8521081 1.5816320 0.3558327 0.1592007 ∞ 144.889 M-03 1.7672192 1.7109472 0.1344514 0.0523958 102.482 87.478 1.7365020 1.5655584 0.3097410 0.2047594 188.837 141.660 M-04 1.7822635 1.7171365 0.1230080 0.0398903 108.764 87.918 1.8181624 1.6058894 0.2832612 0.1572517 ∞ 193.231 M-05 1.7759032 1.7056346 0.1154059 0.0292780 130.745 87.463 1.8142014 1.5776878 0.2626479 0.1270021 ∞ 198.882 M-06 1.7485319 1.7058988 0.0988620 0.0584531 176.587 157.770 1.7583974 1.6764358 0.2587944 0.1866594 173.444 149.341 M-07 1.7603756 1.6813045 0.1019426 0.0341533 ∞ 149.820 1.7288461 1.5578732 0.2073948 0.1144956 ∞ 217.877 M-08 1.7585071 1.6746582 0.1002314 0.0451520 ∞ 210.626 1.7577692 1.6626617 0.3293141 0.1847620 ∞ 143.673 M-09 1.7247856 1.6504741 0.1133589 0.0315816 ∞ 166.946 1.8333728 1.6038330 0.3104587 0.1313352 ∞ 190.414 M-10 1.7635739 1.6244198 0.1200989 0.0237208 ∞ 153.287 1.9267434 1.5504007 0.2962768 0.1034789 ∞ 198.199 M-11 1.7687343 1.6427834 0.1208856 0.0152338 ∞ 156.634 1.9796792 1.4797451 0.3823795 0.0942362 ∞ 177.061

TABLE 12-N Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) N-01 1.9898743 1.8798206 0.2738954 0.1482851 19.878 14.390 1.6581080 1.4387562 0.5750740 0.3879157 ∞ 77.830 N-02 2.0057028 1.8241415 0.2035070 0.0000000 19.908 9.289 1.8381897 1.5697363 0.4107890 0.2056645 ∞ 127.168 N-03 2.0294681 1.8302982 0.1644667 0.0000000 18.910 7.978 1.8863058 1.6083102 0.3765767 0.1689852 ∞ 136.677 N-04 1.7721301 1.7134985 0.1375917 0.0523525 103.018 87.682 1.7531814 1.5780642 0.3294239 0.2126075 174.502 133.130 N-05 1.7864489 1.7232433 0.1217894 0.0439756 108.908 88.852 1.8356927 1.6197992 0.2939229 0.1629134 ∞ 186.775 N-06 1.7745623 1.7056377 0.1151904 0.0308496 127.213 87.928 1.8040840 1.5773042 0.2657261 0.1305882 ∞ 195.501 N-07 1.7525086 1.7111476 0.0973459 0.0651206 178.717 159.090 1.7729129 1.6972781 0.2688526 0.1986121 162.784 139.577 N-08 1.7600797 1.6845035 0.1026179 0.0367182 ∞ 152.101 1.7182206 1.5603532 0.2115874 0.1181353 ∞ 212.611 N-09 1.7225932 1.6464408 0.1128660 0.0335850 ∞ 168.513 1.8529047 1.6091327 0.3205476 0.1369856 ∞ 184.752 N-10 1.7091315 1.6736102 0.0936172 0.0551113 ∞ 210.524 1.7597802 1.6848742 0.3389807 0.2088989 167.444 138.726 N-11 1.7839857 1.6195753 0.1182756 0.0199614 ∞ 84.504 1.9294443 1.5721994 0.2803088 0.0874462 ∞ 225.527 N-12 1.7668392 1.6435238 0.1208574 0.0160771 ∞ 158.712 1.9813165 1.4758930 0.3860709 0.0943253 ∞ 168.748

TABLE 12-O Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) O-01 1.9745355 1.8234942 0.2457067 0.0746410  21.112 12.018 1.7617983 1.5132070 0.4902947 0.2839715 ∞ 112.417 O-02 2.0059733 1.8307645 0.2000360 0.0037738  20.285 9.900 1.8500023 1.5836144 0.4296295 0.2199079 ∞ 123.209 O-03 2.0367482 1.8369179 0.1737368 0.0000000  18.405 7.972 1.8775081 1.5995149 0.3826412 0.1765084 ∞ 135.410 O-04 1.7750631 1.7178732 0.1384535 0.0554530 102.755 88.068 1.7619051 1.5900936 0.3474274 0.2293012 161.256 125.106 O-05 1.7879382 1.7278942 0.1207460 0.0485292 108.257 89.506 1.8420848 1.6311022 0.3013680 0.1737569 ∞ 180.186 O-06 1.7738533 1.7077535 0.1146640 0.0340439 126.423 88.494 1.7692212 1.5795898 0.2681826 0.1376150 ∞ 190.100 O-07 1.7538681 1.7161118 0.0873451 0.0789735 179.349 160.065 1.7761562 1.7153773 0.2775923 0.2090328 144.525 132.014 O-08 1.7588094 1.6871175 0.1006359 0.0395605 ∞ 153.368 1.7108087 1.5673602 0.2119811 0.1244213 ∞ 219.687 O-09 1.7035585 1.6747463 0.0911300 0.0586569 224.781 209.678 1.7518392 1.6872775 0.3528284 0.2335193 156.082 132.286 O-10 1.7216346 1.6424549 0.1134544 0.0365623 ∞ 169.343 1.9264243 1.6046848 0.3222850 0.1392088 ∞ 174.721 O-11 1.7578687 1.6214869 0.1197884 0.0270357 ∞ 157.982 1.9250150 1.5515628 0.3003661 0.1065501 ∞ 182.350 O-12 1.7639572 1.6436984 0.1209727 0.0163487 ∞ 159.615 1.9791064 1.4724890 0.3896116 0.0995359 ∞ 166.016

TABLE 12-P Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) P-01 1.9847236 1.8976008 0.2719445 0.1774719  21.840 17.336 1.6496701 1.4546273 0.6962012 0.5022034 ∞ 67.364 P-02 1.9832269 1.8392132 0.2453629 0.0797892  20.874 12.542 1.7646732 1.5226603 0.5192793 0.3142720 ∞ 108.306 P-03 2.0103767 1.8394819 0.2038377 0.0095908  19.974 10.197 1.8466362 1.5845304 0.4440382 0.2363331 ∞ 119.706 P-04 2.0432754 1.8428372 0.1868630 0.0000000  17.783 7.906 1.8621291 1.5854238 0.3866851 0.1853595 ∞ 156.590 P-05 1.7741173 1.7242967 0.1351302 0.0622176 101.341 88.768 1.7509717 1.5946826 0.3569804 0.2534709 146.597 117.981 P-06 1.7856872 1.7302709 0.1192358 0.0539037 106.649 89.884 1.8276629 1.6314312 0.3016099 0.1875450 ∞ 174.202 P-07 1.7731677 1.7111804 0.1136218 0.0386816 126.186 89.003 1.7503842 1.5831662 0.2679962 0.1463764 ∞ 208.563 P-08 1.7564437 1.6891097 0.0959306 0.0430851 ∞ 153.752 1.7024006 1.5705427 0.2082205 0.1320206 ∞ 213.283 P-09 1.7058157 1.6818545 0.0973152 0.0630500 226.401 211.558 1.7333167 1.6658436 0.3406044 0.2298866 148.002 123.372 P-10 1.7196925 1.6496888 0.1133306 0.0389129 ∞ 170.096 1.9296571 1.5996742 0.3232726 0.1404846 ∞ 163.013 P-11 1.7594009 1.6325711 0.1189345 0.0285000 ∞ 158.234 1.9322292 1.5541457 0.3011090 0.1132977 ∞ 171.578 P-12 1.7649224 1.6433465 0.1212459 0.0182393 ∞ 159.568 1.9802461 1.4696260 0.3928773 0.1053419 ∞ 160.374

TABLE 12-Q Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) Q-01 2.0301412 1.9516500 0.2802433 0.2000761 20.310 16.839 1.6486923 1.4686020 0.7370642 0.5836755 ∞ 61.930 Q-02 1.9990744 1.8621359 0.2522920 0.0892317 19.736 12.562 1.7518351 1.5171305 0.5349623 0.3426393 ∞ 99.977 Q-03 2.0220568 1.8515978 0.2160734 0.0179265 18.790 9.959 1.8260112 1.5671843 0.4476571 0.2499471 ∞ 116.748 Q-04 2.0448172 1.8474808 0.1930916 0.0000000 17.491 8.015 1.8536839 1.5798021 0.3918840 0.1948662 ∞ 147.129 Q-05 1.7689426 1.7318137 0.1258563 0.0778778 98.490 89.656 1.7032214 1.5835534 0.3498561 0.2776698 133.970 114.292 Q-06 1.7797734 1.7309685 0.1161205 0.0612780 104.569  90.079 1.7924899 1.6197165 0.2934962 0.2003493 ∞ 169.394 Q-07 1.7717697 1.7140060 0.1124096 0.0432885 112.170  89.250 1.7397149 1.5821770 0.2646063 0.1542864 ∞ 174.125 Q-08 1.7537336 1.6908943 0.0895630 0.0524731 ∞ 153.813 1.6934713 1.5710677 0.2028344 0.1384875 240.566 203.250 Q-09 1.7178106 1.6574518 0.1122228 0.0404637 ∞ 170.492 1.9450080 1.6067170 0.3264909 0.1492765 ∞ 155.526 Q-10 1.7552943 1.6404274 0.1183093 0.0294128 ∞ 161.731 1.9406400 1.5539676 0.3006731 0.1184026 ∞ 161.325 Q-11 1.7551794 1.6403857 0.1183112 0.0293952 ∞ 161.718 1.9404069 1.5538468 0.3007591 0.1183799 ∞ 161.350 Q-12 1.7757084 1.6344645 0.1188561 0.0124133 ∞ 85.367 1.9771388 1.4858229 0.3725975 0.0916295 ∞ 172.144

TABLE 12-R Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) R-01 2.0997937 2.0218726 0.2868782 0.2123469 17.462 15.000 1.6335746 1.4660111 0.7302940 0.6251366 ∞ 68.681 R-02 2.0130213 1.8811914 0.2647677 0.1040938 18.475 12.286 1.7269517 1.4965513 0.5362372 0.3602863 ∞ 87.647 R-03 2.0224123 1.8561904 0.2272240 0.0320080 18.232 9.988 1.8064078 1.5493570 0.4487076 0.2591703 ∞ 111.879 R-04 2.0459768 1.8476797 0.2102645 0.0000000 16.964 7.851 1.8312987 1.5576781 0.3880603 0.1975598 ∞ 130.490 R-05 1.7742699 1.7317125 0.1117318 0.0696713 102.013  90.234 1.7557510 1.6037051 0.2852255 0.2082125 ∞ 164.384 R-06 1.7702726 1.7157072 0.1113605 0.0466925 108.502  89.331 1.7311532 1.5768868 0.2610166 0.1588267 ∞ 165.108 R-07 1.7517357 1.7009838 0.0835762 0.0602742 ∞ 157.002 1.6864580 1.5654680 0.1997152 0.1416243 228.056 190.676 R-08 1.7512891 1.6459351 0.1177017 0.0309195 ∞ 163.455 1.9510221 1.5530143 0.3017594 0.1226993 ∞ 153.276 R-09 1.7773648 1.6340591 0.1184300 0.0234996 ∞ 86.650 1.9395171 1.5666778 0.2887830 0.0998121 ∞ 202.089 R-10 1.7735603 1.6354841 0.1192036 0.0141670 ∞ 86.412 1.9807177 1.4832299 0.3780744 0.0917085 ∞ 180.638

TABLE 12-S Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) S-01 2.0136422 1.8885299 0.2774577 0.1261125 17.997  12.405 1.6999863 1.4708628 0.5421139 0.3735593 ∞ 79.704 S-02 2.0179864 1.8567706 0.2336282 0.0459598  18.296 10.310 1.7965693 1.5368732 0.4561433 0.2657307 ∞ 103.288 S-03 2.0356214 1.8463124 0.2043087 0.0000000  17.630 8.402 1.8376872 1.5609879 0.3977260 0.2025636 ∞ 128.295 S-04 2.0459655 1.8181408 0.2215369 0.0000000  16.489 6.240 1.8197869 1.5589385 0.3436622 0.1577796 ∞ 150.300 S-05 1.7739721 1.7341369 0.1088796 0.0751162 100.976 90.557 1.7425740 1.5990974 0.2875246 0.2124379 201.458 155.716 S-06 1.7704063 1.7171543 0.1106833 0.0483969 107.500 89.597 1.7268572 1.5751372 0.2630071 0.1602715 ∞ 155.652 S-07 1.7674183 1.6877796 0.1261174 0.0222393 133.384 82.345 1.7422344 1.5581182 0.2468377 0.1280254 ∞ 196.893 S-08 1.7513689 1.7035698 0.0811550 0.0633450 ∞ 158.014 1.6835226 1.5618026 0.2014601 0.1426405 216.940 182.286 S-09 1.7586193 1.6685973 0.1141426 0.0240669 ∞ 83.157 1.7654326 1.5822356 0.2120172 0.1163580 ∞ 237.139 S-10 1.7137988 1.6680395 0.1059657 0.0491249 229.119 204.263 1.7697765 1.6411901 0.3291982 0.1743325 ∞ 144.048 S-11 1.7474572 1.6485095 0.1171196 0.0357085 ∞ 165.072 1.8280566 1.5510143 0.3034436 0.1290649 ∞ 179.186 S-12 1.7787527 1.6346316 0.1183617 0.0261766 ∞ 87.463 1.8679541 1.5663111 0.2911006 0.1032185 ∞ 198.817 S-13 1.7726370 1.6361368 0.1193980 0.0162059 ∞ 87.753 1.9860452 1.4806863 0.3836791 0.0927929 ∞ 179.065

TABLE 12-T Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) T-01 2.0071627 1.8531930 0.2293780 0.0535149  19.498 11.301 1.8087482 1.5440656 0.4807519 0.2757971 ∞ 96.276 T-02 2.0380740 1.8507900 0.2054336 0.0000000  17.725 8.646 1.8398399 1.5606505 0.4070889 0.2066897 ∞ 128.122 T-03 2.0362226 1.8173530 0.2147614 0.0000000  17.154 6.676 1.8245068 1.5601331 0.3518237 0.1608227 ∞ 143.088 T-04 1.7793794 1.7388911 0.1095065 0.0767807 101.335 91.113 1.7603905 1.6140856 0.3028634 0.2184932 183.927 143.961 T-05 1.7717729 1.7189494 0.1103797 0.0498157 107.737 90.141 1.7242200 1.5794166 0.2708170 0.1629361 ∞ 175.561 T-06 1.7679862 1.6880265 0.1268980 0.0240806 124.939 82.648 1.7410932 1.5606391 0.2520278 0.1300588 ∞ 190.480 T-07 1.7518739 1.7045277 0.0815216 0.0632867 ∞ 159.022 1.6818826 1.5663809 0.2073629 0.1518209 206.838 177.698 T-08 1.7600708 1.6726745 0.1144826 0.0254494 ∞ 139.823 1.7630023 1.5754755 0.2168563 0.1186166 ∞ 229.643 T-09 1.7051240 1.6697920 0.1003223 0.0587171 226.744 206.645 1.7525371 1.6631462 0.3344603 0.2017687 ∞ 142.304 T-10 1.7430137 1.6479600 0.1171742 0.0413661 ∞ 167.230 1.8275987 1.5443101 0.3097891 0.1370877 ∞ 186.344 T-11 1.7810721 1.6321133 0.1183301 0.0288819 ∞ 88.546 1.8621889 1.5669606 0.2928605 0.1036052 ∞ 199.275 T-12 1.7725015 1.6365482 0.1194554 0.0184532 ∞ 149.323 1.9935768 1.4771388 0.3888085 0.0925146 ∞ 172.969

TABLE 13-A Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) A-01 2.1720487 2.0190360 0.0998073 0.0000000 29.506 23.369 4.5065450 3.9578561 2.6780229 2.1435612 4.090 3.199 A-02 1.9889280 1.8532359 0.2334903 0.0957523 40.861 31.817 5.6119745 5.3730219 0.7593911 0.4942458 19.555 18.637 A-03 1.9671128 1.8414524 0.2024214 0.0689180 37.381 27.259 2.5652264 2.2714947 0.7753194 0.4656319 57.845 47.163 A-04 1.9818233 1.8170308 0.1951662 0.0068434 20.293 9.724 1.8180698 1.5583872 0.3718271 0.1895773 ∞ 136.446 A-05 1.9562672 1.8281300 0.1673451 0.0214857 27.313 16.058 1.9456153 1.6882910 0.5144381 0.2722945 ∞ 111.570 A-06 1.9807221 1.7876777 0.2011579 0.0000000 19.841 7.438 1.8007663 1.5635593 0.3207222 0.1502473 ∞ 149.473 A-07 1.8477035 1.7783786 0.1276783 0.0621241 112.872 101.764 4.4702166 4.3197430 0.4936521 0.3719016 24.460 23.543 A-08 1.8224279 1.7640502 0.1206546 0.0598782 109.093 96.415 2.0949539 1.9156192 0.4653894 0.3255164 71.691 61.322 A-09 1.7594524 1.7017583 0.1133712 0.0352231 113.681 90.604 1.7043860 1.5829468 0.2440392 0.1526501 ∞ 189.898 A-10 1.7683655 1.6933740 0.1175121 0.0195678 146.462 86.025 1.7594853 1.5976201 0.2284733 0.1247184 ∞ 231.889 A-11 1.7806570 1.7073575 0.1027419 0.0494937 227.274 185.181 7.2591935 6.3528446 3.7059257 2.7293571 0.934 0.744 A-12 1.7460918 1.6726421 0.0978655 0.0306414 ∞ 149.169 1.7205796 1.6010007 0.2122593 0.1421446 224.021 188.041 A-13 1.7591885 1.6605032 0.1011064 0.0244145 ∞ 85.953 1.7820661 1.6423652 0.1952622 0.1147092 ∞ 243.262 A-14 1.7274503 1.6161759 0.1087495 0.0364692 256.667 193.721 7.3492621 6.3559101 3.2428967 2.4345312 1.113 0.817 A-15 1.7084944 1.6283283 0.1074482 0.0502449 227.699 193.038 1.8948007 1.7452865 0.3962294 0.2420534 101.616 81.255 A-16 1.7187472 1.6392965 0.1177469 0.0400931 234.733 182.491 1.8371357 1.6447383 0.3386903 0.1579871 ∞ 143.559 A-17 1.7377446 1.6454277 0.1181421 0.0282214 ∞ 175.647 1.8609832 1.5256023 0.3213354 0.1196655 ∞ 150.106 A-18 1.7725168 1.6331589 0.1071119 0.0192664 ∞ 91.095 1.9009256 1.5809647 0.2728278 0.1014801 ∞ 185.131 A-19 1.7616261 1.6593531 0.1098955 0.0221647 ∞ 171.453 1.9704240 1.4713309 0.4066631 0.1097856 ∞ 137.110

TABLE 13-B Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) B-01 1.9452543 1.8183525 0.2592155 0.1277543 42.717 33.586 7.0526945 6.7683586 0.8545920 0.5492502 14.590 13.980 B-02 1.9596236 1.8362764 0.1731162 0.0325913 27.463 16.960 1.9622040 1.7030756 0.5536742 0.3010973 ∞ 107.506 B-03 1.9813839 1.8242757 0.1934821 0.0125348 20.541 10.411 1.8214473 1.5655196 0.3895985 0.2047950 ∞ 131.100 B-04 1.9821434 1.7946251 0.2012578 0.0000000 19.749 7.864 1.7998074 1.5618948 0.3311011 0.1597047 ∞ 145.037 B-05 1.8517543 1.7899355 0.1313438 0.0698594 110.382 100.265 5.8281493 5.6682336 0.5711405 0.4462284 17.468 16.967 B-06 1.7589124 1.7062293 0.1118213 0.0409619 111.426 91.607 1.6974565 1.5840605 0.2492018 0.1637367 ∞ 183.632 B-07 1.7676802 1.6970027 0.1167957 0.0231251 123.542 87.137 1.7571242 1.5998537 0.2327001 0.1321935 ∞ 226.644 B-08 1.7763495 1.7235333 0.0863733 0.0786401 209.450 181.880 5.6463193 5.0251755 4.7411024 3.9364503 0.821 0.680 B-09 1.7445883 1.6767453 0.0939346 0.0375784 ∞ 151.396 1.7112989 1.6068445 0.2158696 0.1524272 210.231 181.611 B-10 1.7574612 1.6624258 0.0986454 0.0290140 ∞ 135.564 1.7808669 1.6556117 0.1973236 0.1215289 ∞ 237.437 B-11 1.7109823 1.6137790 0.0997165 0.0532321 242.436 193.346 6.2633792 5.3764346 4.3274325 3.5194222 0.991 0.726 B-12 1.6962709 1.6298000 0.1011874 0.0612521 222.057 196.217 1.9128981 1.7709938 0.4189358 0.2786453 90.120 74.349 B-13 1.7132967 1.6391097 0.1158834 0.0465535 229.378 184.815 1.8363492 1.6606949 0.3455863 0.1751285 ∞ 137.424 B-14 1.7338443 1.6454556 0.1188319 0.0316590 ∞ 177.305 1.8516317 1.5221517 0.3265697 0.1272105 ∞ 143.802 B-15 1.7458965 1.6358331 0.1072745 0.0218863 ∞ 137.681 1.9039898 1.5828362 0.2766013 0.1068491 ∞ 179.079 B-16 1.7605337 1.6620962 0.1100645 0.0246727 ∞ 173.308 1.9804345 1.4648107 0.4162560 0.1165234 ∞ 132.389 B-17 1.7751843 1.6392688 0.1108102 0.0187265 ∞ 91.227 1.9686516 1.4881328 0.3955979 0.0946164 ∞ 141.476

TABLE 13-C Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) C-01 1.9025379 1.7929090 0.2878348 0.1649490  43.365 35.188 4.9640531 4.6075296 0.9846002 0.6056513  20.823 19.261 C-02 1.9716347 1.8539125 0.1752020 0.0409320  27.454 18.040 2.0121051 1.7498504 0.6140520 0.3407427 ∞ 100.236 C-03 1.9799544 1.8302413 0.1965994 0.0220193  20.598 11.008 1.8161176 1.5657954 0.4056733 0.2211860 ∞ 126.931 C-04 1.9864218 1.8036777 0.2004793 0.0000000  19.499 8.235 1.8003554 1.5619667 0.3429599 0.1708627 ∞ 170.369 C-05 1.8555780 1.8119708 0.1375602 0.0936905 105.753 98.281 5.7336181 5.5695654 0.6183223 0.4948176  17.141 16.642 C-06 1.7574013 1.7107521 0.1098073 0.0471621 109.284 92.424 1.6892691 1.5858767 0.2550937 0.1774106 ∞ 177.629 C-07 1.7671343 1.7011102 0.1159156 0.0269898 116.762 88.159 1.7562868 1.6040395 0.2374867 0.1407631 ∞ 220.550 C-08 1.7414378 1.6903038 0.0890222 0.0452270 ∞ 159.859 1.7014705 1.6183980 0.2210881 0.1650225 197.102 175.552 C-09 1.7557447 1.6650428 0.0952628 0.0349222 ∞ 138.687 1.7813503 1.6705654 0.1992455 0.1291564 285.808 232.461 C-10 1.7080327 1.6395647 0.1116081 0.0549822 220.890 187.682 1.8374498 1.6784593 0.3525581 0.2020588 ∞ 132.217 C-11 1.7300752 1.6460151 0.1196827 0.0356226 ∞ 178.935 1.8492558 1.5188530 0.3325269 0.1361670 ∞ 139.642 C-12 1.7396481 1.6415548 0.1074472 0.0249850 ∞ 141.690 1.9105740 1.5866092 0.2815319 0.1134362 ∞ 198.401 C-13 1.7563944 1.6646000 0.1100978 0.0276710 ∞ 174.875 1.9927799 1.4565116 0.4273612 0.1239762 ∞ 127.927 C-14 1.7747873 1.6404196 0.1109873 0.0213816 ∞ 143.313 1.9792213 1.4864771 0.4038529 0.0993424 ∞ 136.771

TABLE 13-D Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) D-01 1.9490966 1.8500842 0.2647931 0.1401459  35.207 28.244 2.6311080 2.2700265 1.1076331 0.7427894  45.953 36.141 D-02 1.9914392 1.8780786 0.1798526 0.0501163  25.772 17.691 2.0162696 1.7538672 0.6433846 0.3774728 ∞ 94.106 D-03 1.9816604 1.8366482 0.2034537 0.0329594  20.194 11.243 1.8013721 1.5581067 0.4155671 0.2353864 ∞ 122.408 D-04 1.9856163 1.8069420 0.2051578 0.0023074  19.386 8.506 1.7929679 1.5568815 0.3495088 0.1791182 ∞ 164.498 D-05 1.7549914 1.7131823 0.1089697 0.0521081 106.541 92.615 1.6794153 1.5838159 0.2592041 0.1895496 201.172 170.921 D-06 1.7669110 1.7047382 0.1153749 0.0305763 113.648 88.847 1.7581593 1.6081385 0.2411728 0.1480734 ∞ 213.836 D-07 1.7381767 1.6971854 0.0857519 0.0501367 186.218 161.719 1.6970322 1.6330649 0.2270587 0.1762567 186.228 168.269 D-08 1.7545493 1.6677902 0.0908813 0.0421582 ∞ 156.552 1.7806194 1.6878813 0.1994956 0.1354429 270.383 227.465 D-09 1.6987657 1.6408080 0.1062771 0.0636318 217.801 189.505 1.8295289 1.6886683 0.3581889 0.2377885 ∞ 128.894 D-10 1.7270953 1.6471258 0.1204663 0.0383618 ∞ 180.122 1.8391835 1.5896461 0.3384880 0.1435869 ∞ 174.139 D-11 1.7345322 1.6490573 0.1075499 0.0277684 ∞ 165.143 1.9196510 1.5922999 0.2869411 0.1211074 ∞ 196.987 D-12 1.7517544 1.6662856 0.1098805 0.0311830 ∞ 175.693 2.0019474 1.4458781 0.4376849 0.1318597 ∞ 123.262 D-13 1.7748217 1.6409606 0.1111181 0.0236791 ∞ 146.934 1.9872990 1.4839165 0.4097955 0.1027825 ∞ 170.430

TABLE 13-E Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) E-01 2.0138007 1.9025812 0.1889196 0.0602526  22.865 16.001 1.9517183 1.6887202 0.6154098 0.3933761 ∞ 92.397 E-02 1.9781991 1.8343526 0.2198663 0.0499591  19.581 11.070 1.7660977 1.5304996 0.4097111 0.2391227 ∞ 117.454 E-03 1.9860758 1.8081461 0.2103990 0.0075316  19.209 8.559 1.7856337 1.5530104 0.3519891 0.1831903 ∞ 154.955 E-04 1.7526647 1.7120483 0.1113963 0.0527354 104.884 92.053 1.6731353 1.5761126 0.2626584 0.1956784 189.469 162.622 E-05 1.7675140 1.7072308 0.1157390 0.0332708 111.601 89.149 1.7648363 1.6096801 0.2435865 0.1516420 ∞ 209.841 E-06 1.7363451 1.6941563 0.0885443 0.0473541 183.090 160.396 1.7020267 1.6379178 0.2340864 0.1822016 178.708 160.580 E-07 1.7545300 1.7026538 0.0850531 0.0512311 ∞ 160.625 1.7832820 1.7053169 0.1967562 0.1381600 259.555 221.269 E-08 1.6929448 1.6424138 0.1017383 0.0689490 211.936 190.074 1.8067440 1.6852377 0.3671092 0.2694310 159.707 125.117 E-09 1.7250539 1.6484621 0.1212697 0.0367433 ∞ 180.516 1.8295455 1.6171810 0.3450742 0.1501022 ∞ 175.998 E-10 1.7298898 1.6531284 0.1076218 0.0303317 ∞ 168.497 1.9273671 1.5988368 0.2920246 0.1269904 ∞ 191.986 E-11 1.7409431 1.6315669 0.1134179 0.0186621 ∞ 168.451 1.9123265 1.5410692 0.2838135 0.1011768 ∞ 202.118 E-12 1.7485114 1.6667341 0.1093856 0.0333688 ∞ 219.421 2.0081308 1.4338083 0.4451714 0.1397307 ∞ 117.893 E-13 1.7754004 1.6404821 0.1112097 0.0251624 ∞ 148.812 1.9944125 1.4804354 0.4116154 0.1061955 ∞ 165.119

TABLE 13-F Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) F-01 1.9601257 1.8751892 0.3059474 0.2095522  25.202 20.234 1.8164468 1.5980789 0.8705184 0.6940072  67.900 46.117 F-02 2.0398589 1.9260429 0.2002151 0.0695450  20.308 14.445 1.8904816 1.6179829 0.5766885 0.3887588 ∞ 96.498 F-03 1.9843691 1.8078542 0.2076175 0.0073966  19.525 8.746 1.7884408 1.5555782 0.3571135 0.1854875 ∞ 143.521 F-04 2.0084257 1.8129240 0.1683376 0.0000000  19.037 7.510 1.8454836 1.5945668 0.3328661 0.1544884 ∞ 154.427 F-05 1.7523979 1.7088750 0.1161001 0.0495242 104.457 91.092 1.6765101 1.5701270 0.2688829 0.1969664 180.251 152.144 F-06 1.7698912 1.7095091 0.1165811 0.0350662 111.229 89.360 1.7772955 1.6126178 0.2470494 0.1523058 ∞ 203.120 F-07 1.7769446 1.7170251 0.1016549 0.0334897 134.838 91.411 1.8125328 1.6161814 0.2312145 0.1247643 ∞ 199.671 F-08 1.7370295 1.6882441 0.0943208 0.0411897 181.068 157.804 1.7003284 1.6371863 0.2429774 0.1834571 171.941 151.928 F-09 1.6920769 1.6453411 0.1008406 0.0681978 210.713 190.231 1.7841289 1.6733965 0.3812454 0.2788296 146.846 119.488 F-10 1.7264082 1.6534724 0.1079804 0.0318447 ∞ 170.823 1.9308751 1.6039207 0.2961533 0.1293661 ∞ 190.337 F-11 1.7465606 1.6650152 0.1088619 0.0347884 ∞ 228.442 2.0212950 1.4255198 0.4483772 0.1442353 ∞ 111.164 F-12 1.7757445 1.6384728 0.1115386 0.0258965 ∞ 150.216 2.0078258 1.4788219 0.4125950 0.1076340 ∞ 159.321

TABLE 13-G Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) G-01 1.9471190 1.8573741 0.3315141 0.2613530 25.708 20.801 1.7346194 1.5675979 0.8995689 0.7093589  57.803 41.774 G-02 2.0474789 1.9374899 0.2088960 0.0864229 19.832 14.615 1.8673658 1.5897706 0.5817484 0.3973966 ∞ 93.058 G-03 1.9824239 1.8085042 0.2044057 0.0083254 19.974 9.072 1.7932069 1.5573939 0.3849680 0.1893626 ∞ 136.351 G-04 2.0062979 1.8143570 0.1686660 0.0000000 19.321 7.796 1.8473259 1.5928289 0.3376682 0.1570847 ∞ 145.892 G-05 1.7542439 1.7081697 0.1184925 0.0494801 104.746 90.724 1.6837980 1.5715116 0.2785474 0.2005334 169.521 142.006 G-06 1.7726238 1.7123699 0.1166609 0.0367756 111.419 89.772 1.7864160 1.6184643 0.2526557 0.1551459 ∞ 194.224 G-07 1.7769720 1.7186492 0.1001777 0.0365461 133.697 92.110 1.8134719 1.6157778 0.2332031 0.1268811 ∞ 191.112 G-08 1.7390786 1.6892495 0.0966088 0.0411779 182.665 157.660 1.7041582 1.6407695 0.2518775 0.1865211 161.346 142.069 G-09 1.6887905 1.6453286 0.0973769 0.0726992 209.133 191.092 1.7774116 1.6679475 0.3796946 0.2963316 138.525 111.328 G-10 1.7248233 1.6512222 0.1084745 0.0324198 ∞ 172.081 1.9278793 1.6042319 0.2985623 0.1295572 ∞ 181.325 G-11 1.7415236 1.6337892 0.1142946 0.0196535 ∞ 171.726 1.9107844 1.5352327 0.2910079 0.1017293 ∞ 187.270 G-12 1.7466067 1.6612588 0.1088919 0.0376638 ∞ 228.714 2.0528886 1.4261516 0.4501809 0.1479690 ∞ 101.396 G-13 1.7738118 1.6458235 0.1122805 0.0265700 ∞ 159.120 2.0320602 1.4814572 0.4174486 0.1095128 ∞ 145.121

TABLE 13-H Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) H-01 1.9093820 1.8390537 0.3581090 0.3272350 29.940 26.410 1.7829342 1.6468966 1.0386247 0.8996928  39.677 31.112 H-02 2.0153745 1.9174009 0.2170380 0.1093354 22.851 17.243 1.8883866 1.6174735 0.6634327 0.4395423 ∞ 79.893 H-03 1.9647302 1.8297937 0.2253126 0.0678554 20.636 12.234 1.7389105 1.5164728 0.4345124 0.2586530 ∞ 120.529 H-04 1.9816545 1.8137492 0.2011229 0.0106774 20.275 9.608 1.7978418 1.5579065 0.3780034 0.1994548 ∞ 131.911 H-05 2.0013018 1.8177386 0.1627260 0.0000000 19.873 8.421 1.8560649 1.6039469 0.3499451 0.1657655 ∞ 140.113 H-06 1.7560430 1.7139226 0.1150517 0.0520707 104.620 91.864 1.6805590 1.5776964 0.2869340 0.2123088 157.090 134.545 H-07 1.7725726 1.7150690 0.1151625 0.0393056 110.839 90.428 1.7830767 1.6227447 0.2580841 0.1632562 ∞ 185.077 H-08 1.7766383 1.7198621 0.1001326 0.0381111 133.403 92.343 1.8062796 1.6196317 0.2358518 0.1327011 ∞ 221.572 H-09 1.7394490 1.6988680 0.0902356 0.0479724 183.123 161.331 1.7066699 1.6515112 0.2558938 0.1973818 148.631 134.181 H-10 1.7115878 1.6495102 0.1198603 0.0530207 224.718 182.356 1.8305889 1.6343743 0.3452063 0.1726025 ∞ 147.380 H-11 1.7250872 1.6514825 0.1088747 0.0347902 ∞ 172.283 1.9233707 1.5996781 0.2997373 0.1316136 ∞ 168.021 H-12 1.7407140 1.6331408 0.1141268 0.0203096 ∞ 172.203 1.9100305 1.5355896 0.2913496 0.1035017 ∞ 177.622 H-13 1.7471031 1.6620323 0.1096216 0.0405774 ∞ 228.740 1.9466405 1.4315233 0.4532749 0.1524070 ∞ 89.869 H-14 1.7718386 1.6509768 0.1128027 0.0288169 ∞ 164.882 2.0603335 1.4823147 0.4233479 0.1126423 ∞ 137.200 H-15 1.7539891 1.6542454 0.1129054 0.0154677 ∞ 171.237 1.9662554 1.4686978 0.3643352 0.0975810 ∞ 172.706

TABLE 13-I Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) I-01 1.9841567 1.8929470 0.2301414 0.1309068 26.135 20.174 1.9251687 1.6613405 0.7847221 0.5068730 ∞ 64.093 I-02 1.9731131 1.8467130 0.2181883 0.0672045 21.025 13.219 1.7628328 1.5401008 0.4720736 0.2890182 ∞ 116.770 I-03 1.9847546 1.8242615 0.2006927 0.0159808 20.146 10.175 1.7995335 1.5631297 0.3942650 0.2150157 ∞ 127.993 I-04 2.0018800 1.8207325 0.1729103 0.0000000 19.553 8.557 1.8422081 1.5923558 0.3552220 0.1740733 ∞ 166.372 I-05 1.7566279 1.7248505 0.1029259 0.0701745 103.501 93.887 1.6611144 1.5864965 0.2916410 0.2339676 141.696 128.328 I-06 1.7699579 1.7183673 0.1118467 0.0445969 109.157 91.375 1.7640520 1.6224517 0.2611314 0.1755796 231.191 176.991 I-07 1.7753265 1.7210064 0.1002917 0.0397436 120.772 92.361 1.7925457 1.6258159 0.2371088 0.1409162 ∞ 216.536 I-08 1.7067245 1.6474765 0.1150085 0.0641564 216.898 185.483 1.8393351 1.6593778 0.3351860 0.1964641 ∞ 138.890 I-09 1.7261004 1.6554363 0.1093842 0.0385285 ∞ 172.421 1.9258761 1.5944381 0.3017928 0.1380501 ∞ 163.419 I-10 1.7392219 1.6324251 0.1138139 0.0221025 ∞ 172.382 1.9139888 1.5370320 0.2915926 0.1098275 ∞ 172.892 I-11 1.7455957 1.6672535 0.1103795 0.0435045 ∞ 231.378 1.9406390 1.4314495 0.4647047 0.1613698 ∞ 80.857 I-12 1.7709553 1.6540901 0.1126674 0.0312832 ∞ 167.534 2.0446573 1.4763028 0.4301550 0.1186498 ∞ 132.049 I-13 1.7543354 1.6537299 0.1132541 0.0174070 ∞ 171.646 1.9679887 1.4740873 0.3703755 0.1029109 ∞ 167.788

TABLE 13-J Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) J-01 1.9809075 1.8980328 0.2448835 0.1566767 26.306 21.064 1.9050955 1.6655740 0.8575543 0.5893231 ∞ 57.567 J-02 1.9881326 1.8692972 0.2155252 0.0721035 20.742 13.818 1.7803324 1.5606498 0.5095133 0.3258134 ∞ 108.866 J-03 1.9898169 1.8353260 0.2061805 0.0251796 19.620 10.507 1.7925299 1.5591828 0.4068723 0.2312852 ∞ 124.252 J-04 2.0048289 1.8259971 0.1826240 0.0000000 19.044 8.651 1.8295110 1.5813860 0.3602975 0.1831844 ∞ 161.817 J-05 1.7658057 1.7224231 0.1070729 0.0531483 106.864 92.263 1.7399591 1.6212152 0.2614146 0.1896323 211.022 171.335 J-06 1.7732110 1.7227862 0.0990467 0.0434144 114.284 92.503 1.7771808 1.6275751 0.2355823 0.1495093 ∞ 209.798 J-07 1.7028489 1.6476670 0.1109898 0.0702586 213.854 188.154 1.8328545 1.6746514 0.3355229 0.2162711 ∞ 137.496 J-08 1.7260375 1.6612267 0.1098660 0.0429837 ∞ 173.185 1.9344686 1.5926693 0.3061048 0.1491712 ∞ 156.257 J-09 1.7377532 1.6400237 0.1135634 0.0248634 ∞ 172.921 1.9216875 1.5602507 0.2945493 0.1157554 ∞ 166.398 J-10 1.7432131 1.6726882 0.1106529 0.0472960 ∞ 247.837 1.9339555 1.4222282 0.4804307 0.1767479 ∞ 111.927 J-11 1.7714442 1.6572890 0.1121622 0.0341617 ∞ 175.103 2.0302923 1.4667157 0.4416960 0.1265007 ∞ 127.501 J-12 1.7541063 1.6537206 0.1135956 0.0198615 ∞ 172.350 1.9712389 1.4738671 0.3773772 0.1079912 ∞ 160.845

TABLE 13-K Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) K-01 1.9983178 1.8855456 0.2261637 0.0864859 19.642 13.634 1.7551188 1.5425749 0.5160287 0.3496236 ∞ 101.168 K-02 1.9943696 1.8437141 0.2144343 0.0355134 18.947 10.561 1.7797548 1.5498598 0.4126749 0.2439115 ∞ 119.800 K-03 2.0067215 1.8310354 0.1870831 0.0000000 18.717 8.788 1.8239278 1.5771676 0.3649829 0.1909253 ∞ 152.483 K-04 1.7619875 1.7257045 0.1017354 0.0632027 104.095 92.685 1.7185071 1.6159717 0.2598226 0.2008932 193.826 168.385 K-05 1.7711748 1.7252984 0.0957368 0.0496724 110.785 92.811 1.7607140 1.6239305 0.2306492 0.1559959 ∞ 219.660 K-06 1.7022734 1.6493950 0.1134178 0.0651537 212.165 190.849 1.7995431 1.6648067 0.3598415 0.2134096 ∞ 134.580 K-07 1.7240928 1.6675706 0.1098594 0.0468406 ∞ 202.765 1.7562963 1.5963244 0.3135005 0.1629353 ∞ 149.959 K-08 1.7366122 1.6471493 0.1133195 0.0279789 ∞ 174.035 1.9321537 1.5760624 0.2991336 0.1222012 ∞ 182.726 K-09 1.7531614 1.6544041 0.1138496 0.0224971 ∞ 173.378 1.9783548 1.4640140 0.3838800 0.1110187 ∞ 151.059

TABLE 13-L Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) L-01 2.0549494 1.9887104 0.2687077 0.2213457 19.375 16.797 1.6842111 1.5646066 0.7318220 0.6514497  76.651 63.140 L-02 1.9979471 1.8909061 0.2424568 0.1060383 18.688 13.351 1.7090749 1.5053408 0.5051735 0.3567702 ∞ 91.445 L-03 1.9920916 1.8443560 0.2225708 0.0470434 18.723 10.651 1.7668473 1.5375419 0.4148873 0.2500704 ∞ 113.125 L-04 2.0115430 1.8368860 0.1884994 0.0000000 18.392 8.839 1.8244176 1.5756615 0.3690709 0.1951304 ∞ 140.380 L-05 1.7612213 1.7281036 0.0984884 0.0707686 102.646 92.769 1.7117523 1.6117230 0.2612885 0.2063629 181.321 163.500 L-06 1.7706322 1.7284716 0.0898852 0.0580602 109.099 93.388 1.7381805 1.6195807 0.2239787 0.1587114 ∞ 217.375 L-07 1.7208195 1.6729631 0.1077789 0.0497272 ∞ 209.751 1.7454937 1.6066082 0.3249477 0.1758596 ∞ 145.915 L-08 1.7297676 1.6507991 0.1133522 0.0307998 ∞ 175.528 1.9419145 1.5921733 0.3049193 0.1282140 ∞ 188.840 L-09 1.7556516 1.6360813 0.1134484 0.0213219 ∞ 95.412 1.9237138 1.5508817 0.2919800 0.1031189 ∞ 202.744 L-10 1.7666102 1.6463429 0.1110591 0.0144441 ∞ 153.332 1.9727136 1.4886157 0.3649983 0.0940693 ∞ 184.106

TABLE 13-M Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) M-01 1.9868525 1.8418415 0.2230906 0.0537754 19.310 11.134 1.7693119 1.5368827 0.4273434 0.2560434 ∞ 103.782 M-02 2.0118960 1.8413370 0.1832860 0.0000000 18.736 9.264 1.8361184 1.5837515 0.3792802 0.1990983 ∞ 132.806 M-03 2.0243543 1.8231250 0.1937413 0.0000000 17.384 7.159 1.8222108 1.5748622 0.3294630 0.1561989 ∞ 151.002 M-04 1.7654084 1.7317244 0.0992165 0.0739113 102.664 93.011 1.7306377 1.6514190 0.2706272 0.2099826 171.773 153.191 M-05 1.7603752 1.6970219 0.1104292 0.0259297 129.169 87.896 1.7181271 1.5764327 0.2198406 0.1280437 ∞ 221.182 M-06 1.7175581 1.6756245 0.1044570 0.0533352 234.707 211.582 1.7199356 1.6230069 0.3386796 0.1870792 ∞ 140.648 M-07 1.7249239 1.6504415 0.1141074 0.0329880 ∞ 177.133 1.8402671 1.6053586 0.3133686 0.1317597 ∞ 190.190 M-08 1.7541175 1.6375269 0.1136307 0.0228409 ∞ 152.774 1.9225920 1.5463603 0.2962522 0.1045323 ∞ 198.101 M-09 1.7683602 1.6451046 0.1108928 0.0164031 ∞ 156.618 1.9783298 1.4860068 0.3698574 0.0943533 ∞ 177.708

TABLE 13-N Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) N-01 1.9802060 1.8398252 0.2174098 0.0552918  20.594 12.118 1.7887242 1.5524401 0.4540138 0.2684120 ∞ 101.802 N-02 2.0094977 1.8465936 0.1744820 0.0000000  19.514 10.070 1.8565714 1.6026591 0.3977850 0.2082049 ∞ 127.773 N-03 2.0163723 1.8188796 0.2044640 0.0000000  17.628 7.361 1.8096550 1.5641533 0.3309958 0.1587900 ∞ 146.108 N-04 1.7720564 1.7375373 0.0990513 0.0786058 103.274 93.567 1.7560699 1.6964043 0.2853780 0.2186654 161.266 142.146 N-05 1.7604234 1.6962193 0.1120477 0.0283831 127.006 87.715 1.7164817 1.5788328 0.2243987 0.1314043 ∞ 228.314 N-06 1.7553578 1.6833412 0.1021275 0.0355150 ∞ 152.787 1.7217842 1.6187618 0.1974327 0.1187120 289.359 232.882 N-07 1.7231775 1.6453711 0.1135182 0.0347059 ∞ 178.582 1.9317098 1.6087338 0.3195486 0.1356838 ∞ 184.458 N-08 1.7102476 1.6752512 0.1023288 0.0575717 232.198 211.420 1.7127689 1.6310648 0.3402666 0.1958098 160.891 134.410 N-09 1.7512229 1.6316648 0.1098225 0.0189119 ∞ 84.503 1.9194307 1.5689876 0.2803327 0.0869428 ∞ 228.630 N-10 1.7697135 1.6437662 0.1108125 0.0177314 ∞ 158.635 1.9791959 1.4825638 0.3732863 0.0956362 ∞ 171.216

TABLE 13-O Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) O-01 1.9800317 1.8447961 0.2147271 0.0571734 21.381 12.997 1.8077900 1.5713801 0.4854336 0.2914040 ∞ 112.779 O-02 2.0137085 1.8570386 0.1692298 0.0000000 19.769 10.712 1.8736488 1.6214601 0.4187980 0.2236137 ∞ 123.410 O-03 2.0138528 1.8235025 0.2017386 0.0000000 17.865 7.804 1.8102373 1.5635625 0.3414049 0.1677940 ∞ 168.248 O-04 1.7601648 1.6983496 0.1119901 0.0303031 126.487  88.260 1.7138036 1.5827428 0.2283988 0.1382962 ∞ 225.124 O-05 1.7544396 1.6860997 0.1012182 0.0385571 ∞ 154.116 1.7154614 1.6252636 0.2006792 0.1246148 274.983 227.613 O-06 1.7098650 1.6770281 0.1041241 0.0670294 230.527  210.197 1.7033404 1.6188250 0.3292182 0.2099482 150.644 126.709 O-07 1.7222565 1.6392279 0.1141065 0.0377210 ∞ 179.876 1.9211460 1.6039157 0.3222769 0.1379226 ∞ 173.494 O-08 1.7522796 1.6377117 0.1133124 0.0260626 ∞ 157.760 1.9204984 1.5467472 0.3006841 0.1064385 ∞ 182.190 O-09 1.7663100 1.6433510 0.1109379 0.0179460 ∞ 159.565 1.9769323 1.4791027 0.3759903 0.1009452 ∞ 167.431

TABLE 13-P Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) P-01 1.9886417 1.8586649 0.2168535 0.0622660 21.146 13.418 1.8144820 1.5830794 0.5150047 0.3225034 ∞ 107.185 P-02 2.0226615 1.8700565 0.1708931 0.0000000 19.341 10.943 1.8760551 1.6269706 0.4346485 0.2414002 ∞ 119.778 P-03 2.0146852 1.8302919 0.2026225 0.0000000 17.790 8.150 1.8068544 1.5608059 0.3505465 0.1784969 ∞ 165.499 P-04 1.7592341 1.7024556 0.1101813 0.0325910 117.465  89.126 1.7088649 1.5853419 0.2301093 0.1471381 ∞ 218.551 P-05 1.7520015 1.6881722 0.0972790 0.0422326 ∞ 154.401 1.7076826 1.6341292 0.2024884 0.1311199 262.818 222.098 P-06 1.7202854 1.6494310 0.1139740 0.0400397 ∞ 180.952 1.9227304 1.5993051 0.3229419 0.1415112 ∞ 158.449 P-07 1.7531211 1.6359543 0.1129882 0.0276769 ∞ 161.129 1.9283125 1.5509749 0.3007735 0.1132394 ∞ 171.437 P-08 1.7588209 1.6651307 0.1168101 0.0541222 ∞ 248.704 1.9315321 1.4570680 0.4662918 0.1750504 ∞ 99.190 P-09 1.7670193 1.6441934 0.1112618 0.0177193 ∞ 159.536 1.9788106 1.4760433 0.3800825 0.1068427 ∞ 161.759

TABLE 13-Q Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) Q-01 2.0299629 1.8795650 0.1824437 0.0030821 18.478 10.745 1.8549548 1.6100341 0.4371519 0.2549656 ∞ 117.201 Q-02 2.0241822 1.8402063 0.2104778 0.0000000 17.050 8.091 1.7978402 1.5552364 0.3542628 0.1872645 ∞ 156.884 Q-03 2.0003468 1.8759108 0.2255479 0.0756028 19.996 13.232 1.7941019 1.5719596 0.5267302 0.3493046 ∞ 100.638 Q-04 1.7575390 1.7066881 0.1073040 0.0369781 110.062  89.912 1.7021137 1.5868305 0.2290280 0.1553110 ∞ 208.877 Q-05 1.7492067 1.6897987 0.0912703 0.0482051 ∞ 154.337 1.6999394 1.6416642 0.1981843 0.1369514 241.011 215.366 Q-06 1.7509212 1.6412923 0.1130844 0.0286313 ∞ 163.308 1.9350926 1.5513707 0.3031575 0.1183247 ∞ 161.219 Q-07 1.7508595 1.6412538 0.1130854 0.0286152 ∞ 163.300 1.9348833 1.5512578 0.3031544 0.1183046 ∞ 161.239 Q-08 1.7507785 1.6689401 0.1147477 0.0543205 ∞ 246.802 1.8962359 1.4286565 0.4917045 0.1834073 ∞ 98.263 Q-09 1.7662458 1.6457575 0.1116673 0.0200852 ∞ 159.401 1.9890462 1.4730025 0.3858334 0.1112594 ∞ 153.058

TABLE 13-R Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) R-01 2.0097821 1.8916937 0.2374473 0.0898814 18.630 12.843 1.7577288 1.5453582 0.5218639 0.3655761 ∞ 90.971 R-02 2.0317871 1.8838318 0.1969310 0.0159166 17.716 10.512 1.8267181 1.5838873 0.4329416 0.2622885 ∞ 114.131 R-03 2.0272958 1.8456368 0.2145425 0.0010647 16.701 8.140 1.7921077 1.5515315 0.3569974 0.1929557 ∞ 144.106 R-04 1.7559299 1.7096201 0.1048919 0.0414837 107.586  90.423 1.6965353 1.5838925 0.2274480 0.1602031 251.078 196.592 R-05 1.7470392 1.6919122 0.0867264 0.0547244 ∞ 154.865 1.6946707 1.6466544 0.1948761 0.1398883 228.954 207.100 R-06 1.7480930 1.6471592 0.1133882 0.0300691 ∞ 164.480 1.9459815 1.5501490 0.3044638 0.1242550 ∞ 156.144 R-07 1.7450449 1.6336325 0.1109200 0.0225424 ∞ 91.792 1.9298992 1.5646257 0.2873729 0.1011132 ∞ 203.019 R-08 1.7645838 1.6472315 0.1126210 0.0142994 ∞ 94.011 1.9816561 1.4913973 0.3724489 0.0922621 ∞ 182.149

TABLE 13-S Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) S-01 2.0234818 1.8815995 0.2048329 0.0333400 17.816 10.851 1.8108235 1.5680879 0.4373710 0.2682193 ∞ 106.956 S-02 2.0267707 1.8481781 0.2132843 0.0026532 16.764 8.330 1.7921736 1.5506917 0.3624059 0.1965173 ∞ 136.736 S-03 2.0229843 1.8126107 0.2118548 0.0000000 17.006 6.626 1.7962684 1.5649109 0.3200096 0.1552012 ∞ 158.532 S-04 1.7559883 1.7112226 0.1042793 0.0434834 106.889 90.807 1.6957276 1.5823169 0.2295992 0.1619821 239.298 187.719 S-05 1.7655105 1.7004311 0.1139102 0.0260367 134.109 87.275 1.7577518 1.5898417 0.2210292 0.1292055 ∞ 200.383 S-06 1.7463013 1.6945386 0.0864150 0.0553518 ∞ 156.288 1.6932296 1.6495601 0.1984453 0.1415312 218.344 197.813 S-07 1.7140522 1.6689094 0.1067597 0.0488666 229.606 205.298 1.7670106 1.6354554 0.3302382 0.1778346 ∞ 144.458 S-08 1.7449807 1.6499404 0.1138956 0.0341556 ∞ 165.967 1.8280140 1.5472376 0.3071992 0.1308259 ∞ 181.573 S-09 1.7451425 1.6342221 0.1113390 0.0250732 ∞ 92.591 1.9359617 1.5636167 0.2900348 0.1046368 ∞ 199.846 S-10 1.7652844 1.6477526 0.1126180 0.0173421 ∞ 94.523 1.9878760 1.4904395 0.3789348 0.0928715 ∞ 179.072

TABLE 13-T Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) T-01 2.0128535 1.8776497 0.2022309 0.0428498 18.880 11.802 1.8188903 1.5750170 0.4593818 0.2783052 ∞ 96.261 T-02 2.0218484 1.8485757 0.2087384 0.0054266 17.299 8.781 1.7965353 1.5504452 0.3727229 0.2011848 ∞ 133.321 T-03 2.0201608 1.8144088 0.2083496 0.0000000 17.323 6.915 1.7987967 1.5653519 0.3266562 0.1579587 ∞ 147.994 T-04 1.7570823 1.7125413 0.1046922 0.0447898 107.213 91.339 1.6962268 1.5854626 0.2358925 0.1647035 ∞ 182.628 T-05 1.7663411 1.7014363 0.1140704 0.0270819 125.645 87.790 1.7579060 1.5932893 0.2258950 0.1313125 ∞ 192.437 T-06 1.7463849 1.6965582 0.0888585 0.0538134 ∞ 158.010 1.6935424 1.6497399 0.2059822 0.1521760 209.015 188.409 T-07 1.7606661 1.6760043 0.0916389 0.0386226 ∞ 139.323 1.7697079 1.6752670 0.1867139 0.1180749 ∞ 249.956 T-08 1.7055809 1.6708934 0.1020233 0.0556122 227.279 207.411 1.7418425 1.6555925 0.3358460 0.1979701 ∞ 139.124 T-09 1.7414172 1.6493298 0.1148927 0.0388429 ∞ 167.956 1.8282133 1.5765470 0.3167563 0.1356247 ∞ 187.138 T-10 1.7472262 1.6351657 0.1130011 0.0193292 ∞ 95.042 1.9328660 1.5573191 0.2795818 0.0886016 ∞ 229.523 T-11 1.7658246 1.6480377 0.1126115 0.0200944 ∞ 148.993 1.9961766 1.4909764 0.3854823 0.0943336 ∞ 179.765

TABLE 14-A Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) A-01 2.141 2.006 0.075 0.000 31.254 25.519 5.876 5.233 3.362 2.751 2.251 1.807 A-02 2.017 1.896 0.180 0.061 39.247 31.618 9.377 9.207 0.715 0.513 11.023 10.812 A-03 1.952 1.854 0.166 0.055 35.017 26.178 2.281 2.051 0.699 0.439 70.023 58.076 A-04 1.943 1.843 0.155 0.028 23.926 15.560 1.832 1.635 0.412 0.253 ∞ 125.396 A-05 1.957 1.821 0.171 0.009 20.211 10.679 1.773 1.577 0.320 0.185 ∞ 142.606 A-06 1.964 1.810 0.149 0.000 20.519 9.259 1.809 1.603 0.293 0.152 ∞ 182.495 A-07 1.701 1.683 0.068 0.043 166.410 155.941 1.721 1.694 0.188 0.139 217.552 202.082 A-08 1.708 1.664 0.084 0.031 170.845 111.504 1.754 1.667 0.194 0.113 ∞ 249.694 A-09 1.727 1.662 0.108 0.039 255.389 217.630 7.503 6.491 3.321 2.487 1.062 0.781 A-10 1.710 1.674 0.106 0.053 226.062 206.257 1.909 1.763 0.395 0.243 100.609 81.237 A-11 1.720 1.683 0.099 0.045 229.005 200.369 1.849 1.670 0.332 0.164 ∞ 143.819 A-12 1.737 1.675 0.097 0.035 ∞ 189.200 1.855 1.540 0.307 0.122 ∞ 154.002 A-13 1.738 1.660 0.100 0.019 ∞ 189.609 1.900 1.583 0.271 0.102 ∞ 185.363

TABLE 14-B Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) B-01 1.954 1.847 0.222 0.111 41.975 34.168 9.356 9.153 0.784 0.549 10.759 10.519 B-02 1.946 1.852 0.156 0.037 24.164 16.466 1.841 1.650 0.442 0.280 ∞ 119.178 B-03 1.957 1.828 0.171 0.015 20.222 11.264 1.772 1.579 0.334 0.198 ∞ 137.341 B-04 1.966 1.817 0.149 0.000 20.345 9.664 1.809 1.602 0.302 0.162 ∞ 178.243 B-05 1.703 1.667 0.081 0.035 165.590 137.726 1.744 1.674 0.195 0.120 ∞ 243.996 B-06 1.708 1.661 0.102 0.051 241.533 217.317 6.262 5.366 4.338 3.555  0.986 0.720 B-07 1.699 1.675 0.098 0.067 220.890 207.766 1.931 1.793 0.416 0.288 89.025 74.083 B-08 1.715 1.684 0.100 0.052 225.049 201.595 1.852 1.684 0.339 0.182 ∞ 139.178 B-09 1.733 1.676 0.097 0.039 ∞ 191.244 1.853 1.538 0.310 0.132 ∞ 147.776 B-10 1.737 1.661 0.100 0.022 ∞ 190.979 1.902 1.584 0.275 0.107 ∞ 179.334

TABLE 14-C Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) C-01 1.905 1.821 0.258 0.159 42.560 36.125 9.681 9.446 0.829 0.587 10.138 9.892 C-02 1.955 1.868 0.156 0.047 24.067 17.295 1.856 1.674 0.479 0.314 ∞ 112.716 C-03 1.958 1.836 0.172 0.022 20.129 11.822 1.769 1.584 0.348 0.215 ∞ 132.762 C-04 1.971 1.826 0.149 0.000 19.949 9.987 1.811 1.608 0.313 0.173 ∞ 173.492 C-05 1.699 1.670 0.078 0.041 161.711 144.941 1.737 1.683 0.196 0.129 ∞ 239.168 C-06 1.710 1.686 0.100 0.063 216.379 202.875 1.855 1.702 0.336 0.208 ∞ 134.716 C-07 1.730 1.678 0.097 0.046 ∞ 193.042 1.841 1.535 0.312 0.146 ∞ 142.289 C-08 1.737 1.661 0.101 0.025 ∞ 192.539 1.910 1.588 0.280 0.114 ∞ 200.270

TABLE 14-D Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) D-01 1.964 1.894 0.224 0.152 33.127 28.245 2.530 2.288 0.928 0.730  46.411 39.931 D-02 1.964 1.886 0.160 0.061 22.917 17.267 1.833 1.667 0.492 0.344 ∞ 107.536 D-03 1.959 1.843 0.175 0.031 19.812 12.114 1.762 1.583 0.359 0.229 ∞ 154.271 D-04 1.975 1.834 0.149 0.000 19.537 10.202 1.812 1.611 0.320 0.182 ∞ 167.375 D-05 1.694 1.673 0.073 0.048 159.270 147.983 1.732 1.691 0.195 0.145 274.107 234.670 D-06 1.701 1.689 0.099 0.076 210.753 203.620 1.846 1.712 0.319 0.257 ∞ 130.894 D-07 1.721 1.680 0.097 0.050 ∞ 194.085 1.812 1.528 0.315 0.159 ∞ 179.580 D-08 1.734 1.662 0.101 0.027 ∞ 194.045 1.920 1.594 0.285 0.121 ∞ 197.417 D-09 1.751 1.675 0.092 0.024 ∞ 189.814 1.889 1.515 0.358 0.115 ∞ 162.566

TABLE 14-E Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) E-01 1.979 1.934 0.223 0.198 25.447 22.431 1.937 1.871 0.813 0.724  58.954 51.905 E-02 1.963 1.892 0.175 0.080 21.108 16.482 1.752 1.605 0.464 0.351 ∞ 103.951 E-03 1.959 1.845 0.181 0.039 19.487 12.133 1.753 1.576 0.362 0.237 ∞ 122.545 E-04 1.980 1.841 0.148 0.000 19.257 10.346 1.817 1.616 0.326 0.188 ∞ 158.102 E-05 1.692 1.676 0.067 0.057 157.441 149.670 1.727 1.695 0.187 0.173 254.885 231.812 E-06 1.718 1.682 0.096 0.048 ∞ 194.149 1.788 1.641 0.326 0.165 ∞ 176.978 E-07 1.729 1.663 0.102 0.030 ∞ 195.371 1.929 1.601 0.290 0.127 ∞ 195.845 E-08 1.749 1.676 0.091 0.025 ∞ 190.682 1.898 1.530 0.362 0.117 ∞ 153.544

TABLE 14-F Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) F-01 1.983 1.846 0.143 0.000 19.333 10.604 1.828 1.623 0.332 0.191 ∞ 146.194 F-02 1.956 1.842 0.185 0.045 19.661 12.234 1.751 1.571 0.365 0.239 ∞ 124.203 F-03 1.691 1.680 0.071 0.054 156.188 149.873 1.713 1.692 0.184 0.171 244.114 224.269 F-04 1.703 1.695 0.096 0.076 207.561 203.306 1.791 1.682 0.352 0.280 149.549 121.948 F-05 1.726 1.686 0.105 0.063 253.974 217.847 1.691 1.585 0.284 0.201 170.132 139.231 F-06 1.726 1.665 0.102 0.031 ∞ 196.531 1.935 1.606 0.294 0.130 ∞ 191.652 F-07 1.740 1.662 0.097 0.021 ∞ 170.235 1.919 1.543 0.280 0.102 ∞ 197.142 F-08 1.751 1.653 0.092 0.015 ∞ 166.884 1.925 1.498 0.278 0.095 ∞ 190.724

TABLE 14-F Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) G-01 1.933 1.873 0.202 0.122 20.550 16.700 1.633 1.511 0.430 0.344 ∞ 91.266 G-02 1.953 1.839 0.184 0.046 20.523 12.791 1.761 1.579 0.380 0.246 ∞ 127.980 G-03 1.985 1.852 0.136 0.000 19.818 11.204 1.845 1.638 0.344 0.196 ∞ 136.666 G-04 1.975 1.816 0.174 0.000 18.551 8.554 1.780 1.585 0.283 0.150 ∞ 158.294 G-05 1.746 1.710 0.081 0.037 136.285 98.008 1.699 1.620 0.175 0.131 278.211 243.285 G-06 1.724 1.686 0.105 0.064 247.645 218.101 1.689 1.586 0.286 0.205 159.193 130.698 G-07 1.724 1.666 0.101 0.031 ∞ 197.493 1.934 1.609 0.296 0.130 ∞ 183.027 G-08 1.741 1.661 0.097 0.021 ∞ 171.385 1.918 1.542 0.281 0.101 ∞ 188.504

TABLE 14-H Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) H-01 1.951 1.842 0.181 0.048 21.358 13.627 1.774 1.592 0.403 0.263 ∞ 123.537 H-02 1.984 1.857 0.134 0.000 20.311 11.922 1.856 1.651 0.360 0.208 ∞ 130.884 H-03 1.974 1.818 0.175 0.000 18.650 8.869 1.776 1.582 0.289 0.157 ∞ 183.486 H-04 1.746 1.712 0.079 0.042 135.917 98.660 1.696 1.624 0.178 0.137 265.927 237.438 H-05 1.725 1.688 0.106 0.068 245.491 218.637 1.688 1.581 0.280 0.214 149.336 121.404 H-06 1.724 1.667 0.102 0.033 ∞ 198.178 1.931 1.605 0.296 0.132 ∞ 172.147 H-07 1.740 1.661 0.097 0.022 ∞ 171.868 1.916 1.542 0.282 0.105 ∞ 178.623

TABLE 14-I Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) I-01 1.955 1.853 0.178 0.053 21.482 14.427 1.777 1.605 0.429 0.289 ∞ 118.585 I-02 1.983 1.862 0.137 0.000 20.338 12.369 1.851 1.653 0.373 0.223 ∞ 127.262 I-03 1.976 1.827 0.171 0.000 18.582 9.315 1.779 1.583 0.299 0.167 ∞ 178.673 I-04 1.693 1.659 0.071 0.062 156.116 108.678 1.766 1.688 0.166 0.129 252.906 249.872 I-05 1.725 1.667 0.102 0.036 252.664 198.579 1.934 1.600 0.298 0.138 ∞ 164.058 I-06 1.738 1.662 0.098 0.022 ∞ 175.267 1.919 1.543 0.284 0.111 ∞ 173.633 I-07 1.752 1.653 0.092 0.016 ∞ 172.533 1.830 1.507 0.291 0.108 ∞ 172.262

TABLE 14-J Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) J-01 1.964 1.874 0.179 0.062 20.729 14.862 1.767 1.609 0.449 0.320 ∞ 113.506 J-02 1.983 1.867 0.146 0.004 19.885 12.520 1.831 1.641 0.380 0.238 ∞ 124.690 J-03 1.982 1.838 0.168 0.000 18.297 9.652 1.783 1.584 0.309 0.178 ∞ 172.558 J-04 1.725 1.666 0.103 0.041 250.100 198.830 1.944 1.598 0.303 0.149 ∞ 157.077 J-05 1.737 1.663 0.098 0.024 ∞ 185.832 1.927 1.559 0.288 0.117 ∞ 167.184 J-06 1.752 1.658 0.091 0.019 ∞ 180.136 1.847 1.512 0.296 0.113 ∞ 165.978

TABLE 14-K Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) K-01 1.973 1.893 0.185 0.078 19.455 14.744 1.741 1.596 0.453 0.345 ∞ 107.965 K-02 1.983 1.872 0.156 0.017 19.144 12.421 1.806 1.623 0.379 0.249 ∞ 122.284 K-03 1.987 1.847 0.167 0.000 17.845 9.756 1.782 1.583 0.315 0.187 ∞ 164.682 K-04 1.719 1.655 0.093 0.039 ∞ 107.765 1.782 1.640 0.185 0.106 ∞ 240.729 K-05 1.723 1.669 0.104 0.045 247.764 205.861 1.753 1.603 0.311 0.163 ∞ 150.727 K-06 1.736 1.664 0.099 0.026 ∞ 188.964 1.938 1.577 0.293 0.122 ∞ 190.206 K-07 1.751 1.660 0.091 0.021 ∞ 182.620 1.860 1.505 0.298 0.117 ∞ 157.223

TABLE 14-L Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) L-01 1.974 1.903 0.194 0.095 18.537 14.577 1.708 1.572 0.448 0.357 ∞ 99.374 L-02 1.983 1.876 0.163 0.028 18.641 12.379 1.790 1.608 0.378 0.255 ∞ 118.240 L-03 1.989 1.851 0.171 0.000 17.506 9.747 1.776 1.579 0.316 0.190 ∞ 154.295 L-04 1.719 1.657 0.093 0.043 176.125 108.056 1.773 1.640 0.184 0.115 ∞ 239.447 L-05 1.720 1.674 0.104 0.048 245.819 210.037 1.745 1.616 0.323 0.176 ∞ 146.164 L-06 1.728 1.664 0.099 0.029 ∞ 190.492 1.826 1.594 0.297 0.128 ∞ 188.671 L-07 1.750 1.664 0.099 0.023 ∞ 185.642 1.931 1.560 0.283 0.103 ∞ 203.385 L-08 1.770 1.647 0.090 0.020 ∞ 181.694 1.851 1.519 0.279 0.095 ∞ 188.718

TABLE 14-M Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) M-01 1.981 1.878 0.162 0.035 19.040 12.910 1.795 1.610 0.389 0.261 ∞ 109.327 M-02 1.985 1.850 0.173 0.004 17.738 9.987 1.771 1.575 0.319 0.192 ∞ 144.773 M-03 1.982 1.819 0.169 0.000 18.242 8.329 1.785 1.592 0.285 0.153 ∞ 164.318 M-04 1.717 1.677 0.103 0.051 233.783 211.731 1.724 1.634 0.337 0.187 ∞ 140.585 M-05 1.723 1.665 0.099 0.034 ∞ 191.269 1.797 1.609 0.302 0.133 ∞ 192.523 M-06 1.749 1.664 0.099 0.026 ∞ 186.782 1.934 1.561 0.285 0.104 ∞ 198.444 M-07 1.772 1.645 0.090 0.022 ∞ 182.830 1.851 1.521 0.282 0.097 ∞ 183.298

TABLE 14-N Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) N-01 1.980 1.881 0.157 0.036 20.158 14.003 1.818 1.632 0.415 0.275 ∞ 119.641 N-02 1.980 1.848 0.174 0.011 18.254 10.450 1.767 1.571 0.327 0.197 ∞ 139.482 N-03 1.979 1.820 0.167 0.000 18.627 8.694 1.787 1.592 0.291 0.157 ∞ 181.534 N-04 1.708 1.676 0.100 0.054 231.071 211.497 1.721 1.649 0.345 0.200 160.527 134.106 N-05 1.720 1.666 0.099 0.038 ∞ 191.698 1.802 1.619 0.308 0.145 ∞ 186.758 N-06 1.748 1.665 0.100 0.028 ∞ 188.144 1.933 1.561 0.288 0.109 ∞ 191.540 N-07 1.771 1.644 0.090 0.024 ∞ 184.314 1.854 1.522 0.286 0.100 ∞ 174.816

TABLE 14-O Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) O-01 1.986 1.892 0.151 0.037 20.946 15.073 1.846 1.665 0.451 0.301 ∞ 113.921 O-02 1.976 1.851 0.174 0.018 18.588 10.996 1.763 1.571 0.339 0.209 ∞ 135.398 O-03 1.980 1.826 0.165 0.000 18.692 9.087 1.789 1.591 0.301 0.166 ∞ 177.745 O-04 1.705 1.676 0.099 0.060 227.547 210.480 1.722 1.652 0.337 0.217 149.574 128.876 O-05 1.718 1.666 0.100 0.040 ∞ 192.120 1.834 1.629 0.312 0.151 ∞ 178.069 O-06 1.747 1.665 0.100 0.029 ∞ 189.864 1.910 1.562 0.289 0.109 ∞ 189.584 O-07 1.770 1.645 0.089 0.025 ∞ 185.926 1.858 1.520 0.291 0.103 ∞ 169.414

TABLE 14-P Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) P-01 2.001 1.914 0.148 0.045 20.691 15.556 1.861 1.690 0.481 0.336 ∞ 109.768 P-02 1.978 1.859 0.176 0.025 18.424 11.376 1.756 1.574 0.351 0.225 ∞ 131.712 P-03 1.985 1.836 0.164 0.000 18.356 9.363 1.791 1.591 0.310 0.176 ∞ 172.718 P-04 1.707 1.685 0.101 0.067 225.238 212.673 1.715 1.643 0.328 0.223 139.199 120.241 P-05 1.716 1.666 0.100 0.040 231.093 192.697 1.840 1.628 0.314 0.151 ∞ 167.595 P-06 1.745 1.666 0.101 0.030 ∞ 191.630 1.889 1.562 0.290 0.115 ∞ 179.119 P-07 1.770 1.653 0.089 0.027 ∞ 187.468 1.864 1.515 0.295 0.110 ∞ 164.223

TABLE 14-Q Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) Q-01 2.020 1.942 0.150 0.058 19.257 15.087 1.832 1.680 0.483 0.365 ∞ 111.992 Q-02 1.981 1.867 0.182 0.033 17.848 11.461 1.743 1.570 0.357 0.239 ∞ 128.672 Q-03 1.991 1.846 0.165 0.000 17.802 9.465 1.790 1.590 0.316 0.186 ∞ 166.465 Q-04 1.707 1.692 0.103 0.077 223.701 215.120 1.677 1.625 0.321 0.252 127.631 109.461 Q-05 1.716 1.665 0.101 0.041 230.268 195.890 1.826 1.625 0.315 0.151 ∞ 158.121 Q-06 1.744 1.667 0.101 0.031 ∞ 193.216 1.887 1.561 0.292 0.120 ∞ 161.210 Q-07 1.770 1.657 0.088 0.030 ∞ 188.863 1.872 1.509 0.295 0.115 ∞ 156.975

TABLE 14-R Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) R-01 1.982 1.873 0.188 0.044 17.244 11.395 1.730 1.562 0.359 0.249 ∞ 128.127 R-02 1.997 1.854 0.166 0.000 17.308 9.486 1.790 1.589 0.319 0.193 ∞ 156.903 R-03 1.715 1.666 0.102 0.044 229.740 201.461 1.771 1.630 0.318 0.159 ∞ 151.088 R-04 1.743 1.668 0.102 0.032 ∞ 194.630 1.836 1.559 0.293 0.124 ∞ 157.464 R-05 1.760 1.658 0.090 0.018 ∞ 174.558 1.900 1.518 0.259 0.097 ∞ 192.992

TABLE 14-S Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) S-01 1.981 1.875 0.190 0.055 17.148 11.532 1.725 1.558 0.365 0.256 ∞ 125.060 S-02 1.996 1.857 0.163 0.000 17.446 9.791 1.797 1.592 0.327 0.198 ∞ 143.864 S-03 1.994 1.834 0.168 0.000 17.407 8.458 1.791 1.590 0.286 0.157 ∞ 171.207 S-04 1.713 1.670 0.103 0.051 228.093 205.012 1.767 1.647 0.323 0.178 ∞ 144.997 S-05 1.742 1.669 0.102 0.037 ∞ 195.805 1.825 1.558 0.294 0.130 ∞ 180.034 S-06 1.742 1.666 0.097 0.026 ∞ 178.602 1.857 1.570 0.281 0.104 ∞ 199.693 S-07 1.760 1.659 0.090 0.022 ∞ 175.003 1.904 1.518 0.262 0.096 ∞ 186.949

TABLE 14-T Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) T-01 1.978 1.874 0.186 0.059 17.817 12.124 1.731 1.564 0.381 0.265 ∞ 125.465 T-02 1.992 1.857 0.158 0.000 18.151 10.391 1.806 1.602 0.338 0.202 ∞ 136.447 T-03 1.990 1.833 0.167 0.000 17.811 8.783 1.791 1.588 0.291 0.159 ∞ 180.411 T-04 1.700 1.671 0.098 0.062 226.068 207.088 1.746 1.669 0.321 0.212 ∞ 144.423 T-05 1.743 1.670 0.102 0.044 265.367 196.420 1.815 1.556 0.294 0.142 ∞ 187.001 T-06 1.742 1.666 0.097 0.030 ∞ 183.526 1.856 1.571 0.282 0.108 ∞ 202.896 T-07 1.760 1.661 0.090 0.025 ∞ 175.348 1.912 1.519 0.268 0.102 ∞ 181.779

TABLE 15-A Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) A-01 2.109 1.990 0.055 0.000 32.767 27.509 6.594 5.978 3.556 3.013 1.715 1.418 A-02 1.929 1.877 0.138 0.089 31.708 26.309 2.028 1.933 0.507 0.403 83.056 75.266 A-03 1.924 1.852 0.136 0.036 21.551 15.640 1.750 1.627 0.335 0.242 ∞ 136.202 A-04 1.935 1.835 0.123 0.000 20.868 12.771 1.789 1.639 0.292 0.188 ∞ 175.723 A-05 1.940 1.823 0.124 0.000 20.183 10.913 1.793 1.618 0.258 0.152 ∞ 191.206 A-06 1.703 1.685 0.080 0.051 169.125 157.974 1.696 1.666 0.202 0.150 213.501 194.001 A-07 1.707 1.664 0.084 0.029 171.143 129.944 1.748 1.665 0.195 0.115 ∞ 249.665 A-08 1.725 1.704 0.082 0.049 250.745 235.697 7.849 7.185 3.465 2.625 0.893 0.721 A-09 1.738 1.690 0.082 0.029 ∞ 215.124 1.818 1.613 0.264 0.129 ∞ 179.167 A-10 1.736 1.688 0.079 0.022 ∞ 204.319 1.809 1.611 0.246 0.105 ∞ 225.188 A-11 1.731 1.655 0.080 0.025 ∞ 220.771 1.808 1.623 0.237 0.115 ∞ 175.645

TABLE 15-B Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) B-01 1.997 1.902 0.155 0.064 38.478 32.365 6.640 5.695 5.267 4.500 1.189 0.912 B-02 1.925 1.861 0.135 0.044 21.745 16.569 1.749 1.636 0.354 0.266 ∞ 129.925 B-03 1.936 1.842 0.124 0.004 20.735 13.305 1.787 1.643 0.304 0.202 ∞ 173.046 B-04 1.942 1.830 0.122 0.000 20.064 11.354 1.793 1.623 0.266 0.162 ∞ 186.094 B-05 1.700 1.690 0.079 0.061 166.973 161.165 1.688 1.668 0.197 0.165 199.493 188.055 B-06 1.703 1.667 0.082 0.033 165.499 138.474 1.740 1.670 0196 0.121 ∞ 244.077 B-07 1.736 1.690 0.079 0.024 ∞ 207.206 1.797 1.616 0.249 0.111 ∞ 220.690 B-08 1.711 1.709 0.079 0.074 235.852 234.721 6.407 6.233 4.693 3.940 0.732 0.720 B-09 1.737 1.692 0.082 0.033 ∞ 216.211 1.814 1.613 0.270 0.138 ∞ 173.495 B-10 1.730 1.658 0.080 0.029 ∞ 222.458 1.798 1.629 0.240 0.122 ∞ 171.776

TABLE 15-C Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) C-01 1.927 1.873 0.135 0.055 21.683 17.423 1.744 1.647 0.374 0.295 ∞ 124.317 C-02 1.939 1.852 0.123 0.011 20.446 13.775 1.786 1.650 0.316 0.218 ∞ 167.810 C-03 1.945 1.839 0.119 0.000 19.836 11.786 1.794 1.632 0.276 0.173 ∞ 181.193 C-04 1.699 1.671 0.079 0.039 161.921 145.560 1.735 1.679 0.196 0.130 ∞ 239.270 C-05 1.735 1.694 0.082 0.038 270.295 217.505 1.754 1.615 0.276 0.149 ∞ 167.329 C-06 1.735 1.692 0.078 0.026 ∞ 209.346 1.781 1.622 0.252 0.118 ∞ 214.946

TABLE 15-D Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) D-01 1.928 1.886 0.137 0.069 21.026 17.768 1.723 1.643 0.382 0.323 ∞ 119.322 D-02 1.943 1.862 0.123 0.018 19.960 14.046 1.784 1.655 0.326 0.234 ∞ 160.895 D-03 1.947 1.846 0.120 0.000 19.411 12.019 1.789 1.634 0.281 0.182 ∞ 176.028 D-04 1.695 1.674 0.075 0.046 159.493 148.447 1.731 1.687 0.195 0.141 273.632 234.699 D-05 1.732 1.696 0.081 0.042 266.580 218.746 1.745 1.620 0.283 0.159 ∞ 160.070 D-06 1.734 1.693 0.078 0.027 ∞ 210.617 1.767 1.630 0.252 0.123 ∞ 206.982 D-07 1.723 1.660 0.082 0.031 ∞ 221.552 1.832 1.613 0.241 0.108 ∞ 177.439

TABLE 15-E Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) E-01 1.925 1.891 0.144 0.087 19.955 17.523 1.686 1.619 0.377 0.336 127.104 114.397 E-02 1.947 1.870 0.124 0.024 19.462 14.081 1.783 1.656 0.330 0.244 ∞ 150.903 E-03 1.947 1.849 0.124 0.000 18.998 12.045 1.778 1.625 0.281 0.186 ∞ 169.614 E-04 1.692 1.677 0.069 0.054 157.553 150.032 1.727 1.693 0.190 0.164 253.769 229.862 E-05 1.729 1.698 0.080 0.044 251.532 219.912 1.728 1.628 0.292 0.167 ∞ 150.571 E-06 1.728 1.694 0.077 0.029 ∞ 210.961 1.757 1.639 0.250 0.125 ∞ 199.775 E-07 1.753 1.654 0.078 0.021 ∞ 211.857 1.912 1.611 0.220 0.096 ∞ 202.106

TABLE 15-F Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) F-01 1.950 1.875 0.122 0.025 19.494 14.295 1.792 1.662 0.337 0.249 ∞ 138.575 F-02 1.943 1.846 0.132 0.004 18.898 12.042 1.763 1.612 0.279 0.186 ∞ 161.008 F-03 1.724 1.699 0.079 0.045 247.964 221.101 1.721 1.638 0.301 0.176 172.085 143.974 F-04 1.723 1.693 0.077 0.033 ∞ 210.599 1.752 1.648 0.247 0.128 ∞ 199.200 F-05 1.740 1.693 0.077 0.030 ∞ 206.669 1.799 1.579 0.230 0.106 ∞ 203.487 F-06 1.750 1.656 0.078 0.022 ∞ 213.947 1.923 1.614 0.223 0.097 ∞ 191.019

TABLE 15-G Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) G-01 1.955 1.881 0.116 0.024 20.279 15.118 1.816 1.683 0.355 0.259 ∞ 132.898 G-02 1.937 1.842 0.138 0.011 19.161 12.240 1.751 1.603 0.280 0.188 ∞ 152.054 G-03 1.947 1.823 0.131 0.000 19.228 10.142 1.783 1.616 0.254 0.151 ∞ 192.936 G-04 1.721 1.701 0.077 0.045 239.263 222.197 1.720 1.644 0.305 0.177 161.062 136.808 G-05 1.721 1.693 0.077 0.035 245.793 210.312 1.752 1.651 0.246 0.133 ∞ 191.952 G-06 1.740 1.695 0.077 0.032 ∞ 208.328 1.805 1.580 0.232 0.108 ∞ 195.570 G-07 1.735 1.657 0.077 0.024 ∞ 215.902 1.806 1.618 0.224 0.097 ∞ 182.960

TABLE 15-H Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) H-01 1.960 1.891 0.111 0.023 21.165 16.261 1.843 1.713 0.382 0.279 ∞ 126.652 H-02 1.935 1.843 0.140 0.016 19.437 12.685 1.746 1.604 0.288 0.196 ∞ 177.678 H-03 1.947 1.828 0.128 0.000 19.380 10.599 1.787 1.618 0.262 0.159 ∞ 187.664 H-04 1.720 1.704 0.074 0.049 236.042 223.100 1.711 1.641 0.299 0.184 151.104 128.169 H-05 1.721 1.694 0.078 0.035 243.446 210.844 1.754 1.649 0.249 0.134 ∞ 181.064 H-06 1.739 1.697 0.076 0.032 ∞ 209.931 1.810 1.580 0.235 0.109 ∞ 216.664 H-07 1.730 1.656 0.076 0.027 ∞ 217.650 1.804 1.625 0.225 0.100 ∞ 177.272

TABLE 15-I Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) I-01 1.966 1.905 0.109 0.028 21.461 17.167 1.855 1.737 0.407 0.308 ∞ 121.537 I-02 1.936 1.851 0.138 0.021 19.418 13.206 1.745 1.611 0.300 0.211 ∞ 173.052 I-03 1.950 1.836 0.126 0.000 19.237 11.040 1.789 1.626 0.271 0.169 ∞ 183.002 I-04 1.723 1.696 0.078 0.035 242.566 212.120 1.754 1.644 0.255 0.143 ∞ 168.954 I-05 1.738 1.699 0.075 0.032 ∞ 211.373 1.811 1.579 0.237 0.115 ∞ 213.072 I-06 1.728 1.655 0.075 0.029 ∞ 219.101 1.805 1.636 0.226 0.106 ∞ 172.052

TABLE 15-J Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) J-01 1.973 1.922 0.111 0.042 20.839 17.465 1.840 1.743 0.418 0.340 161.544 119.422 J-02 1.940 1.863 0.136 0.027 19.023 13.566 1.742 1.619 0.310 0.227 ∞ 166.497 J-03 1.953 1.845 0.124 0.000 18.857 11.352 1.789 1.632 0.278 0.180 ∞ 178.361 J-04 1.724 1.698 0.077 0.035 241.722 213.515 1.751 1.642 0.260 0.155 ∞ 161.067 J-05 1.737 1.701 0.074 0.034 ∞ 212.546 1.807 1.577 0.236 0.122 ∞ 205.891 J-06 1.768 1.650 0.079 0.023 ∞ 200.276 1.849 1.604 0.227 0.093 ∞ 212.971

TABLE 15-K Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) K-01 1.944 1.874 0.135 0.035 18.320 13.618 1.733 1.620 0.314 0.241 ∞ 157.397 K-02 1.955 1.853 0.124 0.000 18.363 11.476 1.786 1.632 0.282 0.188 ∞ 173.024 K-03 1.723 1.700 0.077 0.037 240.271 214.658 1.744 1.646 0.261 0.163 ∞ 156.390 K-04 1.736 1.703 0.073 0.036 ∞ 213.396 1.797 1.574 0.232 0.126 ∞ 195.169 K-05 1.767 1.650 0.078 0.023 ∞ 201.239 1.850 1.606 0.229 0.094 ∞ 202.551

TABLE 15-L Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) L-01 1.947 1.882 0.136 0.044 17.718 13.578 1.725 1.617 0.315 0.249 ∞ 145.196 L-02 1.955 1.856 0.126 0.000 18.125 11.595 1.783 1.629 0.284 0.192 ∞ 165.335 L-03 1.718 1.664 0.090 0.044 175.199 128.388 1.772 1.642 0.182 0.119 ∞ 240.440 L-04 1.720 1.701 0.076 0.041 231.299 215.799 1.738 1.658 0.262 0.174 ∞ 152.266 L-05 1.728 1.703 0.072 0.040 ∞ 214.049 1.784 1.629 0.229 0.128 ∞ 193.496 L-06 1.748 1.689 0.077 0.030 ∞ 199.849 1.761 1.583 0.215 0.104 ∞ 212.463 L-07 1.768 1.651 0.078 0.024 ∞ 201.932 1.850 1.607 0.229 0.098 ∞ 192.106

TABLE 15-M Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) M-01 1.949 1.886 0.135 0.050 17.809 13.869 1.725 1.618 0.322 0.256 ∞ 136.370 M-02 1.951 1.855 0.127 0.002 18.468 11.960 1.781 1.628 0.288 0.194 ∞ 153.796 M-03 1.949 1.830 0.135 0.000 18.469 10.161 1.771 1.611 0.250 0.153 ∞ 194.427 M-04 1.716 1.703 0.075 0.050 226.140 217.246 1.731 1.678 0.263 0.185 179.041 147.510 M-05 1.721 1.704 0.072 0.045 ∞ 214.692 1.769 1.659 0.228 0.138 ∞ 199.403 M-06 1.746 1.690 0.077 0.033 ∞ 202.380 1.761 1.586 0.219 0.106 ∞ 208.129 M-07 1.770 1.651 0.078 0.026 ∞ 202.716 1.853 1.608 0.227 0.099 ∞ 186.947

TABLE 15-N Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) N-01 1.949 1.888 0.132 0.051 18.581 14.660 1.733 1.627 0.337 0.266 ∞ 131.038 N-02 1.947 1.854 0.127 0.006 19.085 12.539 1.780 1.630 0.296 0.200 ∞ 171.650 N-03 1.949 1.833 0.132 0.000 18.767 10.533 1.774 1.611 0.256 0.157 ∞ 189.575 N-04 1.716 1.704 0.071 0.050 ∞ 215.374 1.754 1.677 0.228 0.152 ∞ 195.166 N-05 1.744 1.691 0.077 0.036 ∞ 204.778 1.760 1.592 0.223 0.109 ∞ 202.001 N-06 1.741 1.652 0.078 0.028 ∞ 209.881 1.859 1.608 0.226 0.098 ∞ 178.700

TABLE 15-O Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) O-01 1.950 1.895 0.130 0.053 19.240 15.619 1.737 1.641 0.356 0.286 ∞ 126.286 O-02 1.946 1.858 0.127 0.010 19.361 13.105 1.779 1.636 0.307 0.211 ∞ 170.199 O-03 1.951 1.839 0.128 0.000 18.857 10.992 1.777 1.612 0.265 0.166 ∞ 185.156 O-04 1.714 1.706 0.070 0.053 222.035 216.109 1.735 1.682 0.225 0.161 ∞ 187.971 O-05 1.742 1.694 0.076 0.038 ∞ 206.771 1.755 1.595 0.223 0.114 ∞ 215.684 O-06 1.738 1.652 0.078 0.031 ∞ 213.326 1.839 1.609 0.227 0.102 ∞ 171.738

TABLE 15-P Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) P-01 1.955 1.910 0.129 0.064 19.185 16.266 1.731 1.651 0.371 0.314 ∞ 121.662 P-02 1.950 1.868 0.127 0.016 19.061 13.452 1.774 1.642 0.317 0.227 ∞ 164.818 P-03 1.953 1.847 0.127 0.000 18.574 11.329 1.776 1.618 0.273 0.177 ∞ 180.821 P-04 1.714 1.708 0.066 0.055 220.596 216.874 1.707 1.678 0.218 0.165 ∞ 179.468 P-05 1.742 1.697 0.075 0.039 ∞ 208.223 1.748 1.595 0.220 0.120 ∞ 209.260 P-06 1.735 1.651 0.077 0.034 ∞ 215.451 1.840 1.612 0.229 0.108 ∞ 166.208

TABLE 15-Q Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) Q-01 1.955 1.881 0.126 0.023 18.346 13.519 1.767 1.645 0.322 0.243 ∞ 156.774 Q-02 1.956 1.856 0.128 0.000 18.029 11.467 1.769 1.618 0.277 0.187 ∞ 176.585 Q-03 1.741 1.699 0.074 0.039 ∞ 209.091 1.740 1.591 0.217 0.126 ∞ 198.961 Q-04 1.736 1.650 0.080 0.020 ∞ 211.222 1.868 1.614 0.224 0.094 ∞ 204.980

TABLE 15-R Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) R-01 1.960 1.893 0.126 0.031 17.569 13.467 1.759 1.644 0.325 0.256 ∞ 143.259 R-02 1.956 1.861 0.131 0.002 17.540 11.504 1.759 1.611 0.278 0.193 ∞ 171.381 R-03 1.740 1.700 0.073 0.041 ∞ 209.546 1.736 1.587 0.217 0.129 ∞ 185.714 R-04 1.745 1.696 0.075 0.028 ∞ 205.939 1.790 1.604 0.211 0.105 ∞ 201.921 R-05 1.734 1.657 0.079 0.020 ∞ 213.387 1.874 1.617 0.226 0.095 ∞ 193.505

TABLE 15-S Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) S-01 1.964 1.903 0.123 0.040 17.353 13.759 1.759 1.648 0.331 0.267 ∞ 144.756 S-02 1.952 1.860 0.135 0.012 17.539 11.668 1.750 1.604 0.280 0.196 ∞ 162.922 S-03 1.955 1.833 0.133 0.000 18.087 9.947 1.778 1.614 0.252 0.156 ∞ 193.262 S-04 1.709 1.664 0.092 0.042 163.046 129.659 1.784 1.659 0.196 0.120 ∞ 243.485 S-05 1.739 1.699 0.074 0.044 ∞ 210.046 1.739 1.586 0.222 0.129 ∞ 177.669 S-06 1.744 1.697 0.075 0.029 ∞ 207.633 1.795 1.605 0.216 0.105 ∞ 205.481 S-07 1.732 1.658 0.078 0.021 ∞ 215.326 1.877 1.619 0.228 0.098 ∞ 189.945

TABLE 15-T Case n_(1−max) n_(1−min) k_(1−max) k_(1−min) d_(1−max) d_(1−min) n_(2−max) n_(2−min) k_(2−max) k_(2−min) d_(2−max) d_(2−min) T-01 1.966 1.909 0.117 0.043 18.089 14.663 1.773 1.665 0.348 0.278 ∞ 140.260 T-02 1.948 1.857 0.137 0.016 18.051 12.041 1.748 1.604 0.285 0.199 ∞ 150.984 T-03 1.955 1.835 0.128 0.000 18.523 10.348 1.785 1.616 0.259 0.159 ∞ 188.160 T-04 1.739 1.699 0.075 0.048 256.743 210.937 1.744 1.589 0.230 0.145 ∞ 180.549 T-05 1.743 1.698 0.075 0.030 ∞ 209.294 1.800 1.608 0.223 0.109 ∞ 200.943 T-06 1.731 1.652 0.078 0.022 ∞ 217.122 1.874 1.620 0.227 0.100 ∞ 184.530

The combinations of values of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀] are adapted for minimizing the reflectance over the entire incidence angle region corresponding to the numerical aperture NA of a corresponding exposure system. In other words, assuming an evaluation function f for minimization, the evaluation function f is a function of n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, and d₂₀, and the above-described combinations of values of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀] are combinations for minimizing f(n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀). Namely, the evaluation function f is minimized by the above-descried combinations of values of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀].

When multivariable function f(x_(i)) (i=0, 1, 2, . . . n) is minimized at x_(i)=x_(1-min), the function f(x_(i)) near the minimum value may be expressed by the following equation (1). Namely, the function may be approximated by a quadratic function. In the equation (1), symbol “Σ” represents the sum of i=0, 1, 2, . . . n. This applies to equation (2). f(x _(i))=Σa _(i)(x _(i) −x _(1-min))² +b  (1)

In this case, a condition for setting f(x_(i)) to be a certain constant c larger than b may be expressed by the elliptic function expression (2) wherein x_(1-c) is a value of x_(i) at f(x_(i))=c when only x_(i) is varied with all other variables being fixed. Σ(x _(i) −x _(1-min))/(x _(i-c) −x _(i-min))²≦1  (2)

Therefore, by using the values of n_(i-max), n_(i-min), k_(i-max), k_(i-min), d_(i-max), d_(i-min), n_(2-max), n_(2-min), k_(2-max), k_(2-min), d_(2-max), and d_(2-min), with each of which the reflectance is 0.4% when one of the variables is changed with the other being fixed, the reflectance may be controlled to below 0.4% by utilizing n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, and d₂₀ satisfying the following expression (3): {(n ₁ −n ₁₀)/(n _(1m) −n ₁₀)}²+{(k ₁ −k ₁₀)/(k _(1m) −k ₁₀)}²+{(d ₁ −d ₁₀)/(d _(1m) −d ₁₀)}²+{(n ₂ −n ₂₀)/(n _(2m) −n ₂₀)}²+{(k ₂ −k ₂₀)/(k _(2m) −k ₂₀)}²+{(d ₂ −d ₂₀)/(d _(2m) −d ₂₀)}²≦1  (3)

However, n_(1m), n_(2m), k_(1m), k_(2m), d_(1m), and d_(2m) take the following values:

n_(1m): n_(1-max) when n₁≧n₁₀ and n_(1-min) when n₁<n₁₀

k_(1m): k_(1-max) when k₁≧k₁₀ and k_(1-min) when k₁<k₁₀

d_(1m): d_(1-max) when d₁≧d₁₀ and d_(1-min) when d₁<d₁₀

n_(2m): n_(2-max) when n₂≧n₂₀ and n_(2-min) when n₂<n₂₀

k_(2m): k_(2-max) when k₂≧k₂₀ and k_(2-min) when k₂<k₂₀

d_(2m): d_(2-max) when d₂≧d₂₀ and d_(2-min) when d₂<d₂₀

The reason for distinguishing the values of n_(1m), n_(2m), k_(1m), k_(2m), d_(1m), and d_(2m) according to the magnitude relations between n₁, n₂, k₁, k₂, d₁, and d₂ and n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, and d₂₀, respectively, is that since the following conditions are not exactly satisfied, n _(1-max) −n ₁₀ =n ₁₀ −n _(1-min) k _(1-max) −k ₁₀ =k ₁₀ −k _(1-min) d _(1-max) −d ₁₀ =d ₁₀ −d _(1-min) n _(2-max)−n₂₀ =n ₂₀ −n _(2-min) k _(2-max) −k ₂₀ =k ₂₀ −k _(2-min) d _(2-max) −d ₂₀ =d ₂₀ −d _(2-min) definitions of the diameter of an ellipsoid specified by expression (2) are distinguished according to the magnitude relations between n₁, n₂, k₁, k₂, d₁, and d₂ and n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, and d₂₀, respectively. In other words, for example, the curvature of the ellipsoid at n₁≧n₁₀ is different from that at n₁<n₁₀. This applies to k₁₀, d₁₀, n₂₀, k₂₀, and d₂₀.

When the numerical aperture NA is 0.93≦NA≦1.0, a reflectance below 0.4% is secured by selecting any one of the following combinations of values of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]:

Case A-01 to Case A-15 with 2 (nm)≦T≦15 (nm)

Case B-01 to Case B-22 with 15 (nm)<T≦25 (nm)

Case C-01 to Case C-18 with 25 (nm)<T≦35 (nm)

Case D-01 to Case D-20 with 35 (nm)<T≦45 (nm)

Case E-01 to Case E-17 with 45 (nm)<T≦55 (nm)

Case F-01 to Case F-17 with 55 (nm)<T≦65 (nm)

Case G-01 to Case G-16 with 65 (nm)<T≦75 (nm)

Case H-01 to Case H-16 with 75 (nm)<T≦85 (nm)

Case I-01 to Case I-23 with 85 (nm)<T≦95 (nm)

Case J-01 to Case J-15 with 95 (nm)<T≦105 (nm)

Case K-01 to Case K-13 with 105 (nm)<T≦115 (nm)

Case L-01 to Case L-12 with 115 (nm)<T≦125 (nm)

Case M-01 to Case M-12 with 125 (nm)<T≦135 (nm)

Case N-01 to Case N-12 with 135 (nm)<T≦145 (nm)

Case O-01 to Case O-13 with 145 (nm)<T≦155 (nm)

Case P-01 to Case P-14 with 155 (nm)<T≦165 (nm)

Case Q-01 to Case Q-13 with 165 (nm)<T≦175 (nm)

Case R-01 to Case R-13 with 175 (nm)<T≦185 (nm)

Case S-01 to Case S-15 with 185 (nm)<T≦195 (nm)

Case T-01 to Case T-13 with 195 (nm)<T≦205 (nm)

In addition, when n₁ is in the range of the maximum (n_(1-max)) to the minimum (n_(1-min)) of n_(1m) in a corresponding case, k₁ is in the range of the maximum (k_(1-max)) to the minimum (k_(1-min)) of k_(1m) in a corresponding case, d₁ is in the range of the maximum (d_(1-max)) to the minimum (d_(1-min)) of d_(1m) in a corresponding case, n₂ is in the range of the maximum (n_(2-max)) to the minimum (n_(2-min)) of n_(2m) in a corresponding case, k₂ is in the range of the maximum (k_(2-max)) to the minimum (k_(2-min)) of k_(2m) in a corresponding case, and d₂ is in the range of the maximum (d_(2-max)) to the minimum (d_(2-min)) of d_(2m) in a corresponding case, it is secured that the reflectance of the antireflective film from the silicon semiconductor substrate does not exceed 0.4% using a value of n_(1m) in a corresponding case on the basis of the magnitude relation between n₁ and n₁₀, a value of k_(1m) in a corresponding case on the basis of the magnitude relation between k₁ and k₁₀, a value of d_(1m) in a corresponding case on the basis of the magnitude relation between d₁ and d₁₀, a value of n_(2m) in a corresponding case on the basis of the magnitude relation between n₂ and n₂₀, a value of k_(2m) in a corresponding case on the basis of the magnitude relation between k₂ and k₂₀, and a value of d_(2m) in a corresponding case on the basis of the magnitude relation between d₂ and d₂₀. As a result, an excellent resist pattern is obtained.

When the numerical aperture NA is 1.0<NA≦1.1, a reflectance below 0.4% is secured by selecting any one of the following combinations of values of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]:

Case A-01 to Case A-24 with 2 (nm)≦T≦15 (nm)

Case B-01 to Case B-22 with 15 (nm)<T≦25 (nm)

Case C-01 to Case C-16 with 25 (nm)<T≦35 (nm)

Case D-01 to Case D-14 with 35 (nm)<T≦45 (nm)

Case E-01 to Case E-14 with 45 (nm)<T≦55 (nm)

Case F-01 to Case F-16 with 55 (nm)<T≦65 (nm)

Case G-01 to Case G-16 with 65 (nm)<T≦75 (nm)

Case H-01 to Case H-17 with 75 (nm)<T≦85 (nm)

Case I-01 to Case I-15 with 85 (nm)<T≦95 (nm)

Case J-01 to Case J-13 with 95 (nm)<T≦105 (nm)

Case K-01 to Case K-12 with 105 (nm)<T≦115 (nm)

Case L-01 to Case L-13 with 115 (nm)<T≦125 (nm)

Case M-01 to Case M-11 with 125 (nm)<T≦135 (nm)

Case N-01 to Case N-12 with 135 (nm)<T≦145 (nm)

Case O-01 to Case O-12 with 145 (nm)<T≦155 (nm)

Case P-01 to Case P-12 with 155 (nm)<T≦165 (nm)

Case Q-01 to Case Q-12 with 165 (nm)<T≦175 (nm)

Case R-01 to Case R-10 with 175 (nm)<T≦185 (nm)

Case S-01 to Case S-13 with 185 (nm)<T≦195 (nm)

Case T-01 to Case T-12 with 195 (nm)<T≦205 (nm)

In addition, when n₁ is in the range of the maximum (n_(1-max)) to the minimum (n_(1-min)) of n_(1m) in a corresponding case, k₁ is in the range of the maximum (k_(1-max)) to the minimum (k_(1-min)) of k_(1m) in a corresponding case, d₁ is in the range of the maximum (d_(1-max)) to the minimum (d_(1-min)) of d_(1m) in a corresponding case, n₂ is in the range of the maximum (n_(2-max)) to the minimum (n_(2-min)) of n_(2m) in a corresponding case, k₂ is in the range of the maximum (k_(2-max)) to the minimum (k_(2-min)) of k_(2m) in a corresponding case, and d₂ is in the range of the maximum (d_(2-max)) to the minimum (d_(2-min)) of d_(2m) in a corresponding case, it is secured that the reflectance of the antireflective film from the silicon semiconductor substrate does not exceed 0.4% using a value of n_(1m) in a corresponding case on the basis of the magnitude relation between n₁ and n₁₀, a value of k_(1m) in a corresponding case on the basis of the magnitude relation between k₁ and k₁₀, a value of d_(1m) in a corresponding case on the basis of the magnitude relation between d₁ and d₁₀, a value of n_(2m) in a corresponding case on the basis of the magnitude relation between n₂ and n₂₀, a value of k_(2m) in a corresponding case on the basis of the magnitude relation between k₂ and k₂₀, and a value of d_(2m) in a corresponding case on the basis of the magnitude relation between d₂ and d₂₀. As a result, an excellent resist pattern is obtained.

Furthermore, when the numerical aperture NA is 1.1≦NA ≦1.2, a reflectance below 0.4% is secured by selecting any one of the following combinations of values of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]:

Case A-01 to Case A-19 with 2 (nm)≦T≦15 (nm)

Case B-01 to Case B-17 with 15 (nm)<T≦25 (nm)

Case C-01 to Case C-14 with 25 (nm)<T≦35 (nm)

Case D-01 to Case D-13 with 35 (nm)<T≦45 (nm)

Case E-01 to Case E-13 with 45 (nm)<T≦55 (nm)

Case F-01 to Case F-12 with 55 (nm)<T≦65 (nm)

Case G-01 to Case G-13 with 65 (nm)<T≦75 (nm)

Case H-01 to Case H-15 with 75 (nm)<T≦85 (nm)

Case I-01 to Case I-13 with 85 (nm)<T≦95 (nm)

Case J-01 to Case J-12 with 95 (nm)<T≦105 (nm)

Case K-01 to Case K-09 with 105 (nm)<T≦115 (nm)

Case L-01 to Case L-10 with 115 (nm)<T≦125 (nm)

Case M-01 to Case M-09 with 125 (nm)<T≦135 (nm)

Case N-01 to Case N-10 with 135 (nm)<T≦145 (nm)

Case O-01 to Case O-09 with 145 (nm)<T≦155 (nm)

Case P-01 to Case P-09 with 155 (nm)<T≦165 (nm)

Case Q-01 to Case Q-09 with 165 (nm)<T≦175 (nm)

Case R-01 to Case R-08 with 175 (nm)<T≦185 (nm)

Case S-01 to Case S-10 with 185 (nm)<T≦195 (nm)

Case T-01 to Case T-11 with 195 (nm)<T≦205 (nm)

In addition when n₁ is in the range of the maximum (n_(1-max)) to the minimum (n_(1-min)) of n_(1m) in a corresponding case, k₁ is in the range of the maximum (k_(1-max)) to the minimum (k_(1-min)) of k_(1m) in a corresponding case, d₁ is in the range of the maximum (d_(1-max)) to the minimum (d_(1-min)) of d_(1m) in a corresponding case, n₂ is in the range of the maximum (n_(2-max)) to the minimum (n_(2-min)) of n_(2m) in a corresponding case, k₂ is in the range of the maximum (k_(2-max)) to the minimum (k_(2-min)) of k_(2m) in a corresponding case, and d₂ is in the range of the maximum (d_(2-max)) to the minimum (d_(2-min)) of d_(2m) in a corresponding case, it is ensured that the reflectance of the antireflective film from the silicon semiconductor substrate does not exceed 0.4% using a value of n_(1m) in a corresponding case on the basis of the magnitude relation between n₁ and n₁₀, a value of k_(1m) in a corresponding case on the basis of the magnitude relation between k₁ and k₁₀, a value of d_(1m) in a corresponding case on the basis of the magnitude relation between d₁ and d₁₀, a value of n_(2m) in a corresponding case on the basis of the magnitude relation between n₂ and n₂₀, a value of k_(2m) in a corresponding case on the basis of the magnitude relation between k₂ and k₂₀, and a value of d_(2m) in a corresponding case on the basis of the magnitude relation between d₂ and d₂₀. As a result, an excellent resist pattern is obtained.

Furthermore, when the numerical aperture NA is 1.2<NA ≦1.3, a reflectance below 0.4% is secured by selecting any one of the following combinations of values of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]:

Case A-01 to Case A-13 with 2 (nm)≦T≦15 (nm)

Case B-01 to Case B-10 with 15 (nm)<T≦25 (nm)

Case C-01 to Case C-08 with 25 (nm)<T≦35 (nm)

Case D-01 to Case D-09 with 35 (nm)<T≦45 (nm)

Case E-01 to Case E-08 with 45 (nm)<T≦55 (nm)

Case F-01 to Case F-08 with 55 (nm)<T≦65 (nm)

Case G-01 to Case G-08 with 65 (nm)<T≦75 (nm)

Case H-01 to Case H-07 with 75 (nm)<T≦85 (nm)

Case I-01 to Case I-07 with 85 (nm)<T≦95 (nm)

Case J-01 to Case J-06 with 95 (nm)<T≦105 (nm)

Case K-01 to Case K-07 with 105 (nm)<T≦115 (nm)

Case L-01 to Case L-08 with 115 (nm)<T≦125 (nm)

Case M-01 to Case M-07 with 125 (nm)<T≦135 (nm)

Case N-01 to Case N-07 with 135 (nm)<T≦145 (nm)

Case O-01 to Case O-07 with 145 (nm)<T≦155 (nm)

Case P-01 to Case P-07 with 155 (nm)<T≦165 (nm)

Case Q-01 to Case Q-07 with 165 (nm)<T≦175 (nm)

Case R-01 to Case R-05 with 175 (nm)<T≦185 (nm)

Case S-01 to Case S-07 with 185 (nm)<T≦195 (nm)

Case T-01 to Case T-07 with 195 (nm)<T≦205 (nm)

In addition, when n₁ is in the range of the maximum (n_(1-max)) to the minimum (n_(1-min)) of n_(1m) in a corresponding case, k₁ is in the range of the maximum (k_(1-max)) to the minimum (k_(1-min)) of k_(1m) in a corresponding case, d₁ is in the range of the maximum (d_(1-max)) to the minimum (d_(1-min)) of d_(1m) in a corresponding case, n₂ is in the range of the maximum (n_(2-max)) to the minimum (n_(2-min)) of n_(2m) in a corresponding case, k₂ is in the range of the maximum (k_(2-max)) to the minimum (k_(2-min)) of k_(2m) in a corresponding case, and d₂ is in the range of the maximum (d_(2-max)) to the minimum (d_(2-min)) of d_(2m) in a corresponding case, it is secured that the reflectance of the antireflective film from the silicon semiconductor substrate does not exceed 0.4% using a value of n_(1m) in a corresponding case on the basis of the magnitude relation between n₁ and n₁₀, a value of k_(1m) in a corresponding case on the basis of the magnitude relation between k₁ and k₁₀, a value of d_(1m) in a corresponding case on the basis of the magnitude relation between d₁ and d₁₀, a value of n_(2m) in a corresponding case on the basis of the magnitude relation between n₂ and n₂₀, a value of k_(2m) in a corresponding case on the basis of the magnitude relation between k₂ and k₂₀, and a value of d_(2m) in a corresponding case on the basis of the magnitude relation between d₂ and d₂₀. As a result, an excellent resist pattern is obtained.

Furthermore, when the numerical aperture NA is 1.3<NA≦1.4, a reflectance below 0.4% is secured by selecting any one of the following combinations of values of [n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, d₂₀]:

Case A-01 to Case A-11 with 2 (nm)≦T≦15 (nm)

Case B-01 to Case B-10 with 15 (nm)<T≦25 (nm)

Case C-01 to Case C-06 with 25 (nm)<T≦35 (nm)

Case D-01 to Case D-07 with 35 (nm)<T≦45 (nm)

Case E-01 to Case E-07 with 45 (nm)<T≦55 (nm)

Case F-01 to Case F-06 with 55 (nm)<T≦65 (nm)

Case G-01 to Case G-07 with 65 (nm)<T≦75 (nm)

Case H-01 to Case H-07 with 75 (nm)<T≦85 (nm)

Case I-01 to Case I-06 with 85 (nm)<T≦95 (nm)

Case J-01 to Case J-06 with 95 (nm)<T≦105 (nm)

Case K-01 to Case K-05 with 105 (nm)<T≦115 (nm)

Case L-01 to Case L-07 with 115 (nm)<T≦125 (nm)

Case M-01 to Case M-07 with 125 (nm)<T≦135 (nm)

Case N-01 to Case N-06 with 135 (nm)<T≦145 (nm)

Case O-01 to Case O-06 with 145 (nm)<T≦155 (nm)

Case P-01 to Case P-06 with 155 (nm)<T≦165 (nm)

Case Q-01 to Case Q-04 with 165 (nm)<T≦175 (nm)

Case R-01 to Case R-05 with 175 (nm)<T≦185 (nm)

Case S-01 to Case S-07 with 185 (nm)<T≦195 (nm)

Case T-01 to Case T-06 with 195 (nm)<T≦205 (nm)

In addition, when n₁ is in the range of the maximum (n_(1-max)) to the minimum (n_(1-min)) of n_(1m) in a corresponding case, k₁ is in the range of the maximum (k_(1-max)) to the minimum (k_(1-min)) of k_(1m) in a corresponding case, d₁ is in the range of the maximum (d_(1-max)) to the minimum (d_(1-min)) of d_(1m) in a corresponding case, n₂ is in the range of the maximum (n_(2-max)) to the minimum (n_(2-min)) of n_(2m) in a corresponding case, k₂ is in the range of the maximum (k_(2-max)) to the minimum (k_(2-min)) of k_(2m) in a corresponding case, and d₂ is in the range of the maximum (d_(2-max)) to the minimum (d_(2-min)) of d_(2m) in a corresponding case, it is secured that the reflectance of the antireflective film from the silicon semiconductor substrate does not exceed 0.4% using a value of n_(1m) in a corresponding case on the basis of the magnitude relation between n₁ and n₁₀, a value of k_(1m) in a corresponding case on the basis of the magnitude relation between k₁ and k₁₀, a value of d_(1m) in a corresponding case on the basis of the magnitude relation between d₁ and d₁₀, a value of n_(2m) in a corresponding case on the basis of the magnitude relation between n₂ and n₂₀, a value of k_(2m) in a corresponding case on the basis of the magnitude relation between k₂ and k₂₀, and a value of d_(2m) in a corresponding case on the basis of the magnitude relation between d₂ and d₂₀. As a result, an excellent resist pattern is obtained.

In other words, assuming a 6-dimensional ellipsoid having the six variables of (n₁, n₂, k₁, k₂, d₁, d₂) in which the centers are (n₁₀, n₂₀, k₁₀, k₂₀, d₁₀, and d₂₀) and the diameters are absolute values of (n_(1m)−n₁₀), (k_(1m)−k₁₀), (d_(1m)−d₁₀), (n_(2m)−n₂₀), (k_(2m)−k₂₀), and (d_(2m)−d₂₀), the reflectance of the antireflective film may be controlled to 0.4% or less by selecting a combination of any values of (n₁, n₂, k₁, k₂, d₁, d₂) within a range present in the ellipsoid.

EXAMPLES

A two-layer antireflective film having each of the refractive indexes and thicknesses shown in Tables 22, 23, 24, and 25 was formed on a silicon oxide film formed on a surface of a silicon semiconductor substrate by the plasma-enhanced CVD method descried in Japanese Unexamined Patent Application Publication No. 2001-242630 and Proceedings of SPIE 2003, 5039, 152 (K. Babich, et al.). The silicon oxide film was deposited on the silicon substrate by a thermal CVD method. Specifically, the CVD method was performed using SiH₄ and O₂ as source gases at a reaction temperature set at 400° C.

As described in the above reference documents, the plasma-enhanced CVD method is a method for forming a film in a parallel electrode reactor in which a silicon semiconductor substrate is mounted on one of electrodes. A negative bias voltage is applied to the silicon semiconductor substrate from the electrode, and the pressure in the reactor, the type of the reaction precursor introduced into the reactor (tetramethylsilane, trimethylsilane, tetramethyltetrasiloxne, tetramethylgermane, or oxygen), the flow rate, and the substrate temperature are controlled to form layers having various complex refractive indexes.

In Tables 21, 22, 23, 24, and 25, examples are antireflective films satisfying the conditions of the invention, while comparative examples are comparative antireflective films not satisfying the conditions of the invention.

TABLE 21 0.93 ≦ NA ≦ 1.0 Upper layer Lower layer Complex Complex Thickness refractive Thickness refractive Thickness of oxide Section Case index (nm) index (nm) film (nm) pattern Example 1-1 E-06 1.78-0.14i 85 1.71-0.65i 55 50 A Comp. Example 1-1 1.90-0.21i 85 1.71-0.65i 30 50 B Example 1-2 E-12 1.72-0.08i 155 1.73-0.25i 170 50 A Comp. Example 1-2A 1.72-0.08i 155 1.73-0.25i 30 50 B Comp. Example 1-2B 1.71-0.65i 155 1.90-0.21i 30 50 B Example 1-3 J-06 1.77-0.11i 90 1.82-0.39i 115 100 A Comp. Example 1-3 1.77-0.11i 90 1.82-0.39i 40 100 B Example 1-4 J-10 1.73-0.09i 155 1.76-0.33i 120 100 A Example 1-5 O-07 1.78-0.14i 90 1.79-0.50i 75 150 A Comp. Example 1-5 1.78-0.14i 90 1.79-0.50i 15 150 B Example 1-6 T-04 1.73-0.11i 85 1.62-0.30i 155 200 A Comp. Example 1-6 1.73-0.11i 85 1.62-0.30i 60 200 B

TABLE 22 1.0 < NA ≦ 1.1 Upper layer Lower layer Complex Complex Thickness refractive Thickness refractive Thickness of oxide Section Case index (nm) index (nm) film (nm) pattern Example 2-1 E-05 1.72-0.09i 90 1.64-0.25i 180 50 A Comp. Example 2-1 1.72-0.09i 90 1.64-0.25i 40 50 B Example 2-2 E-02 1.93-0.15i 20 1.86-0.50i 110 50 A Comp. Example 2-2 1.93-0.15i 20 1.86-0.50i 40 50 B Example 2-3 J-06 1.72-0.09i 90 1.64-0.25i 170 60 A Comp. Example 2-3 1.72-0.09i 90 1.64-0.25i 30 60 B Example 2-4 J-02 1.93-0.15i 16 1.75-0.45i 130 100 A Comp. Example 2-4A 1.93-0.15i 16 1.75-0.45i 50 100 B Comp. Example 2-4B 1.62-0.30i 16 1.75-0.45i 130 100 B Example 2-5 O-04 1.73-0.10i 90 1.69-0.30i 140 150 A Comp. Example 2-5 1.73-0.10i 90 1.69-0.30i 100 150 B Example 2-6 T-10 1.69-0.07i 210 1.69-0.20i 210 200 A Comp. Example 2-6 1.69-0.07i 210 1.69-0.20i 80 200 B

TABLE 23 1.1 < NA ≦ 1.2 Upper layer Lower layer Complex Complex Thickness refractive Thickness refractive Thickness of oxide Section Case index (nm) index (nm) film (nm) pattern Example 3-1 E-04 1.72-0.09i 95 1.65-0.24i 180 50 A Comp. Example 3-1 1.72-0.09i 95 1.65-0.24i 80 50 B Example 3-2 E-06 1.71-0.07i 165 1.67-0.23i 170 50 A Comp. Example 3-2 1.71-0.07i 165 1.67-0.23i 80 50 B Example 3-3 J-05 1.73-0.08i 95 1.70-0.24i 185 100 A Comp. Example 3-3 1.73-0.08i 95 1.70-0.24i 40 100 B Example 3-4 O-01 1.90-0.14i 15 1.71-0.39i 150 150 A Comp. Example 3-4 1.61-0.01i 15 1.71-0.39i 150 150 B Example 3-5 S-04 1.72-0.08i 95 1.67-0.21i 220 190 A Comp. Example 3-5A 1.61-0.01i 95 1.67-0.21i 220 190 B Comp. Example 3-5B 1.72-0.08i 95 1.67-0.21i 90 190 B

TABLE 24 1.2 < NA ≦ 1.3 Upper layer Lower layer Complex Complex Thickness refractive Thickness refractive Thickness of oxide Section Case index (nm) index (nm) film (nm) pattern Example 4-1 E-04 1.94-0.21i 23 1.90-0.79i 54 50 A Comp. Example 4-1 1.94-0.21i 23 1.90-0.79i 40 50 B Example 4-2 J-01 1.90-0.14i 17 1.72-0.40i 135 100 A Comp. Example 4-2 1.90-0.14i 17 1.72-0.40i 50 100 B Comp. Example 4-3 1.94-0.21i 17 1.72-0.40i 135 100 B Example 4-3 T-01 1.90-0.14i 14 1.68-0.33i 160 200 A Comp. Example 4-4 1.90-0.14i 14 1.68-0.33i 50 200 B

TABLE 25 1.3 < NA ≦ 1.4 Upper layer Lower layer Complex Complex Thickness refractive Thickness refractive Thickness of oxide Section Case index (nm) index (nm) film (nm) pattern Example 5-1 E-01 1.90-0.14i 18 1.68-0.47i 126 50 A Comp. Example 5-1 1.90-0.15i 18 1.68-0.47i 70 50 B Comp. Example 5-2 1.90-0.14i 18 1.50-0.10i 126 50 B Example 5-2 J-01 1.93-0.10i 18 1.82-0.40i 126 100 A Comp. Example 5-3 1.93-0.10i 70 1.82-0.40i 126 100 B Example 5-3 O-01 1.90-0.12i 16 1.72-0.34i 145 150 A Comp. Example 5-4 1.90-0.12i 16 1.72-0.34i 100 150 B Example 5-4 T-01 1.91-0.10i 15 1.75-0.33i 155 200 A Comp. Example 5-5 1.91-0.10i 15 1.75-0.33i 70 200 B

In further detail, in Table 21 showing the results of evaluation with 0.93≦NA≦1.0, Examples 1-1 and 1-2 are antireflective films satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Examples 1-3 and 1-4 are antireflective films satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Example 1-5 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Example 1-6 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm). On the other hand, Comparative Examples 1-1, 1-2A, and 1-2B are antireflective films not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Comparative Example 1-3 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Comparative Example 1-5 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Comparative Example 1-6 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm).

Furthermore, in Table 22 showing the results of evaluation with 1.0<NA≦1.1, Examples 2-1 and 2-2 are antireflective films satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Example 2-3 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 55 (nm)<T≦65 (nm), Example 2-4 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Example 2-5 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Example 2-6 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm). On the other hand, Comparative Examples 2-1 and 2-2 are antireflective films not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Comparative Example 2-3 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 55 (nm)<T≦65 (nm), Comparative Examples 2-4A and 2-4B are antireflective films not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Comparative Example 2-5 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Comparative Example 2-6 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm).

Furthermore, in Table 23 showing the results of evaluation with 1.1<NA≦1.2, Examples 3-1 and 3-2 are antireflective films satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Example 3-3 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Example 3-4 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Example 3-5 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 185 (nm)<T≦195 (nm). On the other hand, Comparative Examples 3-1 and 3-2 are antireflective films not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Comparative Example 3-3 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Comparative Example 3-4 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Comparative Examples 3-5A and 3-5B are antireflective films not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 185 (nm)<T≦195 (nm).

Furthermore, in Table 24 showing the results of evaluation with 1.2<NA≦1.3, Example 4-1 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Example 4-2 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), and Example 4-3 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm). On the other hand, Comparative Example 4-1 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Comparative Examples 4-2 and 4-3 are antireflective films not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), and Comparative Example 4-4 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm).

Furthermore, in Table 25 showing the results of evaluation with 1.3<NA≦1.4, Example 5-1 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Example 5-2 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Example 5-3 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Example 5-4 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm). On the other hand, Comparative Examples 5-1 and 5-2 are antireflective films not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Comparative Example 5-3 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Comparative Example 5-4 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Comparative Example 5-5 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm).

In each of the examples and comparative examples of Tables 21, 22, 22, 23, 24, and 25, the material constituting the upper and lower layers of the antireflective film was SiCOH. The refractive index of each film was measured by an ellipsometer manufactured by SOPRA Corp.

Photoresist ARX2014J manufactured by JRS Co., Ltd. was spin-coated to a thickness of 100 nm as a resist layer on each of the two-layer antireflective films and baked at 105° C. for 60 seconds, and then a top coat material TCX001 manufactured by the same corporation was spin-coated to a thickness of 30 nm as a top coat layer. Then, the whole film was baked at 105° C. for 30 seconds.

Each of the resultant samples was exposed to light by a two-beam interference exposure device. In the two-beam interference exposure device, an ArF excimer laser was used as a light source, and a prism having a triangular or pentagonal sectional shape was disposed on the optical path of laser. Each sample was placed at a distance of 1 mm between the sample and the bottom surface of the prism. For example, when the prism with a triangular sectional shape was used, the apex of the prism was disposed at the center of the laser optical path, and the bottom surface of the prism was opposed to the apex. When laser beams are applied above the prism in the direction to the bottom surface of the prism, the laser beams incident on the two sides of the prism are refracted depending on the angle between the each side and the incident laser beam to change the optical path. The laser beams traveling in different directions are interfered with each other at the bottom surface of the prism to obtain a periodic optical intensity distribution on the sample. As a result, the resist layer is exposed to light. The reduced numerical aperture of the prism used in evaluation with 0.93≦NA≦1.0 was 0.99, the reduced numerical aperture NA of the prism used in evaluation with 1.0<NA≦1.1 was 1.05, the reduced numerical aperture NA of the prism used in evaluation with 1.1<NA≦1.2 was 1.15, the reduced numerical aperture NA of the prism used in evaluation with 1.2<NA≦1.3 was 1.25, and the reduced numerical aperture NA of the prism used in evaluation with 1.3<NA≦1.4 was 1.38.

Furthermore, water was introduced in the distance of 1 mm between each sample and the bottom surface of the prism by means of a capillary phenomenon, and immersion exposure was performed using the water as an immersion liquid.

Each of the samples after exposure was baked at 120° C. for 90 seconds and developed with a standard developer composed of 2.38% TMAH (tetramethylammonium hydroxide) to prepare a sample for resist pattern observation. The shape of the resist layer was observed by observing a section of the broken silicon semiconductor substrate through a scanning electron microscope. At the same time, the precision of the processed shape was measured by a scattered light distribution in the range of 40 μm×40 μm using an optical scattered light meter (SCD-100 manufactured by KLA-Tencor Corporation).

The results of the observation are summarized in Tables 21, 22, 23, 24, and 25 in which a resist pattern having a good rectangular section is shown by symbol A, and a resist pattern having a poor rectangular section is shown by symbol B.

As seen from Tables 21, 22, 23, 24, and 25, the two-layer antireflective film according to any one of the embodiments of the invention is capable of forming a good resist sectional shape, as compared with a two-layer antireflective film not satisfying the conditions of the invention.

As described above, according to any one of the embodiments of the invention, the two-layer antireflective film having a complex refractive index and a thickness within the respective specified ranges is formed between a resist layer and a silicon oxide film formed on a surface of a silicon semiconductor substrate. In this case, the reflectance from the silicon semiconductor substrate may be decreased for the antireflective film corresponding to a predetermined range of the numerical aperture NA of an exposure system, thereby producing a good resist pattern.

Although, in any one of the above-mentioned embodiments, the two-layer antireflective film formed by the plasma-enhanced CVD method is described as an example, the present invention is not limited to this. For example, the two-layer antireflective film may be formed by another method such as a spin coating method or the like.

A semiconductor device was manufactured using the two-layer antireflective film according to any one of the embodiments of the invention. A phase shift mask was used as an exposure mask, and an ArF excimer laser (wavelength λ: 193 nm) was used as a light source for exposure light. Furthermore, a zone illumination method was used. The surface of the resist layer was covered with a water layer, and it was confirmed whether or not a desired pattern could be formed in a resist layer without variation in the line width and shape. As a result, it was found that in any case, a desired pattern can be formed in the resist layer without variation in the line width and shape. In addition, in any case, the reflectance was 0.4% or less.

Specifically, an element separation region having a trench structure was formed. In other words, the two-layer antireflective film was formed on a silicon oxide film formed on a surface of a silicon semiconductor substrate, and a resist layer was formed on the antireflective film and subjected to exposure and development to form the patterned resist layer. Then, the silicon semiconductor substrate on which the silicon oxide film was formed on the surface was etched to a predetermined depth by a RIE method using the patterned resist layer as an etching mask, thereby forming a trench in the silicon semiconductor substrate. Then, an insulating film was formed over the entire surface of the silicon semiconductor substrate including the trench and then removed from the surface of the silicon semiconductor substrate to form an element separation region having a trench structure in which the insulating film was buried in the trench.

Although the invention is described on the basis of the preferred embodiments, the invention is not limited to these embodiments. In each of the embodiments, the constitution of the antireflective film and the thickness and complex refractive index of each layer constituting the antireflective film may be appropriately changed. 

1. An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of: providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below; and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 0.93≦NA ≦1.0, the antireflective film including an upper layer having a complex refractive index N₁, and a lower layer having a complex refractive index N₂, the complex refractive indexes N₁ and N₂ being represented by the equations N₁=n₁−k₁i and N₂=n₂−k₂i, respectively; wherein assuming that the thickness of the upper layer is d₁ (unit: nm) and the thickness of the lower layer is d₂ (unit: nm) , when any one of the combinations of values of [n₁₀, k₁₀, d₁₀, n₂₀, k₂₀, d₂₀]described below is selected depending on the thickness T of the silicon oxide film, n₁, k₁, d₁, n₂, k₂, and d₂ satisfy the relational expression {(n₁ −n ₁₀)/(n _(1m) −n ₁₀)}₂+{(k ₁ −k ₁₀)/(k _(1m) −k ₁₀)}²+{(d ₁ −d ₁₀)/(d _(1m) −d ₁₀)}²+{(n ₂ −n ₂₀)/(n _(2m) −n ₂₀)}²+{(k ₂ −k ₂₀)/(k _(2m) −k ₂₀)}²+{(d ₂ −d ₂₀)/(d _(2m) −d ₂₀)}²≦1; a value of n_(1m) in a corresponding case is selected on the basis of a magnitude relation between n₁ and n₁₀; a value of k_(1m) in a corresponding case is selected on the basis of a magnitude relation between k₁ and k₁₀; a value of d_(1m) in a corresponding case is selected on the basis of a magnitude relation between d₁ and d₁₀; a value of n_(2m) in a corresponding case is selected on the basis of a magnitude relation between n₂ and n₂₀; a value of k_(2m) in a corresponding case is selected on the basis of a magnitude relation between k₂ and k₂₀; and a value of d_(2m) in a corresponding case is selected on the basis of a magnitude relation between d₂ and d₂₀; and in the tables below, in the line of “When n₁≧n₁₀,n_(1m)=”, each value in the right columns is “n_(1m)−n₁₀”; in the line of “When n₁<n₁₀, n_(1m)=”, each value in the right columns is “n₁₀−n_(1m)”; in the line of “When k₁≧k₁₀,k_(1m)”, each value in the right columns is “k_(1m)−k₁₀”; in the line of “When k₁<k₁₀, k_(1m)=”, each value in the right columns is “k₁₀−k_(1m)”; in the line of “When d₁≧d₁₀, d_(1m) (nm) =”, each value (unit: nm) in the right columns is “d_(1m)−d₁₀”; in the line of “When d_(1<d) ₁₀, d_(1m) (nm) =”, each value (unit: nm) in the right columns is “d₁₀−d_(1m)”; in the line of “When n₂≧n₂₀, n_(2m)=”, each value in the right columns is “n_(2m)−n₂₀”; in the line of “When n₂<n₂₀, n_(2m)=”, each value in the right columns is “n₂₀−n_(2m)”; in the line of “When k₂≧k₂₀, k_(2m)=”, each value in the right columns is “k_(2m)−k₂₀”; in the line of “When k₂<k₂₀, k_(2m)=”, each value in the right columns is “k₂₀−k_(2m)”; in the line of “When d₂≧d₂₀, d_(2m) (nm) =”, each value (unit: nm) in the right columns is “d_(2m)−d₂₀”; and in the line of “When d₂<d₂₀, d_(2m) (nm) =”, each value (unit: nm) in the right columns is “d₂₀−d_(2m)”. 0.93 ≦ NA ≦ 1.0 2 ≦ T ≦ 15 1/35 Case 1-01 1-02 1-03 1-04 1-05 n₁₀ 2.0730 1.8547 1.8612 1.8596 1.7706 k₁₀ 0.1156 0.1676 0.1279 0.0953 0.0916 d₁₀ (nm) 23.93 29.84 20.21 19.98 91.02 n₂₀ 2.6749 2.1886 1.8193 1.8569 1.9614 k₂₀ 1.5696 0.6118 0.4029 0.3274 0.4555 d₂₀ (nm) 9.886 59.76 139.99 190.30 69.22 When n₁ ≧ n₁₀, n_(1m) = 0.0910 0.0882 0.0964 0.0950 0.0763 When n₁ < n₁₀, n_(1m) = 0.872 0.0704 0.0762 0.0765 0.0467 When k₁ ≧ k₁₀, k_(1m) = 0.819 0.0750 0.0869 0.0875 0.0772 When k₁ < k₁₀, k_(1m) = 0.0960 0.0840 0.0907 0.0915 0.0546 When d₁ ≧ d₁₀, d_(1m) 4.108 7.919 8.786 9.587 17.28 (nm) = When d₁ < d₁₀, d_(1m) 3.280 5.652 6.074 6.698 8.396 (nm) = When n₂ ≧ n₂₀, n_(2m) = 0.2209 0.1796 0.1515 0.1552 0.1445 When n₂ < n₂₀, n_(2m) = 0.2126 0.1920 0.1780 0.1777 0.1565 When k₂ ≧ k₂₀, k_(2m) = 0.2324 0.2171 0.1921 0.1983 0.1809 When k₂ < k₂₀, k_(2m) = 0.1960 0.1512 0.1220 0.1107 0.1235 When d₂ ≧ d₂₀, d_(2m) 1.175 13.99 ∞ ∞ 9.907 (nm) = When d₂ < d₂₀, d_(2m) 1.606 9.166 63.12 76.29 9.171 (nm) = 0.93 ≦ NA ≦ 1.0 2 ≦ T ≦ 15 Case 1-06 1-07 1-08 1-09 1-10 n₁₀ 1.7660 1.7540 1.7206 1.7312 1.7318 k₁₀ 0.0861 0.0810 0.0766 0.0743 0.0746 d₁₀ (nm) 89.67 89.26 163.7 158.4 156.0 n₂₀ 1.8683 1.7976 2.0073 1.9328 1.8226 k₂₀ 0.3142 0.2441 0.9100 0.4029 0.2736 d₂₀ (nm) 129.4 193.6 15.11 69.39 132.3 When n₁ ≧ 0.0725061 0.0712122 0.0876196 0.0743347 0.0699963 n₁₀, n_(1m) = When n₁ < 0.0454077 0.0429834 0.0318030 0.0375427 0.0339148 n₁₀, n_(1m) = When k₁ ≧ 0.0772620 0.0743579 0.0711646 0.0773767 0.0733899 k₁₀, k_(1m) = When k₁ < 0.0551843 0.0575049 0.0410327 0.0412244 0.0408972 k₁₀, k_(1m) = When d₁ ≧ 18.782 23.348 40.469 35.317 38.161 d₁₀, d_(1m) (nm) = When d₁ < 8.456 8.860 9.958 10.342 9.052 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1498401 0.1584961 0.1682336 0.1348816 0.1376196 n₂₀, n_(2m) = When n₂ < 0.1510144 0.1511060 0.2304688 0.1582874 0.1516028 n₂₀, n_(2m) = When k₂ ≧ 0.2049341 0.2252979 0.1710974 0.1537598 0.1868274 k₂₀, k_(2m) = When k₂ < 0.0962390 0.0820935 0.1771240 0.1169067 0.0881860 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ 3.180 8.501 ∞ d₂₀, d_(2m) (nm) = When d₂ < 17.963 68.303 3.157 8.798 14.016 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 2 ≦ T ≦ 15 2/35 Case 1-11 1-12 1-13 1-14 1-15 n₁₀ 1.7235310 1.7093992 1.7192548 1.7183512 1.7097773 k₁₀ 0.0712769 0.0595462 0.0668813 0.0690717 0.0638868 d₁₀ (nm) 155.759 237.275 223.222 220.755 221.916 n₂₀ 1.7500411 5.0249130 1.9244861 1.7884626 1.7175992 k₂₀ 0.2147794 2.4786958 0.3767470 0.2530536 0.2031308 d₂₀ (nm) 197.972 1.776 68.925 134.430 199.649 When n₁ ≧ 0.0687000 0.1022864 0.0758325 0.0727087 0.0697119 n₁₀, n_(1m) = When n₁ < 0.0322229 0.0397070 0.0389722 0.0346118 0.0564209 n₁₀, n_(1m) = When k₁ ≧ 0.0698975 0.0795508 0.0762329 0.0700171 0.0722595 k₁₀, k_(1m) = When k₁ < 0.0415723 0.0393457 0.0338635 0.0308765 0.0321350 k₁₀, k_(1m) = When d₁ ≧ ∞ ∞ ∞ ∞ ∞ d₁₀, d_(1m) (nm) = When d₁ < 9.616 78.998 12.815 10.464 72.402 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1855957 0.5207629 0.1343335 0.1358569 0.2333704 n₂₀, n_(2m) = When n₂ < 0.1501331 0.6523560 0.1703552 0.1672083 0.1693542 n₂₀, n_(2m) = When k₂ ≧ 0.2047339 0.5424048 0.1363831 0.1710950 0.1947412 k₂₀, k_(2m) = When k₂ < 0.0758948 0.5487781 0.1192529 0.0892212 0.0778406 k₂₀, k_(2m) = When d₂ ≧ ∞ 0.325 8.509 ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 29.087 0.351 7.511 11.451 31.610 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 15 < T ≦ 25 Case 2-01 2-02 2-03 2-04 2-05 n₁₀ 1.8890717 1.8040788 1.8569330 1.8246631 1.8713633 k₁₀ 0.2231211 0.2224671 0.1887211 0.1852786 0.1359350 d₁₀ (nm) 31.297 38.783 31.358 29.866 20.765 n₂₀ 2.2536461 3.4285504 2.3482559 2.0267942 1.8449284 k₂₀ 1.9138327 0.7115044 0.7139401 0.6589875 0.4410677 d₂₀ (nm) 8.426 30.090 49.395 61.419 129.533 When n₁ ≧ 0.0874390 0.0895227 0.0867871 0.0862964 0.0944556 n₁₀, n_(1m) = When n₁ < 0.0734485 0.0679480 0.0711365 0.0665735 0.0748743 n₁₀, n_(1m) = When k₁ ≧ 0.0762256 0.0781921 0.0754639 0.0735010 0.0845789 k₁₀, k_(1m) = When k₁ < 0.0847852 0.0785486 0.0835657 0.0812061 0.0905493 k₁₀, k_(1m) = When d₁ ≧ 5.734 7.070 7.156 8.156 8.180 d₁₀, d_(1m) (nm) = When d₁ < 4.509 5.331 5.325 5.713 5.655 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.3151672 0.1904419 0.1878015 0.1893945 0.1561475 n₂₀, n_(2m) = When n₂ < 0.3095313 0.2189575 0.2044202 0.1933459 0.1801416 n₂₀, n_(2m) = When k₂ ≧ 0.3390149 0.2463513 0.2322900 0.2311047 0.2037732 k₂₀, k_(2m) = When k₂ < 0.3041187 0.1774133 0.1676416 0.1568945 0.1265381 k₂₀, k_(2m) = When d₂ ≧ 1.987 2.182 8.431 ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 1.727 2.068 6.571 10.427 56.577 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 15 < T ≦ 25 3/35 Case 2-06 2-07 2-08 2-09 2-10 n₁₀ 1.8537764 1.8773918 1.7913209 1.7961812 1.7719309 k₁₀ 0.1095380 0.0811836 0.1069315 0.0967122 0.0907051 d₁₀ (nm) 19.190 15.072 93.104 91.592 89.644 n₂₀ 1.8083352 1.7885130 2.1120296 2.2985234 1.8982310 k₂₀ 0.3385915 0.2812935 1.5705728 0.5621108 0.3437292 d₂₀ (nm) 190.096 250.952 8.709 49.876 119.550 When n₁ ≧ 0.0970691 0.1116003 0.0785193 0.0746387 0.0710254 n₁₀, n_(1m) = When n₁ < 0.0765894 0.0899463 0.0387744 0.0446472 0.0434424 n₁₀, n_(1m) = When k₁ ≧ 0.0900769 0.1037891 0.0704041 0.0743225 0.0753088 k₁₀, k_(1m) = When k₁ < 0.0922754 0.0811836 0.0518481 0.0540869 0.0544885 k₁₀, k_(1m) = When d₁ ≧ 9.442 8.843 12.610 13.182 16.111 d₁₀, d_(1m) (nm) = When d₁ < 6.479 6.242 5.884 6.895 7.619 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1545007 0.1511414 0.2353479 0.1499768 0.1563330 n₂₀, n_(2m) = When n₂ < 0.1780847 0.1773486 0.2901843 0.1659082 0.1527185 n₂₀, n_(2m) = When k₂ ≧ 0.1867920 0.1671802 0.2909924 0.1840894 0.2027185 k₂₀, k_(2m) = When k₂ < 0.1126624 0.1034778 0.2557275 0.1387183 0.1013330 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ 1.972 5.095 ∞ d₂₀, d_(2m) (nm) = When d₂ < 76.056 121.855 1.716 4.880 15.622 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 15 < T ≦ 25 Case 2-11 2-12 2-13 2-14 2-15 n₁₀ 1.7573553 1.7321027 1.7251448 1.7347815 1.7337052 k₁₀ 0.0844391 0.0771807 0.0782108 0.0789970 0.0782079 d₁₀ (nm) 89.273 89.432 166.474 158.854 156.164 n₂₀ 1.8090385 1.7181480 2.6560327 2.0166404 1.8413069 k₂₀ 0.2599016 0.2108133 2.0752579 0.4697089 0.2975845 d₂₀ (nm) 184.203 254.601 4.495 58.957 122.955 When n₁ ≧ 0.0699780 0.0690137 0.0832959 0.0721558 0.0683105 n₁₀, n_(1m) = When n₁ < 0.0410315 0.0429553 0.0305981 0.0341260 0.0308228 n₁₀, n_(1m) = When k₁ ≧ 0.0723608 0.0738831 0.0729456 0.0742798 0.0703467 k₁₀, k_(1m) = When k₁ < 0.0569189 0.0588879 0.0382764 0.0397253 0.0396069 k₁₀, k_(1m) = When d₁ ≧ 21.648 30.736 32.939 31.041 34.229 d₁₀, d_(1m) (nm) = When d₁ < 8.068 11.084 9.096 8.972 7.917 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1631897 0.1805151 0.3419739 0.1438672 0.1358447 n₂₀, n_(2m) = When n₂ < 0.1518018 0.1480249 0.4228455 0.1667273 0.1539514 n₂₀, n_(2m) = When k₂ ≧ 0.2316443 0.1895435 0.3584204 0.1604712 0.1864905 k₂₀, k_(2m) = When k₂ < 0.0850049 0.0772852 0.3668774 0.1323413 0.0930493 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ 0.935 6.683 16.067 d₂₀, d_(2m) (nm) = When d₂ < 28.321 80.547 0.940 6.845 12.170 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 15 < T ≦ 25 4/35 Case 2-16 2-17 2-18 2-19 2-20 n₁₀ 1.7245076 1.7100620 1.7130788 1.7208745 1.7192161 k₁₀ 0.0739010 0.0639207 0.0658962 0.0708686 0.0720786 d₁₀ (nm) 155.712 155.553 233.281 223.560 220.745 n₂₀ 1.7533528 1.6863114 3.3653368 1.9877972 1.7983405 k₂₀ 0.2275719 0.1891021 2.7431658 0.4366658 0.2740582 d₂₀ (nm) 189.273 256.528 2.501 59.393 125.643 When n₁ ≧ 0.0671997 0.0648059 0.0864783 0.0735278 0.0707983 n₁₀, n_(1m) = When n₁ < 0.0293323 0.0484583 0.0327734 0.0316724 0.0279663 n₁₀, n_(1m) = When k₁ ≧ 0.0671045 0.0758130 0.0759729 0.0721252 0.0662109 k₁₀, k_(1m) = When k₁ < 0.0403235 0.0462146 0.0340283 0.0320007 0.0290771 k₁₀, k_(1m) = When d₁ ≧ ∞ ∞ ∞ ∞ ∞ d₁₀, d_(1m) (nm) = When d₁ < 8.393 77.190 14.014 10.040 8.344 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1922314 0.2150586 0.5377722 0.1455798 0.1365283 n₂₀, n_(2m) = When n₂ < 0.1495129 0.1388159 0.5848816 0.1787549 0.1689587 n₂₀, n_(2m) = When k₂ ≧ 0.2035803 0.1600281 0.4555420 0.1361926 0.1635962 k₂₀, k_(2m) = When k₂ < 0.0785095 0.0698242 0.5466174 0.1332434 0.0942200 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ 0.540 6.979 ∞ d₂₀, d_(2m) (nm) = When d₂ < 26.645 77.267 0.568 6.255 9.480 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 15 < T ≦ 25 Case 2-21 2-22 n₁₀ 1.7100814 1.7028062 k₁₀ 0.0661341 0.0572529 d₁₀ (nm) 221.783 219.613 n₂₀ 1.7179584 1.6741304 k₂₀ 0.2146738 0.1784680 d₂₀ (nm) 191.114 256.090 When n₁ ≧ n₁₀, n_(1m) = 0.0687488 0.0693079 When n₁ < n₁₀, n_(1m) = 0.0502954 0.0688196 When k₁ ≧ k₁₀, k_(1m) = 0.0691418 0.0820508 When k₁ < k₁₀, k_(1m) = 0.0305945 0.0409924 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 70.999 88.114 When n₂ ≧ n₂₀, n_(2m) = 0.2426611 0.2482605 When n₂ < n₂₀, n_(2m) = 0.1649829 0.1563098 When k₂ ≧ k₂₀, k_(2m) = 0.1903906 0.1488330 When k₂ < k₂₀, k_(2m) = 0.0805981 0.0682654 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 28.403 77.092

0.93 ≦ NA ≦ 1.0 25 < T ≦ 35 5/35 Case 3-01 3-02 3-03 3-04 3-05 n₁₀ 1.7462297 1.7852920 1.8064124 1.8761841 1.8732427 k₁₀ 0.2650661 0.2379686 0.2063789 0.1465026 0.1107685 d₁₀ (nm) 38.584 38.995 31.400 22.050 18.888 n₂₀ 1.8811342 3.2453891 2.0415396 1.8871554 1.8328297 k₂₀ 2.5474890 0.8215227 0.7493942 0.4863835 0.3644393 d₂₀ (nm) 6.719 29.990 55.163 118.487 179.928 When n₁ ≧ 0.0769434 0.0851318 0.0833228 0.0906799 0.0968079 n₁₀, n_(1m) = When n₁ < 0.0572766 0.0631555 0.0636389 0.0722144 0.0767554 n₁₀, n_(1m) = When k₁ ≧ 0.0723669 0.0784412 0.0735730 0.0819336 0.0896667 k₁₀, k_(1m) = When k₁ < 0.0683887 0.0725391 0.0776208 0.0882788 0.0940442 k₁₀, k_(1m) = When d₁ ≧ 6.007 6.642 7.652 7.684 8.502 d₁₀, d_(1m) (nm) = When d₁ < 4.614 4.982 5.411 5.323 5.843 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.4302271 0.2240894 0.2116187 0.1663196 0.1573621 n₂₀, n_(2m) = When n₂ < 0.3679468 0.2518726 0.2012903 0.1828064 0.1779138 n₂₀, n_(2m) = When k₂ ≧ 0.4458606 0.2938757 0.2488452 0.2239661 0.1924353 k₂₀, k_(2m) = When k₂ < 0.4071558 0.2090601 0.1700916 0.1317957 0.1155774 k₂₀, k_(2m) = When d₂ ≧ 1.849 2.793 ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 1.467 2.486 8.980 27.259 71.144 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 25 < T ≦ 35 Case 3-06 3-07 3-08 3-09 3-10 n₁₀ 1.8809997 1.8353407 1.8107063 1.7800259 1.7589519 k₁₀ 0.0844859 0.1336488 0.1074834 0.0966903 0.0885227 d₁₀ (nm) 15.636 86.851 91.200 89.638 89.033 n₂₀ 1.8003278 1.6000470 2.5616901 1.9474319 1.8081258 k₂₀ 0.2965881 1.7695220 0.6655713 0.3779800 0.2753975 d₂₀ (nm) 241.202 10.059 40.111 109.424 177.335 When n₁ ≧ 0.1079370 0.0607556 0.0690979 0.0686230 0.0682776 n₁₀, n_(1m) = When n₁ < 0.0864404 0.0389355 0.0418872 0.0404956 0.0386047 n₁₀, n_(1m) = When k₁ ≧ 0.0999365 0.0690637 0.0736157 0.0727942 0.0702844 k₁₀, k_(1m) = When k₁ < 0.0844859 0.0492517 0.0507898 0.0531238 0.0559766 k₁₀, k_(1m) = When d₁ ≧ 8.565 8.192 11.124 13.835 18.997 d₁₀, d_(1m) (nm) = When d₁ < 5.996 4.465 5.820 6.603 7.278 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1541260 0.2930249 0.1702905 0.1595251 0.1700037 n₂₀, n_(2m) = When n₂ < 0.1764270 0.2694421 0.1785315 0.1557800 0.1515491 n₂₀, n_(2m) = When k₂ ≧ 0.1720203 0.3061462 0.2081555 0.2039343 0.2313416 k₂₀, k_(2m) = When k₂ < 0.1058716 0.3107410 0.1597290 0.1070007 0.0874585 k₂₀, k_(2m) = When d₂ ≧ ∞ 2.242 3.729 17.032 ∞ d₂₀, d_(2m) (nm) = When d₂ < 115.662 2.067 3.416 13.482 26.550 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 25 < T ≦ 35 6/35 Case 3-11 3-12 3-13 3-14 3-15 n₁₀ 1.7385561 1.7392392 1.7355979 1.7252169 1.7185486 k₁₀ 0.0961686 0.0859424 0.0828161 0.0770491 0.0788457 d₁₀ (nm) 161.111 158.474 155.982 155.656 229.847 n₂₀ 1.8448216 2.1008270 1.8545146 1.7550901 3.2610273 k₂₀ 2.2148249 0.5469970 0.3232472 0.2413910 4.4183916 d₂₀ (nm) 5.861 50.862 115.179 181.353 1.558 When n₁ ≧ 0.0629041 0.0674426 0.0657153 0.0649670 0.0703149 n₁₀, n_(1m) = When n₁ < 0.0253882 0.0295728 0.0268335 0.0256165 0.0220850 n₁₀, n_(1m) = When k₁ ≧ 0.0668323 0.0703247 0.0663293 0.0632434 0.0659778 k₁₀, k_(1m) = When k₁ < 0.0332373 0.0369910 0.0375085 0.0384131 0.0277441 k₁₀, k_(1m) = When d₁ ≧ 20.469 26.314 30.753 47.147 42.683 d₁₀, d_(1m) (nm) = When d₁ < 5.969 7.197 6.584 7.042 7.213 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.3836914 0.1608313 0.1425024 0.2021899 0.7624707 n₂₀, n_(2m) = When n₂ < 0.3601526 0.1749219 0.1554919 0.1482849 0.7156897 n₂₀, n_(2m) = When k₂ ≧ 0.3156946 0.1638635 0.1816882 0.2013940 0.5159863 k₂₀, k_(2m) = When k₂ < 0.4014783 0.1464551 0.0974072 0.0811682 0.8313574 k₂₀, k_(2m) = When d₂ ≧ 1.291 5.616 13.990 ∞ 0.296 d₂₀, d_(2m) (nm) = When d₂ < 1.319 5.535 10.236 24.868 0.387 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 25 < T ≦ 35 Case 3-16 3-17 3-18 n₁₀ 1.7228369 1.7199449 1.7101979 k₁₀ 0.0769315 0.0760859 0.0687675 d₁₀ (nm) 222.858 220.491 221.639 n₂₀ 2.0210736 1.8037789 1.7165312 k₂₀ 0.5011654 0.2965908 0.2274377 d₂₀ (nm) 52.892 118.134 183.246 When n₁ ≧ n₁₀, n_(1m) = 0.0694470 0.0680798 0.0669543 When n₁ < n₁₀, n_(1m) = 0.0241309 0.0211279 0.0442908 When k₁ ≧ k₁₀, k_(1m) = 0.0659106 0.0606384 0.0650562 When k₁ < k₁₀, k_(1m) = 0.0287354 0.0259912 0.0284460 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 7.193 6.146 69.475 When n₂ ≧ n₂₀, n_(2m) = 0.1641553 0.1445947 0.2568982 When n₂ < n₂₀, n_(2m) = 0.1866541 0.1696143 0.1583826 When k₂ ≧ k₂₀, k_(2m) = 0.1286877 0.1503394 0.1843665 When k₂ < k₂₀, k_(2m) = 0.1457922 0.0990405 0.0813123 When d₂ ≧ d₂₀, d_(2m) (nm) = 6.290 17.763 ∞ When d₂ < d₂₀, d_(2m) (nm) = 5.002 7.323 26.072

0.93 ≦ NA ≦ 1.0 35 < T ≦ 45 7/35 Case 4-01 4-02 4-03 4-04 4-05 n₁₀ 1.8047095 1.8098021 1.8915289 1.8869810 1.8679863 k₁₀ 0.2694194 0.2379756 0.1677232 0.1583242 0.1633407 d₁₀ (nm) 36.421 31.711 26.420 22.598 22.571 n₂₀ 2.9911125 2.1295160 2.1348336 1.9270572 1.8682373 k₂₀ 1.0218786 0.9059492 0.5678980 0.5352831 0.5190358 d₂₀ (nm) 30.087 46.199 93.459 108.068 112.596 When n₁ ≧ 0.0783740 0.0796436 0.0844666 0.0882751 0.0886218 n₁₀, n_(1m) = When n₁ < 0.0596716 0.0601453 0.0678638 0.0698572 0.0685303 n₁₀, n_(1m) = When k₁ ≧ 0.0745129 0.0734180 0.0774060 0.0809473 0.0815564 k₁₀, k_(1m) = When k₁ < 0.0737073 0.0756104 0.0846094 0.0871533 0.0855286 k₁₀, k_(1m) = When d₁ ≧ 5.498 6.440 6.660 7.044 7.454 d₁₀, d_(1m) (nm) = When d₁ < 4.112 4.536 4.657 4.822 5.013 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2827258 0.2488782 0.2107483 0.1777197 0.1733423 n₂₀, n_(2m) = When n₂ < 0.2979187 0.2268945 0.2048547 0.1904834 0.1888538 n₂₀, n_(2m) = When k₂ ≧ 0.3686462 0.2854443 0.2568164 0.2416882 0.2270508 k₂₀, k_(2m) = When k₂ < 0.2566187 0.1919458 0.1493335 0.1371973 0.1348743 k₂₀, k_(2m) = When d₂ ≧ 4.536 ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 3.441 7.549 17.368 24.447 26.666 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 35 < T ≦ 45 Case 4-06 4-07 4-08 4-09 4-10 n₁₀ 1.8894047 1.9013640 1.7974174 1.7778270 1.7589001 k₁₀ 0.1134244 0.0821095 0.1211843 0.1038067 0.0931193 d₁₀ (nm) 18.623 14.880 88.331 88.747 88.775 n₂₀ 1.8513003 1.8106171 2.0615819 1.9023003 1.8006679 k₂₀ 0.3877744 0.3102506 0.7049601 0.4013081 0.2880356 d₂₀ (nm) 170.528 232.433 48.141 106.512 170.885 When n₁ ≧ 0.0963379 0.1102368 0.0634644 0.0662390 0.0666211 n₁₀, n_(1m) = When n₁ < 0.0760864 0.0881848 0.0372961 0.0368457 0.0352515 n₁₀, n_(1m) = When k₁ ≧ 0.0891541 0.1015222 0.0717737 0.0709473 0.0673779 k₁₀, k_(1m) = When k₁ < 0.0954272 0.0821095 0.0478455 0.0509119 0.0546045 k₁₀, k_(1m) = When d₁ ≧ 7.796 7.721 10.517 12.746 16.898 d₁₀, d_(1m) (nm) = When d₁ < 5.302 5.383 5.078 5.794 6.421 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1607617 0.1549121 0.2063647 0.1805920 0.1791541 n₂₀, n_(2m) = When n₂ < 0.1802881 0.1767310 0.1869873 0.1622900 0.1552356 n₂₀, n_(2m) = When k₂ ≧ 0.1971570 0.1718066 0.1998254 0.2205994 0.2284485 k₂₀, k_(2m) = When k₂ < 0.1177856 0.1071863 0.1537903 0.1082654 0.0890710 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ 7.208 ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 68.041 110.260 5.967 13.288 26.909 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 35 < T ≦ 45 8/35 Case 4-11 4-12 4-13 4-14 4-15 n₁₀ 1.7310401 1.7404520 1.7353985 1.7244370 1.7094852 k₁₀ 0.0827558 0.0960720 0.0882239 0.0802890 0.0677575 d₁₀ (nm) 89.146 155.339 154.960 155.397 155.056 n₂₀ 1.7041670 1.9461112 1.8293633 1.7457172 1.6751093 k₂₀ 0.2282102 0.5942640 0.3421815 0.2519901 0.2044537 d₂₀ (nm) 240.157 50.887 110.529 174.646 241.084 When n₁ ≧ 0.0658081 0.0609131 0.0631018 0.0626184 0.0606677 n₁₀, n_(1m) = When n₁ < 0.0392627 0.0232361 0.0219373 0.0213806 0.0433704 n₁₀, n_(1m) = When k₁ ≧ 0.0703406 0.0642554 0.0612463 0.0585852 0.0715100 k₁₀, k_(1m) = When k₁ < 0.0569983 0.0328662 0.0342212 0.0355737 0.0444800 k₁₀, k_(1m) = When d₁ ≧ 25.085 16.735 27.723 38.964 ∞ d₁₀, d_(1m) (nm) = When d₁ < 9.551 5.135 5.136 5.707 18.661 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1952173 0.1934106 0.1684375 0.2170105 0.2364917 n₂₀, n_(2m) = When n₂ < 0.1461670 0.1873682 0.1611987 0.1494055 0.1341663 n₂₀, n_(2m) = When k₂ ≧ 0.1811243 0.1365161 0.1602917 0.1917432 0.1477625 k₂₀, k_(2m) = When k₂ < 0.0805774 0.1412585 0.0980115 0.0826819 0.0722742 k₂₀, k_(2m) = When d₂ ≧ ∞ 6.877 15.552 ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 77.061 5.982 8.340 24.666 73.559 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 35 < T ≦ 45 Case 4-16 4-17 4-18 4-19 4-20 n₁₀ 1.7305468 1.7234847 1.7196555 1.7094719 1.7026367 k₁₀ 0.1083688 0.0859582 0.0809985 0.0713058 0.0605694 d₁₀ (nm) 224.105 219.529 219.492 221.454 219.016 n₂₀ 3.7612310 1.8940064 1.7865237 1.7085534 1.6670562 k₂₀ 9.7520181 0.5381566 0.3130643 0.2375210 0.1929642 d₂₀ (nm) 0.557 52.122 112.555 175.858 239.742 When n₁ ≧ 0.0498926 0.0642505 0.0656738 0.0636218 0.0649512 n₁₀, n_(1m) = When n₁ < 0.0031824 0.0153259 0.0138647 0.0294287 0.0615662 n₁₀, n_(1m) = When k₁ ≧ 0.0271924 0.0553479 0.0526111 0.0605078 0.0781384 k₁₀, k_(1m) = When k₁ < 0.0108813 0.0230212 0.0207922 0.0257751 0.0395862 k₁₀, k_(1m) = When d₁ ≧ 12.324 42.526 ∞ ∞ ∞ d₁₀, d_(1m) (nm) = When d₁ < 0.823 4.181 3.891 14.979 80.387 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.4580664 0.1955493 0.1665735 0.2757410 0.2666089 n₂₀, n_(2m) = When n₂ < 1.0705701 0.1254541 0.1755249 0.1566431 0.1466138 n₂₀, n_(2m) = When k₂ ≧ 0.1823242 0.0953308 0.1233594 0.1752612 0.1390967 k₂₀, k_(2m) = When k₂ < 1.8675439 0.1410535 0.1010315 0.0760974 0.0711597 k₂₀, k_(2m) = When d₂ ≧ 0.019 7.428 ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 0.155 3.724 4.890 25.232 73.082 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 45 < T ≦ 55 9/35 Case 5-01 5-02 5-03 5-04 5-05 n₁₀ 1.7952075 1.8907711 1.9054716 1.9347861 1.9562331 k₁₀ 0.2631488 0.1709411 0.1139096 0.0660701 0.1018371 d₁₀ (nm) 28.407 22.060 18.051 14.149 10.504 n₂₀ 1.7975159 1.9054700 1.8637077 1.8512928 1.7371318 k₂₀ 0.9080589 0.5625340 0.4032117 0.3248351 0.3049135 d₂₀ (nm) 49.215 101.512 161.182 218.499 238.789 When n₁ ≧ 0.0796008 0.0882104 0.0968323 0.1120276 0.1430420 n₁₀, n_(1m) = When n₁ < 0.0558337 0.0676855 0.0756775 0.0900916 0.1115369 n₁₀, n_(1m) = When k₁ ≧ 0.0737183 0.0824512 0.0899622 0.1015723 0.1322839 k₁₀, k_(1m) = When k₁ < 0.0714771 0.0859058 0.0970459 0.0660701 0.1018371 k₁₀, k_(1m) = When d₁ ≧ 6.136 6.696 7.231 6.738 5.941 d₁₀, d_(1m) (nm) = When d₁ < 3.959 4.421 4.830 4.663 4.082 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2206628 0.1836475 0.1640088 0.1560229 0.1493176 n₂₀, n_(2m) = When n₂ < 0.2514893 0.2026611 0.1850330 0.1781982 0.1793958 n₂₀, n_(2m) = When k₂ ≧ 0.2648120 0.2363086 0.1980701 0.1765576 0.1456726 k₂₀, k_(2m) = When k₂ < 0.1661694 0.1390979 0.1188672 0.1083618 0.1075342 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 11.142 25.966 67.131 101.947 116.324 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 45 < T ≦ 55 Case 5-06 5-07 5-08 5-09 5-10 n₁₀ 1.7844085 1.7702622 1.7541370 1.7279592 1.7375980 k₁₀ 0.1367381 0.1105738 0.0973387 0.0846136 0.1054836 d₁₀ (nm) 84.299 87.211 88.132 88.943 150.710 n₂₀ 1.7096132 1.8115599 1.7670571 1.6883751 1.7055974 k₂₀ 0.6495191 0.4022198 0.2903421 0.2308596 0.5608974 d₂₀ (nm) 54.242 106.122 167.020 233.281 53.799 When n₁ ≧ 0.0647021 0.0659351 0.0664050 0.0646069 0.0607947 n₁₀, n_(1m) = When n₁ < 0.0336169 0.0333887 0.0319458 0.0381165 0.0178674 n₁₀, n_(1m) = When k₁ ≧ 0.0728796 0.0707520 0.0653967 0.0692603 0.0616235 k₁₀, k_(1m) = When k₁ < 0.0421851 0.0477087 0.0524451 0.0553516 0.0270422 k₁₀, k_(1m) = When d₁ ≧ 9.564 12.156 16.406 23.344 13.595 d₁₀, d_(1m) (nm) = When d₁ < 4.227 5.119 5.747 9.303 3.589 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2254211 0.1928967 0.1889099 0.2061182 0.2563867 n₂₀, n_(2m) = When n₂ < 0.1907227 0.1764453 0.1616943 0.1463477 0.1201587 n₂₀, n_(2m) = When k₂ ≧ 0.1398059 0.1815479 0.2086975 0.1714539 0.0974426 k₂₀, k_(2m) = When k₂ < 0.1320325 0.1038733 0.0888391 0.0812170 0.1216650 k₂₀, k_(2m) = When d₂ ≧ 14.246 ∞ ∞ ∞ 10.184 d₂₀, d_(2m) (nm) = When d₂ < 7.856 11.965 30.548 77.806 4.856 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 45 < T ≦ 55 10/35 Case 5-11 5-12 5-13 5-14 5-15 n₁₀ 1.7329681 1.7221048 1.7083331 1.7220084 1.7182277 k₁₀ 0.0932680 0.0829100 0.0687145 0.0940320 0.0857940 d₁₀ (nm) 153.145 154.966 154.712 214.741 217.589 n₂₀ 1.7707311 1.7249696 1.6656993 1.7051250 1.7452872 k₂₀ 0.3436851 0.2554267 0.2071468 0.5097600 0.3145186 d₂₀ (nm) 107.979 168.643 233.037 53.504 108.615 When n₁ ≧ 0.0625659 0.0612402 0.0592444 0.0643567 0.0658276 n₁₀, n_(1m) = When n₁ < 0.0170984 0.0172632 0.0416833 0.0078064 0.0068054 n₁₀, n_(1m) = When k₁ ≧ 0.0565161 0.0540405 0.0705188 0.0454688 0.0426636 k₁₀, k_(1m) = When k₁ < 0.0297095 0.0318542 0.0432507 0.0149841 0.0129956 k₁₀, k_(1m) = When d₁ ≧ 26.425 34.880 ∞ 35.694 ∞ d₁₀, d_(1m) (nm) = When d₁ < 3.834 4.536 17.051 1.969 1.835 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2299866 0.2362512 0.2473572 0.2585364 0.2705701 n₂₀, n_(2m) = When n₂ < 0.1752441 0.1521826 0.1336328 0.0467419 0.0530518 n₂₀, n_(2m) = When k₂ ≧ 0.1260229 0.1759094 0.1395569 0.0560938 0.0808508 k₂₀, k_(2m) = When k₂ < 0.0941040 0.0829492 0.0726111 0.1239917 0.0993604 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ 10.256 ∞ d₂₀, d_(2m) (nm) = When d₂ < 6.312 26.413 73.432 2.024 2.346 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 45 < T ≦ 55 Case 5-16 5-17 n₁₀ 1.7079026 1.7021324 k₁₀ 0.0731017 0.0613637 d₁₀ (nm) 221.285 218.642 n₂₀ 1.6934483 1.6620357 k₂₀ 0.2412999 0.1957858 d₂₀ (nm) 168.585 230.920 When n₁ ≧ n₁₀, n_(1m) = 0.0611572 0.0632739 When n₁ < n₁₀, n_(1m) = 0.0235156 0.0581824 When k₁ ≧ k₁₀, k_(1m) = 0.0566406 0.0776050 When k₁ < k₁₀, k_(1m) = 0.0230566 0.0386719 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 8.641 78.699 When n₂ ≧ n₂₀, n_(2m) = 0.2946387 0.2760742 When n₂ < n₂₀, n_(2m) = 0.1554272 0.1463647 When k₂ ≧ k₂₀, k_(2m) = 0.1654895 0.1344739 When k₂ < k₂₀, k_(2m) = 0.0676013 0.0719324 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 26.199 53.085

0.93 ≦ NA ≦ 1.0 55 < T ≦ 65 11/35 Case 6-01 6-02 6-03 6-04 6-05 n₁₀ 1.7605068 1.8816347 1.9020430 1.9458467 1.9584022 k₁₀ 0.2771672 0.1829378 0.1268282 0.0703715 0.1032605 d₁₀ (nm) 28.706 20.725 16.538 13.048 10.534 n₂₀ 1.6786286 1.8151288 1.7976518 1.8275971 1.7382432 k₂₀ 0.9008770 0.5496963 0.3935708 0.3251874 0.3086817 d₂₀ (nm) 43.735 99.755 160.685 213.311 229.129 When n₁ ≧ 0.0840430 0.0931677 0.1035986 0.1192371 0.1431311 n₁₀, n_(1m) = When n₁ < 0.0576428 0.0681458 0.0779578 0.0939172 0.1097058 n₁₀, n_(1m) = When k₁ ≧ 0.0662097 0.0857654 0.0958630 0.1068726 0.1305750 k₁₀, k_(1m) = When k₁ < 0.0706262 0.0861902 0.1004041 0.0703715 0.1032605 k₁₀, k_(1m) = When d₁ ≧ 6.461 6.864 7.218 6.428 5.908 d₁₀, d_(1m) (nm) = When d₁ < 4.241 4.337 4.665 4.365 3.988 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2053870 0.1760388 0.1592407 0.1556714 0.1505713 n₂₀, n_(2m) = When n₂ < 0.2197400 0.2099182 0.1887061 0.1809558 0.1813904 n₂₀, n_(2m) = When k₂ ≧ 0.2532373 0.2078381 0.1779785 0.1687073 0.1458105 k₂₀, k_(2m) = When k₂ < 0.1729968 0.1382983 0.1186841 0.1101477 0.1094250 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 9.750 24.367 71.258 104.445 116.852 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 55 < T ≦ 65 Case 6-06 6-07 6-08 6-09 6-10 n₁₀ 1.7915017 1.7682864 1.7517777 1.7257399 1.7391311 k₁₀ 0.1460711 0.1152280 0.1000283 0.0854213 0.1111219 d₁₀ (nm) 82.108 86.246 87.803 88.823 148.271 n₂₀ 1.6599684 1.7730752 1.7495420 1.6774661 1.6415570 k₂₀ 0.6598461 0.3999868 0.2902721 0.2313191 0.5493559 d₂₀ (nm) 47.036 100.473 159.986 224.881 47.977 When n₁ ≧ 0.0707507 0.0678174 0.0671436 0.0642444 0.0613611 n₁₀, n_(1m) = When n₁ < 0.0347034 0.0316797 0.0297241 0.0379114 0.0170081 n₁₀, n_(1m) = When k₁ ≧ 0.0716638 0.0707349 0.0637610 0.0688733 0.0614063 k₁₀, k_(1m) = When k₁ < 0.0419373 0.0459045 0.0509448 0.0544250 0.0258569 k₁₀, k_(1m) = When d₁ ≧ 8.814 11.596 15.946 22.736 12.264 d₁₀, d_(1m) (nm) = When d₁ < 3.999 4.706 5.289 9.347 3.219 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2110352 0.2040027 0.1980566 0.2150256 0.2303101 n₂₀, n_(2m) = When n₂ < 0.1684949 0.1890479 0.1666223 0.1461719 0.0970691 n₂₀, n_(2m) = When k₂ ≧ 0.1438293 0.1667627 0.2003491 0.1648621 0.0994629 k₂₀, k_(2m) = When k₂ < 0.1447302 0.1052173 0.0896777 0.0819421 0.1292871 k₂₀, k_(2m) = When d₂ ≧ 15.339 ∞ ∞ ∞ 12.574 d₂₀, d_(2m) (nm) = When d₂ < 6.489 10.552 32.474 78.570 4.088 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 55 < T ≦ 65 12/35 Case 6-11 6-12 6-13 6-14 6-15 n₁₀ 1.7320844 1.7076855 1.7203924 1.7223192 1.7173463 k₁₀ 0.0968192 0.0689521 0.0842770 0.0985051 0.0890019 d₁₀ (nm) 152.055 154.586 154.911 212.081 216.420 n₂₀ 1.7411899 1.6612710 1.7118542 1.6387426 1.7205682 k₂₀ 0.3409343 0.2081961 0.2561923 0.4904233 0.3116849 d₂₀ (nm) 101.751 223.547 160.544 48.284 102.035 When n₁ ≧ 0.0640808 0.0590295 0.0609424 0.0598975 0.0677930 n₁₀, n_(1m) = When n₁ < 0.0141614 0.0412158 0.0147046 0.0053711 0.0022900 n₁₀, n_(1m) = When k₁ ≧ 0.0532275 0.0702893 0.0510400 0.0410706 0.0340332 k₁₀, k_(1m) = When k₁ < 0.0265625 0.0427490 0.0291602 0.0117297 0.0056226 k₁₀, k_(1m) = When d₁ ≧ 25.992 ∞ 33.192 33.998 50.996 d₁₀, d_(1m) (nm) = When d₁ < 3.082 16.525 3.853 1.301 0.604 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2268713 0.2531177 0.2476831 0.2556775 0.2704236 n₂₀, n_(2m) = When n₂ < 0.1878772 0.1338721 0.1536694 0.0287537 0.0146338 n₂₀, n_(2m) = When k₂ ≧ 0.1099695 0.1355603 0.1692993 0.0485706 0.0433569 k₂₀, k_(2m) = When k₂ < 0.0948242 0.0734631 0.0770691 0.1286780 0.0774121 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ 12.209 ∞ d₂₀, d_(2m) (nm) = When d₂ < 4.972 56.744 27.273 1.327 0.772 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 55 < T ≦ 65 Case 6-16 6-17 n₁₀ 1.7068337 1.7019545 k₁₀ 0.0738736 0.0615388 d₁₀ (nm) 221.446 218.498 n₂₀ 1.6845656 1.6606500 k₂₀ 0.2425094 0.1970435 d₂₀ (nm) 159.621 220.941 When n₁ ≧ n₁₀, n_(1m) = 0.0603540 0.0631677 When n₁ < n₁₀, n_(1m) = 0.0209692 0.0568018 When k₁ ≧ k₁₀, k_(1m) = 0.0545837 0.0777637 When k₁ < k₁₀, k_(1m) = 0.0216589 0.0384106 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 7.750 78.234 When n₂ ≧ n₂₀, n_(2m) = 0.3057288 0.2826660 When n₂ < n₂₀, n_(2m) = 0.1553943 0.1472412 When k₂ ≧ k₂₀, k_(2m) = 0.1625220 0.1326501 When k₂ < k₂₀, k_(2m) = 0.0624280 0.0731104 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 26.805 48.201

0.93 ≦ NA ≦ 1.0 65 < T ≦ 75 13/35 Case 7-01 7-02 7-03 7-04 7-05 n₁₀ 1.7659038 1.8645399 1.8986420 1.9431410 1.8260230 k₁₀ 0.3040912 0.1945245 0.1330684 0.1068639 0.1610409 d₁₀ (nm) 29.683 22.504 17.099 11.420 82.141 n₂₀ 1.6951746 1.8232494 1.7981378 1.7406778 1.8123655 k₂₀ 1.0159152 0.5745287 0.4053118 0.3159076 0.8416018 d₂₀ (nm) 32.660 88.735 150.314 217.432 29.750 When n₁ ≧ 0.0851306 0.0913562 0.1021387 0.1343896 0.0697156 n₁₀, n_(1m) = When n₁ < 0.0579541 0.0649255 0.0759912 0.1029980 0.0329614 n₁₀, n_(1m) = When k₁ ≧ 0.0588293 0.0796277 0.0923560 0.1221460 0.0674365 k₁₀, k_(1m) = When k₁ < 0.0718896 0.0854541 0.0996875 0.1068639 0.0435559 k₁₀, k_(1m) = When d₁ ≧ 5.966 7.118 7.275 6.222 7.298 d₁₀, d_(1m) (nm) = When d₁ < 4.222 4.395 4.641 4.200 3.443 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2227673 0.1853540 0.1622253 0.1538269 0.2762463 n₂₀, n_(2m) = When n₂ < 0.2074731 0.2178162 0.1908838 0.1813525 0.2757544 n₂₀, n_(2m) = When k₂ ≧ 0.3106860 0.2340100 0.1838708 0.1497839 0.2030774 k₂₀, k_(2m) = When k₂ < 0.2037939 0.1485229 0.1235767 0.1116138 0.1923645 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ 12.449 d₂₀, d_(2m) (nm) = When d₂ < 7.750 24.931 70.207 113.565 5.408 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 65 < T ≦ 75 Case 7-06 7-07 7-08 7-09 7-10 n₁₀ 1.7771488 1.7544343 1.7270080 1.7474077 1.7344421 k₁₀ 0.1183021 0.1010010 0.0859818 0.1187907 0.0986199 d₁₀ (nm) 86.874 88.257 88.900 148.872 153.031 n₂₀ 1.8193233 1.7618403 1.6808707 1.6925268 1.7617910 k₂₀ 0.4301648 0.3008540 0.2360835 0.6251022 0.3597954 d₂₀ (nm) 86.325 147.888 214.142 34.244 89.143 When n₁ ≧ 0.0673694 0.0664294 0.0644080 0.0590649 0.0632410 n₁₀, n_(1m) = When n₁ < 0.0307617 0.0294727 0.0379211 0.0149548 0.0133545 n₁₀, n_(1m) = When k₁ ≧ 0.0672144 0.0623938 0.0685620 0.0548840 0.0510083 k₁₀, k_(1m) = When k₁ < 0.0467444 0.0514600 0.0549805 0.0255261 0.0262878 k₁₀, k_(1m) = When d₁ ≧ 10.761 15.121 22.543 10.466 24.985 d₁₀, d_(1m) (nm) = When d₁ < 4.433 5.189 9.219 2.761 2.901 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2196216 0.2049475 0.2147473 0.2786914 0.2464575 n₂₀, n_(2m) = When n₂ < 0.1907739 0.1643323 0.1459814 0.1244519 0.1858276 n₂₀, n_(2m) = When k₂ ≧ 0.1969482 0.2144763 0.1668457 0.1106995 0.1237866 k₂₀, k_(2m) = When k₂ < 0.1161511 0.0943396 0.0836194 0.1556311 0.1032104 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ 9.505 ∞ d₂₀, d_(2m) (nm) = When d₂ < 10.265 27.730 76.727 3.667 4.914 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 65 < T ≦ 75 14/35 Case 7-11 7-12 7-13 7-14 7-15 n₁₀ 1.7082851 1.7212227 1.7256274 1.7180408 1.7074443 k₁₀ 0.0693971 0.0845898 0.1038247 0.0895343 0.0742263 d₁₀ (nm) 154.668 155.411 212.824 218.202 221.707 n₂₀ 1.6632564 1.7183974 1.6530934 1.7315716 1.6896767 k₂₀ 0.2120421 0.2642962 0.5317369 0.3280557 0.2496384 d₂₀ (nm) 213.175 149.129 36.133 89.506 148.627 When n₁ ≧ 0.0593945 0.0606384 0.0541980 0.0647742 0.0609387 n₁₀, n_(1m) = When n₁ < 0.0413879 0.0149182 0.0029968 0.0021960 0.0208508 n₁₀, n_(1m) = When k₁ ≧ 0.0699487 0.0507495 0.0335364 0.0342871 0.0542102 k₁₀, k_(1m) = When k₁ < 0.0433142 0.0298535 0.0082080 0.0055542 0.0221802 k₁₀, k_(1m) = When d₁ ≧ ∞ 32.689 15.980 48.365 ∞ d₁₀, d_(1m) (nm) = When d₁ < 16.649 3.913 0.723 0.594 7.641 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2553577 0.2564221 0.2715186 0.1988367 0.3137769 n₂₀, n_(2m) = When n₂ < 0.1341199 0.1522119 0.0214917 0.0208643 0.1570667 n₂₀, n_(2m) = When k₂ ≧ 0.1361841 0.1775061 0.0327844 0.0526038 0.1632751 k₂₀, k_(2m) = When k₂ < 0.0749841 0.0809204 0.1462024 0.0801404 0.0667383 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ 9.604 ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 57.367 24.447 0.813 0.826 24.310 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 65 < T ≦ 75 Case 7-16 n₁₀ 1.7023147 k₁₀ 0.0619030 d₁₀ (nm) 218.598 n₂₀ 1.6620389 k₂₀ 0.2005572 d₂₀ (nm) 210.752 When n₁ ≧ n₁₀, n_(1m) = 0.0637036 When n₁ < n₁₀, n_(1m) = 0.0577161 When k₁ ≧ k₁₀, k_(1m) = 0.0772327 When k₁ < k₁₀, k_(1m) = 0.0389124 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ When d₁ < d₁₀, d_(1m) (nm) = 78.427 When n₂ ≧ n₂₀, n_(2m) = 0.2845728 When n₂ < n₂₀, n_(2m) = 0.1478259 When k₂ ≧ k₂₀, k_(2m) = 0.1321912 When k₂ < k₂₀, k_(2m) = 0.0745581 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ When d₂ < d₂₀, d_(2m) (nm) = 48.632

0.93 ≦ NA ≦ 1.0 75 < T ≦ 85 15/35 Case 8-01 8-02 8-03 8-04 8-05 n₁₀ 1.7563588 1.8511230 1.8843188 1.9287462 1.8353218 k₁₀ 0.3324096 0.2092311 0.1443736 0.1105115 0.1759033 d₁₀ (nm) 35.374 25.991 18.736 12.655 87.389 n₂₀ 1.9274523 1.9063465 1.8018968 1.7494498 2.1171648 k₂₀ 1.4642575 0.6506745 0.4300566 0.3311673 1.3140425 d₂₀ (nm) 17.251 73.686 139.851 205.772 13.979 When n₁ ≧ 0.0785156 0.0867322 0.0972815 0.1243994 0.0679163 n₁₀, n_(1m) = When n₁ < 0.0545728 0.0619702 0.0719873 0.0956885 0.0326843 n₁₀, n_(1m) = When k₁ ≧ 0.0474365 0.0710938 0.0861206 0.1128003 0.0573657 k₁₀, k_(1m) = When k₁ < 0.0515906 0.0859790 0.0958850 0.1105115 0.0462488 k₁₀, k_(1m) = When d₁ ≧ 5.195 7.048 7.475 6.554 6.786 d₁₀, d_(1m) (nm) = When d₁ < 4.054 4.401 4.771 4.433 3.439 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.3717346 0.2089124 0.1658667 0.1550732 0.3935315 n₂₀, n_(2m) = When n₂ < 0.2566504 0.2226855 0.1899609 0.1803442 0.3930750 n₂₀, n_(2m) = When k₂ ≧ 0.3327271 0.2900549 0.1962512 0.1555261 0.4058423 k₂₀, k_(2m) = When k₂ < 0.2814465 0.1644043 0.1285254 0.1140686 0.2980408 k₂₀, k_(2m) = When d₂ ≧ 7.242 ∞ ∞ ∞ 4.246 d₂₀, d_(2m) (nm) = When d₂ < 5.453 18.064 63.635 86.244 4.110 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 75 < T ≦ 85 Case 8-06 8-07 8-08 8-09 8-10 n₁₀ 1.7950810 1.7627960 1.7313791 1.7608801 1.7394221 k₁₀ 0.1221034 0.1022278 0.0877850 0.1266208 0.0996664 d₁₀ (nm) 88.670 88.862 88.999 153.509 155.305 n₂₀ 1.9787137 1.8048095 1.6945552 1.9275665 1.8479873 k₂₀ 0.5126318 0.3274205 0.2478313 0.9887124 0.4176577 d₂₀ (nm) 67.257 133.479 202.902 15.987 72.839 When n₁ ≧ 0.0661450 0.0654504 0.0644836 0.0595581 0.0618579 n₁₀, n_(1m) = When n₁ < 0.0313049 0.0305920 0.0369946 0.0131787 0.0145801 n₁₀, n_(1m) = When k₁ ≧ 0.0629285 0.0615845 0.0676172 0.0466980 0.0504663 k₁₀, k_(1m) = When k₁ < 0.0495715 0.0531104 0.0563220 0.0260303 0.0287866 k₁₀, k_(1m) = When d₁ ≧ 9.764 13.747 21.746 9.118 15.633 d₁₀, d_(1m) (nm) = When d₁ < 4.261 5.184 8.521 2.425 3.180 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1949426 0.2017102 0.2072998 0.3193018 0.1671875 n₂₀, n_(2m) = When n₂ < 0.1905188 0.1606116 0.1458716 0.3499829 0.1826196 n₂₀, n_(2m) = When k₂ ≧ 0.2324365 0.2397180 0.1749133 0.1658679 0.1587329 k₂₀, k_(2m) = When k₂ < 0.1375964 0.1005615 0.0861584 0.2502869 0.1212964 k₂₀, k_(2m) = When d₂ ≧ 11.495 ∞ ∞ 4.383 10.247 d₂₀, d_(2m) (nm) = When d₂ < 10.836 22.009 72.908 4.573 5.928 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 75 < T ≦ 85 16/35 Case 8-11 8-12 8-13 8-14 8-15 n₁₀ 1.7245671 1.7098549 1.7314445 1.7204815 1.7093097 k₁₀ 0.0857616 0.0711157 0.1087664 0.0894136 0.0755678 d₁₀ (nm) 155.774 154.844 218.242 220.453 221.580 n₂₀ 1.7414131 1.6689951 1.7862714 1.7885409 1.7021793 k₂₀ 0.2835597 0.2212317 0.7962122 0.3769446 0.2655853 d₂₀ (nm) 136.971 203.148 18.394 74.763 137.968 When n₁ ≧ 0.0606116 0.0594177 0.0511572 0.0630383 0.0616895 n₁₀, n_(1m) = When n₁ < 0.0160718 0.0405298 0.0015906 0.0046008 0.0190027 n₁₀, n_(1m) = When k₁ ≧ 0.0512000 0.0681555 0.0265222 0.0380334 0.0531970 k₁₀, k_(1m) = When k₁ < 0.0318042 0.0441748 0.0055811 0.0106726 0.0222839 k₁₀, k_(1m) = When d₁ ≧ 31.466 ∞ 12.528 43.958 ∞ d₁₀, d_(1m) (nm) = When d₁ < 4.121 15.106 0.395 1.266 6.425 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2472620 0.2537585 0.2927209 0.1651587 0.3131763 n₂₀, n_(2m) = When n₂ < 0.1515137 0.1338916 0.0324463 0.1927209 0.1573535 n₂₀, n_(2m) = When k₂ ≧ 0.1857507 0.1391650 0.0225110 0.0800281 0.1575110 k₂₀, k_(2m) = When k₂ < 0.0929626 0.0771277 0.2211072 0.1242517 0.0780078 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ 5.339 11.602 ∞ d₂₀, d_(2m) (nm) = When d₂ < 20.462 30.027 0.679 1.920 20.783 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 75 < T ≦ 85 Case 8-16 n₁₀ 1.7029357 k₁₀ 0.0634027 d₁₀ (nm) 218.717 n₂₀ 1.6626290 k₂₀ 0.2083407 d₂₀ (nm) 201.624 When n₁ ≧ n₁₀, n_(1m) = 0.0636414 When n₁ < n₁₀, n_(1m) = 0.0583008 When k₁ ≧ k₁₀, k_(1m) = 0.0748706 When k₁ < k₁₀, k_(1m) = 0.0393835 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ When d₁ < d₁₀, d_(1m) (nm) = 77.927 When n₂ ≧ n₂₀, n_(2m) = 0.2855005 When n₂ < n₂₀, n_(2m) = 0.1457190 When k₂ ≧ k₂₀, k_(2m) = 0.1308728 When k₂ < k₂₀, k_(2m) = 0.0761951 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ When d₂ < d₂₀, d_(2m) (nm) = 30.691

0.93 ≦ NA ≦ 1.0 85 < T ≦ 95 17/35 Case 9-01 9-02 9-03 9-04 9-05 n₁₀ 1.7289685 1.8452520 1.8988873 1.8877112 1.9267904 k₁₀ 0.3314086 0.2255929 0.1475831 0.1535471 0.0947520 d₁₀ (nm) 44.247 26.855 20.944 19.669 15.612 n₂₀ 5.1412592 1.9037614 1.8997324 1.8220692 1.8437835 k₂₀ 5.4454539 0.7221490 0.4893775 0.4687151 0.3693724 d₂₀ (nm) 1.484 66.898 122.094 129.650 183.529 When n₁ ≧ 0.0720642 0.0846375 0.0908557 0.0941199 0.1057788 n₁₀, n_(1m) = When n₁ < 0.0586633 0.0599194 0.0695422 0.0700256 0.0833301 n₁₀, n_(1m) = When k₁ ≧ 0.0476758 0.0671912 0.0784241 0.0821533 0.0936853 k₁₀, k_(1m) = When k₁ < 0.0453955 0.0846301 0.0932227 0.0950391 0.0947520 k₁₀, k_(1m) = When d₁ ≧ 4.793 6.632 6.977 7.158 6.784 d₁₀, d_(1m) (nm) = When d₁ < 4.550 4.181 4.538 4.591 4.595 d₁₀, d_(1m) (nm) = When n₂ ≧ 1.1337476 0.2089880 0.1771472 0.1681067 0.1597327 n₂₀, n_(2m) = When n₂ < 1.1352368 0.2210583 0.1914734 0.1898022 0.1792920 n₂₀, n_(2m) = When k₂ ≧ 0.8630298 0.2922070 0.2387195 0.2089600 0.1845532 k₂₀, k_(2m) = When k₂ < 1.0641260 0.1706519 0.1365454 0.1328516 0.1184924 k₂₀, k_(2m) = When d₂ ≧ 0.527 ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 0.379 14.827 35.595 55.475 73.593 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 85 < T ≦ 95 Case 9-06 9-07 9-08 9-09 9-10 n₁₀ 1.9311024 1.9377300 1.8321358 1.8340055 1.7711711 k₁₀ 0.1132645 0.0882760 0.1783607 0.1409526 0.1059247 d₁₀ (nm) 13.318 11.094 92.959 90.549 89.053 n₂₀ 1.7624681 1.7478213 3.8484718 2.7003837 1.8505388 k₂₀ 0.3523973 0.2927773 3.7040697 0.6754163 0.3612112 d₂₀ (nm) 195.472 252.908 2.442 40.010 121.432 When n₁ ≧ 0.1192212 0.1370740 0.0646143 0.0640906 0.0642236 n₁₀, n_(1m) = When n₁ < 0.0917322 0.1105750 0.0342749 0.0314893 0.0302832 n₁₀, n_(1m) = When k₁ ≧ 0.1074902 0.1261145 0.0537451 0.0578040 0.0599036 k₁₀, k_(1m) = When k₁ < 0.1132645 0.0882760 0.0424707 0.0518921 0.0535962 k₁₀, k_(1m) = When d₁ ≧ 6.457 6.373 6.914 7.622 12.267 d₁₀, d_(1m) (nm) = When d₁ < 4.357 4.610 3.684 3.553 4.848 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1546643 0.1575439 0.8768713 0.1918994 0.1964832 n₂₀, n_(2m) = When n₂ < 0.1796094 0.1753381 0.8006409 0.2240674 0.1600745 n₂₀, n_(2m) = When k₂ ≧ 0.1600171 0.1481116 0.9241052 0.2582642 0.2396375 k₂₀, k_(2m) = When k₂ < 0.1162842 0.1079150 0.8229163 0.1769763 0.1063232 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ 0.854 4.088 ∞ d₂₀, d_(2m) (nm) = When d₂ < 79.416 123.401 0.636 4.130 18.235 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 85 < T ≦ 95 18/35 Case 9-11 9-12 9-13 9-14 9-15 n₁₀ 1.7360863 1.7197908 1.7660895 1.7439719 1.7279356 k₁₀ 0.0911204 0.0799131 0.1278221 0.1032091 0.0888807 d₁₀ (nm) 88.900 88.028 159.319 156.425 155.640 n₂₀ 1.7067614 1.6618119 4.3535883 1.9650733 1.7635448 k₂₀ 0.2637604 0.2120965 4.0919379 0.4980866 0.3088945 d₂₀ (nm) 192.941 257.777 1.526 59.654 126.749 When n₁ ≧ 0.0638330 0.0656592 0.0584094 0.0605725 0.0597937 n₁₀, n_(1m) = When n₁ < 0.0350525 0.0511377 0.0141675 0.0144019 0.0151697 n₁₀, n_(1m) = When k₁ ≧ 0.0655725 0.0796582 0.0444238 0.0479309 0.0488806 k₁₀, k_(1m) = When k₁ < 0.0571082 0.0562439 0.0291333 0.0298792 0.0316455 k₁₀, k_(1m) = When d₁ ≧ 20.203 29.484 8.864 13.240 29.427 d₁₀, d_(1m) (nm) = When d₁ < 7.546 13.995 2.626 3.070 3.728 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2021118 0.1991125 0.8787561 0.1681836 0.2119507 n₂₀, n_(2m) = When n₂ < 0.1462866 0.1442920 0.9231299 0.1869897 0.1520459 n₂₀, n_(2m) = When k₂ ≧ 0.1808130 0.1431189 0.6934375 0.1601843 0.1789355 k₂₀, k_(2m) = When k₂ < 0.0887085 0.0763562 1.0372803 0.1399158 0.0974194 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ 0.372 7.404 ∞ d₂₀, d_(2m) (nm) = When d₂ < 33.573 81.452 0.412 5.841 17.631 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 85 < T ≦ 95 Case 9-16 9-17 9-18 9-19 9-20 n₁₀ 1.7114085 1.7070625 1.7347333 1.7230132 1.7111302 k₁₀ 0.0740744 0.0641745 0.1100034 0.0920219 0.0786417 d₁₀ (nm) 154.740 153.245 225.621 220.898 221.002 n₂₀ 1.6716288 1.6634512 4.2666617 1.8597675 1.7127614 k₂₀ 0.2338686 0.1921909 4.0109081 0.4430799 0.2870105 d₂₀ (nm) 194.347 254.410 1.346 63.229 128.848 When n₁ ≧ 0.0584460 0.0617004 0.0476050 0.0625842 0.0612109 n₁₀, n_(1m) = When n₁ < 0.0344641 0.0580713 0.0023816 0.0042908 0.0142651 n₁₀, n_(1m) = When k₁ ≧ 0.0648608 0.0822974 0.0260010 0.0346094 0.0487000 k₁₀, k_(1m) = When k₁ < 0.0443103 0.0454309 0.0085535 0.0110950 0.0198962 k₁₀, k_(1m) = When d₁ ≧ ∞ ∞ 11.896 40.249 ∞ d₁₀, d_(1m) (nm) = When d₁ < 12.619 28.388 0.607 1.162 4.464 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2496582 0.2459351 0.6243091 0.1726245 0.1878369 n₂₀, n_(2m) = When n₂ < 0.1333875 0.1351294 0.9687061 0.0992944 0.1569519 n₂₀, n_(2m) = When k₂ ≧ 0.1378833 0.1234607 0.1299146 0.0597583 0.1385217 k₂₀, k_(2m) = When k₂ < 0.0791492 0.0682422 1.1651697 0.1405090 0.0853906 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ 0.085 8.765 ∞ d₂₀, d_(2m) (nm) = When d₂ < 27.415 76.157 0.398 1.778 18.221 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 85 < T ≦ 95 19/35 Case 9-21 9-22 9-23 n₁₀ 1.7035342 1.7027484 1.7001226 k₁₀ 0.0659797 0.0572097 0.0542621 d₁₀ (nm) 218.617 216.627 277.695 n₂₀ 1.6615801 1.6695991 1.6762439 k₂₀ 0.2195726 0.1821496 0.1770375 d₂₀ (nm) 193.289 251.116 248.521 When n₁ ≧ n₁₀, n_(1m) = 0.0623376 0.0678125 0.0799658 When n₁ < n₁₀, n_(1m) = 0.0535010 0.0686682 0.1014282 When k₁ ≧ k₁₀, k_(1m) = 0.0710327 0.0861914 0.0881311 When k₁ < k₁₀, k_(1m) = 0.0393738 0.0410693 0.0390344 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 76.543 86.880 145.024 When n₂ ≧ n₂₀, n_(2m) = 0.2919910 0.2682678 0.2949561 When n₂ < n₂₀, n_(2m) = 0.1427539 0.1485803 0.2037488 When k₂ ≧ k₂₀, k_(2m) = 0.1267480 0.1253760 0.1874854 When k₂ < k₂₀, k_(2m) = 0.0781458 0.0670801 0.0719922 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 27.736 75.187 78.004 0.93 ≦ NA ≦ 1.0 95 < T ≦ 105 Case 10-01 10-02 10-03 10-04 10-05 n₁₀ 1.8593145 1.9010800 1.9204218 1.9438629 1.8201241 k₁₀ 0.2496127 0.1636004 0.1149718 0.1088618 0.1437532 d₁₀ (nm) 26.535 19.815 15.218 10.610 89.353 n₂₀ 1.9155767 1.8411706 1.7975616 1.7190727 2.3681639 k₂₀ 0.8329906 0.5121692 0.3794158 0.2999844 0.7410526 d₂₀ (nm) 59.684 120.535 182.059 250.015 43.212 When n₁ ≧ 0.0816284 0.0922021 0.1074707 0.1413159 0.0582056 n₁₀, n_(1m) = When n₁ < 0.0571204 0.0681042 0.0820581 0.1125684 0.0261719 n₁₀, n_(1m) = When k₁ ≧ 0.0635767 0.0796045 0.0956897 0.1313098 0.0522705 k₁₀, k_(1m) = When k₁ < 0.0810986 0.0930249 0.1101465 0.1088618 0.0503638 k₁₀, k_(1m) = When d₁ ≧ 5.728 6.581 6.674 6.005 7.527 d₁₀, d_(1m) (nm) = When d₁ < 3.587 4.159 4.431 4.306 3.047 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2110999 0.1699976 0.1589343 0.1579346 0.2155920 n₂₀, n_(2m) = When n₂ < 0.2273865 0.1928259 0.1800378 0.1714307 0.2110571 n₂₀, n_(2m) = When k₂ ≧ 0.3068860 0.2171289 0.1741077 0.1426062 0.2751843 k₂₀, k_(2m) = When k₂ < 0.1756396 0.1352295 0.1186548 0.1082129 0.1794531 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ 5.764 d₂₀, d_(2m) (nm) = When d₂ < 12.732 34.057 73.872 121.675 5.150 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 95 < T ≦ 105 20/35 Case 10-06 10-07 10-08 10-09 10-10 n₁₀ 1.7719135 1.7372876 1.7204595 1.7445424 1.7286821 k₁₀ 0.1119845 0.0953951 0.0830085 0.1106490 0.0936244 d₁₀ (nm) 88.526 88.555 87.798 155.347 154.936 n₂₀ 1.8420973 1.7021944 1.6574450 1.9643384 1.7602486 k₂₀ 0.3885265 0.2779787 0.2209480 0.5665503 0.3317476 d₂₀ (nm) 115.256 185.353 249.744 53.939 119.649 When n₁ ≧ 0.0621143 0.0621887 0.0641711 0.0553430 0.0576575 n₁₀, n_(1m) = When n₁ < 0.0270313 0.0323645 0.0489441 0.0092163 0.0110840 n₁₀, n_(1m) = When k₁ ≧ 0.0562158 0.0627490 0.0779517 0.0376074 0.0417603 k₁₀, k_(1m) = When k₁ < 0.0520581 0.0564075 0.0555945 0.0251758 0.0276855 k₁₀, k_(1m) = When d₁ ≧ 11.132 18.518 24.475 10.852 25.311 d₁₀, d_(1m) (nm) = When d₁ < 4.165 6.637 12.657 1.885 2.611 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1959729 0.2028772 0.1967151 0.1949902 0.2380078 n₂₀, n_(2m) = When n₂ < 0.1629126 0.1469397 0.1441541 0.1889697 0.1549414 n₂₀, n_(2m) = When k₂ ≧ 0.2347974 0.1750098 0.1399744 0.1001758 0.1456445 k₂₀, k_(2m) = When k₂ < 0.1074329 0.0897974 0.0774023 0.1436816 0.0981848 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ 7.077 ∞ d₂₀, d_(2m) (nm) = When d₂ < 17.579 32.188 79.555 4.014 9.652 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 95 < T ≦ 105 Case 10-11 10-12 10-13 10-14 10-15 n₁₀ 1.7117780 1.7072616 1.7114074 1.7035514 1.7027912 k₁₀ 0.0773392 0.0664543 0.0830146 0.0688006 0.0591414 d₁₀ (nm) 154.355 152.987 220.011 218.183 216.340 n₂₀ 1.6664488 1.6597858 1.7075466 1.6565327 1.6669294 k₂₀ 0.2460450 0.2000883 0.3068810 0.2307053 0.1896158 d₂₀ (nm) 186.501 246.239 121.613 185.316 242.803 When n₁ ≧ 0.0563684 0.0596582 0.0593091 0.0598755 0.0652673 n₁₀, n_(1m) = When n₁ < 0.0298474 0.0556995 0.0074023 0.0481897 0.0654077 n₁₀, n_(1m) = When k₁ ≧ 0.0607349 0.0799170 0.0390686 0.0670154 0.0838220 k₁₀, k_(1m) = When k₁ < 0.0430676 0.0448303 0.0134863 0.0384473 0.0405530 k₁₀, k_(1m) = When d₁ ≧ ∞ ∞ ∞ ∞ ∞ d₁₀, d_(1m) (nm) = When d₁ < 9.756 23.688 2.192 28.661 83.384 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2552490 0.2502368 0.2301306 0.3057727 0.2764221 n₂₀, n_(2m) = When n₂ < 0.1325989 0.1345728 0.1592334 0.1419543 0.1480603 n₂₀, n_(2m) = When k₂ ≧ 0.1285986 0.1190894 0.0974548 0.1182935 0.1218213 k₂₀, k_(2m) = When k₂ < 0.0799036 0.0691528 0.0735474 0.0793201 0.0682898 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 26.413 74.134 17.074 26.587 73.152 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 105 < T ≦ 115 21/35 Case 11-01 11-02 11-03 11-04 11-05 n₁₀ 1.8881577 1.9218914 1.9458883 1.9409291 1.7882093 k₁₀ 0.2795127 0.1797398 0.1322078 0.1179060 0.1515662 d₁₀ (nm) 22.871 17.442 13.080 10.849 85.800 n₂₀ 1.7550786 1.7746647 1.7478516 1.7108849 1.7933752 k₂₀ 0.8705815 0.5227186 0.3833699 0.3088835 0.6703287 d₂₀ (nm) 60.032 119.813 181.809 241.776 55.966 When n₁ ≧ 0.0826208 0.0977563 0.1186780 0.1376917 0.0543359 n₁₀, n_(1m) = When n₁ < 0.0520789 0.0682861 0.0872974 0.1088391 0.0162500 n₁₀, n_(1m) = When k₁ ≧ 0.0630823 0.0841675 0.1052368 0.1278345 0.0453015 k₁₀, k_(1m) = When k₁ < 0.0771240 0.0966394 0.1209399 0.1179060 0.0399414 k₁₀, k_(1m) = When d₁ ≧ 4.844 5.864 5.837 5.925 7.044 d₁₀, d_(1m) (nm) = When d₁ < 2.746 3.528 3.770 4.232 1.998 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1779102 0.1610864 0.1553113 0.1599890 0.1976709 n₂₀, n_(2m) = When n₂ < 0.2409973 0.1978687 0.1825439 0.1715320 0.2140332 n₂₀, n_(2m) = When k₂ ≧ 0.2513745 0.1848108 0.1557214 0.1414282 0.1190186 k₂₀, k_(2m) = When k₂ < 0.1529724 0.1289783 0.1162878 0.1089014 0.1251477 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ 22.520 d₂₀, d_(2m) (nm) = When d₂ < 14.459 47.581 76.951 118.169 7.215 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 105 < T ≦ 115 Case 11-06 11-07 11-08 11-09 11-10 n₁₀ 1.7649059 1.7337710 1.7199633 1.7259527 1.7103936 k₁₀ 0.1193411 0.0996522 0.0855558 0.0989978 0.0800216 d₁₀ (nm) 87.339 88.039 87.477 153.714 153.726 n₂₀ 1.7745734 1.6760618 1.6497564 1.7204930 1.6497935 k₂₀ 0.3964773 0.2847568 0.2267213 0.3415865 0.2528816 d₂₀ (nm) 113.800 179.842 241.489 115.571 179.482 When n₁ ≧ 0.0601648 0.0599890 0.0628394 0.0551172 0.0538281 n₁₀, n_(1m) = When n₁ < 0.0211145 0.0296448 0.0487646 0.0042871 0.0282654 n₁₀, n_(1m) = When k₁ ≧ 0.0504663 0.0599475 0.0772742 0.0278052 0.0572974 k₁₀, k_(1m) = When k₁ < 0.0475183 0.0544922 0.0541711 0.0166541 0.0416528 k₁₀, k_(1m) = When d₁ ≧ 10.266 16.506 22.112 22.094 29.214 d₁₀, d_(1m) (nm) = When d₁ < 3.195 5.968 12.188 0.978 9.029 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1995813 0.2097351 0.1798193 0.2563574 0.2736133 n₂₀, n_(2m) = When n₂ < 0.1736548 0.1494116 0.1464758 0.1632507 0.1337610 n₂₀, n_(2m) = When k₂ ≧ 0.1791345 0.1568970 0.1341675 0.0805750 0.1130872 k₂₀, k_(2m) = When k₂ < 0.1012146 0.0889111 0.0780908 0.0849402 0.0789160 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 14.312 35.616 79.447 3.314 27.322 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 105 < T ≦ 115 22/35 Case 11-11 11-12 11-13 n₁₀ 1.7070930 1.7028018 1.7027432 k₁₀ 0.0681638 0.0710148 0.0605235 d₁₀ (nm) 152.585 217.506 215.929 n₂₀ 1.6551703 1.6456663 1.6646615 k₂₀ 0.2055639 0.2376270 0.1950188 d₂₀ (nm) 237.501 177.429 233.713 When n₁ ≧ n₁₀, n_(1m) = 0.0578955 0.0572009 0.0625354 When n₁ < n₁₀, n_(1m) = 0.0537671 0.0422668 0.0608704 When k₁ ≧ k₁₀, k_(1m) = 0.0790588 0.0645129 0.0827734 When k₁ < k₁₀, k_(1m) = 0.0435974 0.0363208 0.0394031 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 20.858 18.787 80.567 When n₂ ≧ n₂₀, n_(2m) = 0.1279260 0.3212610 0.2872583 When n₂ < n₂₀, n_(2m) = 0.1371912 0.1436340 0.1515588 When k₂ ≧ k₂₀, k_(2m) = 0.1138037 0.1091870 0.1188855 When k₂ < k₂₀, k_(2m) = 0.0699854 0.0793604 0.0696228 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 73.529 27.402 72.558 0.93 ≦ NA ≦ 1.0 115 < T ≦ 125 Case 12-01 12-02 12-03 12-04 12-05 n₁₀ 1.8909431 1.9524263 1.9741784 1.9011191 1.7812655 k₁₀ 0.3085424 0.1909748 0.1389140 0.1449022 0.1647646 d₁₀ (nm) 20.418 15.444 11.832 11.795 82.868 n₂₀ 1.5964478 1.7414925 1.7353816 1.6673230 1.6154117 k₂₀ 0.8353138 0.5288169 0.3892797 0.3043383 0.6141968 d₂₀ (nm) 60.909 116.361 176.360 237.538 58.066 When n₁ ≧ 0.0896326 0.1058130 0.1273743 0.1294861 0.0526233 n₁₀, n_(1m) = When n₁ < 0.0482068 0.0693359 0.0898755 0.1018958 0.0089111 n₁₀, n_(1m) = When k₁ ≧ 0.0687769 0.0897180 0.1101831 0.1230750 0.0397290 k₁₀, k_(1m) = When k₁ < 0.0788684 0.1029199 0.1292102 0.1244238 0.0264612 k₁₀, k_(1m) = When d₁ ≧ 4.348 5.029 5.176 6.485 6.077 d₁₀, d_(1m) (nm) = When d₁ < 2.275 2.981 3.260 4.641 1.033 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1653235 0.1570801 0.1545581 0.1637158 0.2122083 n₂₀, n_(2m) = When n₂ < 0.1924231 0.2075879 0.1868823 0.1636792 0.1151331 n₂₀, n_(2m) = When k₂ ≧ 0.1706042 0.1628406 0.1476868 0.1368591 0.0534973 k₂₀, k_(2m) = When k₂ < 0.1411853 0.1262378 0.1172034 0.1087061 0.1078625 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ 22.263 d₂₀, d_(2m) (nm) = When d₂ < 15.932 41.005 77.327 119.056 3.631 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 115 < T ≦ 125 23/35 Case 12-06 12-07 12-08 12-09 12-10 n₁₀ 1.7599364 1.7294022 1.7193592 1.7088052 1.7070991 k₁₀ 0.1268761 0.1028924 0.0869972 0.0815889 0.0689994 d₁₀ (nm) 86.158 87.627 87.259 153.347 152.325 n₂₀ 1.7200975 1.6470339 1.6442041 1.6346844 1.6535493 k₂₀ 0.3928633 0.2862372 0.2301394 0.2563356 0.2091466 d₂₀ (nm) 111.244 173.600 231.990 171.193 227.454 When n₁ ≧ 0.0606738 0.0583850 0.0624988 0.0517444 0.0574902 n₁₀, n_(1m) = When n₁ < 0.0144922 0.0280688 0.0507288 0.0284387 0.0507019 n₁₀, n_(1m) = When k₁ ≧ 0.0425989 0.0573376 0.0776721 0.0554700 0.0798230 k₁₀, k_(1m) = When k₁ < 0.0406250 0.0512256 0.0527991 0.0388428 0.0424304 k₁₀, k_(1m) = When d₁ ≧ 9.315 15.226 20.570 23.760 ∞ d₁₀, d_(1m) (nm) = When d₁ < 2.129 5.657 12.499 8.630 19.101 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2113904 0.2168030 0.1303113 0.0779236 0.1123853 n₂₀, n_(2m) = When n₂ < 0.1965198 0.1502832 0.1490173 0.1347925 0.1407104 n₂₀, n_(2m) = When k₂ ≧ 0.1312354 0.1404419 0.1299280 0.1034583 0.1115356 k₂₀, k_(2m) = When k₂ < 0.0975891 0.0892358 0.0798267 0.0797656 0.0721289 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 8.212 56.813 80.756 28.524 74.263 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 115 < T ≦ 125 Case 12-11 12-12 n₁₀ 1.7021164 1.7030336 k₁₀ 0.0722203 0.0611451 d₁₀ (nm) 217.158 215.722 n₂₀ 1.6379690 1.6657846 k₂₀ 0.2419462 0.1987136 d₂₀ (nm) 168.107 223.276 When n₁ ≧ n₁₀, n_(1m) = 0.0559460 0.0616492 When n₁ < n₁₀, n_(1m) = 0.0369629 0.0571216 When k₁ ≧ k₁₀, k_(1m) = 0.0643591 0.0831226 When k₁ < k₁₀, k_(1m) = 0.0338867 0.0383716 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 15.623 78.766 When n₂ ≧ n₂₀, n_(2m) = 0.1071765 0.1574146 When n₂ < n₂₀, n_(2m) = 0.1467676 0.1563452 When k₂ ≧ k₂₀, k_(2m) = 0.1072412 0.1188721 When k₂ < k₂₀, k_(2m) = 0.0815015 0.0722400 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 28.758 73.194

0.93 ≦ NA ≦ 1.0 125 < T ≦ 135 24/35 Case 13-01 13-02 13-03 13-04 13-05 n₁₀ 1.8737564 1.9697383 1.9916260 1.9141720 1.7868889 k₁₀ 0.3367363 0.2020294 0.1477036 0.1461879 0.1795709 d₁₀ (nm) 20.276 14.764 11.315 11.459 80.605 n₂₀ 1.5133470 1.7299638 1.7257470 1.6683491 1.5409994 k₂₀ 0.8454522 0.5429087 0.3987910 0.3122132 0.6011754 d₂₀ (nm) 55.480 109.268 168.578 226.037 53.925 When n₁ ≧ 0.0919055 0.1108435 0.1324426 0.1321936 0.0477332 n₁₀, n_(1m) = When n₁ < 0.0465112 0.0677783 0.0890894 0.1050525 0.0054248 n₁₀, n_(1m) = When k₁ ≧ 0.0634827 0.0913306 0.1103125 0.1242993 0.0376343 k₁₀, k_(1m) = When k₁ < 0.0777942 0.1046863 0.1330994 0.1263855 0.0172180 k₁₀, k_(1m) = When d₁ ≧ 4.127 4.585 4.757 6.157 5.240 d₁₀, d_(1m) (nm) = When d₁ < 2.100 2.651 2.937 4.469 0.576 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1485144 0.1609766 0.1572363 0.1614685 0.1647119 n₂₀, n_(2m) = When n₂ < 0.1669641 0.2206506 0.1915698 0.1618420 0.0427734 n₂₀, n_(2m) = When k₂ ≧ 0.1498572 0.1556653 0.1444165 0.1361792 0.0323462 k₂₀, k_(2m) = When k₂ < 0.1523499 0.1322424 0.1219958 0.1118262 0.1188306 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ 20.169 d₂₀, d_(2m) (nm) = When d₂ < 11.040 31.054 70.606 112.796 1.698 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 125 < T ≦ 135 Case 13-06 13-07 13-08 13-09 13-10 n₁₀ 1.7600620 1.7276490 1.7199953 1.7084320 1.7077870 k₁₀ 0.1342170 0.1044918 0.0874837 0.0820944 0.0691595 d₁₀ (nm) 85.615 87.663 87.278 153.448 152.438 n₂₀ 1.6974715 1.6338870 1.6452183 1.6304269 1.6574806 k₂₀ 0.3980869 0.2915200 0.2346970 0.2625567 0.2137196 d₂₀ (nm) 104.529 164.129 221.092 160.685 216.250 When n₁ ≧ 0.0556421 0.0573047 0.0630432 0.0509070 0.0582422 n₁₀, n_(1m) = When n₁ < 0.0086938 0.0280566 0.0524658 0.0272729 0.0496997 n₁₀, n_(1m) = When k₁ ≧ 0.0327625 0.0552051 0.0782056 0.0552515 0.0808813 k₁₀, k_(1m) = When k₁ < 0.0328357 0.0492957 0.0525903 0.0375085 0.0423645 k₁₀, k_(1m) = When d₁ ≧ 8.316 14.598 20.258 22.646 ∞ d₁₀, d_(1m) (nm) = When d₁ < 1.229 5.725 12.785 8.439 18.783 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2312317 0.1156555 0.1151941 0.0670740 0.1089307 n₂₀, n_(2m) = When n₂ < 0.2128992 0.1481116 0.1498755 0.1344946 0.1425024 n₂₀, n_(2m) = When k₂ ≧ 0.1020886 0.1348413 0.1299255 0.1027795 0.1131628 k₂₀, k_(2m) = When k₂ < 0.1027185 0.0927148 0.0827966 0.0840479 0.0754407 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 4.085 34.120 79.786 26.736 37.465 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 125 < T ≦ 135 25/35 Case 13-11 13-12 n₁₀ 1.7022055 1.7036940 k₁₀ 0.0725208 0.0612465 d₁₀ (nm) 217.368 215.927 n₂₀ 1.6389178 1.6705104 k₂₀ 0.2487144 0.2029113 d₂₀ (nm) 157.041 212.129 When n₁ ≧ n₁₀, n_(1m) = 0.0559827 0.0624561 When n₁ < n₁₀, n_(1m) = 0.0346814 0.0563831 When k₁ ≧ k₁₀, k_(1m) = 0.0655139 0.0838672 When k₁ < k₁₀, k_(1m) = 0.0329700 0.0384436 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 14.691 78.542 When n₂ ≧ n₂₀, n_(2m) = 0.0987000 0.1459375 When n₂ < n₂₀, n_(2m) = 0.1477222 0.1585510 When k₂ ≧ k₂₀, k_(2m) = 0.1107947 0.1206909 When k₂ < k₂₀, k_(2m) = 0.0868396 0.0754724 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 26.886 30.205 0.93 ≦ NA ≦ 1.0 135 < T ≦ 145 Case 14-01 14-02 14-03 14-04 14-05 n₁₀ 1.8402862 1.9646387 1.9624104 1.9059084 1.8166660 k₁₀ 0.3700261 0.2123233 0.1584699 0.1473615 0.1977639 d₁₀ (nm) 23.403 16.447 12.893 12.089 79.798 n₂₀ 1.4966418 1.7618069 1.7211612 1.6694213 1.5572201 k₂₀ 1.0039549 0.5971846 0.4176484 0.3203376 0.7204992 d₂₀ (nm) 41.463 94.995 156.173 216.011 40.224 When n₁ ≧ 0.0906067 0.1022083 0.1191650 0.1272498 0.0481567 n₁₀, n_(1m) = When n₁ < 0.0460486 0.0622925 0.0801978 0.1004968 0.0053052 n₁₀, n_(1m) = When k₁ ≧ 0.0548682 0.0821582 0.0987952 0.1188953 0.0360181 k₁₀, k_(1m) = When k₁ < 0.0585999 0.0953162 0.1207214 0.1220581 0.0169287 k₁₀, k_(1m) = When d₁ ≧ 4.196 4.611 5.209 6.343 4.539 d₁₀, d_(1m) (nm) = When d₁ < 2.216 2.591 3.134 4.582 0.509 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1766626 0.1806128 0.1668896 0.1603455 0.2142871 n₂₀, n_(2m) = When n₂ < 0.1712292 0.2330798 0.1905432 0.1645447 0.0564514 n₂₀, n_(2m) = When k₂ ≧ 0.2110498 0.1844238 0.1540930 0.1380908 0.0433691 k₂₀, k_(2m) = When k₂ < 0.1916614 0.1446765 0.1279346 0.1140405 0.1534607 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ 18.289 d₂₀, d_(2m) (nm) = When d₂ < 8.143 21.467 66.145 96.079 1.264 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 135 < T ≦ 145 26/35 Case 14-06 14-07 14-08 14-09 14-10 n₁₀ 1.7655719 1.7293285 1.7214396 1.7092770 1.7085071 k₁₀ 0.1384976 0.1055583 0.0882507 0.0826318 0.0697446 d₁₀ (nm) 86.596 87.952 87.451 153.805 152.663 n₂₀ 1.7129955 1.6364176 1.6482275 1.6322979 1.6592624 k₂₀ 0.4320226 0.3040668 0.2416232 0.2733763 0.2197085 d₂₀ (nm) 91.539 153.339 210.993 150.296 206.543 When n₁ ≧ 0.0570667 0.0566760 0.0630505 0.0509021 0.0584448 n₁₀, n_(1m) = When n₁ < 0.0070447 0.0278870 0.0524426 0.0272241 0.0508081 n₁₀, n_(1m) = When k₁ ≧ 0.0284875 0.0544165 0.0773682 0.0546399 0.0801599 k₁₀, k_(1m) = When k₁ < 0.0304980 0.0499133 0.0532507 0.0383374 0.0431470 k₁₀, k_(1m) = When d₁ ≧ 7.855 14.249 20.142 22.873 ∞ d₁₀, d_(1m) (nm) = When d₁ < 0.972 5.625 12.498 8.268 18.904 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2760107 0.1009705 0.1137622 0.0657813 0.1088953 n₂₀, n_(2m) = When n₂ < 0.1995349 0.1448511 0.1471863 0.1316589 0.1395239 n₂₀, n_(2m) = When k₂ ≧ 0.1305078 0.1378174 0.1321667 0.1037769 0.1143506 k₂₀, k_(2m) = When k₂ < 0.1154834 0.0970654 0.0846460 0.0880420 0.0769495 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 3.137 27.699 76.164 22.775 33.816 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 135 < T ≦ 145 Case 14-11 14-12 n₁₀ 1.7027802 1.7041709 k₁₀ 0.0728517 0.0617202 d₁₀ (nm) 217.779 216.194 n₂₀ 1.6405373 1.6719897 k₂₀ 0.2588103 0.2085423 d₂₀ (nm) 146.936 202.593 When n₁ ≧ n₁₀, n_(1m) = 0.0566504 0.0631152 When n₁ < n₁₀, n_(1m) = 0.0353162 0.0583606 When k₁ ≧ k₁₀, k_(1m) = 0.0649280 0.0832544 When k₁ < k₁₀, k_(1m) = 0.0337988 0.0392310 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 15.495 79.231 When n₂ ≧ n₂₀, n_(2m) = 0.0962402 0.1448450 When n₂ < n₂₀, n_(2m) = 0.1459131 0.1542615 When k₂ ≧ k₂₀, k_(2m) = 0.1100769 0.1205054 When k₂ < k₂₀, k_(2m) = 0.0901184 0.0767920 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 22.790 28.928

0.93 ≦ NA ≦ 1.0 145 < T ≦ 155 27/35 Case 15-01 15-02 15-03 15-04 15-05 n₁₀ 1.8199816 1.9318464 1.9476580 1.9400781 1.9152409 k₁₀ 0.4068444 0.2280177 0.1546474 0.1580344 0.1421080 d₁₀ (nm) 29.022 20.237 15.042 15.180 12.506 n₂₀ 1.5974175 1.8212470 1.7660961 1.7558824 1.6892699 k₂₀ 1.4701111 0.6871951 0.4559575 0.4525330 0.3391765 d₂₀ (nm) 24.558 79.181 140.877 141.749 204.998 When n₁ ≧ 0.0783313 0.0902905 0.1062402 0.1057410 0.1233240 n₁₀, n_(1m) = When n₁ < 0.0485986 0.0576099 0.0737439 0.0730676 0.0958533 n₁₀, n_(1m) = When k₁ ≧ 0.0424463 0.0706348 0.0877539 0.0877856 0.1136047 k₁₀, k_(1m) = When k₁ < 0.0340247 0.0852002 0.1066162 0.1062646 0.1201245 k₁₀, k_(1m) = When d₁ ≧ 3.673 5.078 5.535 5.630 6.208 d₁₀, d_(1m) (nm) = When d₁ < 2.651 2.819 3.357 3.413 4.390 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.2911646 0.2069556 0.1703650 0.1705981 0.1609875 n₂₀, n_(2m) = When n₂ < 0.1897607 0.2328674 0.1899780 0.1895239 0.1746619 n₂₀, n_(2m) = When k₂ ≧ 0.2661255 0.2545776 0.1755676 0.1739502 0.1429504 k₂₀, k_(2m) = When k₂ < 0.2599438 0.1612646 0.1333740 0.1331494 0.1167700 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 5.427 21.100 63.576 64.042 84.536 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 145 < T ≦ 155 Case 15-06 15-07 15-08 15-09 15-10 n₁₀ 1.8773964 1.7792899 1.7347668 1.7234258 1.7112569 k₁₀ 0.2151408 0.1408151 0.1082989 0.0907869 0.0850611 d₁₀ (nm) 81.211 87.880 88.119 87.442 153.930 n₂₀ 1.7568637 1.7944868 1.6522930 1.6482492 1.6361524 k₂₀ 1.2210655 0.5090378 0.3260600 0.2516544 0.2898839 d₂₀ (nm) 20.666 75.457 142.664 202.556 141.116 When n₁ ≧ 0.0535974 0.0567944 0.0566736 0.0621204 0.0507385 n₁₀, n_(1m) = When n₁ < 0.0100415 0.0103674 0.0259888 0.0480981 0.0259363 n₁₀, n_(1m) = When k₁ ≧ 0.0386597 0.0332520 0.0534692 0.0749170 0.0514124 k₁₀, k_(1m) = When k₁ < 0.0268323 0.0369287 0.0521716 0.0541968 0.0401160 k₁₀, k_(1m) = When d₁ ≧ 4.095 7.577 13.934 19.192 22.547 d₁₀, d_(1m) (nm) = When d₁ < 0.855 1.369 4.946 11.117 7.637 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.4215723 0.2684375 0.1205920 0.1204028 0.0675806 n₂₀, n_(2m) = When n₂ < 0.3791321 0.1854980 0.1442749 0.1439111 0.1298389 n₂₀, n_(2m) = When k₂ ≧ 0.1639099 0.2106580 0.1452100 0.1328479 0.0998340 k₂₀, k_(2m) = When k₂ < 0.2423328 0.1335254 0.1007751 0.0850952 0.0900806 k₂₀, k_(2m) = When d₂ ≧ 5.052 14.783 ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 1.977 4.929 23.591 72.330 19.479 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 145 < T ≦ 155 28/35 Case 15-11 15-12 15-13 n₁₀ 1.7092054 1.7036310 1.7042855 k₁₀ 0.0717413 0.0749476 0.0635030 d₁₀ (nm) 152.725 217.788 216.233 n₂₀ 1.6572540 1.6384900 1.6687346 k₂₀ 0.2283199 0.2727185 0.2164860 d₂₀ (nm) 198.410 138.609 194.709 When n₁ ≧ n₁₀, n_(1m) = 0.0574158 0.0563904 0.0624048 When n₁ < n₁₀, n_(1m) = 0.0505359 0.0361853 0.0601721 When k₁ ≧ k₁₀, k_(1m) = 0.0766162 0.0604248 0.0800598 When k₁ < k₁₀, k_(1m) = 0.0439771 0.0350879 0.0400427 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 17.754 14.415 78.936 When n₂ ≧ n₂₀, n_(2m) = 0.1103052 0.0951196 0.1487622 When n₂ < n₂₀, n_(2m) = 0.1349475 0.1401550 0.1481909 When k₂ ≧ k₂₀, k_(2m) = 0.1121790 0.1001306 0.1166199 When k₂ < k₂₀, k_(2m) = 0.0769556 0.0916321 0.0768066 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 28.953 19.518 28.644 0.93 ≦ NA ≦ 1.0 155 < T ≦ 165 Case 16-01 16-02 16-03 16-04 16-05 n₁₀ 1.8175791 1.9193642 1.9516445 1.9419697 1.9282358 k₁₀ 0.4385823 0.2501320 0.1607715 0.1648951 0.1504554 d₁₀ (nm) 37.187 21.908 15.944 16.094 12.282 n₂₀ 2.9488620 1.8321620 1.7911399 1.7764317 1.6857745 k₂₀ 3.6605721 0.7789298 0.4964603 0.4910919 0.3551730 d₂₀ (nm) 5.671 69.456 129.934 131.139 198.143 When n₁ ≧ 0.0604736 0.0852295 0.1013757 0.1010083 0.1240356 n₁₀, n_(1m) = When n₁ < 0.0333899 0.0547046 0.0713342 0.0704993 0.0944006 n₁₀, n_(1m) = When k₁ ≧ 0.0318896 0.0632361 0.0833032 0.0834521 0.1140308 k₁₀, k_(1m) = When k₁ < 0.0127527 0.0803174 0.1011133 0.1007434 0.1227710 k₁₀, k_(1m) = When d₁ ≧ 2.684 4.937 5.403 5.524 5.825 d₁₀, d_(1m) (nm) = When d₁ < 1.056 2.746 3.284 3.349 4.015 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.8885571 0.1992395 0.1663013 0.1663708 0.1592810 n₂₀, n_(2m) = When n₂ < 0.4338977 0.2305408 0.1904468 0.1899951 0.1750964 n₂₀, n_(2m) = When k₂ ≧ 0.2239417 0.2871423 0.1858569 0.1831470 0.1419360 k₂₀, k_(2m) = When k₂ < 0.5593811 0.1675525 0.1346912 0.1341003 0.1171777 k₂₀, k_(2m) = When d₂ ≧ 2.121 ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 1.497 16.789 53.787 54.606 81.510 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 155 < T ≦ 165 29/35 Case 16-06 16-07 16-08 16-09 16-10 n₁₀ 1.8704725 1.7960814 1.7418606 1.7257176 1.7136245 k₁₀ 0.2299368 0.1479091 0.1134159 0.0948039 0.0896483 d₁₀ (nm) 88.746 88.347 87.888 87.264 153.565 n₂₀ 2.8158519 1.9330235 1.6717189 1.6472351 1.6392609 k₂₀ 3.0739838 0.6225271 0.3550776 0.2650084 0.3111392 d₂₀ (nm) 4.992 60.492 132.384 194.269 132.434 When n₁ ≧ 0.0496790 0.0539771 0.0559290 0.0605103 0.0493213 n₁₀, n_(1m) = When n₁ < 0.0158618 0.0116589 0.0229565 0.0427002 0.0176343 n₁₀, n_(1m) = When k₁ ≧ 0.0339600 0.0324597 0.0502661 0.0714246 0.0448999 k₁₀, k_(1m) = When k₁ < 0.0196045 0.0413477 0.0524426 0.0547058 0.0377209 k₁₀, k_(1m) = When d₁ ≧ 4.203 6.741 12.890 17.512 20.755 d₁₀, d_(1m) (nm) = When d₁ < 1.412 1.425 4.045 9.285 4.775 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.7568213 0.2080432 0.1385022 0.1276587 0.0653149 n₂₀, n_(2m) = When n₂ < 0.6339124 0.1864246 0.1456726 0.1431897 0.1296729 n₂₀, n_(2m) = When k₂ ≧ 0.5784314 0.2482080 0.1472144 0.1310840 0.0863611 k₂₀, k_(2m) = When k₂ < 0.6241199 0.1496924 0.1027478 0.0854395 0.0904016 k₂₀, k_(2m) = When d₂ ≧ 1.695 9.818 ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 1.276 6.130 21.225 35.287 17.454 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 155 < T ≦ 165 Case 16-11 16-12 16-13 16-14 n₁₀ 1.7097149 1.7044725 1.7041849 1.7061658 k₁₀ 0.0750113 0.0790614 0.0664191 0.0592006 d₁₀ (nm) 152.537 217.265 215.910 215.675 n₂₀ 1.6527377 1.6350180 1.6625759 1.6951633 k₂₀ 0.2392317 0.2903973 0.2261823 0.1893046 d₂₀ (nm) 190.639 130.687 187.261 240.772 When n₁ ≧ n₁₀, n_(1m) = 0.0553772 0.0545740 0.0600366 0.0676270 When n₁ < n₁₀, n_(1m) = 0.0477368 0.0344788 0.0568494 0.0690149 When k₁ ≧ k₁₀, k_(1m) = 0.0715491 0.0525977 0.0752148 0.0835681 When k₁ < k₁₀, k_(1m) = 0.0443665 0.0337817 0.0404053 0.0425281 When d₁ ≧ d₁₀, d_(1m) ∞ ∞ ∞ ∞ (nm) = When d₁ < d₁₀, d_(1m) 16.235 12.121 77.039 86.324 (nm) = When n₂ ≧ n₂₀, n_(2m) = 0.1116882 0.0916113 0.1582788 0.1718628 When n₂ < n₂₀, n_(2m) = 0.1331189 0.1411133 0.1443433 0.1614490 When k₂ ≧ k₂₀, k_(2m) = 0.1061816 0.0827698 0.1097974 0.1248706 When k₂ < k₂₀, k_(2m) = 0.0766345 0.0918372 0.0766272 0.0699548 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 27.428 17.505 27.098 73.085 (nm) =

0.93 ≦ NA ≦ 1.0 165 < T ≦ 175 30/35 Case 17-01 17-02 17-03 17-04 17-05 n₁₀ 1.9650460 1.9384951 1.9139584 1.7857662 1.7433983 k₁₀ 0.1748342 0.1550287 0.1299465 0.1574086 0.1202381 d₁₀ (nm) 15.368 12.323 11.343 86.539 87.036 n₂₀ 1.7719438 1.6895811 1.6883766 1.7907030 1.6559011 k₂₀ 0.5219218 0.3734128 0.3007198 0.6497694 0.3733381 d₂₀ (nm) 124.100 189.293 246.427 59.718 125.629 When n₁ ≧ 0.1023816 0.1220520 0.1341687 0.0495288 0.0535669 n₁₀, n_(1m) = When n₁ < 0.0697961 0.0912976 0.1083984 0.0051111 0.0188965 n₁₀, n_(1m) = When k₁ ≧ 0.0830420 0.1112122 0.1288184 0.0186707 0.0452673 k₁₀, k_(1m) = When k₁ < 0.1016052 0.1222986 0.1299465 0.0330212 0.0491577 k₁₀, k_(1m) = When d₁ ≧ 5.001 5.526 6.413 5.954 11.233 d₁₀, d_(1m) (nm) = When d₁ < 2.956 3.739 4.697 0.624 3.144 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1581653 0.1572925 0.1540161 0.0858301 0.1199121 n₂₀, n_(2m) = When n₂ < 0.1927075 0.1754407 0.1685632 0.1889197 0.1519067 n₂₀, n_(2m) = When k₂ ≧ 0.1753381 0.1419458 0.1368945 0.0730774 0.1241467 k₂₀, k_(2m) = When k₂ < 0.1306897 0.1171997 0.1067334 0.1258240 0.0983862 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 51.895 79.651 119.351 3.741 21.467 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 165 < T ≦ 175 Case 17-06 17-07 17-08 17-09 17-10 n₁₀ 1.7262549 1.7236673 1.7140199 1.7096017 1.7107217 k₁₀ 0.0993784 0.0842645 0.0949670 0.0783956 0.0680252 d₁₀ (nm) 86.812 87.109 152.601 152.026 152.100 n₂₀ 1.6373093 1.6685549 1.6238426 1.6437329 1.6799600 k₂₀ 0.2753256 0.2274459 0.3258368 0.2483227 0.2063397 d₂₀ (nm) 186.729 241.120 125.450 182.921 236.403 When n₁ ≧ 0.0583655 0.0638147 0.0459595 0.0526709 0.0601990 n₁₀, n_(1m) = When n₁ < 0.0389001 0.0503784 0.0111768 0.0448047 0.0600891 n₁₀, n_(1m) = When k₁ ≧ 0.0685583 0.0805896 0.0359302 0.0672742 0.0800940 k₁₀, k_(1m) = When k₁ < 0.0538513 0.0560901 0.0310425 0.0434424 0.0457349 k₁₀, k_(1m) = When d₁ ≧ 15.725 22.939 17.229 ∞ ∞ d₁₀, d_(1m) (nm) = When d₁ < 8.012 11.976 2.824 14.351 24.120 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1242969 0.1275708 0.0486890 0.1084961 0.1263135 n₂₀, n_(2m) = When n₂ < 0.1456055 0.1521838 0.1337903 0.1356079 0.1464233 n₂₀, n_(2m) = When k₂ ≧ 0.1234131 0.1338855 0.0591821 0.0969312 0.1151416 k₂₀, k_(2m) = When k₂ < 0.0846008 0.0776428 0.0858325 0.0756372 0.0703125 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 66.105 78.842 17.102 28.470 72.561 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 165 < T ≦ 175 31/35 Case 17-11 17-12 17-13 n₁₀ 1.7042582 1.7037677 1.7056779 k₁₀ 0.0836625 0.0692974 0.0609868 d₁₀ (nm) 216.186 215.313 215.198 n₂₀ 1.6202806 1.6544674 1.6903958 k₂₀ 0.3033538 0.2346728 0.1952987 d₂₀ (nm) 123.599 179.446 232.683 When n₁ ≧ n₁₀, n_(1m) = 0.0501758 0.0567249 0.0651611 When n₁ < n₁₀, n_(1m) = 0.0271130 0.0522852 0.0658081 When k₁ ≧ k₁₀, k_(1m) = 0.0439600 0.0710352 0.0811584 When k₁ < k₁₀, k_(1m) = 0.0300366 0.0394434 0.0413635 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 9.341 23.552 82.870 When n₂ ≧ n₂₀, n_(2m) = 0.0785254 0.1613647 0.1758447 When n₂ < n₂₀, n_(2m) = 0.1457166 0.1478357 0.1648547 When k₂ ≧ k₂₀, k_(2m) = 0.0611975 0.1025415 0.1200317 When k₂ < k₂₀, k_(2m) = 0.0887231 0.0762732 0.0707166 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 17.421 28.206 71.908 0.93 ≦ NA ≦ 1.0 175 < T ≦ 185 Case 18-01 18-02 18-03 18-04 18-05 n₁₀ 1.9750220 1.9943589 1.9365478 1.8874503 1.7406539 k₁₀ 0.3055970 0.1905841 0.1715491 0.1503402 0.1271964 d₁₀ (nm) 17.312 13.627 12.200 12.006 86.109 n₂₀ 1.6357631 1.7309349 1.6649916 1.6561886 1.6157675 k₂₀ 0.8207912 0.5263943 0.3790440 0.2991899 0.3771605 d₂₀ (nm) 66.973 122.033 183.216 242.151 120.682 When n₁ ≧ 0.0935791 0.1114148 0.1215747 0.1285913 0.0513330 n₁₀, n_(1m) = When n₁ < 0.0459473 0.0702148 0.0894250 0.1026367 0.0144434 n₁₀, n_(1m) = When k₁ ≧ 0.0590857 0.0871582 0.1112146 0.1261365 0.0386914 k₁₀, k_(1m) = When k₁ < 0.0823853 0.1098083 0.1208740 0.1243677 0.0453528 k₁₀, k_(1m) = When d₁ ≧ 3.436 4.283 5.306 6.728 10.132 d₁₀, d_(1m) (nm) = When d₁ < 1.707 2.491 3.559 4.870 2.323 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1368286 0.1494128 0.1559277 0.1523608 0.0829712 n₂₀, n_(2m) = When n₂ < 0.2106677 0.1994727 0.1768091 0.1649011 0.1612537 n₂₀, n_(2m) = When k₂ ≧ 0.1566431 0.1521973 0.1368372 0.1332068 0.0933081 k₂₀, k_(2m) = When k₂ < 0.1361353 0.1253687 0.1152344 0.1052795 0.0942554 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 18.814 47.829 81.274 118.000 24.527 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 175 < T ≦ 185 32/35 Case 18-06 18-07 18-08 18-09 18-10 n₁₀ 1.7253418 1.7237735 1.7126639 1.7091592 1.7108527 k₁₀ 0.1032843 0.0864157 0.0996282 0.0809109 0.0696108 d₁₀ (nm) 86.339 86.885 151.701 151.551 151.827 n₂₀ 1.6224018 1.6650124 1.5953952 1.6344497 1.6784072 k₂₀ 0.2809650 0.2327133 0.3310599 0.2545275 0.2111338 d₂₀ (nm) 178.956 231.784 118.977 174.271 226.839 When n₁ ≧ 0.0565039 0.0626416 0.0424548 0.0505127 0.0583557 n₁₀, n_(1m) = When n₁ < 0.0377893 0.0495728 0.0068591 0.0425964 0.0570093 n₁₀, n_(1m) = When k₁ ≧ 0.0671277 0.0801477 0.0264331 0.0654321 0.0790332 k₁₀, k_(1m) = When k₁ < 0.0514600 0.0546265 0.0262610 0.0409290 0.0440662 k₁₀, k_(1m) = When d₁ ≧ 14.314 20.851 14.034 22.266 ∞ d₁₀, d_(1m) (nm) = When d₁ < 7.519 11.390 1.678 12.457 21.354 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1133289 0.1230408 0.0286230 0.1046033 0.1258447 n₂₀, n_(2m) = When n₂ < 0.1506311 0.1572058 0.1416589 0.1413440 0.1529517 n₂₀, n_(2m) = When k₂ ≧ 0.1148096 0.1304126 0.0346130 0.0907129 0.1118689 k₂₀, k_(2m) = When k₂ < 0.0848999 0.0792493 0.0817810 0.0764514 0.0721448 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 64.642 80.544 18.599 31.028 73.232 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 175 < T ≦ 185 Case 18-11 18-12 18-13 n₁₀ 1.7032995 1.7035257 1.7058486 k₁₀ 0.0874338 0.0712651 0.0623526 d₁₀ (nm) 215.388 214.888 214.924 n₂₀ 1.6000078 1.6490638 1.6902455 k₂₀ 0.3100603 0.2413259 0.1999123 d₂₀ (nm) 116.088 170.219 222.958 When n₁ ≧ n₁₀, n_(1m) = 0.0459119 0.0540906 0.0637158 When n₁ < n₁₀, n_(1m) = 0.0201135 0.0472498 0.0624988 When k₁ ≧ k₁₀, k_(1m) = 0.0380823 0.0692078 0.0795654 When k₁ < k₁₀, k_(1m) = 0.0261584 0.0371997 0.0400098 When d₁ ≧ d₁₀, d_(1m) (nm) = 25.691 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 6.401 18.086 80.109 When n₂ ≧ n₂₀, n_(2m) = 0.0666833 0.1564661 0.1701733 When n₂ < n₂₀, n_(2m) = 0.1555847 0.1549194 0.1734229 When k₂ ≧ k₂₀, k_(2m) = 0.0497668 0.0999182 0.1182764 When k₂ < k₂₀, k_(2m) = 0.0866650 0.0781360 0.0731396 When d₂ ≧ d₂₀, d_(2m) (nm) = 13.606 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 18.924 29.474 72.740

0.93 ≦ NA ≦ 1.0 185 < T ≦ 195 33/35 Case 19-01 19-02 19-03 19-04 19-05 n₁₀ 2.0157422 1.9298641 1.9158213 1.9035507 1.7387191 k₁₀ 0.3310994 0.1874025 0.1413868 0.0919796 0.1333266 d₁₀ (nm) 15.233 12.335 11.496 11.593 85.772 n₂₀ 1.5732193 1.6401635 1.6782430 1.7330388 1.5838112 k₂₀ 0.8191417 0.3856200 0.3150440 0.2716233 0.3839989 d₂₀ (nm) 66.313 174.874 226.685 274.138 113.170 When n₁ ≧ 0.0908862 0.1198010 0.1318933 0.1353418 0.0494861 n₁₀, n_(1m) = When n₁ < 0.0435144 0.0881482 0.1071143 0.1119397 0.0110315 n₁₀, n_(1m) = When k₁ ≧ 0.0607654 0.1097412 0.1276587 0.1301843 0.0306482 k₁₀, k_(1m) = When k₁ < 0.0886279 0.1159265 0.1266907 0.0919796 0.0445325 k₁₀, k_(1m) = When d₁ ≧ 2.825 5.183 6.173 7.339 9.205 d₁₀, d_(1m) (nm) = When d₁ < 1.353 3.517 4.556 5.508 1.748 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1250940 0.1513354 0.1454334 0.1421106 0.0499280 n₂₀, n_(2m) = When n₂ < 0.1772742 0.1779919 0.1691821 0.1744556 0.1654175 n₂₀, n_(2m) = When k₂ ≧ 0.1164954 0.1335864 0.1351135 0.1421582 0.0743848 k₂₀, k_(2m) = When k₂ < 0.1392041 0.1184119 0.1117639 0.1051697 0.0978845 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 17.571 78.501 112.763 138.595 25.987 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 185 < T ≦ 195 Case 19-06 19-07 19-08 19-09 19-10 n₁₀ 1.7256246 1.7253546 1.7287042 1.7096582 1.7121643 k₁₀ 0.1055723 0.0874820 0.0760165 0.0821714 0.0705329 d₁₀ (nm) 86.279 86.928 87.515 151.624 152.001 n₂₀ 1.6177137 1.6696157 1.7081188 1.6358848 1.6853812 k₂₀ 0.2895611 0.2389730 0.2041866 0.2635969 0.2167566 d₂₀ (nm) 168.375 220.361 272.150 162.984 215.233 When n₁ ≧ 0.0562903 0.0628687 0.0679712 0.0505103 0.0586621 n₁₀, n_(1m) = When n₁ < 0.0396094 0.0498669 0.0509912 0.0389160 0.0543164 n₁₀, n_(1m) = When k₁ ≧ 0.0670349 0.0806128 0.0832776 0.0662488 0.0789514 k₁₀, k_(1m) = When k₁ < 0.0491772 0.0538904 0.0576746 0.0390271 0.0434973 k₁₀, k_(1m) = When d₁ ≧ 13.425 20.169 39.294 20.568 ∞ d₁₀, d_(1m) (nm) = When d₁ < 7.774 11.144 12.836 11.141 20.056 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1053076 0.1213562 0.1287134 0.1062195 0.1257849 n₂₀, n_(2m) = When n₂ < 0.1536951 0.1604126 0.1670996 0.1450281 0.1574817 n₂₀, n_(2m) = When k₂ ≧ 0.1136377 0.1320007 0.1531152 0.0931067 0.1145862 k₂₀, k_(2m) = When k₂ < 0.0898669 0.0840454 0.0776611 0.0825256 0.0770361 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 45.429 80.918 110.597 30.017 74.310 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 185 < T ≦ 195 34/35 Case 19-11 19-12 19-13 19-14 19-15 n₁₀ 1.7151566 1.7029318 1.7041956 1.7070069 1.7080920 k₁₀ 0.0645755 0.0900998 0.0721897 0.0633145 0.0595697 d₁₀ (nm) 152.412 215.656 215.114 215.207 215.250 n₂₀ 1.7135234 1.5920483 1.6533659 1.6971996 1.7125257 k₂₀ 0.1842756 0.3226491 0.2502000 0.2048445 0.1741269 d₂₀ (nm) 268.692 105.543 158.704 211.558 267.229 When n₁ ≧ 0.0656799 0.0437866 0.0537561 0.0639758 0.0752185 n₁₀, n_(1m) = When n₁ < 0.0585193 0.0130481 0.0437659 0.0602637 0.0712415 n₁₀, n_(1m) = When k₁ ≧ 0.0803796 0.0379236 0.0696973 0.0785339 0.0793298 k₁₀, k_(1m) = When k₁ < 0.0475867 0.0209644 0.0354407 0.0397900 0.0383728 k₁₀, k_(1m) = When d₁ ≧ ∞ 20.412 ∞ ∞ ∞ d₁₀, d_(1m) (nm) = When d₁ < 76.169 3.912 15.725 78.897 136.900 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1359851 0.0436487 0.1238757 0.1440674 0.1618445 n₂₀, n_(2m) = When n₂ < 0.1709363 0.1590417 0.1491174 0.1814563 0.2117529 n₂₀, n_(2m) = When k₂ ≧ 0.1377368 0.0580493 0.1037561 0.1202234 0.1371057 k₂₀, k_(2m) = When k₂ < 0.0711096 0.0823193 0.0849219 0.0779297 0.0717078 k₂₀, k_(2m) = When d₂ ≧ ∞ 9.984 ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 82.771 19.617 23.813 73.684 77.607 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 195 < T ≦ 205 Case 20-01 20-02 20-03 20-04 20-05 n₁₀ 1.9115074 1.9153788 1.8712999 1.7275221 1.7279210 k₁₀ 0.1960527 0.1490337 0.0897979 0.1065695 0.0881248 d₁₀ (nm) 13.258 11.515 14.536 86.590 87.122 n₂₀ 1.6255021 1.6682692 1.7614462 1.6227655 1.6778177 k₂₀ 0.3984556 0.3197853 0.2821612 0.3041284 0.2471127 d₂₀ (nm) 164.068 218.507 257.799 156.467 209.069 When n₁ ≧ 0.1142444 0.1325989 0.1158582 0.0562817 0.0637024 n₁₀, n_(1m) = When n₁ < 0.0852515 0.1080505 0.0942114 0.0426550 0.0501379 n₁₀, n_(1m) = When k₁ ≧ 0.1044482 0.1295020 0.1096521 0.0681348 0.0804810 k₁₀, k_(1m) = When k₁ < 0.1084790 0.1269031 0.0897979 0.0488770 0.0543994 k₁₀, k_(1m) = When d₁ ≧ 5.346 6.134 8.659 13.270 20.006 d₁₀, d_(1m) (nm) = When d₁ < 3.730 4.524 6.443 8.305 10.905 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1424097 0.1416443 0.1412390 0.1051294 0.1236353 n₂₀, n_(2m) = When n₂ < 0.1779224 0.1667200 0.1823743 0.1526196 0.1593042 n₂₀, n_(2m) = When k₂ ≧ 0.1351575 0.1341370 0.1542419 0.1188623 0.1364233 k₂₀, k_(2m) = When k₂ < 0.1244714 0.1144324 0.1102271 0.0976929 0.0887854 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ ∞ d₂₀, d_(2m) (nm) = When d₂ < 70.107 105.511 128.903 31.502 77.053 d₂₀, d_(2m) (nm) =

0.93 ≦ NA ≦ 1.0 195 < T ≦ 205 35/35 Case 20-06 20-07 20-08 20-09 20-10 n₁₀ 1.7316602 1.7109076 1.7140510 1.7169074 1.7034522 k₁₀ 0.0769958 0.0825870 0.0712311 0.0659464 0.0912009 d₁₀ (nm) 87.563 152.078 152.368 152.739 216.873 n₂₀ 1.7153560 1.6429824 1.6947912 1.7201685 1.5969711 k₂₀ 0.2092703 0.2767726 0.2239389 0.1888883 0.3506487 d₂₀ (nm) 261.518 151.325 204.003 258.117 92.838 When n₁ ≧ 0.0685693 0.0512622 0.0601404 0.0671716 0.0436548 n₁₀, n_(1m) = When n₁ < 0.0495715 0.0375720 0.0532251 0.0484131 0.0089709 n₁₀, n_(1m) = When k₁ ≧ 0.0827515 0.0683850 0.0790723 0.0783716 0.0369128 k₁₀, k_(1m) = When k₁ < 0.0588892 0.0391077 0.0446033 0.0456335 0.0165588 k₁₀, k_(1m) = When d₁ ≧ 35.460 20.848 ∞ ∞ 19.781 d₁₀, d_(1m) (nm) = When d₁ < 11.967 10.711 16.311 17.445 2.680 d₁₀, d_(1m) (nm) = When n₂ ≧ 0.1321082 0.1010400 0.1225134 0.1362366 0.0345703 n₂₀, n_(2m) = When n₂ < 0.1646814 0.1448950 0.1569727 0.1688831 0.1562476 n₂₀, n_(2m) = When k₂ ≧ 0.1585754 0.0998694 0.1194824 0.1443347 0.0797021 k₂₀, k_(2m) = When k₂ < 0.0798230 0.0905042 0.0814771 0.0735376 0.0638440 k₂₀, k_(2m) = When d₂ ≧ ∞ ∞ ∞ ∞ 10.032 d₂₀, d_(2m) (nm) = When d₂ < 87.011 25.146 71.899 78.182 16.775 d₂₀, d_(2m) (nm) = 0.93 ≦ NA ≦ 1.0 195 < T ≦ 205 Case 20-11 20-12 20-13 n₁₀ 1.7053294 1.7084550 1.7088490 k₁₀ 0.0723641 0.0642090 0.0611230 d₁₀ (nm) 215.802 215.782 215.750 n₂₀ 1.6624125 1.7063284 1.7155496 k₂₀ 0.2625944 0.2112603 0.1784523 d₂₀ (nm) 147.133 200.541 257.296 When n₁ ≧ n₁₀, n_(1m) = 0.0548254 0.0651489 0.0765845 When n₁ < n₁₀, n_(1m) = 0.0418201 0.0593726 0.0732715 When k₁ ≧ k₁₀, k_(1m) = 0.0710583 0.0775024 0.0765796 When k₁ < k₁₀, k_(1m) = 0.0355750 0.0411511 0.0355579 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 15.640 79.525 76.637 When n₂ ≧ n₂₀, n_(2m) = 0.1192065 0.1417981 0.1626379 When n₂ < n₂₀, n_(2m) = 0.1432642 0.1798657 0.2073511 When k₂ ≧ k₂₀, k_(2m) = 0.1091699 0.1229614 0.1404065 When k₂ < k₂₀, k_(2m) = 0.0923608 0.0791760 0.0746033 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 19.545 71.258 73.210.


2. An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of: providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below; and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.0 <NA ≦1.1, the antireflective film including an upper layer having a complex refractive index N₁, and a lower layer having a complex refractive index N₂, the complex refractive indexes N₁ and N₂ being represented by the equations N₁=n₁−k₁i and N₂=n₂−k₂i, respectively; wherein assuming that the thickness of the upper layer is d₁ (unit: nm) and the thickness of the lower layer is d₂ (unit: nm) , when any one of the combinations of values of [n₁₀, k₁₀, d₁₀, n₂₀ , k₂₀ , d₂₀] described below is selected depending on the thickness T of the silicon oxide film, n₁, k₁, d₁, n₂, k₂, and d₂ satisfy the relational expression {(n ₁ −n ₁₀)/(n _(1m) −n ₁₀)}²+{(k ₁ −k ₁₀)/(k_(1m) −k ₁₀)}²+{(d₁ −d ₁₀)/(d _(1m) −d ₁₀) }²+{(n ₂ −n ₂₀)/(n_(2m) −n ₂₀) }²+{(k ₂ −k ₂₀)/(k _(2m) −k ₂₀)}²+{(d ₂ −d ₂₀)/(d _(2m) −d ₂₀) }²≦1; a value of n_(1m) in a corresponding case is selected on the basis of a magnitude relation between n₁ and n₁₀; a value of k_(1m) in a corresponding case is selected on the basis of a magnitude relation between k₁ and k₁₀; a value of dim in a corresponding case is selected on the basis of a magnitude relation between d₁ and d₁₀; a value of n_(2m) in a corresponding case is selected on the basis of a magnitude relation between n₂ and n₂₀; a value of k_(2m) in a corresponding case is selected on the basis of a magnitude relation between k₂ and k₂₀;and a value of d_(2m) in a corresponding case is selected on the basis of a magnitude relation between d₂ and d₂₀; and in the tables below, in the line of “When n₁≧n₁₀, n_(1m)=”, each value in the right columns is “n_(1m−n) ₁₀”; in the line of “When n₁<n₁₀, n_(1m)=”, each value in the right columns is “n₁₀−n_(1m)”; in the line of “When k₁≧k₁₀, k_(1m)”, each value in the right columns is “k_(1m)−k₁₀”; in the line of “When k₁<k₁₀, k_(1m)=”, each value in the right columns is “k₁₀−k_(1m)”; in the line of “When d₁≧d₁₀, d_(1m) (nm) =”, each value (unit: nm) in the right columns is “d_(1m)−d₁₀”; in the line of “When d₁<d₁₀, d_(1m) (nm) =”, each value (unit: nm) in the right columns is “d₁₀−d_(1m)”; in the line of “When n₂≧n₂₀, n_(2m)=”, each value in the right columns is “n_(2m)−n₂₀”; in the line of “When n₂<n₂₀, n_(2m)=”, each value in the right columns is ”n₂₀−n_(2m)”; in the line of “When k₂≧k₂₀, k_(2m)=”, each value in the right columns is “k_(2m)−k₂₀”; in the line of “When k₂<k₂₀, k_(2m)=”, each value in the right columns is “k₂₀−k_(2m)”; in the line of “When d₂≧d₂₀, d_(2m) (nm) =”, each value (unit: nm) in the right columns is “d_(2m)−d₂₀”; and in the line of “When d₂<d₂₀, d_(2m) (nm) =”, each value (unit: nm) in the right columns is “d₂₀−d_(2m)”. 1.0 < NA ≦ 1.1 2 ≦ T ≦ 15 1/34 Case 1-01 1-02 1-03 1-04 1-05 n₁₀ 2.1002530 1.9014716 1.8817545 1.8713707 1.8894555 k₁₀ 0.0458360 0.1897321 0.1528631 0.1131033 0.1025295 d₁₀ (nm) 25.245 35.107 29.787 20.680 13.808 n₂₀ 3.6613926 3.6832791 2.2496615 1.8471360 1.7319643 k₂₀ 2.0917723 0.6232721 0.5909670 0.3799287 0.2879285 d₂₀ (nm) 4.980 30.030 58.673 139.609 214.126 When n₁ ≧ n₁₀, n_(1m) = 0.0805884 0.0768188 0.0754700 0.0824719 0.1060120 When n₁ < n₁₀, n_(1m) = 0.0800293 0.0653833 0.0584985 0.0566113 0.0706006 When k₁ ≧ k₁₀, k_(1m) = 0.0719092 0.0582312 0.0563574 0.0660449 0.0898218 When k₁ < k₁₀, k_(1m) = 0.0458360 0.0865906 0.0835730 0.0866101 0.1025295 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.502 5.628 6.909 7.972 7.080 When d₁ < d₁₀, d_(1m) (nm) = 2.843 4.121 4.441 4.574 4.198 When n₂ ≧ n₂₀, n_(2m) = 0.2511194 0.1375208 0.1500757 0.1234998 0.1256079 When n₂ < n₂₀, n_(2m) = 0.2478674 0.1642285 0.1673572 0.1560254 0.1556494 When k₂ ≧ k₂₀, k_(2m) = 0.2675171 0.1813342 0.1899841 0.1681030 0.1175488 When k₂ < k₂₀, k_(2m) = 0.2241895 0.1363525 0.1337048 0.1033130 0.0926782 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.668 1.453 8.618 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 0.632 1.466 7.778 59.745 82.499 1.0 < NA ≦ 1.1 2 ≦ T ≦ 15 Case 1-06 1-07 1-08 1-09 1-10 n₁₀ 1.8919474 1.8730447 1.7734811 1.7581396 1.7209511 k₁₀ 0.0886250 0.0995044 0.0942049 0.0894114 0.0778149 d₁₀ (nm) 14.825 12.107 96.210 94.485 94.005 n₂₀ 1.7713589 1.6971361 2.0242448 1.8216770 1.6746822 k₂₀ 0.2959415 0.2384266 0.4293783 0.2841737 0.2144041 d₂₀ (nm) 207.437 276.341 66.416 135.446 211.729 When n₁ ≧ n₁₀, n_(1m) = 0.1001855 0.1196069 0.0579333 0.0504431 0.0487988 When n₁ < n₁₀, n_(1m) = 0.0678418 0.0862451 0.0202832 0.0122217 0.0195996 When k₁ ≧ k₁₀, k_(1m) = 0.0828455 0.1086084 0.0429993 0.0327991 0.0449207 When k₁ < k₁₀, k_(1m) = 0.0886250 0.0995044 0.0440173 0.0383289 0.0441089 When d₁ ≧ d₁₀, d_(1m) (nm) = 7.253 7.622 12.574 14.854 20.756 When d₁ < d₁₀, d_(1m) (nm) = 4.294 5.017 3.736 2.430 5.594 When n₂ ≧ n₂₀, n_(2m) = 0.1250818 0.1274023 0.1038489 0.1178979 0.0654700 When n₂ < n₂₀, n_(2m) = 0.1542432 0.1390320 0.1236121 0.1075012 0.0984851 When k₂ ≧ k₂₀, k_(2m) = 0.1281506 0.1059973 0.1023560 0.1052271 0.0726978 When k₂ < k₂₀, k_(2m) = 0.0937659 0.0853320 0.1026587 0.0735156 0.0618335 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 5.946 13.526 ∞ When d₂ < d₂₀, d_(2m) (nm) = 79.532 130.356 6.729 7.895 26.663

1.0 < NA ≦ 1.1 2 ≦ T ≦ 15 2/34 Case 1-11 1-12 1-13 1-14 1-15 n₁₀ 1.7166765 1.7166130 1.7322234 1.7049421 1.7064564 k₁₀ 0.0677623 0.0755230 0.0835200 0.0655754 0.0573750 d₁₀ (nm) 92.667 182.689 166.765 163.194 160.636 n₂₀ 1.6766991 6.5634515 1.9262925 1.6664527 1.6879767 k₂₀ 0.1797231 3.2079655 0.3700807 0.1954874 0.1655431 d₂₀ (nm) 270.198 1.017 69.546 208.736 264.028 When n₁ ≧ n₁₀, n_(1m) = 0.0538269 0.0791455 0.0502930 0.0463574 0.0530786 When n₁ < n₁₀, n_(1m) = 0.0365198 0.0150903 0.0019495 0.0298389 0.0507080 When k₁ ≧ k₁₀, k_(1m) = 0.0633020 0.0382202 0.0176428 0.0426367 0.0606909 When k₁ < k₁₀, k_(1m) = 0.0490027 0.0352063 0.0101367 0.0363086 0.0412036 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ 44.970 29.513 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 11.921 5.503 0.534 14.465 82.763 When n₂ ≧ n₂₀, n_(2m) = 0.0746594 0.3760779 0.0943127 0.0451807 0.0846008 When n₂ < n₂₀, n_(2m) = 0.1088159 0.6761377 0.0252344 0.0894604 0.1080103 When k₂ ≧ k₂₀, k_(2m) = 0.0728833 0.4281982 0.0109839 0.0413684 0.0543652 When k₂ < k₂₀, k_(2m) = 0.0561267 0.6156824 0.0921399 0.0546765 0.0510388 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 0.095 5.760 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 76.266 0.159 0.905 22.049 32.675 1.0 < NA ≦ 1.1 2 ≦ T ≦ 15 Case 1-16 1-17 1-18 1-19 1-20 n₁₀ 1.6929499 1.6905856 1.6919500 1.6995270 1.6946661 k₁₀ 0.0758677 0.0724871 0.0673580 0.0541447 0.0598692 d₁₀ (nm) 218.538 210.998 207.119 221.890 292.769 n₂₀ 1.7888879 1.7113381 1.6973679 1.6914313 5.7902895 k₂₀ 0.3373861 0.2424201 0.1951159 0.1602785 2.6464640 d₂₀ (nm) 83.914 155.877 222.394 261.841 1.370 When n₁ ≧ n₁₀, n_(1m) = 0.0154590 0.0284326 0.0459937 0.0695007 0.0688428 When n₁ < n₁₀, n_(1m) = 0.0644519 0.0618115 0.0647253 0.0614612 0.0576074 When k₁ ≧ k₁₀, k_(1m) = 0.0296802 0.0451062 0.0571143 0.0607031 0.0650110 When k₁ < k₁₀, k_(1m) = 0.0222290 0.0323779 0.0391223 0.0380823 0.0345483 When d₁ ≧ d₁₀, d_(1m) (nm) = 8.212 ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 25.706 29.733 39.073 91.262 43.839 When n₂ ≧ n₂₀, n_(2m) = 0.1222742 0.1267554 0.1643848 0.2245898 0.7013342 When n₂ < n₂₀, n_(2m) = 0.0248633 0.0660693 0.1720679 0.1025806 0.7193848 When k₂ ≧ k₂₀, k_(2m) = 0.0580225 0.0965234 0.1267737 0.1053369 0.5239075 When k₂ < k₂₀, k_(2m) = 0.0934216 0.0846191 0.0756384 0.0566919 0.6531299 When d₂ ≧ d₂₀, d_(2m) (nm) = 16.998 ∞ ∞ ∞ 0.304 When d₂ < d₂₀, d_(2m) (nm) = 2.716 12.405 72.248 75.278 0.354

1.0 < NA ≦ 1.1 2 ≦ T ≦ 15 3/34 Case 1-21 1-22 1-23 1-24 n₁₀ 1.6927273 1.6938682 1.6959215 1.6965163 k₁₀ 0.0641185 0.0632641 0.0601626 0.0560943 d₁₀ (nm) 275.960 269.814 266.236 263.874 n₂₀ 1.7993913 1.7248410 1.7076727 1.6984359 k₂₀ 0.3510467 0.2487428 0.2009217 0.1709410 d₂₀ (nm) 81.101 150.052 214.823 277.894 When n₁ ≧ n₁₀, n_(1m) = 0.0462292 0.0536658 0.0656104 0.0800903 When n₁ < n₁₀, n_(1m) = 0.0484851 0.0418225 0.0432129 0.0552332 When k₁ ≧ k₁₀, k_(1m) = 0.0620630 0.0619458 0.0615613 0.0629382 When k₁ < k₁₀, k_(1m) = 0.0362708 0.0377515 0.0406262 0.0422571 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 29.467 27.448 97.485 175.134 When n₂ ≧ n₂₀, n_(2m) = 0.1596558 0.1810303 0.3970593 0.3365332 When n₂ < n₂₀, n_(2m) = 0.1100391 0.2908167 0.2424414 0.2178503 When k₂ ≧ k₂₀, k_(2m) = 0.1557141 0.1886804 0.2145630 0.2194727 When k₂ < k₂₀, k_(2m) = 0.1210901 0.1012720 0.0897449 0.0805957 When d₂ ≧ d₂₀, d_(2m) (nm) = 25.591 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 9.432 27.332 78.495 131.894 1.0 < NA ≦ 1.1 15 < T ≦ 25 Case 2-01 2-02 2-03 2-04 2-05 n₁₀ 1.8588603 1.8671897 1.8793061 1.8953035 1.8743725 k₁₀ 0.2152026 0.2000001 0.1213485 0.0980077 0.1084578 d₁₀ (nm) 37.726 35.681 21.414 14.908 12.201 n₂₀ 5.0977045 3.0932325 1.8727645 1.7635602 1.6884757 k₂₀ 0.6974562 0.7063642 0.4149520 0.3109442 0.2470663 d₂₀ (nm) 19.647 34.687 129.308 200.446 269.437 When n₁ ≧ n₁₀, n_(1m) = 0.0758728 0.0747766 0.0798340 0.0988049 0.1178149 When n₁ < n₁₀, n_(1m) = 0.0592542 0.0589661 0.0549634 0.0658325 0.0841418 When k₁ ≧ k₁₀, k_(1m) = 0.0598401 0.0578650 0.0632202 0.0814417 0.1076917 When k₁ < k₁₀, k_(1m) = 0.0788342 0.0811694 0.0865027 0.0980077 0.1084578 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.593 5.891 7.449 6.933 7.359 When d₁ < d₁₀, d_(1m) (nm) = 4.233 4.238 4.249 4.053 4.794 When n₂ ≧ n₂₀, n_(2m) = 0.1534875 0.1581152 0.1275403 0.1254932 0.1262524 When n₂ < n₂₀, n_(2m) = 0.1697559 0.1894849 0.1565967 0.1540796 0.1389709 When k₂ ≧ k₂₀, k_(2m) = 0.1955396 0.2168408 0.1812842 0.1267053 0.1044556 When k₂ < k₂₀, k_(2m) = 0.1505579 0.1602844 0.1066724 0.0950110 0.0860864 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.659 2.512 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 0.674 2.526 26.047 76.118 126.536

1.0 < NA ≦ 1.1 15 < T ≦ 25 4/34 Case 2-06 2-07 2-08 2-09 2-10 n₁₀ 1.7693190 1.8089249 1.7628339 1.7223442 1.7176215 k₁₀ 0.1013402 0.1064114 0.0939832 0.0810686 0.0701007 d₁₀ (nm) 103.520 98.052 94.416 93.840 92.613 n₂₀ 3.2583829 3.5132584 1.8414170 1.6728089 1.6759231 k₂₀ 2.5781374 0.5501157 0.3092618 0.2260423 0.1876577 d₂₀ (nm) 3.121 29.615 125.923 203.086 261.422 When n₁ ≧ n₁₀, n_(1m) = 0.0673926 0.0573926 0.0482458 0.0469287 0.0525317 When n₁ < n₁₀, n_(1m) = 0.0182031 0.0185083 0.0097595 0.0170142 0.0338733 When k₁ ≧ k₁₀, k_(1m) = 0.0401636 0.0390552 0.0281750 0.0413513 0.0608655 When k₁ < k₁₀, k_(1m) = 0.0427917 0.0434326 0.0360242 0.0422778 0.0485864 When d₁ ≧ d₁₀, d_(1m) (nm) = 13.610 8.991 12.525 18.295 32.066 When d₁ < d₁₀, d_(1m) (nm) = 3.396 2.738 1.840 4.621 10.547 When n₂ ≧ n₂₀, n_(2m) = 0.2210974 0.0961951 0.1120178 0.0558118 0.0724255 When n₂ < n₂₀, n_(2m) = 0.3992041 0.1262915 0.1064856 0.0968689 0.1070728 When k₂ ≧ k₂₀, k_(2m) = 0.3438342 0.0862598 0.0939502 0.0666077 0.0700989 When k₂ < k₂₀, k_(2m) = 0.3502100 0.1067542 0.0758923 0.0625208 0.0568274 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.375 0.986 11.083 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 0.497 1.167 5.972 24.056 73.630 1.0 < NA ≦ 1.1 15 < T ≦ 25 Case 2-11 2-12 2-13 2-14 2-15 n₁₀ 1.7053748 1.7067869 1.7234396 1.7309823 1.6924662 k₁₀ 0.0681661 0.0592936 0.0819972 0.0887627 0.0804140 d₁₀ (nm) 163.030 160.569 177.819 175.110 219.254 n₂₀ 1.6640911 1.6873274 5.0800961 9.5526510 1.8031504 k₂₀ 0.2056957 0.1726858 4.2173316 0.4602806 0.3794202 d₂₀ (nm) 200.113 255.377 1.054 10.232 74.951 When n₁ ≧ n₁₀, n_(1m) = 0.0438354 0.0515637 0.0646301 0.0589197 0.0054749 When n₁ < n₁₀, n_(1m) = 0.0254907 0.0493457 0.0095056 0.0049573 0.0624841 When k₁ ≧ k₁₀, k_(1m) = 0.0375134 0.0575159 0.0321326 0.0226172 0.0163196 When k₁ < k₁₀, k_(1m) = 0.0331799 0.0410168 0.0264954 0.0199707 0.0128040 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ 31.849 25.868 2.747 When d₁ < d₁₀, d_(1m) (nm) = 12.067 30.487 3.026 1.416 23.308 When n₂ ≧ n₂₀, n_(2m) = 0.0383606 0.0825500 0.3294275 0.0929846 0.1306152 When n₂ < n₂₀, n_(2m) = 0.0871460 0.1052795 0.6618042 0.0695691 0.0087109 When k₂ ≧ k₂₀, k_(2m) = 0.0339417 0.0505530 0.2910742 0.0198328 0.0299487 When k₂ < k₂₀, k_(2m) = 0.0549512 0.0515552 0.6908167 0.0870068 0.0872510 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 0.079 0.102 14.451 When d₂ < d₂₀, d_(2m) (nm) = 19.637 29.589 0.186 0.076 0.824

1.0 < NA ≦ 1.1 15 < T ≦ 25 5/34 Case 2-16 2-17 2-18 2-19 2-20 n₁₀ 1.6899914 1.6915311 1.6993450 1.6920076 1.6934597 k₁₀ 0.0755734 0.0696615 0.0558443 0.0677866 0.0658489 d₁₀ (nm) 211.286 207.258 221.722 276.645 270.093 n₂₀ 1.7113670 1.6964473 1.6905618 1.8143335 1.7261499 k₂₀ 0.2592681 0.2049428 0.1670525 0.3967808 0.2668883 d₂₀ (nm) 147.090 213.635 253.347 72.378 141.360 When n₁ ≧ n₁₀, n_(1m) = 0.0235022 0.0424463 0.0685596 0.0429663 0.0523279 When n₁ < n₁₀, n_(1m) = 0.0594971 0.0645703 0.0572424 0.0479932 0.0410938 When k₁ ≧ k₁₀, k_(1m) = 0.0403162 0.0547461 0.0583691 0.0593103 0.0600049 When k₁ < k₁₀, k_(1m) = 0.0289734 0.0380127 0.0376013 0.0355176 0.0379749 When d₁ ≧ d₁₀, d_(1m) (nm) = 18.036 ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 26.582 37.673 84.779 28.006 25.642 When n₂ ≧ n₂₀, n_(2m) = 0.1259094 0.1555469 0.2302234 0.1717712 0.1831995 When n₂ < n₂₀, n_(2m) = 0.0501526 0.1747144 0.0944592 0.1059167 0.2850769 When k₂ ≧ k₂₀, k_(2m) = 0.0866736 0.1221960 0.1032471 0.1537634 0.1870032 When k₂ < k₂₀, k_(2m) = 0.0848877 0.0779785 0.0578296 0.1330688 0.1069617 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 19.935 ∞ When d₂ < d₂₀, d_(2m) (nm) = 9.771 69.780 73.090 7.607 20.837 1.0 < NA ≦ 1.1 15 < T ≦ 25 Case 2-21 2-22 n₁₀ 1.6956703 1.6963391 k₁₀ 0.0621151 0.0576411 d₁₀ (nm) 266.327 263.935 n₂₀ 1.7069279 1.6975975 k₂₀ 0.2113995 0.1780179 d₂₀ (nm) 206.262 269.259 When n₁ ≧ n₁₀, n_(1m) = 0.0646936 0.0790869 When n₁ < n₁₀, n_(1m) = 0.0423181 0.0536755 When k₁ ≧ k₁₀, k_(1m) = 0.0600012 0.0616785 When k₁ < k₁₀, k_(1m) = 0.0403015 0.0417126 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 96.199 173.391 When n₂ ≧ n₂₀, n_(2m) = 0.4184778 0.3488293 When n₂ < n₂₀, n_(2m) = 0.2491736 0.2216455 When k₂ ≧ k₂₀, k_(2m) = 0.2142920 0.2197681 When k₂ < k₂₀, k_(2m) = 0.0934741 0.0831250 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 76.168 129.228

1.0 < NA ≦ 1.1 25 < T ≦ 35 6/34 Case 3-01 3-02 3-03 3-04 3-05 n₁₀ 1.8231304 1.8934062 1.9014262 1.8787814 1.8198973 k₁₀ 0.2426967 0.1289044 0.1029443 0.1135143 0.1197953 d₁₀ (nm) 38.982 22.067 15.306 12.334 96.975 n₂₀ 4.7825941 1.9169501 1.7714781 1.6867670 4.7572984 k₂₀ 0.7852430 0.4577317 0.3309508 0.2583639 0.6218490 d₂₀ (nm) 19.992 118.684 191.572 261.269 20.274 When n₁ ≧ n₁₀, n_(1m) = 0.0699695 0.0767236 0.0951282 0.1154443 0.0479663 When n₁ < n₁₀, n_(1m) = 0.0498486 0.0532642 0.0626563 0.0817676 0.0146021 When k₁ ≧ k₁₀, k_(1m) = 0.0588489 0.0605774 0.0772998 0.1052600 0.0370215 When k₁ < k₁₀, k_(1m) = 0.0707385 0.0857886 0.1011462 0.1135143 0.0364331 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.137 6.730 6.574 7.047 7.725 When d₁ < d₁₀, d_(1m) (nm) = 3.775 3.826 3.782 4.562 2.005 When n₂ ≧ n₂₀, n_(2m) = 0.1872302 0.1343799 0.1259058 0.1236719 0.1156909 When n₂ < n₂₀, n_(2m) = 0.2029309 0.1567590 0.1523523 0.1408569 0.1282800 When k₂ ≧ k₂₀, k_(2m) = 0.2449841 0.2003137 0.1294177 0.1036865 0.0748242 When k₂ < k₂₀, k_(2m) = 0.1832959 0.1099609 0.0962476 0.0870068 0.1199268 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.864 ∞ ∞ ∞ 0.532 When d₂ < d₂₀, d_(2m) (nm) = 0.839 21.916 71.881 121.487 0.552 1.0 < NA ≦ 1.1 25 < T ≦ 35 Case 3-06 3-07 3-08 3-09 3-10 n₁₀ 1.7669399 1.7235821 1.7188964 1.7058208 1.7073313 k₁₀ 0.0997580 0.0847397 0.0726255 0.0710513 0.0613671 d₁₀ (nm) 94.208 93.618 92.505 162.764 160.462 n₂₀ 1.8558060 1.6692590 1.6760484 1.6616172 1.6880654 k₂₀ 0.3364471 0.2394056 0.1967286 0.2176394 0.1807904 d₂₀ (nm) 117.969 195.006 252.779 191.801 246.769 When n₁ ≧ n₁₀, n_(1m) = 0.0449036 0.0442456 0.0506409 0.0405530 0.0497949 When n₁ < n₁₀, n_(1m) = 0.0058435 0.0142969 0.0314514 0.0176917 0.0472620 When k₁ ≧ k₁₀, k_(1m) = 0.0200403 0.0369336 0.0583228 0.0316150 0.0541370 When k₁ < k₁₀, k_(1m) = 0.0309863 0.0404504 0.0477759 0.0303076 0.0405200 When d₁ ≧ d₁₀, d_(1m) (nm) = 10.713 16.167 24.298 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 1.043 3.709 9.337 7.078 23.845 When n₂ ≧ n₂₀, n_(2m) = 0.1063135 0.0450122 0.0699963 0.0309314 0.0781641 When n₂ < n₂₀, n_(2m) = 0.1037158 0.0932996 0.1043005 0.0818408 0.1014221 When k₂ ≧ k₂₀, k_(2m) = 0.0686243 0.0581018 0.0668628 0.0258777 0.0465137 When k₂ < k₂₀, k_(2m) = 0.0768091 0.0625977 0.0574854 0.0546838 0.0521045 When d₂ ≧ d₂₀, d_(2m) (nm) = 9.637 ∞ ∞ 13.452 ∞ When d₂ < d₂₀, d_(2m) (nm) = 3.465 21.705 32.653 17.168 25.940

1.0 < NA ≦ 1.1 25 < T ≦ 35 7/34 Case 3-11 3-12 3-13 3-14 3-15 3-16 n₁₀ 1.6893950 1.6912149 1.6993872 1.6931110 1.6955537 1.6962507 k₁₀ 0.0792587 0.0722082 0.0576769 0.0689939 0.0643335 0.0593120 d₁₀ (nm) 211.356 207.241 221.603 270.168 266.333 263.960 n₂₀ 1.7121469 1.6964479 1.6911809 1.7281714 1.7074500 1.6977843 k₂₀ 0.2795726 0.2163033 0.1749036 0.2885226 0.2235939 0.1860709 d₂₀ (nm) 139.203 205.754 244.825 133.446 198.195 261.024 When n₁ ≧ n₁₀, n_(1m) = 0.0187524 0.0389221 0.0673108 0.0502356 0.0624109 0.0782690 When n₁ < n₁₀, n_(1m) = 0.0561719 0.0620898 0.0525073 0.0397852 0.0411060 0.0522693 When k₁ ≧ k₁₀, k_(1m) = 0.0323267 0.0510889 0.0557678 0.0576538 0.0581616 0.0602515 When k₁ < k₁₀, k_(1m) = 0.0242261 0.0363989 0.0368542 0.0366370 0.0397400 0.0408899 When d₁ ≧ d₁₀, d_(1m) (nm) = 9.539 ∞ ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 23.792 36.062 80.743 23.618 94.755 119.700 When n₂ ≧ n₂₀, n_(2m) = 0.1258521 0.1531580 0.2394678 0.1860962 0.4430444 0.3636609 When n₂ < n₂₀, n_(2m) = 0.0334863 0.1783936 0.0871167 0.1489648 0.2583777 0.2256018 When k₂ ≧ k₂₀, k_(2m) = 0.0734656 0.1167761 0.1010718 0.1855286 0.2138647 0.2198901 When k₂ < k₂₀, k_(2m) = 0.0783704 0.0804089 0.0594067 0.1140149 0.0979895 0.0864600 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 6.823 66.025 33.786 17.363 72.201 97.445

1.0 < NA ≦ 1.1 35 < T ≦ 45 8/34 Case 4-01 4-02 4-03 4-04 4-05 n₁₀ 1.8741027 1.9162345 1.9099224 1.8839284 1.7973698 k₁₀ 0.2292405 0.1358555 0.1141224 0.1193744 0.1226911 d₁₀ (nm) 31.502 21.455 14.789 12.268 93.176 n₂₀ 2.4589695 1.9418040 1.7536831 1.6821215 2.1323779 k₂₀ 0.9273915 0.4998799 0.3442834 0.2672652 0.6525391 d₂₀ (nm) 39.688 110.373 186.067 253.238 46.828 When n₁ ≧ n₁₀, n_(1m) = 0.0646472 0.0749023 0.0953894 0.1145032 0.0393335 When n₁ < n₁₀, n_(1m) = 0.0466125 0.0512402 0.0611060 0.0810242 0.0058411 When k₁ ≧ k₁₀, k_(1m) = 0.0535095 0.0588599 0.0769971 0.1049219 0.0222083 When k₁ < k₁₀, k_(1m) = 0.0782300 0.0839917 0.1022253 0.1138464 0.0267273 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.763 5.873 6.052 6.690 7.237 When d₁ < d₁₀, d_(1m) (nm) = 3.092 3.244 3.414 4.349 0.847 When n₂ ≧ n₂₀, n_(2m) = 0.2061353 0.1383777 0.1254065 0.1201538 0.0908765 When n₂ < n₂₀, n_(2m) = 0.1985669 0.1593604 0.1521448 0.1405737 0.1202173 When k₂ ≧ k₂₀, k_(2m) = 0.2506677 0.2047961 0.1231897 0.1019714 0.0402307 When k₂ < k₂₀, k_(2m) = 0.1792896 0.1103943 0.0960205 0.0872583 0.1042542 When d₂ ≧ d₂₀, d_(2m) (nm) = 6.142 ∞ ∞ ∞ 4.028 When d₂ < d₂₀, d_(2m) (nm) = 4.657 20.982 70.019 92.164 2.915 1.0 < NA ≦ 1.1 35 < T ≦ 45 Case 4-06 4-07 4-08 4-09 4-10 n₁₀ 1.7231751 1.7198225 1.7057007 1.7079030 1.6886446 k₁₀ 0.0881939 0.0748307 0.0735111 0.0631371 0.0826816 d₁₀ (nm) 93.194 92.273 162.218 160.241 210.810 n₂₀ 1.6583398 1.6753837 1.6560667 1.6895692 1.7077667 k₂₀ 0.2493789 0.2040438 0.2270715 0.1875698 0.2975930 d₂₀ (nm) 187.627 244.025 183.673 237.741 132.542 When n₁ ≧ n₁₀, n_(1m) = 0.0413782 0.0488660 0.0374475 0.0482141 0.0106323 When n₁ < n₁₀, n_(1m) = 0.0123999 0.0300476 0.0153528 0.0446057 0.0519153 When k₁ ≧ k₁₀, k_(1m) = 0.0333630 0.0568799 0.0277051 0.0515784 0.0235608 When k₁ < k₁₀, k_(1m) = 0.0393298 0.0467004 0.0300195 0.0397412 0.0190234 When d₁ ≧ d₁₀, d_(1m) (nm) = 13.894 20.818 24.657 ∞ 6.948 When d₁ < d₁₀, d_(1m) (nm) = 3.123 8.547 5.758 21.149 21.403 When n₂ ≧ n₂₀, n_(2m) = 0.0360730 0.0689490 0.0276392 0.0753564 0.1220337 When n₂ < n₂₀, n_(2m) = 0.0901636 0.1032593 0.0781885 0.0941541 0.0190320 When k₂ ≧ k₂₀, k_(2m) = 0.0474146 0.0634253 0.0205627 0.0433423 0.0612073 When k₂ < k₂₀, k_(2m) = 0.0610718 0.0577832 0.0533984 0.0526196 0.0606079 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 8.473 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 20.321 31.703 15.881 21.519 3.543

1.0 < NA ≦ 1.1 35 < T ≦ 45 9/34 Case 4-11 4-12 4-13 4-14 n₁₀ 1.6995870 1.6927517 1.6954892 1.6961809 k₁₀ 0.0592337 0.0720967 0.0662812 0.0606151 d₁₀ (nm) 221.497 269.568 265.955 263.663 n₂₀ 1.6927290 1.7225076 1.7055518 1.6966094 k₂₀ 0.1818275 0.3075740 0.2340649 0.1927366 d₂₀ (nm) 235.781 126.653 190.864 253.572 When n₁ ≧ n₁₀, n_(1m) = 0.0661182 0.0430298 0.0571948 0.0777271 When n₁ < n₁₀, n_(1m) = 0.0480371 0.0376990 0.0396948 0.0514954 When k₁ ≧ k₁₀, k_(1m) = 0.0532056 0.0552930 0.0563965 0.0590613 When k₁ < k₁₀, k_(1m) = 0.0358557 0.0353455 0.0387683 0.0400696 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 78.174 21.398 89.629 112.221 When n₂ ≧ n₂₀, n_(2m) = 0.2507446 0.1898645 0.4617859 0.3498169 When n₂ < n₂₀, n_(2m) = 0.0793469 0.1193628 0.2673291 0.2271130 When k₂ ≧ k₂₀, k_(2m) = 0.0998633 0.1866309 0.2129163 0.2195020 When k₂ < k₂₀, k_(2m) = 0.0613184 0.1217163 0.1026648 0.0902368 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 33.021 15.026 69.134 84.327 1.0 < NA ≦ 1.1 45 < T ≦ 55 Case 5-01 5-02 5-03 5-04 5-05 n₁₀ 1.8808544 1.9316654 1.9082705 1.8785232 1.7211644 k₁₀ 0.2454152 0.1473610 0.1322705 0.1271526 0.0906139 d₁₀ (nm) 24.855 18.765 14.189 12.435 92.694 n₂₀ 1.8495394 1.8569906 1.7144055 1.6714546 1.6423304 k₂₀ 0.8565648 0.5034890 0.3458924 0.2699971 0.2528050 d₂₀ (nm) 51.788 110.667 182.182 245.412 180.257 When n₁ ≧ n₁₀, n_(1m) = 0.0633093 0.0784436 0.0967798 0.1127563 0.0394434 When n₁ < n₁₀, n_(1m) = 0.0379272 0.0483252 0.0593640 0.0800098 0.0123450 When k₁ ≧ k₁₀, k_(1m) = 0.0520349 0.0606396 0.0782654 0.1046387 0.0323718 When k₁ < k₁₀, k_(1m) = 0.0704724 0.0844775 0.1016626 0.1111450 0.0404236 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.463 5.359 5.721 6.653 12.460 When d₁ < d₁₀, d_(1m) (nm) = 2.319 2.677 3.157 4.357 3.091 When n₂ ≧ n₂₀, n_(2m) = 0.1530676 0.1305420 0.1246069 0.1153186 0.0322009 When n₂ < n₂₀, n_(2m) = 0.1897241 0.1692273 0.1526025 0.1380359 0.0893225 When k₂ ≧ k₂₀, k_(2m) = 0.1919946 0.1591870 0.1122729 0.0997217 0.0401709 When k₂ < k₂₀, k_(2m) = 0.1170728 0.1032434 0.0948108 0.0869653 0.0592017 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 9.182 23.164 70.833 93.569 20.376

1.0 < NA ≦ 1.1 45 < T ≦ 55 10/34 Case 5-06 5-07 5-08 5-09 5-10 n₁₀ 1.7204079 1.7050622 1.7085349 1.6878153 1.6980473 k₁₀ 0.0761160 0.0748972 0.0642166 0.0847734 0.0703784 d₁₀ (nm) 92.018 161.630 160.005 209.683 224.445 n₂₀ 1.6751968 1.6489715 1.6919631 1.6959203 1.6616204 k₂₀ 0.2080809 0.2315625 0.1914882 0.3070669 0.2238826 d₂₀ (nm) 234.537 175.108 227.913 127.092 171.370 When n₁ ≧ n₁₀, n_(1m) = 0.0481116 0.0356750 0.0469714 0.0053320 0.0535730 When n₁ < n₁₀, n_(1m) = 0.0302478 0.0193359 0.0419556 0.0458972 0.0248047 When k₁ ≧ k₁₀, k_(1m) = 0.0572302 0.0287097 0.0507117 0.0169995 0.0427319 When k₁ < k₁₀, k_(1m) = 0.0456555 0.0334753 0.0389539 0.0159290 0.0235608 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.317 21.414 ∞ 2.347 ∞ When d₁ < d₁₀, d_(1m) (nm) = 8.336 7.128 19.272 19.688 12.738 When n₂ ≧ n₂₀, n_(2m) = 0.0703723 0.0326379 0.0750854 0.1108911 0.0566052 When n₂ < n₂₀, n_(2m) = 0.1049292 0.0778333 0.0787329 0.0108118 0.0780139 When k₂ ≧ k₂₀, k_(2m) = 0.0616284 0.0216638 0.0424329 0.0606311 0.0720593 When k₂ < k₂₀, k_(2m) = 0.0584753 0.0525964 0.0537231 0.0383350 0.0623987 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 8.070 ∞ 32.807 ∞ When d₂ < d₂₀, d_(2m) (nm) = 32.758 15.758 17.351 1.915 21.521 1.0 < NA ≦ 1.1 45 < T ≦ 55 Case 5-11 5-12 5-13 5-14 n₁₀ 1.6999707 1.6924126 1.6955002 1.6961000 k₁₀ 0.0601951 0.0742318 0.0674212 0.0611797 d₁₀ (nm) 221.512 268.357 265.225 263.146 n₂₀ 1.6952970 1.7068352 1.7004174 1.6940899 k₂₀ 0.1862586 0.3173492 0.2397614 0.1962440 d₂₀ (nm) 225.852 120.697 183.997 246.462 When n₁ ≧ n₁₀, n_(1m) = 0.0654663 0.0386316 0.0536462 0.0776611 When n₁ < n₁₀, n_(1m) = 0.0445935 0.0350720 0.0381848 0.0515515 When k₁ ≧ k₁₀, k_(1m) = 0.0509546 0.0537524 0.0551721 0.0583948 When k₁ < k₁₀, k_(1m) = 0.0349414 0.0344934 0.0383105 0.0394385 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 76.496 19.128 37.283 109.648 When n₂ ≧ n₂₀, n_(2m) = 0.1168579 0.1905981 0.3934021 0.3400916 When n₂ < n₂₀, n_(2m) = 0.0700696 0.1027393 0.2743970 0.2283606 When k₂ ≧ k₂₀, k_(2m) = 0.1002319 0.1933838 0.2120459 0.2188281 When k₂ < k₂₀, k_(2m) = 0.0624707 0.1168652 0.1050110 0.0926550 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 28.597 13.909 67.541 81.764

1.0 < NA ≦ 1.1 55 < T ≦ 65 11/34 Case 6-01 6-02 6-03 6-04 6-05 n₁₀ 1.8609133 1.9462238 1.9002376 1.8750233 1.8816918 k₁₀ 0.2699154 0.1588548 0.1498745 0.1302055 0.0811209 d₁₀ (nm) 23.275 16.938 13.880 12.592 12.084 n₂₀ 1.6780954 1.8061043 1.6764313 1.6672162 1.7277101 k₂₀ 0.8091000 0.4989592 0.3420875 0.2718902 0.2394028 d₂₀ (nm) 51.309 107.791 176.900 235.718 282.393 When n₁ ≧ n₁₀, n_(1m) = 0.0700366 0.0847327 0.0979871 0.1121912 0.1205115 When n₁ < n₁₀, n_(1m) = 0.0352271 0.0459912 0.0579346 0.0799817 0.0890784 When k₁ ≧ k₁₀, k_(1m) = 0.0520923 0.0625745 0.0794043 0.1043726 0.1106958 When k₁ < k₁₀, k_(1m) = 0.0664282 0.0874719 0.0997217 0.1093811 0.0811209 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.496 4.952 5.583 6.704 7.616 When d₁ < d₁₀, d_(1m) (nm) = 2.084 2.260 3.039 4.426 5.147 When n₂ ≧ n₂₀, n_(2m) = 0.1454468 0.1290356 0.1219507 0.1104688 0.1083423 When n₂ < n₂₀, n_(2m) = 0.1338672 0.1849402 0.1524817 0.1364417 0.1532007 When k₂ ≧ k₂₀, k_(2m) = 0.1326758 0.1316541 0.1033948 0.0988464 0.1079004 When k₂ < k₂₀, k_(2m) = 0.1106470 0.1010791 0.0949341 0.0882678 0.0854614 When d₂ ≧ d₂₀, d_(2m) (nm) = 18.182 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 8.638 17.532 68.073 94.482 130.723 1.0 < NA ≦ 1.1 55 < T ≦ 65 Case 6-06 6-07 6-08 6-09 6-10 n₁₀ 1.7196449 1.7211216 1.7282121 1.7047574 1.7094298 k₁₀ 0.0916508 0.0765241 0.0683348 0.0753118 0.0647325 d₁₀ (nm) 92.440 91.942 92.298 161.355 159.970 n₂₀ 1.6323282 1.6777604 1.7222619 1.6462273 1.6962571 k₂₀ 0.2539653 0.2105462 0.1825246 0.2341241 0.1938378 d₂₀ (nm) 171.320 223.941 274.062 165.232 217.150 When n₁ ≧ n₁₀, n_(1m) = 0.0390417 0.0485681 0.0546460 0.0358069 0.0474683 When n₁ < n₁₀, n_(1m) = 0.0139282 0.0313391 0.0292078 0.0174304 0.0407373 When k₁ ≧ k₁₀, k_(1m) = 0.0333240 0.0585132 0.0578357 0.0324670 0.0508789 When k₁ < k₁₀, k_(1m) = 0.0406140 0.0454041 0.0481470 0.0321411 0.0389600 When d₁ ≧ d₁₀, d_(1m) (nm) = 12.043 19.132 42.010 19.174 ∞ When d₁ < d₁₀, d_(1m) (nm) = 3.525 8.472 8.190 6.358 18.590 When n₂ ≧ n₂₀, n_(2m) = 0.0324304 0.0734375 0.0906226 0.0327905 0.0764417 When n₂ < n₂₀, n_(2m) = 0.0896448 0.1073743 0.1223853 0.0797839 0.0702637 When k₂ ≧ k₂₀, k_(2m) = 0.0391357 0.0623755 0.0817871 0.0268372 0.0433899 When k₂ < k₂₀, k_(2m) = 0.0597375 0.0603992 0.0593811 0.0545007 0.0559253 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 9.153 ∞ When d₂ < d₂₀, d_(2m) (nm) = 20.788 29.764 77.892 16.109 14.325

1.0 < NA ≦ 1.1 55 < T ≦ 65 12/34 Case 6-11 6-12 6-13 6-14 6-15 6-16 n₁₀ 1.6870964 1.6986314 1.7003667 1.6951156 1.6955653 1.6958377 k₁₀ 0.0858972 0.0705958 0.0607285 0.0571177 0.0680298 0.0528303 d₁₀ (nm) 208.556 224.893 221.557 215.781 264.644 274.984 n₂₀ 1.6830399 1.6622291 1.6983916 1.6957463 1.6953987 1.6882898 k₂₀ 0.3090553 0.2274423 0.1887213 0.1617780 0.2417239 0.1657751 d₂₀ (nm) 121.249 160.831 215.383 277.216 176.078 275.044 When n₁ ≧ n₁₀, n_(1m) = 0.0051123 0.0520032 0.0662122 0.0842517 0.0515662 0.0590991 When n₁ < n₁₀, n_(1m) = 0.0418372 0.0227649 0.0435059 0.0645801 0.0369092 0.0581189 When k₁ ≧ k₁₀, k_(1m) = 0.0150793 0.0436267 0.0489954 0.0563855 0.0542810 0.0684131 When k₁ < k₁₀, k_(1m) = 0.0179541 0.0228833 0.0348535 0.0371240 0.0381006 0.0375098 When d₁ ≧ d₁₀, d_(1m) (nm) = 2.247 ∞ ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 18.385 11.933 75.920 58.822 33.649 113.219 When n₂ ≧ n₂₀, n_(2m) = 0.1010083 0.0477234 0.1065527 0.2254480 0.3829150 0.2789856 When n₂ < n₂₀, n_(2m) = 0.0100110 0.0759302 0.0611096 0.1540564 0.2775842 0.2219617 When k₂ ≧ k₂₀, k_(2m) = 0.0726611 0.0766821 0.1015344 0.1236780 0.2119995 0.1981201 When k₂ < k₂₀, k_(2m) = 0.0309253 0.0590527 0.0616418 0.0602039 0.1044287 0.0735400 When d₂ ≧ d₂₀, d_(2m) (nm) = 25.845 22.079 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 1.717 20.127 24.695 81.257 67.124 97.500

1.0 < NA ≦ 1.1 65 < T ≦ 75 13/34 Case 7-01 7-02 7-03 7-04 7-05 n₁₀ 1.8339628 1.9445237 1.8939902 1.8811858 1.7203230 k₁₀ 0.2973905 0.1726202 0.1563846 0.0833966 0.0922740 d₁₀ (nm) 24.925 17.287 14.253 12.228 92.527 n₂₀ 1.6419965 1.7953047 1.6659458 1.7269957 1.6328842 k₂₀ 0.8698975 0.5162004 0.3485215 0.2426363 0.2599948 d₂₀ (nm) 41.723 98.907 167.112 272.914 160.703 When n₁ ≧ n₁₀, n_(1m) = 0.0734924 0.0853552 0.0964307 0.1197986 0.0394055 When n₁ < n₁₀, n_(1m) = 0.0377722 0.0427490 0.0559692 0.0877673 0.0144592 When k₁ ≧ k₁₀, k_(1m) = 0.0448938 0.0589941 0.0770850 0.1096667 0.0331616 When k₁ < k₁₀, k_(1m) = 0.0453357 0.0848169 0.0975195 0.0833966 0.0410388 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.571 4.784 5.590 7.648 12.091 When d₁ < d₁₀, d_(1m) (nm) = 2.315 2.092 3.027 5.109 3.655 When n₂ ≧ n₂₀, n_(2m) = 0.1366638 0.1348682 0.1167786 0.1080664 0.0326196 When n₂ < n₂₀, n_(2m) = 0.1076978 0.1944104 0.1524536 0.1545313 0.0900854 When k₂ ≧ k₂₀, k_(2m) = 0.1648022 0.1338904 0.1021130 0.1080652 0.0396484 When k₂ < k₂₀, k_(2m) = 0.1324670 0.1078918 0.0977759 0.0865271 0.0625085 When d₂ ≧ d₂₀, d_(2m) (nm) = 12.499 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 5.747 14.376 64.164 128.680 19.557 1.0 < NA ≦ 1.1 65 < T ≦ 75 Case 7-06 7-07 7-08 7-09 7-10 n₁₀ 1.7224265 1.7294779 1.7053201 1.7102741 1.7133466 k₁₀ 0.0770592 0.0692299 0.0757255 0.0654045 0.0629386 d₁₀ (nm) 92.053 92.385 161.452 160.136 160.381 n₂₀ 1.6819841 1.7252879 1.6485370 1.7000507 1.7220503 k₂₀ 0.2150120 0.1858377 0.2399747 0.1977447 0.1698335 d₂₀ (nm) 213.162 263.723 154.588 206.614 260.757 When n₁ ≧ n₁₀, n_(1m) = 0.0490625 0.0548535 0.0366443 0.0483020 0.0569666 When n₁ < n₁₀, n_(1m) = 0.0311902 0.0280200 0.0173645 0.0416309 0.0190027 When k₁ ≧ k₁₀, k_(1m) = 0.0581604 0.0565332 0.0330920 0.0498926 0.0402344 When k₁ < k₁₀, k_(1m) = 0.0461389 0.0475879 0.0324707 0.0390747 0.0240051 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.214 40.761 19.902 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 8.328 7.705 6.285 18.989 5.694 When n₂ ≧ n₂₀, n_(2m) = 0.0747375 0.0917908 0.0322156 0.0769946 0.1011584 When n₂ < n₂₀, n_(2m) = 0.1078540 0.1217822 0.0813562 0.0689685 0.1343567 When k₂ ≧ k₂₀, k_(2m) = 0.0634705 0.0827625 0.0283752 0.0430542 0.0435730 When k₂ < k₂₀, k_(2m) = 0.0623401 0.0604163 0.0573535 0.0576453 0.0570081 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 9.136 38.239 ∞ When d₂ < d₂₀, d_(2m) (nm) = 27.810 75.918 15.379 13.085 10.847

1.0 < NA ≦ 1.1 65 < T ≦ 75 14/34 Case 7-11 7-12 7-13 7-14 7-15 7-16 n₁₀ 1.6861768 1.6990769 1.7003759 1.6946436 1.6954303 1.6957423 k₁₀ 0.0881028 0.0709373 0.0613969 0.0577579 0.0690806 0.0532811 d₁₀ (nm) 208.148 225.005 221.468 215.315 264.876 274.848 n₂₀ 1.6733849 1.6647354 1.6998938 1.6946016 1.6937197 1.6878755 k₂₀ 0.3136681 0.2329033 0.1918751 0.1634050 0.2458138 0.1674492 d₂₀ (nm) 112.385 150.349 205.497 268.128 165.269 265.685 When n₁ ≧ n₁₀, n_(1m) = 0.0025806 0.0529590 0.0676086 0.0859229 0.0516138 0.0588110 When n₁ < n₁₀, n_(1m) = 0.0409998 0.0231177 0.0444312 0.0666504 0.0367175 0.0575696 When k₁ ≧ k₁₀, k_(1m) = 0.0094263 0.0435510 0.0474890 0.0560022 0.0529260 0.0681641 When k₁ < k₁₀, k_(1m) = 0.0156848 0.0234912 0.0355322 0.0372656 0.0371912 0.0379443 When d₁ ≧ d₁₀, d_(1m) (nm) = 1.037 ∞ ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 17.094 12.289 76.126 56.280 33.058 112.076 When n₂ ≧ n₂₀, n_(2m) = 0.1039172 0.0468506 0.1077234 0.2240735 0.4022729 0.2806909 When n₂ < n₂₀, n_(2m) = 0.0058093 0.0753308 0.0576575 0.1556287 0.2760486 0.2229114 When k₂ ≧ k₂₀, k_(2m) = 0.0664124 0.0758972 0.1012000 0.1249744 0.2123950 0.1986609 When k₂ < k₂₀, k_(2m) = 0.0178174 0.0630115 0.0645288 0.0620288 0.1063135 0.0745801 When d₂ ≧ d₂₀, d_(2m) (nm) = 26.367 19.187 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 1.017 18.602 23.769 80.847 66.469 89.270

1.0 < NA ≦ 1.1 75 < T ≦ 85 15/34 Case 8-01 8-02 8-03 8-04 8-05 n₁₀ 1.9187259 1.8967518 1.8757876 1.8806788 1.7234296 k₁₀ 0.1881900 0.1527475 0.1318014 0.0899399 0.0945092 d₁₀ (nm) 20.509 15.221 13.247 12.412 92.722 n₂₀ 1.8283337 1.6893708 1.6726776 1.7211162 1.6393014 k₂₀ 0.5739613 0.3734166 0.2883472 0.2492460 0.2743485 d₂₀ (nm) 84.746 154.221 215.129 265.394 150.270 When n₁ ≧ n₁₀, n_(1m) = 0.0766943 0.0922229 0.1080322 0.1177502 0.0391516 When n₁ < n₁₀, n_(1m) = 0.0399988 0.0530884 0.0750195 0.0852625 0.0112524 When k₁ ≧ k₁₀, k_(1m) = 0.0507166 0.0712622 0.0980225 0.1073047 0.0289392 When k₁ < k₁₀, k_(1m) = 0.0771802 0.0964258 0.1069458 0.0899399 0.0412610 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.195 5.640 6.681 7.548 11.825 When d₁ < d₁₀, d_(1m) (nm) = 2.249 2.987 4.301 4.972 2.719 When n₂ ≧ n₂₀, n_(2m) = 0.1444995 0.1155615 0.1091333 0.1093396 0.0288635 When n₂ < n₂₀, n_(2m) = 0.1897876 0.1532776 0.1435217 0.1541382 0.0890479 When k₂ ≧ k₂₀, k_(2m) = 0.1811243 0.1099194 0.1006726 0.1075403 0.0356238 When k₂ < k₂₀, k_(2m) = 0.1194946 0.1025110 0.0922131 0.0871228 0.0649683 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 15.313 64.664 82.555 124.472 16.892 1.0 < NA ≦ 1.1 75 < T ≦ 85 Case 8-06 8-07 8-08 8-09 8-10 n₁₀ 1.7235983 1.7294254 1.7064538 1.7103862 1.7133072 k₁₀ 0.0790587 0.0706491 0.0777504 0.0670250 0.0637197 d₁₀ (nm) 92.129 92.482 161.668 160.278 160.467 n₂₀ 1.6815454 1.7233644 1.6498826 1.6983722 1.7219131 k₂₀ 0.2228770 0.1918670 0.2514894 0.2047961 0.1752501 d₂₀ (nm) 204.187 255.172 145.038 197.922 251.781 When n₁ ≧ n₁₀, n_(1m) = 0.0481958 0.0539050 0.0362122 0.0474792 0.0556775 When n₁ < n₁₀, n_(1m) = 0.0281580 0.0270288 0.0158582 0.0428101 0.0187244 When k₁ ≧ k₁₀, k_(1m) = 0.0546558 0.0547986 0.0255066 0.0459753 0.0391089 When k₁ < k₁₀, k_(1m) = 0.0470496 0.0476624 0.0330371 0.0375122 0.0244470 When d₁ ≧ d₁₀, d_(1m) (nm) = 18.433 40.484 19.881 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 7.376 7.380 6.011 13.737 5.649 When n₂ ≧ n₂₀, n_(2m) = 0.0719336 0.0903259 0.0311267 0.0755847 0.1032422 When n₂ < n₂₀, n_(2m) = 0.1049182 0.1183936 0.0789893 0.0715295 0.1268079 When k₂ ≧ k₂₀, k_(2m) = 0.0610889 0.0802148 0.0194653 0.0384314 0.0401990 When k₂ < k₂₀, k_(2m) = 0.0626282 0.0606787 0.0584229 0.0575549 0.0569128 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 6.414 35.522 ∞ When d₂ < d₂₀, d_(2m) (nm) = 26.455 72.823 13.152 13.515 11.677

1.0 < NA ≦ 1.1 75 < T ≦ 85 16/34 Case 8-11 8-12 8-13 8-14 8-15 n₁₀ 1.6987335 1.6895310 1.6997408 1.6947661 1.6915645 k₁₀ 0.0728489 0.0798395 0.0628030 0.0583146 0.0796327 d₁₀ (nm) 224.384 207.056 221.189 215.749 269.434 n₂₀ 1.6635130 1.6873868 1.6972371 1.6943199 1.7013553 k₂₀ 0.2423517 0.2464201 0.1976117 0.1671130 0.3520060 d₂₀ (nm) 141.699 160.447 197.186 258.789 90.540 When n₁ ≧ n₁₀, n_(1m) = 0.0550525 0.0211743 0.0680066 0.0840710 0.0339661 When n₁ < n₁₀, n_(1m) = 0.0214722 0.0563281 0.0446484 0.0653711 0.0319580 When k₁ ≧ k₁₀, k_(1m) = 0.0399634 0.0394690 0.0462439 0.0552136 0.0498462 When k₁ < k₁₀, k_(1m) = 0.0230286 0.0247534 0.0358582 0.0373328 0.0319092 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ 18.382 ∞ ∞ 29.764 When d₁ < d₁₀, d_(1m) (nm) = 12.181 26.345 75.416 56.560 16.533 When n₂ ≧ n₂₀, n_(2m) = 0.0460742 0.1451038 0.1164050 0.2251794 0.2068530 When n₂ < n₂₀, n_(2m) = 0.0736353 0.0531665 0.0615222 0.1544678 0.0982214 When k₂ ≧ k₂₀, k_(2m) = 0.0651685 0.0979858 0.0980493 0.1211584 0.1840808 When k₂ < k₂₀, k_(2m) = 0.0709375 0.0696692 0.0675049 0.0632251 0.1287793 When d₂ ≧ d₂₀, d_(2m) (nm) = 17.326 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 17.676 13.280 25.586 81.223 11.833 1.0 < NA ≦ 1.1 75 < T ≦ 85 Case 8-16 8-17 n₁₀ 1.6950499 1.6956172 k₁₀ 0.0706693 0.0541668 d₁₀ (nm) 266.123 274.905 n₂₀ 1.6983222 1.6860233 k₂₀ 0.2573177 0.1712439 d₂₀ (nm) 152.851 257.337 When n₁ ≧ n₁₀, n_(1m) = 0.0524487 0.0590308 When n₁ < n₁₀, n_(1m) = 0.0375452 0.0580872 When k₁ ≧ k₁₀, k_(1m) = 0.0517285 0.0672278 When k₁ < k₁₀, k_(1m) = 0.0352881 0.0380591 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 33.771 112.404 When n₂ ≧ n₂₀, n_(2m) = 0.2704944 0.2806836 When n₂ < n₂₀, n_(2m) = 0.2755872 0.2222266 When k₂ ≧ k₂₀, k_(2m) = 0.2121143 0.1985229 When k₂ < k₂₀, k_(2m) = 0.1128918 0.0743774 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 65.292 85.089

1.0 < NA ≦ 1.1 85 < T ≦ 95 17/34 Case 9-01 9-02 9-03 9-04 9-05 n₁₀ 1.8980776 1.9078109 1.8887573 1.8863613 1.7283563 k₁₀ 0.2063094 0.1489982 0.1336370 0.0963846 0.0991844 d₁₀ (nm) 23.234 16.351 13.295 12.395 92.796 n₂₀ 1.8542997 1.7325536 1.6803356 1.7165602 1.6494143 k₂₀ 0.6486453 0.4126982 0.3065809 0.2596921 0.2975623 d₂₀ (nm) 73.732 141.036 205.639 258.147 140.358 When n₁ ≧ n₁₀, n_(1m) = 0.0711987 0.0870154 0.1059106 0.1162891 0.0375220 When n₁ < n₁₀, n_(1m) = 0.0384509 0.0501709 0.0716760 0.0832544 0.0056213 When k₁ ≧ k₁₀, k_(1m) = 0.0445569 0.0643555 0.0939661 0.1053198 0.0189441 When k₁ < k₁₀, k_(1m) = 0.0730103 0.0941223 0.1072681 0.0963846 0.0324854 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.225 5.526 6.240 7.169 10.895 When d₁ < d₁₀, d_(1m) (nm) = 2.347 2.839 3.908 4.670 1.261 When n₂ ≧ n₂₀, n_(2m) = 0.1402551 0.1159338 0.1109766 0.1105359 0.0179150 When n₂ < n₂₀, n_(2m) = 0.1828406 0.1543176 0.1513220 0.1539343 0.0865198 When k₂ ≧ k₂₀, k_(2m) = 0.2259802 0.1235034 0.1018750 0.1065100 0.0230737 When k₂ < k₂₀, k_(2m) = 0.1284644 0.1059631 0.0936096 0.0878577 0.0660486 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 14.635 When d₂ < d₂₀, d_(2m) (nm) = 14.747 31.656 77.584 118.336 14.252 1.0 < NA ≦ 1.1 85 < T ≦ 95 Case 9-06 9-07 9-08 9-09 9-10 n₁₀ 1.7247011 1.7288637 1.7100270 1.7129082 1.6894084 k₁₀ 0.0825295 0.0727638 0.0697395 0.0648353 0.0825836 d₁₀ (nm) 92.134 92.409 160.277 160.281 208.412 n₂₀ 1.6784446 1.7181265 1.6932584 1.7202855 1.6911413 k₂₀ 0.2345042 0.1997137 0.2147807 0.1822190 0.2636300 d₂₀ (nm) 196.220 247.866 190.362 243.795 148.443 When n₁ ≧ n₁₀, n_(1m) = 0.0458069 0.0520715 0.0445874 0.0530676 0.0168896 When n₁ < n₁₀, n_(1m) = 0.0231628 0.0254517 0.0291443 0.0189783 0.0564331 When k₁ ≧ k₁₀, k_(1m) = 0.0487341 0.0524194 0.0390308 0.0374463 0.0317554 When k₁ < k₁₀, k_(1m) = 0.0471680 0.0474573 0.0341357 0.0249304 0.0174866 When d₁ ≧ d₁₀, d_(1m) (nm) = 16.768 28.342 ∞ ∞ 8.653 When d₁ < d₁₀, d_(1m) (nm) = 5.875 6.859 8.481 5.666 22.933 When n₂ ≧ n₂₀, n_(2m) = 0.0654785 0.0851550 0.0721350 0.0992358 0.1489941 When n₂ < n₂₀, n_(2m) = 0.0999084 0.1129846 0.0702051 0.1184961 0.0323828 When k₂ ≧ k₂₀, k_(2m) = 0.0550916 0.0742688 0.0299036 0.0348145 0.0701428 When k₂ < k₂₀, k_(2m) = 0.0621350 0.0605774 0.0564990 0.0562878 0.0653857 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 30.126 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 23.369 34.214 13.997 12.255 9.630

1.0 < NA ≦ 1.1 85 < T ≦ 95 18/34 Case 9-11 9-12 9-13 9-14 9-15 n₁₀ 1.6987536 1.6951804 1.6947043 1.6953534 1.6955317 k₁₀ 0.0651428 0.0592977 0.0728049 0.0654850 0.0555447 d₁₀ (nm) 220.679 216.421 267.049 264.587 274.968 n₂₀ 1.6918669 1.6944812 1.7045529 1.6939885 1.6840742 k₂₀ 0.2062686 0.1733276 0.2758626 0.2171518 0.1777252 d₂₀ (nm) 189.869 249.686 142.407 204.731 249.243 When n₁ ≧ n₁₀, n_(1m) = 0.0676538 0.0804553 0.0514111 0.0772083 0.0594299 When n₁ < n₁₀, n_(1m) = 0.0423462 0.0620581 0.0375159 0.0498364 0.0587244 When k₁ ≧ k₁₀, k_(1m) = 0.0442505 0.0538220 0.0506982 0.0550830 0.0658191 When k₁ < k₁₀, k_(1m) = 0.0341040 0.0375916 0.0340894 0.0384644 0.0372644 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 72.990 57.440 26.805 108.871 112.765 When n₂ ≧ n₂₀, n_(2m) = 0.1307581 0.2319055 0.2365918 0.3979211 0.2850439 When n₂ < n₂₀, n_(2m) = 0.0673376 0.1520984 0.2827087 0.2359326 0.2177148 When k₂ ≧ k₂₀, k_(2m) = 0.0940100 0.1156787 0.2079443 0.2187415 0.1980774 When k₂ < k₂₀, k_(2m) = 0.0673755 0.0629675 0.1183691 0.0982336 0.0755945 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 25.557 76.954 64.091 75.273 81.971 1.0 < NA ≦ 1.1 95 < T ≦ 105 Case 10-01 10-02 10-03 10-04 10-05 n₁₀ 1.9059589 1.9224042 1.8961620 1.8922593 1.7254583 k₁₀ 0.2274286 0.1550778 0.1385328 0.1041345 0.0865833 d₁₀ (nm) 23.462 16.599 13.501 12.282 91.876 n₂₀ 1.8553331 1.7510181 1.6829419 1.7097147 1.6727903 k₂₀ 0.7355051 0.4490690 0.3248659 0.2697702 0.2465542 d₂₀ (nm) 66.090 131.424 196.767 251.116 188.519 When n₁ ≧ n₁₀, n_(1m) = 0.0671912 0.0841919 0.1023767 0.1153796 0.0426331 When n₁ < n₁₀, n_(1m) = 0.0345654 0.0474304 0.0675305 0.0814563 0.0184045 When k₁ ≧ k₁₀, k_(1m) = 0.0380615 0.0598425 0.0894568 0.1045068 0.0426917 When k₁ < k₁₀, k_(1m) = 0.0683374 0.0902014 0.1054456 0.1041345 0.0441687 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.558 5.118 5.874 6.783 14.297 When d₁ < d₁₀, d_(1m) (nm) = 1.985 2.531 3.589 4.355 4.476 When n₂ ≧ n₂₀, n_(2m) = 0.1216980 0.1117603 0.1100940 0.1104114 0.0579919 When n₂ < n₂₀, n_(2m) = 0.1802991 0.1554016 0.1498889 0.1534180 0.0956348 When k₂ ≧ k₂₀, k_(2m) = 0.2165979 0.1264526 0.1015808 0.1042908 0.0462366 When k₂ < k₂₀, k_(2m) = 0.1276270 0.1054065 0.0937561 0.0879675 0.0605090 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 11.858 29.189 73.755 91.689 21.669

1.0 < NA ≦ 1.1 95 < T ≦ 105 19/34 Case 10-06 10-07 10-08 10-09 10-10 n₁₀ 1.7286512 1.7096319 1.7125109 1.6891198 1.6979687 k₁₀ 0.0752622 0.0728333 0.0665034 0.0853163 0.0677690 d₁₀ (nm) 92.185 159.923 159.852 208.173 220.140 n₂₀ 1.7137581 1.6877059 1.7181911 1.6918411 1.6871092 k₂₀ 0.2076205 0.2252670 0.1890952 0.2826173 0.2165239 d₂₀ (nm) 240.302 182.766 235.934 141.112 182.186 When n₁ ≧ n₁₀, n_(1m) = 0.0500330 0.0406897 0.0503772 0.0132690 0.0644641 When n₁ < n₁₀, n_(1m) = 0.0231873 0.0169287 0.0155139 0.0507471 0.0375525 When k₁ ≧ k₁₀, k_(1m) = 0.0495398 0.0307520 0.0335327 0.0250305 0.0414893 When k₁ < k₁₀, k_(1m) = 0.0465039 0.0291895 0.0230286 0.0142859 0.0317957 When d₁ ≧ d₁₀, d_(1m) (nm) = 22.149 ∞ ∞ 5.803 ∞ When d₁ < d₁₀, d_(1m) (nm) = 6.093 5.010 4.544 20.171 66.095 When n₂ ≧ n₂₀, n_(2m) = 0.0807422 0.0673730 0.0968713 0.1414526 0.1231934 When n₂ < n₂₀, n_(2m) = 0.1109875 0.0569836 0.1140344 0.0176575 0.0690576 When k₂ ≧ k₂₀, k_(2m) = 0.0671313 0.0201965 0.0272949 0.0516113 0.0909106 When k₂ < k₂₀, k_(2m) = 0.0601733 0.0546924 0.0555640 0.0644128 0.0681702 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 22.678 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 33.234 12.401 9.751 3.545 24.752 1.0 < NA ≦ 1.1 95 < T ≦ 105 Case 10-11 10-12 10-13 n₁₀ 1.6953920 1.6945041 1.6957904 k₁₀ 0.0607310 0.0754015 0.0613078 d₁₀ (nm) 216.694 266.879 263.111 n₂₀ 1.6943518 1.7053190 1.6921380 k₂₀ 0.1805507 0.2962459 0.1886276 d₂₀ (nm) 240.824 134.581 257.166 When n₁ ≧ n₁₀, n_(1m) = 0.0773376 0.0489661 0.0744116 When n₁ < n₁₀, n_(1m) = 0.0532397 0.0362244 0.0544775 When k₁ ≧ k₁₀, k_(1m) = 0.0520667 0.0490686 0.0595886 When k₁ < k₁₀, k_(1m) = 0.0373279 0.0329797 0.0399255 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 56.748 22.698 144.280 When n₂ ≧ n₂₀, n_(2m) = 0.2401196 0.2258960 0.3617542 When n₂ < n₂₀, n_(2m) = 0.1505750 0.2863916 0.2146826 When k₂ ≧ k₂₀, k_(2m) = 0.1118237 0.2042285 0.2258594 When k₂ < k₂₀, k_(2m) = 0.0641272 0.1247363 0.0874829 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 74.466 22.579 121.018

1.0 < NA ≦ 1.1 105 < T ≦ 115 20/34 Case 11-01 11-02 11-03 11-04 11-05 n₁₀ 1.9374125 1.9018997 1.8965439 1.7253637 1.7289764 k₁₀ 0.1704110 0.1487976 0.1142225 0.0900184 0.0775142 d₁₀ (nm) 15.669 13.285 11.973 91.432 91.877 n₂₀ 1.7248980 1.6713435 1.6970963 1.6651786 1.7120256 k₂₀ 0.4663738 0.3352808 0.2748315 0.2549499 0.2134557 d₂₀ (nm) 126.299 189.496 244.759 180.505 231.728 When n₁ ≧ n₁₀, n_(1m) = 0.0844495 0.1011877 0.1161206 0.0397363 0.0483887 When n₁ < n₁₀, n_(1m) = 0.0440234 0.0656897 0.0810999 0.0155029 0.0208545 When k₁ ≧ k₁₀, k_(1m) = 0.0577478 0.0888123 0.1065247 0.0388269 0.0469031 When k₁ < k₁₀, k_(1m) = 0.0914417 0.1045447 0.1142225 0.0417639 0.0449243 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.564 5.473 6.423 12.314 18.889 When d₁ < d₁₀, d_(1m) (nm) = 2.111 3.313 4.088 3.639 5.309 When n₂ ≧ n₂₀, n_(2m) = 0.1026855 0.1066711 0.1092859 0.0538538 0.0798657 When n₂ < n₂₀, n_(2m) = 0.1573315 0.1496814 0.1507874 0.0957056 0.1124231 When k₂ ≧ k₂₀, k_(2m) = 0.1109265 0.0973877 0.1006897 0.0382251 0.0609106 When k₂ < k₂₀, k_(2m) = 0.0995313 0.0917126 0.0869214 0.0582397 0.0599487 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 32.204 71.551 94.669 21.979 35.901 1.0 < NA ≦ 1.1 105 < T ≦ 115 Case 11-06 11-07 11-08 11-09 11-10 n₁₀ 1.7092919 1.7124011 1.6891266 1.6977739 1.6952347 k₁₀ 0.0753499 0.0683625 0.0867081 0.0698574 0.0623107 d₁₀ (nm) 159.318 159.365 206.818 219.869 216.627 n₂₀ 1.6830351 1.7169838 1.6858604 1.6842611 1.6937881 k₂₀ 0.2331189 0.1941891 0.2953498 0.2258219 0.1869159 d₂₀ (nm) 174.468 227.412 138.155 173.345 231.738 When n₁ ≧ n₁₀, n_(1m) = 0.0373157 0.0484546 0.0121899 0.0603870 0.0758545 When n₁ < n₁₀, n_(1m) = 0.0105005 0.0089343 0.0409204 0.0315625 0.0474512 When k₁ ≧ k₁₀, k_(1m) = 0.0240833 0.0270752 0.0251843 0.0382471 0.0501941 When k₁ < k₁₀, k_(1m) = 0.0246826 0.0176978 0.0193188 0.0296948 0.0358765 When d₁ ≧ d₁₀, d_(1m) (nm) = 22.059 ∞ 5.261 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 3.023 2.568 16.255 V17.363 54.608 When n₂ ≧ n₂₀, n_(2m) = 0.0659399 0.0944360 0.1154346 0.0831506 0.2493335 When n₂ < n₂₀, n_(2m) = 0.0371252 0.1164661 0.0185925 0.0632410 0.1310596 When k₂ ≧ k₂₀, k_(2m) = 0.0133044 0.0180847 0.0609753 0.0891687 0.1103210 When k₂ < k₂₀, k_(2m) = 0.0529578 0.0555518 0.0785950 0.0680151 0.0652307 When d₂ ≧ d₂₀, d_(2m) (nm) = 18.030 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 8.732 5.378 3.627 23.361 52.894

1.0 < NA ≦ 1.1 105 < T ≦ 115 21/34 Case 11-11 11-12 n₁₀ 1.6944699 1.6958800 k₁₀ 0.0775933 0.0528961 d₁₀ (nm) 265.762 273.317 n₂₀ 1.6967397 1.6915993 k₂₀ 0.3115846 0.1649138 d₂₀ (nm) 129.093 288.010 When n₁ ≧ n₁₀, n_(1m) = 0.0466345 0.0703040 When n₁ < n₁₀, n_(1m) = 0.0341467 0.0549121 When k₁ ≧ k₁₀, k_(1m) = 0.0473621 0.0679175 When k₁ < k₁₀, k_(1m) = 0.0320862 0.0389246 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 20.031 180.011 When n₂ ≧ n₂₀, n_(2m) = 0.2202100 0.2749866 When n₂ < n₂₀, n_(2m) = 0.1339246 0.2056653 When k₂ ≧ k₂₀, k_(2m) = 0.2018127 0.2031665 When k₂ < k₂₀, k_(2m) = 0.1244751 0.0729272 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 18.618 105.982 1.0 < NA ≦ 1.1 115 < T ≦ 125 Case 12-01 12-02 12-03 12-04 12-05 n₁₀ 1.9729972 1.9456051 1.9005953 1.8972956 1.7255330 k₁₀ 0.2768129 0.1915481 0.1591490 0.1121564 0.0922673 d₁₀ (nm) 17.524 14.612 13.217 12.290 91.102 n₂₀ 1.6663342 1.6781309 1.6561276 1.7051607 1.6614760 k₂₀ 0.7544777 0.4665054 0.3399716 0.2822449 0.2607016 d₂₀ (nm) 64.842 122.845 181.593 233.141 171.070 When n₁ ≧ n₁₀, n_(1m) = 0.0730835 0.0862573 0.1002148 0.1132361 0.0385791 When n₁ < n₁₀, n_(1m) = 0.0179053 0.0397437 0.0650696 0.0790137 0.0152405 When k₁ ≧ k₁₀, k_(1m) = 0.0247314 0.0556897 0.0891748 0.1035071 0.0386047 When k₁ < k₁₀, k_(1m) = 0.0592480 0.0960681 0.1016016 0.1121564 0.0414185 When d₁ ≧ d₁₀, d_(1m) (nm) = 2.961 4.145 5.266 6.373 11.328 When d₁ < d₁₀, d_(1m) (nm) = 0.729 1.739 3.220 4.072 3.483 When n₂ ≧ n₂₀, n_(2m) = 0.0585083 0.0918945 0.1020654 0.1070825 0.0573608 When n₂ < n₂₀, n_(2m) = 0.1382239 0.1611719 0.1504858 0.1560303 0.0993860 When k₂ ≧ k₂₀, k_(2m) = 0.0616943 0.0914514 0.0935474 0.1016602 0.0359058 When k₂ < k₂₀, k_(2m) = 0.0899731 0.0957678 0.0910632 0.0886353 0.0590588 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 11.368 38.474 71.143 98.322 22.477

1.0 < NA ≦ 1.1 115 < T ≦ 125 22/34 Case 12-06 12-07 12-08 12-09 12-10 n₁₀ 1.7304964 1.7097843 1.7129025 1.7059734 1.6983193 k₁₀ 0.0792452 0.0770210 0.0702809 0.0642321 0.0712405 d₁₀ (nm) 91.709 159.025 159.249 159.600 220.143 n₂₀ 1.7154952 1.6841289 1.7178163 1.6898319 1.6860819 k₂₀ 0.2175998 0.2392980 0.1978132 0.1677546 0.2336364 d₂₀ (nm) 221.560 164.463 217.770 279.371 162.903 When n₁ ≧ n₁₀, n_(1m) = 0.0478430 0.0358972 0.0479553 0.0552173 0.0579871 When n₁ < n₁₀, n_(1m) = 0.0188013 0.0078589 0.0015247 0.0299426 0.0264917 When k₁ ≧ k₁₀, k_(1m) = 0.0447290 0.0214099 0.0152087 0.0363110 0.0340515 When k₁ < k₁₀, k_(1m) = 0.0430518 0.0224402 0.0060950 0.0278772 0.0279150 When d₁ ≧ d₁₀, d_(1m) (nm) = 17.323 17.500 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 4.626 2.208 0.436 70.406 11.462 When n₂ ≧ n₂₀, n_(2m) = 0.0842468 0.0631323 0.0959070 0.1382263 0.0682983 When n₂ < n₂₀, n_(2m) = 0.1172522 0.0247583 0.0076807 0.1296057 0.0493762 When k₂ ≧ k₂₀, k_(2m) = 0.0583887 0.0111536 0.0046545 0.0357849 0.0882227 When k₂ < k₂₀, k_(2m) = 0.0618323 0.0547961 0.0579968 0.0540967 0.0613330 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 18.428 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 65.102 5.436 0.894 57.180 18.177 1.0 < NA ≦ 1.1 115 < T ≦ 125 Case 12-11 12-12 12-13 n₁₀ 1.6946755 1.6955425 1.6956989 k₁₀ 0.0639503 0.0535782 0.0539885 d₁₀ (nm) 216.344 213.248 272.929 n₂₀ 1.6931001 1.6937343 1.6917939 k₂₀ 0.1919118 0.1415462 0.1683287 d₂₀ (nm) 222.331 338.947 278.327 When n₁ ≧ n₁₀, n_(1m) = 0.0359900 0.0869177 0.0714185 When n₁ < n₁₀, n_(1m) = 0.0437024 0.0750378 0.0538635 When k₁ ≧ k₁₀, k_(1m) = 0.0485352 0.0653857 0.0669263 When k₁ < k₁₀, k_(1m) = 0.0346851 0.0370959 0.0388916 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 51.791 132.178 120.018 When n₂ ≧ n₂₀, n_(2m) = 0.1409949 0.2291467 0.2819873 When n₂ < n₂₀, n_(2m) = 0.1060889 0.1273120 0.2087952 When k₂ ≧ k₂₀, k_(2m) = 0.1109827 0.1363989 0.2069556 When k₂ < k₂₀, k_(2m) = 0.0639978 0.0571204 0.0743250 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 35.182 107.512 95.030

1.0 < NA ≦ 1.1 125 < T ≦ 135 23/34 Case 13-01 13-02 13-03 13-04 13-05 n₁₀ 1.8993435 1.9080238 1.7276770 1.7338076 1.7236449 k₁₀ 0.1093669 0.0778133 0.0934541 0.0808022 0.0736298 d₁₀ (nm) 12.638 11.189 91.210 91.869 92.640 n₂₀ 1.7156529 1.7380285 1.6689251 1.7256843 1.7007078 k₂₀ 0.2903108 0.2474831 0.2700133 0.2232282 0.1887087 d₂₀ (nm) 220.942 275.866 159.348 209.944 271.148 When n₁ ≧ n₁₀, n_(1m) = 0.1116663 0.1266492 0.0395422 0.0484558 0.0522583 When n₁ < n₁₀, n_(1m) = 0.0773999 0.0872168 0.0167297 0.0166711 0.0180103 When k₁ ≧ k₁₀, k_(1m) = 0.1011877 0.1103088 0.0409973 0.0422058 0.0417761 When k₁ < k₁₀, k_(1m) = 0.1093669 0.0778133 0.0410583 0.0409119 0.0443518 When d₁ ≧ d₁₀, d_(1m) (nm) = 6.392 6.737 11.272 16.895 38.105 When d₁ < d₁₀, d_(1m) (nm) = 4.063 4.214 3.733 3.952 5.177 When n₂ ≧ n₂₀, n_(2m) = 0.1069678 0.1140796 0.0675769 0.0924780 0.1134937 When n₂ < n₂₀, n_(2m) = 0.1606714 0.1563965 0.1033667 0.1197949 0.1230200 When k₂ ≧ k₂₀, k_(2m) = 0.1040991 0.1083496 0.0397278 0.0600330 0.0739392 When k₂ < k₂₀, k_(2m) = 0.0926990 0.0882825 0.0652539 0.0659766 0.0617065 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 29.488 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 90.398 130.978 17.688 16.714 72.265 1.0 < NA ≦ 1.1 125 < T ≦ 135 Case 13-06 13-07 13-08 13-09 13-10 n₁₀ 1.7117973 1.7052523 1.6990979 1.6936455 1.6937228 k₁₀ 0.0782334 0.0648564 0.0723627 0.0657466 0.0602088 d₁₀ (nm) 159.412 160.141 220.761 215.539 212.854 n₂₀ 1.6949465 1.6847092 1.6931390 1.6916565 1.6917935 k₂₀ 0.2480962 0.1699839 0.2421156 0.1962143 0.1651159 d₂₀ (nm) 152.577 269.827 151.650 213.597 273.449 When n₁ ≧ n₁₀, n_(1m) = 0.0367346 0.0551233 0.0594092 0.0311401 0.0698511 When n₁ < n₁₀, n_(1m) = 0.0058984 0.0239478 0.0244397 0.0431714 0.0693030 When k₁ ≧ k₁₀, k_(1m) = 0.0206287 0.0370862 0.0278687 0.0476123 0.0598901 When k₁ < k₁₀, k_(1m) = 0.0197803 0.0307031 0.0272107 0.0341650 0.0364880 When d₁ ≧ d₁₀, d_(1m) (nm) = 17.175 ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 1.642 10.322 10.135 48.593 59.568 When n₂ ≧ n₂₀, n_(2m) = 0.0634509 0.0441370 0.0646301 0.1417163 0.2349500 When n₂ < n₂₀, n_(2m) = 0.0185107 0.1268359 0.0304773 0.0878235 0.1413928 When k₂ ≧ k₂₀, k_(2m) = 0.0106982 0.0374109 0.0871985 0.1142444 0.1311609 When k₂ < k₂₀, k_(2m) = 0.0614368 0.0554883 0.0573535 0.0648792 0.0616370 When d₂ ≧ d₂₀, d_(2m) (nm) = 20.867 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 3.236 51.950 7.977 23.183 75.250

1.0 < NA ≦ 1.1 125 < T ≦ 135 24/34 Case 13-11 n₁₀ 1.6954835 k₁₀ 0.0549286 d₁₀ (nm) 272.481 n₂₀ 1.6920522 k₂₀ 0.1709440 d₂₀ (nm) 269.018 When n₁ ≧ n₁₀, n_(1m) = 0.0732507 When n₁ < n₁₀, n_(1m) = 0.0527002 When k₁ ≧ k₁₀, k_(1m) = 0.0659570 When k₁ < k₁₀, k_(1m) = 0.0396948 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ When d₁ < d₁₀, d_(1m) (nm) = 115.848 When n₂ ≧ n₂₀, n_(2m) = 0.2876270 When n₂ < n₂₀, n_(2m) = 0.2123071 When k₂ ≧ k₂₀, k_(2m) = 0.2114355 When k₂ < k₂₀, k_(2m) = 0.0767078 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ When d₂ < d₂₀, d_(2m) (nm) = 91.957 1.0 < NA ≦ 1.1 135 < T ≦ 145 Case 14-01 14-02 14-03 14-04 14-05 n₁₀ 1.9117383 1.8981283 1.9112943 1.7312914 1.7377087 k₁₀ 0.2302052 0.1070787 0.0649623 0.0945058 0.0827928 d₁₀ (nm) 15.980 13.384 12.163 91.544 92.151 n₂₀ 1.5953517 1.7296497 1.7710787 1.6819509 1.7372931 k₂₀ 0.4940730 0.3022759 0.2605013 0.2846338 0.2321492 d₂₀ (nm) 105.368 209.053 259.824 147.702 198.983 When n₁ ≧ n₁₀, n_(1m) = 0.0781360 0.1075745 0.1181738 0.0408386 0.0487402 When n₁ < n₁₀, n_(1m) = 0.0319177 0.0739868 0.0809961 0.0177930 0.0144653 When k₁ ≧ k₁₀, k_(1m) = 0.0436902 0.0964282 0.0995044 0.0430859 0.0389966 When k₁ < k₁₀, k_(1m) = 0.0819202 0.1070787 0.0649623 0.0421533 0.0388171 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.898 6.524 6.747 11.475 16.758 When d₁ < d₁₀, d_(1m) (nm) = 1.590 4.095 4.185 3.862 3.299 When n₂ ≧ n₂₀, n_(2m) = 0.0627563 0.1085400 0.1152271 0.0712305 0.0983997 When n₂ < n₂₀, n_(2m) = 0.1565955 0.1599133 0.1627686 0.1038867 0.1174939 When k₂ ≧ k₂₀, k_(2m) = 0.0810010 0.1085132 0.1160754 0.0447900 0.0617737 When k₂ < k₂₀, k_(2m) = 0.1061572 0.0966113 0.0915161 0.0720264 0.0692358 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 26.800 ∞ When d₂ < d₂₀, d_(2m) (nm) = 27.538 81.885 123.147 14.572 12.208

1.0 < NA ≦ 1.1 135 < T ≦ 145 25/34 Case 14-06 14-07 14-08 14-09 14-10 n₁₀ 1.7228203 1.7144911 1.7050797 1.6925663 1.6991742 k₁₀ 0.0749158 0.0796518 0.0657099 0.0675694 0.0739382 d₁₀ (nm) 92.874 160.015 160.534 214.049 220.936 n₂₀ 1.6951594 1.7090445 1.6817729 1.6900690 1.6992675 k₂₀ 0.1935801 0.2610315 0.1743389 0.2005073 0.2525134 d₂₀ (nm) 262.590 141.223 260.739 206.287 141.832 When n₁ ≧ n₁₀, n_(1m) = 0.0517419 0.0380176 0.0550000 0.0300269 0.0099573 When n₁ < n₁₀, n_(1m) = 0.0171826 0.0033435 0.0205762 0.0461255 0.0255640 When k₁ ≧ k₁₀, k_(1m) = 0.0402747 0.0176941 0.0369080 0.0452966 0.0196790 When k₁ < k₁₀, k_(1m) = 0.0440662 0.0145313 0.0289917 0.0339844 0.0188269 When d₁ ≧ d₁₀, d_(1m) (nm) = 34.339 18.702 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 4.946 0.924 8.433 45.536 10.412 When n₂ ≧ n₂₀, n_(2m) = 0.1089246 0.0638684 0.0364478 0.1628357 0.0605127 When n₂ < n₂₀, n_(2m) = 0.1178552 0.0117664 0.1214197 0.0809363 0.0143933 When k₂ ≧ k₂₀, k_(2m) = 0.0721460 0.0078210 0.0372485 0.1200403 0.0864673 When k₂ < k₂₀, k_(2m) = 0.0629919 0.0624194 0.0562036 0.0635217 0.0436145 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 21.562 ∞ ∞ 25.612 When d₂ < d₂₀, d_(2m) (nm) = 67.089 1.645 48.128 21.535 3.107 1.0 < NA ≦ 1.1 135 < T ≦ 145 Case 14-11 14-12 n₁₀ 1.6955775 1.6953573 k₁₀ 0.0548747 0.0556511 d₁₀ (nm) 213.500 272.231 n₂₀ 1.6934763 1.6917841 k₂₀ 0.1457299 0.1736649 d₂₀ (nm) 319.743 260.476 When n₁ ≧ n₁₀, n_(1m) = 0.0884082 0.0714819 When n₁ < n₁₀, n_(1m) = 0.0760022 0.0518335 When k₁ ≧ k₁₀, k_(1m) = 0.0634009 0.0652063 When k₁ < k₁₀, k_(1m) = 0.0349133 0.0395740 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 128.996 113.518 When n₂ ≧ n₂₀, n_(2m) = 0.2359680 0.2895325 When n₂ < n₂₀, n_(2m) = 0.1212769 0.2158911 When k₂ ≧ k₂₀, k_(2m) = 0.1345789 0.2124060 When k₂ < k₂₀, k_(2m) = 0.0582837 0.0793396 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 94.216 91.728

1.0 < NA ≦ 1.1 145 < T ≦ 155 26/34 Case 15-01 15-02 15-03 15-04 15-05 n₁₀ 1.8842999 1.9020060 1.9176161 1.7347347 1.7402087 k₁₀ 0.1660082 0.1078045 0.0733974 0.0970436 0.0854812 d₁₀ (nm) 15.542 13.884 11.927 91.613 92.221 n₂₀ 1.6642092 1.7406676 1.7608162 1.6897518 1.7427648 k₂₀ 0.3881866 0.3180988 0.2687301 0.3028107 0.2437105 d₂₀ (nm) 148.595 199.025 254.127 138.166 190.058 When n₁ ≧ n₁₀, n_(1m) = 0.0902356 0.1039673 0.1191321 0.0403284 0.0477295 When n₁ < n₁₀, n_(1m) = 0.0608057 0.0712415 0.0806982 0.0168616 0.0123145 When k₁ ≧ k₁₀, k_(1m) = 0.0796985 0.0922314 0.1003394 0.0414099 0.0352649 When k₁ < k₁₀, k_(1m) = 0.0913672 0.1040308 0.0733974 0.0415906 0.0369519 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.569 6.401 6.478 11.141 16.036 When d₁ < d₁₀, d_(1m) (nm) = 3.524 3.984 3.954 3.546 2.715 When n₂ ≧ n₂₀, n_(2m) = 0.0975891 0.1093347 0.1166919 0.0721533 0.0993201 When n₂ < n₂₀, n_(2m) = 0.1510022 0.1570532 0.1613013 0.0996582 0.1116626 When k₂ ≧ k₂₀, k_(2m) = 0.1021082 0.1115308 0.1139111 0.0446167 0.0576575 When k₂ < k₂₀, k_(2m) = 0.1042151 0.0981909 0.0922217 0.0735095 0.0699536 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 23.089 ∞ When d₂ < d₂₀, d_(2m) (nm) = 36.178 75.817 118.717 13.060 9.872 1.0 < NA ≦ 1.1 145 < T ≦ 155 Case 15-06 15-07 15-08 15-09 15-10 n₁₀ 1.7232674 1.7163169 1.7052425 1.6979604 1.6919325 k₁₀ 0.0768076 0.0822242 0.0670983 0.0765182 0.0693101 d₁₀ (nm) 92.842 160.121 160.367 219.964 212.895 n₂₀ 1.6931409 1.7162208 1.6808978 1.6978817 1.6886216 k₂₀ 0.2010537 0.2770503 0.1806066 0.2641846 0.2063377 d₂₀ (nm) 254.319 132.120 252.327 134.431 199.162 When n₁ ≧ n₁₀, n_(1m) = 0.0505859 0.0375513 0.0535669 0.0055981 0.0297021 When n₁ < n₁₀, n_(1m) = 0.0155139 0.0002051 0.0181250 0.0232141 0.0494775 When k₁ ≧ k₁₀, k_(1m) = 0.0378564 0.0051208 0.0335376 0.0146118 0.0441443 When k₁ < k₁₀, k_(1m) = 0.0427637 0.0032507 0.0275378 0.0178613 0.0327478 When d₁ ≧ d₁₀, d_(1m) (nm) = 33.581 19.229 ∞ 4.817 ∞ When d₁ < d₁₀, d_(1m) (nm) = 4.347 0.056 6.999 10.286 43.553 When n₂ ≧ n₂₀, n_(2m) = 0.0760803 0.0599353 0.0299109 0.0539575 0.2378027 When n₂ < n₂₀, n_(2m) = 0.1135510 0.0008435 0.1135376 0.0106042 0.0839368 When k₂ ≧ k₂₀, k_(2m) = 0.0671289 0.0005420 0.0313745 0.0886438 0.1159473 When k₂ < k₂₀, k_(2m) = 0.0634387 0.0680176 0.0561853 0.0306653 0.0671289 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 12.405 ∞ 21.650 ∞ When d₂ < d₂₀, d_(2m) (nm) = 64.219 0.105 32.640 2.145 24.441

1.0 < NA ≦ 1.1 145 < T ≦ 155 27/34 Case 15-11 15-12 n₁₀ 1.6933082 1.6953110 k₁₀ 0.0619759 0.0563706 d₁₀ (nm) 212.839 272.392 n₂₀ 1.6904544 1.6905212 k₂₀ 0.1723582 0.1778331 d₂₀ (nm) 255.647 252.170 When n₁ ≧ n₁₀, n_(1m) = 0.0645605 0.0686462 When n₁ < n₁₀, n_(1m) = 0.0718213 0.0516125 When k₁ ≧ k₁₀, k_(1m) = 0.0578125 0.0646021 When k₁ < k₁₀, k_(1m) = 0.0349402 0.0400220 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 54.857 112.777 When n₂ ≧ n₂₀, n_(2m) = 0.2345605 0.2885852 When n₂ < n₂₀, n_(2m) = 0.1388916 0.2180322 When k₂ ≧ k₂₀, k_(2m) = 0.1280078 0.2117786 When k₂ < k₂₀, k_(2m) = 0.0658081 0.0782971 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 73.297 86.154 1.0 < NA ≦ 1.1 155 < T ≦ 165 Case 16-01 16-02 16-03 16-04 16-05 n₁₀ 1.9162825 1.8960663 1.9085468 1.9232010 1.7368663 k₁₀ 0.2485644 0.1719364 0.1144956 0.0848488 0.1019026 d₁₀ (nm) 18.297 15.704 13.923 11.624 91.322 n₂₀ 1.6104232 1.6708316 1.7385514 1.7455678 1.6869885 k₂₀ 0.6165991 0.4169686 0.3337318 0.2771185 0.3224919 d₂₀ (nm) 83.442 139.520 191.444 248.983 130.342 When n₁ ≧ n₁₀, n_(1m) = 0.0684412 0.0871606 0.1018298 0.1200745 0.0372510 When n₁ < n₁₀, n_(1m) = 0.0186816 0.0568530 0.0690649 0.0803638 0.0125696 When k₁ ≧ k₁₀, k_(1m) = 0.0233801 0.0734265 0.0893420 0.1020142 0.0332275 When k₁ < k₁₀, k_(1m) = 0.0710925 0.0921472 0.1049048 0.0848488 0.0396851 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.544 5.170 6.051 6.159 10.019 When d₁ < d₁₀, d_(1m) (nm) = 0.960 3.162 3.726 3.719 2.554 When n₂ ≧ n₂₀, n_(2m) = 0.0392468 0.0938416 0.1080847 0.1165613 0.0639832 When n₂ < n₂₀, n_(2m) = 0.1557959 0.1481714 0.1540210 0.1601440 0.0923059 When k₂ ≧ k₂₀, k_(2m) = 0.0796021 0.1023108 0.1103064 0.1095667 0.0344885 When k₂ < k₂₀, k_(2m) = 0.1143958 0.1026965 0.0973987 0.0917590 0.0690210 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 16.255 When d₂ < d₂₀, d_(2m) (nm) = 16.079 31.215 71.737 92.392 12.361

1.0 < NA ≦ 1.1 155 < T ≦ 165 28/34 Case 16-06 16-07 16-08 16-09 16-10 n₁₀ 1.7401611 1.7243481 1.7054586 1.6959475 1.6918299 k₁₀ 0.0886217 0.0791015 0.0688139 0.0801582 0.0707672 d₁₀ (nm) 92.017 92.538 159.721 218.084 213.401 n₂₀ 1.7381402 1.6930588 1.6812702 1.6891859 1.6865968 k₂₀ 0.2555882 0.2092609 0.1871719 0.2763746 0.2143676 d₂₀ (nm) 182.755 245.988 244.029 128.431 190.286 When n₁ ≧ n₁₀, n_(1m) = 0.0455261 0.0488196 0.0509851 0.0098682 0.0278625 When n₁ < n₁₀, n_(1m) = 0.0098901 0.0131677 0.0163489 0.0140930 0.0421411 When k₁ ≧ k₁₀, k_(1m) = 0.0306140 0.0345203 0.0271167 0.0171570 0.0425635 When k₁ < k₁₀, k_(1m) = 0.0347180 0.0404199 0.0257288 0.0171082 0.0318542 When d₁ ≧ d₁₀, d_(1m) (nm) = 14.632 33.648 ∞ 8.318 ∞ When d₁ < d₁₀, d_(1m) (nm) = 2.133 3.535 5.969 6.525 43.306 When n₂ ≧ n₂₀, n_(2m) = 0.0895227 0.0573254 0.0211304 0.0441309 0.2430603 When n₂ < n₂₀, n_(2m) = 0.1067090 0.1098926 0.1107275 0.0233423 0.0869226 When k₂ ≧ k₂₀, k_(2m) = 0.0460217 0.0587354 0.0210486 0.0642297 0.1089050 When k₂ < k₂₀, k_(2m) = 0.0680432 0.0628845 0.0551514 0.0464880 0.0738831 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 19.572 ∞ When d₂ < d₂₀, d_(2m) (nm) = 8.553 37.425 30.745 5.059 27.273 1.0 < NA ≦ 1.1 155 < T ≦ 165 Case 16-11 16-12 n₁₀ 1.6935501 1.6953216 k₁₀ 0.0625258 0.0573372 d₁₀ (nm) 213.666 272.694 n₂₀ 1.6897170 1.6885432 k₂₀ 0.1780108 0.1839003 d₂₀ (nm) 246.097 243.579 When n₁ ≧ n₁₀, n_(1m) = 0.0658508 0.0696008 When n₁ < n₁₀, n_(1m) = 0.0609790 0.0519751 When k₁ ≧ k₁₀, k_(1m) = 0.0564087 0.0639087 When k₁ < k₁₀, k_(1m) = 0.0340259 0.0390979 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 55.431 113.126 When n₂ ≧ n₂₀, n_(2m) = 0.2425122 0.2917029 When n₂ < n₂₀, n_(2m) = 0.1355713 0.2189172 When k₂ ≧ k₂₀, k_(2m) = 0.1230981 0.2089771 When k₂ < k₂₀, k_(2m) = 0.0647131 0.0785583 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 74.519 83.205

1.0 < NA ≦ 1.1 165 < T ≦ 175 29/34 Case 17-01 17-02 17-03 17-04 17-05 n₁₀ 1.9620125 1.9138120 1.9194872 1.9263431 1.7366416 k₁₀ 0.2671830 0.1838008 0.1265886 0.0918160 0.1083929 d₁₀ (nm) 17.281 15.160 13.286 11.575 90.600 n₂₀ 1.6251877 1.6631095 1.7204546 1.7389610 1.6676220 k₂₀ 0.6875073 0.4399257 0.3440475 0.2853240 0.3363185 d₂₀ (nm) 75.420 132.541 186.036 241.421 124.136 When n₁ ≧ n₁₀, n_(1m) = 0.0681287 0.0852625 0.1025696 0.1184741 0.0323010 When n₁ < n₁₀, n_(1m) = 0.0103625 0.0516760 0.0678894 0.0788623 0.0048279 When k₁ ≧ k₁₀, k_(1m) = 0.0130603 0.0684912 0.0894849 0.1012756 0.0174634 When k₁ < k₁₀, k_(1m) = 0.0671069 0.0945691 0.1086621 0.0918160 0.0305151 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.029 4.576 5.503 5.915 7.890 When d₁ < d₁₀, d_(1m) (nm) = 0.441 2.597 3.327 3.560 0.944 When n₂ ≧ n₂₀, n_(2m) = 0.0235046 0.0887256 0.1055566 0.1147229 0.0355994 When n₂ < n₂₀, n_(2m) = 0.1565857 0.1459790 0.1532703 0.1591589 0.0840686 When k₂ ≧ k₂₀, k_(2m) = 0.0495569 0.0950366 0.1036096 0.1065601 0.0135376 When k₂ < k₂₀, k_(2m) = 0.1038318 0.0972864 0.0941003 0.0904578 0.0586487 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 9.834 When d₂ < d₂₀, d_(2m) (nm) = 13.490 32.564 69.289 94.292 9.844 1.0 < NA ≦ 1.1 165 < T ≦ 175 Case 17-06 17-07 17-08 17-09 17-10 n₁₀ 1.7377165 1.7250070 1.7054487 1.6921136 1.6937452 k₁₀ 0.0918810 0.0812670 0.0704565 0.0719896 0.0634118 d₁₀ (nm) 91.516 92.096 158.889 214.506 214.086 n₂₀ 1.7225143 1.6922454 1.6815182 1.6833735 1.6893106 k₂₀ 0.2640565 0.2155950 0.1921887 0.2231205 0.1840166 d₂₀ (nm) 176.484 237.445 235.428 180.418 236.602 When n₁ ≧ n₁₀, n_(1m) = 0.0420569 0.0467627 0.0482849 0.0256970 0.0615491 When n₁ < n₁₀, n_(1m) = 0.0067480 0.0110010 0.0145544 0.0346619 0.0533179 When k₁ ≧ k₁₀, k_(1m) = 0.0242395 0.0311426 0.0191064 0.0402332 0.0548975 When k₁ < k₁₀, k_(1m) = 0.0306030 0.0379785 0.0179834 0.0315259 0.0339990 When d₁ ≧ d₁₀, d_(1m) (nm) = 13.053 20.074 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 1.437 2.846 5.076 44.014 52.355 When n₂ ≧ n₂₀, n_(2m) = 0.0699756 0.0474695 0.0119531 0.2616345 0.2513293 When n₂ < n₂₀, n_(2m) = 0.1027979 0.1100684 0.1104504 0.0766565 0.1353430 When k₂ ≧ k₂₀, k_(2m) = 0.0294397 0.0490112 0.0106458 0.1033704 0.1166565 When k₂ < k₂₀, k_(2m) = 0.0637073 0.0613086 0.0537012 0.0738440 0.0656140 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 5.139 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 7.091 63.320 32.177 24.892 75.277

1.0 < NA ≦ 1.1 165 < T ≦ 175 30/34 Case 17-11 17-12 n₁₀ 1.6937402 1.6958036 k₁₀ 0.0634247 0.0530688 d₁₀ (nm) 214.067 271.703 n₂₀ 1.6892020 1.6918593 k₂₀ 0.1839903 0.1637010 d₂₀ (nm) 236.644 291.452 When n₁ ≧ n₁₀, n_(1m) = 0.0614392 0.0799048 When n₁ < n₁₀, n_(1m) = 0.0533545 0.0613391 When k₁ ≧ k₁₀, k_(1m) = 0.0548865 0.0657874 When k₁ < k₁₀, k_(1m) = 0.0340295 0.0406555 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 52.349 186.337 When n₂ ≧ n₂₀, n_(2m) = 0.2512048 0.2852795 When n₂ < n₂₀, n_(2m) = 0.1353552 0.2060364 When k₂ ≧ k₂₀, k_(2m) = 0.1167688 0.2088965 When k₂ < k₂₀, k_(2m) = 0.0656104 0.0720715 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 75.294 119.308 1.0 < NA ≦ 1.1 175 < T ≦ 185 Case 18-01 18-02 18-03 18-04 18-05 n₁₀ 2.0247974 1.9282935 1.9213955 1.9262173 1.7355101 k₁₀ 0.2830183 0.1992550 0.1387890 0.1063571 0.0947091 d₁₀ (nm) 15.097 14.428 13.062 11.253 91.033 n₂₀ 1.6266898 1.6428403 1.7027750 1.7173021 1.7079959 k₂₀ 0.7191283 0.4517072 0.3507816 0.2869739 0.2693832 d₂₀ (nm) 71.681 126.823 179.475 236.027 169.192 When n₁ ≧ n₁₀, n_(1m) = 0.0749963 0.0847278 0.1010168 0.1197595 0.0387598 When n₁ < n₁₀, n_(1m) = 0.0029248 0.0471021 0.0652051 0.0785376 0.0037976 When k₁ ≧ k₁₀, k_(1m) = 0.0038599 0.0655127 0.0884351 0.1039075 0.0170227 When k₁ < k₁₀, k_(1m) = 0.0706714 0.0951611 0.1067810 0.1063571 0.0250378 When d₁ ≧ d₁₀, d_(1m) (nm) = 2.365 4.047 5.170 5.710 10.979 When d₁ < d₁₀, d_(1m) (nm) = 0.098 2.142 3.074 3.403 0.799 When n₂ ≧ n₂₀, n_(2m) = 0.0068848 0.0841113 0.1036328 0.1139966 0.0477551 When n₂ < n₂₀, n_(2m) = 0.1606787 0.1462891 0.1534180 0.1596240 0.1042908 When k₂ ≧ k₂₀, k_(2m) = 0.0111658 0.0845300 0.0979260 0.1010864 0.0158423 When k₂ < k₂₀, k_(2m) = 0.0939917 0.0914209 0.0916113 0.0894141 0.0611707 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 3.000 39.175 67.597 105.537 4.807

1.0 < NA ≦ 1.1 175 < T ≦ 185 31/34 Case 18-06 18-07 18-08 18-09 18-10 n₁₀ 1.7251933 1.7054174 1.6937830 1.6952847 1.6957027 k₁₀ 0.0829804 0.0718367 0.0647049 0.0582261 0.0542195 d₁₀ (nm) 91.728 158.389 214.330 213.359 271.586 n₂₀ 1.6903561 1.6812041 1.6889835 1.6934588 1.6918383 k₂₀ 0.2192539 0.1954390 0.1894046 0.1611341 0.1679902 d₂₀ (nm) 228.367 226.084 226.812 284.005 281.728 When n₁ ≧ n₁₀, n_(1m) = 0.0450793 0.0463184 0.0575061 0.0820801 0.0778577 When n₁ < n₁₀, n_(1m) = 0.0094861 0.0044336 0.0478479 0.0612256 0.0602185 When k₁ ≧ k₁₀, k_(1m) = 0.0283801 0.0117395 0.0529968 0.0602039 0.0649841 When k₁ < k₁₀, k_(1m) = 0.0362878 0.0115625 0.0337854 0.0347266 0.0400525 When d₁ ≧ d₁₀, d_(1m) (nm) = 16.774 ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 2.397 1.386 50.875 126.709 185.173 When n₂ ≧ n₂₀, n_(2m) = 0.0407971 0.0052539 0.2620386 0.2460583 0.2888794 When n₂ < n₂₀, n_(2m) = 0.1134692 0.1157361 0.1359692 0.1267810 0.2086084 When k₂ ≧ k₂₀, k_(2m) = 0.0417627 0.0042761 0.1123547 0.1276489 0.2100842 When k₂ < k₂₀, k_(2m) = 0.0604272 0.0538147 0.0667053 0.0613220 0.0762817 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 1.973 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 63.259 35.408 73.536 81.916 101.090 1.0 < NA ≦ 1.1 185 < T ≦ 195 Case 19-01 19-02 19-03 19-04 19-05 n₁₀ 1.9316549 1.9193011 1.9209840 1.9114684 1.7364379 k₁₀ 0.2158025 0.1476126 0.1061325 0.1024475 0.0969838 d₁₀ (nm) 14.297 13.272 11.842 10.224 91.033 n₂₀ 1.6202378 1.6935029 1.7241227 1.6976483 1.7085420 k₂₀ 0.4645248 0.3598725 0.2946413 0.2438294 0.2774318 d₂₀ (nm) 119.165 170.049 224.030 285.021 158.680 When n₁ ≧ n₁₀, n_(1m) = 0.0819873 0.0986853 0.1146375 0.1344971 0.0375342 When n₁ < n₁₀, n_(1m) = 0.0431250 0.0625305 0.0746716 0.0933276 0.0023010 When k₁ ≧ k₁₀, k_(1m) = 0.0616553 0.0860156 0.0981763 0.1190894 0.0118958 When k₁ < k₁₀, k_(1m) = 0.0896899 0.1016528 0.1061325 0.1024475 0.0218677 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.700 5.023 5.787 6.264 9.942 When d₁ < d₁₀, d_(1m) (nm) = 1.892 2.963 3.440 3.984 0.476 When n₂ ≧ n₂₀, n_(2m) = 0.0797485 0.1030664 0.1135645 0.1221387 0.0340320 When n₂ < n₂₀, n_(2m) = 0.1493750 0.1566296 0.1631348 0.1387097 0.1094446 When k₂ ≧ k₂₀, k_(2m) = 0.0775891 0.0962708 0.1030847 0.0998328 0.0100928 When k₂ < k₂₀, k_(2m) = 0.0909656 0.0941418 0.0920776 0.0860498 0.0649939 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 42.778 When d₂ < d₂₀, d_(2m) (nm) = 39.461 66.761 95.735 134.721 2.964

1.0 < NA ≦ 1.1 185 < T ≦ 195 32/34 Case 19-06 19-07 19-08 19-09 19-10 n₁₀ 1.7258494 1.7176246 1.7057732 1.7053832 1.6928552 k₁₀ 0.0843222 0.0727056 0.0731106 0.0633918 0.0748243 d₁₀ (nm) 91.766 91.617 158.709 158.181 216.444 n₂₀ 1.6907525 1.6784161 1.6805392 1.6859880 1.6825267 k₂₀ 0.2229229 0.1842107 0.1989479 0.1669818 0.2415835 d₂₀ (nm) 218.067 277.206 215.842 272.384 158.548 When n₁ ≧ n₁₀, n_(1m) = 0.0445569 0.0497937 0.0455957 0.0532361 0.0209436 When n₁ < n₁₀, n_(1m) = 0.0086951 0.0298450 0.0022034 0.0367859 0.0248157 When k₁ ≧ k₁₀, k_(1m) = 0.0263611 0.0534119 0.0080444 0.0507507 0.0311414 When k₁ < k₁₀, k_(1m) = 0.0359253 0.0504663 0.0097656 0.0393250 0.0256995 When d₁ ≧ d₁₀, d_(1m) (nm) = 15.734 41.766 ∞ ∞ 12.676 When d₁ < d₁₀, d_(1m) (nm) = 2.168 9.272 0.695 75.025 12.180 When n₂ ≧ n₂₀, n_(2m) = 0.0361047 0.0638184 0.0029834 0.0794446 0.0872498 When n₂ < n₂₀, n_(2m) = 0.1156152 0.1202979 0.1187366 0.1037524 0.0413367 When k₂ ≧ k₂₀, k_(2m) = 0.0400842 0.0626270 0.0025122 0.0450354 0.0876147 When k₂ < k₂₀, k_(2m) = 0.0626514 0.0561853 0.0563074 0.0506238 0.0672510 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 1.098 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 62.415 80.313 33.556 35.245 14.500 1.0 < NA ≦ 1.1 185 < T ≦ 195 Case 19-11 19-12 19-13 n₁₀ 1.6935473 1.6950516 1.6954923 k₁₀ 0.0663823 0.0596605 0.0554795 d₁₀ (nm) 214.407 213.429 271.226 n₂₀ 1.6888366 1.6925794 1.6917166 k₂₀ 0.1945007 0.1643538 0.1716832 d₂₀ (nm) 217.060 274.430 272.356 When n₁ ≧ n₁₀, n_(1m) = 0.0539099 0.0837012 0.0771448 When n₁ < n₁₀, n_(1m) = 0.0450378 0.0604199 0.0593555 When k₁ ≧ k₁₀, k_(1m) = 0.0507373 0.0587012 0.0639185 When k₁ < k₁₀, k_(1m) = 0.0306738 0.0334839 0.0392737 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 49.334 125.965 183.474 When n₂ ≧ n₂₀, n_(2m) = 0.1392200 0.1753748 0.2943286 When n₂ < n₂₀, n_(2m) = 0.1378223 0.1262683 0.2110303 When k₂ ≧ k₂₀, k_(2m) = 0.1089429 0.1267468 0.2119958 When k₂ < k₂₀, k_(2m) = 0.0654358 0.0611353 0.0788904 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 37.875 75.613 93.291

1.0 < NA ≦ 1.1 195 < T ≦ 205 33/34 Case 20-01 20-02 20-03 20-04 20-05 n₁₀ 1.9124203 1.9240615 1.9069086 1.7409810 1.7270720 k₁₀ 0.1489422 0.1092971 0.1015424 0.0988730 0.0857435 d₁₀ (nm) 14.330 12.001 10.748 91.533 92.142 n₂₀ 1.7039618 1.7245262 1.7018591 1.7256420 1.6923707 k₂₀ 0.3787231 0.3026113 0.2499950 0.2922591 0.2292874 d₂₀ (nm) 157.291 214.201 273.963 146.253 207.814 When n₁ ≧ n₁₀, n_(1m) = 0.0947424 0.1140125 0.1293140 0.0383984 0.0447009 When n₁ < n₁₀, n_(1m) = 0.0592273 0.0732715 0.0895557 0.0020898 0.0081226 When k₁ ≧ k₁₀, k_(1m) = 0.0804358 0.0961365 0.1132190 0.0106335 0.0246362 When k₁ < k₁₀, k_(1m) = 0.0954272 0.1092971 0.1015424 0.0220923 0.0359277 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.168 5.724 6.406 9.801 15.595 When d₁ < d₁₀, d_(1m) (nm) = 3.029 3.355 4.072 0.420 2.001 When n₂ ≧ n₂₀, n_(2m) = 0.1047864 0.1153137 0.1226477 0.0347485 0.0318494 When n₂ < n₂₀, n_(2m) = 0.1598962 0.1638757 0.1417261 0.1115564 0.1129541 When k₂ ≧ k₂₀, k_(2m) = 0.1020288 0.1044775 0.1018286 0.0106042 0.0415295 When k₂ < k₂₀, k_(2m) = 0.1029260 0.0959216 0.0891724 0.0737659 0.0663513 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 37.674 ∞ When d₂ < d₂₀, d_(2m) (nm) = 61.016 86.078 130.875 2.293 32.252 1.0 < NA ≦ 1.1 195 < T ≦ 205 Case 20-06 20-07 20-08 20-09 20-10 n₁₀ 1.7180387 1.7063746 1.7058520 1.6924739 1.6928977 k₁₀ 0.0734703 0.0744769 0.0640895 0.0767908 0.0684401 d₁₀ (nm) 91.877 159.624 158.885 216.680 213.761 n₂₀ 1.6777924 1.6791348 1.6855365 1.6850078 1.6885850 k₂₀ 0.1881130 0.2047799 0.1710983 0.2520629 0.1999527 d₂₀ (nm) 267.481 205.830 262.479 148.712 208.689 When n₁ ≧ n₁₀, n_(1m) = 0.0499475 0.0454993 0.0542188 0.0126501 0.0501160 When n₁ < n₁₀, n_(1m) = 0.0300122 0.0018469 0.0331775 0.0226819 0.0449377 When k₁ ≧ k₁₀, k_(1m) = 0.0534277 0.0070447 0.0503931 0.0235315 0.0487341 When k₁ < k₁₀, k_(1m) = 0.0493896 0.0111902 0.0386401 0.0180737 0.0270740 When d₁ ≧ d₁₀, d_(1m) (nm) = 33.063 ∞ ∞ 10.064 ∞ When d₁ < d₁₀, d_(1m) (nm) = 9.229 0.603 19.062 10.036 46.531 When n₂ ≧ n₂₀, n_(2m) = 0.0633008 0.0027478 0.0774658 0.0675293 0.1390137 When n₂ < n₂₀, n_(2m) = 0.1171533 0.1127539 0.1100610 0.0218616 0.1442749 When k₂ ≧ k₂₀, k_(2m) = 0.0639148 0.0025830 0.0457581 0.0823975 0.1098364 When k₂ < k₂₀, k_(2m) = 0.0580542 0.0529590 0.0524817 0.0502942 0.0628650 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 1.007 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 77.001 28.132 32.836 6.408 22.345

1.0 < NA ≦ 1.1 195 < T ≦ 205 34/34 Case 20-11 20-12 n₁₀ 1.6947635 1.6952371 k₁₀ 0.0610999 0.0566636 d₁₀ (nm) 213.366 270.653 n₂₀ 1.6918971 1.6914186 k₂₀ 0.1679521 0.1751623 d₂₀ (nm) 265.388 263.994 When n₁ ≧ n₁₀, n_(1m) = 0.0863086 0.0772644 When n₁ < n₁₀, n_(1m) = 0.0626501 0.0586890 When k₁ ≧ k₁₀, k_(1m) = 0.0572302 0.0627917 When k₁ < k₁₀, k_(1m) = 0.0322180 0.0382104 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 124.819 121.330 When n₂ ≧ n₂₀, n_(2m) = 0.1702917 0.3021582 When n₂ < n₂₀, n_(2m) = 0.1249365 0.2142798 When k₂ ≧ k₂₀, k_(2m) = 0.1249084 0.2136462 When k₂ < k₂₀, k_(2m) = 0.0643469 0.0826477 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 66.113 91.025.


3. An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of: providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below; and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.1<NA ≦1.2, the antireflective film including an upper layer having a complex refractive index N₁ , and a lower layer having a complex refractive index N₂, the complex refractive indexes N₁ and N₂ being represented by the equations N₁=n₁−k₁i and N₂=n₂−k₂i, respectively; wherein assuming that the thickness of the upper layer is d₁ (unit: nm) and the thickness of the. lower layer is d₂ (unit: nm) , when any one of the combinations of values of [n₁₀, k₁₀, d₁₀, n₂₀, k₂₀, d₂₀] described below is selected depending on the thickness T of the silicon oxide film, n₁, k₁, d₁,n₂,k₂, and d₂ satisfy the relational expression {(n ₁−n ₁₀)/(n _(1m) −n ₁₀) }²+{(k ₁ −k ₁₀)/(k _(1m) −k ₁₀)}²+{(d₁ −d ₁₀)/(d _(1m) −d ₁₀)}²+{(n ₂ −n ₂₀)/(n _(2m) −n ₂₀)}²+{(k _(2m) −k ₂₀)}²+{(d ₂ −d ₂₀)/(d_(2m) −d ₂₀)}²≦1; a value of n_(1m) in a corresponding case is selected on the basis of a magnitude relation between n₁ and n₁₀; a value of k_(1m) in a corresponding case is selected on the basis of a magnitude relation between k₁ and k₁₀; a value of d_(1m) in a corresponding case is selected on the basis of a magnitude relation between d₁ and d₁₀;a value of n_(2m) in a corresponding case is selected on the basis of a magnitude relation between n₂ and n₂₀; a value of k_(2m) in a corresponding case is selected on the basis of a magnitude relation between k₂ and k₂₀; and a value of d_(2m) in a corresponding case is selected on the basis of a magnitude relation between d₂ and d₂₀; and in the tables below, in the line of “When n₁≧n₁₀, n_(1m)=”, each value in the right columns is “n_(1m)−n₁₀”; in the line of “When n₁<N₁₀, n_(1m)=”, each value in the right columns is “n₁₀−n_(1m)”; in the line of “When k₁≧k₁₀, k_(1m)”, each value in the right columns is “k_(1m)−k₁₀”; in the line of “When k₁<k₁₀, k_(1m)=”, each value in the right columns is ”k_(1m)”; in the line of “When d₁≧d₁₀, d_(1m) (nm) =”, each value (unit: nm) in the right columns is “d_(1m)−d₁₀”; in the line of “When d₁<d₁₀, d_(1m) (nm) =”, each value (unit: nm) in the right columns is “d₁₀−d_(1m)”; in the line of “When n₂≧n₂₀, n_(2m)=”, each value in the right columns is “n_(2m)−n₂₀”; in the line of “When n₂<n₂₀, n_(2m)=”, each value in the right columns is “n₂₀−n_(2m)”; in the line of “When k₂≧k₂₀, k_(2m)=”, each value in the right columns is “k_(2m)−k₂₀”; in the line of “When k₂<k₂₀, k_(2m)=”, each value in the right columns is “k₂₀−k_(2m)”; in the line of “When d₂≧d₂₀, d_(2m) (nm) =”, each value (unit: nm) in the right columns is “d_(2m)−d₂₀”; and in the line of 37 When d₂<d₂₀, d_(2m) (nm) =”, each value (unit: nm) in the right columns is “d₂₀−d_(2m)”. 1.1 < NA ≦ 1.2 2 ≦ T ≦ 15 1/27 Case 1-01 1-02 1-03 1-04 1-05 n₁₀ 2.0940641 1.9168406 1.8970115 1.8805879 1.8778358 k₁₀ 0.0325844 0.1807255 0.1529573 0.1098415 0.1082679 d₁₀ (nm) 26.090 35.662 31.182 13.577 19.930 n₂₀ 4.2290158 5.4932306 2.4318401 1.7032895 1.8340760 k₂₀ 2.3935124 0.6123354 0.5958382 0.2751108 0.3677230 d₂₀ (nm) 3.632 19.087 52.406 218.193 142.226 When n₁ ≧ n₁₀, n_(1m) = 0.0779846 0.0720874 0.0701013 0.1012354 0.0784314 When n₁ < n₁₀, n_(1m) = 0.0750281 0.0636047 0.0555591 0.0635571 0.0497058 When k₁ ≧ k₁₀, k_(1m) = 0.0672229 0.0527649 0.0494641 0.0853247 0.0590771 When k₁ < k₁₀, k_(1m) = 0.0325844 0.0849731 0.0840393 0.1029980 0.0867822 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.416 5.199 6.198 6.716 7.382 When d₁ < d₁₀, d_(1m) (nm) = 2.721 3.845 3.923 3.853 3.873 When n₂ ≧ n₂₀, n_(2m) = 0.2775293 0.1187439 0.1333862 0.1147803 0.1115393 When n₂ < n₂₀, n_(2m) = 0.2711597 0.1202087 0.1603455 0.1449023 0.1457849 When k₂ ≧ k₂₀, k_(2m) = 0.2845105 0.1470557 0.1794812 0.0967163 0.1467151 When k₂ < k₂₀, k_(2m) = 0.2499512 0.1180896 0.1302063 0.0855334 0.0954285 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.458 0.467 5.440 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 0.433 0.450 5.242 81.747 30.656 1.1 < NA ≦ 1.2 2 ≦ T ≦ 15 Case 1-06 1-07 1-08 1-09 1-10 n₁₀ 1.8663312 1.7888608 1.7735009 1.7175310 1.7199475 k₁₀ 0.0978132 0.1060865 0.0957437 0.0751352 0.0655065 d₁₀ (nm) 12.232 103.503 98.181 95.409 94.621 n₂₀ 1.6938400 4.4234099 2.0208865 1.6658936 1.6963762 k₂₀ 0.2288643 0.4526804 0.4158741 0.2054797 0.1762614 d₂₀ (nm) 277.705 24.164 66.693 212.937 266.043 When n₁ ≧ n₁₀, n_(1m) = 0.1143909 0.0588428 0.0489270 0.0419214 0.0484180 When n₁ < n₁₀, n_(1m) = 0.0786536 0.0104822 0.0094507 0.0157727 0.0265735 When k₁ ≧ k₁₀, k_(1m) = 0.1033447 0.0215918 0.0249109 0.0382361 0.0520056 When k₁ < k₁₀, k_(1m) = 0.0978132 0.0439624 0.0358655 0.0399121 0.0459387 When d₁ ≧ d₁₀, d_(1m) (nm) = 7.609 9.370 10.912 18.272 51.841 When d₁ < d₁₀, d_(1m) (nm) = 4.794 1.739 1.766 4.805 8.596 When n₂ ≧ n₂₀, n_(2m) = 0.1069236 0.0468066 0.0740674 0.0384924 0.0631091 When n₂ < n₂₀, n_(2m) = 0.1302808 0.1036670 0.1052673 0.0829468 0.0987561 When k₂ ≧ k₂₀, k_(2m) = 0.0918579 0.0409717 0.0495154 0.0385596 0.0522119 When k₂ < k₂₀, k_(2m) = 0.0786169 0.0807788 0.0903577 0.0528296 0.0515430 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 0.296 4.999 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 128.233 0.621 5.371 23.038 34.154

1.1 < NA ≦ 1.2 2 ≦ T ≦ 15 2/27 Case 1-11 1-12 1-13 1-14 1-15 n₁₀ 1.7156729 1.7043499 1.7082412 1.6926126 1.6890888 k₁₀ 0.0770168 0.0644952 0.0577629 0.0683906 0.0745003 d₁₀ (nm) 188.315 165.315 163.169 237.184 217.718 n₂₀ 6.9620048 1.6731418 1.7075031 6.7859369 1.7770504 k₂₀ 3.4231449 0.1899705 0.1626792 2.9992529 0.3401503 d₂₀ (nm) 0.879 207.250 259.766 0.993 84.925 When n₁ ≧ n₁₀, n_(1m) = 0.0649841 0.0417419 0.0509473 0.0348376 0.0194055 When n₁ < n₁₀, n_(1m) = 0.0083154 0.0317078 0.0477380 0.0764368 0.0607605 When k₁ ≧ k₁₀, k_(1m) = 0.0257251 0.0333704 0.0433435 0.0403589 0.0329480 When k₁ < k₁₀, k_(1m) = 0.0275232 0.0338538 0.0333484 0.0319214 0.0242554 When d₁ ≧ d₁₀, d_(1m) (nm) = 38.959 ∞ ∞ 19.483 9.981 When d₁ < d₁₀, d_(1m) (nm) = 3.134 16.146 77.216 43.463 24.681 When n₂ ≧ n₂₀, n_(2m) = 0.2971887 0.0474377 0.0745630 0.5633252 0.1177502 When n₂ < n₂₀, n_(2m) = 0.6091602 0.0721411 0.0651379 0.4300269 0.0317639 When k₂ ≧ k₂₀, k_(2m) = 0.2827808 0.0222888 0.0325830 0.2436438 0.0560791 When k₂ < k₂₀, k_(2m) = 0.6937878 0.0478259 0.0479700 0.5647217 0.0980969 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.055 16.772 ∞ 0.120 16.691 When d₂ < d₂₀, d_(2m) (nm) = 0.135 19.208 16.504 0.176 3.670 1.1 < NA ≦ 1.2 2 ≦ T ≦ 15 Case 1-16 1-17 1-18 1-19 n₁₀ 1.6903292 1.6921355 1.6951475 1.7004017 k₁₀ 0.0721915 0.0670288 0.0546351 0.0599028 d₁₀ (nm) 210.963 207.063 219.259 265.986 n₂₀ 1.7111030 1.6978167 1.6889102 1.7029410 k₂₀ 0.2426612 0.1954345 0.1606659 0.1992607 d₂₀ (nm) 155.846 222.387 263.728 214.965 When n₁ ≧ n₁₀, n_(1m) = 0.0284180 0.0456091 0.0773694 0.0612244 When n₁ < n₁₀, n_(1m) = 0.0510327 0.0467078 0.0619885 0.0410486 When k₁ ≧ k₁₀, k_(1m) = 0.0455554 0.0511133 0.0524768 0.0499927 When k₁ < k₁₀, k_(1m) = 0.0320984 0.0388074 0.0353687 0.0377380 When d₁ ≧ d₁₀, d_(1m) (nm) = 23.770 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 28.472 31.416 128.164 94.534 When n₂ ≧ n₂₀, n_(2m) = 0.1260327 0.1631665 0.2120154 0.2674829 When n₂ < n₂₀, n_(2m) = 0.0663647 0.1722144 0.1079456 0.2316101 When k₂ ≧ k₂₀, k_(2m) = 0.0960291 0.1259009 0.1121619 0.2074023 When k₂ < k₂₀, k_(2m) = 0.0846741 0.0757690 0.0591858 0.0894751 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 12.288 72.281 78.597 77.855

1.1 < NA ≦ 1.2 15 < T ≦ 25 3/27 Case 2-01 2-02 2-03 2-04 2-05 n₁₀ 1.8738578 1.8839217 1.8842367 1.8705650 1.7997475 k₁₀ 0.2051029 0.1169859 0.1130268 0.1010320 0.1076402 d₁₀ (nm) 37.506 20.540 14.059 12.433 101.817 n₂₀ 6.9151921 1.8488520 1.7087850 1.6946915 5.7702673 k₂₀ 0.6847654 0.3990514 0.2917115 0.2394813 0.5312541 d₂₀ (nm) 14.288 132.865 208.377 268.610 17.283 When n₁ ≧ n₁₀, n_(1m) = 0.0713965 0.0757019 0.0971472 0.1115784 0.0520068 When n₁ < n₁₀, n_(1m) = 0.0555054 0.0476453 0.0599609 0.0759399 0.0098120 When k₁ ≧ k₁₀, k_(1m) = 0.0541125 0.0561304 0.0804553 0.1002258 0.0237036 When k₁ < k₁₀, k_(1m) = 0.0773486 0.0843945 0.1004919 0.1010320 0.0377808 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.211 6.923 6.482 7.316 8.566 When d₁ < d₁₀, d_(1m) (nm) = 3.920 3.580 3.648 4.569 1.552 When n₂ ≧ n₂₀, n_(2m) = 0.1375024 0.1133521 0.1126624 0.1051160 0.0578821 When n₂ < n₂₀, n_(2m) = 0.1468335 0.1457764 0.1432654 0.1327966 0.1020337 When k₂ ≧ k₂₀, k_(2m) = 0.1698267 0.1546228 0.0978870 0.0916199 0.0398865 When k₂ < k₂₀, k_(2m) = 0.1355151 0.0979541 0.0869165 0.0797766 0.0850256 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.302 ∞ ∞ ∞ 0.186 When d₂ < d₂₀, d_(2m) (nm) = 0.308 25.359 77.278 123.573 0.315 1.1 < NA ≦ 1.2 15 < T ≦ 25 Case 2-06 2-07 2-08 2-09 2-10 n₁₀ 1.7189014 1.7208712 1.7236639 1.7047019 1.7084293 k₁₀ 0.0782837 0.0678223 0.0843652 0.0670962 0.0597123 d₁₀ (nm) 95.289 94.558 181.922 165.192 163.108 n₂₀ 1.6643388 1.6960341 5.6387216 1.6715149 1.7074208 k₂₀ 0.2165956 0.1841027 4.7363270 0.1999125 0.1697699 d₂₀ (nm) 204.139 257.386 0.821 198.564 251.199 When n₁ ≧ n₁₀, n_(1m) = 0.0400110 0.0468091 0.0526855 0.0398865 0.0490320 When n₁ < n₁₀, n_(1m) = 0.0126721 0.0238684 0.0001306 0.0279565 0.0460034 When k₁ ≧ k₁₀, k_(1m) = 0.0335376 0.0489734 0.0020081 0.0268384 0.0389331 When k₁ < k₁₀, k_(1m) = 0.0373218 0.0446973 0.0057251 0.0295178 0.0306982 When d₁ ≧ d₁₀, d_(1m) (nm) = 16.137 28.984 27.528 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 3.682 7.422 0.042 13.795 27.544 When n₂ ≧ n₂₀, n_(2m) = 0.0331177 0.0610901 0.0075977 0.0397839 0.0734460 When n₂ < n₂₀, n_(2m) = 0.0802783 0.0961804 0.6135461 0.0646704 0.0518091 When k₂ ≧ k₂₀, k_(2m) = 0.0326062 0.0485974 0.0047754 0.0159570 0.0275537 When k₂ < k₂₀, k_(2m) = 0.0528589 0.0519092 0.7998767 0.0474854 0.0482410 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 0.001 11.667 ∞ When d₂ < d₂₀, d_(2m) (nm) = 20.507 30.742 0.141 16.953 13.761

1.1 < NA ≦ 1.2 15 < T ≦ 25 4/27 Case 2-11 2-12 2-13 2-14 2-15 n₁₀ 1.6912240 1.6881032 1.6896993 1.6917374 1.6948846 k₁₀ 0.0750717 0.0788193 0.0752193 0.0692921 0.0562662 d₁₀ (nm) 235.933 218.423 211.247 207.206 219.172 n₂₀ 5.6089359 1.7881557 1.7110684 1.6970724 1.6877325 k₂₀ 4.1789938 0.3823123 0.2595743 0.2053429 0.1673191 d₂₀ (nm) 0.921 76.059 147.061 213.576 255.276 When n₁ ≧ n₁₀, n_(1m) = 0.0197583 0.0081677 0.0235974 0.0421069 0.0510120 When n₁ < n₁₀, n_(1m) = 0.0774451 0.0583032 0.0505896 0.0462817 0.0590515 When k₁ ≧ k₁₀, k_(1m) = 0.0246448 0.0223682 0.0406641 0.0495398 0.0510083 When k₁ < k₁₀, k_(1m) = 0.0218396 0.0175671 0.0286658 0.0376331 0.0343799 When d₁ ≧ d₁₀, d_(1m) (nm) = 6.504 3.634 18.131 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 42.587 22.206 26.432 29.901 81.491 When n₂ ≧ n₂₀, n_(2m) = 0.6544434 0.1247424 0.1252808 0.1545593 0.2162573 When n₂ < n₂₀, n_(2m) = 0.2325012 0.0171619 0.0503735 0.1749207 0.1048962 When k₂ ≧ k₂₀, k_(2m) = 0.1484387 0.0366235 0.0860120 0.1212268 0.1092822 When k₂ < k₂₀, k_(2m) = 0.6595715 0.1036670 0.0844458 0.0781323 0.0604700 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.071 14.060 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 0.195 1.711 9.636 69.774 76.197 1.1 < NA ≦ 1.2 15 < T ≦ 25 Case 2-16 2-17 n₁₀ 1.7002883 1.6987256 k₁₀ 0.0618224 0.0572006 d₁₀ (nm) 266.113 264.952 n₂₀ 1.7025341 1.6934905 k₂₀ 0.2096252 0.1744162 d₂₀ (nm) 206.193 266.771 When n₁ ≧ n₁₀, n_(1m) = 0.0602454 0.0764587 When n₁ < n₁₀, n_(1m) = 0.0381921 0.0594568 When k₁ ≧ k₁₀, k_(1m) = 0.0482422 0.0536096 When k₁ < k₁₀, k_(1m) = 0.0371497 0.0384741 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 92.805 173.726 When n₂ ≧ n₂₀, n_(2m) = 0.2779004 0.2751611 When n₂ < n₂₀, n_(2m) = 0.2377234 0.2053577 When k₂ ≧ k₂₀, k_(2m) = 0.2066309 0.2211816 When k₂ < k₂₀, k_(2m) = 0.0931018 0.0797998 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 73.805 125.295

1.1 < NA ≦ 1.2 25 < T ≦ 35 5/27 Case 3-01 3-02 3-03 3-04 3-05 n₁₀ 1.8384852 1.8997218 1.8867733 1.8774399 1.8168537 k₁₀ 0.2367471 0.1227276 0.1201944 0.1030917 0.1206742 d₁₀ (nm) 38.632 21.226 14.426 12.555 98.976 n₂₀ 4.7928214 1.8945709 1.7066853 1.6978346 5.6725781 k₂₀ 0.7766058 0.4412749 0.3085187 0.2515853 0.5943855 d₂₀ (nm) 20.034 121.762 200.277 259.495 16.950 When n₁ ≧ n₁₀, n_(1m) = 0.0640527 0.0719128 0.0931812 0.1089819 0.0387244 When n₁ < n₁₀, n_(1m) = 0.0455762 0.0458093 0.0565320 0.0737622 0.0048828 When k₁ ≧ k₁₀, k_(1m) = 0.0510876 0.0524744 0.0764050 0.0973877 0.0168860 When k₁ < k₁₀, k_(1m) = 0.0717981 0.0817957 0.0981750 0.1030917 0.0269836 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.733 6.228 6.172 6.944 6.776 When d₁ < d₁₀, d_(1m) (nm) = 3.444 3.186 3.418 4.320 0.695 When n₂ ≧ n₂₀, n_(2m) = 0.1712317 0.1175342 0.1094324 0.1025208 0.0610400 When n₂ < n₂₀, n_(2m) = 0.1852917 0.1447205 0.1408899 0.1358679 0.1030127 When k₂ ≧ k₂₀, k_(2m) = 0.2079944 0.1727771 0.0971545 0.0913745 0.0239368 When k₂ < k₂₀, k_(2m) = 0.1709546 0.1005322 0.0873328 0.0807227 0.0995679 When d₂ ≧ d₂₀, d_(2m) (nm) = 0.789 ∞ ∞ ∞ 0.191 When d₂ < d₂₀, d_(2m) (nm) = 0.773 21.526 73.345 89.127 0.308 1.1 < NA ≦ 1.2 25 < T ≦ 35 Case 3-06 3-07 3-08 3-09 3-10 n₁₀ 1.7203847 1.7222308 1.7051744 1.7089344 1.6891179 k₁₀ 0.0818178 0.0703272 0.0699535 0.0618729 0.0788518 d₁₀ (nm) 95.097 94.450 164.924 162.999 211.328 n₂₀ 1.6625491 1.6972414 1.6707295 1.7091982 1.7121044 k₂₀ 0.2295920 0.1929579 0.2115581 0.1777196 0.2799946 d₂₀ (nm) 195.706 248.789 190.095 242.642 139.125 When n₁ ≧ n₁₀, n_(1m) = 0.0370166 0.0449036 0.0362634 0.0468103 0.0189148 When n₁ < n₁₀, n_(1m) = 0.0096326 0.0211206 0.0148706 0.0438916 0.0495532 When k₁ ≧ k₁₀, k_(1m) = 0.0279895 0.0455884 0.0190686 0.0333899 0.0327563 When k₁ < k₁₀, k_(1m) = 0.0346558 0.0433374 0.0247266 0.0269507 0.0238696 When d₁ ≧ d₁₀, d_(1m) (nm) = 14.187 22.312 ∞ ∞ 9.561 When d₁ < d₁₀, d_(1m) (nm) = 2.673 6.291 5.065 24.312 23.646 When n₂ ≧ n₂₀, n_(2m) = 0.0267200 0.0590454 0.0307410 0.0721521 0.1253455 When n₂ < n₂₀, n_(2m) = 0.0766724 0.0932019 0.0523315 0.0386328 0.0336450 When k₂ ≧ k₂₀, k_(2m) = 0.0255017 0.0445288 0.0095300 0.0215259 0.0725635 When k₂ < k₂₀, k_(2m) = 0.0521814 0.0521948 0.0465356 0.0485632 0.0779358 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 7.007 43.167 ∞ When d₂ < d₂₀, d_(2m) (nm) = 18.077 28.239 14.543 10.181 6.908

1.1 < NA ≦ 1.2 25 < T ≦ 35 6/27 Case 3-11 3-12 3-13 3-14 n₁₀ 1.6914863 1.6947006 1.7002933 1.6987290 k₁₀ 0.0717884 0.0580661 0.0640004 0.0588877 d₁₀ (nm) 207.154 219.137 266.055 264.992 n₂₀ 1.6970451 1.6875442 1.7022941 1.6933668 k₂₀ 0.2167627 0.1751428 0.2216801 0.1822428 d₂₀ (nm) 205.768 246.865 198.139 258.415 When n₁ ≧ n₁₀, n_(1m) = 0.0385889 0.0449475 0.0561011 0.0760583 When n₁ < n₁₀, n_(1m) = 0.0454712 0.0531458 0.0356934 0.0583093 When k₁ ≧ k₁₀, k_(1m) = 0.0478943 0.0493811 0.0460974 0.0520996 When k₁ < k₁₀, k_(1m) = 0.0361658 0.0330811 0.0363293 0.0375061 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 28.219 77.448 91.180 121.680 When n₂ ≧ n₂₀, n_(2m) = 0.1522107 0.2230298 0.2904858 0.2858545 When n₂ < n₂₀, n_(2m) = 0.1781921 0.1009351 0.2457825 0.2068896 When k₂ ≧ k₂₀, k_(2m) = 0.1157642 0.1063892 0.2056812 0.2216101 When k₂ < k₂₀, k_(2m) = 0.0805957 0.0617065 0.0977039 0.0829004 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 66.127 48.464 70.211 121.644 1.1 < NA ≦ 1.2 35 < T ≦ 45 Case 4-01 4-02 4-03 4-04 4-05 n₁₀ 1.8909619 1.9211597 1.8908364 1.8788634 1.7209142 k₁₀ 0.2198688 0.1299283 0.1293290 0.1089981 0.0850231 d₁₀ (nm) 30.886 20.325 14.409 12.666 94.685 n₂₀ 2.4457650 1.8999891 1.6971949 1.6934061 1.6569532 k₂₀ 0.9042920 0.4762728 0.3219355 0.2597468 0.2398462 d₂₀ (nm) 40.480 114.977 192.850 251.595 187.582 When n₁ ≧ n₁₀, n_(1m) = 0.0581348 0.0702795 0.0908240 0.1067529 0.0340771 When n₁ < n₁₀, n_(1m) = 0.0408777 0.0430811 0.0541882 0.0719214 0.0077319 When k₁ ≧ k₁₀, k_(1m) = 0.0449243 0.0499243 0.0741248 0.0961597 0.0239465 When k₁ < k₁₀, k_(1m) = 0.0797229 0.0798120 0.0963696 0.1066907 0.0329150 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.322 5.448 5.786 6.719 11.856 When d₁ < d₁₀, d_(1m) (nm) = 2.642 2.634 3.166 4.161 2.071 When n₂ ≧ n₂₀, n_(2m) = 0.1853430 0.1162805 0.1041772 0.0995618 0.0224622 When n₂ < n₂₀, n_(2m) = 0.1757385 0.1461218 0.1390881 0.1365247 0.0731372 When k₂ ≧ k₂₀, k_(2m) = 0.2033411 0.1671118 0.0936316 0.0897620 0.0193579 When k₂ < k₂₀, k_(2m) = 0.1615027 0.0988000 0.0865491 0.0806287 0.0502966 When d₂ ≧ d₂₀, d_(2m) (nm) = 5.473 ∞ ∞ ∞ 13.590 When d₂ < d₂₀, d_(2m) (nm) = 4.339 20.871 70.442 87.096 16.661

1.1 < NA ≦ 1.2 35 < T ≦ 45 7/27 Case 4-06 4-07 4-08 4-09 4-10 n₁₀ 1.7236493 1.7053690 1.7096103 1.6884398 1.6913141 k₁₀ 0.0725136 0.0723352 0.0638708 0.0822671 0.0737244 d₁₀ (nm) 94.253 164.385 162.799 210.788 206.649 n₂₀ 1.6994520 1.6690598 1.7121782 1.7077650 1.6954335 k₂₀ 0.2004026 0.2212238 0.1844639 0.2979850 0.2262249 d₂₀ (nm) 239.752 181.544 233.616 132.459 199.430 When n₁ ≧ n₁₀, n_(1m) = 0.0432617 0.0328076 0.0449390 0.0103259 0.0357813 When n₁ < n₁₀, n_(1m) = 0.0189111 0.0081836 0.0418201 0.0476318 0.0441882 When k₁ ≧ k₁₀, k_(1m) = 0.0428613 0.0134167 0.0270105 0.0240100 0.0467419 When k₁ < k₁₀, k_(1m) = 0.0419373 0.0221985 0.0217126 0.0186353 0.0353625 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.395 21.834 ∞ 7.013 ∞ When d₁ < d₁₀, d_(1m) (nm) = 5.406 2.666 6.246 21.283 26.527 When n₂ ≧ n₂₀, n_(2m) = 0.0587073 0.0279724 0.0684412 0.1217639 0.1437500 When n₂ < n₂₀, n_(2m) = 0.0913135 0.0359949 0.0242969 0.0190967 0.1057874 When k₂ ≧ k₂₀, k_(2m) = 0.0407703 0.0058350 0.0150317 0.0602039 0.1122632 When k₂ < k₂₀, k_(2m) = 0.0523291 0.0449670 0.0490210 0.0601965 0.0826379 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ 4.683 36.767 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 25.916 13.275 6.151 3.566 25.291 1.1 < NA ≦ 1.2 35 < T ≦ 45 Case 4-11 4-12 4-13 n₁₀ 1.6945163 1.7002615 1.6987767 k₁₀ 0.0596605 0.0658973 0.0602453 d₁₀ (nm) 219.093 265.562 264.538 n₂₀ 1.6879518 1.6991117 1.6924357 k₂₀ 0.1823501 0.2320843 0.1888152 d₂₀ (nm) 237.943 190.875 250.808 When n₁ ≧ n₁₀, n_(1m) = 0.0400159 0.0514929 0.0760449 When n₁ < n₁₀, n_(1m) = 0.0454590 0.0339758 0.0578162 When k₁ ≧ k₁₀, k_(1m) = 0.0478894 0.0439832 0.0508728 When k₁ < k₁₀, k_(1m) = 0.0318921 0.0347144 0.0365662 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 53.950 89.870 117.603 When n₂ ≧ n₂₀, n_(2m) = 0.2316992 0.3028357 0.2948633 When n₂ < n₂₀, n_(2m) = 0.0956519 0.2532336 0.2085193 When k₂ ≧ k₂₀, k_(2m) = 0.1045911 0.2056006 0.2209802 When k₂ < k₂₀, k_(2m) = 0.0612427 0.1002246 0.0860327 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 40.957 67.613 80.377

1.1 < NA ≦ 1.2 45 < T ≦ 55 8/27 Case 5-01 5-02 5-03 5-04 5-05 n₁₀ 1.9413239 1.8877645 1.8798429 1.7202563 1.7249517 k₁₀ 0.1405566 0.1445306 0.1135692 0.0870823 0.0739360 d₁₀ (nm) 18.043 14.095 12.637 94.214 94.041 n₂₀ 1.8442891 1.6688638 1.6888514 1.6489031 1.7027050 k₂₀ 0.4845639 0.3235014 0.2638544 0.2445724 0.2047377 d₂₀ (nm) 113.109 187.292 243.053 179.182 229.905 When n₁ ≧ n₁₀, n_(1m) = 0.0724768 0.0904346 0.1062329 0.0324084 0.0425623 When n₁ < n₁₀, n_(1m) = 0.0387427 0.0534119 0.0716968 0.0082080 0.0177209 When k₁ ≧ k₁₀, k_(1m) = 0.0483630 0.0753357 0.0968298 0.0243140 0.0418030 When k₁ < k₁₀, k_(1m) = 0.0803040 0.0945715 0.1060376 0.0343469 0.0406653 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.823 5.486 6.573 10.670 17.560 When d₁ < d₁₀, d_(1m) (nm) = 2.042 3.025 4.077 2.161 4.892 When n₂ ≧ n₂₀, n_(2m) = 0.1074292 0.0972339 0.0967822 0.0242322 0.0621313 When n₂ < n₂₀, n_(2m) = 0.1555688 0.1383643 0.1358411 0.0727905 0.0930249 When k₂ ≧ k₂₀, k_(2m) = 0.1308459 0.0862097 0.0881348 0.0180859 0.0388489 When k₂ < k₂₀, k_(2m) = 0.0911877 0.0843787 0.0806641 0.0488940 0.0530957 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 10.287 ∞ When d₂ < d₂₀, d_(2m) (nm) = 20.712 69.838 88.098 16.560 20.064 1.1 < NA ≦ 1.2 45 < T ≦ 55 Case 5-06 5-07 5-08 5-09 5-10 n₁₀ 1.7053831 1.7104785 1.6877471 1.6915115 1.6941672 k₁₀ 0.0736370 0.0654156 0.0844092 0.0739491 0.0608347 d₁₀ (nm) 163.843 162.671 209.661 205.513 218.889 n₂₀ 1.6671854 1.7160090 1.6959640 1.6904122 1.6879018 k₂₀ 0.2267475 0.1885946 0.3073448 0.2298496 0.1872431 d₂₀ (nm) 172.382 223.774 127.018 196.556 228.501 When n₁ ≧ n₁₀, n_(1m) = 0.0309619 0.0440515 0.0051978 0.0335425 0.0357227 When n₁ < n₁₀, n_(1m) = 0.0112268 0.0078247 0.0453333 0.0430493 0.0410388 When k₁ ≧ k₁₀, k_(1m) = 0.0149072 0.0196375 0.0173291 0.0473206 0.0467871 When k₁ < k₁₀, k_(1m) = 0.0262830 0.0141846 0.0154602 0.0372058 0.0305029 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.247 ∞ 2.276 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 3.447 2.046 19.587 24.997 50.391 When n₂ ≧ n₂₀, n_(2m) = 0.0348413 0.0672729 0.1107800 0.1391333 0.2394653 When n₂ < n₂₀, n_(2m) = 0.0292676 0.0106921 0.0107263 0.0732312 0.0890649 When k₂ ≧ k₂₀, k_(2m) = 0.0073389 0.0081616 0.0597644 0.1152246 0.1047815 When k₂ < k₂₀, k_(2m) = 0.0445459 0.0504346 0.0379138 0.0797473 0.0602527 When d₂ ≧ d₂₀, d_(2m) (nm) = 6.326 35.781 32.689 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 11.802 2.505 1.901 20.558 36.515

1.1 < NA ≦ 1.2 45 < T ≦ 55 9/27 Case 5-11 5-12 5-13 n₁₀ 1.6941096 1.7000691 1.6987341 k₁₀ 0.0560046 0.0669711 0.0608862 d₁₀ (nm) 215.482 264.757 263.855 n₂₀ 1.6938988 1.6924460 1.6911373 k₂₀ 0.1599964 0.2378630 0.1924284 d₂₀ (nm) 287.470 184.028 243.250 When n₁ ≧ n₁₀, n_(1m) = 0.0468335 0.0484424 0.0766663 When n₁ < n₁₀, n_(1m) = 0.0625427 0.0333350 0.0582520 When k₁ ≧ k₁₀, k_(1m) = 0.0574133 0.0424146 0.0503235 When k₁ < k₁₀, k_(1m) = 0.0373425 0.0336023 0.0357239 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 47.031 45.336 115.043 When n₂ ≧ n₂₀, n_(2m) = 0.2184277 0.3156848 0.3032751 When n₂ < n₂₀, n_(2m) = 0.1528296 0.2586377 0.2107019 When k₂ ≧ k₂₀, k_(2m) = 0.1238171 0.2073083 0.2191870 When k₂ < k₂₀, k_(2m) = 0.0588196 0.0981323 0.0862329 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 85.352 66.135 78.131 1.1 < NA ≦ 1.2 55 < T ≦ 65 Case 6-01 6-02 6-03 6-04 6-05 n₁₀ 1.8998120 1.9599431 1.8792360 1.8920036 1.7198405 k₁₀ 0.2622743 0.1538418 0.1119058 0.0671877 0.0878543 d₁₀ (nm) 21.573 15.993 12.895 11.926 93.971 n₂₀ 1.6944131 1.7907917 1.6940206 1.7462722 1.6452515 k₂₀ 0.7809017 0.4780154 0.2681658 0.2347435 0.2473168 d₂₀ (nm) 53.320 111.028 231.714 280.522 169.419 When n₁ ≧ n₁₀, n_(1m) = 0.0603137 0.0799158 0.1051331 0.1164221 0.0325574 When n₁ < n₁₀, n_(1m) = 0.0246228 0.0339001 0.0713818 0.0790796 0.0109656 When k₁ ≧ k₁₀, k_(1m) = 0.0436731 0.0463733 0.0957117 0.1011499 0.0282458 When k₁ < k₁₀, k_(1m) = 0.0527222 0.0842969 0.1045093 0.0671877 0.0383301 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.630 4.315 6.630 7.111 10.486 When d₁ < d₁₀, d_(1m) (nm) = 1.338 1.548 4.149 4.416 2.879 When n₂ ≧ n₂₀, n_(2m) = 0.1220337 0.0996899 0.0944202 0.0992114 0.0312585 When n₂ < n₂₀, n_(2m) = 0.0963342 0.1728088 0.1384424 0.1517053 0.0751245 When k₂ ≧ k₂₀, k_(2m) = 0.0896167 0.0986731 0.0889478 0.0981226 0.0215662 When k₂ < k₂₀, k_(2m) = 0.0868945 0.0892566 0.0826782 0.0802551 0.0503503 When d₂ ≧ d₂₀, d_(2m) (nm) = 14.581 ∞ ∞ ∞ 10.833 When d₂ < d₂₀, d_(2m) (nm) = 7.202 14.530 88.193 126.095 17.275

1.1 < NA ≦ 1.2 55 < T ≦ 65 10/27 Case 6-06 6-07 6-08 6-09 6-10 n₁₀ 1.7267515 1.7286377 1.7058235 1.6871196 1.6936372 k₁₀ 0.0746914 0.0697592 0.0740364 0.0856014 0.0616799 d₁₀ (nm) 93.982 94.711 163.674 208.540 218.466 n₂₀ 1.7088385 1.7257237 1.6690540 1.6832134 1.6877720 k₂₀ 0.2076415 0.1796886 0.2306007 0.3092532 0.1900717 d₂₀ (nm) 218.911 273.487 161.946 121.170 218.772 When n₁ ≧ n₁₀, n_(1m) = 0.0431396 0.0483069 0.0312061 0.0049573 0.0327710 When n₁ < n₁₀, n_(1m) = 0.0172424 0.0116125 0.0175793 0.0417786 0.0401648 When k₁ ≧ k₁₀, k_(1m) = 0.0418896 0.0318958 0.0202844 0.0152393 0.0462805 When k₁ < k₁₀, k_(1m) = 0.0396252 0.0362695 0.0328467 0.0174036 0.0298352 When d₁ ≧ d₁₀, d_(1m) (nm) = 17.247 40.127 17.394 2.172 ∞ When d₁ < d₁₀, d_(1m) (nm) = 4.621 3.300 5.870 18.309 47.643 When n₂ ≧ n₂₀, n_(2m) = 0.0684570 0.0868091 0.0312744 0.1009155 0.2431030 When n₂ < n₂₀, n_(2m) = 0.0962207 0.1095422 0.0318677 0.0098169 0.0838513 When k₂ ≧ k₂₀, k_(2m) = 0.0394080 0.0515259 0.0123767 0.0719922 0.1060815 When k₂ < k₂₀, k_(2m) = 0.0553357 0.0549243 0.0471436 0.0304236 0.0607056 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 9.995 25.676 ∞ When d₂ < d₂₀, d_(2m) (nm) = 15.791 73.815 10.017 1.682 28.435 1.1 < NA ≦ 1.2 55 < T ≦ 65 Case 6-11 6-12 n₁₀ 1.6996002 1.6985143 k₁₀ 0.0674630 0.0611760 d₁₀ (nm) 264.231 263.586 n₂₀ 1.6851097 1.6903246 k₂₀ 0.2396601 0.1936289 d₂₀ (nm) 175.944 234.054 When n₁ ≧ n₁₀, n_(1m) = 0.0469604 0.0772302 When n₁ < n₁₀, n_(1m) = 0.0345850 0.0600415 When k₁ ≧ k₁₀, k_(1m) = 0.0413989 0.0503625 When k₁ < k₁₀, k_(1m) = 0.0326746 0.0352795 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 35.789 113.370 When n₂ ≧ n₂₀, n_(2m) = 0.3361853 0.3175012 When n₂ < n₂₀, n_(2m) = 0.2595898 0.2115027 When k₂ ≧ k₂₀, k_(2m) = 0.2087170 0.2189661 When k₂ < k₂₀, k_(2m) = 0.0954248 0.0859949 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 64.780 74.733

1.1 < NA ≦ 1.2 65 < T ≦ 75 11/27 Case 7-01 7-02 7-03 7-04 7-05 n₁₀ 1.8814830 1.9657443 1.8787154 1.8913468 1.7209187 k₁₀ 0.2936564 0.1688741 0.1109169 0.0695388 0.0883668 d₁₀ (nm) 22.098 15.852 13.263 12.162 94.055 n₂₀ 1.6321609 1.7726563 1.6996278 1.7469121 1.6482914 k₂₀ 0.8097385 0.4923001 0.2745566 0.2387131 0.2540527 d₂₀ (nm) 46.190 103.170 220.404 270.807 158.511 When n₁ ≧ n₁₀, n_(1m) = 0.0656360 0.0817346 0.1037085 0.1149512 0.0333252 When n₁ < n₁₀, n_(1m) = 0.0241089 0.0282544 0.0702112 0.0769897 0.0127490 When k₁ ≧ k₁₀, k_(1m) = 0.0378577 0.0400220 0.0934888 0.0991272 0.0301257 When k₁ < k₁₀, k_(1m) = 0.0323035 0.0824512 0.1025916 0.0695388 0.0388867 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.610 3.980 6.711 7.159 10.691 When d₁ < d₁₀, d_(1m) (nm) = 1.297 1.237 4.191 4.366 3.330 When n₂ ≧ n₂₀, n_(2m) = 0.1024585 0.0947095 0.0935791 0.1004138 0.0355066 When n₂ < n₂₀, n_(2m) = 0.0645630 0.1828857 0.1422339 0.1540833 0.0767798 When k₂ ≧ k₂₀, k_(2m) = 0.0898303 0.0894482 0.0904114 0.0989551 0.0244946 When k₂ < k₂₀, k_(2m) = 0.1003796 0.0949036 0.0851941 0.0816284 0.0535193 When d₂ ≧ d₂₀, d_(2m) (nm) = 11.613 ∞ ∞ ∞ 11.010 When d₂ < d₂₀, d_(2m) (nm) = 4.416 10.112 84.053 124.915 16.505 1.1 < NA ≦ 1.2 65 < T ≦ 75 Case 7-06 7-07 7-08 7-09 7-10 n₁₀ 1.7288665 1.7286370 1.7068032 1.6862856 1.6931399 k₁₀ 0.0756184 0.0709992 0.0744994 0.0878163 0.0624918 d₁₀ (nm) 94.090 94.923 163.814 208.124 217.968 n₂₀ 1.7153723 1.7241262 1.6739446 1.6736237 1.6872372 k₂₀ 0.2125971 0.1831189 0.2371534 0.3138657 0.1926334 d₂₀ (nm) 207.924 263.961 151.052 112.320 209.546 When n₁ ≧ n₁₀, n_(1m) = 0.0437573 0.0483350 0.0322754 0.0025049 0.0316833 When n₁ < n₁₀, n_(1m) = 0.0164966 0.0099878 0.0175537 0.0409570 0.0419177 When k₁ ≧ k₁₀, k_(1m) = 0.0410425 0.0291785 0.0221094 0.0095605 0.0459827 When k₁ < k₁₀, k_(1m) = 0.0388428 0.0344531 0.0333215 0.0151172 0.0300720 When d₁ ≧ d₁₀, d_(1m) (nm) = 17.329 38.775 18.851 1.009 ∞ When d₁ < d₁₀, d_(1m) (nm) = 4.318 2.813 6.154 17.032 45.887 When n₂ ≧ n₂₀, n_(2m) = 0.0710437 0.0893457 0.0302136 0.1037878 0.2406421 When n₂ < n₂₀, n_(2m) = 0.0969080 0.1083484 0.0331750 0.0056763 0.0830054 When k₂ ≧ k₂₀, k_(2m) = 0.0400586 0.0500842 0.0147241 0.0658289 0.1059290 When k₂ < k₂₀, k_(2m) = 0.0574512 0.0562378 0.0506323 0.0175342 0.0630762 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 10.293 26.205 ∞ When d₂ < d₂₀, d_(2m) (nm) = 13.701 72.849 8.984 0.992 28.220

1.1 < NA ≦ 1.2 65 < T ≦ 75 12/27 Case 7-11 7-12 7-13 n₁₀ 1.6935780 1.6987845 1.6982075 k₁₀ 0.0575917 0.0682876 0.0620058 d₁₀ (nm) 214.501 264.829 264.409 n₂₀ 1.6927449 1.6826884 1.6907687 k₂₀ 0.1631490 0.2430960 0.1959423 d₂₀ (nm) 269.036 164.540 222.065 When n₁ ≧ n₁₀, n_(1m) = 0.0479456 0.0478223 0.0756042 When n₁ < n₁₀, n_(1m) = 0.0597888 0.0375256 0.0523840 When k₁ ≧ k₁₀, k_(1m) = 0.0567029 0.0406042 0.0502747 When k₁ < k₁₀, k_(1m) = 0.0379382 0.0306238 0.0354358 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 42.775 36.115 105.289 When n₂ ≧ n₂₀, n_(2m) = 0.2180396 0.3702002 0.3412915 When n₂ < n₂₀, n_(2m) = 0.1575122 0.2565369 0.2093115 When k₂ ≧ k₂₀, k_(2m) = 0.1278589 0.2070850 0.2215063 When k₂ < k₂₀, k_(2m) = 0.0614197 0.0951270 0.0864294 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 81.766 63.144 76.945 1.1 < NA ≦ 1.2 75 < T ≦ 85 Case 8-01 8-02 8-03 8-04 8-05 n₁₀ 1.8508920 1.9432602 1.8788012 1.8809660 1.8914032 k₁₀ 0.3299462 0.1828608 0.1571474 0.1122948 0.0691945 d₁₀ (nm) 26.713 18.534 15.200 13.670 12.762 n₂₀ 1.6561984 1.7922587 1.6553949 1.7045069 1.7559855 k₂₀ 1.0215947 0.5435792 0.3498651 0.2862016 0.2487147 d₂₀ (nm) 31.481 89.452 157.519 210.391 259.753 When n₁ ≧ n₁₀, n_(1m) = 0.0584900 0.0721143 0.0859290 0.1006885 0.1098987 When n₁ < n₁₀, n_(1m) = 0.0118384 0.0258594 0.0490076 0.0672168 0.0736646 When k₁ ≧ k₁₀, k_(1m) = 0.0281628 0.0341772 0.0681653 0.0888281 0.0935315 When k₁ < k₁₀, k_(1m) = 0.0027112 0.0735254 0.0892920 0.1016174 0.0691945 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.227 4.317 5.436 6.605 7.111 When d₁ < d₁₀, d_(1m) (nm) = 0.304 1.291 2.967 4.063 4.341 When n₂ ≧ n₂₀, n_(2m) = 0.1267358 0.0961279 0.0835156 0.0933350 0.1000793 When n₂ < n₂₀, n_(2m) = 0.0093018 0.1747852 0.1389221 0.1466003 0.1520386 When k₂ ≧ k₂₀, k_(2m) = 0.0170300 0.1198535 0.0846472 0.0918018 0.1012305 When k₂ < k₂₀, k_(2m) = 0.1219019 0.1040369 0.0912122 0.0867468 0.0829492 When d₂ ≧ d₂₀, d_(2m) (nm) = 8.195 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 0.369 9.559 36.990 78.480 119.640

1.1 < NA ≦ 1.2 75 < T ≦ 85 13/27 Case 8-06 8-07 8-08 8-09 8-10 n₁₀ 1.7233184 1.7297992 1.7292921 1.7076375 1.6902915 k₁₀ 0.0905387 0.0774990 0.0722395 0.0765186 0.0790058 d₁₀ (nm) 94.254 94.232 94.957 163.992 206.654 n₂₀ 1.6520214 1.7157415 1.7247476 1.6752795 1.6879680 k₂₀ 0.2670378 0.2209454 0.1892941 0.2482558 0.2475793 d₂₀ (nm) 148.504 198.899 254.857 141.650 161.284 When n₁ ≧ n₁₀, n_(1m) = 0.0327246 0.0427734 0.0473462 0.0318115 0.0212964 When n₁ < n₁₀, n_(1m) = 0.0093958 0.0147302 0.0094299 0.0087695 0.0407813 When k₁ ≧ k₁₀, k_(1m) = 0.0245129 0.0376636 0.0278931 0.0137170 0.0408545 When k₁ < k₁₀, k_(1m) = 0.0384680 0.0381934 0.0341284 0.0285461 0.0259851 When d₁ ≧ d₁₀, d_(1m) (nm) = 10.366 16.607 38.446 19.131 18.064 When d₁ < d₁₀, d_(1m) (nm) = 2.389 3.804 2.614 2.661 24.299 When n₂ ≧ n₂₀, n_(2m) = 0.0285376 0.0673352 0.0815320 0.0313904 0.1426208 When n₂ < n₂₀, n_(2m) = 0.0743250 0.0929968 0.1051160 0.0237683 0.0535938 When k₂ ≧ k₂₀, k_(2m) = 0.0198962 0.0371387 0.0465576 0.0076379 0.0976270 When k₂ < k₂₀, k_(2m) = 0.0547290 0.0576892 0.0565930 0.0508740 0.0749768 When d₂ ≧ d₂₀, d_(2m) (nm) = 8.585 ∞ ∞ 6.981 ∞ When d₂ < d₂₀, d_(2m) (nm) = 13.959 13.822 33.284 7.469 13.904 1.1 < NA ≦ 1.2 75 < T ≦ 85 Case 8-11 8-12 8-13 8-14 8-15 n₁₀ 1.6929156 1.6935338 1.6984313 1.6980068 1.6970347 k₁₀ 0.0637318 0.0581307 0.0697413 0.0633264 0.0530849 d₁₀ (nm) 217.693 214.870 266.256 265.782 275.682 n₂₀ 1.6856131 1.6920922 1.6871666 1.6912942 1.6884244 k₂₀ 0.1973081 0.1667488 0.2538157 0.2022310 0.1714348 d₂₀ (nm) 201.188 259.776 152.235 210.360 256.304 When n₁ ≧ n₁₀, n_(1m) = 0.0321716 0.0471802 0.0486719 0.0738318 0.0569543 When n₁ < n₁₀, n_(1m) = 0.0414331 0.0603931 0.0363989 0.0470300 0.0427893 When k₁ ≧ k₁₀, k_(1m) = 0.0451428 0.0559961 0.0398804 0.0494763 0.0598206 When k₁ < k₁₀, k_(1m) = 0.0289417 0.0378210 0.0291638 0.0345105 0.0376172 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 45.410 42.667 37.515 100.900 104.445 When n₂ ≧ n₂₀, n_(2m) = 0.2377576 0.2179382 0.2594739 0.3590393 0.2768311 When n₂ < n₂₀, n_(2m) = 0.0859351 0.1565027 0.2556433 0.2089795 0.2197266 When k₂ ≧ k₂₀, k_(2m) = 0.1024292 0.1246008 0.1994592 0.2211169 0.1929004 When k₂ < k₂₀, k_(2m) = 0.0656946 0.0632471 0.1014087 0.0895886 0.0738538 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 33.167 82.155 62.366 73.160 83.598

1.1 < NA ≦ 1.2 85 < T ≦ 95 14/27 Case 9-01 9-02 9-03 9-04 9-05 n₁₀ 1.9192397 1.8910111 1.8874292 1.8928956 1.7266669 k₁₀ 0.1987767 0.1570861 0.1170062 0.0800147 0.0953661 d₁₀ (nm) 21.654 15.844 13.907 12.695 94.323 n₂₀ 1.8264016 1.6782576 1.7063011 1.7424852 1.6542284 k₂₀ 0.6189774 0.3828036 0.3024107 0.2571531 0.2869718 d₂₀ (nm) 76.882 146.288 201.867 254.323 139.595 When n₁ ≧ n₁₀, n_(1m) = 0.0649170 0.0821021 0.0973254 0.1089844 0.0299609 When n₁ < n₁₀, n_(1m) = 0.0262927 0.0442981 0.0631677 0.0721631 0.0018164 When k₁ ≧ k₁₀, k_(1m) = 0.0313647 0.0611023 0.0836865 0.0928955 0.0075598 When k₁ < k₁₀, k_(1m) = 0.0678699 0.0898816 0.1010254 0.0800147 0.0251917 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.482 5.181 6.239 6.859 9.178 When d₁ < d₁₀, d_(1m) (nm) = 1.480 2.625 3.732 4.138 0.436 When n₂ ≧ n₂₀, n_(2m) = 0.0987671 0.0845752 0.0932324 0.0997229 0.0068860 When n₂ < n₂₀, n_(2m) = 0.1650610 0.1381567 0.1431714 0.1501294 0.0677319 When k₂ ≧ k₂₀, k_(2m) = 0.1657446 0.0892700 0.0918542 0.0980688 0.0046692 When k₂ < k₂₀, k_(2m) = 0.1121045 0.0937854 0.0873950 0.0830798 0.0530042 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 2.101 When d₂ < d₂₀, d_(2m) (nm) = 12.789 29.518 73.873 87.951 11.267 1.1 < NA ≦ 1.2 85 < T ≦ 95 Case 9-06 9-07 9-08 9-09 9-10 n₁₀ 1.7296393 1.7299249 1.6899362 1.6928826 1.6935628 k₁₀ 0.0805906 0.0737621 0.0817785 0.0657282 0.0590519 d₁₀ (nm) 94.242 94.784 208.164 217.665 215.464 n₂₀ 1.7097783 1.7252153 1.6924320 1.6832004 1.6914497 k₂₀ 0.2319224 0.1970612 0.2651701 0.2055611 0.1728158 d₂₀ (nm) 191.543 246.491 148.618 193.166 250.826 When n₁ ≧ n₁₀, n_(1m) = 0.0403186 0.0454016 0.0167883 0.0332178 0.0456592 When n₁ < n₁₀, n_(1m) = 0.0112720 0.0089185 0.0424597 0.0374463 0.0611377 When k₁ ≧ k₁₀, k_(1m) = 0.0312561 0.0265295 0.0332300 0.0436560 0.0547620 When k₁ < k₁₀, k_(1m) = 0.0359937 0.0340186 0.0176221 0.0271997 0.0369495 When d₁ ≧ d₁₀, d_(1m) (nm) = 14.915 25.988 8.734 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 2.867 2.423 22.681 45.245 43.081 When n₂ ≧ n₂₀, n_(2m) = 0.0542737 0.0673303 0.1469031 0.2426758 0.2225391 When n₂ < n₂₀, n_(2m) = 0.0873267 0.0993994 0.0330542 0.0887622 0.1544177 When k₂ ≧ k₂₀, k_(2m) = 0.0292090 0.0400476 0.0700159 0.0962317 0.1187769 When k₂ < k₂₀, k_(2m) = 0.0563428 0.0561450 0.0687061 0.0675110 0.0629883 When d₂ ≧ d₂₀, d_(2m) (nm) = 39.648 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 14.552 29.955 9.727 29.747 77.934

1.1 < NA ≦ 1.2 85 < T ≦ 95 15/27 Case 9-11 9-12 9-13 n₁₀ 1.6988269 1.6981501 1.6968464 k₁₀ 0.0719884 0.0650380 0.0544760 d₁₀ (nm) 266.949 266.102 275.663 n₂₀ 1.6930572 1.6910453 1.6860880 k₂₀ 0.2717519 0.2123559 0.1778694 d₂₀ (nm) 142.233 201.439 248.323 When n₁ ≧ n₁₀, n_(1m) = 0.0467688 0.0728052 0.0574890 When n₁ < n₁₀, n_(1m) = 0.0315735 0.0440601 0.0431165 When k₁ ≧ k₁₀, k_(1m) = 0.0383911 0.0476294 0.0587781 When k₁ < k₁₀, k_(1m) = 0.0284839 0.0337549 0.0370691 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 35.571 98.568 104.018 When n₂ ≧ n₂₀, n_(2m) = 0.2475818 0.3536121 0.2819006 When n₂ < n₂₀, n_(2m) = 0.2616077 0.2147424 0.2120007 When k₂ ≧ k₂₀, k_(2m) = 0.1929529 0.2177991 0.1925061 When k₂ < k₂₀, k_(2m) = 0.1103821 0.0937061 0.0749585 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 61.377 69.390 80.535 1.1 < NA ≦ 1.2 95 < T ≦ 105 Case 10-01 10-02 10-03 10-04 10-05 n₁₀ 1.9207610 1.9093240 1.8948938 1.8966282 1.7293323 k₁₀ 0.2195112 0.1610220 0.1257399 0.0900141 0.0843251 d₁₀ (nm) 22.312 16.027 13.855 12.530 93.974 n₂₀ 1.8258536 1.6981498 1.7003095 1.7305926 1.7018671 k₂₀ 0.6986358 0.4189775 0.3177305 0.2658040 0.2432029 d₂₀ (nm) 68.737 136.163 194.613 248.346 184.391 When n₁ ≧ n₁₀, n_(1m) = 0.0601465 0.0788086 0.0949231 0.1082007 0.0364734 When n₁ < n₁₀, n_(1m) = 0.0227283 0.0400269 0.0595679 0.0706311 0.0069092 When k₁ ≧ k₁₀, k_(1m) = 0.0253723 0.0545032 0.0804407 0.0926099 0.0227478 When k₁ < k₁₀, k_(1m) = 0.0628345 0.0889185 0.1005603 0.0900141 0.0311768 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.994 4.715 5.765 6.514 12.891 When d₁ < d₁₀, d_(1m) (nm) = 1.248 2.209 3.348 3.879 1.711 When n₂ ≧ n₂₀, n_(2m) = 0.0792419 0.0821826 0.0922205 0.0989185 0.0380920 When n₂ < n₂₀, n_(2m) = 0.1602795 0.1375000 0.1411267 0.1492065 0.0806519 When k₂ ≧ k₂₀, k_(2m) = 0.1589185 0.0905359 0.0891418 0.0944934 0.0182117 When k₂ < k₂₀, k_(2m) = 0.1093127 0.0931641 0.0864453 0.0826196 0.0535706 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 26.631 When d₂ < d₂₀, d_(2m) (nm) = 11.170 27.297 70.361 86.529 13.056

1.1 < NA ≦ 1.2 95 < T ≦ 105 16/27 Case 10-06 10-07 10-08 10-09 10-10 n₁₀ 1.7301568 1.6896128 1.6928686 1.6935394 1.6995193 k₁₀ 0.0757850 0.0845530 0.0680057 0.0604311 0.0747728 d₁₀ (nm) 94.458 207.994 217.789 215.751 266.467 n₂₀ 1.7237225 1.6930315 1.6806392 1.6908086 1.6953349 k₂₀ 0.2045935 0.2839311 0.2160083 0.1799717 0.2921202 d₂₀ (nm) 238.500 141.193 184.741 242.024 134.479 When n₁ ≧ n₁₀, n_(1m) = 0.0430542 0.0132361 0.0331689 0.0442139 0.0436938 When n₁ < n₁₀, n_(1m) = 0.0073706 0.0419458 0.0316418 0.0535156 0.0268311 When k₁ ≧ k₁₀, k_(1m) = 0.0232617 0.0264368 0.0418604 0.0531323 0.0358801 When k₁ < k₁₀, k_(1m) = 0.0323706 0.0142944 0.0250220 0.0355676 0.0274768 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.826 5.860 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 1.955 19.840 44.604 42.829 18.631 When n₂ ≧ n₂₀, n_(2m) = 0.0534583 0.1398230 0.2538293 0.2308789 0.2386206 When n₂ < n₂₀, n_(2m) = 0.0961475 0.0183801 0.0879700 0.1305579 0.2731067 When k₂ ≧ k₂₀, k_(2m) = 0.0309888 0.0515918 0.0900964 0.1145776 0.1883105 When k₂ < k₂₀, k_(2m) = 0.0550842 0.0676599 0.0668372 0.0642163 0.1153723 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 28.701 3.697 28.484 75.626 22.552 1.1 < NA ≦ 1.2 95 < T ≦ 105 Case 10-11 10-12 n₁₀ 1.6986281 1.6967467 k₁₀ 0.0669339 0.0559821 d₁₀ (nm) 265.290 275.562 n₂₀ 1.6902923 1.6844237 k₂₀ 0.2238725 0.1853984 d₂₀ (nm) 194.429 239.846 When n₁ ≧ n₁₀, n_(1m) = 0.0728162 0.0573596 When n₁ < n₁₀, n_(1m) = 0.0413391 0.0430261 When k₁ ≧ k₁₀, k_(1m) = 0.0452283 0.0576135 When k₁ < k₁₀, k_(1m) = 0.0327722 0.0361206 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 90.187 103.212 When n₂ ≧ n₂₀, n_(2m) = 0.3400000 0.2868152 When n₂ < n₂₀, n_(2m) = 0.2235767 0.2105566 When k₂ ≧ k₂₀, k_(2m) = 0.2178235 0.1919788 When k₂ < k₂₀, k_(2m) = 0.0973718 0.0774072 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 66.928 79.000

1.1 < NA ≦ 1.2 105 < T ≦ 115 17/27 Case 11-01 11-02 11-03 11-04 11-05 n₁₀ 1.9214172 1.9009993 1.8999222 1.7289797 1.7301397 k₁₀ 0.1753360 0.1351301 0.0954510 0.0876375 0.0779683 d₁₀ (nm) 15.452 13.611 12.469 93.472 94.062 n₂₀ 1.6804411 1.6899586 1.7262130 1.6943958 1.7208177 k₂₀ 0.4367098 0.3280314 0.2728992 0.2513033 0.2098777 d₂₀ (nm) 129.893 187.370 240.318 176.630 230.281 When n₁ ≧ n₁₀, n_(1m) = 0.0769006 0.0933704 0.1067993 0.0330078 0.0410352 When n₁ < n₁₀, n_(1m) = 0.0358716 0.0572852 0.0688867 0.0032751 0.0048413 When k₁ ≧ k₁₀, k_(1m) = 0.0508276 0.0793042 0.0916321 0.0140979 0.0177686 When k₁ < k₁₀, k_(1m) = 0.0888501 0.0996167 0.0954510 0.0244348 0.0282959 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.190 5.335 6.248 10.623 16.723 When d₁ < d₁₀, d_(1m) (nm) = 1.818 3.051 3.681 0.787 1.251 When n₂ ≧ n₂₀, n_(2m) = 0.0746777 0.0897961 0.0977148 0.0241113 0.0398962 When n₂ < n₂₀, n_(2m) = 0.1378662 0.1400989 0.1490454 0.0784241 0.0968872 When k₂ ≧ k₂₀, k_(2m) = 0.0793188 0.0846436 0.0920837 0.0085193 0.0207715 When k₂ < k₂₀, k_(2m) = 0.0870862 0.0841199 0.0819739 0.0504102 0.0538818 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 17.196 ∞ When d₂ < d₂₀, d_(2m) (nm) = 28.725 67.570 87.835 8.245 10.621 1.1 < NA ≦ 1.2 105 < T ≦ 115 Case 11-06 11-07 11-08 11-09 n₁₀ 1.6897075 1.6928599 1.6933895 1.6967442 k₁₀ 0.0859154 0.0698704 0.0619572 0.0572224 d₁₀ (nm) 206.600 218.100 215.832 275.439 n₂₀ 1.6860653 1.6784557 1.6904996 1.6838077 k₂₀ 0.2958058 0.2260347 0.1864736 0.1920294 d₂₀ (nm) 138.770 175.355 232.785 230.401 When n₁ ≧ n₁₀, n_(1m) = 0.0125659 0.0312329 0.0432227 0.0564172 When n₁ < n₁₀, n_(1m) = 0.0403125 0.0252893 0.0462402 0.0423401 When k₁ ≧ k₁₀, k_(1m) = 0.0275024 0.0399890 0.0513623 0.0566272 When k₁ < k₁₀, k_(1m) = 0.0207617 0.0230298 0.0339783 0.0347253 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.565 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 15.751 15.335 41.797 102.062 When n₂ ≧ n₂₀, n_(2m) = 0.1134778 0.0778406 0.2416541 0.2945471 When n₂ < n₂₀, n_(2m) = 0.0212585 0.0821313 0.1144373 0.2197937 When k₂ ≧ k₂₀, k_(2m) = 0.0640356 0.0874658 0.1126599 0.1918506 When k₂ < k₂₀, k_(2m) = 0.0823962 0.0630994 0.0642725 0.0810107 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 4.190 25.396 50.058 79.342

1.1 < NA ≦ 1.2 115 < T ≦ 125 18/27 Case 12-01 12-02 12-03 12-04 12-05 n₁₀ 1.9907624 1.9229056 1.9003143 1.9049048 1.7296380 k₁₀ 0.2658843 0.1943367 0.1434936 0.0972823 0.0899801 d₁₀ (nm) 16.877 14.896 13.590 12.362 93.128 n₂₀ 1.6777634 1.6435696 1.6791032 1.7269066 1.6935089 k₂₀ 0.7245088 0.4392836 0.3336019 0.2779612 0.2572784 d₂₀ (nm) 66.041 124.711 179.139 230.763 167.093 When n₁ ≧ n₁₀, n_(1m) = 0.0641870 0.0750415 0.0917773 0.1066382 0.0315833 When n₁ < n₁₀, n_(1m) = 0.0020520 0.0319995 0.0559583 0.0680188 0.0015344 When k₁ ≧ k₁₀, k_(1m) = 0.0028235 0.0481201 0.0790771 0.0912170 0.0085083 When k₁ < k₁₀, k_(1m) = 0.0445386 0.0882983 0.0964502 0.0972823 0.0192114 When d₁ ≧ d₁₀, d_(1m) (nm) = 2.498 3.792 5.133 6.031 9.518 When d₁ < d₁₀, d_(1m) (nm) = 0.080 1.544 2.939 3.522 0.359 When n₂ ≧ n₂₀, n_(2m) = 0.0064478 0.0655054 0.0877441 0.0975110 0.0182434 When n₂ < n₂₀, n_(2m) = 0.1131567 0.1382288 0.1415613 0.1512451 0.0817859 When k₂ ≧ k₂₀, k_(2m) = 0.0073132 0.0658899 0.0812854 0.0911096 0.0040100 When k₂ < k₂₀, k_(2m) = 0.0730591 0.0825134 0.0835315 0.0828308 0.0509155 When d₂ ≧ d₂₀, d_(2m) (nm) = 10.610 ∞ ∞ ∞ 14.228 When d₂ < d₂₀, d_(2m) (nm) = 2.901 33.267 66.014 90.382 3.593 1.1 < NA ≦ 1.2 115 < T ≦ 125 Case 12-06 12-07 12-08 12-09 12-10 n₁₀ 1.7305285 1.6927568 1.6930586 1.6939267 1.6970265 k₁₀ 0.0799609 0.0712762 0.0635805 0.0583165 0.0526106 d₁₀ (nm) 93.907 218.499 215.646 213.162 273.430 n₂₀ 1.7196209 1.6781695 1.6903056 1.6934648 1.6908020 k₂₀ 0.2133806 0.2348207 0.0196344 0.1626221 0.1682270 d₂₀ (nm) 220.978 164.929 223.237 282.414 277.869 When n₁ ≧ n₁₀, n_(1m) = 0.0401038 0.0280627 0.0367090 0.0617249 0.0695837 When n₁ < n₁₀, n_(1m) = 0.0020569 0.0197937 0.0422595 0.0578455 0.0506836 When k₁ ≧ k₁₀, k_(1m) = 0.0099243 0.0365027 0.0497717 0.0551318 0.0584485 When k₁ < k₁₀, k_(1m) = 0.0219006 0.0215491 0.0327808 0.0369946 0.0381665 When d₁ ≧ d₁₀, d_(1m) (nm) = 15.192 ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 0.519 8.747 40.119 117.750 120.098 When n₂ ≧ n₂₀, n_(2m) = 0.0185596 0.0673242 0.2516089 0.2302490 0.2819116 When n₂ < n₂₀, n_(2m) = 0.1000403 0.0715613 0.0981323 0.1425830 0.2021863 When k₂ ≧ k₂₀, k_(2m) = 0.0105981 0.0901270 0.1132849 0.1293579 0.1967712 When k₂ < k₂₀, k_(2m) = 0.0546692 0.0589612 0.0634204 0.0595032 0.0741577 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 3.602 19.014 34.397 79.670 93.763

1.1 < NA ≦ 1.2 125 < T ≦ 135 19/27 Case 13-01 13-02 13-03 13-04 13-05 n₁₀ 1.8968086 1.9070303 1.9016797 1.7329805 1.7161015 k₁₀ 0.1457981 0.0954881 0.0905797 0.0916823 0.0708259 d₁₀ (nm) 14.128 12.717 10.946 93.296 94.224 n₂₀ 1.6815336 1.7369802 1.7110902 1.7056329 1.6780965 k₂₀ 0.3444919 0.2856144 0.2381911 0.2670261 0.1788543 d₂₀ (nm) 167.613 218.968 280.601 155.076 274.399 When n₁ ≧ n₁₀, n_(1m) = 0.0900439 0.1048657 0.1226746 0.0324280 0.0442737 When n₁ < n₁₀, n_(1m) = 0.0549670 0.0656934 0.0785547 0.0012561 0.0190796 When k₁ ≧ k₁₀, k_(1m) = 0.0772925 0.0877979 0.1031616 0.0075342 0.0396033 When k₁ < k₁₀, k_(1m) = 0.0920227 0.0954881 0.0905767 0.0177710 0.0448962 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.183 6.019 6.438 9.368 34.945 When d₁ < d₁₀, d_(1m) (nm) = 2.993 3.453 3.787 0.285 6.328 When n₂ ≧ n₂₀, n_(2m) = 0.0877783 0.0991382 0.1111206 0.0250049 0.0400305 When n₂ < n₂₀, n_(2m) = 0.1446509 0.1532288 0.1362280 0.0542139 0.1016638 When k₂ ≧ k₂₀, k_(2m) = 0.0828516 0.0936658 0.0912720 0.0036011 0.0409863 When k₂ < k₂₀, k_(2m) = 0.0884485 0.0865161 0.0819922 0.0570435 0.0508105 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 16.698 ∞ When d₂ < d₂₀, d_(2m) (nm) = 63.831 86.162 129.598 1.884 53.218 1.1 < NA ≦ 1.2 125 < T ≦ 135 Case 13-06 13-07 13-08 13-09 n₁₀ 1.6922053 1.6924923 1.6935584 1.6967916 k₁₀ 0.0726320 0.0653867 0.0598502 0.0533770 d₁₀ (nm) 218.650 214.871 212.072 273.133 n₂₀ 1.6800076 1.6897434 1.6927128 1.6904661 k₂₀ 0.2436881 0.1959626 0.1654173 0.1709158 d₂₀ (nm) 154.426 214.392 274.211 268.389 When n₁ ≧ n₁₀, n_(1m) = 0.0253528 0.0324316 0.0605591 0.0715686 When n₁ < n₁₀, n_(1m) = 0.0165808 0.0420508 0.0560315 0.0516870 When k₁ ≧ k₁₀, k_(1m) = 0.0318250 0.0487207 0.0537805 0.0575159 When k₁ < k₁₀, k_(1m) = 0.0192969 0.0323987 0.0370093 0.0369739 When d₁ ≧ d₁₀, d_(1m) (nm) = 16.057 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 7.067 37.738 59.298 116.516 When n₂ ≧ n₂₀, n_(2m) = 0.0399280 0.1505237 0.2298792 0.2878638 When n₂ < n₂₀, n_(2m) = 0.0570007 0.0843848 0.1463525 0.2044592 When k₂ ≧ k₂₀, k_(2m) = 0.0949915 0.1174060 0.1308350 0.1989417 When k₂ < k₂₀, k_(2m) = 0.0566089 0.0642029 0.0608850 0.0765625 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 13.778 24.202 76.110 90.681

1.1 < NA ≦ 1.2 135 < T ≦ 145 20/27 Case 14-01 14-02 14-03 14-04 14-05 n₁₀ 1.8931613 1.9086798 1.8957546 1.7383088 1.7163304 k₁₀ 0.1437464 0.0925277 0.1021679 0.0935643 0.0717315 d₁₀ (nm) 15.228 13.463 11.154 93.735 94.330 n₂₀ 1.6981871 1.7547782 1.6965397 1.7255584 1.6763108 k₂₀ 0.3648670 0.2987738 0.2414267 0.2828024 0.1832109 d₂₀ (nm) 154.635 206.696 273.752 142.972 265.207 When n₁ ≧ n₁₀, n_(1m) = 0.0870447 0.1008179 0.1206177 0.0337476 0.0440930 When n₁ < n₁₀, n_(1m) = 0.0533362 0.0620862 0.0768750 0.0007715 0.0201111 When k₁ ≧ k₁₀, k_(1m) = 0.0736633 0.0819543 0.1022961 0.0054871 0.0403162 When k₁ < k₁₀, k_(1m) = 0.0884546 0.0925277 0.1021679 0.0149585 0.0433484 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.366 6.051 6.474 9.539 32.676 When d₁ < d₁₀, d_(1m) (nm) = 3.110 3.392 3.792 0.168 6.615 When n₂ ≧ n₂₀, n_(2m) = 0.0905371 0.1017932 0.1131152 0.0305115 0.0401709 When n₂ < n₂₀, n_(2m) = 0.1457471 0.1521191 0.1323865 0.0291541 0.0974780 When k₂ ≧ k₂₀, k_(2m) = 0.0891467 0.0990112 0.0895691 0.0025757 0.0411877 When k₂ < k₂₀, k_(2m) = 0.0964551 0.0905688 0.0826367 0.0641370 0.0518066 d_(2m) (nm) = ∞ ∞ ∞ 18.295 ∞ When d₂ < d₂₀, d_(2m) (nm) = 52.833 78.923 127.644 0.825 36.894 1.1 < NA ≦ 1.2 135 < T ≦ 145 Case 14-06 14-07 14-08 14-09 14-10 n₁₀ 1.7036586 1.6919166 1.6911838 1.6942185 1.6965335 k₁₀ 0.0640636 0.0672926 0.0743991 0.0545821 0.0539924 d₁₀ (nm) 161.836 213.353 218.060 211.644 273.036 n₂₀ 1.6842842 1.6889376 1.6805827 1.6930391 1.6894839 k₂₀ 0.1670348 0.2002175 0.2524809 0.1466022 0.1738185 d₂₀ (nm) 260.021 207.074 145.761 321.654 259.712 When n₁ ≧ n₁₀, n_(1m) = 0.0516992 0.0312610 0.0190637 0.0570044 0.0731799 When n₁ < n₁₀, n_(1m) = 0.0203174 0.0465454 0.0159326 0.0625537 0.0527673 When k₁ ≧ k₁₀, k_(1m) = 0.0380640 0.0462256 0.0279297 0.0552405 0.0568201 When k₁ < k₁₀, k_(1m) = 0.0285486 0.0325867 0.0168274 0.0356702 0.0362610 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ 14.138 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 9.049 34.771 6.640 127.140 114.401 When n₂ ≧ n₂₀, n_(2m) = 0.0375000 0.2427722 0.0321863 0.2263916 0.2897119 When n₂ < n₂₀, n_(2m) = 0.0655225 0.0802039 0.0495178 0.1240515 0.2069202 When k₂ ≧ k₂₀, k_(2m) = 0.0303979 0.1193311 0.0877856 0.1337305 0.1994678 When k₂ < k₂₀, k_(2m) = 0.0483228 0.0645337 0.0566711 0.0596594 0.0781824 When d₂ ≧ d₂₀, d_(2m) (nm) = 29.338 ∞ 15.130 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 27.139 22.617 11.351 93.024 88.496

1.1 < NA ≦ 1.2 145 < T ≦ 155 21/27 Case 15-01 15-02 15-03 15-04 15-05 n₁₀ 1.8962402 1.9162756 1.8972293 1.7171631 1.7039366 k₁₀ 0.1446868 0.0920008 0.1039493 0.0735355 0.0654419 d₁₀ (nm) 16.058 13.917 11.503 94.241 161.496 n₂₀ 1.7149739 1.7705409 1.6986687 1.6756859 1.6849902 k₂₀ 0.3909951 0.3160160 0.2516185 0.1901883 0.1728826 d₂₀ (nm) 143.691 196.340 264.437 256.660 251.490 When n₁ ≧ n₁₀, n_(1m) = 0.0837915 0.0974329 0.1166235 0.0430017 0.0505029 When n₁ < n₁₀, n_(1m) = 0.0514441 0.0592371 0.0737268 0.0188135 0.0178369 When k₁ ≧ k₁₀, k_(1m) = 0.0700403 0.0772290 0.0977893 0.0384546 0.0357764 When k₁ < k₁₀, k_(1m) = 0.0675134 0.0920008 0.1039493 0.0432324 0.0268848 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.323 5.852 6.362 32.246 ∞ When d₁ < d₁₀, d_(1m) (nm) = 3.062 3.205 3.699 5.981 7.380 When n₂ ≧ n₂₀, n_(2m) = 0.0928162 0.1031079 0.1115686 0.0381177 0.0304712 When n₂ < n₂₀, n_(2m) = 0.1435938 0.1490808 0.1351062 0.0929431 0.0597266 When k₂ ≧ k₂₀, k_(2m) = 0.0944385 0.1027820 0.0897864 0.0382104 0.0277966 When k₂ < k₂₀, k_(2m) = 0.0995911 0.0924023 0.0838245 0.0516921 0.0462678 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 23.493 When d₂ < d₂₀, d_(2m) (nm) = 30.912 72.930 96.188 31.536 23.876 1.1 < NA ≦ 1.2 145 < T ≦ 155 Case 15-06 15-07 15-08 15-09 n₁₀ 1.6903081 1.6915399 1.6931731 1.6963857 k₁₀ 0.0771344 0.0690906 0.0615887 0.0546865 d₁₀ (nm) 216.305 212.338 211.917 273.170 n₂₀ 1.6786590 1.6881028 1.6918937 1.6879125 k₂₀ 0.2613948 0.2062149 0.1729009 0.1780863 d₂₀ (nm) 139.207 199.770 256.415 251.444 When n₁ ≧ n₁₀, n_(1m) = 0.0195569 0.0307166 0.0591064 0.0699243 When n₁ < n₁₀, n_(1m) = 0.0132800 0.0523120 0.0554614 0.0530347 When k₁ ≧ k₁₀, k_(1m) = 0.0269897 0.04450159 0.0517236 0.0562524 When k₁ < k₁₀, k_(1m) = 0.0101050 0.0313696 0.0355261 0.0367395 When d₁ ≧ d₁₀, d_(1m) (nm) = 14.222 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 6.108 32.462 54.157 113.606 When n₂ ≧ n₂₀, n_(2m) = 0.0246814 0.2330432 0.2286047 0.2890198 When n₂ < n₂₀, n_(2m) = 0.0598340 0.0841870 0.1451465 0.2088098 When k₂ ≧ k₂₀, k_(2m) = 0.0678235 0.1160620 0.1277832 0.1979041 When k₂ < k₂₀, k_(2m) = 0.0514465 0.0682922 0.0664624 0.0771411 When d₂ ≧ d₂₀, d_(2m) (nm) = 11.437 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 12.498 26.276 74.225 84.013

1.1 < NA ≦ 1.2 155 < T ≦ 165 22/27 Case 16-01 16-02 16-03 16-04 16-05 n₁₀ 1.9078860 1.9270939 1.9009914 1.7182026 1.7037276 k₁₀ 0.1508452 0.0963716 0.1079582 0.0759211 0.0670447 d₁₀ (nm) 16.208 13.863 11.657 93.910 160.452 n₂₀ 1.7232027 1.7738090 1.6981472 1.6754262 1.6860603 k₂₀ 0.4201511 0.3331580 0.2622250 0.1979303 0.1785858 d₂₀ (nm) 134.826 188.374 256.036 248.261 243.357 When n₁ ≧ n₁₀, n_(1m) = 0.0807556 0.0955676 0.1136938 0.0410315 0.0482739 When n₁ < n₁₀, n_(1m) = 0.0492212 0.0570374 0.0706995 0.0157471 0.0155554 When k₁ ≧ k₁₀, k_(1m) = 0.0660083 0.0745215 0.0946643 0.0342603 0.0302344 When k₁ < k₁₀, k_(1m) = 0.0885791 0.0963716 0.1079582 0.0433301 0.0248120 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.938 5.477 6.133 23.554 ∞ When d₁ < d₁₀, d_(1m) (nm) = 2.790 2.920 3.507 4.784 6.051 When n₂ ≧ n₂₀, n_(2m) = 0.0912793 0.1022461 0.1087073 0.0334387 0.0216223 When n₂ < n₂₀, n_(2m) = 0.1401233 0.1468384 0.1373413 0.0900842 0.0519312 When k₂ ≧ k₂₀, k_(2m) = 0.0948535 0.1014905 0.0883215 0.0321790 0.0239026 When k₂ < k₂₀, k_(2m) = 0.0976477 0.0917578 0.0837280 0.0507922 0.0474658 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 19.461 When d₂ < d₂₀, d_(2m) (nm) = 27.641 68.596 90.537 29.710 21.259 1.1 < NA ≦ 1.2 155 < T ≦ 165 Case 16-06 16-07 16-08 16-09 n₁₀ 1.6914048 1.6932944 1.6971949 1.6963748 k₁₀ 0.0705280 0.0619823 0.0758678 0.0557064 d₁₀ (nm) 212.904 213.027 268.193 273.316 n₂₀ 1.6862460 1.6912789 1.6840809 1.6860970 k₂₀ 0.2142065 0.1784688 0.2789945 0.1841499 d₂₀ (nm) 190.804 246.475 135.240 242.973 When n₁ ≧ n₁₀, n_(1m) = 0.0288806 0.0598267 0.0616260 0.0706445 When n₁ < n₁₀, n_(1m) = 0.0419739 0.0573401 0.0320642 0.0521814 When k₁ ≧ k₁₀, k_(1m) = 0.0434460 0.0510059 0.0409424 0.0555554 When k₁ < k₁₀, k_(1m) = 0.0304883 0.0343054 0.0217456 0.0379871 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 31.951 51.898 19.489 113.780 When n₂ ≧ n₂₀, n_(2m) = 0.2364844 0.2370337 0.2474512 0.2927136 When n₂ < n₂₀, n_(2m) = 0.0869409 0.1403040 0.2270129 0.2100537 When k₂ ≧ k₂₀, k_(2m) = 0.1067354 0.1223047 0.1872974 0.1959326 When k₂ < k₂₀, k_(2m) = 0.0726953 0.0652295 0.1039441 0.0773071 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 34.355 75.037 36.050 81.214

1.1 < NA ≦ 1.2 165 < T ≦ 175 23/27 Case 17-01 17-02 17-03 17-04 17-05 n₁₀ 1.9345747 1.9100928 1.9218874 1.7188695 1.7031385 k₁₀ 0.1082213 0.1149883 0.1634556 0.0782891 0.0685384 d₁₀ (nm) 13.373 11.317 15.608 93.463 159.293 n₂₀ 1.7554016 1.6916658 1.7091703 1.6745648 1.6866422 k₂₀ 0.3434593 0.2694423 0.4402763 0.2040549 0.1829170 d₂₀ (nm) 183.042 248.707 128.647 239.614 234.977 When n₁ ≧ n₁₀, n_(1m) = 0.0953882 0.1140894 0.0784595 0.0386694 0.0460681 When n₁ < n₁₀, n_(1m) = 0.0550098 0.0698865 0.0459766 0.0121814 0.0133398 When k₁ ≧ k₁₀, k_(1m) = 0.0742224 0.0954895 0.0620923 0.0290149 0.0227319 When k₁ < k₁₀, k_(1m) = 0.1051392 0.1149883 0.0876528 0.0413110 0.0203333 When d₁ ≧ d₁₀, d_(1m) (nm) = 5.105 5.733 4.388 16.599 ∞ When d₁ < d₁₀, d_(1m) (nm) = 2.628 3.226 2.376 3.551 4.956 When n₂ ≧ n₂₀, n_(2m) = 0.0995532 0.1061743 0.0849316 0.0275488 0.0132971 When n₂ < n₂₀, n_(2m) = 0.1453674 0.1364294 0.1372107 0.0877344 0.0449780 When k₂ ≧ k₂₀, k_(2m) = 0.0936926 0.0848206 0.0864539 0.0249731 0.0152673 When k₂ < k₂₀, k_(2m) = 0.0884937 0.0821777 0.0909717 0.0487439 0.0459656 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ 6.034 When d₂ < d₂₀, d_(2m) (nm) = 65.841 91.823 28.009 30.737 19.612 1.1 < NA ≦ 1.2 165 < T ≦ 175 Case 17-06 17-07 17-08 17-09 n₁₀ 1.6934237 1.6934242 1.6985617 1.6963947 k₁₀ 0.0627890 0.0627998 0.0777714 0.0569261 d₁₀ (nm) 213.592 213.572 264.836 273.344 n₂₀ 1.6908665 1.6907829 1.6854326 1.6845211 k₂₀ 0.1844160 0.1843934 0.2962369 0.1907955 d₂₀ (nm) 236.853 236.891 131.733 233.824 When n₁ ≧ n₁₀, n_(1m) = 0.0574976 0.0574353 0.0522168 0.0698511 When n₁ < n₁₀, n_(1m) = 0.0521313 0.0521704 0.0296216 0.0506372 When k₁ ≧ k₁₀, k_(1m) = 0.0502954 0.0502856 0.0369763 0.0547412 When k₁ < k₁₀, k_(1m) = 0.0341577 0.0341846 0.0234509 0.0366406 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 50.284 50.272 18.034 113.943 When n₂ ≧ n₂₀, n_(2m) = 0.2442261 0.2441003 0.2108032 0.3045251 When n₂ < n₂₀, n_(2m) = 0.1394958 0.1395251 0.2567761 0.2115186 When k₂ ≧ k₂₀, k_(2m) = 0.1187415 0.1187610 0.1954675 0.1950378 When k₂ < k₂₀, k_(2m) = 0.0660913 0.0660889 0.1128296 0.0795361 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 75.634 75.652 33.470 80.767

1.1 < NA ≦ 1.2 175 < T ≦ 185 24/27 Case 18-01 18-02 18-03 18-04 18-05 n₁₀ 1.9329388 1.9368237 1.9141366 1.7191879 1.7029035 k₁₀ 0.1795701 0.1224596 0.1196035 0.0801581 0.0699625 d₁₀ (nm) 14.789 12.921 11.206 93.133 158.805 n₂₀ 1.6812994 1.7305084 1.6882344 1.6734445 1.6865116 k₂₀ 0.4483886 0.3477304 0.2744889 0.2077092 0.1862225 d₂₀ (nm) 123.825 177.704 240.000 230.286 225.674 When n₁ ≧ n₁₀, n_(1m) = 0.0768433 0.0949634 0.1131592 0.0367419 0.0441357 When n₁ < n₁₀, n_(1m) = 0.0412451 0.0529919 0.0684998 0.0095679 0.0109912 When k₁ ≧ k₁₀, k_(1m) = 0.0578772 0.0744714 0.0949390 0.0247339 0.0167639 When k₁ < k₁₀, k_(1m) = 0.0896887 0.1065430 0.1185388 0.0386743 0.0152380 When d₁ ≧ d₁₀, d_(1m) (nm) = 3.840 4.794 5.495 14.453 ∞ When d₁ < d₁₀, d_(1m) (nm) = 1.946 2.409 3.066 2.710 3.941 When n₂ ≧ n₂₀, n_(2m) = 0.0764294 0.0962097 0.1038733 0.0230908 0.0081592 When n₂ < n₂₀, n_(2m) = 0.1359412 0.1466211 0.1367029 0.0895520 0.0398572 When k₂ ≧ k₂₀, k_(2m) = 0.0734753 0.0852112 0.0825085 0.0197388 0.0086536 When k₂ < k₂₀, k_(2m) = 0.0828125 0.0854419 0.0815332 0.0475061 0.0463342 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 20.793 3.280 When d₂ < d₂₀, d_(2m) (nm) = 32.854 63.574 95.894 33.693 18.574 1.1 < NA ≦ 1.2 175 < T ≦ 185 Case 18-06 18-07 18-08 n₁₀ 1.6933701 1.6939475 1.6969386 k₁₀ 0.0640425 0.0576888 0.0533290 d₁₀ (nm) 213.864 212.435 271.986 n₂₀ 1.6904005 1.6925921 1.6924288 k₂₀ 0.1898312 0.1618810 0.1673219 d₂₀ (nm) 227.117 285.048 281.091 When n₁ ≧ n₁₀, n_(1m) = 0.0547229 0.0510974 0.0676453 When n₁ < n₁₀, n_(1m) = 0.0462109 0.0603149 0.0497070 When k₁ ≧ k₁₀, k_(1m) = 0.0493457 0.0532312 0.0592920 When k₁ < k₁₀, k_(1m) = 0.0339734 0.0351465 0.0390295 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 49.384 120.643 177.975 When n₂ ≧ n₂₀, n_(2m) = 0.2555811 0.2373071 0.2892273 When n₂ < n₂₀, n_(2m) = 0.1402515 0.1279663 0.2010315 When k₂ ≧ k₂₀, k_(2m) = 0.1146326 0.1254919 0.2051270 When k₂ < k₂₀, k_(2m) = 0.0655762 0.0607678 0.0750598 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 70.972 82.029 98.942

1.1 < NA ≦ 1.2 185 < T ≦ 195 25/27 Case 19-01 19-02 19-03 19-04 19-05 n₁₀ 1.9315873 1.9153217 1.8972445 1.7198506 1.7209927 k₁₀ 0.1333486 0.1206110 0.1001874 0.0813984 0.0705203 d₁₀ (nm) 13.169 11.351 10.604 93.215 93.408 n₂₀ 1.7169625 1.6899751 1.6952918 1.6740113 1.6975541 k₂₀ 0.3552140 0.2797802 0.2334251 0.2110946 0.1793898 d₂₀ (nm) 168.729 229.265 285.679 219.867 273.456 When n₁ ≧ n₁₀, n_(1m) = 0.0918945 0.1114490 0.1257397 0.0361377 0.0445178 When n₁ < n₁₀, n_(1m) = 0.0499878 0.0671436 0.0846338 0.0086279 0.0205615 When k₁ ≧ k₁₀, k_(1m) = 0.0714844 0.0926733 0.1116675 0.0228809 0.0433899 When k₁ < k₁₀, k_(1m) = 0.1000085 0.1179578 0.1001874 0.0379150 0.0444836 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.647 5.413 6.402 13.674 40.701 When d₁ < d₁₀, d_(1m) (nm) = 2.318 3.021 3.978 2.409 6.133 When n₂ ≧ n₂₀, n_(2m) = 0.0938611 0.1021985 0.1009766 0.0217163 0.0601978 When n₂ < n₂₀, n_(2m) = 0.1488745 0.1392834 0.1303809 0.0916943 0.1077124 When k₂ ≧ k₂₀, k_(2m) = 0.0821570 0.0826257 0.0865845 0.0185046 0.0416394 When k₂ < k₂₀, k_(2m) = 0.0869946 0.0832629 0.0782239 0.0491125 0.0501843 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ 19.431 ∞ When d₂ < d₂₀, d_(2m) (nm) = 61.773 92.529 127.146 32.148 73.073 1.1 < NA ≦ 1.2 185 < T ≦ 195 Case 19-06 19-07 19-08 19-09 19-10 n₁₀ 1.7035608 1.6916743 1.6930483 1.6936984 1.6968810 k₁₀ 0.0713918 0.0742011 0.0657083 0.0591625 0.0544417 d₁₀ (nm) 159.462 216.137 213.861 212.273 271.786 n₂₀ 1.6857491 1.6815589 1.6902271 1.6918699 1.6922876 k₂₀ 0.1901066 0.2413942 0.1951191 0.1652801 0.1708476 d₂₀ (nm) 215.251 158.897 217.477 275.792 271.501 When n₁ ≧ n₁₀, n_(1m) = 0.0427405 0.0223779 0.0519324 0.0514441 0.0684033 When n₁ < n₁₀, n_(1m) = 0.0090222 0.0227649 0.0431079 0.0594763 0.0491284 When k₁ ≧ k₁₀, k_(1m) = 0.0150232 0.0325586 0.0481873 0.0521765 0.0581763 When k₁ < k₁₀, k_(1m) = 0.0160400 0.0253345 0.0315527 0.0340894 0.0370996 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ 13.469 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 3.174 10.839 47.894 119.682 177.263 When n₂ ≧ n₂₀, n_(2m) = 0.0074805 0.0864617 0.1377869 0.2440918 0.2955884 When n₂ < n₂₀, n_(2m) = 0.0361890 0.0461035 0.1429895 0.1282532 0.2018481 When k₂ ≧ k₂₀, k_(2m) = 0.0083386 0.0888440 0.1120801 0.1247546 0.2080872 When k₂ < k₂₀, k_(2m) = 0.0485754 0.0635596 0.0642932 0.0606433 0.0779761 When d₂ ≧ d₂₀, d_(2m) (nm) = 3.092 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 17.439 14.439 35.904 75.946 92.429

1.1 < NA ≦ 1.2 195 < T ≦ 205 26/27 Case 20-01 20-02 20-03 20-04 20-05 n₁₀ 1.9249373 1.9134695 1.8970797 1.7208445 1.7215107 k₁₀ 0.1361664 0.1202777 0.0999072 0.0825059 0.0711590 d₁₀ (nm) 14.155 11.822 10.899 93.633 93.747 n₂₀ 1.7251855 1.6947701 1.6978665 1.6746972 1.6977852 k₂₀ 0.3723543 0.2878755 0.2388400 0.2167421 0.1834377 d₂₀ (nm) 156.237 218.180 275.054 209.700 263.540 When n₁ ≧ n₁₀, n_(1m) = 0.0879163 0.1083789 0.1230811 0.0362378 0.0448303 When n₁ < n₁₀, n_(1m) = 0.0472876 0.0648938 0.0826709 0.0083032 0.0200745 When k₁ ≧ k₁₀, k_(1m) = 0.0660645 0.0884607 0.1084424 0.0221863 0.0429114 When k₁ < k₁₀, k_(1m) = 0.0933167 0.1148511 0.0999072 0.0377161 0.0440771 When d₁ ≧ d₁₀, d_(1m) (nm) = 4.725 5.477 6.424 13.579 31.897 When d₁ < d₁₀, d_(1m) (nm) = 2.353 3.040 3.984 2.294 5.957 When n₂ ≧ n₂₀, n_(2m) = 0.0937048 0.1017651 0.1009302 0.0215295 0.0601208 When n₂ < n₂₀, n_(2m) = 0.1501685 0.1443250 0.1325146 0.0892346 0.1044958 When k₂ ≧ k₂₀, k_(2m) = 0.0870276 0.0848474 0.0878162 0.0191504 0.0424573 When k₂ < k₂₀, k_(2m) = 0.0940491 0.0866907 0.0808813 0.0520386 0.0521252 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 59.976 84.859 127.060 27.072 71.102 1.1 < NA ≦ 1.2 195 < T ≦ 205 Case 20-06 20-07 20-08 20-09 20-10 n₁₀ 1.7046380 1.7071945 1.6911424 1.6924731 1.6944113 k₁₀ 0.0728087 0.0643745 0.0761042 0.0678273 0.0547711 d₁₀ (nm) 160.840 160.796 216.237 212.933 211.610 n₂₀ 1.6842748 1.7036838 1.6835271 1.6899027 1.6931553 k₂₀ 0.1961079 0.1674255 0.2518702 0.2006809 0.1468072 d₂₀ (nm) 204.946 259.158 149.208 209.434 323.528 When n₁ ≧ n₁₀, n_(1m) = 0.0417468 0.0534717 0.0144385 0.0489441 0.0528149 When n₁ < n₁₀, n_(1m) = 0.0080798 0.0311902 0.0202490 0.0431433 0.0592456 When k₁ ≧ k₁₀, k_(1m) = 0.0160498 0.0272644 0.0259192 0.0470654 0.0582300 When k₁ < k₁₀, k_(1m) = 0.0189954 0.0257520 0.0204919 0.0289844 0.0354419 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ 11.042 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 2.830 21.473 8.826 44.978 116.569 When n₂ ≧ n₂₀, n_(2m) = 0.0092676 0.0660242 0.0583154 0.1383105 0.2397107 When n₂ < n₂₀, n_(2m) = 0.0345349 0.0284167 0.0279346 0.1133557 0.1358362 When k₂ ≧ k₂₀, k_(2m) = 0.0098743 0.0192883 0.0839758 0.1160754 0.1327747 When k₂ < k₂₀, k_(2m) = 0.0439319 0.0493506 0.0539001 0.0650562 0.0582056 When d₂ ≧ d₂₀, d_(2m) (nm) = 4.069 ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 16.537 9.202 10.084 22.297 94.005

1.1 < NA ≦ 1.2 195 < T ≦ 205 27/27 Case 20-11 n₁₀ 1.6967389 k₁₀ 0.0554960 d₁₀ (nm) 271.524 n₂₀ 1.6919127 k₂₀ 0.1743507 d₂₀ (nm) 262.739 When n₁ ≧ n₁₀, n_(1m) = 0.0690857 When n₁ < n₁₀, n_(1m) = 0.0487012 When k₁ ≧ k₁₀, k_(1m) = 0.0571155 When k₁ < k₁₀, k_(1m) = 0.0354016 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ When d₁ < d₁₀, d_(1m) (nm) = 122.531 When n₂ ≧ n₂₀, n_(2m) = 0.3042639 When n₂ < n₂₀, n_(2m) = 0.2009363 When k₂ ≧ k₂₀, k_(2m) = 0.2111316 When k₂ < k₂₀, k_(2m) = 0.0800171 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ When d₂ < d₂₀, d_(2m) (nm) = 82.974.


4. An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of: providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate having a thickness T (unit: nm) described below; and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.2<NA≦1.3, the antireflective film including an upper layer having a complex refractive index N₁, and a lower layer having a complex refractive index N₂, the complex refractive indexes N₁ and N₂ being represented by the equations N₁=n₁−k₁i and N₂=n₂−k₂i, respectively; wherein assuming that the thickness of the upper layer is d₁ (unit: nm) and the thickness of the lower layer is d₂ (unit: nm), when any one of the combinations of values of [n₁₀, k₁₀, d₁₀, n₂₀, k₂₀, d₂₀] described below is selected depending on the thickness T of the silicon oxide film, n₁, k₁, d₁, n₂, k₂, and d₂ satisfy the relational expression {(n ₁ −n ₁₀)/(n _(1m) −n ₁₀)}²+{(k₁ −k ₁₀)/(k _(1m) −k ₁₀)}²+{(d ₁ −d ₁₀)/(d _(1m) −d ₁₀)}²+{(n ₂ −n ₂₀)/(n _(2m) −n ₂₀)}²+{(k ₂ −k ₂₀)/(k _(2m) −k ₂₀)}²+{(d ₂ −d ₂₀)/(d _(2m) −d ₂₀)}²≦1; a value of n_(1m) in a corresponding case is selected on the basis of a magnitude relation between n₁ and n₁₀; a value Of k_(1m) in a corresponding case is selected on the basis of a magnitude relation between k₁ and k₁₀; a value of d_(1m) in a corresponding case is selected on the basis of a magnitude relation between d₁ and d₁₀; a value of n_(2m) in a corresponding case is selected on the basis of a magnitude relation between n₂ and n₂₀; a value of k_(2m) in a corresponding case is selected on the basis of a magnitude relation between k₂ and k₂₀; and a value of d_(2m) in a corresponding case is selected on the basis of a magnitude relation between d₂ and d₂₀; and in the tables below, in the line of “When n₁≧n₁₀, n_(1m)=”, each value in the right columns is “n_(1m)−n₁₀; in the line of “When n₁<n₁₀, n_(1m)=”, each value in the right columns is “n₁₀−n_(1m)”; in the line of “When k₁≧k₁₀, k_(1m)”, each value in the right columns is “k_(1m)−k₁₀”; in the line of “When k₁<k₁₀, k_(1m)=”, each value in the right columns is “k₁₀−k_(1m)”; in the line of “When d_(1≧d) ₁₀, d_(1m) (nm) =”, each value (unit: nm) in the right columns is “d_(1m)−d₁₀”; in the line of “When d₁<d₁₀, d_(1m) (nm) =”, each value (unit: nm) in the right columns is “d₁₀−d_(1m)”; in the line of “When n₂≧n₂₀, n_(2m)=”, each value in the right columns is “n_(2m)−n₂₀”; in the line of “When n₂<n₂₀, n_(2m)=”, each value in the right columns is “n₂₀−n_(2m)”; in the line of “When k₂≧k₂₀, k_(2m)”, each value in the right columns is “k_(2m)−k₂₀”; in the line of “When k₂<k₂₀, k_(2m)=”, each value in the right columns is “k₂₀−k_(2m)”; in the line of “When d₂≧d₂₀ , d_(2m) (nm) =”, each value (unit: nm) in the right columns is “d_(2m)−d₂₀”; and in the line of “When d₂<d₂₀, d_(2m) (nm) =”, each value (unit: nm) in the right columns is “d₂₀−d_(2m)”. 1.2 < NA ≦ 1.3 2 ≦ T ≦ 15 1/21 Case 1-01 1-02 1-03 1-04 1-05 n₁₀ 2.070 1.955 1.895 1.875 1.870 k₁₀ 0.020 0.138 0.133 0.110 0.101 d₁₀ (nm) 27.974 34.826 29.218 17.990 13.959 n₂₀ 5.553 9.284 2.177 1.753 1.700 k₂₀ 3.053 0.606 0.543 0.330 0.255 d₂₀ (nm) 2.024 10.907 63.407 152.930 218.765 When n₁ ≧ n₁₀, n_(1m) = 2.141 2.017 1.952 1.943 1.957 When n₁ < n₁₀, n_(1m) = 2.006 1.896 1.854 1.843 1.821 When k₁ ≧ k₁₀, k_(1m) = 0.075 0.180 0.166 0.155 0.171 When k₁ < k₁₀, k_(1m) = 0.000 0.061 0.055 0.028 0.009 When d₁ ≧ d₁₀, 31.254 39.247 35.017 23.926 20.211 d_(1m) (nm) = When d₁ < d₁₀, 25.519 31.618 26.178 15.560 10.679 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 5.876 9.377 2.281 1.832 1.773 When n₂ < n₂₀, n_(2m) = 5.233 9.207 2.051 1.635 1.577 When k₂ ≧ k₂₀, k_(2m) = 3.362 0.715 0.699 0.412 0.320 When k₂ < k₂₀, k_(2m) = 2.751 0.513 0.439 0.253 0.185 When d₂ ≧ d₂₀, 2.251 11.023 70.023 ∞ ∞ d_(2m) (nm) = When d₂ < d₂₀, 1.807 10.812 58.076 125.396 142.606 d_(2m) (nm) = 1.2 < NA ≦ 1.3 2 ≦ T ≦ 15 Case 1-06 1-07 1-08 1-09 1-10 n₁₀ 1.867 1.699 1.693 1.692 1.694 k₁₀ 0.070 0.063 0.058 0.069 0.074 d₁₀ (nm) 13.235 165.016 157.920 236.756 217.672 n₂₀ 1.732 1.698 1.698 6.942 1.788 k₂₀ 0.221 0.180 0.154 3.076 0.339 d₂₀ (nm) 270.745 204.222 265.886 0.950 84.006 When n₁ ≧ n₁₀, n_(1m) = 1.964 1.701 1.708 1.727 1.710 When n₁ < n₁₀, n_(1m) = 1.810 1.683 1.664 1.662 1.674 When k₁ ≧ k₁₀, k_(1m) = 0.149 0.068 0.084 0.108 0.106 When k₁ < k₁₀, k_(1m) = 0.000 0.043 0.031 0.039 0.053 When d₁ ≧ d₁₀, 20.519 166.410 170.845 255.389 226.062 d_(1m) (nm) = When d₁ < d₁₀, 9.259 155.941 111.504 217.630 206.257 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.809 1.721 1.754 7.503 1.909 When n₂ < n₂₀, n_(2m) = 1.603 1.694 1.667 6.491 1.763 When k₂ ≧ k₂₀, k_(2m) = 0.293 0.188 0.194 3.321 0.395 When k₂ < k₂₀, k_(2m) = 0.152 0.139 0.113 2.487 0.243 When d₂ ≧ d₂₀, ∞ 217.552 ∞ 1.062 100.609 d_(2m) (nm) = When d₂ < d₂₀, 182.495 202.082 249.694 0.781 81.237 d_(2m) (nm) =

1.2 < NA ≦ 1.3 2 ≦ T ≦ 15 2/21 Case 1-11 1-12 1-13 n₁₀ 1.699 1.698 1.695 k₁₀ 0.071 0.065 0.054 d₁₀ (nm) 210.274 207.280 219.181 n₂₀ 1.718 1.695 1.688 k₂₀ 0.242 0.194 0.161 d₂₀ (nm) 154.667 219.490 263.755 When n₁ ≧ n₁₀, n_(1m) = 1.720 1.737 1.738 When n₁ < n₁₀, n_(1m) = 1.683 1.675 1.660 When k₁ ≧ k₁₀, k_(1m) = 0.099 0.097 0.100 When k₁ < k₁₀, k_(1m) = 0.045 0.035 0.019 When d₁ ≧ d₁₀, d_(1m) (nm) = 229.005 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 200.369 189.200 189.609 When n₂ ≧ n₂₀, n_(2m) = 1.849 1.855 1.900 When n₂ < n₂₀, n_(2m) = 1.670 1.540 1.583 When k₂ ≧ k₂₀, k_(2m) = 0.332 0.307 0.271 When k₂ < k₂₀, k_(2m) = 0.164 0.122 0.102 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 143.819 154.002 185.363

1.2 < NA ≦ 1.3 1 < < T ≦ 25 3/21 Case 2-01 2-02 2-03 2-04 2-05 n₁₀ 1.894 1.881 1.874 1.872 1.693 k₁₀ 0.182 0.116 0.105 0.074 0.060 d₁₀ (nm) 37.493 18.625 14.298 13.408 158.097 n₂₀ 9.246 1.766 1.701 1.733 1.697 k₂₀ 0.662 0.358 0.269 0.231 0.160 d₂₀ (nm) 10.628 142.939 209.610 261.989 257.142 When n₁ ≧ n₁₀, n_(1m) = 1.954 1.946 1.957 1.966 1.703 When n₁ < n₁₀, n_(1m) = 1.847 1.852 1.828 1.817 1.667 When k₁ ≧ k₁₀, k_(1m) = 0.222 0.156 0.171 0.149 0.081 When k₁ < k₁₀, k_(1m) = 0.111 0.037 0.015 0.000 0.035 When d₁ ≧ d₁₀, 41.975 24.164 20.222 20.345 165.590 d_(1m) (nm) = When d₁ < d₁₀, 34.168 16.466 11.264 9.664 137.726 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 9.356 1.841 1.772 1.809 1.744 When n₂ < n₂₀, n_(2m) = 9.153 1.650 1.579 1.602 1.674 When k₂ ≧ k₂₀, k_(2m) = 0.784 0.442 0.334 0.302 0.195 When k₂ < k₂₀, k_(2m) = 0.549 0.280 0.198 0.162 0.120 When d₂ ≧ d₂₀, 10.759 ∞ ∞ ∞ ∞ d_(2m) (nm) = When d₂ < d₂₀, 10.519 119.178 137.341 178.243 243.996 d_(2m) (nm) = 1.2 < NA ≦ 1.3 1 < < T ≦ 25 Case 2-06 2-07 2-08 2-09 2-10 n₁₀ 1.690 1.693 1.699 1.698 1.695 k₁₀ 0.074 0.078 0.074 0.067 0.055 d₁₀ (nm) 235.203 218.334 210.503 207.468 219.130 n₂₀ 5.632 1.803 1.719 1.694 1.687 k₂₀ 4.204 0.382 0.259 0.203 0.167 d₂₀ (nm) 0.919 74.994 145.797 210.546 255.274 When n₁ ≧ n₁₀, n_(1m) = 1.708 1.699 1.715 1.733 1.737 When n₁ < n₁₀, n_(1m) = 1.661 1.675 1.684 1.676 1.661 When k₁ ≧ k₁₀, k_(1m) = 0.102 0.098 0.100 0.097 0.100 When k₁ < k₁₀, k_(1m) = 0.051 0.067 0.052 0.039 0.022 When d₁ ≧ d₁₀, 241.533 220.890 225.049 ∞ ∞ d_(1m) (nm) = When d₁ < d₁₀, 217.317 207.766 201.595 191.244 190.979 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 6.262 1.931 1.852 1.853 1.902 When n₂ < n₂₀, n_(2m) = 5.366 1.793 1.684 1.538 1.584 When k₂ ≧ k₂₀, k_(2m) = 4.338 0.416 0.339 0.310 0.275 When k₂ < k₂₀, k_(2m) = 3.555 0.288 0.182 0.132 0.107 When d₂ ≧ d₂₀, 0.986 89.025 ∞ ∞ ∞ d_(2m) (nm) = When d₂ < d₂₀, 0.720 74.083 139.178 147.776 179.334 d_(2m) (nm) =

1.2 < NA ≦ 1.3 25 < T ≦ 35 4/21 Case 3-01 3-02 3-03 3-04 3-05 n₁₀ 1.855 1.894 1.879 1.879 1.692 k₁₀ 0.222 0.121 0.110 0.076 0.062 d₁₀ (nm) 38.795 19.092 14.598 13.458 158.198 n₂₀ 9.554 1.787 1.702 1.736 1.697 k₂₀ 0.714 0.392 0.285 0.242 0.168 d₂₀ (nm) 10.003 133.195 201.011 253.439 248.709 When n₁ ≧ n₁₀, n_(1m) = 1.905 1.955 1.958 1.971 1.699 When n₁ < n₁₀, n_(1m) = 1.821 1.868 1.836 1.826 1.670 When k₁ ≧ k₁₀, k_(1m) = 0.258 0.156 0.172 0.149 0.078 When k₁ < k₁₀, k_(1m) = 0.159 0.047 0.022 0.000 0.041 When d₁ ≧ d₁₀, 42.560 24.067 20.129 19.949 161.711 d_(1m) (nm) = When d₁ < d₁₀, 36.125 17.295 11.822 9.987 144.941 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 9.681 1.856 1.769 1.811 1.737 When n₂ < n₂₀, n_(2m) = 9.446 1.674 1.584 1.608 1.683 When k₂ ≧ k₂₀, k_(2m) = 0.829 0.479 0.348 0.313 0.196 When k₂ < k₂₀, k_(2m) = 0.587 0.314 0.215 0.173 0.129 When d₂ ≧ d₂₀, 10.138 ∞ ∞ ∞ ∞ d_(2m) (nm) = When d₂ < d₂₀, 9.892 112.716 132.762 173.492 239.168 d_(2m) (nm) = 1.2 < NA ≦ 1.3 25 < T ≦ 35 Case 3-06 3-07 3-08 n₁₀ 1.699 1.698 1.695 k₁₀ 0.078 0.070 0.057 d₁₀ (nm) 210.437 207.381 219.158 n₂₀ 1.720 1.693 1.687 k₂₀ 0.280 0.215 0.175 d₂₀ (nm) 137.855 202.487 246.765 When n₁ ≧ n₁₀, n_(1m) = 1.710 1.730 1.737 When n₁ < n₁₀, n_(1m) = 1.686 1.678 1.661 When k₁ ≧ k₁₀, k_(1m) = 0.100 0.097 0.101 When k₁ < k₁₀, k_(1m) = 0.063 0.046 0.025 When d₁ ≧ d₁₀, d_(1m) (nm) = 216.379 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 202.875 193.042 192.539 When n₂ ≧ n₂₀, n_(2m) = 1.855 1.841 1.910 When n₂ < n₂₀, n_(2m) = 1.702 1.535 1.588 When k₂ ≧ k₂₀, k_(2m) = 0.336 0.312 0.280 When k₂ < k₂₀, k_(2m) = 0.208 0.146 0.114 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 134.716 142.289 200.270

1.2 < NA ≦ 1.3 35 < T ≦ 45 5/21 Case 4-01 4-02 4-03 4-04 4-05 n₁₀ 1.921 1.907 1.883 1.885 1.692 k₁₀ 0.198 0.132 0.117 0.078 0.064 d₁₀ (nm) 29.852 18.597 14.666 13.425 158.019 n₂₀ 2.410 1.779 1.698 1.738 1.697 k₂₀ 0.850 0.418 0.298 0.251 0.174 d₂₀ (nm) 42.336 126.566 192.788 244.904 240.368 When n₁ ≧ n₁₀, n_(1m) = 1.964 1.964 1.959 1.975 1.694 When n₁ < n₁₀, n_(1m) = 1.894 1.886 1.843 1.834 1.673 When k₁ ≧ k₁₀, k_(1m) = 0.224 0.160 0.175 0.149 0.073 When k₁ < k₁₀, k_(1m) = 0.152 0.061 0.031 0.000 0.048 When d₁ ≧ d₁₀, 33.127 22.917 19.812 19.537 159.270 d_(1m) (nm) = When d₁ < d₁₀, 28.245 17.267 12.114 10.202 147.983 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 2.530 1.833 1.762 1.812 1.732 When n₂ < n₂₀, n_(2m) = 2.288 1.667 1.583 1.611 1.691 When k₂ ≧ k₂₀, k_(2m) = 0.928 0.492 0.359 0.320 0.195 When k₂ < k₂₀, k_(2m) = 0.730 0.344 0.229 0.182 0.145 When d₂ ≧ d₂₀, 46.411 ∞ ∞ ∞ 274.107 d_(2m) (nm) = When d₂ < d₂₀, 39.931 107.536 154.271 167.375 234.670 d_(2m) (nm) = 1.2 < NA ≦ 1.3 35 < T ≦ 45 Case 4-06 4-07 4-08 4-09 n₁₀ 1.700 1.698 1.695 1.705 k₁₀ 0.081 0.072 0.059 0.053 d₁₀ (nm) 209.560 206.609 219.174 283.412 n₂₀ 1.716 1.692 1.688 1.691 k₂₀ 0.298 0.225 0.183 0.185 d₂₀ (nm) 131.419 195.862 237.750 233.362 When n₁ ≧ n₁₀, n_(1m) = 1.701 1.721 1.734 1.751 When n₁ < n₁₀, n_(1m) = 1.689 1.680 1.662 1.675 When k₁ ≧ k₁₀, k_(1m) = 0.099 0.097 0.101 0.092 When k₁ < k₁₀, k_(1m) = 0.076 0.050 0.027 0.024 When d₁ ≧ d₁₀, d_(1m) (nm) = 210.753 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 203.620 194.085 194.045 189.814 When n₂ ≧ n₂₀, n_(2m) = 1.846 1.812 1.920 1.889 When n₂ < n₂₀, n_(2m) = 1.712 1.528 1.594 1.515 When k₂ ≧ k₂₀, k_(2m) = 0.319 0.315 0.285 0.358 When k₂ < k₂₀, k_(2m) = 0.257 0.159 0.121 0.115 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 130.894 179.580 197.417 162.566

1.2 < NA ≦ 1.3 45 < T ≦ 55 6/21 Case 5-01 5-02 5-03 5-04 5-05 n₁₀ 1.943 1.907 1.884 1.891 1.691 k₁₀ 0.213 0.153 0.123 0.078 0.066 d₁₀ (nm) 22.907 17.372 14.585 13.392 157.377 n₂₀ 1.902 1.716 1.691 1.743 1.696 k₂₀ 0.785 0.418 0.305 0.257 0.178 d₂₀ (nm) 53.731 124.143 184.536 235.129 232.195 When n₁ ≧ n₁₀, n_(1m) = 1.979 1.963 1.959 1.980 1.692 When n₁ < n₁₀, n_(1m) = 1.934 1.892 1.845 1.841 1.676 When k₁ ≧ k₁₀, k_(1m) = 0.223 0.175 0.181 0.148 0.067 When k₁ < k₁₀, k_(1m) = 0.198 0.080 0.039 0.000 0.057 When d₁ ≧ d₁₀, 25.447 21.108 19.487 19.257 157.441 d_(1m) (nm) = When d₁ < d₁₀, 22.431 16.482 12.133 10.346 149.670 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.937 1.752 1.753 1.817 1.727 When n₂ < n₂₀, n_(2m) = 1.871 1.605 1.576 1.616 1.695 When k₂ ≧ k₂₀, k_(2m) = 0.813 0.464 0.362 0.326 0.187 When k₂ < k₂₀, k_(2m) = 0.724 0.351 0.237 0.188 0.173 When d₂ ≧ d₂₀, 58.954 ∞ ∞ ∞ 254.885 d_(2m) (nm) = When d₂ < d₂₀, 51.905 103.951 122.545 158.102 231.812 d_(2m) (nm) = 1.2 < NA ≦ 1.3 45 < T ≦ 55 Case 5-06 5-07 5-08 n₁₀ 1.699 1.695 1.704 k₁₀ 0.072 0.060 0.054 d₁₀ (nm) 204.994 219.095 283.255 n₂₀ 1.688 1.689 1.689 k₂₀ 0.231 0.188 0.189 d₂₀ (nm) 192.230 228.102 224.255 When n₁ ≧ n₁₀, n_(1m) = 1.718 1.729 1.749 When n₁ < n₁₀, n_(1m) = 1.682 1.663 1.676 When k₁ ≧ k₁₀, k_(1m) = 0.096 0.102 0.091 When k₁ < k₁₀, k_(1m) = 0.048 0.030 0.025 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 194.149 195.371 190.682 When n₂ ≧ n₂₀, n_(2m) = 1.788 1.929 1.898 When n₂ < n₂₀, n_(2m) = 1.641 1.601 1.530 When k₂ ≧ k₂₀, k_(2m) = 0.326 0.290 0.362 When k₂ < k₂₀, k_(2m) = 0.165 0.127 0.117 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 176.978 195.845 153.544

1.2 < NA ≦ 1.3 55 < T ≦ 65 7/21 Case 6-01 6-02 6-03 6-04 6-05 n₁₀ 1.895 1.882 1.690 1.701 1.693 k₁₀ 0.076 0.126 0.068 0.084 0.070 d₁₀ (nm) 13.537 14.752 155.845 206.275 221.382 n₂₀ 1.753 1.688 1.693 1.686 1.667 k₂₀ 0.262 0.309 0.181 0.310 0.231 d₂₀ (nm) 223.848 174.672 224.616 122.505 161.928 When n₁ ≧ n₁₀, n_(1m) = 1.983 1.956 1.691 1.703 1.726 When n₁ < n₁₀, n_(1m) = 1.846 1.842 1.680 1.695 1.686 When k₁ ≧ k₁₀, k_(1m) = 0.143 0.185 0.071 0.096 0.105 When k₁ < k₁₀, k_(1m) = 0.000 0.045 0.054 0.076 0.063 When d₁ ≧ d₁₀, 19.333 19.661 156.188 207.561 253.974 d_(1m) (nm) = When d₁ < d₁₀, 10.604 12.234 149.873 203.306 217.847 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.828 1.751 1.713 1.791 1.691 When n₂ < n₂₀, n_(2m) = 1.623 1.571 1.692 1.682 1.585 When k₂ ≧ k₂₀, k_(2m) = 0.332 0.365 0.184 0.352 0.284 When k₂ < k₂₀, k_(2m) = 0.191 0.239 0.171 0.280 0.201 When d₂ ≧ d₂₀, ∞ ∞ 244.114 149.549 170.132 d_(2m) (nm) = When d₂ < d₂₀, 146.194 124.203 224.269 121.948 139.231 d_(2m) (nm) = 1.2 < NA ≦ 1.3 55 < T ≦ 65 Case 6-06 6-07 6-08 n₁₀ 1.695 1.695 1.703 k₁₀ 0.060 0.055 0.049 d₁₀ (nm) 218.851 215.764 278.302 n₂₀ 1.689 1.693 1.691 k₂₀ 0.190 0.162 0.159 d₂₀ (nm) 218.129 277.062 273.241 When n₁ ≧ n₁₀, n_(1m) = 1.726 1.740 1.751 When n₁ < n₁₀, n_(1m) = 1.665 1.662 1.653 When k₁ ≧ k₁₀, k_(1m) = 0.102 0.097 0.092 When k₁ < k₁₀, k_(1m) = 0.031 0.021 0.015 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 196.531 170.235 166.884 When n₂ ≧ n₂₀, n_(2m) = 1.935 1.919 1.925 When n₂ < n₂₀, n_(2m) = 1.606 1.543 1.498 When k₂ ≧ k₂₀, k_(2m) = 0.294 0.280 0.278 When k₂ < k₂₀, k_(2m) = 0.130 0.102 0.095 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 191.652 197.142 190.724

1.2 < NA ≦ 1.3 65 < T ≦ 75 8/21 Case 7-01 7-02 7-03 7-04 7-05 n₁₀ 1.881 1.879 1.898 1.873 1.715 k₁₀ 0.189 0.125 0.073 0.092 0.067 d₁₀ (nm) 17.242 15.444 14.029 12.003 99.925 n₂₀ 1.617 1.697 1.767 1.696 1.686 k₂₀ 0.409 0.320 0.271 0.218 0.167 d₂₀ (nm) 111.921 162.536 211.582 280.785 269.056 When n₁ ≧ n₁₀, n_(1m) = 1.933 1.953 1.985 1.975 1.746 When n₁ < n₁₀, n_(1m) = 1.873 1.839 1.852 1.816 1.710 When k₁ ≧ k₁₀, k_(1m) = 0.202 0.184 0.136 0.174 0.081 When k₁ < k₁₀, k_(1m) = 0.122 0.046 0.000 0.000 0.037 When d₁ ≧ d₁₀, 20.550 20.523 19.818 18.551 136.285 d_(1m) (nm) = When d₁ < d₁₀, 16.700 12.791 11.204 8.554 98.008 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.633 1.761 1.845 1.780 1.699 When n₂ < n₂₀, n_(2m) = 1.511 1.579 1.638 1.585 1.620 When k₂ ≧ k₂₀, k_(2m) = 0.430 0.380 0.344 0.283 0.175 When k₂ < k₂₀, k_(2m) = 0.344 0.246 0.196 0.150 0.131 When d₂ ≧ d₂₀, ∞ ∞ ∞ ∞ 278.211 d_(2m) (nm) = When d₂ < d₂₀, 91.266 127.980 136.666 158.294 243.285 d_(2m) (nm) = 1.2 < NA ≦ 1.3 65 < T ≦ 75 Case 7-06 7-07 7-08 n₁₀ 1.693 1.695 1.695 k₁₀ 0.070 0.061 0.055 d₁₀ (nm) 221.230 218.569 215.552 n₂₀ 1.668 1.689 1.692 k₂₀ 0.236 0.193 0.164 d₂₀ (nm) 151.884 208.598 267.637 When n₁ ≧ n₁₀, n_(1m) = 1.724 1.724 1.741 When n₁ < n₁₀, n_(1m) = 1.686 1.666 1.661 When k₁ ≧ k₁₀, k_(1m) = 0.105 0.101 0.097 When k₁ < k₁₀, k_(1m) = 0.064 0.031 0.021 When d₁ ≧ d₁₀, d_(1m) (nm) = 247.645 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 218.101 197.493 171.385 When n₂ ≧ n₂₀, n_(2m) = 1.689 1.934 1.918 When n₂ < n₂₀, n_(2m) = 1.586 1.609 1.542 When k₂ ≧ k₂₀, k_(2m) = 0.286 0.296 0.281 When k₂ < k₂₀, k_(2m) = 0.205 0.130 0.101 When d₂ ≧ d₂₀, d_(2m) (nm) = 159.193 ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 130.698 183.027 188.504

1.2 < NA ≦ 1.3 75 < T ≦ 85 9/21 Case 8-01 8-02 8-03 8-04 8-05 n₁₀ 1.880 1.901 1.874 1.716 1.692 k₁₀ 0.126 0.074 0.095 0.068 0.072 d₁₀ (nm) 16.279 14.624 12.218 99.848 220.366 n₂₀ 1.709 1.778 1.694 1.687 1.668 k₂₀ 0.340 0.284 0.225 0.173 0.244 d₂₀ (nm) 151.148 201.087 271.916 259.863 143.647 When n₁ ≧ n₁₀, n_(1m) = 1.951 1.984 1.974 1.746 1.725 When n₁ < n₁₀, n_(1m) = 1.842 1.857 1.818 1.712 1.688 When k₁ ≧ k₁₀, k_(1m) = 0.181 0.134 0.175 0.079 0.106 When k₁ < k₁₀, k_(1m) = 0.048 0.000 0.000 0.042 0.068 When d₁ ≧ d₁₀, 21.358 20.311 18.650 135.917 245.491 d_(1m) (nm) = When d₁ < d₁₀, 13.627 11.922 8.869 98.660 218.637 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.774 1.856 1.776 1.696 1.688 When n₂ < n₂₀, n_(2m) = 1.592 1.651 1.582 1.624 1.581 When k₂ ≧ k₂₀, k_(2m) = 0.403 0.360 0.289 0.178 0.280 When k₂ < k₂₀, k_(2m) = 0.263 0.208 0.157 0.137 0.214 When d₂ ≧ d₂₀, ∞ ∞ ∞ 265.927 149.336 d_(2m) (nm) = When d₂ < d₂₀, 123.537 130.884 183.486 237.438 121.404 d_(2m) (nm) = 1.2 < NA ≦ 1.3 75 < T ≦ 85 Case 8-06 8-07 n₁₀ 1.695 1.695 k₁₀ 0.062 0.056 d₁₀ (nm) 218.447 215.754 n₂₀ 1.688 1.691 k₂₀ 0.198 0.167 d₂₀ (nm) 200.044 258.621 When n₁ ≧ n₁₀, n_(1m) = 1.724 1.740 When n₁ < n₁₀, n_(1m) = 1.667 1.661 When k₁ ≧ k₁₀, k_(1m) = 0.102 0.097 When k₁ < k₁₀, k_(1m) = 0.033 0.022 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 198.178 171.868 When n₂ ≧ n₂₀, n_(2m) = 1.931 1.916 When n₂ < n₂₀, n_(2m) = 1.605 1.542 When k₂ ≧ k₂₀, k_(2m) = 0.296 0.282 When k₂ < k₂₀, k_(2m) = 0.132 0.105 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 172.147 178.623

1.2 < NA ≦ 1.3 85 < T ≦ 95 10/21 Case 9-01 9-02 9-03 9-04 9-05 n₁₀ 1.888 1.903 1.880 1.693 1.695 k₁₀ 0.130 0.081 0.095 0.063 0.064 d₁₀ (nm) 16.763 14.911 12.432 156.037 218.418 n₂₀ 1.718 1.775 1.700 1.696 1.685 k₂₀ 0.366 0.299 0.236 0.165 0.207 d₂₀ (nm) 141.793 193.492 262.434 252.531 192.031 When n₁ ≧ n₁₀, n_(1m) = 1.955 1.983 1.976 1.693 1.725 When n₁ < n₁₀, n_(1m) = 1.853 1.862 1.827 1.659 1.667 When k₁ ≧ k₁₀, k_(1m) = 0.178 0.137 0.171 0.071 0.102 When k₁ < k₁₀, k_(1m) = 0.053 0.000 0.000 0.062 0.036 When d₁ ≧ d₁₀, 21.482 20.338 18.582 156.116 252.664 d_(1m) (nm) = When d₁ < d₁₀, 14.427 12.369 9.315 108.678 198.579 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.777 1.851 1.779 1.766 1.934 When n₂ < n₂₀, n_(2m) = 1.605 1.653 1.583 1.688 1.600 When k₂ ≧ k₂₀, k_(2m) = 0.429 0.373 0.299 0.166 0.298 When k₂ < k₂₀, k_(2m) = 0.289 0.223 0.167 0.129 0.138 When d₂ ≧ d₂₀, ∞ ∞ ∞ 252.906 ∞ d_(2m) (nm) = When d₂ < d₂₀, 118.585 127.262 178.673 249.872 164.058 d_(2m) (nm) = 1.2 < NA ≦ 1.3 85 < T ≦ 95 Case 9-06 9-07 n₁₀ 1.695 1.704 k₁₀ 0.057 0.051 d₁₀ (nm) 216.093 278.289 n₂₀ 1.691 1.691 k₂₀ 0.173 0.173 d₂₀ (nm) 249.945 246.105 When n₁ ≧ n₁₀, n_(1m) = 1.738 1.752 When n₁ < n₁₀, n_(1m) = 1.662 1.653 When k₁ ≧ k₁₀, k_(1m) = 0.098 0.092 When k₁ < k₁₀, k_(1m) = 0.022 0.016 When d₁ ≧ d₁₀, ∞ ∞ d_(1m) (nm) = When d₁ < d₁₀, 175.267 172.533 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.919 1.830 When n₂ < n₂₀, n_(2m) = 1.543 1.507 When k₂ ≧ k₂₀, k_(2m) = 0.284 0.291 When k₂ < k₂₀, k_(2m) = 0.111 0.108 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 173.633 172.262

1.2 < NA ≦ 1.3 95 < T ≦ 105 11/21 Case 10-01 10-02 10-03 10-04 10-05 10-06 n₁₀ 1.902 1.906 1.888 1.694 1.695 1.704 k₁₀ 0.140 0.093 0.096 0.066 0.059 0.052 d₁₀ (nm) 16.621 14.821 12.503 218.392 216.276 278.098 n₂₀ 1.717 1.761 1.706 1.682 1.691 1.689 k₂₀ 0.393 0.312 0.247 0.217 0.180 0.180 d₂₀ (nm) 134.110 187.587 253.021 183.765 241.184 237.690 When n₁ ≧ n₁₀, n_(1m) = 1.964 1.983 1.982 1.725 1.737 1.752 When n₁ < n₁₀, n_(1m) = 1.874 1.867 1.838 1.666 1.663 1.658 When k₁ ≧ k₁₀, k_(1m) = 0.179 0.146 0.168 0.103 0.098 0.091 When k₁ < k₁₀, k_(1m) = 0.062 0.004 0.000 0.041 0.024 0.019 When d₁ ≧ d₁₀, d_(1m) (nm) = 20.729 19.885 18.297 250.100 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 14.862 12.520 9.652 198.830 185.832 180.136 When n₂ ≧ n₂₀, n_(2m) = 1.767 1.831 1.783 1.944 1.927 1.847 When n₂ < n₂₀, n_(2m) = 1.609 1.641 1.584 1.598 1.559 1.512 When k₂ ≧ k₂₀, k_(2m) = 0.449 0.380 0.309 0.303 0.288 0.296 When k₂ < k₂₀, k_(2m) = 0.320 0.238 0.178 0.149 0.117 0.113 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 113.506 124.690 172.558 157.077 167.184 165.978

1.2 < NA ≦ 1.3 105 < T ≦ 115 12/21 Case 11-01 11-02 11-03 11-04 11-05 n₁₀ 1.915 1.908 1.895 1.692 1.694 k₁₀ 0.153 0.105 0.097 0.060 0.068 d₁₀ (nm) 15.972 14.452 12.386 153.833 218.491 n₂₀ 1.700 1.741 1.708 1.696 1.679 k₂₀ 0.410 0.319 0.254 0.152 0.227 d₂₀ (nm) 128.035 181.864 244.026 294.292 174.638 When n₁ ≧ n₁₀, n_(1m) = 1.973 1.983 1.987 1.719 1.723 When n₁ < n₁₀, n_(1m) = 1.893 1.872 1.847 1.655 1.669 When k₁ ≧ k₁₀, k_(1m) = 0.185 0.156 0.167 0.093 0.104 When k₁ < k₁₀, k_(1m) = 0.078 0.017 0.000 0.039 0.045 When d₁ ≧ d₁₀, 19.455 19.144 17.845 ∞ 247.764 d_(1m) (nm) = When d₁ < d₁₀, 14.744 12.421 9.756 107.765 205.861 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.741 1.806 1.782 1.782 1.753 When n₂ < n₂₀, n_(2m) = 1.596 1.623 1.583 1.640 1.603 When k₂ ≧ k₂₀, k_(2m) = 0.453 0.379 0.315 0.185 0.311 When k₂ < k₂₀, k_(2m) = 0.345 0.249 0.187 0.106 0.163 When d₂ ≧ d₂₀, ∞ ∞ ∞ ∞ ∞ d_(2m) (nm) = When d₂ < d₂₀, 107.965 122.284 164.682 240.729 150.727 d_(2m) (nm) = 1.2 < NA ≦ 1.3 105 < T ≦ 115 Case 11-06 11-07 n₁₀ 1.695 1.705 k₁₀ 0.060 0.054 d₁₀ (nm) 216.291 277.828 n₂₀ 1.691 1.688 k₂₀ 0.187 0.185 d₂₀ (nm) 231.949 228.622 When n₁ ≧ n₁₀, n_(1m) = 1.736 1.751 When n₁ < n₁₀, n_(1m) = 1.664 1.660 When k₁ ≧ k₁₀, k_(1m) = 0.099 0.091 When k₁ < k₁₀, k_(1m) = 0.026 0.021 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 188.964 182.620 When n₂ ≧ n₂₀, n_(2m) = 1.938 1.860 When n₂ < n₂₀, n_(2m) = 1.577 1.505 When k₂ ≧ k₂₀, k_(2m) = 0.293 0.298 When k₂ < k₂₀, k_(2m) = 0.122 0.117 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 190.206 157.223

1.2 < NA ≦ 1.3 115 < T ≦ 125 13/21 Case 12-01 12-02 12-03 12-04 12-05 n₁₀ 1.919 1.909 1.897 1.692 1.694 k₁₀ 0.168 0.114 0.102 0.061 0.069 d₁₀ (nm) 15.470 14.219 12.252 153.490 218.807 n₂₀ 1.675 1.728 1.703 1.695 1.679 k₂₀ 0.416 0.323 0.257 0.154 0.236 d₂₀ (nm) 121.998 174.431 235.332 285.775 164.294 When n₁ ≧ n₁₀, n_(1m) = 1.974 1.983 1.989 1.719 1.720 When n₁ < n₁₀, n_(1m) = 1.903 1.876 1.851 1.657 1.674 When k₁ ≧ k₁₀, k_(1m) = 0.194 0.163 0.171 0.093 0.104 When k₁ < k₁₀, k_(1m) = 0.095 0.028 0.000 0.043 0.048 When d₁ ≧ d₁₀, 18.537 18.641 17.506 176.125 245.819 d_(1m) (nm) = When d₁ < d₁₀, 14.577 12.379 9.747 108.056 210.037 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.708 1.790 1.776 1.773 1.745 When n₂ < n₂₀, n_(2m) = 1.572 1.608 1.579 1.640 1.616 When k₂ ≧ k₂₀, k_(2m) = 0.448 0.378 0.316 0.184 0.323 When k₂ < k₂₀, k_(2m) = 0.357 0.255 0.190 0.115 0.176 When d₂ ≧ d₂₀, ∞ ∞ ∞ ∞ ∞ d_(2m) (nm) = When d₂ < d₂₀, 99.374 118.240 154.295 239.447 146.164 d_(2m) (nm) = 1.2 < NA ≦ 1.3 115 < T ≦ 125 Case 12-06 12-07 12-08 n₁₀ 1.695 1.696 1.706 k₁₀ 0.061 0.056 0.051 d₁₀ (nm) 216.166 214.076 276.333 n₂₀ 1.690 1.694 1.706 k₂₀ 0.192 0.163 0.162 d₂₀ (nm) 222.296 280.805 273.925 When n₁ ≧ n₁₀, n_(1m) = 1.728 1.750 1.770 When n₁ < n₁₀, n_(1m) = 1.664 1.664 1.647 When k₁ ≧ k₁₀, k_(1m) = 0.099 0.099 0.090 When k₁ < k₁₀, k_(1m) = 0.029 0.023 0.020 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 190.492 185.642 181.694 When n₂ ≧ n₂₀, n_(2m) = 1.826 1.931 1.851 When n₂ < n₂₀, n_(2m) = 1.594 1.560 1.519 When k₂ ≧ k₂₀, k_(2m) = 0.297 0.283 0.279 When k₂ < k₂₀, k_(2m) = 0.128 0.103 0.095 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 188.671 203.385 188.718

1.2 < NA ≦ 1.3 125 < T ≦ 135 14/21 Case 13-01 13-02 13-03 13-04 13-05 n₁₀ 1.909 1.895 1.879 1.694 1.695 k₁₀ 0.116 0.106 0.083 0.071 0.063 d₁₀ (nm) 14.671 12.483 11.828 219.020 215.746 n₂₀ 1.733 1.700 1.710 1.682 1.690 k₂₀ 0.334 0.261 0.220 0.245 0.197 d₂₀ (nm) 163.102 225.249 280.433 153.670 212.983 When n₁ ≧ n₁₀, n_(1m) = 1.981 1.985 1.982 1.717 1.723 When n₁ < n₁₀, n_(1m) = 1.878 1.850 1.819 1.677 1.665 When k₁ ≧ k₁₀, k_(1m) = 0.162 0.173 0.169 0.103 0.099 When k₁ < k₁₀, k_(1m) = 0.035 0.004 0.000 0.051 0.034 When d₁ ≧ d₁₀, 19.040 17.738 18.242 233.783 ∞ d_(1m) (nm) = When d₁ < d₁₀, 12.910 9.987 8.329 211.731 191.269 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.795 1.771 1.785 1.724 1.797 When n₂ < n₂₀, n_(2m) = 1.610 1.575 1.592 1.634 1.609 When k₂ ≧ k₂₀, k_(2m) = 0.389 0.319 0.285 0.337 0.302 When k₂ < k₂₀, k_(2m) = 0.261 0.192 0.153 0.187 0.133 When d₂ ≧ d₂₀, ∞ ∞ ∞ ∞ ∞ d_(2m) (nm) = When d₂ < d₂₀, 109.327 144.773 164.318 140.585 192.523 d_(2m) (nm) = 1.2 < NA ≦ 1.3 125 < T ≦ 135 Case 13-06 13-07 n₁₀ 1.696 1.706 k₁₀ 0.057 0.052 d₁₀ (nm) 213.723 276.363 n₂₀ 1.693 1.706 k₂₀ 0.165 0.164 d₂₀ (nm) 271.596 264.087 When n₁ ≧ n₁₀, n_(1m) = 1.749 1.772 When n₁ < n₁₀, n_(1m) = 1.664 1.645 When k₁ ≧ k₁₀, k_(1m) = 0.099 0.090 When k₁ < k₁₀, k_(1m) = 0.026 0.022 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 186.782 182.830 When n₂ ≧ n₂₀, n_(2m) = 1.934 1.851 When n₂ < n₂₀, n_(2m) = 1.561 1.521 When k₂ ≧ k₂₀, k_(2m) = 0.285 0.282 When k₂ < k₂₀, k_(2m) = 0.104 0.097 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 198.444 183.298

1.2 < NA ≦ 1.3 135 < T ≦ 145 15/21 Case 14-01 14-02 14-03 14-04 14-05 n₁₀ 1.910 1.892 1.879 1.694 1.694 k₁₀ 0.115 0.109 0.084 0.072 0.064 d₁₀ (nm) 15.725 12.960 12.187 218.706 215.091 n₂₀ 1.755 1.698 1.712 1.684 1.689 k₂₀ 0.355 0.268 0.226 0.254 0.201 d₂₀ (nm) 150.207 215.505 270.397 144.577 204.614 When n₁ ≧ n₁₀, n_(1m) = 1.980 1.980 1.979 1.708 1.720 When n₁ < n₁₀, n_(1m) = 1.881 1.848 1.820 1.676 1.666 When k₁ ≧ k₁₀, k_(1m) = 0.157 0.174 0.167 0.100 0.099 When k₁ < k₁₀, k_(1m) = 0.036 0.011 0.000 0.054 0.038 When d₁ ≧ d₁₀, 20.158 18.254 18.627 231.071 ∞ d_(1m) (nm) = When d₁ < d₁₀, 14.003 10.450 8.694 211.497 191.698 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.818 1.767 1.787 1.721 1.802 When n₂ < n₂₀, n_(2m) = 1.632 1.571 1.592 1.649 1.619 When k₂ ≧ k₂₀, k_(2m) = 0.415 0.327 0.291 0.345 0.308 When k₂ < k₂₀, k_(2m) = 0.275 0.197 0.157 0.200 0.145 When d₂ ≧ d₂₀, ∞ ∞ ∞ 160.527 ∞ d_(2m) (nm) = When d₂ < d₂₀, 119.641 139.482 181.534 134.106 186.758 d_(2m) (nm) = 1.2 < NA ≦ 1.3 135 < T ≦ 145 Case 14-06 14-07 n₁₀ 1.696 1.706 k₁₀ 0.058 0.052 d₁₀ (nm) 213.482 276.472 n₂₀ 1.692 1.707 k₂₀ 0.169 0.168 d₂₀ (nm) 262.678 254.823 When n₁ ≧ n₁₀, n_(1m) = 1.748 1.771 When n₁ < n₁₀, n_(1m) = 1.665 1.644 When k₁ ≧ k₁₀, k_(1m) = 0.100 0.090 When k₁ < k₁₀, k_(1m) = 0.028 0.024 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 188.144 184.314 When n₂ ≧ n₂₀, n_(2m) = 1.933 1.854 When n₂ < n₂₀, n_(2m) = 1.561 1.522 When k₂ ≧ k₂₀, k_(2m) = 0.288 0.286 When k₂ < k₂₀, k_(2m) = 0.109 0.100 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 191.540 174.816

1.2 < NA ≦ 1.3 145 < T ≦ 155 16/21 Case 15-01 15-02 15-03 15-04 15-05 n₁₀ 1.919 1.893 1.882 1.694 1.694 k₁₀ 0.115 0.113 0.085 0.074 0.065 d₁₀ (nm) 16.638 13.413 12.438 217.741 214.737 n₂₀ 1.785 1.697 1.715 1.683 1.687 k₂₀ 0.385 0.281 0.235 0.264 0.207 d₂₀ (nm) 138.580 206.656 261.237 137.032 196.488 When n₁ ≧ n₁₀, n_(1m) = 1.986 1.976 1.980 1.705 1.718 When n₁ < n₁₀, n_(1m) = 1.892 1.851 1.826 1.676 1.666 When k₁ ≧ k₁₀, k_(1m) = 0.151 0.174 0.165 0.099 0.100 When k₁ < k₁₀, k_(1m) = 0.037 0.018 0.000 0.060 0.040 When d₁ ≧ d₁₀, 20.946 18.588 18.692 227.547 ∞ d_(1m) (nm) = When d₁ < d₁₀, 15.073 10.996 9.087 210.480 192.120 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.846 1.763 1.789 1.722 1.834 When n₂ < n₂₀, n_(2m) = 1.665 1.571 1.591 1.652 1.629 When k₂ ≧ k₂₀, k_(2m) = 0.451 0.339 0.301 0.337 0.312 When k₂ < k₂₀, k_(2m) = 0.301 0.209 0.166 0.217 0.151 When d₂ ≧ d₂₀, ∞ ∞ ∞ 149.574 ∞ d_(2m) (nm) = When d₂ < d₂₀, 113.921 135.398 177.745 128.876 178.069 d_(2m) (nm) = 1.2 < NA ≦ 1.3 145 < T ≦ 155 Case 15-06 15-07 n₁₀ 1.695 1.707 k₁₀ 0.059 0.053 d₁₀ (nm) 213.710 276.548 n₂₀ 1.692 1.707 k₂₀ 0.173 0.174 d₂₀ (nm) 253.675 246.168 When n₁ ≧ n₁₀, n_(1m) = 1.747 1.770 When n₁ < n₁₀, n_(1m) = 1.665 1.645 When k₁ ≧ k₁₀, k_(1m) = 0.100 0.089 When k₁ < k₁₀, k_(1m) = 0.029 0.025 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 189.864 185.926 When n₂ ≧ n₂₀, n_(2m) = 1.910 1.858 When n₂ < n₂₀, n_(2m) = 1.562 1.520 When k₂ ≧ k₂₀, k_(2m) = 0.289 0.291 When k₂ < k₂₀, k_(2m) = 0.109 0.103 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 189.584 169.414

1.2 < NA ≦ 1.3 155 < T ≦ 165 17/21 Case 16-01 16-02 16-03 16-04 16-05 n₁₀ 1.937 1.898 1.890 1.694 1.694 k₁₀ 0.118 0.119 0.087 0.077 0.067 d₁₀ (nm) 16.771 13.576 12.460 216.630 214.866 n₂₀ 1.806 1.695 1.718 1.679 1.684 k₂₀ 0.418 0.295 0.246 0.277 0.215 d₂₀ (nm) 129.251 198.434 252.589 129.875 188.027 When n₁ ≧ n₁₀, n_(1m) = 2.001 1.978 1.985 1.707 1.716 When n₁ < n₁₀, n_(1m) = 1.914 1.859 1.836 1.685 1.666 When k₁ ≧ k₁₀, k_(1m) = 0.148 0.176 0.164 0.101 0.100 When k₁ < k₁₀, k_(1m) = 0.045 0.025 0.000 0.067 0.040 When d₁ ≧ d₁₀, 20.691 18.424 18.356 225.238 231.093 d_(1m) (nm) = When d₁ < d₁₀, 15.556 11.376 9.363 212.673 192.697 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.861 1.756 1.791 1.715 1.840 When n₂ < n₂₀, n_(2m) = 1.690 1.574 1.591 1.643 1.628 When k₂ ≧ k₂₀, k_(2m) = 0.481 0.351 0.310 0.328 0.314 When k₂ < k₂₀, k_(2m) = 0.336 0.225 0.176 0.223 0.151 When d₂ ≧ d₂₀, ∞ ∞ ∞ 139.199 ∞ d_(2m) (nm) = When d₂ < d₂₀, 109.768 131.712 172.718 120.241 167.595 d_(2m) (nm) = 1.2 < NA ≦ 1.3 155 < T ≦ 165 Case 16-06 16-07 n₁₀ 1.695 1.707 k₁₀ 0.060 0.054 d₁₀ (nm) 214.034 276.376 n₂₀ 1.692 1.707 k₂₀ 0.179 0.181 d₂₀ (nm) 244.657 237.806 When n₁ ≧ n₁₀, n_(1m) = 1.745 1.770 When n₁ < n₁₀, n_(1m) = 1.666 1.653 When k₁ ≧ k₁₀, k_(1m) = 0.101 0.089 When k₁ < k₁₀, k_(1m) = 0.030 0.027 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 191.630 187.468 When n₂ ≧ n₂₀, n_(2m) = 1.889 1.864 When n₂ < n₂₀, n_(2m) = 1.562 1.515 When k₂ ≧ k₂₀, k_(2m) = 0.290 0.295 When k₂ < k₂₀, k_(2m) = 0.115 0.110 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 179.119 164.223

1.2 < NA ≦ 1.3 165 < T ≦ 175 18/21 Case 17-01 17-02 17-03 17-04 17-05 n₁₀ 1.958 1.903 1.898 1.694 1.694 k₁₀ 0.128 0.127 0.090 0.080 0.068 d₁₀ (nm) 15.815 13.420 12.296 215.821 215.165 n₂₀ 1.794 1.688 1.719 1.668 1.681 k₂₀ 0.439 0.307 0.254 0.290 0.224 d₂₀ (nm) 123.830 190.984 244.231 122.663 179.093 When n₁ ≧ n₁₀, n_(1m) = 2.020 1.981 1.991 1.707 1.716 When n₁ < n₁₀, n_(1m) = 1.942 1.867 1.846 1.692 1.665 When k₁ ≧ k₁₀, k_(1m) = 0.150 0.182 0.165 0.103 0.101 When k₁ < k₁₀, k_(1m) = 0.058 0.033 0.000 0.077 0.041 When d₁ ≧ d₁₀, 19.257 17.848 17.802 223.701 230.268 d_(1m) (nm) = When d₁ < d₁₀, 15.087 11.461 9.465 215.120 195.890 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.832 1.743 1.790 1.677 1.826 When n₂ < n₂₀, n_(2m) = 1.680 1.570 1.590 1.625 1.625 When k₂ ≧ k₂₀, k_(2m) = 0.483 0.357 0.316 0.321 0.315 When k₂ < k₂₀, k_(2m) = 0.365 0.239 0.186 0.252 0.151 When d₂ ≧ d₂₀, ∞ ∞ ∞ 127.631 ∞ d_(2m) (nm) = When d₂ < d₂₀, 111.992 128.672 166.465 109.461 158.121 d_(2m) (nm) = 1.2 < NA ≦ 1.3 165 < T ≦ 175 Case 17-06 17-07 n₁₀ 1.696 1.707 k₁₀ 0.061 0.056 d₁₀ (nm) 214.210 275.996 n₂₀ 1.692 1.705 k₂₀ 0.185 0.187 d₂₀ (nm) 235.479 229.352 When n₁ ≧ n₁₀, n_(1m) = 1.744 1.770 When n₁ < n₁₀, n_(1m) = 1.667 1.657 When k₁ ≧ k₁₀, k_(1m) = 0.101 0.088 When k₁ < k₁₀, k_(1m) = 0.031 0.030 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 193.216 188.863 When n₂ ≧ n₂₀, n_(2m) = 1.887 1.872 When n₂ < n₂₀, n_(2m) = 1.561 1.509 When k₂ ≧ k₂₀, k_(2m) = 0.292 0.295 When k₂ < k₂₀, k_(2m) = 0.120 0.115 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 161.210 156.975

1.2 < NA ≦ 1.3 175 < T ≦ 185 19/21 Case 18-01 18-02 18-03 18-04 18-05 n₁₀ 1.907 1.904 1.694 1.696 1.704 k₁₀ 0.135 0.092 0.070 0.062 0.051 d₁₀ (nm) 13.188 12.121 215.718 214.371 274.345 n₂₀ 1.679 1.720 1.679 1.692 1.687 k₂₀ 0.313 0.260 0.233 0.190 0.159 d₂₀ (nm) 183.151 235.214 169.072 225.802 280.556 When n₁ ≧ n₁₀, n_(1m) = 1.982 1.997 1.715 1.743 1.760 When n₁ < n₁₀, n_(1m) = 1.873 1.854 1.666 1.668 1.658 When k₁ ≧ k₁₀, k_(1m) = 0.188 0.166 0.102 0.102 0.090 When k₁ < k₁₀, k_(1m) = 0.044 0.000 0.044 0.032 0.018 When d₁ ≧ d₁₀, 17.244 17.308 229.740 ∞ ∞ d_(1m) (nm) = When d₁ < d₁₀, 11.395 9.486 201.461 194.630 174.558 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.730 1.790 1.771 1.836 1.900 When n₂ < n₂₀, n_(2m) = 1.562 1.589 1.630 1.559 1.518 When k₂ ≧ k₂₀, k_(2m) = 0.359 0.319 0.318 0.293 0.259 When k₂ < k₂₀, k_(2m) = 0.249 0.193 0.159 0.124 0.097 When d₂ ≧ d₂₀, ∞ ∞ ∞ ∞ ∞ d_(2m) (nm) = When d₂ < d₂₀, 128.127 156.903 151.088 157.464 192.992 d_(2m) (nm) =

1.2 < NA ≦ 1.3 185 < T ≦ 195 20/21 Case 19-01 19-02 19-03 19-04 19-05 n₁₀ 1.908 1.906 1.889 1.693 1.696 k₁₀ 0.140 0.092 0.087 0.071 0.064 d₁₀ (nm) 13.288 12.370 11.418 216.427 214.510 n₂₀ 1.676 1.726 1.707 1.681 1.692 k₂₀ 0.321 0.266 0.223 0.243 0.195 d₂₀ (nm) 172.696 223.910 283.898 158.126 215.938 When n₁ ≧ n₁₀, n_(1m) = 1.981 1.996 1.994 1.713 1.742 When n₁ < n₁₀, n_(1m) = 1.875 1.857 1.834 1.670 1.669 When k₁ ≧ k₁₀, k_(1m) = 0.190 0.163 0.168 0.103 0.102 When k₁ < k₁₀, k_(1m) = 0.055 0.000 0.000 0.051 0.037 When d₁ ≧ d₁₀, 17.148 17.446 17.407 228.093 ∞ d_(1m) (nm) = When d₁ < d₁₀, 11.532 9.791 8.458 205.012 195.805 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.725 1.797 1.791 1.767 1.825 When n₂ < n₂₀, n_(2m) = 1.558 1.592 1.590 1.647 1.558 When k₂ ≧ k₂₀, k_(2m) = 0.365 0.327 0.286 0.323 0.294 When k₂ < k₂₀, k_(2m) = 0.256 0.198 0.157 0.178 0.130 When d₂ ≧ d₂₀, ∞ ∞ ∞ ∞ ∞ d_(2m) (nm) = When d₂ < d₂₀, 125.060 143.864 171.207 144.997 180.034 d_(2m) (nm) = 1.2 < NA ≦ 1.3 185 < T ≦ 195 Case 19-06 19-07 n₁₀ 1.696 1.704 k₁₀ 0.057 0.052 d₁₀ (nm) 213.492 274.677 n₂₀ 1.691 1.687 k₂₀ 0.166 0.162 d₂₀ (nm) 273.809 270.432 When n₁ ≧ n₁₀, n_(1m) = 1.742 1.760 When n₁ < n₁₀, n_(1m) = 1.666 1.659 When k₁ ≧ k₁₀, k_(1m) = 0.097 0.090 When k₁ < k₁₀, k_(1m) = 0.026 0.022 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 178.602 175.003 When n₂ ≧ n₂₀, n_(2m) = 1.857 1.904 When n₂ < n₂₀, n_(2m) = 1.570 1.518 When k₂ ≧ k₂₀, k_(2m) = 0.281 0.262 When k₂ < k₂₀, k_(2m) = 0.104 0.096 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 199.693 186.949

1.2 < NA ≦ 1.3 195 < T ≦ 205 21/21 Case 20-01 20-02 20-03 20-04 20-05 n₁₀ 1.907 1.904 1.887 1.693 1.696 k₁₀ 0.139 0.091 0.088 0.073 0.065 d₁₀ (nm) 13.915 13.010 11.752 216.656 214.259 n₂₀ 1.684 1.734 1.707 1.683 1.692 k₂₀ 0.334 0.275 0.227 0.253 0.201 d₂₀ (nm) 160.500 212.141 273.737 148.279 206.980 When n₁ ≧ n₁₀, n_(1m) = 1.978 1.992 1.990 1.700 1.743 When n₁ < n₁₀, n_(1m) = 1.874 1.857 1.833 1.671 1.670 When k₁ ≧ k₁₀, k_(1m) = 0.186 0.158 0.167 0.098 0.102 When k₁ < k₁₀, k_(1m) = 0.059 0.000 0.000 0.062 0.044 When d₁ ≧ d₁₀, 17.817 18.151 17.811 226.068 265.367 d_(1m) (nm) = When d₁ < d₁₀, 12.124 10.391 8.783 207.088 196.420 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.731 1.806 1.791 1.746 1.815 When n₂ < n₂₀, n_(2m) = 1.564 1.602 1.588 1.669 1.556 When k₂ ≧ k₂₀, k_(2m) = 0.381 0.338 0.291 0.321 0.294 When k₂ < k₂₀, k_(2m) = 0.265 0.202 0.159 0.212 0.142 When d₂ ≧ d₂₀, ∞ ∞ ∞ ∞ ∞ d_(2m) (nm) = When d₂ < d₂₀, 125.465 136.447 180.411 144.423 187.001 d_(2m) (nm) = 1.2 < NA ≦ 1.3 195 < T ≦ 205 Case 20-06 20-07 n₁₀ 1.696 1.704 k₁₀ 0.058 0.053 d₁₀ (nm) 213.637 275.120 n₂₀ 1.690 1.687 k₂₀ 0.169 0.165 d₂₀ (nm) 264.528 260.887 When n₁ ≧ n₁₀, n_(1m) = 1.742 1.760 When n₁ < n₁₀, n_(1m) = 1.666 1.661 When k₁ ≧ k₁₀, k_(1m) = 0.097 0.090 When k₁ < k₁₀, k_(1m) = 0.030 0.025 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 183.526 175.348 When n₂ ≧ n₂₀, n_(2m) = 1.856 1.912 When n₂ < n₂₀, n_(2m) = 1.571 1.519 When k₂ ≧ k₂₀, k_(2m) = 0.282 0.268 When k₂ < k₂₀, k_(2m) = 0.108 0.102 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 202.896 181.779.


5. An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of: providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below; and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.3<NA≦1.4, the antireflective film including an upper layer having a complex refractive index N₁, and a lower layer having a complex refractive index N₂, the complex refractive indexes N₁ and N₂ being represented by the equations N₁=n₁−k₁i and N₂=n₂−k₂i, respectively; wherein assuming that the thickness of the upper layer is d₁ (unit: nm) and the thickness of the lower layer is d₂ (unit: nm) , when any one of the combinations of values of [n₁₀, k₁₀, d₁₀, n₂₀, k₂₀, d₂₀] described below is selected depending on the thickness T of the silicon oxide film, n₁, k₁, d₁, n₂, k₂, and d₂ satisfy the relational expression {(n ₁ −n ₁₀)/(n _(1m) −n ₁₀)}²+{(k ₁ −k ₁₀)/(k _(1m) −k ₁₀)}²+{(d ₁ −d ₁₀)/(d _(1m) −d ₁₀)}²+{(n ₂ −n ₂₀)/(n _(2m) −n ₂₀)}²+{(k ₂ −k ₂₀)/(k _(2m) −k ₂₀)}²+{(d ₂ −d ₂₀)/(d _(2m) −d ₂₀)}²≦1; a value of n_(1m) in a corresponding case is selected on the basis of a magnitude relation between n₁ and n₁₀; a value of k_(1m) in a corresponding case is selected on the basis of a magnitude relation between k₁ and k₁₀; a value of d_(1m) in a corresponding case is selected on the basis of a magnitude relation between d₁ and d₁₀; a value of n_(2m) in a corresponding case is selected on the basis of a magnitude relation between n₂ and n₂₀; a value of k_(2m) in a corresponding case is selected on the basis of a magnitude relation between k₂ and k₂₀; and a value of d_(2m) in a corresponding case is selected on the basis of a magnitude relation between d₂ and d₂₀; and in the tables below, in the line of “When n₁≧n₁₀, n_(1m)=”, each value in the right columns is “n_(1m)−n₁₀”; in the line of “When n₁<n₁₀, n_(1m)=”, each value in the right columns is “n₁₀−n_(1m)”; in the line of “When k₁≧k₁₀, k_(1m)=”, each value in the right columns is “k_(1m)−k₁₀”; in the line of “When k₁<k₁₀, k_(1m)=” each value in the right columns is “k_(1m)”; in the line of “When d₁≧d₁₀, d_(1m) (nm) =”, each value (unit: nm) in the right columns is “d_(1m)−d₁₀”; in the line of “When d₁<d₁₀, d_(1m) (nm) =”, each value (unit: nm) in the right columns is “d₁₀−d_(1m)”; in the line of “When n₂≧n₂₀, n_(2m)=”, each value in the right columns is “n_(2m)−n₂₀”; in the line of “When n₂<n₂₀, n_(2m)=”, each value in the right columns is “n₂₀−n_(2m)”; in the line of “When k₂≧k₂₀, k_(2m)=”, each value in the right columns is “k_(2m)−k₂₀”; in the line of “When k₂<k₂₀, k_(2m)=”, each value in the right columns is “k₂₀−k_(2m)”; in the line of “When d₂≧d₂₀, d_(2m) (nm) =”, each value (unit: nm) in the right columns is “d_(2m)−d₂₀”; and in the line of “When d₂<d₂₀, d_(2m) (nm) =”, each value (unit: nm) in the right columns is “d₂₀−d_(2m)”. 1.3 < NA ≦ 1.4 2 ≦ T ≦ 15 1/20 Case 1-01 1-02 1-03 1-04 1-05 n₁₀ 2.047 1.887 1.871 1.868 1.862 k₁₀ 0.012 0.120 0.106 0.075 0.065 d₁₀ (nm) 29.751 26.980 17.106 15.339 13.830 n₂₀ 6.274 1.973 1.713 1.738 1.730 k₂₀ 3.305 0.477 0.298 0.245 0.208 d₂₀ (nm) 1.566 76.285 158.161 212.612 271.884 When n₁ ≧ n₁₀, n_(1m) = 2.109 1.929 1.924 1.935 1.940 When n₁ < n₁₀, n_(1m) = 1.990 1.877 1.852 1.835 1.823 When k₁ ≧ k₁₀, k_(1m) = 0.055 0.138 0.136 0.123 0.124 When k₁ < k₁₀, k_(1m) = 0.000 0.089 0.036 0.000 0.000 When d₁ ≧ d₁₀, 32.767 31.708 21.551 20.868 20.183 d_(1m) (nm) = When d₁ < d₁₀, 27.509 26.309 15.640 12.771 10.913 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 6.594 2.028 1.750 1.789 1.793 When n₂ < n₂₀, n_(2m) = 5.978 1.933 1.627 1.639 1.618 When k₂ ≧ k₂₀, k_(2m) = 3.556 0.507 0.335 0.292 0.258 When k₂ < k₂₀, k_(2m) = 3.013 0.403 0.242 0.188 0.152 When d₂ ≧ d₂₀, 1.715 83.056 ∞ ∞ ∞ d_(2m) (nm) = When d₂ < d₂₀, 1.418 75.266 136.202 175.723 191.206 d_(2m) (nm) = 1.3 < NA ≦ 1.4 2 ≦ T ≦ 15 Case 1-06 1-07 1-08 1-09 1-10 n₁₀ 1.691 1.692 1.711 1.704 1.705 k₁₀ 0.062 0.057 0.070 0.057 0.050 d₁₀ (nm) 161.852 157.460 239.891 226.155 221.451 n₂₀ 1.688 1.697 7.420 1.689 1.695 k₂₀ 0.179 0.154 3.291 0.187 0.158 d₂₀ (nm) 207.262 266.043 0.810 202.908 261.182 When n₁ ≧ n₁₀, n_(1m) = 1.703 1.707 1.725 1.738 1.736 When n₁ < n₁₀, n_(1m) = 1.685 1.664 1.704 1.690 1.688 When k₁ ≧ k₁₀, k_(1m) = 0.080 0.084 0.082 0.082 0.079 When k₁ < k₁₀, k_(1m) = 0.051 0.029 0.049 0.029 0.022 When d₁ ≧ d₁₀, 169.125 171.143 250.745 ∞ ∞ d_(1m) (nm) = When d₁ < d₁₀, 157.974 129.944 235.697 215.124 204.319 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.696 1.748 7.849 1.818 1.809 When n₂ < n₂₀, n_(2m) = 1.666 1.665 7.185 1.613 1.611 When k₂ ≧ k₂₀, k_(2m) = 0.202 0.195 3.465 0.264 0.246 When k₂ < k₂₀, k_(2m) = 0.150 0.115 2.625 0.129 0.105 When d₂ ≧ d₂₀, 213.501 ∞ 0.893 ∞ ∞ d_(2m) (nm) = When d₂ < d₂₀, 194.001 249.665 0.721 179.167 225.188 d_(2m) (nm) =

1.3 NA ≦ 1.4 2 ≦ T ≦ 15 2/20 Case 1-11 n₁₀ 1.695 k₁₀ 0.054 d₁₀ (nm) 267.286 n₂₀ 1.705 k₂₀ 0.184 d₂₀ (nm) 212.751 When n₁ ≧ n₁₀, n_(1m) = 1.731 When n₁ < n₁₀, n_(1m) = 1.655 When k₁ ≧ k₁₀, k_(1m) = 0.080 When k₁ < k₁₀, k_(1m) = 0.025 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ When d₁ < d₁₀, d_(1m) (nm) = 220.771 When n₂ ≧ n₂₀, n_(2m) = 1.808 When n₂ < n₂₀, n_(2m) = 1.623 When k₂ ≧ k₂₀, k_(2m) = 0.237 When k₂ < k₂₀, k_(2m) = 0.115 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ When d₂ < d₂₀, d_(2m) (nm) = 175.645

1.3 < NA ≦ 1.4 15 < T ≦ 25 3/20 Case 2-01 2-02 2-03 2-04 2-05 n₁₀ 1.943 1.876 1.873 1.866 1.691 k₁₀ 0.121 0.112 0.080 0.068 0.064 d₁₀ (nm) 34.905 17.699 15.588 14.042 161.844 n₂₀ 6.149 1.719 1.739 1.732 1.687 k₂₀ 4.965 0.321 0.258 0.217 0.188 d₂₀ (nm) 1.046 148.502 203.950 262.757 198.716 When n₁ ≧ n₁₀, n_(1m) = 1.997 1.925 1.936 1.942 1.700 When n₁ < n₁₀, n_(1m) = 1.902 1.861 1.842 1.830 1.690 When k₁ ≧ k₁₀, k_(1m) = 0.155 0.135 0.124 0.122 0.079 When k₁ < k₁₀, k_(1m) = 0.064 0.044 0.004 0.000 0.061 When d₁ ≧ d₁₀, 38.478 21.745 20.735 20.064 166.973 d_(1m) (nm) = When d₁ < d₁₀, 32.365 16.569 13.305 11.354 161.165 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 6.640 1.749 1.787 1.793 1.688 When n₂ < n₂₀, n_(2m) = 5.695 1.636 1.643 1.623 1.668 When k₂ ≧ k₂₀, k_(2m) = 5.267 0.354 0.304 0.266 0.197 When k₂ < k₂₀, k_(2m) = 4.500 0.266 0.202 0.162 0.165 When d₂ ≧ d₂₀, 1.189 ∞ ∞ ∞ 199.493 d_(2m) (nm) = When d₂ < d₂₀, 0.912 129.925 173.046 186.094 188.055 d_(2m) (nm) = 1.3 < NA ≦ 1.4 15 < T ≦ 25 Case 2-06 2-07 2-08 2-09 2-10 n₁₀ 1.692 1.706 1.711 1.704 1.695 k₁₀ 0.059 0.052 0.075 0.059 0.056 d₁₀ (nm) 157.652 221.303 235.815 225.762 267.452 n₂₀ 1.696 1.695 6.235 1.687 1.705 k₂₀ 0.161 0.165 4.691 0.197 0.194 d₂₀ (nm) 257.279 252.591 0.724 194.502 204.028 When n₁ ≧ n₁₀, n_(1m) = 1.703 1.736 1.711 1.737 1.730 When n₁ < n₁₀, n_(1m) = 1.667 1.690 1.709 1.692 1.658 When k₁ ≧ k₁₀, k_(1m) = 0.082 0.079 0.079 0.082 0.080 When k₁ < k₁₀, k_(1m) = 0.033 0.024 0.074 0.033 0.029 When d₁ ≧ d₁₀, 165.499 ∞ 235.852 ∞ ∞ d_(1m) (nm) = When d₁ < d₁₀, 138.474 207.206 234.721 216.211 222.458 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.740 1.797 6.407 1.814 1.798 When n₂ < n₂₀, n_(2m) = 1.670 1.616 6.233 1.613 1.629 When k₂ ≧ k₂₀, k_(2m) = 0.196 0.249 4.693 0.270 0.240 When k₂ < k₂₀, k_(2m) = 0.121 0.111 3.940 0.138 0.122 When d₂ ≧ d₂₀, ∞ ∞ 0.732 ∞ ∞ d_(2m) (nm) = When d₂ < d₂₀, 244.077 220.690 0.720 173.495 171.776 d_(2m) (nm) =

1.3 < NA ≦ 1.4 25 < T ≦ 35 4/20 Case 3-01 3-02 3-03 3-04 3-05 3-06 n₁₀ 1.883 1.879 1.872 1.692 1.705 1.706 k₁₀ 0.119 0.084 0.069 0.061 0.061 0.054 d₁₀ (nm) 18.157 15.746 14.214 157.790 225.478 221.123 n₂₀ 1.723 1.741 1.737 1.697 1.687 1.695 k₂₀ 0.349 0.274 0.228 0.168 0.209 0.173 d₂₀ (nm) 139.788 195.542 253.893 248.784 186.105 244.149 When n₁ ≧ n₁₀, n_(1m) = 1.927 1.939 1.945 1.699 1.735 1.735 When n₁ < n₁₀, n_(1m) = 1.873 1.852 1.839 1.671 1.694 1.692 When k₁ ≧ k₁₀, k_(1m) = 0.135 0.123 0.119 0.079 0.082 0.078 When k₁ < k₁₀, k_(1m) = 0.055 0.011 0.000 0.039 0.038 0.026 When d₁ ≧ d₁₀, d_(1m) (nm) = 21.683 20.446 19.836 161.921 270.295 ∞ When d₁ < d₁₀, d_(1m) (nm) = 17.423 13.775 11.786 145.560 217.505 209.346 When n₂ ≧ n₂₀, n_(2m) = 1.744 1.786 1.794 1.735 1.754 1.781 When n₂ < n₂₀, n_(2m) = 1.647 1.650 1.632 1.679 1.615 1.622 When k₂ ≧ k₂₀, k_(2m) = 0.374 0.316 0.276 0.196 0.276 0.252 When k₂ < k₂₀, k_(2m) = 0.295 0.218 0.173 0.130 0.149 0.118 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 124.317 167.810 181.193 239.270 167.329 214.946

1.3 < NA ≦ 1.4 35 < T ≦ 45 5/20 Case 4-01 4-02 4-03 4-04 4-05 n₁₀ 1.890 1.886 1.877 1.692 1.705 k₁₀ 0.130 0.088 0.073 0.062 0.063 d₁₀ (nm) 18.083 15.723 14.196 157.690 225.284 n₂₀ 1.714 1.743 1.736 1.697 1.687 k₂₀ 0.371 0.287 0.236 0.175 0.220 d₂₀ (nm) 132.495 187.112 245.779 240.328 177.345 When n₁ ≧ n₁₀, n_(1m) = 1.928 1.943 1.947 1.695 1.732 When n₁ < n₁₀, n_(1m) = 1.886 1.862 1.846 1.674 1.696 When k₁ ≧ k₁₀, k_(1m) = 0.137 0.123 0.120 0.075 0.081 When k₁ < k₁₀, k_(1m) = 0.069 0.018 0.000 0.046 0.042 When d₁ ≧ d₁₀, 21.026 19.960 19.411 159.493 266.580 d_(1m) (nm) = When d₁ < d₁₀, 17.768 14.046 12.019 148.447 218.746 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.723 1.784 1.789 1.731 1.745 When n₂ < n₂₀, n_(2m) = 1.643 1.655 1.634 1.687 1.620 When k₂ ≧ k₂₀, k_(2m) = 0.382 0.326 0.281 0.195 0.283 When k₂ < k₂₀, k_(2m) = 0.323 0.234 0.182 0.141 0.159 When d₂ ≧ d₂₀, ∞ ∞ ∞ 273.632 ∞ d_(2m) (nm) = When d₂ < d₂₀, 119.322 160.895 176.028 234.699 160.070 d_(2m) (nm) = 1.3 < NA ≦ 1.4 35 < T ≦ 45 Case 4-06 4-07 n₁₀ 1.706 1.695 k₁₀ 0.055 0.055 d₁₀ (nm) 220.863 262.917 n₂₀ 1.695 1.705 k₂₀ 0.180 0.178 d₂₀ (nm) 235.453 255.408 When n₁ ≧ n₁₀, n_(1m) = 1.734 1.723 When n₁ < n₁₀, n_(1m) = 1.693 1.660 When k₁ ≧ k₁₀, k_(1m) = 0.078 0.082 When k₁ < k₁₀, k_(1m) = 0.027 0.031 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 210.617 221.552 When n₂ ≧ n₂₀, n_(2m) = 1.767 1.832 When n₂ < n₂₀, n_(2m) = 1.630 1.613 When k₂ ≧ k₂₀, k_(2m) = 0.252 0.241 When k₂ < k₂₀, k_(2m) = 0.123 0.108 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 206.982 177.439

1.3 < NA ≦ 1.4 45 < T ≦ 55 6/20 Case 5-01 5-02 5-03 5-04 5-05 n₁₀ 1.891 1.892 1.878 1.691 1.705 k₁₀ 0.144 0.091 0.079 0.064 0.064 d₁₀ (nm) 17.530 15.545 14.050 157.168 225.395 n₂₀ 1.686 1.744 1.728 1.696 1.686 k₂₀ 0.376 0.296 0.240 0.179 0.227 d₂₀ (nm) 126.586 178.253 238.151 231.953 167.881 When n₁ ≧ n₁₀, n_(1m) = 1.925 1.947 1.947 1.692 1.729 When n₁ < n₁₀, n_(1m) = 1.891 1.870 1.849 1.677 1.698 When k₁ ≧ k₁₀, k_(1m) = 0.144 0.124 0.124 0.069 0.080 When k₁ < k₁₀, k_(1m) = 0.087 0.024 0.000 0.054 0.044 When d₁ ≧ d₁₀, 19.955 19.462 18.998 157.553 251.532 d_(1m) (nm) = When d₁ < d₁₀, 17.523 14.081 12.045 150.032 219.912 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.686 1.783 1.778 1.727 1.728 When n₂ < n₂₀, n_(2m) = 1.619 1.656 1.625 1.693 1.628 When k₂ ≧ k₂₀, k_(2m) = 0.377 0.330 0.281 0.190 0.292 When k₂ < k₂₀, k_(2m) = 0.336 0.244 0.186 0.164 0.167 When d₂ ≧ d₂₀, 127.104 ∞ ∞ 253.769 ∞ d_(2m) (nm) = When d₂ < d₂₀, 114.397 150.903 169.614 229.862 150.571 d_(2m) (nm) = 1.3 < NA ≦ 1.4 45 < T ≦ 55 Case 5-06 5-07 n₁₀ 1.706 1.697 k₁₀ 0.056 0.047 d₁₀ (nm) 220.607 278.691 n₂₀ 1.694 1.700 k₂₀ 0.184 0.152 d₂₀ (nm) 226.210 281.986 When n₁ ≧ n₁₀, n_(1m) = 1.728 1.753 When n₁ < n₁₀, n_(1m) = 1.694 1.654 When k₁ ≧ k₁₀, k_(1m) = 0.077 0.078 When k₁ < k₁₀, k_(1m) = 0.029 0.021 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 210.961 211.857 When n₂ ≧ n₂₀, n_(2m) = 1.757 1.912 When n₂ < n₂₀, n_(2m) = 1.639 1.611 When k₂ ≧ k₂₀, k_(2m) = 0.250 0.220 When k₂ < k₂₀, k_(2m) = 0.125 0.096 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 199.775 202.106

1.3 < NA ≦ 1.4 55 < T ≦ 65 7/20 Case 6-01 6-02 6-03 6-04 6-05 6-06 n₁₀ 1.896 1.875 1.705 1.705 1.708 1.697 k₁₀ 0.091 0.087 0.064 0.057 0.053 0.047 d₁₀ (nm) 15.652 14.019 225.606 220.354 218.289 278.413 n₂₀ 1.752 1.715 1.687 1.694 1.707 1.701 k₂₀ 0.303 0.239 0.232 0.186 0.158 0.154 d₂₀ (nm) 167.408 230.256 157.678 216.433 272.538 271.867 When n₁ ≧ n₁₀, n_(1m) = 1.950 1.943 1.724 1.723 1.740 1.750 When n₁ < n₁₀, n_(1m) = 1.875 1.846 1.699 1.693 1.693 1.656 When k₁ ≧ k₁₀, k_(1m) = 0.122 0.132 0.079 0.077 0.077 0.078 When k₁ < k₁₀, k_(1m) = 0.025 0.004 0.045 0.033 0.030 0.022 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.494 18.898 247.964 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 14.295 12.042 221.101 210.599 206.669 213.947 When n₂ ≧ n₂₀, n_(2m) = 1.792 1.763 1.721 1.752 1.799 1.923 When n₂ < n₂₀, n_(2m) = 1.662 1.612 1.638 1.648 1.579 1.614 When k₂ ≧ k₂₀, k_(2m) = 0.337 0.279 0.301 0.247 0.230 0.223 When k₂ < k₂₀, k_(2m) = 0.249 0.186 0.176 0.128 0.106 0.097 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ 172.085 ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 138.575 161.008 143.974 199.200 203.487 191.019

1.3 < NA ≦ 1.4 65 < T ≦ 75 8/20 Case 7-01 7-02 7-03 7-04 7-05 n₁₀ 1.901 1.871 1.866 1.706 1.705 k₁₀ 0.088 0.093 0.067 0.065 0.057 d₁₀ (nm) 16.388 14.267 13.172 225.317 220.112 n₂₀ 1.774 1.706 1.724 1.687 1.694 k₂₀ 0.318 0.241 0.206 0.238 0.188 d₂₀ (nm) 154.194 221.319 275.098 147.740 206.685 When n₁ ≧ n₁₀, n_(1m) = 1.955 1.937 1.947 1.721 1.721 When n₁ < n₁₀, n_(1m) = 1.881 1.842 1.823 1.701 1.693 When k₁ ≧ k₁₀, k_(1m) = 0.116 0.138 0.131 0.077 0.077 When k₁ < k₁₀, k_(1m) = 0.024 0.011 0.000 0.045 0.035 When d₁ ≧ d₁₀, 20.279 19.161 19.228 239.263 245.793 d_(1m) (nm) = When d₁ < d₁₀, 15.118 12.240 10.142 222.197 210.312 d_(1m) (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.816 1.751 1.783 1.720 1.752 When n₂ < n₂₀, n_(2m) = 1.683 1.603 1.616 1.644 1.651 When k₂ ≧ k₂₀, k_(2m) = 0.355 0.280 0.254 0.305 0.246 When k₂ < k₂₀, k_(2m) = 0.259 0.188 0.151 0.177 0.133 When d₂ ≧ d₂₀, ∞ ∞ ∞ 161.062 ∞ d_(2m) (nm) = When d₂ < d₂₀, 132.898 152.054 192.936 136.808 191.952 d_(2m) (nm) = 1.3 < NA ≦ 1.4 65 < T ≦ 75 Case 7-06 7-07 n₁₀ 1.708 1.697 k₁₀ 0.053 0.047 d₁₀ (nm) 218.342 278.070 n₂₀ 1.707 1.702 k₂₀ 0.161 0.156 d₂₀ (nm) 262.805 262.294 When n₁ ≧ n₁₀, n_(1m) = 1.740 1.735 When n₁ < n₁₀, n_(1m) = 1.695 1.657 When k₁ ≧ k₁₀, k_(1m) = 0.077 0.077 When k₁ < k₁₀, k_(1m) = 0.032 0.024 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 208.328 215.902 When n₂ ≧ n₂₀, n_(2m) = 1.805 1.806 When n₂ < n₂₀, n_(2m) = 1.580 1.618 When k₂ ≧ k₂₀, k_(2m) = 0.232 0.224 When k₂ < k₂₀, k_(2m) = 0.108 0.097 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 195.570 182.960

1.3 < NA ≦ 1.4 75 < T ≦ 85 9/20 Case 8-01 8-02 8-03 8-04 8-05 n₁₀ 1.908 1.871 1.869 1.706 1.705 k₁₀ 0.087 0.097 0.067 0.067 0.058 d₁₀ (nm) 17.362 14.654 13.479 224.641 220.026 n₂₀ 1.802 1.704 1.729 1.684 1.694 k₂₀ 0.342 0.250 0.214 0.248 0.194 d₂₀ (nm) 141.959 212.121 265.153 139.263 197.616 When n₁ ≧ n₁₀, n_(1m) = 1.960 1.935 1.947 1.720 1.721 When n₁ < n₁₀, n_(1m) = 1.891 1.843 1.828 1.704 1.694 When k₁ ≧ k₁₀, k_(1m) = 0.111 0.140 0.128 0.074 0.078 When k₁ < k₁₀, k_(1m) = 0.023 0.016 0.000 0.049 0.035 When d₁ ≧ d₁₀, d_(1m) 21.165 19.437 19.380 236.042 243.446 (nm) = When d₁ < d₁₀, d_(1m) 16.261 12.685 10.599 223.100 210.844 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.843 1.746 1.787 1.711 1.754 When n₂ < n₂₀, n_(2m) = 1.713 1.604 1.618 1.641 1.649 When k₂ ≧ k₂₀, k_(2m) = 0.382 0.288 0.262 0.299 0.249 When k₂ < k₂₀, k_(2m) = 0.279 0.196 0.159 0.184 0.134 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ 151.104 ∞ (nm) = When d₂ < d₂₀, d_(2m) 126.652 177.678 187.664 128.169 181.064 (nm) = 1.3 < NA ≦ 1.4 75 < T ≦ 85 Case 8-06 8-07 n₁₀ 1.708 1.697 k₁₀ 0.054 0.048 d₁₀ (nm) 218.429 277.999 n₂₀ 1.707 1.702 k₂₀ 0.165 0.160 d₂₀ (nm) 253.768 253.663 When n₁ ≧ n₁₀, n_(1m) = 1.739 1.730 When n₁ < n₁₀, n_(1m) = 1.697 1.656 When k₁ ≧ k₁₀, k_(1m) = 0.076 0.076 When k₁ < k₁₀, k_(1m) = 0.032 0.027 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 209.931 217.650 When n₂ ≧ n₂₀, n_(2m) = 1.810 1.804 When n₂ < n₂₀, n_(2m) = 1.580 1.625 When k₂ ≧ k₂₀, k_(2m) = 0.235 0.225 When k₂ < k₂₀, k_(2m) = 0.109 0.100 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 216.664 177.272

1.3 < NA ≦ 1.4 85 < T ≦ 95 10/20 Case 9-01 9-02 9-03 9-04 9-05 9-06 n₁₀ 1.918 1.876 1.874 1.706 1.709 1.697 k₁₀ 0.092 0.100 0.069 0.060 0.055 0.050 d₁₀ (nm) 17.977 14.944 13.674 219.996 218.382 278.074 n₂₀ 1.822 1.706 1.733 1.694 1.707 1.701 k₂₀ 0.371 0.265 0.224 0.203 0.172 0.166 d₂₀ (nm) 132.466 203.140 256.300 189.146 245.309 245.468 When n₁ ≧ n₁₀, n_(1m) = 1.966 1.936 1.950 1.723 1.738 1.728 When n₁ < n₁₀, n_(1m) = 1.905 1.851 1.836 1.696 1.699 1.655 When k₁ ≧ k₁₀, k_(1m) = 0.109 0.138 0.126 0.078 0.075 0.075 When k₁ < k₁₀, k_(1m) = 0.028 0.021 0.000 0.035 0.032 0.029 When d₁ ≧ d₁₀, d_(1m) (nm) = 21.461 19.418 19.237 242.566 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 17.167 13.206 11.040 212.120 211.373 219.101 When n₂ ≧ n₂₀, n_(2m) = 1.855 1.745 1.789 1.754 1.811 1.805 When n₂ < n₂₀, n_(2m) = 1.737 1.611 1.626 1.644 1.579 1.636 When k₂ ≧ k₂₀, k_(2m) = 0.407 0.300 0.271 0.255 0.237 0.226 When k₂ < k₂₀, k_(2m) = 0.308 0.211 0.169 0.143 0.115 0.106 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 121.537 173.052 183.002 168.954 213.072 172.052

1.3 < NA ≦ 1.4 95 < T ≦ 105 11/20 10-01 10-02 10-03 10-04 10-05 n₁₀ 1.929 1.883 1.880 1.707 1.709 k₁₀ 0.101 0.103 0.071 0.062 0.057 d₁₀ (nm) 17.864 14.973 13.709 219.774 218.071 n₂₀ 1.821 1.709 1.736 1.693 1.706 k₂₀ 0.398 0.279 0.234 0.214 0.179 d₂₀ (nm) 125.532 194.479 247.823 180.753 237.020 When n₁ ≧ n₁₀, n_(1m) = 1.973 1.940 1.953 1.724 1.737 When n₁ < n₁₀, n_(1m) = 1.922 1.863 1.845 1.698 1.701 When k₁ ≧ k₁₀, k_(1m) = 0.111 0.136 0.124 0.077 0.074 When k₁ < k₁₀, k_(1m) = 0.042 0.027 0.000 0.035 0.034 When d₁ ≧ d₁₀, d_(1m) 20.839 19.023 18.857 241.722 ∞ (nm) = When d₁ < d₁₀, d_(1m) 17.465 13.566 11.352 213.515 212.546 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.840 1.742 1.789 1.751 1.807 When n₂ < n₂₀, n_(2m) = 1.743 1.619 1.632 1.642 1.577 When k₂ ≧ k₂₀, k_(2m) = 0.418 0.310 0.278 0.260 0.236 When k₂ < k₂₀, k_(2m) = 0.340 0.227 0.180 0.155 0.122 When d₂ ≧ d₂₀, d_(2m) 161.544 ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 119.422 166.497 178.361 161.067 205.891 (nm) = 1.3 < NA ≦ 1.4 95 < T ≦ 105 Case 10-06 n₁₀ 1.697 k₁₀ 0.047 d₁₀ (nm) 275.083 n₂₀ 1.700 k₂₀ 0.148 d₂₀ (nm) 295.680 When n₁ ≧ n₁₀, n_(1m) = 1.768 When n₁ < n₁₀, n_(1m) = 1.650 When k₁ ≧ k₁₀, k_(1m) = 0.079 When k₁ < k₁₀, k_(1m) = 0.023 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ When d₁ < d₁₀, d_(1m) (nm) = 200.276 When n₂ ≧ n₂₀, n_(2m) = 1.849 When n₂ < n₂₀, n_(2m) = 1.604 When k₂ ≧ k₂₀, k_(2m) = 0.227 When k₂ < k₂₀, k_(2m) = 0.093 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ When d₂ < d₂₀, d_(2m) (nm) = 212.971

1.3 < NA ≦ 1.4 105 < T ≦ 115 12/20 Case 11-01 11-02 11-03 11-04 11-05 n₁₀ 1.891 1.885 1.707 1.709 1.697 k₁₀ 0.108 0.074 0.064 0.058 0.048 d₁₀ (nm) 14.702 13.594 219.485 217.678 275.043 n₂₀ 1.707 1.735 1.692 1.705 1.701 k₂₀ 0.289 0.241 0.223 0.184 0.152 d₂₀ (nm) 186.368 239.426 171.867 228.411 286.426 When n₁ ≧ n₁₀, n_(1m) = 1.944 1.955 1.723 1.736 1.767 When n₁ < n₁₀, n_(1m) = 1.874 1.853 1.700 1.703 1.650 When k₁ ≧ k₁₀, k_(1m) = 0.135 0.124 0.077 0.073 0.078 When k₁ < k₁₀, k_(1m) = 0.035 0.000 0.037 0.036 0.023 When d₁ ≧ d₁₀, d_(1m) 18.320 18.363 240.271 ∞ ∞ (nm) = When d₁ < d₁₀, d_(1m) 13.618 11.476 214.658 213.396 201.239 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.733 1.786 1.744 1.797 1.850 When n₂ < n₂₀, n_(2m) = 1.620 1.632 1.646 1.574 1.606 When k₂ ≧ k₂₀, k_(2m) = 0.314 0.282 0.261 0.232 0.229 When k₂ < k₂₀, k_(2m) = 0.241 0.188 0.163 0.126 0.094 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 157.397 173.024 156.390 195.169 202.551 (nm) =

1.3 < NA ≦ 1.4 115 < T ≦ 125 13/20 Case 12-01 12-02 12-03 12-04 12-05 n₁₀ 1.896 1.887 1.692 1.707 1.709 k₁₀ 0.113 0.078 0.059 0.065 0.059 d₁₀ (nm) 14.435 13.577 153.772 219.581 217.561 n₂₀ 1.703 1.733 1.694 1.692 1.702 k₂₀ 0.295 0.244 0.154 0.231 0.188 d₂₀ (nm) 177.615 230.253 284.837 161.904 219.131 When n₁ ≧ n₁₀, n_(1m) = 1.947 1.955 1.718 1.720 1.728 When n₁ < n₁₀, n_(1m) = 1.882 1.856 1.664 1.701 1.703 When k₁ ≧ k₁₀, k_(1m) = 0.136 0.126 0.090 0.076 0.072 When k₁ < k₁₀, k_(1m) = 0.044 0.000 0.044 0.041 0.040 When d₁ ≧ d₁₀, d_(1m) 17.718 18.125 175.199 231.299 ∞ (nm) = When d₁ < d₁₀, d_(1m) 13.578 11.595 128.388 215.799 214.049 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.725 1.783 1.772 1.738 1.784 When n₂ < n₂₀, n_(2m) = 1.617 1.629 1.642 1.658 1.629 When k₂ ≧ k₂₀, k_(2m) = 0.315 0.284 0.182 0.262 0.229 When k₂ < k₂₀, k_(2m) = 0.249 0.192 0.119 0.174 0.128 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 145.196 165.335 240.440 152.266 193.496 (nm) = 1.3 < NA ≦ 1.4 115 < T ≦ 125 Case 12-06 12-07 n₁₀ 1.707 1.697 k₁₀ 0.053 0.048 d₁₀ (nm) 216.484 274.812 n₂₀ 1.695 1.701 k₂₀ 0.157 0.154 d₂₀ (nm) 278.062 276.656 When n₁ ≧ n₁₀, n_(1m) = 1.748 1.768 When n₁ < n₁₀, n_(1m) = 1.689 1.651 When k₁ ≧ k₁₀, k_(1m) = 0.077 0.078 When k₁ < k₁₀, k_(1m) = 0.030 0.024 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 199.849 201.932 When n₂ ≧ n₂₀, n_(2m) = 1.761 1.850 When n₂ < n₂₀, n_(2m) = 1.583 1.607 When k₂ ≧ k₂₀, k_(2m) = 0.215 0.229 When k₂ < k₂₀, k_(2m) = 0.104 0.098 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 212.463 192.106

1.3 < NA ≦ 1.4 125 < T ≦ 135 14/20 Case 13-01 13-02 13-03 13-04 13-05 n₁₀ 1.898 1.885 1.868 1.707 1.708 k₁₀ 0.115 0.081 0.075 0.067 0.060 d₁₀ (nm) 14.632 13.917 12.752 219.938 217.756 n₂₀ 1.705 1.732 1.713 1.695 1.701 k₂₀ 0.303 0.248 0.206 0.239 0.192 d₂₀ (nm) 166.646 219.851 279.921 151.390 209.457 When n₁ ≧ n₁₀, n_(1m) = 1.949 1.951 1.949 1.716 1.721 When n₁ < n₁₀, n_(1m) = 1.886 1.855 1.830 1.703 1.704 When k₁ ≧ k₁₀, k_(1m) = 0.135 0.127 0.135 0.075 0.072 When k₁ < k₁₀, k_(1m) = 0.050 0.002 0.000 0.050 0.045 When d₁ ≧ d₁₀, d_(1m) 17.809 18.468 18.469 226.140 ∞ (nm) = When d₁ < d₁₀, d_(1m) 13.869 11.960 10.161 217.246 214.692 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.725 1.781 1.771 1.731 1.769 When n₂ < n₂₀, n_(2m) = 1.618 1.628 1.611 1.678 1.659 When k₂ ≧ k₂₀, k_(2m) = 0.322 0.288 0.250 0.263 0.228 When k₂ < k₂₀, k_(2m) = 0.256 0.194 0.153 0.185 0.138 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ 179.041 ∞ (nm) = When d₂ < d₂₀, d_(2m) 136.370 153.796 194.427 147.510 199.403 (nm) = 1.3 < NA ≦ 1.4 125 < T ≦ 135 Case 13-06 13-07 n₁₀ 1.706 1.696 k₁₀ 0.054 0.049 d₁₀ (nm) 217.065 274.075 n₂₀ 1.694 1.702 k₂₀ 0.160 0.157 d₂₀ (nm) 268.021 267.366 When n₁ ≧ n₁₀, n_(1m) = 1.746 1.770 When n₁ < n₁₀, n_(1m) = 1.690 1.651 When k₁ ≧ k₁₀, k_(1m) = 0.077 0.078 When k₁ < k₁₀, k_(1m) = 0.033 0.026 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 202.380 202.716 When n₂ ≧ n₂₀, n_(2m) = 1.761 1.853 When n₂ < n₂₀, n_(2m) = 1.586 1.608 When k₂ ≧ k₂₀, k_(2m) = 0.219 0.227 When k₂ < k₂₀, k_(2m) = 0.106 0.099 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 208.129 186.947

1.3 < NA ≦ 1.4 135 < T ≦ 145 15/20 Case 14-01 14-02 14-03 14-04 14-05 14-06 n₁₀ 1.899 1.882 1.870 1.708 1.707 1.696 k₁₀ 0.115 0.083 0.074 0.062 0.055 0.050 d₁₀ (nm) 15.367 14.477 13.063 217.887 217.378 273.384 n₂₀ 1.714 1.732 1.717 1.700 1.693 1.702 k₂₀ 0.318 0.256 0.212 0.197 0.164 0.160 d₂₀ (nm) 155.141 209.893 269.637 200.272 258.646 258.714 When n₁ ≧ n₁₀, n_(1m) = 1.949 1.947 1.949 1.716 1.744 1.741 When n₁ < n₁₀, n_(1m) = 1.888 1.854 1.833 1.704 1.691 1.652 When k₁ ≧ k₁₀, k_(1m) = 0.132 0.127 0.132 0.071 0.077 0.078 When k₁ < k₁₀, k_(1m) = 0.051 0.006 0.000 0.050 0.036 0.028 When d₁ ≧ d₁₀, d_(1m) (nm) = 18.581 19.085 18.767 ∞ ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 14.660 12.539 10.533 215.374 204.778 209.881 When n₂ ≧ n₂₀, n_(2m) = 1.733 1.780 1.774 1.754 1.760 1.859 When n₂ < n₂₀, n_(2m) = 1.627 1.630 1.611 1.677 1.592 1.608 When k₂ ≧ k₂₀, k_(2m) = 0.337 0.296 0.256 0.228 0.223 0.226 When k₂ < k₂₀, k_(2m) = 0.266 0.200 0.157 0.152 0.109 0.098 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 131.038 171.650 189.575 195.166 202.001 178.700

1.3 < NA ≦ 1.4 145 < T ≦ 155 16/20 Case 15-01 15-02 15-03 15-04 15-05 15-06 n₁₀ 1.903 1.884 1.874 1.708 1.707 1.696 k₁₀ 0.118 0.087 0.075 0.063 0.056 0.051 d₁₀ (nm) 16.130 14.896 13.357 217.693 217.044 273.493 n₂₀ 1.723 1.733 1.722 1.700 1.694 1.702 k₂₀ 0.340 0.268 0.221 0.205 0.169 0.165 d₂₀ (nm) 145.164 201.113 260.240 191.744 250.083 250.180 When n₁ ≧ n₁₀, n_(1m) = 1.950 1.946 1.951 1.714 1.742 1.738 When n₁ < n₁₀, n_(1m) = 1.895 1.858 1.839 1.706 1.694 1.652 When k₁ ≧ k₁₀, k_(1m) = 0.130 0.127 0.128 0.070 0.076 0.078 When k₁ < k₁₀, k_(1m) = 0.053 0.010 0.000 0.053 0.038 0.031 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.240 19.361 18.857 222.035 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 15.619 13.105 10.992 216.109 206.771 213.326 When n₂ ≧ n₂₀, n_(2m) = 1.737 1.779 1.777 1.735 1.755 1.839 When n₂ < n₂₀, n_(2m) = 1.641 1.636 1.612 1.682 1.595 1.609 When k₂ ≧ k₂₀, k_(2m) = 0.356 0.307 0.265 0.225 0.223 0.227 When k₂ < k₂₀, k_(2m) = 0.286 0.211 0.166 0.161 0.114 0.102 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 126.286 170.199 185.156 187.971 215.684 171.738

1.3 < NA ≦ 1.4 155 < T ≦ 165 17/20 Case 16-01 16-02 16-03 16-04 16-05 16-06 n₁₀ 1.913 1.891 1.879 1.709 1.708 1.696 k₁₀ 0.125 0.091 0.077 0.064 0.057 0.052 d₁₀ (nm) 16.406 14.954 13.440 217.197 216.333 274.035 n₂₀ 1.727 1.734 1.724 1.700 1.694 1.700 k₂₀ 0.366 0.282 0.231 0.214 0.175 0.171 d₂₀ (nm) 136.777 193.024 251.802 183.446 241.739 241.498 When n₁ ≧ n₁₀, n_(1m) = 1.955 1.950 1.953 1.714 1.742 1.735 When n₁ < n₁₀, n_(1m) = 1.910 1.868 1.847 1.708 1.697 1.651 When k₁ ≧ k₁₀, k_(1m) = 0.129 0.127 0.127 0.066 0.075 0.077 When k₁ < k₁₀, k_(1m) = 0.064 0.016 0.000 0.055 0.039 0.034 When d₁ ≧ d₁₀, d_(1m) (nm) = 19.185 19.061 18.574 220.596 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 16.268 13.452 11.329 216.874 208.223 215.451 When n₂ ≧ n₂₀, n_(2m) = 1.731 1.774 1.776 1.707 1.748 1.840 When n₂ < n₂₀, n_(2m) = 1.651 1.642 1.618 1.678 1.595 1.612 When k₂ ≧ k₂₀, k_(2m) = 0.371 0.317 0.273 0.218 0.220 0.229 When k₂ < k₂₀, k_(2m) = 0.314 0.227 0.177 0.165 0.120 0.108 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 121.662 164.818 180.821 179.468 209.260 166.208

1.3 < NA ≦ 1.4 165 < T ≦ 175 18/20 Case 17-01 17-02 17-03 17-04 n₁₀ 1.900 1.885 1.708 1.697 k₁₀ 0.097 0.082 0.058 0.048 d₁₀ (nm) 14.674 13.311 215.615 273.453 n₂₀ 1.732 1.722 1.694 1.699 k₂₀ 0.294 0.239 0.180 0.151 d₂₀ (nm) 185.336 243.911 233.152 289.720 When n₁ ≧ n₁₀, n_(1m) = 1.955 1.956 1.741 1.736 When n₁ < n₁₀, n_(1m) = 1.881 1.856 1.699 1.650 When k₁ ≧ k₁₀, k_(1m) = 0.126 0.128 0.074 0.080 When k₁ < k₁₀, k_(1m) = 0.023 0.000 0.039 0.020 When d₁ ≧ d₁₀, d_(1m) (nm) = 18.346 18.029 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 13.519 11.467 209.091 211.222 When n₂ ≧ n₂₀, n_(2m) = 1.767 1.769 1.740 1.868 When n₂ < n₂₀, n_(2m) = 1.645 1.618 1.591 1.614 When k₂ ≧ k₂₀, k_(2m) = 0.322 0.277 0.217 0.224 When k₂ < k₂₀, k_(2m) = 0.243 0.187 0.126 0.094 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 156.774 176.585 198.961 204.980 1.3 < NA ≦ 1.4 175 < T ≦ 185 Case 18-01 18-02 18-03 18-04 18-05 n₁₀ 1.908 1.888 1.708 1.709 1.697 k₁₀ 0.102 0.088 0.059 0.054 0.049 d₁₀ (nm) 14.316 13.163 215.377 215.137 273.522 n₂₀ 1.730 1.716 1.693 1.702 1.700 k₂₀ 0.303 0.243 0.185 0.158 0.154 d₂₀ (nm) 177.238 235.819 223.802 279.418 279.960 When n₁ ≧ n₁₀, n_(1m) = 1.960 1.956 1.740 1.745 1.734 When n₁ < n₁₀, n_(1m) = 1.893 1.861 1.700 1.696 1.657 When k₁ ≧ k₁₀, k_(1m) = 0.126 0.131 0.073 0.075 0.079 When k₁ < k₁₀, k_(1m) = 0.031 0.002 0.041 0.028 0.020 When d₁ ≧ d₁₀, d_(1m) 17.569 17.540 ∞ ∞ ∞ (nm) = When d₁ < d₁₀, d_(1m) 13.467 11.504 209.546 205.939 213.387 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.759 1.759 1.736 1.790 1.874 When n₂ < n₂₀, n_(2m) = 1.644 1.611 1.587 1.604 1.617 When k₂ ≧ k₂₀, k_(2m) = 0.325 0.278 0.217 0.211 0.226 When k₂ < k₂₀, k_(2m) = 0.256 0.193 0.129 0.105 0.095 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 143.259 171.381 185.714 201.921 193.505 (nm) =

1.3 < NA ≦ 1.4 185 < T ≦ 195 19/20 Case 19-01 19-02 19-03 19-04 19-05 n₁₀ 1.914 1.886 1.873 1.692 1.708 k₁₀ 0.104 0.093 0.070 0.060 0.060 d₁₀ (nm) 14.390 13.299 12.581 152.854 215.913 n₂₀ 1.735 1.710 1.721 1.693 1.692 k₂₀ 0.314 0.247 0.208 0.157 0.189 d₂₀ (nm) 166.400 226.131 280.628 278.359 213.567 When n₁ ≧ n₁₀, n_(1m) = 1.964 1.952 1.955 1.709 1.739 When n₁ < n₁₀, n_(1m) = 1.903 1.860 1.833 1.664 1.699 When k₁ ≧ k₁₀, k_(1m) = 0.123 0.135 0.133 0.092 0.074 When k₁ < k₁₀, k_(1m) = 0.040 0.012 0.000 0.042 0.044 When d₁ ≧ d₁₀, d_(1m) 17.353 17.539 18.087 163.046 ∞ (nm) = When d₁ < d₁₀, d_(1m) 13.759 11.668 9.947 129.659 210.046 (nm) = When n₂ ≧ n₂₀, n_(2m) = 1.759 1.750 1.778 1.784 1.739 When n₂ < n₂₀, n_(2m) = 1.648 1.604 1.614 1.659 1.586 When k₂ ≧ k₂₀, k_(2m) = 0.331 0.280 0.252 0.196 0.222 When k₂ < k₂₀, k_(2m) = 0.267 0.196 0.156 0.120 0.129 When d₂ ≧ d₂₀, d_(2m) ∞ ∞ ∞ ∞ ∞ (nm) = When d₂ < d₂₀, d_(2m) 144.756 162.922 193.262 243.485 177.669 (nm) = 1.3 < NA ≦ 1.4 185 < T ≦ 195 Case 19-06 19-07 n₁₀ 1.708 1.697 k₁₀ 0.054 0.050 d₁₀ (nm) 215.905 273.350 n₂₀ 1.701 1.701 k₂₀ 0.161 0.157 d₂₀ (nm) 269.362 270.178 When n₁ ≧ n₁₀, n_(1m) = 1.744 1.732 When n₁ < n₁₀, n_(1m) = 1.697 1.658 When k₁ ≧ k₁₀, k_(1m) = 0.075 0.078 When k₁ < k₁₀, k_(1m) = 0.029 0.021 When d₁ ≧ d₁₀, d_(1m) (nm) = ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 207.633 215.326 When n₂ ≧ n₂₀, n_(2m) = 1.795 1.877 When n₂ < n₂₀, n_(2m) = 1.605 1.619 When k₂ ≧ k₂₀, k_(2m) = 0.216 0.228 When k₂ < k₂₀, k_(2m) = 0.105 0.098 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 205.481 189.945

1.3 < NA ≦ 1.4 195 < T ≦ 205 20/20 Case 20-01 20-02 20-03 20-04 20-05 20-06 n₁₀ 1.918 1.883 1.874 1.707 1.708 1.697 k₁₀ 0.103 0.095 0.068 0.061 0.055 0.050 d₁₀ (nm) 15.177 13.742 12.955 216.749 216.874 272.522 n₂₀ 1.753 1.708 1.728 1.693 1.699 1.701 k₂₀ 0.331 0.252 0.214 0.194 0.165 0.160 d₂₀ (nm) 153.467 215.835 269.400 203.628 259.716 261.468 When n₁ ≧ n₁₀, n_(1m) = 1.966 1.948 1.955 1.739 1.743 1.731 When n₁ < n₁₀, n_(1m) = 1.909 1.857 1.835 1.699 1.698 1.652 When k₁ ≧ k₁₀, k_(1m) = 0.117 0.137 0.128 0.075 0.075 0.078 When k₁ < k₁₀, k_(1m) = 0.043 0.016 0.000 0.048 0.030 0.022 When d₁ ≧ d₁₀, d_(1m) (nm) = 18.089 18.051 18.523 256.743 ∞ ∞ When d₁ < d₁₀, d_(1m) (nm) = 14.663 12.041 10.348 210.937 209.294 217.122 When n₂ ≧ n₂₀, n_(2m) = 1.773 1.748 1.785 1.744 1.800 1.874 When n₂ < n₂₀, n_(2m) = 1.665 1.604 1.616 1.589 1.608 1.620 When k₂ ≧ k₂₀, k_(2m) = 0.348 0.285 0.259 0.230 0.223 0.227 When k₂ < k₂₀, k_(2m) = 0.278 0.199 0.159 0.145 0.109 0.100 When d₂ ≧ d₂₀, d_(2m) (nm) = ∞ ∞ ∞ ∞ ∞ ∞ When d₂ < d₂₀, d_(2m) (nm) = 140.260 150.984 188.160 180.549 200.943 184.530.


6. The exposure method according to any one of claims 1 to 5, wherein the relations d₁≦250 and d₂≦250 are satisfied.
 7. The exposure method according to any one of claims 1 to 5, wherein the refractive index of the resist layer is 1.60 to 1.80.
 8. The exposure method according to any one of claims 1 to 5, wherein a topcoat layer is formed on the resist layer.
 9. The exposure method according to any one of claims 1 to 5, wherein the space between the resist layer and the exposure system is filled with a medium having a refractive index of 1.44±0.02.
 10. The exposure method according to Claim 9, wherein the medium is water. 